CN107201510A - 一种周期交替放电制备多功能性纳米防护涂层的方法 - Google Patents
一种周期交替放电制备多功能性纳米防护涂层的方法 Download PDFInfo
- Publication number
- CN107201510A CN107201510A CN201710360378.6A CN201710360378A CN107201510A CN 107201510 A CN107201510 A CN 107201510A CN 201710360378 A CN201710360378 A CN 201710360378A CN 107201510 A CN107201510 A CN 107201510A
- Authority
- CN
- China
- Prior art keywords
- discharge
- coating
- reaction chamber
- base material
- passed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 77
- 239000011248 coating agent Substances 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 42
- 230000002633 protecting effect Effects 0.000 title claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims abstract description 81
- 239000000463 material Substances 0.000 claims abstract description 79
- 239000000178 monomer Substances 0.000 claims abstract description 69
- 230000033001 locomotion Effects 0.000 claims abstract description 45
- 239000002253 acid Substances 0.000 claims abstract description 28
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 20
- 238000002360 preparation method Methods 0.000 claims abstract description 19
- 239000011261 inert gas Substances 0.000 claims abstract description 17
- 238000007747 plating Methods 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims abstract description 11
- 230000008021 deposition Effects 0.000 claims abstract description 11
- 239000002904 solvent Substances 0.000 claims abstract description 10
- 238000005137 deposition process Methods 0.000 claims abstract description 4
- 230000007246 mechanism Effects 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 26
- 229930195735 unsaturated hydrocarbon Natural products 0.000 claims description 24
- 230000008859 change Effects 0.000 claims description 21
- 239000002103 nanocoating Substances 0.000 claims description 20
- -1 polytetrafluoroethylene Polymers 0.000 claims description 20
- 239000011343 solid material Substances 0.000 claims description 17
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical class FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 16
- 239000011347 resin Substances 0.000 claims description 16
- 229920005989 resin Polymers 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 15
- 150000002148 esters Chemical class 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000003960 organic solvent Substances 0.000 claims description 8
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 8
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 8
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 claims description 6
- LJRSZGKUUZPHEB-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxypropoxy)propoxy]propyl prop-2-enoate Chemical compound C=CC(=O)OC(C)COC(C)COC(C)COC(=O)C=C LJRSZGKUUZPHEB-UHFFFAOYSA-N 0.000 claims description 5
- 239000002537 cosmetic Substances 0.000 claims description 5
- 238000007654 immersion Methods 0.000 claims description 5
- 210000004243 sweat Anatomy 0.000 claims description 5
- GTELLNMUWNJXMQ-UHFFFAOYSA-N 2-ethyl-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical class OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.CCC(CO)(CO)CO GTELLNMUWNJXMQ-UHFFFAOYSA-N 0.000 claims description 4
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 claims description 3
- 239000002202 Polyethylene glycol Substances 0.000 claims description 3
- 230000001351 cycling effect Effects 0.000 claims description 3
- 230000001788 irregular Effects 0.000 claims description 3
- 229920001223 polyethylene glycol Polymers 0.000 claims description 3
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims description 3
- 230000004044 response Effects 0.000 claims description 3
- WIMBFQPYJQMSCP-UHFFFAOYSA-N (1,2,2,3,3,4,4,5,5,6,6-undecafluorocyclohexyl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)F WIMBFQPYJQMSCP-UHFFFAOYSA-N 0.000 claims description 2
