CN107202549B - A kind of high precision three-dimensional measurement method and measuring instrument - Google Patents
A kind of high precision three-dimensional measurement method and measuring instrument Download PDFInfo
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- CN107202549B CN107202549B CN201710388224.8A CN201710388224A CN107202549B CN 107202549 B CN107202549 B CN 107202549B CN 201710388224 A CN201710388224 A CN 201710388224A CN 107202549 B CN107202549 B CN 107202549B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
A kind of high precision three-dimensional measurement method and measuring instrument, measurement method of the present invention include: characteristic point rotation collecting flowchart;Characteristic point coordinate calculation process;And final measurement.By rotating collecting flowchart in characteristic point, rotating table drives sample repeatedly to be rotated, change position of the characteristic point relative to microlens array, and arrangement of all characteristic points on element image, so that all characteristic points can be resolved in three-dimensional coordinate calculation stages, and the calculating of its three-dimensional coordinate can be used for, it solves the problems, such as that the characteristic point as caused by image sensor pixel can not be differentiated, improves measurement accuracy.
Description
Technical field
The invention belongs to three-dimensional measurement technical field more particularly to method for three-dimensional measurement and instrument.
Background technique
As micro-structure surface is in multi-field extensive use, the Ultra-precision Turning and measurement process of microstructure sample also draw
Extensive concern is played.Since the scale of micro-structure is smaller, and largely there is asymmetric, the higher characteristic of freedom degree, such as
Freeform optics surface, high-precision on-position measure technology are critically important for micro-structure surface.
The 3 d shape on-position measure of micro-structure surface is relatively conventional frequently with contactless measuring method at present
Have binocular vision method and structural light measurement method.Structural light measurement method leads to it due to the wrapped phase phenomenon of its restructuring procedure
Dynamic range is smaller.And its actual measurement system calibration process is complex, is not particularly suited for on-position measure.Though binocular vision method
The on-position measure of micro-structure surface, but this method low measurement accuracy may be implemented, if improving measurement accuracy, need to improve measurement
The complexity of system.
It is entitled " three-dimensional application No. is 201410357264.2 for the detection demand in place during Ultra-precision Turning
The patent application of measurement method and instrument " discloses a kind of for passing through setting microlens array and figure according to stereoscopic measurement method
The characteristic point of sample and the method for three-dimensional measurement of three-dimensional coordinate and instrument are measured as sensor, comprising the following steps: setting is micro-
Lens array makes the characteristic point on the surface to be measured on sample form multiple picture points by microlens array;Sensing plane is set, is obtained
The characteristic point on surface to be measured on sample is taken to be formed by multiple picture points on sensing plane;Mapped plan is set, and flat in mapping
Multiple mapping points are set on face;Correspond multiple mapping points and multiple picture points;Reunion focal plane is set, in reunion focal plane
Lattice array is assembled in upper setting, makes to assemble multiple convergent points that lattice array includes array arrangement;It is corresponding with mapping point to connect mapping point
Convergent point, to form multiple refocusing lines of characteristic point;Multiple refocusing lines intersect at reunion focus;Calculate refocusing
The three-dimensional coordinate of point, and the three-dimensional coordinate of characteristic point is calculated according to the three-dimensional coordinate of reunion focus;By the three-dimensional of characteristic point
Coordinate is shown.And the measuring instrument, system is simple, is easier to operate, and three-dimensional on-position measure may be implemented.
Though this method can come out the three-dimensional coordinate measurement of the characteristic point of sample, in the measurement process, due to sensing
The pixelation of plane influences, so that certain different characteristic points are recorded in the same pixel on sensing plane, this be will lead to
These characteristic points three-dimensional coordinate having the same reduces measurement accuracy to bring measurement error.It is a kind of it is new can be
Do not increase and realizes compared with the measurement method of high measurement accuracy it is highly important on the basis of the complexity of system.
