CN107147332A - The broad band low frequency vibration energy collector and method of piezoelectric beam lumped mass interphase structure - Google Patents
The broad band low frequency vibration energy collector and method of piezoelectric beam lumped mass interphase structure Download PDFInfo
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- 230000016507 interphase Effects 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims abstract description 10
- 230000005284 excitation Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 9
- 230000001133 acceleration Effects 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 238000013461 design Methods 0.000 abstract description 5
- 238000012360 testing method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000009466 transformation Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002520 smart material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000010200 validation analysis Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
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Abstract
The invention discloses a kind of broad band low frequency vibration energy collector of piezoelectric beam lumped mass interphase structure and method, including:Cantilever beam and n mass;One end of the cantilever beam is fixing end, and the other end is free end;According to setting interval difference fixed mass block on the cantilever beam, cantilever beam is divided into n sections by the mass, and the terminal part of each section of cantilever beam is respectively and fixedly provided with mass.The present invention can realize that vibrational energy is gathered in as little as 15~20Hz big density vibrational energy frequency field as needed, on the other hand effectively using the high order mode design of collector collector working band can also be made to widen to more than 2 times of common single cantilever beam structure.
Description
Technical field
The present invention relates to micro- technical field of wireless of micro- energy and self energizing, more particularly to a kind of piezoelectric beam-collection
The broad band low frequency vibration energy collector and method of middle quality interphase structure.
Background technology
Life is applied to from piezoelectricity switch technology, piezoelectric vibration energy collector is changed because of simple in construction, energy
Efficiency high and possess miniaturization, long lifespan, it is pollution-free, easy of integration the advantages of receive the favor of numerous scholars, realize piezoelectricity
Formula energy collecting device is from scratch.Wu Xiaoming of Institute of MicFoelectronics of Tsinghua University et al. regard monocrystalline silicon as cantilever beam
Material, pastes very thin piezoelectric smart material, and the mass prepared in the stickup of cantilever beam end through wet etching in its surface,
Form silicon based piezoelectricity cantilever beam energy collecting device.Under 11nm dynamic excitation, test obtains resonant frequency for 1673Hz, and defeated
Go out power for 0.11 μ W/cm2.German Kuehne designs in 2008, preparation and test cantilever piezoelectric energy collecting device, are obtained
Its working frequency is 1kHz, and its power output under 0.2g dynamic excitation is 4.28 μ W.
The resonant frequency of this kind of single-cantilever beam type collector is higher, often up to hertz thousands of or even up to ten thousand, it is impossible to adapt to low
Frequency vibration environment;And it is only capable of the energy that is distributed on effective conversion resonance point, and the energy on other Frequency points can not be changed.
In consideration of it, some scholars begin attempt to reduction collector resonant frequency and widen its effective working band.University of Alberta
Rezaeisaray devises a kind of multivariant energy collecting device, and it is obtained with reference to finite element analysis and analysis of experimental data
First three rank mode is 71.8Hz, 84.5Hz and 188.4Hz respectively, can preferably match the low-frequency vibration environment in 300Hz.
Erturk, Wang Guangqing, Lu Yueming et al. propose that a kind of frequency band based on compound L-type piezoelectric cantilever widens scheme, by passing
Increase by one in cantilever beam structure of uniting is normal thereto and in coplanar interior cantilever beam, constitutes L-type cantilever beam;Control its geometric parameters
Number causes preceding two rank of whole device, or even first three rank modal frequency size to be more or less the same, and converting electrical energy on each Frequency point
It is overlapped mutually, and then a resonance band is formed between former rank modal frequencies, realizes the vibrational energy being distributed on more multiband
Effective conversion.
But, although above-mentioned technical proposal makes the performance of piezoelectricity collector be improved significantly, but still suffer from it is following not
Foot:
1. micro-collection device experimental result and the notional result goodness of fit are poor.The experiment such as microbend, micro-indentations proves device
Size reaches after micron order that dimensional effect influence is obvious, and traditional power is difficult to explain its reason, foundation more can accurate description adopt
The kinetic model of storage actual motion state just seems particularly urgent.
2. the resonant frequency of device is higher, can not be effectively matched with low-frequency vibration environment around.Ambient vibration energy is main
It is distributed within 300Hz, higher resonant frequency causes collector can not effectively be encouraged in low-frequency vibration environment, and then
Enough energy can not be obtained
3. working band is narrower, and energy conversion efficiency is low.Collector could efficiently change energy only on resonant frequency point,
Energy can not be changed substantially in other frequency distribution.
