CN107195698B - A kind of deactivating process for the treatment of of antimony selenide thin-film solar cells back surface - Google Patents

A kind of deactivating process for the treatment of of antimony selenide thin-film solar cells back surface Download PDF

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CN107195698B
CN107195698B CN201710405484.1A CN201710405484A CN107195698B CN 107195698 B CN107195698 B CN 107195698B CN 201710405484 A CN201710405484 A CN 201710405484A CN 107195698 B CN107195698 B CN 107195698B
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back surface
antimony selenide
solar cells
film solar
film
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CN107195698A (en
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唐江
文西兴
牛广达
胡青松
陈超
李康华
陈文浩
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Huazhong University of Science and Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1868Passivation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a kind of methods of antimony selenide thin-film solar cells back surface processing, and antimony selenide hull cell is placed in thermal station;Then by ErCl3Solution drips to the back surface of selenizing antimony battery, and it is made to cover back surface, stands a period of time;Finally, battery device is placed on film applicator and is cleaned using deionized water, and dried, obtain the antimony selenide thin-film solar cells by back surface processing.This method can effectively reduce back electrode contact resistance, promote the collection of photo-generated carrier, improve fill factor, further increase the photoelectric conversion efficiency of antimony selenide thin-film solar cells.The present invention simply and effectively improves the back contacts characteristic of selenizing antimony battery, and then improves the opto-electronic conversion performance of battery, and technical support is provided for the development of hull cell.

