CN107178998B - Vacuum atmosphere oven - Google Patents

Vacuum atmosphere oven Download PDF

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Publication number
CN107178998B
CN107178998B CN201710421016.3A CN201710421016A CN107178998B CN 107178998 B CN107178998 B CN 107178998B CN 201710421016 A CN201710421016 A CN 201710421016A CN 107178998 B CN107178998 B CN 107178998B
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China
Prior art keywords
furnace body
telescopic rod
pallet
heating
vacuum atmosphere
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CN201710421016.3A
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Chinese (zh)
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CN107178998A (en
Inventor
李骞
郭宇峰
姜涛
杨仕伟
徐斌
范晓慧
杨永斌
李光辉
陈许玲
张元波
袁礼顺
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Central South University
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Central South University
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/04Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/08Details peculiar to crucible or pot furnaces
    • F27B14/0806Charging or discharging devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/08Details peculiar to crucible or pot furnaces
    • F27B14/10Crucibles
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00Casings; Linings; Walls; Roofs
    • F27D1/18Door frames; Doors, lids, removable covers
    • F27D1/1858Doors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/04Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
    • F27B2014/045Vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • F27D2009/007Cooling of charges therein

Abstract

The invention discloses a kind of vacuum atmosphere ovens, including furnace body (1), the top of the furnace body (1) is equipped with top fire door (2), the lower section of furnace body (1) is equipped with lower part fire door (3), the inner cavity top of furnace body (1) is equipped with heating room (4), heating device is installed in the heating room (4), air inlet pipe (5) in the furnace being connected in heating room (4) is installed on the furnace body (1), furnace body (1) connects a pumped vacuum systems (6), it is equipped in furnace body (1) and takes discharge mechanism for picking and placing the flexible of material into heating room (4).The vacuum atmosphere oven individually or can be used alternatingly under vacuum, atmosphere, it can be indoor by crucible and material push-in heating in any temperature section in high-temperature atmosphere heating, or in any temperature section by crucible and material quickly from heating indoor taking-up, it is vdiverse in function, easy to operate.

Description

Vacuum atmosphere oven
Technical field
The invention belongs to mineral material smelting equipment technical fields, and in particular to a kind of vacuum atmosphere oven.
Background technique
Vacuum atmosphere oven is mainly used in the high-temperature vacuum melting to various mineral materials.Existing vacuum atmosphere oven is usual Including vacuum melting room, furnace body (contain crucible), vacuum pump group and associated vacuum pipe-line system, electric control system etc..It is existing Vacuum melting furnace be although widely used in handle multi mineral material, but its there is also following main problems: (1) in High Temperature Gas Atmosphere when heating cannot it is in any temperature section that crucible and material push-in heating is indoor or in any temperature section by crucible and It is outdoor that material is quickly down to heating;(2) cannot arbitrarily be opened under protective atmosphere fire door arbitrarily into, take crucible and material, pick and place Material or by material be pushed into or take out heating room when cannot prevent air suck-back, outside air can not be prevented well and enter furnace In vivo.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the shortcomings of to mention in background above technology and defect, provide one It kind individually or can be used alternatingly under vacuum, atmospheric condition, it can be in any temperature section by crucible and object in high-temperature atmosphere heating Material push-in heats interior or by crucible and material quickly from the vacuum atmosphere oven easy to operate for heating indoor taking-up.
In order to solve the above technical problems, technical solution proposed by the present invention are as follows:
A kind of vacuum atmosphere oven, including furnace body, the top of the furnace body are equipped with top fire door, and the lower section of furnace body is equipped with lower part Fire door, the inner cavity top of furnace body are equipped with heating room, and the heating indoor location has heating device, connection is equipped on the furnace body Air inlet pipe in the indoor furnace of the heating, furnace body are equipped with the vacuum orifice for connecting external pumped vacuum systems, in furnace body It is equipped with for taking discharge mechanism to indoor the flexible of pick-and-place material of heating.The vacuum atmosphere oven may be implemented under vacuum, atmosphere It independently or alternatively uses, and crucible and material can be pushed into heating interior in any temperature section or from indoor taking-up is heated, grasped Make simple and convenient.
