CN107152408A - Vavuum pump - Google Patents
Vavuum pump Download PDFInfo
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- CN107152408A CN107152408A CN201710102875.6A CN201710102875A CN107152408A CN 107152408 A CN107152408 A CN 107152408A CN 201710102875 A CN201710102875 A CN 201710102875A CN 107152408 A CN107152408 A CN 107152408A
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- Prior art keywords
- vavuum pump
- strength parts
- construction
- pump according
- rotor
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The vavuum pump for the reliability for being suitable to improve the damaged countermeasure of rotor is provided.The exhaust gear portion of vavuum pump is in order in the outer circumferential side of rotor formation thread groove exhaust flow path, as being installed on encapsulating shell (1 (1A, 1B)) fixed component of inner circumferential side has thread groove exhaust portion stator (9), in the outer circumferential side of thread groove exhaust portion stator (9), the high-strength parts (10) formed by the specific strength material higher than the material of the thread groove exhaust portion stator (9) are installed, in order to suppress the corrosion of the high-strength parts (10) caused by the corrosion composition in gas, anticorrosion is set to construct (St1) around the high-strength parts (10).
Description
Technical field
The present invention relates to be used as semiconductor- fabricating device, flat panel display manufacturing apparatus, solar cell board manufacturing apparatus
Process chamber, the vavuum pump that utilizes of the gas exhaust means of other chambers, be particularly suitable for improving the reliability of the damaged countermeasure of rotor.
Background technology
As such a vavuum pump, such as the vavuum pump (turbomolecular pump 100) disclosed in known patent document 1.
The vavuum pump (turbomolecular pump 100) of the document 1 possesses configuration turning in encapsulating shell (base portion 50 and housing 52)
Sub (rotor 4), support unit (top radial direction electromagnet 64, the bottom radial direction electromagnet 64 for supporting the rotor to rotate
And thrust electromagnet 66 etc.), the driver element (motor 40) of the rotation driving rotor and will be inhaled by the rotation of the rotor
The exhaust gear portion of the gas exhaust of gas.
The exhaust gear portion of the vavuum pump (turbomolecular pump 100) of the document 1 is (the rotor wing 20, fixed by wing exhaust portion
Sub- wing 44 etc.) and thread groove exhaust portion constitute, thread groove exhaust portion be used as rotor (rotor 4) outer circumferential side formation thread groove row
The unit on air-flow road has the fixed component (screw thread stator 11) installed in the inner circumferential side of encapsulating shell (base portion 50 and housing 52).
In addition, in the vavuum pump (turbomolecular pump 100) of the document 1, as a ring of the damaged countermeasure of rotor, using
The outer circumferential side of fixed component (screw thread stator 11) installs the composition of high-strength parts (high-strength parts 12).
But, according to the vavuum pump (turbomolecular pump 100) of the document 1, due to high-strength parts (high-strength parts 12)
Environment in the gas atmosphere inside vavuum pump, therefore there are high-strength parts (high-strength parts 12) because of the gas gas
Corrosion composition in atmosphere, such as chlorine system gas componant and the risk corroded, due to the high-strength parts (high intensity caused by corrosion
Part 12) intensity decreases, high-strength parts (high-strength parts 12) can not fully play original function, it has to say
Reliability as the damaged countermeasure of rotor is low.
In addition, in the vavuum pump (turbomolecular pump 100) of the document 1, will by flange (mounting flange 11a) although being
Fixed component (screw thread stator 11) is installed on the inner circumferential side of encapsulating shell (base portion 50 and housing 52), but the flange is contacted with encapsulating shell
Construction.Therefore, exist by impulsive force, the torque caused by the destruction of rotor being subject to by high-strength parts via flange
It is delivered to encapsulating shell and produces the power for deforming encapsulating shell, the risk for the power for moving vavuum pump integral-rotation therefore plant vacuum
Overall breakage of caused chamber in rotary moving of pump etc., in terms of the point for making the damaged risk of the various devices for being provided with vavuum pump,
Also have to low as the reliability of the damaged countermeasure of rotor.In a word, in the vavuum pump (turbomolecular pump 100) of the document 1,
The impulsive force of destruction and the countermeasure of torque that reduction is transferred to encapsulating shell in rotor destruction are insufficient.
In addition, the component names and symbol in parantheses in described above are used in patent document 1.
Prior art literature
Patent document
Patent document 1：2015-127525 publications.
The content of the invention
The invention problem to be solved
The present invention be in view of foregoing problems and complete, for the reliability to improving the damaged countermeasure of rotor is provided
Suitable vavuum pump.
The solution used to solve the problem
In order to realize the purpose, it is a feature of the present invention that possessing：Rotor, it is configured in encapsulating shell；Support unit, it is propped up
Supportting the rotor can rotate；Driver element, rotor described in its rotation driving；And exhaust gear portion, it will pass through institute
State rotor rotation and air-breathing gas exhaust, the exhaust gear portion in order to the outer circumferential side of the rotor formation thread groove row
Air-flow road, with the fixed component installed in the inner circumferential side of the encapsulating shell, in the outer circumferential side of the fixed component, be provided with by
Specific strength it is higher than the material of the fixed component material formation high-strength parts, in order to suppress because the corrosion in the gas into
The corrosion of the high-strength parts caused by point, is constructed around the high-strength parts provided with anticorrosion.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, in the week of the high-strength parts
Enclose the seal member that the inflow for being reduced or preventing the gas is set.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, provided with to the high-strength parts
Around the supply corrosion countermeasure gas such as non-active gas corrosion countermeasure gas feed unit.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, to the outer of the high-strength parts
Surface has carried out corrosion resistance surface treatment.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, in the week of the high-strength parts
Enclose filled with the molding material such as resin.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, with as the high-strength parts
The mode for the form being embedded in the fixed component is constituted.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, set and hold in the fixed component
Receive the receiving spaces of the high-strength parts, and the high-strength parts are arranged at the receiving space.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, in the week of the high-strength parts
Enclose the shell for being provided with and surrounding the high-strength parts.
In the present invention, it can also be characterised by：Constructed as the anticorrosion, in the fixed component or described
At least a portion of encapsulating shell is provided with inserted structure.
In the present invention, it can also be characterised by：Anticorrosion construction coordinated by shrink fit, cold pressing or
Any of press-in constitutes the inserted structure.
