CN209260254U - A kind of single crystal growing furnace guide shell external screen and guide shell - Google Patents
A kind of single crystal growing furnace guide shell external screen and guide shell Download PDFInfo
- Publication number
- CN209260254U CN209260254U CN201822091410.8U CN201822091410U CN209260254U CN 209260254 U CN209260254 U CN 209260254U CN 201822091410 U CN201822091410 U CN 201822091410U CN 209260254 U CN209260254 U CN 209260254U
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- screen
- external screen
- interconnecting piece
- interior
- guide shell
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Abstract
The utility model discloses a kind of single crystal growing furnace guide shell external screens of adjustable guide shell external screen height, it is characterized in that it includes upper external screen, lower external screen, upper external screen lower part is equipped with upper external screen interconnecting piece, lower external screen top is equipped with lower external screen interconnecting piece, it is axial straight wall section, along its axial direction at least provided with 2 groups of positioning through hole on upper external screen interconnecting piece, each group of positioning through hole is evenly arranged on the sustained height of external screen interconnecting piece, and lower external screen interconnecting piece is equipped with 1 group of positioning screw hole；Screen includes upper interior screen, lower interior screen in corresponding, and the outer diameter of upper interior screen interconnecting piece is the internal diameter of lower interior screen interconnecting piece, and upper interior screen interconnecting piece can slide in lower interior screen interconnecting piece；Upper external screen and lower external screen are linked into an integrated entity by positioning through hole, positioning screw hole by positioning bolt between upper external screen interconnecting piece and lower external screen interconnecting piece and reach the height for adjusting external screen；The utility model structure is simple, and the external screen of guide shell, interior screen use modularization assembling, has the characteristics that height-adjustable, can meet the needs of different thermal fields, moreover it is possible to be individually replaced, save the cost.
Description
Technical field
The utility model relates to a kind of thermal field of single crystal furnace part, specifically a kind of single crystal growing furnace guide shell, especially
It is related to single crystal growing furnace guide shell external screen and the guide shell of a kind of adjustable guide shell external screen height.
Background technique
Guide shell is one of the key element of pulling single crystal silicon furnace thermal field system, is mainly used for controlling the axial temperature of thermal field
Gradient and guidance argon gas stream.Guide shell obstructs the heat radiation of monocrystalline furnace body and molten silicon to crystal, is conducive to crystal and radiates, and is formed brilliant
Temperature gradient needed for body growth, to improve rate of crystalline growth；The argon gas that guidance is blown from the top down by monocrystalline furnace roof is intensively
It is blown near solid liquid interface, maintains its cleannes, while being more conducive to crystal heat dissipation, temperature needed for increasing crystal growth
Gradient, to improve rate of crystalline growth；Insulation effect is risen to high temperature silicon melt, it is energy saving.Currently, the external screen of guide shell is general
Using carbon/carbon compound material, have the characteristics that high intensity, resistance to erosion, service life are long, safe and reliable.Though interior screen is generally stone
Black material, but due to the cleaning of its local environment, safety, also there is longer service life.
In recent years, thermal field of single crystal furnace speed in large size was getting faster, in order to utilize existing equipment, monocrystalline as far as possible
Manufacturer sufficiently excavates thermal field potential, and by new diseases, continuous upgrade expanding increases inventory.One of method is
Increase crucible by increasing axial space.Due to guide shell and crucible category matching relationship, the height of guide shell also will be with
Increasing for crucible and increase.In this way, the external screen of guide shell and interior screen often just meet with eliminating before failure because of thermal field upgrade expanding,
Form huge waste.
Summary of the invention
The purpose of the utility model is to provide a kind of single crystal growing furnace guide shell external screen of adjustable guide shell external screen height and
Guide shell.
The utility model, which adopts the following technical scheme that, realizes its goal of the invention, a kind of single crystal growing furnace guide shell external screen,
It includes upper external screen, lower external screen, and upper external screen lower part is equipped with upper external screen interconnecting piece, and lower external screen top is equipped with lower external screen interconnecting piece,
For axial straight wall section, the outer diameter of upper external screen interconnecting piece is the internal diameter of lower external screen interconnecting piece, axial extremely along it on upper external screen interconnecting piece
It is equipped with 2 groups of positioning through hole less, each group of positioning through hole is evenly arranged on the sustained height of external screen interconnecting piece, on lower external screen interconnecting piece
Equipped with 1 group of positioning screw hole；Positioning through hole, positioning screw hole are passed through by positioning bolt between upper external screen interconnecting piece and lower external screen interconnecting piece
Upper external screen and lower external screen are linked into an integrated entity and reach the height for adjusting external screen.