As further improvement to above-mentioned technical proposal:
Preferably, it is described it is flexible to take discharge mechanism include telescopic rod, the telescopic rod is threaded through on the lower part fire door, is stretched It further includes connecting with the lower end of telescopic rod for driving the flexible lifting cylinder for carrying out picking and placing material of telescopic rod that contracting, which takes discharge mechanism, The upper end of telescopic rod is equipped with pallet, and the pallet is equipped with the crucible chassis for placing crucible, and the bottom of the heating room is set There is the through-hole entered for crucible chassis, telescopic rod and lower part fire door junction are equipped with sealing shroud.By telescopic rod, lifting cylinder, Pallet and the flexible of crucible chassis composition take discharge mechanism to be pushed into or take out heating interior for crucible and material, and structure is simple, behaviour Make reliable.
It is furthermore preferred that the lifting cylinder is two, two lifting cylinders are symmetricly set on the two sides of the telescopic rod, two The end of a lifting cylinder is installed on the lower part fire door, and the piston rod of two lifting cylinders is respectively connected to a connecting plate Both ends, the fixed middle part for being threaded through the connecting plate of telescopic rod.In this way, the flexible stability for taking discharge mechanism can be improved.
Preferably, the telescopic rod is hollow stem, has the channel passed through for crucible in telescopic rod, the pallet includes can Half pallet of a left side of fractionation and right half pallet, left half pallet and right half pallet are slidably installed in the upper end of telescopic rod, the furnace body There are two the tray opening and closing gas for respectively driving left half pallet and right half tray both slid and then open or close pallet for upper installation Cylinder, the crucible chassis include half chassis of left side being arranged on left half pallet and half chassis of the right side that is arranged on half pallet of the right side, institute The bottom for stating telescopic rod is equipped with a blanking opening device, and the lower section of telescopic rod is equipped with a refrigerating device for materials.Telescopic rod is using empty Core bar, pallet are made of left half pallet and right half pallet, and crucible chassis is made of left half chassis and right half chassis, are held in the palm by two Disk opening and closing cylinder controls the open or close of left half pallet and right half pallet respectively, can when left half pallet and right half pallet closure Crucible is placed on crucible chassis and carries out pick-and-place material;When left half pallet and right half pallet separate, crucible is i.e. along telescopic rod Portion channel falls to below furnace body and is cooled down.This, which stretches, takes discharge mechanism that can not only be pushed into or take out heating for crucible and material Room, and material can be down to outside furnace body and carry out cooling in next step.
It is furthermore preferred that two tray opening and closing cylinders are respectively arranged on the left side wall and right side wall of furnace body, two pallets The end for being opened and closed the piston rod of cylinder is equipped with a upward crotch, offers on half pallet of left half pallet and the right side and institute State the hole that crotch matches.Cooperated by the crotch of the piston rod end in hole and tray opening and closing cylinder on pallet, is taken when flexible When discharge mechanism rises, hole and crotch can natural separations;After telescopic rod is fallen, crotch is protruded into hole, then passes through tray opening and closing Cylinders retract can separate left half pallet and right half pallet, and crucible and material are down to below furnace body and cooled down.
Preferably, the heating is indoor is equipped with a graphite inner sleeve in the through hole, activity setting in the graphite inner sleeve One insulation plug, so that mineral material melting in the space of relative closure, the lower inside of graphite inner sleeve is equipped with boss, the guarantor The small diameter to its upper of the lower diameter of Wen Sai, the recessed portion to match with the boss is formed at the lower part of insulation plug, by convex Insulation plug is limited in graphite inner sleeve by platform and the recessed portion to match, and insulation plug is avoided to fall with the flexible decline for taking discharge mechanism It is outdoor to drop down onto heating.
Preferably, it is equipped with one in the lower section of the heating room on the side wall of the furnace body to keep forging ahead material mouth, the material mouth of keeping forging ahead Place is equipped with a manual sealing door, and the inside of the manual sealing door is equipped with an air curtain.Due to being arranged in the inside of manual sealing door There is air curtain, the openable manual sealing door arbitrarily picks and places crucible and material when using under protective atmosphere, can avoid outside air Into in furnace body.
Preferably, the heating room, which is enclosed to set by carbon felt insulation, forms, and is equipped on the inside of the top fire door interior heat-insulated Door.When top fire door is closed, interior insulated door will heat room sealing, reduce distributing for heating room heat.