In the present invention, it can also be characterised by：The fixed component and the encapsulating shell are also in the fixed part
The installation portion of part and the encapsulating shell reduces construction provided with impulsive force torque, and the impulsive force torque reduction construction reduction exists
Impulsive force and the torque of the destruction of the encapsulating shell are transferred to during the rotor destruction.
In the present invention, it can also be characterised by：The installation portion is to link the fixed part by linking flange
The construction of part and the encapsulating shell, the impulsive force torque reduction is configured to the link flange with the modeling of the link flange
It is convex that at least big mode of plastic strain of any one in property fixed component and the encapsulating shell described in strain ratio is plastically deformed
Edge plastic deformation construction.
In the present invention, it can also be characterised by：In flange plastic deformation construction, the link flange
At least thickness of thin of any one in fixed component and the encapsulating shell described at least one of thickness ratio.
In the present invention, it can also be characterised by：The flange plastic deformation construction is formed in the link flange
Have at least any of in groove, constriction or otch.
In the present invention, it can also be characterised by：The link flange and the fixed component and the encapsulating shell
In at least any one be integrally formed.
In the present invention, it can also be characterised by：The impulsive force torque reduction construction possesses the high intensity portion
The upper end of part is located at construction or the institute of the top more top of the part of the formation thread groove exhaust flow path of the rotor
State high-strength parts lower end be located at the rotor the formation thread groove exhaust flow path part bottom further below
Construction, or possess both constructions.
In the present invention, it can also be characterised by：The impulsive force torque reduction construction is by the high intensity portion
The retention groove that the end insertion of part is regularly formed relative to the fixed component is to keep the construction of the high-strength parts.
In the present invention, it can also be characterised by：Wall and the high intensity portion in the inner circumferential side of the retention groove
Space part is provided between part.
In the present invention, it can also be characterised by：Possesses the holding being fixedly disposed relative to the fixed component
Piece, the retention groove is formed at the retention tab.
In the present invention, it can also be characterised by：The intensity of fixed component described in the strength ratio of the retention tab is high.
In the present invention, it can also be characterised by：The impulsive force torque reduction construction is in the high-strength parts
Around be configured with absorb impact padded coaming.
Invention effect
In the present invention, as the specific composition of vavuum pump, it is used as the high intensity portion caused by the corrosion composition in gas of suppression
The means of the corrosion of part, are constructed around the high-strength parts using anticorrosion, it is thus possible to suppressed because corrosive gas causes
High-strength parts corrosion, to suppress the intensity decreases of the high-strength parts caused by corrosion, can chronically be maintained as
For the original function of the high-strength parts of the ring use of the damaged countermeasure of rotor, particularly absorb what is produced by the destruction of rotor
On this point of the impulsive force of destruction, the function of torque, it is used as the reliability of the damaged countermeasure of rotor to improve, using the teaching of the invention it is possible to provide suitable for strengthening
The vavuum pump of rotor breakage countermeasure.
In addition, in the present invention, as the specific composition of vavuum pump, encapsulating shell is transferred in rotor destruction as reduction
Destruction impulsive force, the means of torque, using impulsive force torque reduce construct, it is thus possible to be effectively reduced because of destruction
Overall in rotary moving of the deformation of encapsulating shell caused by impulsive force, torque, vavuum pump, can be avoided because of the overall rotation of vavuum pump
The breakage of room caused by mobile waits, is provided with the breakage of the various devices of vavuum pump, at this point, being used as the damaged countermeasure of rotor
Reliability improve, using the teaching of the invention it is possible to provide suitable for the vavuum pump for the reliability for strengthening the damaged countermeasure of rotor.
Brief description of the drawings
Fig. 1 is the sectional view of applicable vavuum pump of the invention；
Fig. 2 is the first embodiment (the anticorrosion constructions of high-strength parts) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Fig. 3 is, as second embodiment of the present invention (the anticorrosion constructions of high-strength parts), Fig. 1 vavuum pump to be applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Fig. 4 is the explanation figure of the variation of the anticorrosion construction of the high-strength parts shown in Fig. 3；
Fig. 5 is the explanation figure of the variation of the anticorrosion construction of the high-strength parts shown in Fig. 3；
Fig. 6 is, as third embodiment of the present invention (the anticorrosion constructions of high-strength parts), Fig. 1 vavuum pump to be applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Fig. 7 is the 4th embodiment (the anticorrosion constructions of high-strength parts) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Fig. 8 is the 5th embodiment (the anticorrosion constructions of high-strength parts) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Fig. 9 is the 6th embodiment (the anticorrosion constructions of high-strength parts) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Figure 10 is the 7th embodiment (the anticorrosion constructions of high-strength parts) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Figure 11 is the 8th embodiment (the anticorrosion constructions of high-strength parts) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Figure 12 is the 9th embodiment (impulsive force torque reduction construction) as the present invention, and this has been applicable to Fig. 1 vavuum pump
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of invention；
In fig. 13, (a) is the tenth embodiment (impulsive force torque reduction construction) as the present invention, to Fig. 1 vavuum pump
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention is applicable, with figure (b) and (c)
It is with the A direction views in figure (a)；
Figure 14 is the 11st embodiment (impulsive force torque reduction construction) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
Figure 15 is the 12nd embodiment (impulsive force torque reduction construction) as the present invention, and Fig. 1 vavuum pump is applicable
The enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention；
In figure 16, (a) is the 13rd embodiment (impulsive force torque reduction construction) as the present invention, to Fig. 1 vacuum
Pump has been applicable the enlarged section of thread groove exhaust portion stator (fixed component) nearby in the composition of the present invention, and (b) is this hair
The explanation figure of the major part of bright the 13rd embodiment (impulsive force torque reduction construction).
Embodiment
Hereinafter, for for preferred embodiment of the present invention, being described in detail with reference to accompanying drawings.
Fig. 1 is the sectional view of applicable vavuum pump of the invention, and Fig. 2 is (high-strength as the first embodiment of the present invention
Spend the anticorrosion construction of part), the thread groove exhaust portion stator being applicable in the composition of the present invention Fig. 1 vavuum pump is (fixed
Part) neighbouring enlarged section.In addition, in these figures, in order that the major part of the present invention is easily observed, eliminating and turning
The hachure in sub- section.This point is in the other drawings similarly.