For the smooth outflow of monocrystalline furnace atmosphere, the closely upper external screen end of external screen is equipped with rounded corner under the utility model.
A kind of guide shell using above-mentioned guide shell external screen, it includes interior screen, and the interior screen includes upper interior screen, lower interior screen,
Screen lower part is equipped with upper interior screen interconnecting piece in upper, and it is axial straight wall section that lower interior screen top, which is equipped with lower interior screen interconnecting piece, and upper interior screen connects
The outer diameter of socket part is the internal diameter of lower interior screen interconnecting piece, and upper interior screen interconnecting piece can slide in lower interior screen interconnecting piece.
For the smooth outflow of monocrystalline furnace atmosphere, the non-flange end of interior screen is equipped with rounded corner on the utility model.
Due to the adoption of the above technical scheme, the utility model preferably realizes goal of the invention, and structure is simple, guide shell
External screen, interior screen be all made of modularization assembling, have the characteristics that height-adjustable, the needs of different thermal fields can be met；Meanwhile when leading
After there is damage in a certain components of flow cartridge, moreover it is possible to be individually replaced, further save cost, and external screen is equipped with one section of axial straight wall
Section not only will not influence atmosphere in single crystal growing furnace and flow, but also can increase the space of guide shell to the greatest extent, can increase its inside heat preservation
Felt dosage promotes its integral heat insulation；Interior screen also is provided with one section of axial straight wall section, is conducive to crystal heat dissipation, it is raw can to increase crystal
Long required temperature gradient, improves rate of crystalline growth.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of external screen 2 in the present invention；
Fig. 3 is the structural schematic diagram of external screen 6 under the embodiment of the present invention 1；
Fig. 4 is the structural schematic diagram of interior screen 1 on the utility model；
Fig. 5 is the structural schematic diagram of interior screen 4 under the utility model.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and embodiments.
By Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 it is found that a kind of single crystal growing furnace guide shell external screen, it includes upper external screen 2, lower external screen
6, upper 2 lower part of external screen is equipped with upper external screen interconnecting piece 22, and it is axial straight wall section that lower 6 top of external screen, which is equipped with lower external screen interconnecting piece 61,
The outer diameter of upper external screen interconnecting piece 22 is the internal diameter of lower external screen interconnecting piece 61, along its axial direction at least provided with 2 on upper external screen interconnecting piece 22
Group positioning through hole 24, each group of positioning through hole 24 are evenly arranged on the sustained height of external screen interconnecting piece 22, lower external screen interconnecting piece 61
It is equipped with 1 group of positioning screw hole 64；Positioning through hole is passed through by positioning bolt 7 between upper external screen interconnecting piece 22 and lower external screen interconnecting piece 61
24, upper external screen 2 is linked into an integrated entity with lower external screen 6 and reaches the height for adjusting external screen by positioning screw hole 64.
For the smooth outflow of monocrystalline furnace atmosphere, the closely upper external screen end of external screen 6 is equipped with rounded corner under the utility model.
A kind of guide shell using above-mentioned guide shell external screen, it includes interior screen, and the interior screen includes upper interior screen 1, lower interior screen
4, upper interior 1 lower part of screen is equipped with upper interior screen interconnecting piece 11, and it is axial straight wall section that lower interior 4 top of screen, which is equipped with lower interior screen interconnecting piece 41,
The outer diameter of screen interconnecting piece 11 is the internal diameter of lower interior screen interconnecting piece 41 in upper, and upper interior screen interconnecting piece 11 can be in lower interior screen interconnecting piece 41
Sliding.
For the smooth outflow of monocrystalline furnace atmosphere, the non-flange end of interior screen 1 is equipped with rounded corner on the utility model.
The present embodiment is equipped with 5 groups of positioning through hole 24, each group of positioning through hole 24(8 on upper external screen interconnecting piece 22) it is uniformly distributed
On the sustained height of upper external screen interconnecting piece 22, lower external screen interconnecting piece 61 is equipped with 1 group of positioning screw hole 64(8), also it is evenly arranged on
On the sustained height of lower external screen interconnecting piece 61；The hole of the pitch-row of adjacent positioned through-hole 24 and adjacent positioned screw hole 64 on sustained height
Away from identical.The Position Design of positioning through hole 24 and positioning screw hole 64, it should be noted that lower external screen interconnecting piece 61 must cover all
Positioning through hole 24 on upper external screen interconnecting piece 22, it is ensured that monocrystalline furnace atmosphere cannot be directed through guide shell external screen, to protect
Insulating layer 5 after assembly inside guide shell external screen.
