CN107159666A - A kind of method of utilization ozone clean glass - Google Patents
A kind of method of utilization ozone clean glass Download PDFInfo
- Publication number
- CN107159666A CN107159666A CN201710410779.8A CN201710410779A CN107159666A CN 107159666 A CN107159666 A CN 107159666A CN 201710410779 A CN201710410779 A CN 201710410779A CN 107159666 A CN107159666 A CN 107159666A
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- CN
- China
- Prior art keywords
- glass
- ozone
- ultraviolet
- utilization
- clean glass
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
Abstract
The invention discloses a kind of method of utilization ozone clean glass, comprise the following steps：The first step, by glass immersion in 30 DEG C~50 DEG C of organic solvent, after taking-up, is cleaned up with water；Second step, 60~80min is irradiated by the glass of the first step with ultraviolet under vacuum；3rd step, then passes to ozone, and continuation ultraviolet irradiates 10~20min；4th step, is heat-treated, Temperature fall in 200 DEG C~300 DEG C of air；5th step, is put into 3~5min of immersion in 40 DEG C~50 DEG C of HF solution by the glass for being naturally cooling to room temperature, is cleaned up with water, dried.The present invention carries out ultraviolet radiation in a vacuum can decompose hydrocarbon, improve cleaning effect.Ozone is added, faster, commonsense method will radiate 15 20h and could clean totally cleaning capacity, and only need to radiate 60min present invention adds ozone, and cleaning performance is more preferable.
Description
Technical field
The present invention discloses one kind and belongs to glass cleaning field, more particularly to a kind of method of utilization ozone clean glass.
Background technology
At present, the conventional method of cleaning glass is using glass scraper, smears hydrophone, highly-efficient glass cleaning agent, is thoroughly removed dirty
Dirt, to dirt ash and the cement colloid of window frame, window crack, is removed with glass perching knife.Contain antistatic composition in cleaning agent, through cleaning
Rear glass is sparkling and crystal-clear, printing opacity.But easily glass is caused damage.
Application No. CN201510141359.5 Chinese patent application discloses a kind of ultraviolet rays cleaning glass substrate
Method, comprises the following steps：1st, set ultraviolet rays cleaning device parameter, 2, open door, glass substrate is put into pallet, makes substrate
Plane upwards, slips into ultraviolet rays cleaning device conveyer belt, 3, close door, glass substrate receive in device ultraviolet irradiation and to
Device trailer transmission, 4, cleaning operation terminate have buzzer, open door, remove all cleaning original papers.The present invention was produced in LCD
The glass cleaned in journey by light can reach the unapproachable high cleanliness of conventional cleaning method, and in the absence of at the three wastes
Reason problem, is conducive to environmental protection.But the scavenging period of this method is longer.
The content of the invention
The present invention utilizes ozone clean to solve the problem of glass cleaning time is longer in the prior art there is provided one kind
The method of glass, using hydrocarbon in ultraviolet light degradation dirt, greatly reduces follow-up scavenging period and cleaning capacity
By force.
In order to solve the above-mentioned technical problem, technical scheme is：
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 30 DEG C~50 DEG C of organic solvent 10~20min, after taking-up, cleaned up with water；
Second step, 60~80min is irradiated by the glass of the first step with ultraviolet under vacuum；
3rd step, then passes to ozone, and continuation ultraviolet irradiates 10~20min；
4th step, is heat-treated 60~100min, Temperature fall in 200 DEG C~300 DEG C of air；
5th step, is put into 3~5min of immersion in 40 DEG C~50 DEG C of HF solution by the glass for being naturally cooling to room temperature, is cleaned with water
Totally, dry.
Preferably, described ultraviolet wavelength is 20~30 nanometers.
Preferably, organic solvent described in the first step is ethanol, acetone or ethyl acetate.
Preferably, the intake of ozone described in the 3rd step is 2~3g/L/cm3。
Preferably, the 4th step heat treatment temperature is 250 DEG C, heat treatment time is 90min.
Preferably, the mass concentration of the 5th step HF solution is 3~9%.
The present invention carries out ultraviolet radiation in a vacuum can decompose hydrocarbon, improve cleaning effect.Add ozone,
Faster, commonsense method will radiate 15-20h and could clean totally cleaning capacity, and only need to radiation present invention adds ozone
60min, and cleaning performance is more preferable.
Embodiment
The present invention is further described in detail with reference to specific embodiment.
