CN107271939A - A kind of capacitor sensor structure capacitance-resistance tests switching device - Google Patents
A kind of capacitor sensor structure capacitance-resistance tests switching device Download PDFInfo
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- CN107271939A CN107271939A CN201710475347.5A CN201710475347A CN107271939A CN 107271939 A CN107271939 A CN 107271939A CN 201710475347 A CN201710475347 A CN 201710475347A CN 107271939 A CN107271939 A CN 107271939A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
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- Measurement Of Resistance Or Impedance (AREA)
Abstract
The present invention discloses a kind of capacitor sensor structure capacitance-resistance test switching device, it is used for including double-point double-throw switch and six single-pole single-throw switch (SPST)s and one group and test single-pole single-throw switch (SPST) that differential capacitance fixed electrode to be measured is connected, designed for the relative design feature with multiple fixed electrodes of one movable electrode of capacitance sensor, double-point double-throw switch realizes the switching of external testing instrument, first single-pole single-throw switch (SPST) realizes the control of external datum port, each fixed electrode configures two circuit controls switches and constitutes test branch road, the Switch Control to n differential capacitance structure capacitance-resistance test loop is realized with reference to selection branch road and handoff leg；By the way of the discrete connection in port, two single-pole single-throw switch (SPST)s need to only be increased by often increasing an electrode test port newly, realize that tested port and external testing instrument are loop-coupled simultaneously, make arbitrarily connect between non-tested port, maximum ports-Extending can be realized under limited hardware condition.
Description
Technical field
The present invention relates to capacitance type sensor technical field of measurement and test, specifically a kind of capacitor sensor structure capacitance-resistance test is opened
Close device.
Background technology
Many sensitive structures using differential capacitance form are designed inside capacitance type sensor, i.e., one movable public electrode pair
Multiple fixed electrodes are answered, each two fixed electrode constitutes one group of differential capacitance with movable public electrode, it is poor ideally to constitute
It is divided to the static capacitance of corresponding two discrete capacitor of electric capacity equal, but is due to have structure design to deviate and technique processing mistake
Difference occurs in the factors such as difference, the lower capacitance of two differential capacitance static state, and What is more because manufacturing deficiency causes capacitor plate to go out
Existing adhesion phenomenon, sensor internal sensitive structure disabler.Therefore capacitance type sensor before application need to be first against in it
The technique machining state of the sensitive structure that portion is made up of differential capacitance pair carries out preliminary assessment, using structure resistance more than the method for evaluation
The mode for holding detection is carried out.
High-performance electric capacity sensor is to avoid driving and detect the coupling between signal, many shapes isolated using physical arrangement
Formula is designed, while in order to improve driving force, leggy type of drive is also widely used, is so improving the base of sensor performance
Also cause sensor internal structure differential capacitance pair quantity to increase considerably on plinth, carry out the port of structure capacitance-resistance parameter evaluation
Corresponding increase.Other part capacitance type sensor is carrying out tested end due to the processing of internal structure technique and the particularity of material
Requirement it is also proposed intercommunity non-tested port while mouth test, now the switch combination unit of design specialized turns into
Capacitance sensor test port switches main selection mode.It is increasingly sophisticated in face of structure, the increasing capacitance sensing in port
Device, with reference to capacitor sensor structure capacitance-resistance testing feature, design has the logical of port scalability based on switch combination form
Require increasingly urgent with switching device.
It is many currently for the matrix arrangement formed based on switch combination, use the form of row-column configuration more, it is this
Mode is more flexible for any break-make control between row and column, but increase full line permutation switch is then needed for ECP Extended Capabilities Port
Combination, the switch hardware of application is relatively more.Such as《Based on the design of single-chip programming control matrix switch》（Journal article, author：Zhu De
Victory, is published in《Electronic measurement technique》6th phase in 2002）This determinant switch matrix design is just discussed, M × N can be completed
（M represents line number, and N represents columns）The break-make of individual switch room.Expand on the premise of now there is intercommunity in port between ensureing ranks
A test port is opened up, then needs increase（M+1）+ N number of switch, this switch combination form is for the more electric capacity of test port
For formula sensor, design more numerous and diverse, simultaneously because being limited by switchboard size, the leeway of ports-Extending is also limited.
