CN107192499A - A kind of device of Optimum Design manipulator vacuum state - Google Patents
A kind of device of Optimum Design manipulator vacuum state Download PDFInfo
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- CN107192499A CN107192499A CN201710513193.4A CN201710513193A CN107192499A CN 107192499 A CN107192499 A CN 107192499A CN 201710513193 A CN201710513193 A CN 201710513193A CN 107192499 A CN107192499 A CN 107192499A
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- Prior art keywords
- hold
- vacuum
- down mechanism
- vacuum state
- optimum design
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
Abstract
The invention belongs to semi-conductor processing equipment technical field, specifically a kind of device of Optimum Design manipulator vacuum state.Including hold-down mechanism, vacuum line, retaining mechanism, guide pillar, support frame and bottom plate, wherein bottom plate is provided with two guide pillars, the hold-down mechanism of multiple elastic connections successively is slidably matched with two guide pillars, each hold-down mechanism is connected with a vacuum line respectively, the one or both sides of multiple hold-down mechanisms are provided with the support frame being connected with bottom plate, support frame is provided with retaining mechanism, the space that retaining mechanism is used to lock between the hold-down mechanism positioned at the top, two neighboring hold-down mechanism is the measurement station of inspecting manipuator.The present invention has multiple measurement stations, detection and experiment that can effectively to the progress of the vacuum state of manipulator repeatedly, substantially increases the stability and reliability of manipulator in the course of the work, reduces the risk that defective products is loaded into equipment.
Description
Technical field
The invention belongs to semi-conductor processing equipment technical field, specifically a kind of Optimum Design manipulator vacuum shape
The device of state.
Background technology
Semiconductor processes refer in order on the processed substrate such as semiconductor wafer or LED-baseplate according to regulation pattern shape
Into semiconductor layer, insulating barrier and semiconductor layer etc., and to the various processing of substrate progress.In these processing, it is necessary to pass through machine
Substrate is sent to the chip processing unit of board by device people control machinery hand.
Because during semiconductor processes, processed substrate position precision is extremely important, and determines substrate and pass
Factor up to position is a lot, and one of which is the vacuum suction ability of manipulator.If the vacuum leak of manipulator, i.e., it can lead
Cause in substrate transfer process, dropping for substrate causes fragment.Therefore, it is impossible to corresponding PROCESS FOR TREATMENT unit is delivered to, so that
The processing procedure of substrate is caused to interrupt.The principal element of influence vacuum suction ability is adding for the vacuum air-channel of manipulator in itself
Work is manufactured, so the detection of the vacuum state of the manipulator used on semi-conductor processing equipment is particularly important and indispensable.
The content of the invention
In view of the above-mentioned problems, it is an object of the invention to provide a kind of device of Optimum Design manipulator vacuum state.
To achieve these goals, the present invention uses following technical scheme：
A kind of device of Optimum Design manipulator vacuum state, including hold-down mechanism, vacuum line, retaining mechanism, lead
Post, support frame and bottom plate, wherein bottom plate are provided with two guide pillars, and the hold-down mechanism of multiple elastic connections successively described in two with leading
Post is slidably matched, and each hold-down mechanism is connected with a vacuum line respectively, and the one or both sides of multiple hold-down mechanisms are provided with and bottom plate
The support frame of connection, support frame as described above is provided with retaining mechanism, and the retaining mechanism is used to lock the pressure positioned at the top
Space between tight mechanism, two neighboring hold-down mechanism is the measurement station of inspecting manipuator.
The hold-down mechanism includes bearing base, compact heap and clamping block, and wherein bearing base is and the vacuum line
Measurement station groove and compact heap, the measurement work are respectively equipped with the top and bottom of the hollow structure of connection, the bearing base
Position groove is provided with vacuum hole, and manipulator to be detected is positioned on the measurement station groove and inner vacuum gas circuit and vacuum hole
Connection, the bearing base is slidably matched by linear bearing with the guide pillar, and the one or both sides of the bearing base are provided with
Clamping block, is connected by clamping block with the retaining mechanism.