Summary of the invention
Object of the present invention is to solve the method for the existing three-dimensional coordinate based on stereo measuring technology of image measurement sample characteristic point
In, the problem of due to sensing plane pixelation the problem of caused low measurement accuracy, propose a kind of high-precision measurement side
Method and measuring instrument.
Technical scheme is as follows:
A kind of high precision three-dimensional measurement method, comprising the following steps:
Step 1: characteristic point rotates collecting flowchart;The following steps are included:
S1, setting turntable, three-dimensional sample is fixed on turntable, sample is enable to surround the center of rotation of the turntable,
It is repeatedly rotated perpendicular in the plane of rotation axis according to preset angle;
S2, setting microlens array, making microlens array includes multiple unit sub-lens, and where making microlens array
For plane perpendicular to the rotation axis of turntable, the plane where microlens array is parallel to the turntable plane of turntable, and towards sample
Surface to be measured;
S3, setting imaging sensor, are placed in the other side of the microlens array relative to turntable for sensor, make sensor
Sensing plane is parallel to the plane where microlens array, using imaging sensor obtain comprising by microlens array formed to
The image of multiple picture points of surface characteristics point is surveyed, and the image that imaging sensor obtains is passed into information processing display portion and is carried out
It saves.Imaging sensor sensing plane is known as distance sensing at a distance from microlens array plane.
S4, the center of rotation by sample around turntable are repeatedly rotated in one direction, and each rotational angle is θ, are turned
Dynamic total degree is N, and the image comprising characteristic point picture point of imaging sensor acquisition is transmitted to information processing after rotation every time and is shown
Show that part is saved.The image saved after rotating each time is known as one group of element image EI, can get N group after rotating n times
Element image.
Step 2: characteristic point coordinate calculation process, comprising the following steps:
S01, reunion focal plane is set in a computer, lattice array is assembled in setting on reunion focal plane, convergent point and micro-
The center of each unit sub-lens is overlapped in lens array.Mapped plan is set, the mapped plan is parallel with reunion focal plane, and two
The distance of interplanar is the distance sensing, and the size of the mapped plan and the size of element image are identical;
S02, one group of element image is placed on mapped plan, take the characteristic point A on surface to be measured on element image
Multiple picture points are mapping point, and the convergent point on each mapping point and reunion focal plane corresponds.It connects every on mapped plan
A mapping point convergent point corresponding with the mapping point forms the reunion focal line of this feature point, and multiple reunion focal line intersects at reunion
Focus;
S03, N group element image is placed sequentially on mapping face, repeats S02 step, N number of reunion focus can be obtained;
S04, three-dimensional the sitting for establishing the sample place space i.e. three-dimensional system of coordinate of object space and reunion focus place space
Mark system;Keep the three-dimensional coordinate of object space corresponding with the three-dimensional coordinate of reunion focus space;
S05, each reunion focus A' is calculatedk, k=1,2,3N, the three-dimensional in space where reunion focus is sat
Three-dimensional coordinate in mark system show that center of rotation in the three-dimensional coordinate where the reunion focus in space, will meet again by calibration
Focus A'kIt is rotated around center of rotation, the rotation direction in the S4 of rotation direction and step 1 is on the contrary, rotational angle is θk, θk=
K* θ calculates reunion focus A'kCoordinate A " after rotationk, three-dimensional coordinate of the characteristic point A in space where reunion focus be
Step 3: carrying out coordinate conversion, obtain final measurement.
The space where reunion focus and the three-dimensional coordinate corresponding relationship of object space are obtained using the method for calibration, according to
The corresponding relationship of the three-dimensional coordinate of space and object space where reunion focus calculates characteristic point in the three-dimensional coordinate of object space;Meter
Calculate the three-dimensional coordinate of final characteristic point.
Step 2 characteristic point coordinate calculation process and the conversion of step 3 coordinate are repeated, all spies of three-dimensional sample can be obtained
Levy the three-dimensional coordinate of point;And the pattern of three-dimensional sample is drawn out according to the coordinate of all characteristic points obtained.