Embodiment 1
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 40 DEG C of organic solvent ethanol, acetone or ethyl acetate 15min, it is clear with water after taking-up
Wash clean；
Second step, 70min is irradiated by the glass of the first step with wavelength for 25 nanometers of ultraviolet under vacuum；
3rd step, then passes to 2.5g/L/cm3Ozone, continuation wavelength irradiates 15min for 25 nanometers of ultraviolet；
4th step, is heat-treated 80min in 250 DEG C of air, and heat treatment temperature is 250 DEG C, and heat treatment time is 90min, from
So cooling；
5th step, by the glass for being naturally cooling to room temperature be put into 45 DEG C, mass concentration for 6% HF solution in soak 4min, use water
Clean up, dry.
Embodiment 2
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 30 DEG C of organic solvent ethanol, acetone or ethyl acetate 10min, it is clear with water after taking-up
Wash clean；
Second step, 60min is irradiated by the glass of the first step with wavelength for 20 nanometers of ultraviolet under vacuum；
3rd step, then passes to 2g/L/cm3Ozone, continuation wavelength irradiates 10min for 20 nanometers of ultraviolet；
4th step, is heat-treated 60min in 200 DEG C of air, and heat treatment temperature is 250 DEG C, and heat treatment time is 90min, from
So cooling；
5th step, by the glass for being naturally cooling to room temperature be put into 40 DEG C, mass concentration for 3% HF solution in soak 3min, use water
Clean up, dry.
Embodiment 3
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 50 DEG C of organic solvent ethanol, acetone or ethyl acetate 20min, it is clear with water after taking-up
Wash clean；
Second step, 80min is irradiated by the glass of the first step with wavelength for 30 nanometers of ultraviolet under vacuum；
3rd step, then passes to 3g/L/cm3Ozone, continuation wavelength irradiates 20min for 30 nanometers of ultraviolet；
4th step, is heat-treated 100min in 300 DEG C of air, and heat treatment temperature is 250 DEG C, and heat treatment time is 90min, from
So cooling；
5th step, by the glass for being naturally cooling to room temperature be put into 50 DEG C, mass concentration for 9% HF solution in soak 5min, use water
Clean up, dry.
Embodiment 4
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 46 DEG C of organic solvent ethanol, acetone or ethyl acetate 18min, it is clear with water after taking-up
Wash clean；
Second step, 68min is irradiated by the glass of the first step with wavelength for 25 nanometers of ultraviolet under vacuum；
3rd step, then passes to 2.7g/L/cm3Ozone, continuation wavelength irradiates 16min for 22 nanometers of ultraviolet；
4th step, is heat-treated 88min in 270 DEG C of air, and heat treatment temperature is 250 DEG C, and heat treatment time is 90min, from
So cooling；
5th step, by the glass for being naturally cooling to room temperature be put into 48 DEG C, mass concentration for 7% HF solution in soak 5min, use water
Clean up, dry.
Reference examples 1
Difference with embodiment 4 is：Omit second step and the 3rd step.
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 46 DEG C of organic solvent ethanol, acetone or ethyl acetate 18min, it is clear with water after taking-up
Wash clean；
Second step, is heat-treated 88min in 270 DEG C of air, and heat treatment temperature is 250 DEG C, and heat treatment time is 90min, from
So cooling；
3rd step, by the glass for being naturally cooling to room temperature be put into 48 DEG C, mass concentration for 7% HF solution in soak 5min, use water
Clean up, dry.
Reference examples 2
Difference with embodiment 3 is：3rd step is not added with ozone, directly radiates.
A kind of method of utilization ozone clean glass, comprises the following steps：
The first step, by glass immersion in 50 DEG C of organic solvent ethanol, acetone or ethyl acetate 20min, it is clear with water after taking-up
Wash clean；
Second step, 80min is irradiated by the glass of the first step with wavelength for 30 nanometers of ultraviolet under vacuum；
3rd step, continuation wavelength irradiates 20min for 30 nanometers of ultraviolet；
4th step, is heat-treated 100min in 300 DEG C of air, and heat treatment temperature is 250 DEG C, and heat treatment time is 90min, from
So cooling；
5th step, by the glass for being naturally cooling to room temperature be put into 50 DEG C, mass concentration for 9% HF solution in soak 5min, use water
Clean up, dry.