Chute is vertically provided with support frame as described above, the clamping block is connected with slide, under the clamping block
Hold as inclined-plane.
Vacuum blind patch is provided with the vacuum hole and is sealed by sealing ring.
The retaining mechanism includes buckle pinboard, latch segment, locking spring, linear guide shaft and handle assembly, wherein blocking
Button pinboard is connected with support frame as described above, and the latch segment is arranged on buckle pinboard with linear guide shaft, the linear guide shaft
It is located at for two and respectively on the both sides of latch segment, two linear guide shafts and is arranged with locking spring, the handle assembly
It is slidably connected with two linear guide shafts and positioned at the top of locking spring, the handle assembly is used to promote the locking
Block makes it be separated with the hold-down mechanism, realizes the unblock of the hold-down mechanism.
The handle assembly includes lock handle and joint pin, the two ends of the lock handle respectively with two linear guide shafts
It is slidably connected, the two ends of the locking spring are abutted with buckle pinboard and lock handle respectively, the two ends of the lock handle
Joint pin is hinged with, the lock handle promotes the latch segment by joint pin.
The upper end of the latch segment is provided with the lock to lateral projections, and the upper end of the lock is inclined-plane, the lock with
The hold-down mechanism clamping.
Multiple mounting holes are provided with along short transverse on support frame as described above, the retaining mechanism passes through the installation with different height
Hole is connected, and realizes the height adjustment of the retaining mechanism.
Multiple hold-down mechanisms are connected by the spring being sheathed on the guide pillar.
The guide pillar is connected by guide pillar support seat with the bottom plate, and the guide pillar support seat is hatch frame, in opening
Place is fastened by bolts.
Advantages of the present invention and beneficial effect are：
1. the present invention can carry out accurately detection and the test of positive dummy status stability to the vacuum values of manipulator.
2. apparatus of the present invention are easily operated, batch can be carried out to manipulator and measured simultaneously.
3. apparatus of the present invention can derive from multiple stations, more large batch of measurement demand is met, operating efficiency is improved.
Brief description of the drawings
Fig. 1 is dimensional structure diagram of the invention；
Fig. 2 is exploded perspective view of the invention；
Fig. 3 is the exploded perspective view of the hold-down mechanism of the present invention；
Fig. 4 is the exploded perspective view of the retaining mechanism of the present invention；
Fig. 5 is in the structural representation of locking state for retaining mechanism in the present invention；
Fig. 6 is the exploded perspective view of the guide shaft component of the present invention；
Fig. 7 is frock view of the invention.
In figure：1 is hold-down mechanism, and 101 be linear bearing, and 102 be sealing ring, and 103 be bearing base, and 104 be vacuum hole,
105 be compact heap, and 106 be vacuum blind patch, and 107 be clamping block, and 2 be vacuum line, and 3 be retaining mechanism, and 301 be that buckle is transferred
Plate, 302 be latch segment, and 303 be locking spring, and 304 be lock handle, and 305 be joint pin, and 306 be linear guide shaft, and 307 be lock
Button, 4 be guide pillar, and 5 be support frame, and 501 be chute, and 502 be mounting hole, and 6 be bottom plate, and 7 be spring, and 8 be manipulator, and 9 be chip,
10 be guide pillar bearing.
Embodiment
In order that the object, technical solutions and advantages of the present invention are clearer, below in conjunction with the accompanying drawings with specific embodiment pair
The present invention is described in detail.
As shown in Figure 1-2, a kind of device for Optimum Design manipulator vacuum state that the present invention is provided, including compacting machine
Structure 1, vacuum line 2, retaining mechanism 3, guide pillar 4, support frame 5 and bottom plate 6, wherein bottom plate 6 are provided with two guide pillars 5, Duo Geyi
The hold-down mechanism 1 of hypoelasticity connection is slidably matched with two guide pillars 4, and each hold-down mechanism 1 is connected with a vacuum line 2 respectively, many
The one or both sides of individual hold-down mechanism 1 are provided with the support frame 5 being connected with bottom plate 6, and support frame 5 is provided with retaining mechanism 3, locks machine
The space that structure 3 is used to lock between the hold-down mechanism 1 positioned at the top, two neighboring hold-down mechanism 1 is the survey of inspecting manipuator 8
Measure station.