Turntable in the present invention changes the position of sample when rotating, but the position of center of rotation is not send out in rotation process
Changing, the position of center of rotation can be determined by demarcating.
The present invention also provides a kind of three-dimensional measurement instruments, which includes three parts: first part is to turn
Moving platform, second part is three-dimensional information collecting part, including lens array and imaging sensor, Part III are information processing
Display portion;Rotatable platform and imaging sensor should be located at the two sides of microlens array.
Rotatable platform, which, which needs to meet, is capable of fixing sample, and is able to drive sample and is rotated, and has solid
Fixed rotation axis is able to carry out the rotation of designated precision;Rotatable platform can be precise rotating platform, be also possible to Ultra-precision Turning machine
The rotation main shaft of bed.
Three-dimensional information collecting part is located on rotatable platform pivot center and towards sample outer side surface to be measured, including, it is micro-
Lens array and imaging sensor, acquisition of the microlens array for the three-dimensional information on sample surface to be measured, pass through lenticule battle array
Column obtain multiple picture points of characteristic point, and imaging sensor is used to acquire multiple picture point images of microlens array generation, and will figure
As being transferred to information processing display portion;
Information processing display portion, the part are connect with the imaging sensor in three-dimensional information collecting part, are used for three
The image that dimension information collection part obtains is saved, and mapped plan is arranged, and reunion focal plane calculates all characteristic points
Three-dimensional coordinate is drawn out three-dimensional sample pattern, and is shown.
The advantages of the present invention:
The present invention compared with prior art, by the way that in three-dimensional information acquisition phase, it is more that rotating table drives sample to carry out
Secondary rotation changes position of the characteristic point relative to lens array, thus change arrangement of all characteristic points on element image, it will
A certain range of characteristic point is separated, and then in characteristic point coordinate calculation stages, can be by different characteristic in a certain range
The three-dimensional coordinate of point calculates, and improves measurement accuracy.
Detailed description of the invention
Fig. 1 is the instrumentation diagram of the three-dimensional information collecting part of the embodiment of the present invention;
Fig. 2 is the change in location schematic diagram of characteristic point A when rotating in the embodiment of the present invention;
Fig. 3 is that characteristic point A passes through the picture point distribution map of microlens array in different location in the embodiment of the present invention;
Fig. 4 is the three-dimensional system of coordinate schematic diagram of the refocusing process and refocusing space in the embodiment of the present invention;
Fig. 5 is the structure block diagram of measuring instrument proposed by the present invention.
Specific embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.
Embodiment 1
A kind of three-dimensional measurement instrument, as shown in Figure 1 and Figure 5, which includes three parts: first part is to turn
Moving platform, second part is three-dimensional information collecting part, including lens array and imaging sensor, Part III are information processing
Display portion;Rotatable platform and imaging sensor should be located at the two sides of microlens array;
Rotatable platform 10, rotatable platform, which needs to meet, can fix sample, and is able to drive sample and is rotated, and have solid
Fixed rotation axis is able to carry out high-precision rotation, can be precise rotating platform, is also possible to the rotation master of super-precision machine tools
Axis.
Three-dimensional information collecting part is located on rotatable platform pivot center and towards sample outer side surface to be measured, including, it is micro-
Lens array 40, imaging sensor 50, acquisition of the microlens array for the three-dimensional information on the surface to be measured of sample 20, by micro-
Lens array can get multiple picture points of characteristic point, and imaging sensor is used to acquire multiple picture point images of microlens array generation,
And give image transmitting to information processing display portion;
Information processing display portion, the part are connect with the imaging sensor in three-dimensional information collecting part, can be by three
The image that dimension information collection part obtains is saved, and mapped plan is arranged, and reunion focal plane calculates all characteristic points
Three-dimensional coordinate is drawn out three-dimensional sample pattern, and is shown.Under normal circumstances, meter can be used in information processing display portion
Calculation machine.
The three-dimensional coordinate of the characteristic point of sample is determined in order to be more accurate, and three-dimensional measurement instrument should also be in microlens array
With addition object lens 30 among three-dimensional sample.
