CN107247225A

CN107247225A - A kind of calibration method tested based on ATE radio frequencies CP

Info

Publication number: CN107247225A
Application number: CN201710444970.4A
Authority: CN
Inventors: 邓维维; 张志勇; 王�华; 钭晓鸥; 罗斌
Original assignee: Sino IC Technology Co Ltd
Current assignee: Sino IC Technology Co Ltd
Priority date: 2017-06-12
Filing date: 2017-06-12
Publication date: 2017-10-13

Abstract

The invention discloses a kind of calibration method tested based on ATE radio frequencies CP, in radio frequency chip flow, making auxiliary goes embedding structure as standard component on disk.Auxiliary goes embedding structure to include three kinds of structures：Open a way (open), short-circuit (short), transmission line (thru).Embedding structural requirement is gone to correspond to the position of the radio frequency pin of measured device；The collimation technique tested based on ATE radio frequencies CP that the present invention is provided, embedding structure is gone by auxiliary so that the test error that test system impedance mismatch is brought is eliminated in the CP test process of radio frequency products.It is final to improve test yield so as to obtain more accurately test result, save testing cost.

Description

A kind of calibration method tested based on ATE radio frequencies CP

Technical field

This technology invention is that one kind is directed to radio frequency class product when carrying out CP tests using ATE (ATE), right A kind of its method calibrated.

Background technology

It is well known that needed during radio signal transmission transmission line can fully impedance matching, could so reduce signal Reflection.But ATE is when testing CP radio frequency productses, the radiofrequency signal sent by test machine can by test adaptor plate, Probe card is transferred to chip input, in the process, the signal source inside test machine to signal output port, pinboard and Cabling impedance matching in probe card is undesirable, connection, pinboard and the probe card of pinboard and test machine signal output port Connection, there is parasitic capacitor and inductor in probe contact with chip pin (pad), these necessarily cause radiofrequency signal can not Intact impedance matching, signal reflects in transmitting procedure, and the signal for eventually arriving at chip pin has damage on power Consume, and the delay in sequential etc..Equally, the signal of radio frequency chip output also needs just be sent to by probe card and pinboard Test machine is analyzed, and the impedance mismatch of transmission line will also result in us and cannot get real output result.This impedance Mismatch and carry out error to our calibration tape, but once product test hardware configuration, fixed, this error can exactly indicate and can Repeat, can be in test process by calibrating elimination so as to quantitative description.

The present invention proposes a kind of occurrence first tested standard component, record measurement system error, Ran Houtong Cross the method for calculating and processing being modified to chip under test test result.The method can eliminate the mistake in radio frequency products CP tests Difference.

The content of the invention

The present invention for solve the technical scheme that uses of above-mentioned technical problem be to provide it is a kind of based on ATE radio frequencies CP tests Calibration method, wherein, concrete technical scheme is：

The present invention proposes what a kind of influence caused in volume production test to test system impedance mismatch was calibrated Method, step includes：

In radio frequency chip flow, making auxiliary goes embedding structure as standard component on disk.Auxiliary goes embedding structure to include Three kinds of structures：Open a way (open), short-circuit (short), transmission line (thru).Embedding structural requirement is gone to correspond to the radio frequency of measured device The position of pin.

Further, S parameter is carried out in the frequency band that measured device works to standard component using ATE test resources passage Test.

Further, record the concrete numerical value by the way that obtained test system error is tested standard component, and data are literary Part is stored in inside test system.

Further, the standard component test data stored before is called, the ATE of measured device is surveyed by certain algorithm The result of test system is modified processing, eliminates wherein error percentage, obtains measured device actual value.

The present invention has the advantages that relative to prior art：The present invention proposes a kind of collimation technique, by auxiliary Help embedding structure so that the test error that test system impedance mismatch is brought is eliminated in the CP test process of radio frequency products. It is final to improve test yield so as to obtain more accurately test result, save testing cost.

Brief description of the drawings

Fig. 1 removes the schematic diagram of embedding structure for auxiliary.

Fig. 2 removes the schematic diagram of embedding result for auxiliary.

Fig. 3 is the schematic diagram of transmission line S parameter.

Fig. 4 is the schematic diagram of short-circuit S parameter.

Fig. 5 is the schematic diagram of open circuit S parameter.

Fig. 6 is the schematic diagram of 5nH_900MHz inductance S parameters.

Fig. 7 is the schematic diagram that 5nH_900MHz inductance goes embedding rear S parameter.

Embodiment

CP is tested：Wafer sort；

ATE：ATE, the test system combined by test machine and computer.