- SAMJGBVVQUEMGC-UHFFFAOYSA-N 1-ethenoxy-2-(2-ethenoxyethoxy)ethane Chemical compound C=COCCOCCOC=C SAMJGBVVQUEMGC-UHFFFAOYSA-N 0.000 claims description 2
- UZSRUNWVDBGNCD-UHFFFAOYSA-N 6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,17-pentacosafluoroheptadec-2-ene Chemical class FC(C(C(C(C(C(C(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(CCC=CC)F UZSRUNWVDBGNCD-UHFFFAOYSA-N 0.000 claims description 2
- NTCKRBSOZLPJQP-UHFFFAOYSA-N 6,6,7,7,8,8,9,9,9-nonafluoronon-2-ene Chemical class FC(C(C(C(F)(F)F)(F)F)(F)F)(CCC=CC)F NTCKRBSOZLPJQP-UHFFFAOYSA-N 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 230000000712 assembly Effects 0.000 claims description 2
- 125000004386 diacrylate group Chemical group 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 159000000011 group IA salts Chemical class 0.000 claims description 2
- 239000003595 mist Substances 0.000 claims description 2
- 230000035939 shock Effects 0.000 claims description 2
- GETTZEONDQJALK-UHFFFAOYSA-N (trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC=C1 GETTZEONDQJALK-UHFFFAOYSA-N 0.000 claims 1
- OTDGZDMGSFBZLI-UHFFFAOYSA-N 1-ethynyl-3,5-difluorobenzene Chemical class FC1=CC(F)=CC(C#C)=C1 OTDGZDMGSFBZLI-UHFFFAOYSA-N 0.000 claims 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 239000002585 base Substances 0.000 abstract description 56
- 239000003513 alkali Substances 0.000 abstract description 11
- 239000011247 coating layer Substances 0.000 abstract description 4
- 150000003839 salts Chemical class 0.000 abstract description 3
- 210000002381 plasma Anatomy 0.000 description 76
- 239000010408 film Substances 0.000 description 37
- 238000012360 testing method Methods 0.000 description 21
- 239000000047 product Substances 0.000 description 16
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 12
- 238000005260 corrosion Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 239000012071 phase Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 229920000052 poly(p-xylylene) Polymers 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000006378 damage Effects 0.000 description 5
- 230000003628 erosive effect Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000004132 cross linking Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 150000001336 alkenes Chemical class 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000007781 pre-processing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 230000008054 signal transmission Effects 0.000 description 3
- GRJRKPMIRMSBNK-UHFFFAOYSA-N 3,3,4,4,5,5,6,6,7,7,8,8,8-tridecafluorooctan-1-ol Chemical compound OCCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F GRJRKPMIRMSBNK-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 230000001458 anti-acid effect Effects 0.000 description 2
- 239000003518 caustics Substances 0.000 description 2
- 239000013064 chemical raw material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002114 nanocomposite Substances 0.000 description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XTKBMZQCDBHHKY-UHFFFAOYSA-N 1-ethynyl-4-(trifluoromethyl)benzene Chemical class FC(F)(F)C1=CC=C(C#C)C=C1 XTKBMZQCDBHHKY-UHFFFAOYSA-N 0.000 description 1
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 1
- MBCVRYDLLDKTFS-UHFFFAOYSA-N 6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,15-henicosafluoro-3-methylpentadec-2-ene Chemical group FC(C(C(C(C(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(F)F)(CCC(=CC)C)F MBCVRYDLLDKTFS-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 208000033999 Device damage Diseases 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- 206010013786 Dry skin Diseases 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical group [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000006477 desulfuration reaction Methods 0.000 description 1