The content of the invention
Switching device is tested it is an object of the invention to provide a kind of capacitor sensor structure capacitance-resistance, the switching device can
Realizing that tested port is loop-coupled simultaneously with external meters, making arbitrarily connect between non-tested port, and simple in construction,
Autgmentability is strong, applied widely.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of capacitor sensor structure capacitance-resistance tests switching device, including double-point double-throw switch and six single-pole single-throw switch (SPST)s, double
One group of contact of double-pole double throw switch is connected with external capacitive table test lead port, another group of contact and non-essential resistance table test port
It is connected；
One end of first single-pole single-throw switch (SPST) is connected with external datum incoming end Vref, the second single-pole single-throw switch (SPST) and the 3rd
Single-pole single-throw switch (SPST), which is in series, constitutes selection branch road, and the other end of the first single-pole single-throw switch (SPST) is connected to the second single-pole single-throw switch (SPST)
With the connection end between the 3rd single-pole single-throw switch (SPST)；
One end of 4th single-pole single-throw switch (SPST) respectively with select branch road one end and double-point double-throw switch one of them is public
End is connected, and the other end of the 4th single-pole single-throw switch (SPST) is used to be connected with one end of differential capacitance movable electrode to be measured；
5th single-pole single-throw switch (SPST) and the 6th single-pole single-throw switch (SPST) are in series composition handoff leg, differential capacitance movable electrode to be measured
The other end be connected to connection end between the 5th single-pole single-throw switch (SPST) and the 6th single-pole single-throw switch (SPST)；
The switching device also includes one group of test single-pole single-throw switch (SPST) for being used to be connected with differential capacitance fixed electrode to be measured, often
Individual fixed electrode two ends connect a test single-pole single-throw switch (SPST) and constitute test branch road, the handoff leg and all surveys respectively
Try branch road it is in parallel successively, one end of parallel circuit is connected with another common port of double-point double-throw switch, parallel circuit it is another
The other end with the selection branch road is held to be connected.
The beneficial effects of the invention are as follows：
First, designed for the relative design feature with multiple fixed electrodes of one movable electrode of capacitance sensor, DPDT is opened
The switching for realizing external testing instrument is closed, the first single-pole single-throw switch (SPST) realizes the control of external datum port, it is each fixed
Two circuit controls switches of electrode configuration constitute test branch road, are realized with reference to selection branch road with handoff leg to n differential capacitance
The Switch Control of structure capacitance-resistance test loop；By the way of the discrete connection in port, tested port and external testing are realized
While instrument circuit is connected, make arbitrarily connect between non-tested port；
2nd, external datum port is configured, each test port external pressurized break-make control is met and requires；
3rd, using the discrete switch connected mode in port, often a newly-increased electrode test port need to only increase by two single-pole single-throw(SPSTs and open
Pass, realizes maximum ports-Extending under limited hardware condition.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples：
Fig. 1 is the circuit theory schematic diagram of the present invention；
Fig. 2 is the schematic diagram of the present embodiment capacitance sensor to be tested.
Embodiment
With reference to shown in Fig. 1 and Fig. 2, the present invention provides a kind of capacitor sensor structure capacitance-resistance test switching device, including double
Double-pole double throw switch S0 and six single-pole single-throw switch (SPST)s, double-point double-throw switch S0 one group of contact and external capacitive table test lead port
CVL, CVH are connected, and another group of contact is connected with non-essential resistance table test port SMU1, SMU2；
First single-pole single-throw switch (SPST) S1 one end is connected with external datum incoming end Vref, the second single-pole single-throw switch (SPST) S2 with
3rd single-pole single-throw switch (SPST) S3, which is in series, constitutes selection branch road, and the first single-pole single-throw switch (SPST) S1 other end is connected to the second hilted broadsword
Connection end between single-throw switch S2 and the 3rd single-pole single-throw switch (SPST) S3；
4th single-pole single-throw switch (SPST) S4 one end respectively with select branch road one end and double-point double-throw switch S0 one of them
Common port is connected, and the 4th single-pole single-throw switch (SPST) S4 other end is used for one end phase with differential capacitance movable electrode Psum to be measured
Even；
5th single-pole single-throw switch (SPST) S5 and the 6th single-pole single-throw switch (SPST) S6 are in series composition handoff leg, and differential capacitance to be measured is movable
The electrode Psum other end is connected to the connection end between the 5th single-pole single-throw switch (SPST) S5 and the 6th single-pole single-throw switch (SPST) S6；
The switching device also includes one group of test single-pole single-throw switch (SPST) for being used to be connected with differential capacitance fixed electrode to be measured, often
Individual fixed electrode two ends connect a test single-pole single-throw switch (SPST) and constitute test branch road respectively, for the present embodiment, are passed by electric capacity
Sensor is internal three differential capacitance pairs, namely six fixed electrode P1~P6, fixed electrode P1 two ends difference connecting test list
Monopole single throw switch S7, S8, fixed electrode P2 two ends difference connecting test single-pole single-throw switch (SPST) S9, S10, fixed electrode P3 two ends point
Other connecting test single-pole single-throw switch (SPST) S11, S12, fixed electrode P4 two ends difference connecting test single-pole single-throw switch (SPST) S13, S14,
Distinguish connecting test single-pole single-throw switch (SPST) S15, S16, fixed electrode P6 two ends difference connecting test hilted broadsword in fixed electrode P5 two ends
Single-throw switch S17, S18；The handoff leg and all test branch roads are in parallel successively, one end of parallel circuit and DPDT
Another common port for switching S0 is connected, and the other end of parallel circuit is connected with the other end of the selection branch road.