Usually require to use Network Analyzer during existing finished product (FT) radio frequency products test, Network Analyzer uses preceding It need to accordingly be calibrated, be come inside compensating test instrument, the systematic error that cable and adapter are brought, it is existing at present corresponding ripe Calibrating device and calibration method.But the test of the radio frequency products for wafer level, Network Analyzer does not support pin card probe The scheme of partial calibration.And Network Analyzer is generally used for engineering test, it is not appropriate for volume production and uses.

When ATE test equipments test CP radio frequency productses, tester table can also be calibrated to radio frequency resource, but also can only school Standard arrives test machine signal output port, can not then be calibrated for the transmission line after output port to chip pin.It is right The error brought in this part, in existing test, we often just do not deal with, or use the result tested using FT to be used as ginseng Examine, directly to offset, but this compensation is inaccurate, and radio frequency products has Frequency Response, i.e., at different frequencies, its The performance of loss is also different, so also brings the compensation work of complexity.

Its principle of the current calibration of mature Network Analyzer is that the measurement record based on the S parameter to standard component is protected Deposit, error term is compensated again during test.And existing radio frequency testing board also supports the test of S parameter.

In radio frequency chip flow, making auxiliary goes embedding structure as standard component on disk.Auxiliary goes embedding structure to include Three kinds of structures：Open a way (open), short-circuit (short), transmission line (thru) goes embedding structural requirement to correspond to the radio frequency of measured device The position of pin.

Now the application of the present invention in the test of a chip volume production is described in detail for embodiment：

Embodiment one：

This example is implemented in the test to inductance, by the test to inductance S parameter, by the measurable inductance of computing Inductance value and Q values.

1) mark included in the wafer in 9 kinds of inductance, figure indicates its inductance value and working frequency respectively, with 5nH_ Exemplified by 900MHz, the design inductance value for representing inductance is 5nH, and working frequency is 900MHz.In wafer manufacturing, we make with The corresponding standard component of Inductive position goes embedding result as auxiliary：Transmission line, short circuit, open circuit.

2) test system is before to inductance measurement, and probe card is first pricked on standard component, and auxiliary is measured respectively and goes embedding structure Transmission line, open circuit, the S parameter of short circuit, and preserve test data file.

3) test system tests the S parameter of this 9 kinds of inductance respectively.Below figure is by taking 5nH_900MHz inductance as an example.

4) test data file of standard component before calling, the S parameter of the inductance after De- embedding is obtained by calculating.It is as follows By taking 5nH_900MHz inductance as an example.

5) calculated by the extraction to S parameter, obtain the inductance value and Q values of inductance.

From test result it can be seen that：Standard component, which is made, as auxiliary on wafer during flow goes embedding structure, it is embedding by going Processing, can accurately measure the characterisitic parameter of inductance.

When being tested for CP radio frequency productses, the impedance mismatch of ATE test measurement circuitry causes test result to be forbidden Really, test failure is caused.It is proposed by the present invention it is a kind of can eliminate the collimation technique of ATE measurement circuitry systematic errors, so as to To more accurate more reliable test result.

Although the present invention is disclosed as above with preferred embodiment, so it is not limited to the present invention, any this area skill Art personnel, without departing from the spirit and scope of the present invention, when a little modification can be made and perfect, therefore the protection model of the present invention Enclose when by being defined that claims are defined.

Claims

1. a kind of calibration method tested based on ATE radio frequencies CP, it is characterised in that：In radio frequency chip flow, made on disk Embedding structure is gone as standard component as auxiliary.

2. the collimation technique as claimed in claim 1 tested based on ATE radio frequencies CP, it is characterised in that：Auxiliary removes embedding structure bag Containing three kinds of structures：Open circuit, short circuit, transmission line.

3. the collimation technique as claimed in claim 2 tested based on ATE radio frequencies CP, it is characterised in that：Remove embedding structural requirement pair Should be in the position of the radio frequency pin of measured device.

4. the collimation technique as claimed in claim 3 tested based on ATE radio frequencies CP, it is characterised in that：Utilize ATE test resources Passage carries out the test of S parameter to standard component in the frequency band that measured device works.

5. the collimation technique as claimed in claim 4 tested based on ATE radio frequencies CP, it is characterised in that：Record is by standard The concrete numerical value for the test system error that part test is obtained.

6. the collimation technique as claimed in claim 5 tested based on ATE radio frequencies CP, it is characterised in that：After record, by data text Part is stored in inside test system.

7. the collimation technique as claimed in claim 6 tested based on ATE radio frequencies CP, it is characterised in that：Call what is stored before Standard component test data, processing is modified to the result of the ATE test of measured device by algorithm, eliminates wherein error Composition, obtains measured device actual value.