Fig. 1 vavuum pump P1 possesses：Encapsulating shell 1；Configure the rotor 6 in encapsulating shell 1；Support rotor 6 can revolve
The support unit SP turned；The driver element DR of rotation driving rotor 6；And, as by the gas of the air-breathing by the rotation of rotor 6
The exhaust gear portion of body exhaust, air-breathing and the wing exhaust portion Pt being vented and utilization are carried out to gas by rotary wings 7 and fixed-wing 8
Thread groove 91 carries out air-breathing and the thread groove exhaust portion Ps being vented to gas.
Encapsulating shell 1 be by the pump case 1A of the tubular and pump base portion 1B of bottomed tube along its cylinder axis direction utilize fastening bolt one
What is linked has round-ended cylinder shape body, and pump case 1A upper end side is open as the air entry 2 for carrying out air-breathing to gas, separately
Outside, in pump base portion 1B bottom side, in order to be vented using the thread groove exhaust portion Ps gases compressed to outside encapsulating shell 1,
Provided with exhaust port 3.
Air entry 2 is connected to and for example partly led by the fastening bolt (not shown) of the flange 1C settings in pump case 1A upper limbs
Process chamber of body manufacture device etc. becomes the closed chamber (not shown) of high vacuum.Exhaust port 3 is connected to (not shown) auxiliary
Help pump.
Central portion in pump case 1A is provided with the cylindrical stator post 4 of built-in various electric components.Although in the true of Fig. 1
In empty pump P1, it is fixed on pump base portion 1B pump base portion 1B in as the part formation stator column 4 separated and by screw threads for fastening
Bottom, so as to stator column 4 is stood up on pump base portion 1B, it is also possible to as embodiment unlike this, by the stator
Post 4 integratedly stands up pump base portion 1B interior bottom.
Rotor 6 is provided with the outside of stator column 4.Rotor 6 is wrapped in pump case 1A and pump base portion 1B, and to surround stator column
The drum of 4 peripheries.
Armature spindle 5 is provided with the inner side of stator column 4.Armature spindle 5 with its upper end towards the direction of air entry 2, and under it
The mode in end towards pump base portion 1B direction is configured.In addition, armature spindle 5 is by magnetic bearing (specifically, known two groups of radial directions
Magnetic bearing MB1 and one group of axial magnetic bearing MB2) support to rotate.Moreover, being provided with drive motor in the inner side of stator column 4
MO, by drive motor MO, armature spindle 5 is rotatably driven around its axle center.
The upper end of armature spindle 5 is protruded upward from the cylinder upper surface of stator column 4, relative to the armature spindle 5 of the protrusion
Upper end, the upper end side of rotor 6 integratedly fixed using fastener meanses such as bolts.So as to which rotor 6 can be via armature spindle 5
And be utilized magnetic bearing support to rotate, in addition, under the holding state, if starting drive motor MO, rotor 6 can
Integratedly rotated with armature spindle 5 around its rotor axis.
As knowable to the explanation more than, in Fig. 1 vavuum pump P1, armature spindle 5 and magnetic bearing are used as support rotor 6
The support unit SP that can be rotated works, in addition, drive motor MO rises as the driver element DR of rotation driving rotor 6
Effect.
[wing exhaust portion Pt details]
Fig. 1 vavuum pump P1 specifically, is arranged using the substantially the center of upstream of rotor 6 as first exhaust mechanism part as the wing
The mode that gas portion Pt works is constituted.Hereinafter, wing exhaust portion Pt is explained.
The outer peripheral face of rotor 6 in the substantially the center of upstream side of rotor 6, integrally provided with multiple rotary wings 7.These are multiple
Rotary wings 7 are by the axle center of the Pivot axle (axle center of armature spindle 5) of the rotor 6 or encapsulating shell 1 (hereinafter referred to as " vacuum pump shaft
The heart ") radially it is arranged as center.
On the other hand, multiple fixed-wings 8 are provided with pump case 1A inner circumferential side, these multiple fixed-wings 8 are also by vacuum pump shaft
The heart is radially arranged as center.
Moreover, in Fig. 1 vavuum pump P1, the rotary wings 7 and fixed-wing 8 radially configured as previously mentioned are along vacuum
The pump shaft heart is alternately with multistage configuration, so as to constitute vavuum pump P1 wing exhaust portion Pt.
Any rotary wings 7 are all the external diameter processing department tabulars that integratedly cutting is formed by machining with rotor 6
Machining product, and tilted with the optimal angle of exhaust to gas molecule.Any fixed-wing 8 is also with the row to gas molecule
The optimal angle of gas is tilted.
[the exhaust event explanation based on wing exhaust portion Pt]
In the wing exhaust portion Pt constituted including more than, pass through drive motor MO starting, armature spindle 5, rotor 6 and multiple rotations
Integratedly rotate at high speed, 7 pairs of the rotary wings of most higher level are assigned in downward direction (from suction the wing 7 from the incident gas molecule of air entry 2
Gas port 2 goes to the direction of exhaust port 3) momentum.The gas molecule of momentum with this in downward direction by fixed-wing 8 by
Send into the side of rotary wings 7 of subordinate.By the momentum of gas molecule will be assigned as described above and feeding action be repeated it is many
Stage, the gas molecule of the side of air entry 2 is vented in the way of the downstream direction towards rotor 6 is shifted successively.
[thread groove exhaust portion Ps details]
In Fig. 1 vavuum pump P1, using the substantially the center of downstream of rotor 6 as second exhaust mechanism part, specifically, as
The mode that thread groove exhaust portion Ps works is constituted.Hereinafter, thread groove exhaust portion Ps is explained.
Thread groove exhaust portion Ps is used as outer circumferential side (specifically, turn in the substantially the center of downstream of rotor 6 in rotor 6
The outer circumferential side of sub 6 parts) form thread groove exhaust flow path R means and there is thread groove exhaust portion stator 9, thread groove exhaust
Portion's stator 9 is installed on the inner circumferential side of encapsulating shell 1 as fixed component.
Although in Fig. 1 vavuum pump P1, by stator mounting element 1D, thread groove exhaust portion stator 9 is installed on into envelope
The inner circumferential side of shell 1 is filled, but stator mounting element 1D is also used as setting with a part of pump base portion 1B one.