In use, firstly, determining according to external screen desired height and using that group positioning through hole 24, then positioning bolt 7 is led to
Cross positioning through hole 24, positioning screw hole 64 links into an integrated entity upper external screen 2 and lower external screen 6.The head of positioning bolt 7 is located at insulating layer
5 sides, advantageously reduce gas-flow resistance, are also avoided that and occur falling after positioning bolt 7 is corroded.
Then, the soft felt dosage of heat preservation is estimated, is uniformly routed in the external screen after combining.Or designed thermal-insulation hard felt is put
It sets in external screen；If internal filling heat insulating wall 5 is soft felt.Soft felt dosage can be suitably adjusted according to the situation after assembling.
The lower interior positioning of screen 4 is placed on the seam allowance of lower external screen 6 again, upper interior screen 1 is placed on the flange of external screen 2, on
Lap-joint between interior screen 1 and lower interior screen 4 is not required to connection fastening, contact.It is incited somebody to action in lap-joint according to air current flow direction
Screen 1 is placed in nearly guide shell center side in upper, and lower interior screen 4 is placed in long-range guided missile flow cartridge center side, advantageously reduces gas-flow resistance, also
Internal insulation felt can be protected.
For the smooth outflow for ensuring monocrystalline furnace atmosphere, the corrosion to external screen, interior screen, the lower closely upper external screen 2 one of external screen 6 are reduced
End and the non-flange end of upper interior screen 1 carry out round corner treatment.
The present embodiment, which can be realized, has grade adjusting to guide shell external screen height.
The external screen of the utility model guide shell, interior screen use modularization assembling, have the characteristics that height-adjustable, can meet not
With the needs of thermal field；Meanwhile after a certain components of guide shell damage, moreover it is possible to it is individually replaced, further saves cost,
And external screen is equipped with one section of axial straight wall section, not only will not influence atmosphere in single crystal growing furnace and has flowed, but also can increase guide shell to the greatest extent
Space, can increase its inside insulation quilt dosage, promote its integral heat insulation；Interior screen is equipped with one section of axial straight wall section, is conducive to
Crystal heat dissipation, temperature gradient needed for can increasing crystal growth improve rate of crystalline growth.
Claims (4)
1. a kind of single crystal growing furnace guide shell external screen, it is characterized in that it includes upper external screen, lower external screen, upper external screen lower part is equipped with upper external screen
Interconnecting piece, lower external screen top are equipped with lower external screen interconnecting piece, are axial straight wall section, and the outer diameter of upper external screen interconnecting piece is lower external screen company
The internal diameter of socket part, along its axial direction at least provided with 2 groups of positioning through hole on upper external screen interconnecting piece, each group of positioning through hole is evenly arranged on outer
On the sustained height for shielding interconnecting piece, lower external screen interconnecting piece is equipped with 1 group of positioning screw hole；Upper external screen interconnecting piece and lower external screen interconnecting piece
Between upper external screen and lower external screen linked into an integrated entity and reached by positioning through hole, positioning screw hole by positioning bolt adjust external screen
Highly.
2. a kind of single crystal growing furnace guide shell external screen according to claim 1, it is characterized in that the closely upper external screen end of lower external screen is equipped with
Rounded corner.
3. a kind of using the single crystal growing furnace as claimed in claim 1 or 2 guide shell of guide shell external screen, it includes interior screen, feature
It is the interior screen include upper interior screen, lower interior screen, upper interior screen lower part is equipped with upper interior screen interconnecting piece, and lower interior screen top is equipped with lower interior screen and connects
Socket part is axial straight wall section, and the outer diameter of upper interior screen interconnecting piece is the internal diameter of lower interior screen interconnecting piece, and upper interior screen interconnecting piece can be under
Sliding in interior screen interconnecting piece.
4. a kind of single crystal growing furnace guide shell according to claim 3, it is characterized in that the non-flange end of upper interior screen is equipped with rounding
Angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822091410.8U CN209260254U (en) | 2018-12-13 | 2018-12-13 | A kind of single crystal growing furnace guide shell external screen and guide shell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822091410.8U CN209260254U (en) | 2018-12-13 | 2018-12-13 | A kind of single crystal growing furnace guide shell external screen and guide shell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209260254U true CN209260254U (en) | 2019-08-16 |
Family
ID=67563334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822091410.8U Active CN209260254U (en) | 2018-12-13 | 2018-12-13 | A kind of single crystal growing furnace guide shell external screen and guide shell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209260254U (en) |
-
2018
- 2018-12-13 CN CN201822091410.8U patent/CN209260254U/en active Active
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