Preferably, the heating device includes the multiple electrodes being uniformly arranged along the side wall of the furnace body, multiple electricity It is indoor extremely to protrude into the heating, electrode protrudes into the indoor one end of heating and is equipped with heating element, so, it can be ensured that crucible when heating With the uniformity of material heating;It is equipped on furnace body and protrudes into the indoor thermocouple of heating;The furnace body and top fire door are equal For water cooling sandwich structure, the electrode is externally provided with water-cooling jacket, and can making electrode, the service life is longer.
Preferably, the vacuum atmosphere oven further includes a support frame, and the furnace body is mounted on support frame as described above, support frame Lower end by fang bolt install on the ground.
Compared with the prior art, the advantages of the present invention are as follows:
(1) present invention is connected to air inlet pipe in the indoor furnace of heating by installing on furnace body, is arranged on furnace body and is used for The vacuum orifice of the external pumped vacuum systems of connection under vacuum, atmosphere, it can be achieved that individually or be used alternatingly;By pacifying in furnace body It fills for taking discharge mechanism to indoor the flexible of pick-and-place material of heating, it can be in any temperature section by earthenware in high-temperature atmosphere heating Crucible and material push-in heat interior or from the indoor taking-ups of heating, simple to operate.
(2) it takes the telescopic rod in discharge mechanism to be set as hollow stem by will stretch, there is channel, pallet point in telescopic rod For left half pallet and right half pallet, pass through left half pallet of tray opening and closing cylinder open or close and right half pallet, crucible chassis packet Left half chassis and right half chassis are included, the bottom of telescopic rod sets material opening device, sets refrigerating device for materials below telescopic rod, should It is flexible that discharge mechanism is taken not only to can use blowing, but also material can be drop in refrigerating device for materials and be rapidly cooled.
(3) manual sealing door is set at material mouth of keeping forging ahead, air curtain is set in the inside of the manual sealing door.In protective atmosphere Down in use, the openable manual sealing door arbitrarily picks and places crucible and material, avoidable outside air enters in furnace body.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention Some embodiments for those of ordinary skill in the art without creative efforts, can also basis These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram that crucible is packed into state in vacuum atmosphere oven of the present invention.
Fig. 2 is the partial enlarged view in Fig. 1 at A.
Fig. 3 is the partial enlarged view in Fig. 1 at B.
Fig. 4 is that crucible waits the structural schematic diagram for entering heating room state in vacuum atmosphere oven of the present invention.
Fig. 5 is the structural schematic diagram of crucible heated condition in vacuum atmosphere oven of the present invention.
Fig. 6 is the structural schematic diagram of blanking state after the completion of crucible heating in vacuum atmosphere oven of the present invention.
Fig. 7 is the structural schematic diagram of door opened state in vacuum atmosphere oven of the present invention.
Marginal data:
1, furnace body;2, top fire door;3, lower part fire door;4, room is heated;5, air inlet pipe in furnace;6, pumped vacuum systems;7, it stretches Contracting bar;8, lifting cylinder;9, pallet;10, crucible chassis;11, sealing shroud;12, connecting plate;13, crucible;14, tray opening and closing gas Cylinder;15, blanking opening device;16, refrigerating device for materials;17, graphite inner sleeve;18, insulation plug;19, manual sealing door;20, gas Curtain;21, carbon felt insulation;22, interior insulated door;23, electrode;24, heating element;25, thermocouple;26, support frame;27, lower margin Screw;91, left half pallet;92, right half pallet;101, left half chassis;102, right half chassis;141, crotch;171, boss.
Specific embodiment
To facilitate the understanding of the present invention, the present invention is made below in conjunction with Figure of description and preferred embodiment more complete Face meticulously describes, but the protection scope of the present invention is not limited to the following specific embodiments.
It should be strongly noted that when to be described as " be fixed on, be fixed in, be connected to or be connected to " another for a certain element When on element, it can be directly fixed, affixed, connection or is connected on another element, be also possible to by connecting among other Fitting is indirectly fixed, affixed, connects or is connected on another element.
Unless otherwise defined, all technical terms used hereinafter and the normally understood meaning of those skilled in the art It is identical.Technical term used herein is intended merely to the purpose of description specific embodiment, is not intended to the limitation present invention Protection scope.