Thread groove exhaust portion stator 9 is that the cylindrical shape configured in the opposite mode of the outer peripheral face of inner circumferential surface and rotor 6 is consolidated
Determine part, and configured in the way of surrounding the part of rotor 6 in substantially the center of downstream of armature spindle 6.
Moreover, the part of rotor 6 in the substantially the center of downstream of armature spindle 6 is the rotary part as thread groove exhaust portion Ps
The part of rotation, and insert, be contained in the inner side of thread groove exhaust portion stator 9 across set gap.
Thread groove 91 is formed with the inner peripheral portion of thread groove exhaust portion stator 9, the depth of the thread groove 91 changes downward
For the cone shape of path.The upper end of the thread groove 91 from thread groove exhaust portion stator 9 is helically carved to lower end to be set.
By possessing the thread groove exhaust portion stator 9 of foregoing thread groove 91, being formed in the outer circumferential side of rotor 6 is used for
The thread groove exhaust flow path R of gas exhaust.In addition, although omit diagram, it is also possible to by by the thread groove illustrated before
91 are formed at the outer peripheral face of rotor 6 to set foregoing thread groove exhaust flow path R mode to constitute.
In thread groove exhaust portion Ps, by traction (drag) effect of thread groove 91 and the outer peripheral face of rotor 6, compression and
Transfer gas, thus the depth of thread groove 91 with thread groove exhaust flow path R upstream inlet side (away from the stream that air entry 2 is nearer
Road openend) place is most deep, and set in outlet side downstream (away from the stream openend that exhaust port 3 is nearer) place most shallow mode
It is fixed.
Thread groove exhaust flow path R entrance (upstream open end) is consolidated towards most subordinate among multistage the fixed-wing 8 configured
Gap (hereinafter referred to as " final the clearance G 1 ") opening between wing 8E and thread groove exhaust portion stator 9 is determined, in addition, the thread groove is arranged
Air-flow road R outlet (downstream open end) passes through the stream S of exhaust side in pump (hereinafter referred to as " exhaust side stream S " in pump)
It is communicated in exhaust port 3.Although omitting diagram, final clearance G 1 can also be formed at the rotary wings 7 configured multistagely among
Between the rotary wings and thread groove exhaust portion stator 9 of most subordinate.
Exhaust side stream S passes through in rotor 6, the bottom of thread groove exhaust portion stator 9 and pump base portion 1B in the pump
Inner bottom part between set set gap (in Fig. 1 vavuum pump P1, the form enclosed around the lower, outer perimeter one of stator column 4
Gap) and by from thread groove exhaust flow path R export to exhaust port 3 in the way of formed.
[the exhaust event explanation at thread groove exhaust portion Ps]
The transfer carried out by the exhaust event of the wing exhaust portion Pt by illustrating before, reaches the gas point of foregoing final clearance G 1
Son is transferred to thread groove exhaust flow path R.The gas molecule of transfer side quilt due to the drag effect for rotating generation by rotor 6
Shifted from transition flow boil down to viscous flow and towards exhaust side stream S in pump.Then, the gas of exhaust side stream S in pump is reached
Body molecule flows into exhaust port 3, and is vented by auxiliary pump (not shown) to outside encapsulating shell 1.
[rotor breakage countermeasure]
In the outer circumferential side of thread groove exhaust portion stator 9 (fixed component), high-strength parts 10 are installed as rotor damaged countermeasure,
High-strength parts 10 are formed by the specific strength material higher than the material of the thread groove exhaust portion stator 9.It is used as the high-strength parts
10, although such as CFRP (carbon fiber reinforced plastic) can be used, but be not limited to CFRP.
In addition, in the damaged countermeasure of the rotor, being used as the ratio for reducing the impulsive force of destruction, torque is transmitted to the side of encapsulating shell 1
The means of example, between high-strength parts 10 and encapsulating shell 1 (pump case 1A, pump base portion 1B), high-strength parts 10 and thread groove row
Between gas portion stator 9, provided with cushion space G2, the G3 being made up of the gap of set amplitude.
In Fig. 1 vavuum pump P1, high-strength parts 10 are to the installation portion of thread groove exhaust portion stator 9 as shown in Fig. 2 being
End 10A, 10B of high-strength parts 10 are inserted and be held in fixed relative to thread groove exhaust portion stator 9 (fixed component)
The construction of retention groove 11A, 11B of ground formation.
As the specific configuration example of the holding based on foregoing retention groove 11A, 11B, in Fig. 1 vavuum pump P1,
Using flange 9A in the upper end periphery of thread groove exhaust portion stator 9, is set, on the other hand, in the thread groove exhaust portion stator 9
Bottom, install with opposite flange 9A retention tab 9B, and flange 9A lower surface and retention tab 9B it is upper
Surface forms the construction of retention groove 11A, 11B opposite to each other.
In addition, in Fig. 1 vavuum pump P1, if the rotor 6 of rotation is destroyed at a high speed, the fragment of the rotor 6 is also to screw thread
Disperse in the direction of groove exhaust portion stator 9.Pass through the conflict of the fragment of rotor 6 so dispersed, the impulsive force and torque of destruction
In thread groove exhaust portion stator 9, thread groove exhaust portion stator 9 is intended to (outside) deformation in the direction of encapsulating shell 1.
But, in Fig. 1 vavuum pump P1, due to being provided with high intensity portion in the outer circumferential side of thread groove exhaust portion stator 9
Part 10, therefore the outside deformation of foregoing thread groove exhaust portion stator 9 is effectively inhibited by high-strength parts 10.Cause
This, can be avoided the phenomenon that thread groove exhaust portion stator 9 is deformed and is in close contact with the side of encapsulating shell 1 in the destruction of rotor 6, because
This, the impulsive force of the destruction of the side of encapsulating shell 1, torque are delivered to from thread groove exhaust portion stator 9 and is reduced.
[being applicable for the anticorrosion construction of the high-strength parts in Fig. 1 vavuum pump]
In Fig. 1 vavuum pump P1, suppression high-strength parts 10 caused by the corrosion composition in the gas being vented are used as
The means of corrosion, can set any in the anticorrosion construction St1 shown in Fig. 2 to Figure 11 around high-strength parts 10
Kind.