In one embodiment of the invention, bottom plate 6 is two, is respectively arranged at provided with two support frames 5, retaining mechanism 3
On two support frames 5, the both sides positioned at the hold-down mechanism 1 of the top are locked by two retaining mechanisms 3 respectively, so that multiple
Hold-down mechanism 1 is in locking state, as shown in Figure 7.
Further, multiple hold-down mechanisms 1 pass through the elastic connection of spring 7 that is sheathed on guide pillar 4.
As shown in figure 3, hold-down mechanism 1 includes bearing base 103, compact heap 105 and clamping block 107, wherein bearing base
103 hollow structure to be connected with vacuum line 2, the top and bottom of bearing base 103 are respectively equipped with measurement station groove and pressure
Tight block 105, measurement station groove is provided with vacuum hole 104, and manipulator 8 to be detected is positioned on measurement station groove and internal true
Air road is connected with vacuum hole 104, is sealed at vacuum hole 104 by sealing ring 102.Bearing base 103 passes through linear bearing 101
It is slidably matched with guide pillar 4, the one or both sides of bearing base 103 are provided with clamping block 107, pass through clamping block 107 and retaining mechanism 3
Connection.
Further, vacuum blind patch 106 is provided with vacuum hole 104 and is sealed by sealing ring 102.When in work
During state, in addition to the hold-down mechanism 1 positioned at the top, the vacuum blind patch 106 of remaining hold-down mechanism 1 is laid down, so as to fixed
Position manipulator 8.
In one embodiment of the invention, the both sides of bearing base 103 are arranged with clamping block 107, and two are held clamping block 107
Respectively with the corresponding clamping of retaining mechanism 3.
As shown in figure 4, further, chute 501 is vertically provided with support frame 5, the both sides of chute 501 are along highly
Direction is laid with multiple mounting holes 502, and clamping block 107 is slidably connected with chute 501, and the lower end of clamping block 107 is inclined-plane.Locking machine
Structure 3 is connected by the mounting hole 502 with different height, realizes the height adjustment of retaining mechanism 3.
As shown in figure 4, retaining mechanism 3 includes buckle pinboard 301, latch segment 302, locking spring 303, linear guide shaft
306 and handle assembly, wherein buckle pinboard 301 is connected by bolt with the mounting hole 502 on support frame 5, latch segment 302 with
Linear guide shaft 306 is arranged on buckle pinboard 301, and linear guide shaft 306 is two and is located at the both sides of latch segment 302 respectively,
Be arranged with locking spring 303 on two linear guide shafts 306, the handle assembly and two linear guide shafts 306 be slidably connected and
Positioned at the top of locking spring 303, the handle assembly is used to promote latch segment 302 to make it separate with hold-down mechanism 1, realizes pressure
The unblock of tight mechanism 1.
The handle assembly includes lock handle 304 and joint pin 305, the two ends of lock handle 304 respectively with two lines
Property guide shaft 306 be slidably connected, the two ends of locking spring 303 are abutted with buckle pinboard 301 and lock handle 304 respectively, locking
The two ends of handle 304 are hinged with joint pin 305, and lock handle 304 promotes latch segment 302 by joint pin 305.
As shown in figure 5, further, the upper end of latch segment 302 is provided with the lock 307 to lateral projections, lock 307 and pressure
The clamping of clamping block 107 of tight mechanism 1.The upper end of lock 307 is inclined-plane, when hold-down mechanism 1 moves downwardly to the position of retaining mechanism 3
When putting, the inclined-plane of the upper end of clamping block 107 is slidably matched with latching the inclined-plane of 307 upper ends first, makes clamping block 107 and lock 307
Smooth clamping.