Embodiment 2
A kind of high precision three-dimensional measurement method, comprising the following steps:
Step 100, characteristic point rotate collecting flowchart;Whole image acquisition system is set referring to Fig.1:
S1, setting turntable 10, three-dimensional sample 20 is fixed on turntable, sample is enable to exist around the center of rotation of turntable
It is repeatedly rotated perpendicular in the plane of rotation axis according to preset angle;
S2, setting microlens array 40, making microlens array includes multiple unit sub-lens, and makes microlens array place
Plane perpendicular to the rotation axis of turntable, the plane where microlens array is parallel to the turntable plane of turntable, towards sample
Surface to be measured;The sub-lens of specific microlens array are convex lens, number 4*4, each sub-lens of microlens array
Focal length is f=15mm, and the interval of two neighboring sub-lens is equal, and spacing size is P=0.5mm;
S3, setting imaging sensor 50, the sensing plane of sensor are 60, and the sensing plane of sensor is parallel to lenticule
Plane where array obtains multiple pictures of the surface characteristics point to be measured comprising being formed by microlens array using imaging sensor
The image of point, and the image that imaging sensor obtains is passed into information processing display portion and is saved.Imaging sensor sensing
Plane is known as distance sensing at a distance from microlens array plane, and size g, specifically g=20mm, image pass in this example
The Pixel Dimensions of sensor are u=0.0035mm.
S4, the center of rotation by sample around turntable are repeatedly rotated along the same direction, and each rotational angle is θ,
Specifically θ=0.6 °, the total degree of rotation are N=5 in this example, as shown in Fig. 2, the position after characteristic point A rotation is A1,
A2····AN, the image comprising characteristic point picture point of imaging sensor acquisition is transmitted to information processing after rotation every time and is shown
Part is saved.The image saved after rotating each time is known as one group of element image EI, can get N constituent element after rotating n times
Sketch map picture.As shown in figure 3, the figure is characterized the one-dimensional schematic diagram in an imaging process, it can be seen that characteristic point A shape after rotation
At A1、A2Position relative to microlens array changes, and passes through picture point formed by microlens array
Position relative to sensing plane changes, m, and n is convergent point putting in order on reunion focal plane, on element image
Positioned at different positions.
Step 200, characteristic point coordinate calculation process, comprising the following steps:
S01, as shown in figure 4, reunion focal plane 401 is arranged in information processing display portion, meeting is set on reunion focal plane
400 array of accumulation, the center of each sub-lens is overlapped in convergent point and microlens array.Mapped plan 402 is set, and mapping is flat
Face is parallel with reunion focal plane, and the distance of two interplanars is distance sensing g, the size and the size phase of element image of mapped plan
Together;
S02, one group of element image is placed on mapped plan, multiple picture points of the characteristic point A on element image are mapping
Convergent point on point, each mapping point and reunion focal plane corresponds.Each mapping point on connection mapped plan is reflected with this
The corresponding convergent point of exit point forms the reunion focal line of this feature point, and multiple reunion focal line intersects at reunion focus;Specifically exist
In this example, takes first group of element image to be placed on mapped plan, take characteristic point A1Multiple picture points be mapping point, in distance
Reunion focal plane is set at mapped plan g=20mm, and the convergent point number of the plane is 4*4, and mapping point and converging focal point are formed
Reunion focal line, the intersection point of reunion focal line are characterized point A1Picture A ' in refocusing space1;
S03, N group element image is placed sequentially on mapped plan, repeats S02 step, can obtains comprising A'2Inside
N number of reunion focus;
S04, three-dimensional the sitting for establishing the sample place space i.e. three-dimensional system of coordinate of object space and reunion focus place space
Mark system;Keep the three-dimensional coordinate of object space corresponding with the three-dimensional coordinate of reunion focus space;
S05, reunion focus A ' is calculated1Three-dimensional coordinate in the three-dimensional system of coordinate in refocusing space;By imaging process
In geometrical relationship it is found that distance of the characteristic point A in multiple picture points on element image between adjacent image points is fixed value D, from