[high-strength parts anticorrosion construction (one of)]
Fig. 2 anticorrosion construction St1 by around high-strength parts 10 set seal member 12A, 12B, 12C come relative to
Corrosive gas protects high-strength parts 10.Although seal member 12A, 12B, 12C setting unit potential energy are enough appropriate as needed
Change, but in Fig. 1 vavuum pump P1, seal member is provided with following gas leak (first to third gas leak)
12A、12B、12C。
(1) first gas leak
The installation portion to encapsulating shell 1 (specifically stator mounting element 1D) of thread groove exhaust portion stator 9 (is set in the installation portion
Put seal member 12A).
(2) second gas leak
The retention tab 9B installation portion to the bottom of thread groove exhaust portion stator 9 (in the installation portion, seal member 12B is set).
(3) third gas leak
(sealing is set herein between the retention tab 9B and encapsulating shell 1 (specifically pump base portion 1B or stator mounting element 1D)
Part 12C).
In Fig. 2 anticorrosion construction St1, as the composition that seal member 12C is set in the third gas leak,
Although the composition deformed as shown in Figure 2 to vavuum pump axis direction using seal member 12C, can also be different from, use
Radial directions (hereinafter referred to as " vavuum pump radial direction ") of the seal member 12C along pump case 1A or rotor 6 is deformed as shown in Figure 3
Constitute.Compared with the composition that seal member 12A, 12B, 12C is deformed all along vavuum pump axis direction as shown in Figure 2, such as Fig. 3 that
Sample is just that only one seal member 12C manages appearance along the also size with short transverse that constitutes that vavuum pump radial direction is deformed
Easy advantage.
In addition, in Fig. 3 anticorrosion construction St1, due to seal member 12C is being arranged at into the third gas leakage
On the basis of portion, encapsulating shell 1 (specifically stator mounting element 1D) is set to be abutted with retention tab 9B, and seal member 12C is set
The abutting part is placed in, therefore the impulsive force and torque of destruction are easily delivered to the side of encapsulating shell 1 via such a abutting part.
Therefore, in Fig. 3 anticorrosion construction St1, it regard a retention tab 9B part as the thin-walled thinner than other parts
Portion 13 is formed, and is broken under the impulsive force of destruction, torque to make the impulsive force of destruction, torque to encapsulating shell by the thinner wall section 13
The ratio of 1 side transmission is reduced.
Although such as O-ring can be used as seal member 12A, 12B, 12C, this is not limited to.In addition, as being used for
The seal groove that seal member 12A, 12B, 12C are set is accommodated, (section is quadrangle to square groove as being not limited to Fig. 2, Fig. 3
Groove), for example, it is also possible to using triangular groove as dovetail groove, Fig. 5 as Fig. 4.Dovetail groove have prevent seal member 12A,
The effect that 12B, 12C come off, triangular groove, which has, can carry out short transverse and the sealed effect of radial direction simultaneously.
[the anticorrosion constructions (two) of high-strength parts]
Fig. 6 anticorrosion construction St1 is provided with to supplying the corrosion countermeasure gas such as non-active gas around high-strength parts 10
Corrode countermeasure gas feed unit 14.The corrosion countermeasure gas feed unit 14 specifically from the outside of encapsulating shell 1 via
Gas supplying path 14A supplies the composition for corroding countermeasure gas to cushion space G2.As the example of non-active gas, it can enumerate
Also the nitrogen that warp is used frequently as industrial gasses.
First gas leak that cushion space G2 illustrates before due to being communicated in (thread groove exhaust portion stator 9 it is relative
In encapsulating shell 1 (specifically stator mounting element 1D) installation portion) and third gas leak (retention tab 9B and encapsulating shell 1
Between (specifically stator mounting element 1D)), therefore by improving buffering to cushion space G2 supplies corrosion countermeasure gas
Space G2 pressure, subtracts from first gas leak and third gas leak to cushion space G2 corrosive gas inflow amount
Less, thus therefore the corrosion of high-strength parts 10 is effectively pressed down caused by the corrosive gas in kind inflow cushion space G2
System.
[the anticorrosion constructions (three) of high-strength parts]
Although omitting diagram, constructed as other anticorrosions beyond foregoing, can also be to the outer surfaces of high-strength parts 10
(surface) carries out corrosion resistance surface treatment.It is surface-treated as such a corrosion resistance, it is contemplated that for example to high-strength parts 10
Outer surface carry out such as nickel plating corrosion resistant material plating handle or corrosion resistance coating coating process or resin
The mode of coating.Epoxylite can be used in resin coating.
[the anticorrosion constructions (four) of high-strength parts]
Fig. 7 anticorrosion construction St1 use by around high-strength parts 10 (specifically, cushion space G2, G3) fill out
The molding material MM such as resin is filled to utilize molding material MM to be molded the molding construction of high-strength parts 10.It is used as molding material
MM, for example, can use epoxylite.
St1 is constructed according to the anticorrosion of the Fig. 7, because high-strength parts 10 are moulded by molding material MM, therefore high intensity portion
Part 10 will not be directly exposed to corrosive gas, can effectively suppress the corruption of the high-strength parts 10 caused by corrosive gas
Erosion.
[the anticorrosion constructions (five) of high-strength parts]
Fig. 8 anticorrosion construction St1 is constituted as follows：When using casting to manufacture thread groove exhaust portion stator, pass through
High-strength parts 10 are arranged in mold used in the manufacture and cast, and thread groove is embedded in as high-strength parts 10
Form in exhaust portion stator 9.
From suppressing caused by high temperature during because of casting from the viewpoint of intensity decreases of high-strength parts 10 etc., in use figure
During 8 anticorrosion construction St1, the anticorrosion construction St1 shown in Fig. 9 can also be applicable.Fig. 9 antiseptic countermeasure is constructed with as follows
Mode is constituted：When using casting to manufacture thread groove exhaust portion stator 9, have by being in advance contained in high-strength parts 10
High-strength parts 10 are together set to mold with the shell 15 and cast by the shell 15 of heat resistance, and are buried as high-strength parts 10
Enter the form in thread groove exhaust portion stator 9, i.e. the shell for surrounding high-strength parts 10 is set around high-strength parts 10
15.In addition, in this case, needing to extract air out from heat-resisting shell in casting.