- 230000023556 desulfurization Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000004494 ethyl ester group Chemical group 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 238000009851 ferrous metallurgy Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 125000005459 perfluorocyclohexyl group Chemical group 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229960000834 vinyl ether Drugs 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Claims (9)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710360378.6A CN107201510B (zh) | 2017-05-21 | 2017-05-21 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
PCT/CN2017/113192 WO2018214450A1 (zh) | 2017-05-21 | 2017-11-27 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
US16/688,589 US11270871B2 (en) | 2017-05-21 | 2019-11-19 | Multi-layer protective coating |
US16/688,845 US11742186B2 (en) | 2017-05-21 | 2019-11-19 | Multi-functional protective coating |
US17/653,401 US11587772B2 (en) | 2017-05-21 | 2022-03-03 | Multi-layer protective coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710360378.6A CN107201510B (zh) | 2017-05-21 | 2017-05-21 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107201510A true CN107201510A (zh) | 2017-09-26 |
CN107201510B CN107201510B (zh) | 2018-09-21 |
Family
ID=59906071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710360378.6A Active CN107201510B (zh) | 2017-05-21 | 2017-05-21 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN107201510B (zh) |
WO (1) | WO2018214450A1 (zh) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108173450A (zh) * | 2018-02-06 | 2018-06-15 | 中国工程物理研究院流体物理研究所 | 一种集高压短脉冲预电离一体化高功率双极性脉冲形成电路 |
CN108425104A (zh) * | 2018-03-12 | 2018-08-21 | 江苏菲沃泰纳米科技有限公司 | 一种以巯基化合物作为过渡层的涂层制备方法 |
WO2018214448A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
WO2018214446A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种小功率连续放电制备多功能性纳米防护涂层的方法 |
WO2018214450A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
WO2018214449A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种循环大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
WO2018214451A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种循环周期交替放电制备多功能性纳米防护涂层的方法 |
WO2018214447A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种循环小功率连续放电制备多功能性纳米防护涂层的方法 |
US11270871B2 (en) | 2017-05-21 | 2022-03-08 | Jiangsu Favored Nanotechnology Co., LTD | Multi-layer protective coating |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020162935A1 (en) * | 2019-02-06 | 2020-08-13 | Wickersham Jill Anne | Systems and methods for real-time item identification and sourcing |
EP3948750A4 (en) * | 2018-02-06 | 2022-11-16 | Wickersham, Jill Anne | SYSTEMS AND PROCEDURES FOR REAL-TIME DETECTION AND PROCUREMENT OF ARTICLES |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1367721A (zh) * | 1999-09-07 | 2002-09-04 | 宝洁公司 | 水蒸气渗透性基材的疏水处理方法 |
CN101370877A (zh) * | 2006-01-20 | 2009-02-18 | P2I有限公司 | 新颖产品 |
WO2013011315A1 (en) * | 2011-07-21 | 2013-01-24 | P2I Ltd | Surface coatings |
CN103782366A (zh) * | 2011-05-19 | 2014-05-07 | 立可泼知识产权有限公司 | 涂敷电子设备和相关方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1777691A3 (en) * | 2005-10-21 | 2010-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method of driving the same |
US20080146734A1 (en) * | 2006-11-30 | 2008-06-19 | Youngblood Jeffrey P | Stimuli-responsive polymeric surface materials |
CN103160786A (zh) * | 2013-03-07 | 2013-06-19 | 苏州睿研纳米医学科技有限公司 | 一种纳米涂层的制备方法及由其制备的抗菌纳米涂层 |
US9988536B2 (en) * | 2013-11-05 | 2018-06-05 | E I Du Pont De Nemours And Company | Compositions for surface treatments |
CN107217243B (zh) * | 2017-05-21 | 2018-07-13 | 江苏菲沃泰纳米科技有限公司 | 一种大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
CN107201511B (zh) * | 2017-05-21 | 2018-07-13 | 江苏菲沃泰纳米科技有限公司 | 一种循环周期交替放电制备多功能性纳米防护涂层的方法 |
CN107201510B (zh) * | 2017-05-21 | 2018-09-21 | 江苏菲沃泰纳米科技有限公司 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
CN107177835B (zh) * | 2017-05-21 | 2018-06-19 | 江苏菲沃泰纳米科技有限公司 | 一种循环大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