As shown in fig. 6, guide pillar 4 is connected by guide pillar support seat 401 with bottom plate 6, guide pillar support seat 401 is hatch frame,
It is fastened by bolts at opening.The structure is easy to the installation and dismounting of guide pillar 4, while ensure that the stability of guiding.Guide pillar 4
Under the conditions of enough rigidity and amount of deflection is met, the length of guide pillar 4 can be determined according to the quantity of the default station of this device.
In one embodiment of the invention, by four groups of hold-down mechanisms 1 be combined into three measurement stations, adjacent stations it is mutual
Compress and sealed by the vacuum stomata at the tested arm of manipulator 8 of 102 pairs of sealing ring, then by the deadweight of chip 9 to machine
The finger tip vacuum hole of tool hand 8 is sealed, and tested manipulator 8 can be measured by reading external vacuum tabular value after connection vacuum factory service
Vacuum values and vacuum shape fluctuation situation.Chip 9 can use brilliant using a diameter of 100mm in the size of different size, the present embodiment
Piece or 150mm chips.
Three measurement stations are combined into four groups of hold-down mechanisms 1, by that analogy, if the long enough of guide pillar 4, rigidity are sufficiently strong,
N-1 measurement station can be combined into n (n ＞ 2) group hold-down mechanisms 1, measure batch can be achieved.
There is chamfering structure to set on the measurement station groove notch and compact heap 105 of bearing base 103 in hold-down mechanism 1
Meter, it is ensured that tested manipulator 8 can smoothly load specified measurement station groove location.In addition, clamping block 107 is back-off structure, it is ensured that
Hold-down mechanism 1 can auto lock under vertical stress, it is ensured that the stability of measurement process.The material of compact heap 105 is non-gold
Belong to POM, the tested manipulator of protection is compacted process surface and is not scratched.This mechanism uses linear bearing 101 as guide way, really
Hold-down mechanism 1 is protected in the kinetic stability to being tested manipulator course of exerting pressure, is prevented due to uneven the leading of the stress of hold-down mechanism 1
Cause mechanism to produce tiny transverse movement in itself, prevent sealing ring 102 from uniformly being compressed, cause vacuum sealing to fail.Sealing
Circle 102 is fluorine-containing sealing ring, improves the life-span of sealing ring, it is ensured that because excess load repeatedly is compacted, and sealing ring is damaged,
Vacuum sealing is caused to fail.
The present invention operation principle be：
In an initial condition (as shown in Figure 1), each measurement station is due to the effect of the spring 7 on guide pillar 4, allows every group of pressure
Can there be enough gaps in tight mechanism 1, can wait to compress by the smooth measurement station that is put into of tested manipulator 8.At tested manipulator 8
After in tested station groove, operator carries out application external force to the hold-down mechanism 1 of the superiors, and the slide downward of hold-down mechanism 1 makes position
In the clamping of latch segment 302 of the clamping block 107 and retaining mechanism 3 of the hold-down mechanism 1 of the superiors, " click " one is heard at buckle
Sound, it was demonstrated that hold-down mechanism 1 has been locked, as shown in Figure 7.Factory service vacuum is now connected, while with aiding in chip by mechanical finger
Vacuum hole at point is blocked, it is ensured that chip is adsorbed completely, then observes the numerical value situation of external vacuum detecting table and record.
After detection is finished, lock handle 304 is promoted to compress locking spring 303, lock handle 304 passes through joint pin 305
Latch segment 302 is promoted, latch segment 302 is separated with the clamping block 107 of hold-down mechanism 1, hold-down mechanism 1 is in the presence of spring 7
Reply original state.Now, lock handle 304 is unclamped, lock handle 304 is also replied initially by the effect of locking spring 303
State, so as to realize the unblock of hold-down mechanism 1.