The two states of double-point double-throw switch：Interlocked between COM-NC connections, COM-NO connection two states, it is only a kind of
Connected state is present, and switch original state connects for COM-NC, is without connectedness between double-pole switch.
The two states of single-pole single-throw switch (SPST)：COM=1 is connected, and COM=0 disconnects, and switch is in disconnection shape under original state
State.
In an initial condition, all single-pole single-throw switch (SPST)s are off-state；Double-point double-throw switch connects for COM-NC, i.e., outer
Portion's ohmmeter test lead is connected with interior arrangement loop.
For measurement request 1：" resistance and capacitance between P1, P2 and Psum are measured respectively, wherein when carrying out capacitance measurement,
The non-whole short circuits of tested port requirements are simultaneously connected with Vref ends ", the course of work is described in detail as follows：
First, resistance measurement loop between P1 and Psum：S4 connections are switched, Psum ends are connected with non-essential resistance table SUM2 measurement ends, opened
S7 connections are closed, P1 is connected with non-essential resistance table SUM1 measurement ends, and remaining single-pole single-throw switch (SPST) is in initial off-state, in this time
Road lower outer portion instrument completes resistance measurement between P1 and Psum；
2nd, resistance measurement loop between P2 and Psum：Switch S7 to disconnect, disconnect P1 and the connection of SUM1 measurement ends, switch S4 connections,
Psum ends are connected with non-essential resistance table SUM2 measurement ends, and switch S9 connections, P2 is connected with non-essential resistance table SUM1 measurement ends, remaining
Single-pole single-throw switch (SPST) is in initial off-state, the resistance measurement between this loop lower outer portion instrument completes P2 and Psum；
3rd, capacitance measuring circuit between P1 and Psum：Switch S9 to disconnect, cut-out P2 and SMU1 link circuits, switch S4 keep connection,
Double-point double-throw switch S0 switches to COM-ON connections by the COM-NC connections of initial state, and Psum ends are measured with external capacitive table CVL
End connection, switch S7 connections, P1 ends are connected with external capacitive table CVH measurement ends.Switch S10, S12, S14, S16, S18, S1, S3
Connected after connection, the now non-whole short circuits in tested port with external datum port Vref, it is complete in this loop lower outer portion instrument
Into capacitance measurement between P1 and Psum；
4th, capacitance measuring circuit between P2 and Psum：Switch S7 to disconnect, cut-out P1 ends and CVL link circuits, switch S10 disconnect, and open
S8 connections are closed, now remaining non-test end whole and connect short circuits with external datum end Vref in addition to P2 ports, switch S9
Connection, P2 ends are connected with CVH, and switch S4 connected states do not change, and Psum and CVL keeps connective, in this loop lower outer portion instrument
Table completes capacitance measurement between P2 and Psum.
For measurement request 2：" resistance and capacitance between P1, P2 and Psum are measured respectively, it is desirable to carrying out capacitance measurement
When, wherein one end is tested port and connected with external datum end Vref, and non-tested port is hanging ", the course of work is described in detail as follows：
First, resistance measurement loop between P1 and Psum：S4 connections are switched, Psum ends are connected with non-essential resistance table SUM2 measurement ends, opened
S7 connections are closed, P1 is connected with non-essential resistance table SUM1 measurement ends, and remaining single-pole single-throw switch (SPST) is in initial off-state, in this time
Road lower outer portion instrument completes resistance measurement between P1 and Psum；
2nd, resistance measurement loop between P2 and Psum：Switch S7 to disconnect, disconnect P1 and the connection of SUM1 measurement ends, switch S4 connections,
Psum ends are connected with non-essential resistance table SUM2 measurement ends, and switch S9 connections, P2 is connected with non-essential resistance table SUM1 measurement ends, remaining
Single-pole single-throw switch (SPST) is in initial off-state, the resistance measurement between this loop lower outer portion instrument completes P2 and Psum；
3rd, capacitance measuring circuit between P1 and Psum：Switch S9 to disconnect, cut-out P2 and SMU1 link circuits, switch S4 keep connection,
Double-point double-throw switch S0 switches to COM-ON connections by the COM-NC connections of initial state, and Psum ends are measured with external capacitive table CVL
End connection, switch S7 connections, P1 ends are connected with external capacitive table CVH measurement ends；S1, S3 connection are switched, is specified according in test
Port connects requirement, switch S6 or S8 connections, correspondence Psum or P1 and external datum end with external datum end Vref
Vref is connected, and rest switch is in original state attonity in device；Under this loop, external meters complete electricity between P1 and Psum
Hold measurement；
4th, capacitance measuring circuit between P2 and Psum：Switch S7 to disconnect, cut-out P1 and CVH link circuits, switch S6 or S8 disconnect,
Cut off Psum or P1 and external datum end Vref link circuit；S9 connections are switched, P2 ends are measured with external capacitive table CVH
End connection, requirement, switch S6 or S10 connections, correspondence are connected with external datum end Vref according to designated port in test
Psum or P2 is connected with external datum end Vref, and rest switch is in original state attonity in device；Under this loop,
External meters complete capacitance measurement between P2 and Psum.