Description

A kind of deactivating process for the treatment of of antimony selenide thin-film solar cells back surface
Technical field
The present invention relates to photovoltaic device designs preparing technical fields, more particularly to a kind of antimony selenide thin-film solar cells The deactivating process for the treatment of of back surface, belongs to technical field of solar batteries.
Background technology
Solar energy power generating belongs to the maximum green power generation energy project of national encouragement dynamics." 13 " photovoltaic is planned It points out to continue to keep comparatively fast to develop, gives priority to the solar cell of efficient, inexpensive, light, great industrial competitiveness.Closely Come, research is green non-poisonous, preparation process is simple, novel thin film solar cell of low cost and efficient becomes hot spot.Ⅴ- VI compounds of group antimony selenide (Sb2Se3) material because with energy gap it is suitable (~1.17eV, close to silicon 1.12eV, theoretical single-unit Sb2Se3The efficiency of battery is up to 30% or more), the big (visible region of absorptivity>105cm-1, the light absorption system of amorphous silicon membrane Number about 104cm-1), object phase simple and stable, can be achieved compared with low temperature (<300 DEG C) high-quality growth, low in raw material price, reserves are rich The advantages such as rich, green non-poisonous, and be concerned.How to improve the photoelectric conversion efficiency of antimony selenide thin-film solar cells becomes Emphasis.
The research of antimony selenide thin-film solar cells at present remains in primary stage, prepared antimony selenide hull cell Photoelectric conversion efficiency it is low, it is a unique chain material to be primarily due to antimony selenide, and the interchain transmission of carrier is difficult, material Expect the problems such as resistance is big, and doping concentration is low, causes the photogenerated current of antimony selenide hull cell smaller, fill factor is low.
Invention content
For existing antimony selenide battery preparation technology and Improvement requirement, the present invention provides a kind of antimony selenide thin film solars The deactivating process for the treatment of of the back surface of battery, by using ErCl3Aqueous solution is passivated processing to its back surface, to reduce the back of the body The contact resistance of electrode promotes the collection of photo-generated carrier, improves fill factor, improves the back of the body of antimony selenide thin-film solar cells The collection efficiency of electrode, and then the photoelectric conversion efficiency of battery is improved, thus solve the antimony selenide hull cell of the prior art Photogenerated current is smaller, and fill factor is low, the low technical problem of photoelectric conversion efficiency.
The present invention provides a kind of processing method of antimony selenide thin-film solar cells back surface, using ErCl3Aqueous solution pair The back surface of antimony selenide thin-film solar cells is handled, and contact electricity of the back surface of the solar cell with back electrode is reduced Resistance, increases collection efficiency of the back electrode to photo-generated carrier, improves the opto-electronic conversion of the antimony selenide thin-film solar cells Efficiency;The back surface is selenizing Sb film.
Preferably, the ErCl3Er ions in aqueous solution can be passivated the surface of the back surface of the solar cell Defect and grain boundary defects reduce defect concentration.
Preferably, the processing method can make the photoelectric conversion efficiency of the antimony selenide thin-film solar cells improve 1% ~2%.
Preferably, the processing method comprising following steps:
(1) antimony selenide thin-film solar cells is placed in thermal station;
(2) by ErCl3Aqueous solution is added drop-wise to the back surface of the antimony selenide thin-film solar cells, it is made to cover the back of the body Surface, and stand, make the ErCl3Er ions in aqueous solution penetrate into the back surface, and the back surface is selenizing Sb film;
(3) deionized water is used to clean, the antimony selenide thin-film solar cells that obtains that treated after dry.
Preferably, the temperature of step (1) described thermal station is 60 DEG C~180 DEG C.
Preferably, the temperature of step (1) described thermal station is 60 DEG C~100 DEG C.
Preferably, step (2) ErCl3The concentration range of aqueous solution is 0.05M~0.5M.
Preferably, step (2) described time of repose is 10min~30min.
Preferably, step (3) cleaning carries out on film applicator.
Preferably, step (3) described drying means is drying.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show Beneficial effect:
(1) present invention uses ErCl3Aqueous solution carries out back surface passivation processing, Er ion energy to antimony selenide solar cell It is enough that antimony selenide film surface defects and grain boundary defects are passivated, antimony selenide surface and grain boundary defects are filled, it can be effective The contact potential between antimony selenide surface and back electrode is reduced, increases back electrode to the collection efficiency of photo-generated carrier, Jin Erti The photoelectric conversion efficiency of high selenizing antimony battery.
(2) deactivating process for the treatment of of antimony selenide thin-film solar cells back surface of the invention is simple and practicable, effectively changes The back contacts characteristic of selenizing antimony battery has been apt to it, the photoelectric conversion efficiency of battery significantly improves.
Description of the drawings
Fig. 1 is the Kelvin probe surface potential Mapping of 3 obtained antimony selenide film surface of the embodiment of the present invention Figure:(a) before handling;(b) after handling;
Fig. 2 is the current density voltage curve of 3 obtained antimony selenide hull cell of the embodiment of the present invention before and after the processing Figure.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to embodiments and attached drawing, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below It does not constitute a conflict with each other and can be combined with each other.
The deactivating process for the treatment of of antimony selenide thin-film solar cells back surface provided by the invention, using ErCl3Aqueous solution Processing is passivated to the selenizing Sb film of antimony selenide thin-film solar cells back surface, passes through Er ion pair selenizing Sb film tables Planar defect and grain boundary defects are passivated, and are filled antimony selenide film surface and grain boundary defects, are reduced the contact resistance of back electrode, are promoted Into the collection of photo-generated carrier, the fill factor of battery is improved, to improve the antimony selenide hull cell photoelectric conversion efficiency.It is logical The deactivating process for the treatment of is crossed, which can improve about 1%~2%.
Specifically, the deactivating process for the treatment of, includes the following steps:
(1) antimony selenide thin-film solar cells is placed in 60 DEG C~180 DEG C, in preferably 60 DEG C~100 DEG C of thermal station;
(2) by the ErCl of 0.05M~0.5M3Aqueous solution drips to the back surface of the antimony selenide hull cell, makes its covering back of the body Surface, and 10min~30min is stood, so that Er ions is penetrated into selenizing Sb film, completes blunt to the defect of film surface and crystal boundary Change.
(3) solar film battery is placed on film applicator and is cleaned using deionized water, Passivation Treatment is obtained after drying Antimony selenide thin-film solar cells afterwards, the remaining ErCl of removal film surface that cleaning can be evenly on spin coater2It is molten Liquid.
Antimony selenide thin-film cell structure according to the present invention is tin indium oxide (ITO)/cadmium sulfide/antimony selenide/gold electrode, Processing method is before vapor deposition gold electrode (back electrode), to the selenium of tin indium oxide (ITO)/cadmium sulfide/antimony selenide structure battery Change Sb film surface (back surface) to be handled, reduce the defect of antimony selenide film surface and crystal boundary, improves film quality, to The contact berrier for reducing selenizing Sb film and gold electrode (back electrode), reduces the contact resistance of the back electrode of solar cell, increases Add the utilization ratio to photo-generated carrier, improves the photoelectric conversion efficiency of the antimony selenide hull cell.
Embodiment 1:
(1) antimony selenide hull cell is placed in the thermal station that temperature is 60 DEG C;
(2) and then by the ErCl of 0.5M3Aqueous solution drips to the back surface of selenizing antimony battery, and it is made to cover back surface, quiet Set 30min;
(3) battery device is placed on film applicator and is cleaned using deionized water, and dried;
(4) and then overleaf electrode evaporation obtains antimony selenide thin-film solar cells, and is carried out under standard sunlight to it Current-voltage is tested.
Embodiment 2:
(1) antimony selenide hull cell is placed in the thermal station that temperature is 120 DEG C;
(2) and then by the ErCl of 0.2M3Aqueous solution drips to the back surface of selenizing antimony battery, and it is made to cover back surface, quiet Set 20min;
(3) battery device is placed on film applicator and is cleaned using deionized water, and dried;
(4) and then overleaf electrode evaporation obtains antimony selenide thin-film solar cells, and is carried out under standard sunlight to it Current-voltage is tested.
Embodiment 3:
(1) antimony selenide hull cell is placed in the thermal station that temperature is 160 DEG C;
(2) and then by the ErCl of 0.05M3Aqueous solution drips to the back surface of selenizing antimony battery, and it is made to cover back surface, quiet Set 10min;
(3) battery device is placed on film applicator and is cleaned using deionized water, and dried;
(4) and then overleaf electrode evaporation obtains antimony selenide thin-film solar cells, and it has been carried out surface potential and Current-voltage is tested under standard sunlight.
As shown in Figure 1, Fig. 1 (a) is the test result before processing, Fig. 1 (b) is Kelvin probe potential Mapping figures ErCl3Test result after solution treatment, the results showed that the potential on antimony selenide surface is got higher after treatment, to reduce selenium Change the contact berrier of antimony and back electrode, and the alternating temperature conductance experiment test by being carried out to selenizing Sb film, it was demonstrated that in film Defect state is reduced, and improves film quality, is conducive to the separation and the collection efficiency that increase photo-generated carrier.
Test results are shown in figure 2 for current-voltage, and the short-circuit current density of battery is by 26.86mA/cm after processing2It carries Height has arrived 29.44mA/cm2, fill factor has been increased to 56.56% by 53.76%, and photoelectric conversion efficiency is increased to by 5.43% 6.44%.
It can be seen that handling the antimony selenide thin-film solar cells obtained by the above method utilizes ErCl3Solution carries on the back it Surface is passivated processing, reduces back contacts potential, can effectively facilitate the collection of photo-generated carrier, improves the filling of battery The factor, the photoelectric conversion efficiency to further increase antimony selenide thin-film solar cells provide technical support.
Embodiment 4:
(1) antimony selenide hull cell is placed in the thermal station that temperature is 100 DEG C;
(2) and then by the ErCl of 0.05M3Aqueous solution drips to the back surface of selenizing antimony battery, and it is made to cover back surface, quiet Set 10min;
(3) battery device is placed on film applicator and is cleaned using deionized water, and dried;
(4) and then overleaf electrode evaporation obtains antimony selenide thin-film solar cells, and it has been carried out surface potential and Current-voltage is tested under standard sunlight.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include Within protection scope of the present invention.