In summary, the present invention is applied to the manipulator vacuum shape to being used on semiconductor equipment in semi-conductor processing equipment
State detects that specifically a kind of achievable batches with multiple measurement stations are examined and test machines hand is true with verifying field
The detection of dummy status (fluctuation status for including vacuum values and vacuum values) and experimental rig.This device is broadly divided into three parts：It is close
Sealing mechanism, retaining mechanism, guide shaft fixed mechanism.Operator directly imposes external force to hold-down mechanism, by the buckle knot of retaining mechanism
Structure, which blocks the compact heap of top layer sealing mechanism, compresses tested manipulator air inlet bore region, allows the sealing of tested manipulator bottom
The spring that circle is produced in deformation, and two guide shafts, which deforms upon to produce, upward makes a concerted effort to cause the compact heap of each station can
Tested manipulator is compressed, forming reaction force makes the air inlet bore region of tested manipulator keep sealing.After above procedure,
This detection station can carry out the vacuum values size and fluctuation situation of tested manipulator when connecting external factory service vacuum gas.This dress
The detection accuracy of manipulator can be improved by putting, and can more realize the batch detection of manipulator, improved operating efficiency, substantially increased
The stability and reliability of manipulator in the course of the work, reduce the risk that defective products is loaded into equipment.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the present invention.It is all in the present invention
Spirit and principle within any modification, equivalent substitution and improvements, the extension made etc., be all contained in protection scope of the present invention
It is interior.
Claims (10)
1. a kind of device of Optimum Design manipulator vacuum state, it is characterised in that including hold-down mechanism (1), vacuum line
(2), retaining mechanism (3), guide pillar (4), support frame (5) and bottom plate (6), wherein bottom plate (6) are multiple provided with two guide pillars (5)
The hold-down mechanism (1) of elastic connection is slidably matched with two guide pillars (4) successively, each hold-down mechanism (1) respectively with a vacuum
Pipeline (2) is connected, and the one or both sides of multiple hold-down mechanisms (1) are provided with the support frame (5) being connected with bottom plate (6), the support
Frame (5) is provided with retaining mechanism (3), and the retaining mechanism (3) is used to lock the hold-down mechanism (1) positioned at the top, phase
Space between adjacent two hold-down mechanisms (1) is the measurement station of inspecting manipuator (8).
2. the device of Optimum Design manipulator vacuum state according to claim 1, it is characterised in that the compacting machine
Structure (1) includes bearing base (103), compact heap (105) and clamping block (107), and wherein bearing base (103) is and the vacuum
Measurement station groove and compact heap are respectively equipped with the top and bottom of the hollow structure of pipeline (2) connection, the bearing base (103)
(105), the measurement station groove is provided with vacuum hole (104), manipulator (8) to be detected is positioned on the measurement station groove,
And inner vacuum gas circuit is connected with vacuum hole (104), the bearing base (103) is led by linear bearing (101) with described
Post (4) is slidably matched, and the one or both sides of the bearing base (103) are provided with clamping block (107), by clamping block (107) with
Retaining mechanism (3) connection.
3. the device of Optimum Design manipulator vacuum state according to claim 2, it is characterised in that support frame as described above
(5) chute (501) is vertically provided with, the clamping block (107) is slidably connected with chute (501), the clamping block
(107) lower end is inclined-plane.
4. the device of Optimum Design manipulator vacuum state according to claim 2, it is characterised in that the vacuum hole
(104) place is sealed provided with vacuum blind patch (106) and by sealing ring (102).
5. the device of Optimum Design manipulator vacuum state according to claim 1 or 2, it is characterised in that the lock
Tight mechanism (3) includes buckle pinboard (301), latch segment (302), locking spring (303), linear guide shaft (306) and handle group
Part, wherein buckle pinboard (301) are connected with support frame as described above (5), and the latch segment (302) is set with linear guide shaft (306)
In on buckle pinboard (301), the linear guide shaft (306) is two and is located at the both sides of latch segment (302), two respectively
Locking spring (303), the handle assembly and two linear guide shafts (306) are arranged with the linear guide shaft (306)
Be slidably connected and positioned at locking spring (303) top, the handle assembly be used for promote the latch segment (302) make its with
Hold-down mechanism (1) separation, realizes the unblock of the hold-down mechanism (1).