As shown in the above, this switching device can be according to the quantity expanding port of differential capacitance pair, Jin Ershi
The sensor construction capacitance-resistance test of the multigroup differential capacitance pair increasingly sophisticated for structure, is designed using switching device of the present invention and expanded
One fixed electrode port of exhibition differential capacitance can only be completed by two single-pole single-throw switch (SPST)s.The present embodiment sensor internal by
Six fixed electrodes of P1~P6 separately constitute three differential capacitance pairs with movable electrode Psum, are surveyed for the sensor construction capacitance-resistance
Trying switching device, totally 18 switches are constituted by S0~S18, when tested sensor is internal four differential capacitance pairs, and newly-increased two
Individual fixed electrode test port only needs to access switching device according to the pattern that a port increases by two single-pole single-throw switch (SPST)s, just
The increased sensor internal structure capacitance-resistance test request of differential capacitance pair can be met, i.e., for the 4th pair of differential capacitance, is only needed new
Increase four switches.
The above described is only a preferred embodiment of the present invention, not making any formal limitation to the present invention；Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible variations and modification to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore, every content without departing from technical solution of the present invention, the technical spirit according to the present invention is done to above example
Any simple modification, equivalent substitution, equivalence changes and modification, still fall within technical solution of the present invention protection in the range of.
Claims (1)
1. a kind of capacitor sensor structure capacitance-resistance tests switching device, it is characterised in that including double-point double-throw switch and six lists
Monopole single throw switch, one group of contact of double-point double-throw switch is connected with external capacitive table test lead port, another group of contact and outside
Ohmmeter test port is connected；
One end of first single-pole single-throw switch (SPST) is connected with external datum incoming end Vref, the second single-pole single-throw switch (SPST) and the 3rd
Single-pole single-throw switch (SPST), which is in series, constitutes selection branch road, and the other end of the first single-pole single-throw switch (SPST) is connected to the second single-pole single-throw switch (SPST)
With the connection end between the 3rd single-pole single-throw switch (SPST)；
One end of 4th single-pole single-throw switch (SPST) respectively with select branch road one end and double-point double-throw switch one of them is public
End is connected, and the other end of the 4th single-pole single-throw switch (SPST) is used to be connected with one end of differential capacitance movable electrode to be measured；
5th single-pole single-throw switch (SPST) and the 6th single-pole single-throw switch (SPST) are in series composition handoff leg, differential capacitance movable electrode to be measured
The other end be connected to connection end between the 5th single-pole single-throw switch (SPST) and the 6th single-pole single-throw switch (SPST)；
The switching device also includes one group of test single-pole single-throw switch (SPST) for being used to be connected with differential capacitance fixed electrode to be measured, often
Individual fixed electrode two ends connect a test single-pole single-throw switch (SPST) and constitute test branch road, the handoff leg and all surveys respectively
Try branch road it is in parallel successively, one end of parallel circuit is connected with another common port of double-point double-throw switch, parallel circuit it is another
The other end with the selection branch road is held to be connected.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710475347.5A CN107271939A (en) | 2017-06-21 | 2017-06-21 | A kind of capacitor sensor structure capacitance-resistance tests switching device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710475347.5A CN107271939A (en) | 2017-06-21 | 2017-06-21 | A kind of capacitor sensor structure capacitance-resistance tests switching device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112345854A (en) * | 2020-10-30 | 2021-02-09 | 北京航天光华电子技术有限公司 | Two-port component measurement and test system between any two points |
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| CN1643342A (en) * | 2002-02-15 | 2005-07-20 | 罗斯蒙德公司 | Bridged capacitor sensor measurement circuit |
| CN101149391A (en) * | 2007-10-27 | 2008-03-26 | 中北大学 | Differential capacitance type sensor detection circuit |
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Application publication date: 20171020 |