Embodiment
A kind of vacuum atmosphere oven of the invention, the vacuum atmosphere oven are mainly used in the high temperature melting to various mineral materials Refining, result are as shown in Figures 1 to 7.By Fig. 1 to Fig. 7 as it can be seen that it mainly includes furnace body 1, the top of furnace body 1 is equipped with upper furnace Door 2, the lower section of furnace body 1 are equipped with lower part fire door 3, and the inner cavity top of furnace body 1 is equipped with heating room 4, heat and are equipped with heating dress in room 4 It sets, air inlet pipe 5 in the furnace being connected in heating room 4 is installed on furnace body 1, furnace body 1, which is equipped with for connecting outside and vacuumizing, is The vacuum orifice 6 of system is equipped in furnace body 1 and takes discharge mechanism for picking and placing the flexible of material into heating room 4.
This is flexible, and to take discharge mechanism include telescopic rod 7, and telescopic rod 7 is threaded through on lower part fire door 3, flexible to take discharge mechanism also Including connecting with the lower end of telescopic rod 7 for driving the flexible lifting cylinder 8 for carrying out picking and placing material of telescopic rod 7, telescopic rod 7 it is upper End is equipped with pallet 9, and pallet 9 is equipped with the crucible chassis 10 for placing crucible, and the bottom of heating room 4 is equipped with for crucible chassis 10 The through-hole of entrance, telescopic rod 7 and 3 junction of lower part fire door are equipped with sealing shroud 11.
In the present embodiment, lifting cylinder 8 is preferably two, and two lifting cylinders 8 are symmetricly set on the two sides of telescopic rod 7, The end of two lifting cylinders 8 is installed on lower part fire door 3, and the piston rod of two lifting cylinders 8 is respectively connected to a connection The both ends of plate 12, the fixed middle part for being threaded through connecting plate 12 of telescopic rod 7.
In the present embodiment, telescopic rod 7 is hollow stem, has the channel passed through for crucible 13 in telescopic rod 7, pallet 9 includes Detachable half pallet 91 of a left side and right half pallet 92, half pallet 91 of a left side and right half pallet 92 are slidably installed in the upper end of telescopic rod 7, furnace There are two respectively driving, half pallet 91 of a left side and right half pallet 92 are slided and then the pallet of open or close pallet 9 is opened for installation on body 1 It holds one's breath cylinder 14, crucible chassis 10 includes half chassis 101 of left side being arranged on left half pallet 91 and is arranged on half pallet 92 of the right side Right half chassis 102, the bottom of telescopic rod 7 are equipped with a blanking opening device 15, and the lower section of telescopic rod 7 is equipped with a refrigerating device for materials 16, liquid nitrogen is loaded in the refrigerating device for materials 16.Two tray opening and closing cylinders 14 are respectively arranged on left side wall and the right side of furnace body 1 On wall, the end of the piston rod of two tray opening and closing cylinders 14 is equipped with a upward crotch 141, left half pallet 91 and right day care The hole to match with crotch 141 is offered on disk 92.Lifting cylinder 8, blanking opening device 15 and tray opening and closing cylinder 14 are equal It is controlled by a set of PLC control system.It heats in room 4 and is equipped with a graphite inner sleeve 17, activity in graphite inner sleeve 17 in through hole One insulation plug 18 is set, and the lower inside of graphite inner sleeve 17 is equipped with boss 171, and the lower diameter of insulation plug 18 is small straight to its upper The recessed portion to match with boss 171 is formed at diameter, the lower part of insulation plug 18.It is equipped on the side wall of furnace body 1 in the lower section of heating room 4 One keeps forging ahead material mouth, and a manual sealing door 19 is equipped at material mouth of keeping forging ahead, and the inside of manual sealing door is equipped with an air curtain 20.Heat room 4 It encloses to set by carbon felt insulation 21 and be formed, the inside of top fire door 2 is equipped with interior insulated door 22.
In the present embodiment, heating device includes the multiple electrodes 23 being uniformly arranged along the side wall of furnace body 1, and multiple electrodes 23 are equal It protrudes into heating room 4, one end that electrode 23 protrudes into heating room 4 is equipped with heating element 24;It is equipped on furnace body 1 and protrudes into heating room Thermocouple 25 in 4;Furnace body 1 and top fire door 2 are water cooling sandwich structure, and electrode 23 is externally provided with water-cooling jacket.The vacuum gas Atmosphere furnace further includes a support frame 26, and furnace body 1 is mounted on support frame 26, and the lower end of support frame 26 is mounted on by fang bolt 27 On ground.