It is known that the size of fixed value D, since the sensing plane pixelation of imaging sensor influences, D should be picture on element image
The integral multiple of element, i.e. D=j*u, the positive integer of j=non-zero, as shown in figure 4, the distance of reunion focal length mapped plan isThree-dimensional system of coordinate is established in mapped plan, using one of point of mapped plan as origin O,
Z axis is established with the direction perpendicular to mapped plan, it is known that each picture point of characteristic pointPixel coordinate (x1,y1,z1) and picture
PointPixel coordinate (the x of corresponding convergent point2,y2,z2), the pixel coordinate of two o'clock is converted into the three-dimensional of three-dimensional system of coordinate
Coordinate determines straight line by two o'clock, it is known that the equation of reunion focal line are as follows:Reunion focus
Z coordinate value is L, and X can be obtained by being substituted into reunion focal line equation, and Y-coordinate obtains characteristic point in the reunion focus in refocusing space
A′1Three-dimensional coordinate (X, Y, Z).Specifically j=190, L=80mm, Z coordinate are 80A ' in this example1Three-dimensional coordinate be
(21.2,35.6,80);
Step S05 is repeated, three-dimensional seat of each reunion focus in the three-dimensional system of coordinate in refocusing space can be calculated
Mark A'k(X, Y, Z) (k=1,2,3N) obtains three-dimensional coordinate of the center of rotation in the refocusing space by calibration
For (x0,y0, Z), by A'kOpposite direction around center of rotation along object space rotation direction rotates, rotational angle θk, θk=k*
θ calculates the reunion focus A' after rotationkCoordinate (x "k, y "k, Z) be,
Specifically rotate in this example
The coordinate at center is (43.5,28.6,80), the reunion focus A' after calculating rotationkCoordinate A "k, coordinate be respectively (21.4,
35.3,80), three-dimensional of (21.1,35.3,80) (21.5,35.7,80) (21.5,35.4,80) the characteristic point A in refocusing space
Coordinate isA' three-dimensional coordinate is (21.34,35.46,80);
The space where reunion focus and the three-dimensional coordinate corresponding relationship of object space are obtained using the method for calibration, according to
The corresponding relationship of the three-dimensional coordinate of refocusing space and object space calculates characteristic point in the three-dimensional coordinate of object space;It calculates most
The three-dimensional coordinate of whole characteristic point;
Compared with existing method
Existing three dimension profile measurement method, if application No. is the methods that 201410357264.2 are proposed, though it can be by sample
The three-dimensional coordinate measurement of product comes out, but times magnification in the influence and sample geometry imaging process due to sensing plane pixelation
The influence of rate causes a pixel on sensing plane to correspond to a certain range in object space, and the size of the range is several by sample
Enlargement ratio in what imaging process determines that pixel coordinate of all characteristic points on sensing plane within this range is identical,
Equation so as to cause the reunion focal line is identical, and all characteristic points coordinate having the same eventually led within the scope of this reduces
Measurement accuracy.
This method changes characteristic point by the way that in three-dimensional information acquisition phase, rotating table drives sample repeatedly to be rotated
Relative to the position of lens array, to change arrangement of all characteristic points on element image, by a certain range of feature
Point is separated, and then in characteristic point coordinate calculation stages, the three-dimensional coordinate of different characteristic point in a certain range can be calculated
Out, measurement accuracy is improved.
Method for three-dimensional measurement repeated characteristic point coordinate calculation process of the invention can obtain all features of three-dimensional sample
The three-dimensional coordinate of point;And the pattern of three-dimensional sample is drawn out according to the coordinate of all characteristic points obtained.
The present invention compared with prior art, by the way that in three-dimensional information acquisition phase, it is more that rotating table drives sample to carry out
Secondary rotation changes position of the characteristic point relative to lens array, thus change arrangement of all characteristic points on element image, it will
A certain range of characteristic point is separated, and then in characteristic point coordinate calculation stages, can be by different characteristic in a certain range
The three-dimensional coordinate of point calculates, and improves measurement accuracy.