Claims (8)

1. a kind of processing method of antimony selenide thin-film solar cells back surface, which is characterized in that use ErCl3Aqueous solution is to selenium The back surface for changing Sb film solar cell is handled, and contact electricity of the back surface of the solar cell with back electrode is reduced Resistance, increases collection efficiency of the back electrode to photo-generated carrier, improves the opto-electronic conversion of the antimony selenide thin-film solar cells Efficiency;The back surface is selenizing Sb film.
2. processing method as described in claim 1, which is characterized in that it includes the following steps:
(1) antimony selenide thin-film solar cells is placed in thermal station;
(2) by ErCl3Aqueous solution is added drop-wise to the back surface of the antimony selenide thin-film solar cells, it is made to cover the back surface, And stand, make the ErCl3Er ions in aqueous solution penetrate into the back surface, and the back surface is selenizing Sb film;
(3) deionized water is used to clean, the antimony selenide thin-film solar cells that obtains that treated after dry.
3. processing method as described in claim 2, which is characterized in that the temperature of step (1) described thermal station is 60 DEG C~180 ℃。
4. processing method as described in claim 2, which is characterized in that the temperature of step (1) described thermal station is 60 DEG C~100 ℃。
5. processing method as described in claim 2, which is characterized in that step (2) described ErCl3The concentration range of aqueous solution For 0.05M~0.5M.
6. processing method as described in claim 2, which is characterized in that step (2) described time of repose be 10min~ 30min。
7. processing method as described in claim 2, which is characterized in that step (3) cleaning carries out on film applicator.
8. processing method as described in claim 2, which is characterized in that step (3) described drying means is drying.
CN201710405484.1A 2017-06-01 2017-06-01 A kind of deactivating process for the treatment of of antimony selenide thin-film solar cells back surface Active CN107195698B (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105556694A (en) * 2013-09-25 2016-05-04 积水化学工业株式会社 Thin film solar cell, semiconductor thin film and coating liquid for forming semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105556694A (en) * 2013-09-25 2016-05-04 积水化学工业株式会社 Thin film solar cell, semiconductor thin film and coating liquid for forming semiconductor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Lu3+/Yb3+ and Lu3+/Er3+ co-doped antimony selenide nanomaterials: synthesis,characterization, and electrical, thermoelectrical,and optical properties;Younes Hanifehpour etal;《Nanoscale Research Letters》;20131231;第8卷(第141期);全文 *
Synthesis and characterization of new LnxSb2-xSe3 (Ln: Yb3+, Er3+) nanoflowers and their physical properties;Abdolali Alemi etal;《Physica B》;20121231(第407期);全文 *

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