When the vacuum atmosphere oven works (under atmosphere): closing top fire door 2, lower part fire door 3 and blanking and open dress 15 are set, lifting cylinder 8 stretches out, and pallet 9 and crucible chassis 10 is made to be located at the lower position of furnace body 1, opens manual sealing door 19, will The crucible 13 for being contained with mineral aggregate is put into crucible chassis 10 from manual sealing door 19, be then shut off manual sealing door 19 (such as Fig. 1 and Shown in Fig. 4);It is passed through protective atmosphere into heating room 4, and heating room 4 is carried out being heated to set temperature, lifting cylinder 8 Contraction moves upwards telescopic rod 7 together with pallet 9 and crucible chassis 10, and into heating room 4, the crucible 13 for filling mineral aggregate is placed in In graphite inner sleeve 17, high melt (as shown in Figure 5) is carried out to mineral aggregate;After the completion of mineral aggregate melting, lifting cylinder 8 stretches out, by earthenware Crucible 13 is retracted to the lower part of furnace body 1, so that the hole on pallet 9 is matched with the crotch 141 on 14 piston rod of tray opening and closing cylinder, Tray opening and closing cylinder 14 retracts, and half pallet 91 of a left side and right half pallet 92 and half chassis 101 of a left side and right half chassis 102 are separated, Blanking opening device 15 is opened, crucible 13 falls into refrigerating device for materials 16 via the inner passage of hollow telescopic rod 7 and carries out It is quickly cooled down (as shown in Figure 6);It opens top fire door 2 and carries out care and maintenance (as shown in Figure 7).
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (9)

1. the top of a kind of vacuum atmosphere oven, including furnace body (1), the furnace body (1) is equipped with top fire door (2), under furnace body (1) Side is equipped with lower part fire door (3), and the inner cavity top of furnace body (1) is equipped with heating room (4), and heating dress is equipped in the heating room (4) It sets, it is characterised in that: air inlet pipe (5) in the furnace being connected in heating room (4), furnace body (1) are installed on the furnace body (1) It is equipped with the vacuum orifice (6) for connecting external pumped vacuum systems, is equipped in furnace body (1) for being taken into heating room (4) It puts the flexible of material and takes discharge mechanism;It is described it is flexible to take discharge mechanism include telescopic rod (7), the telescopic rod (7) is threaded through institute State on lower part fire door (3), it is flexible take discharge mechanism further include connect with the lower end of telescopic rod (7) be used to drive telescopic rod (7) The flexible lifting cylinder (8) for carrying out picking and placing material, the upper end of telescopic rod (7) are equipped with pallet (9), and the pallet (9) is equipped with and is used for The crucible chassis (10) of crucible is placed, the bottom of heating room (4) is equipped with the through-hole entered for crucible chassis (10), telescopic rod (7) sealing shroud (11) are equipped with lower part fire door (3) junction.
2. vacuum atmosphere oven according to claim 1, it is characterised in that: the lifting cylinder (8) is two, two liftings Cylinder (8) is symmetricly set on the two sides of the telescopic rod (7), and the end of two lifting cylinders (8) is installed in the lower furnace On door (3), the piston rod of two lifting cylinders (8) is respectively connected to the both ends of a connecting plate (12), and telescopic rod (7) fixation is worn At the middle part of the connecting plate (12).
3. vacuum atmosphere oven according to claim 1, it is characterised in that: the telescopic rod (7) is hollow stem, telescopic rod (7) there is the channel passed through for crucible (13), the pallet (9) includes detachable half pallet of a left side (91) and right half pallet in (92), left half pallet (91) and right half pallet (92) are slidably installed in the upper end of telescopic rod (7), install on the furnace body (1) There are two respectively drive the pallet that left half pallet (91) and right half pallet (92) slide open or close pallet (9) in turn to open It holds one's breath cylinder (14), the crucible chassis (10) includes a left side half chassis (101) and setting of the setting on left half pallet (91) on the right side The bottom on half chassis of the right side (102) on half pallet (92), the telescopic rod (7) is equipped with a blanking opening device (15), telescopic rod (7) lower section is equipped with a refrigerating device for materials (16).