Claims (2)
1. a kind of high precision three-dimensional measurement method, comprising the following steps:
Step 1: characteristic point rotates collecting flowchart;The following steps are included:
S1, setting turntable, three-dimensional sample is fixed on turntable, enable sample surround turntable center of rotation, perpendicular to
It is repeatedly rotated in the plane of rotation axis according to preset angle;
S2, setting microlens array, making microlens array includes multiple unit sub-lens, and makes the plane where microlens array
Perpendicular to the rotation axis of turntable, the plane where microlens array is parallel to the turntable plane of turntable, and towards the to be measured of sample
Surface;
S3, setting imaging sensor, are placed in the other side of the microlens array relative to turntable for sensor, make sensor senses
Plane is parallel to the plane where microlens array, obtains the table to be measured comprising being formed by microlens array using imaging sensor
The image of multiple picture points of region feature point, and the image that imaging sensor obtains is passed into information processing display portion and is protected
It deposits, imaging sensor sensing plane is known as distance sensing at a distance from microlens array plane;
S4, the center of rotation by sample around turntable are repeatedly rotated in one direction, and each rotational angle is θ, rotation
Total degree is N, and the image comprising characteristic point picture point after rotation by imaging sensor acquisition is transmitted to information processing display unit every time
Divide and saved, the image saved after rotating each time is known as one group of element image EI, obtains N group elemental map after rotating n times
Picture;
Step 2: characteristic point coordinate calculation process, comprising the following steps:
S01, reunion focal plane is set in a computer, lattice array, convergent point and lenticule battle array are assembled in setting on reunion focal plane
The center of each unit sub-lens is overlapped in column;Mapped plan is set, and the mapped plan is parallel with reunion focal plane, two planes
Between distance be the distance sensing, the size of the mapped plan and the size of element image are identical;
S02, one group of element image is placed on mapped plan, take the characteristic point A on surface to be measured multiple on element image
Picture point is mapping point, and the convergent point on each mapping point and reunion focal plane corresponds;It is reflected each of on connection mapped plan
Exit point convergent point corresponding with the mapping point forms the reunion focal line of this feature point, and multiple reunion focal line intersects at refocusing
Point;
S03, N group element image is placed sequentially on mapping face, repeats S02 step, N number of reunion focus can be obtained;
S04, the three-dimensional coordinate for establishing the sample place space i.e. three-dimensional system of coordinate of object space and reunion focus place space
System;Keep the three-dimensional coordinate of object space corresponding with the three-dimensional coordinate of reunion focus space;
S05, each reunion focus A' is calculatedk, k=1,2,3N, where reunion focus in the three-dimensional system of coordinate in space
Three-dimensional coordinate, by calibration obtain center of rotation in the three-dimensional coordinate where the reunion focus in space, by reunion focus A'k
It is rotated around center of rotation, the rotation direction in the S4 of rotation direction and step 1 is on the contrary, rotational angle is θk, θk=k* θ is calculated
Reunion focus A' outkCoordinate A " after rotationk, three-dimensional coordinate of the characteristic point A in space where reunion focus be
Step 3: carrying out coordinate conversion, obtain final measurement;
The space where reunion focus and the three-dimensional coordinate corresponding relationship of object space are obtained using the method for calibration, according to refocusing
The corresponding relationship of the three-dimensional coordinate of space and object space where point calculates characteristic point in the three-dimensional coordinate of object space;It calculates most
The three-dimensional coordinate of whole characteristic point.
2. method for three-dimensional measurement according to claim 1, it is characterised in that repeat step 2 characteristic point coordinate calculation process with
And the conversion of step 3 coordinate, the three-dimensional coordinate of all characteristic points of three-dimensional sample can be obtained;And according to all features obtained
The coordinate of point draws out the pattern of three-dimensional sample.
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