6. the device of Optimum Design manipulator vacuum state according to claim 5, it is characterised in that the handle group
Part includes lock handle (304) and joint pin (305), the two ends of the lock handle (304) respectively with two linear guide shafts
(306) it is slidably connected, the two ends of the locking spring (303) are supported with buckle pinboard (301) and lock handle (304) respectively
Connect, the two ends of the lock handle (304) are hinged with joint pin (305), and the lock handle (304) passes through joint pin (305)
Promote the latch segment (302).
7. the device of Optimum Design manipulator vacuum state according to claim 5, it is characterised in that the latch segment
(302) upper end is provided with the lock (307) to lateral projections, and the upper end of the lock (307) is inclined-plane, the lock (307)
With the hold-down mechanism (1) clamping.
8. the device of Optimum Design manipulator vacuum state according to claim 1, it is characterised in that support frame as described above
(5) multiple mounting holes (502) are provided with along short transverse on, the retaining mechanism (3) passes through the mounting hole (502) with different height
Connection, realizes the height adjustment of the retaining mechanism (3).
9. the device of Optimum Design manipulator vacuum state according to claim 1, it is characterised in that multiple pressures
Tight mechanism (1) passes through spring (7) elastic connection for being sheathed on the guide pillar (4).
10. the device of Optimum Design manipulator vacuum state according to claim 1, it is characterised in that the guide pillar
(4) it is connected by guide pillar support seat (401) with the bottom plate (6), the guide pillar support seat (401) is hatch frame, in opening
Place is fastened by bolts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710513193.4A CN107192499B (en) | 2017-06-29 | 2017-06-29 | A kind of device of Optimum Design manipulator vacuum state |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710513193.4A CN107192499B (en) | 2017-06-29 | 2017-06-29 | A kind of device of Optimum Design manipulator vacuum state |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107192499A true CN107192499A (en) | 2017-09-22 |
| CN107192499B CN107192499B (en) | 2019-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710513193.4A Active CN107192499B (en) | 2017-06-29 | 2017-06-29 | A kind of device of Optimum Design manipulator vacuum state |
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| CN103234704A (en) * | 2013-03-28 | 2013-08-07 | 昆山希盟自动化科技有限公司 | Automatic air tightness test device |
| CN104198127A (en) * | 2014-09-15 | 2014-12-10 | 苏州赛腾精密电子有限公司 | Air tightness test equipment |
| CN204008034U (en) * | 2014-07-25 | 2014-12-10 | 丰田自动车株式会社 | Leakage detection apparatus |
| US9151689B2 (en) * | 2011-03-23 | 2015-10-06 | Comau Inc. | Flexible leak test apparatus and method |
| US20160033353A1 (en) * | 2014-07-29 | 2016-02-04 | Samsung Electronics Co., Ltd. | Method of automatically inspecting internal gas leak and method of manufacturing led chip |
| CN106017825A (en) * | 2016-06-23 | 2016-10-12 | 苏州艾酷玛赫设备制造有限公司 | Airtightness test device |
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2017
- 2017-06-29 CN CN201710513193.4A patent/CN107192499B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9151689B2 (en) * | 2011-03-23 | 2015-10-06 | Comau Inc. | Flexible leak test apparatus and method |
| CN103234704A (en) * | 2013-03-28 | 2013-08-07 | 昆山希盟自动化科技有限公司 | Automatic air tightness test device |
| CN204008034U (en) * | 2014-07-25 | 2014-12-10 | 丰田自动车株式会社 | Leakage detection apparatus |
| US20160033353A1 (en) * | 2014-07-29 | 2016-02-04 | Samsung Electronics Co., Ltd. | Method of automatically inspecting internal gas leak and method of manufacturing led chip |
| CN104198127A (en) * | 2014-09-15 | 2014-12-10 | 苏州赛腾精密电子有限公司 | Air tightness test equipment |
| CN106017825A (en) * | 2016-06-23 | 2016-10-12 | 苏州艾酷玛赫设备制造有限公司 | Airtightness test device |
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| Publication number | Publication date |
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| CN107192499B (en) | 2019-06-04 |
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