CN107142465B (zh) * | 2017-05-21 | 2018-07-13 | 江苏菲沃泰纳米科技有限公司 | 一种循环小功率连续放电制备多功能性纳米防护涂层的方法 |
CN107142466B (zh) * | 2017-05-21 | 2018-05-11 | 江苏菲沃泰纳米科技有限公司 | 一种小功率连续放电制备多功能性纳米防护涂层的方法 |
-
2017
- 2017-05-21 CN CN201710360378.6A patent/CN107201510B/zh active Active
- 2017-11-27 WO PCT/CN2017/113192 patent/WO2018214450A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1367721A (zh) * | 1999-09-07 | 2002-09-04 | 宝洁公司 | 水蒸气渗透性基材的疏水处理方法 |
CN101370877A (zh) * | 2006-01-20 | 2009-02-18 | P2I有限公司 | 新颖产品 |
CN103782366A (zh) * | 2011-05-19 | 2014-05-07 | 立可泼知识产权有限公司 | 涂敷电子设备和相关方法 |
WO2013011315A1 (en) * | 2011-07-21 | 2013-01-24 | P2I Ltd | Surface coatings |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018214448A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
WO2018214446A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种小功率连续放电制备多功能性纳米防护涂层的方法 |
WO2018214450A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种周期交替放电制备多功能性纳米防护涂层的方法 |
WO2018214449A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种循环大占空比脉冲放电制备多功能性纳米防护涂层的方法 |
WO2018214451A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种循环周期交替放电制备多功能性纳米防护涂层的方法 |
WO2018214447A1 (zh) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | 一种循环小功率连续放电制备多功能性纳米防护涂层的方法 |
US11270871B2 (en) | 2017-05-21 | 2022-03-08 | Jiangsu Favored Nanotechnology Co., LTD | Multi-layer protective coating |
US11587772B2 (en) | 2017-05-21 | 2023-02-21 | Jiangsu Favored Nanotechnology Co., LTD | Multi-layer protective coating |
US11742186B2 (en) | 2017-05-21 | 2023-08-29 | Jiangsu Favored Nanotechnology Co., LTD | Multi-functional protective coating |
CN108173450A (zh) * | 2018-02-06 | 2018-06-15 | 中国工程物理研究院流体物理研究所 | 一种集高压短脉冲预电离一体化高功率双极性脉冲形成电路 |
CN108173450B (zh) * | 2018-02-06 | 2024-03-12 | 中国工程物理研究院流体物理研究所 | 一种集高压短脉冲预电离一体化高功率双极性脉冲形成电路 |
CN108425104A (zh) * | 2018-03-12 | 2018-08-21 | 江苏菲沃泰纳米科技有限公司 | 一种以巯基化合物作为过渡层的涂层制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN107201510B (zh) | 2018-09-21 |
WO2018214450A1 (zh) | 2018-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107201511B (zh) | 一种循环周期交替放电制备多功能性纳米防护涂层的方法 | |
CN107201510B (zh) | 一种周期交替放电制备多功能性纳米防护涂层的方法 | |
CN107142465B (zh) | 一种循环小功率连续放电制备多功能性纳米防护涂层的方法 | |
CN106958012A (zh) | 一种基材运动式等离子体放电制备纳米涂层的设备及方法 | |
CN107177835B (zh) | 一种循环大占空比脉冲放电制备多功能性纳米防护涂层的方法 | |
CN107142466B (zh) | 一种小功率连续放电制备多功能性纳米防护涂层的方法 | |
CN107217243B (zh) | 一种大占空比脉冲放电制备多功能性纳米防护涂层的方法 | |
CN107523808B (zh) | 一种有机硅纳米防护涂层的制备方法 | |
CN107699868A (zh) | 一种高绝缘性纳米防护涂层的制备方法 | |
CN108425104B (zh) | 一种以巯基化合物作为过渡层的涂层制备方法 | |
CN206768216U (zh) | 一种基材运动式等离子体放电制备纳米涂层的设备 | |
CN107686986B (zh) | 一种调制结构的有机硅纳米防护涂层的制备方法 | |
CN107587120B (zh) | 一种具有调制结构的高绝缘纳米防护涂层的制备方法 | |
CN107523809B (zh) | 一种有机硅硬质纳米防护涂层的制备方法 | |
CN107587119B (zh) | 一种复合结构高绝缘硬质纳米防护涂层的制备方法 | |
CN107058979B (zh) | 一种防水耐电击穿涂层的制备方法 | |
US11185883B2 (en) | Methods for preparing nano-protective coating |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180104 Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province Applicant after: JIANGSU FAVORED NANOTECHNOLOGY Co.,Ltd. Address before: 214000 Jiangsu Province, Wuxi city Huishan District Qi Zhen Yu Yuqi Industrial Park East Ring Road Applicant before: WUXI RJ INDUSTRIES Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: No.182, East Ring Road, Yuqi supporting area, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Patentee after: Jiangsu feiwotai nanotechnology Co.,Ltd. Address before: 214183 East Ring Road, Yuqi Industrial Park, Wuxi City, Jiangsu Province Patentee before: Jiangsu Favored Nanotechnology Co.,Ltd. |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A method for preparing multifunctional nano protective coatings by periodic alternating discharge Granted publication date: 20180921 Pledgee: Wuxi Branch of China CITIC Bank Co.,Ltd. Pledgor: Jiangsu feiwotai nanotechnology Co.,Ltd. Registration number: Y2024980016337 |