In the case of using Fig. 8, Fig. 9 anticorrosion construction St1, because high-strength parts 10 are by casting (thread groove
Exhaust portion stator 9) covering form, therefore high-strength parts 10 will not be directly exposed to corrosive gas, can effectively suppress
The corrosion of high-strength parts 10 caused by corrosive gas, further, since high-strength parts 10 are maintained in casting, therefore
Retention tab 9B (reference picture 2) is not needed, at this point, can seek the reduction of part number of packages yet.
[the anticorrosion constructions (six) of high-strength parts]
Figure 10 anticorrosion construction St1 is that receiving space G4 is set in thread groove exhaust portion stator 9, and in the receiving space
The construction of high-strength parts 10 is set in G4.
Receiving space G4 can be formed by the machining such as cutting.In addition, can use by receiving space G4's
Between inwall and high-strength parts 10, potting resin etc. moulds material to set molding section 16, or, foaming metal material is set
The padded coaming such as material, ojosa material, sintered metal materials, configuration absorbs the slow of impact around the high-strength parts 10
Rush the composition of material.Moreover, in the anticorrosion construction St1 of the Figure 10, also high-strength parts 10 can be put into shell and be configured
In receiving space G4.
In Figure 10 anticorrosion construction St1, using following composition：In receiving space G4 inwall and high-strength parts 10
Between, potting resin etc. moulds material to set molding section 16, and is used as the molding section 16, the anti-dropout of high-strength parts 10
Means, through hole 17 is opened up from the outside of thread groove exhaust portion stator 9 towards receiving space G4, the also fill mould in the through hole 17
Prepared material, so as to form anticreep projection 18.
Although omitting diagram, by replacing the through hole 17, in receiving space G4 inwall formation recess, and at this
The composition of fill mould prepared material in recess, also results in action effect (molding section 16, the high intensity same with anticreep projection 18
The anticreep of part 10).
[the anticorrosion constructions (seven) of high-strength parts]
In Fig. 1 vavuum pump P1, the installation portion to encapsulating shell 1 of thread groove exhaust portion stator 9 is thread groove as shown in figure 11
The upper end of exhaust portion stator 9 and encapsulating shell 1 (the stator mounting element 1D for specifically, being installed on the inner side of encapsulating shell 1) pass through
The construction (inserted structure) for being fitted together to 19 and linking.
Figure 11 anticorrosion construction St1 is made up of as previously described interference fits such as shrink fit, cold pressing cooperation or press-ins
Thread groove exhaust portion stator 9 upper end and chimeric 19 (hereinafter referred to as " first chimeric 19 ") of encapsulating shell 1.
In addition, in Figure 11 anticorrosion construction St1, using by being fitted together to 20 by the lower end of thread groove exhaust portion stator 9
The construction that portion and encapsulating shell 1 link, and the thread groove exhaust portion stator 9 bottom and encapsulating shell 1 chimeric 20 (hereinafter referred to as
For " second chimeric 20 ") similarly, it is made up of interference fits such as shrink fit, cold pressing cooperation or press-ins.
St1 is constructed according to Figure 11 anticorrosion, by constituting first chimeric 19 by shrink fit etc., via first gas
The influx that body leak goes to cushion space G2 corrosive gas is reduced, and embedding by constituting second by shrink fit etc.
20 are closed, the influx that cushion space G2 corrosive gas is gone to via the third gas leak is reduced, it is thus possible to had
The corrosion of effect ground reduction high-strength parts 10 caused by flowing into the corrosive gas in cushion space G2.
In addition, although in Figure 11 anticorrosion construction St1, as it was previously stated, coordinating or pressing by shrink fit, cold pressing
The interference fit such as enter and constitute the first chimeric 19 and second chimeric 20 both sides, but this composition can also be only applicable to any chimeric (19
Or 20).
[impulsive force of the destruction of encapsulating shell and the reduction of torque are transferred in Fig. 1 vavuum pump]
In Fig. 1 vavuum pump P1, impulsive force and the torque of the destruction of encapsulating shell 1 are delivered to when rotor 6 is destroyed as reduction
Means, any of impulsive force torque reduction construction that Figure 12 shows into Figure 16 can be set.
One of [impulsive force torque reduction construction ()]
In Fig. 1 vavuum pump P1, the installation portion to encapsulating shell 1 of thread groove exhaust portion stator 9 is thread groove as shown in figure 12
The upper end of exhaust portion stator 9 and encapsulating shell 1 pass through the construction that links flange 21 and link.In addition, although in Figure 12 example
In, the upper end periphery that flange 21 is located at thread groove exhaust portion stator 9 will be linked, but be used as its replacement, additionally it is possible to use this
Plant and link the composition that flange 21 is located at the side of encapsulating shell 1.
Figure 12 impulsive force torque reduction construction St2 is (hereinafter referred to as " convex using the construction for linking the plastic deformation of flange 21
Edge plastic deformation construction "), so as to link plastic strain ratio thread groove exhaust portion stator 9 (fixed component) and the encapsulation of flange 21
In shell 1 at least any one plastic strain it is big.
The embodiment of construction is plastically deformed as said flange, in Figure 12 impulsive force torque reduction construction St2, with
Link at least one of thickness t1 of flange 21 than at least appointing in thread groove exhaust portion stator 9 (fixed component) and encapsulating shell
The mode of the thickness of thin of one is constituted.
In addition, in Figure 13 (a) impulsive force torque reduction construction St2, the reality of construction is plastically deformed as the flange
Example is applied, groove 22 is formed with linking flange 21.
If by the presence of groove 22, meeting the condition that flange 21 is plastically deformed before thread groove exhaust portion stator 9 that links,
Then the form of groove 22 is not limited to especially.
For example, as shown in Figure 13 (b), ring-type is formed as in the upper end for linking the threadingly groove exhaust portion stator 9 of flange 21
In the case of, groove 22 can also be identically formed as ring-type with linking flange 21.
In addition, as shown in Figure 13 (c), in the case where Figure 13 (a) segmentation of link flange 21 is formed as multiple pieces of 21A,
Groove 22 can also be formed in the way of the form attenuated in the middle of as the part for making block 21A.
Although omitting diagram, it is plastically deformed and constructs as flange, otch can also be formed.