4. vacuum atmosphere oven according to claim 3, it is characterised in that: two tray opening and closing cylinders (14) set respectively In on the left side wall and right side wall of furnace body (1), it is upward that the end of the piston rod of two tray opening and closing cylinders (14) is equipped with one The hole to match with the crotch (141) is offered on crotch (141), left half pallet (91) and right half pallet (92).
5. vacuum atmosphere oven according to claim 1, it is characterised in that: set in the heating room (4) in the through hole There is a graphite inner sleeve (17), an insulation plug (18) are arranged in activity in the graphite inner sleeve (17), in the lower part of graphite inner sleeve (17) Side is equipped with boss (171), the small diameter to its upper of lower diameter of the insulation plug (18), the lower part of insulation plug (18) formed with The recessed portion that the boss (171) matches.
6. vacuum atmosphere oven according to claim 1, it is characterised in that: in the heating on the side wall of the furnace body (1) The lower section of room (4) is equipped with one and keeps forging ahead material mouth, and a manual sealing door (19) is equipped at the material mouth of keeping forging ahead, the manual sealing door Inside is equipped with an air curtain (20).
7. vacuum atmosphere oven according to claim 1, it is characterised in that: the heating room (4) is by carbon felt insulation (21) It encloses and sets to be formed, interior insulated door (22) are installed on the inside of the top fire door (2).
8. vacuum atmosphere oven according to claim 1, it is characterised in that: the heating device includes along the furnace body (1) The multiple electrodes (23) that are uniformly arranged of side wall, multiple electrodes (23) protrude into the heating room (4), and electrode (23) is stretched Enter to heat one end in room (4) and is equipped with heating element (24);The thermoelectricity protruded into heating room (4) is installed on furnace body (1) Even (25);The furnace body (1) and top fire door (2) are water cooling sandwich structure, and the electrode (23) is externally provided with water-cooling jacket.
9. vacuum atmosphere oven described according to claim 1~any one of 8, it is characterised in that: the vacuum atmosphere oven also wraps It includes a support frame (26), the furnace body (1) is mounted on support frame as described above (26), and the lower end of support frame (26) passes through fang bolt (27) it installs on the ground.
CN201710421016.3A 2017-06-06 2017-06-06 Vacuum atmosphere oven Active CN107178998B (en)

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CN108131950B (en) * 2017-12-19 2018-12-14 中国科学院长春光学精密机械与物理研究所 High-purity atmosphere furnace heat insulation module and its installation method and high-purity atmosphere furnace
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101782320A (en) * 2010-01-08 2010-07-21 河南省西保冶材集团有限公司 Vanadium-nitrogen alloy vacuum furnace
CN202166310U (en) * 2011-06-17 2012-03-14 珠海市华晶微电子有限公司 Special sintering furnace for wear-resisting membrane resistor
CN205066449U (en) * 2015-10-23 2016-03-02 赣州嘉通新材料有限公司 Be used for three multi -functional room fritting furnaces of neodymium iron boron permanent magnet
CN205607132U (en) * 2016-03-18 2016-09-28 浙江万丰科技开发股份有限公司 Automatic change vacuum reacting furnace
CN205821436U (en) * 2016-06-27 2016-12-21 浙江宇清热工科技股份有限公司 A kind of rotatable vacuum heat treatment furnace of vertical double-chamber material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203323554U (en) * 2013-05-17 2013-12-04 合肥科晶材料技术有限公司 Liftable type vacuum high-temperature furnace

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101782320A (en) * 2010-01-08 2010-07-21 河南省西保冶材集团有限公司 Vanadium-nitrogen alloy vacuum furnace
CN202166310U (en) * 2011-06-17 2012-03-14 珠海市华晶微电子有限公司 Special sintering furnace for wear-resisting membrane resistor
CN205066449U (en) * 2015-10-23 2016-03-02 赣州嘉通新材料有限公司 Be used for three multi -functional room fritting furnaces of neodymium iron boron permanent magnet
CN205607132U (en) * 2016-03-18 2016-09-28 浙江万丰科技开发股份有限公司 Automatic change vacuum reacting furnace
CN205821436U (en) * 2016-06-27 2016-12-21 浙江宇清热工科技股份有限公司 A kind of rotatable vacuum heat treatment furnace of vertical double-chamber material

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