Performance test：
| Cleaning capacity | |
| Embodiment 1 | By force |
| Embodiment 2 | By force |
| Embodiment 3 | By force |
| Embodiment 4 | By force |
| Reference examples 1 | It is very weak |
| Reference examples 2 | It is weak |
As can be seen from the table, the present invention carries out ultraviolet radiation in a vacuum can decompose hydrocarbon, improve cleaning effect
Really.Ozone is added, faster, commonsense method will radiate 15-20h and could clean totally cleaning capacity, and present invention adds ozone
Only need to radiate 60min, and cleaning performance is more preferable.
Claims (6)
1. a kind of method of utilization ozone clean glass, it is characterised in that comprise the following steps：
The first step, by glass immersion in 30 DEG C~50 DEG C of organic solvent 10~20min, after taking-up, cleaned up with water；
Second step, 60~80min is irradiated by the glass of the first step with ultraviolet under vacuum；
3rd step, then passes to ozone, and continuation ultraviolet irradiates 10~20min；
4th step, is heat-treated 60~100min, Temperature fall in 200 DEG C~300 DEG C of air；
5th step, is put into 3~5min of immersion in 40 DEG C~50 DEG C of HF solution by the glass for being naturally cooling to room temperature, is cleaned with water
Totally, dry.
2. a kind of method of utilization ozone clean glass according to claim 1, it is characterised in that described ultraviolet ripple
A length of 20~30 nanometers.
3. the method for a kind of utilization ozone clean glass according to claim 1, it is characterised in that organic described in the first step
Solvent is ethanol, acetone or ethyl acetate.
4. a kind of method of utilization ozone clean glass according to claim 1, it is characterised in that ozone described in the 3rd step
Intake be 2~3g/L/cm3。
5. a kind of method of utilization ozone clean glass according to claim 1, it is characterised in that the 4th step heat treatment temperature
Spend for 250 DEG C, heat treatment time is 90min.
6. a kind of method of utilization ozone clean glass according to any one of claim 1 to 5, it is characterised in that the
The mass concentration of five step HF solution is 3~9%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710410779.8A CN107159666A (en) | 2017-06-04 | 2017-06-04 | A kind of method of utilization ozone clean glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710410779.8A CN107159666A (en) | 2017-06-04 | 2017-06-04 | A kind of method of utilization ozone clean glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107159666A true CN107159666A (en) | 2017-09-15 |
Family
ID=59824514
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710410779.8A Pending CN107159666A (en) | 2017-06-04 | 2017-06-04 | A kind of method of utilization ozone clean glass |
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| Country | Link |
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| CN (1) | CN107159666A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115461165A (en) * | 2020-04-24 | 2022-12-09 | 应用材料公司 | Apparatus for reducing deposition of contaminant molecules on a substrate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1071860A (en) * | 1991-06-19 | 1993-05-12 | 莱卡显微及系统有限公司 | The "dead" cleaning method that does not particularly have FCKW that is used for precision optical system or optics |
| CN1550459A (en) * | 2003-03-28 | 2004-12-01 | Hoya株式会社 | Method for manufacturing glass optical element |
| CN105195487A (en) * | 2015-08-04 | 2015-12-30 | 航天科工惯性技术有限公司 | Quartz glass cleaning method |
| CN105637619A (en) * | 2013-11-22 | 2016-06-01 | 野村微科学股份有限公司 | Uv-transmitting-substrate cleaning device and cleaning method |
-
2017
- 2017-06-04 CN CN201710410779.8A patent/CN107159666A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1071860A (en) * | 1991-06-19 | 1993-05-12 | 莱卡显微及系统有限公司 | The "dead" cleaning method that does not particularly have FCKW that is used for precision optical system or optics |
| CN1550459A (en) * | 2003-03-28 | 2004-12-01 | Hoya株式会社 | Method for manufacturing glass optical element |
| CN105637619A (en) * | 2013-11-22 | 2016-06-01 | 野村微科学股份有限公司 | Uv-transmitting-substrate cleaning device and cleaning method |
| CN105195487A (en) * | 2015-08-04 | 2015-12-30 | 航天科工惯性技术有限公司 | Quartz glass cleaning method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115461165A (en) * | 2020-04-24 | 2022-12-09 | 应用材料公司 | Apparatus for reducing deposition of contaminant molecules on a substrate |
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| SE01 | Entry into force of request for substantive examination | ||
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Application publication date: 20170915 |
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| RJ01 | Rejection of invention patent application after publication |