In addition, link flange 21 can with it is at least any in thread groove exhaust portion stator 9 (fixed component) and encapsulating shell 1
Person is integrally formed.
[impulsive force torque reduction construction (two)]
It is used as high-strength parts 10, although fiber-reinforced plastic as example known CFRP can be used, but it is strong by fiber
The end of the high-strength parts 10 of change plastics formation tensile strength compared with the part beyond it is low.Think to mould by fibre strengthening
The reason for fibre breakage inside the end for the high-strength parts 10 that material is formed is the intensity decreases.
Therefore, can not fully it be absorbed because of rotor in the end of the high-strength parts 10 formed by fiber-reinforced plastic
The impulsive force of destruction, torque caused by 6 fragment.In contrast, in the high-strength parts 10 formed by fiber-reinforced plastic
Part beyond end, because internal fiber is continuous without interrupting, therefore can fully absorb impulsive force, the torque of destruction.
According to view of the above, in Figure 14 impulsive force torque reduction construction St2, using the upper end of high-strength parts 10
10A be located at the top 6A more top of the part for forming thread groove exhaust flow path R of rotor 6 construction and, high-strength parts
10 lower end 10B is located at the constructions of the bottom 6B of the part for forming thread groove exhaust flow path R of rotor 6 further below.On this
A little constructions, any one can be also omitted as needed.
[impulsive force torque reduction construction (three)]
Reference picture 15, as it was previously stated, in Fig. 1 vavuum pump P1, the peace to thread groove exhaust portion stator 9 of high-strength parts 10
Dress portion is that the end (upper end 10A and lower end 10B) of high-strength parts 10 is held in the form of insertion in thread groove exhaust portion
The construction for retention groove 11A, 11B that the side of stator 9 is set.
By it is foregoing keep construction premised on, Figure 15 impulsive force torque reduction construction St2 be retention groove 11A,
Space part G5 construction is provided between the wall and high-strength parts 10 of 11B inner circumferential side.
In the non-existent compositions of the space part G5, i.e. the inwall of retention groove 11A, 11B is close to high-strength parts 10
In the case of composition, impulsive force and the torque for putting on the destruction of thread groove exhaust portion stator 9 are direct via high-strength parts 10
The side of encapsulating shell 1 is delivered to, but in the case of the composition that there is foregoing space part G5, buffering is used as by space part G5
Material works, and is transferred to impulsive force, the torque reduction of the destruction of the side of encapsulating shell 1.
[impulsive force torque reduction construction (four)]
In the case of the low intensity of retention tab 9B strength ratio thread groove exhaust portion stator 9 (fixed component), due to putting on
The impulsive force of the destruction of thread groove exhaust portion stator 9, torque, retention tab 9B are damaged before thread groove exhaust portion stator 9, high-strength
The hold mode of degree part 10 is disintegrated, thus can not fully absorb in high-strength parts 10 impulsive force, the torque of destruction.
Therefore, in Figure 15 impulsive force torque reduction construction St2, to make retention tab 9B intensity become to compare spiral shell by aftermentioned construction
The mode that the intensity of groove exhaust portion stator 9 is high is constituted.
More specifically, it is preferable that, retention tab 9B retention groove 11B wall 11W intensity, retention tab 9B installation strength
Intensity than thread groove exhaust portion stator 9 is high.
As the strong and weak specific configuration constituted for obtaining foregoing intensity, in Figure 16 (a) impulsive force torque
In reduction construction St2, constitute as follows：End difference 23 is formed by the lower end in thread groove exhaust portion stator 9, with
Compared in the retention groove 11B of retention tab 9B formation wall 11W thickness t3, the thickness of the lower end of thread groove exhaust portion stator 9
Spend t4 relatively thin or equal.By using this construction, in the case where absorbing impulsive force or torque using high-strength parts 10, also can
Enough prevent before the retention tab 9B wall 11W of high-strength parts 10 fractures are kept, retention tab 9B falls etc., deficiently absorb
The impulsive force of destruction, the situation of torque, but it is not limited to this.
, can be by using the high material of the constituent material of strength ratio thread groove exhaust portion stator 9 although omitting diagram
Retention tab 9B is constituted, is constituted to obtain the strong and weak of foregoing intensity, in addition, in the utilization as shown in Figure 15 (b) along true
In the case that retention tab 9B to be mounted on to the bolt B T1 of empty pump axis direction thread groove exhaust portion stator 9, it can also pass through
Increase bolt B T1 radical and constituted to obtain the strong and weak of foregoing intensity.
The present invention is not limited to embodiments described above, in the technological thought of the present invention, by the art
People with usual knowledge, can carry out numerous deformations.
In addition, each embodiment described above can also be applied in combination.It can be applicable to only thread groove exhaust portion Ps
Vavuum pump.
Symbol description
1 encapsulating shell
1A pump cases
1B pump base portions
1C flanges
1D stator mounting elements
2 air entries
3 exhaust ports
4 stator columns
5 armature spindles
6 rotors
The top of 6A rotors
The bottom of 6B rotors
7 rotary wings
8 fixed-wings
9 thread groove exhaust portion stators (fixed component)
9A flanges
9B retention tabs
91 thread grooves
10 high-strength parts
The end (upper end) of 10A high-strength parts
The end (lower end) of 10B high-strength parts
11A, 11B retention groove
The wall of 11W retention grooves
12A, 12B, 12C seal member
The thinner wall section of 13 retention tabs
14 corrosion countermeasure gas feed units
15 shells
16 molding section
17 through holes
18 anticreep projections
The upper end of 19 thread groove exhaust portion stators and being fitted together to for encapsulating shell
The bottom of 20 thread groove exhaust portion stators and being fitted together to for encapsulating shell
21 link flange
22 grooves
23 end differences
BT1 bolts
DR driver elements
The final gaps of G1
G2, G3 cushion space
G1 receiving spaces
G5 space parts
MM moulds material
MB magnetic bearings
MB1 radial direction magnetic bearings
MB2 axial magnetic bearings
MO motors
P1 vavuum pumps
Pt wing exhaust portions
Ps thread groove exhaust portions
R thread groove exhaust flow paths
Exhaust side stream in S pumps
SP support units
St1 anticorrosions are constructed
St2 impulsive forces torque reduction construction
Claims (21)
1. a kind of vavuum pump, it is characterised in that possess：
Rotor, it is configured in encapsulating shell；
Support unit, supports the rotor to rotate；
Driver element, rotor described in its rotation driving；And
Exhaust gear portion, its by the gas exhaust of the air-breathing by the rotation of the rotor,
The exhaust gear portion is in order in the outer circumferential side of rotor formation thread groove exhaust flow path, with installed in the encapsulation
The fixed component of the inner circumferential side of shell,
In the outer circumferential side of the fixed component, be provided with by the specific strength material higher than the material of the fixed component formed it is high-strength
Spend part,
In order to suppress the corrosion of the high-strength parts caused by the corrosion composition in the gas, in high-strength parts week
Enclose provided with anticorrosion construction.
2. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, setting is reduced or prevented the inflow of the gas around the high-strength parts
Seal member.
3. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, provided with to supplying the corrosion countermeasure gas such as non-active gas around the high-strength parts
Corrosion countermeasure gas feed unit.
4. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, corrosion resistance surface treatment has been carried out to the outer surface of the high-strength parts.
5. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, filled with the molding material such as resin around the high-strength parts.
6. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, the structure in the way of the form being embedded in as the high-strength parts in the fixed component
Into.
7. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, the receiving space for accommodating the high-strength parts is set in the fixed component, and by institute
State high-strength parts and be arranged at the receiving space.
8. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, the shell for surrounding the high-strength parts is provided with around the high-strength parts.
9. vavuum pump according to claim 1, it is characterised in that：
Constructed as the anticorrosion, inserted structure is provided with the fixed component or at least a portion of the encapsulating shell.
10. vavuum pump according to claim 9, it is characterised in that：
The anticorrosion construction constitutes the inserted structure by any of shrink fit, cold pressing cooperation or press-in.
11. vavuum pump according to claim 1, it is characterised in that：
The fixed component and the encapsulating shell also turn in the installation portion of the fixed component and the encapsulating shell provided with impulsive force
Square reduction construction, the impulsive force torque reduction construction reduction is transferred to the destruction of the encapsulating shell in the rotor destruction
Impulsive force and torque.
12. vavuum pump according to claim 11, it is characterised in that：
The installation portion is the construction for linking the fixed component and the encapsulating shell by linking flange,
The impulsive force torque reduction is configured to the link flange with fixed part described in the plastic strain ratio of the link flange
The flange plastic deformation construction that at least big mode of plastic strain of any one in part and the encapsulating shell is plastically deformed.
13. vavuum pump according to claim 12, it is characterised in that：
In flange plastic deformation construction, fixed component and institute described at least one of thickness ratio for linking flange
State at least thickness of thin of any one in encapsulating shell.
14. vavuum pump according to claim 12, it is characterised in that：
The flange plastic deformation construction is formed with least any of in groove, constriction or otch in the link flange.
15. vavuum pump according to claim 12, it is characterised in that：
It is described link flange with the fixed component and the encapsulating shell at least any one be integrally formed.
16. vavuum pump according to claim 11, it is characterised in that：
The upper end that the impulsive force torque reduction construction possesses the high-strength parts is located at the formation screw thread of the rotor
The construction of the top more top of the part of groove exhaust flow path or the lower end of the high-strength parts are located at the shape of the rotor
Into the bottom construction further below of the part of the thread groove exhaust flow path, or possess both constructions.
17. vavuum pump according to claim 11, it is characterised in that：
The impulsive force torque reduction construction is to fix the end insertion of the high-strength parts relative to the fixed component
The retention groove of ground formation is to keep the construction of the high-strength parts.
18. vavuum pump according to claim 17, it is characterised in that：
Space part is provided between the wall and the high-strength parts of the inner circumferential side of the retention groove.
19. vavuum pump according to claim 17, it is characterised in that：
Possesses the retention tab being fixedly disposed relative to the fixed component, the retention groove is formed at the retention tab.
20. vavuum pump according to claim 19, it is characterised in that：
The intensity of fixed component described in the strength ratio of the retention tab is high.
21. vavuum pump according to claim 11, it is characterised in that：
The impulsive force torque reduction construction is configured with the padded coaming for absorbing impact around the high-strength parts.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016041802A JP6758865B2 (en) | 2016-03-04 | 2016-03-04 | Vacuum pump |
| JP2016-041802 | 2016-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107152408A true CN107152408A (en) | 2017-09-12 |
Family
ID=59792089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710102875.6A Pending CN107152408A (en) | 2016-03-04 | 2017-02-24 | Vavuum pump |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6758865B2 (en) |
| CN (1) | CN107152408A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114790994A (en) * | 2021-01-25 | 2022-07-26 | 株式会社岛津制作所 | Vacuum pump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3626971B1 (en) * | 2019-08-30 | 2022-05-11 | Pfeiffer Vacuum Gmbh | Vacuum pump |
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| JP2005180265A (en) * | 2003-12-18 | 2005-07-07 | Boc Edwards Kk | Vacuum pump |
| EP2314877A1 (en) * | 2008-07-14 | 2011-04-27 | Edwards Japan Limited | Vacuum pump |
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| CN104541063A (en) * | 2012-09-26 | 2015-04-22 | 埃地沃兹日本有限公司 | Rotor, and vacuum pump equipped with rotor |
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2016
- 2016-03-04 JP JP2016041802A patent/JP6758865B2/en active Active
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2017
- 2017-02-24 CN CN201710102875.6A patent/CN107152408A/en active Pending
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| JP2005180265A (en) * | 2003-12-18 | 2005-07-07 | Boc Edwards Kk | Vacuum pump |
| EP2314877A1 (en) * | 2008-07-14 | 2011-04-27 | Edwards Japan Limited | Vacuum pump |
| CN103299083A (en) * | 2011-02-04 | 2013-09-11 | 埃地沃兹日本有限公司 | Rotating body of vacuum pump, fixed member placed to be opposed to same, and vacuum pump provided with them |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114790994A (en) * | 2021-01-25 | 2022-07-26 | 株式会社岛津制作所 | Vacuum pump |
| CN114790994B (en) * | 2021-01-25 | 2023-12-29 | 株式会社岛津制作所 | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017155709A (en) | 2017-09-07 |
| JP6758865B2 (en) | 2020-09-23 |
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