The content of the invention
The purpose of the present invention is exactly to use the alternate knot of piezoelectric beam-lumped mass there is provided one kind to solve above-mentioned problem
The broad band low frequency vibration energy collector and method of structure, the structure take into account low resonant frequency and wide working band demand, Neng Gougeng
Vibration environment around good adaptation, and then more energy are changed, improve the conversion efficiency of energy.
To achieve the above object, concrete scheme of the invention is as follows:
A kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure, including:Cantilever beam and n are individual
Mass;One end of the cantilever beam is fixing end, and the other end is free end;According to setting interval difference on the cantilever beam
Cantilever beam is divided into n sections by fixed mass block, the mass, and the terminal part of each section of cantilever beam is respectively and fixedly provided with mass, wherein,
N is positive integer.
Further, the upper and lower surface of the cantilever beam is respectively with PZT piezoelectric coatings, PZT piezoelectric coatings
Upper and lower surface paste copper electrode respectively.
Further, the length and width of each section of cantilever beam are adjusted according to practical situations.
Further, under dynamic excitation, collector vibrates, and cantilever beam occurs bending and deformation in structure, and then makes
Obtain PZT material and also produce deformation, so that the vibration mechanical energy in environment is converted into electric energy, passes through follow-up power supply circuit and export electricity
Energy.
Further, with wi(x, t) (i=1,2 ..., n) represent oscillation crosswise of each section of cantilever beam under acceleration excitation
Displacement, then each wi(x, t) meets the differential equation:
ρiAiwi,tt+(EiIi+μAil2)wi,xxxx=0 (i=1,2 ..., n);
Wherein, ρiFor the line density of every section of cantilever beam, AiFor the cross-sectional area of every section of cantilever beam, EiFor the equivalent bullet of material
Property modulus, IiJust arrived for bending resistance, μ is Lame Coefficient, l is the intrinsic length of material;wiFor the vibration displacement of every section of cantilever beam,
wi,ttFor wiTo time t second-order partial differential coefficient, wi,xxxxFor wiTo x quadravalence partial derivative.
A kind of method of work of the broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure, including:
(1) resonant frequency and actual power demand according to required for practical application, determine the number n of mass;
(2) mass is pasted on a cantilever beam according to the spacing of setting, it is ensured that the terminal part of each section of cantilever beam is solid
Surely there is mass, to reduce the intrinsic frequency of each section of cantilever beam;
(3) under dynamic excitation, collector vibrates, and cantilever beam occurs bending and deformation in structure, and then causes attachment
The PZT piezoelectric coatings of lower surface also produce deformation on a cantilever beam, are turned the vibration mechanical energy in environment by copper electrode
Electric energy is changed to, electric energy is exported by follow-up power supply circuit.
Beneficial effects of the present invention:
Collector structure of the present invention on the one hand can be as needed in as little as 15~20Hz big density vibrational energy frequency
Region realizes that vibrational energy is gathered, and on the other hand effectively can also make collector work frequency using the high order mode design of collector
Band is widened to more than 2 times of common single cantilever beam structure.
The present invention takes into full account the influence of microscopic heat conduction, sets up the dynamics with the scale coefficient for characterizing material property
Model, is the actual fortune of accurate description collector so that the modeling of the system modelling of microdevice and macrosystem be distinguished
Dynamic state provides theoretical foundation.
It is structure formed that collector structure of the present invention has taken into account low working frequency, wide working band and collector simultaneously, can
Vibration environment complicated and changeable is preferably adapted to, and enough energy are got from ambient vibration environment, collection is significantly improved
The operating efficiency of device, is that the integrated establishing techniques of self energizing formula of the micro- wireless sensor system of Internet of Things are supported.
The present invention is mainly directed towards the Internet of Things wireless senser powerup issue in low frequency micro-vibration environment, following sensor to
Miniaturization, self energizing direction are developed, and determine that this efficient micro-power generators will have wide market prospects.Pass through the present invention
It is integrated with matching for microsensor, have the advantages that small size, light weight, inertia are small, low in energy consumption, be beneficial to exclude noise pair
The interference of useful signal, saves space, raw material and the energy.External power supply, cable etc. can not only be broken away to traditional sensors
Constraint, the inefficient test assignment of traditional sensors can also be completed.
Brief description of the drawings
Fig. 1 is broad band low frequency vibration energy collector structural representation of the present invention;
Fig. 2 is broad band low frequency vibration energy collector cross-sectional view schematic diagram of the present invention;
The structural representation of collector when Fig. 3 is n=2 of the present invention;
Fig. 4 (a) is 1 section of beam under the excitation of 1g acceleration, the electric charge that PZT-5H gathers on surface with frequency transformation curve;
Fig. 4 (b) is 1 section of beam under the excitation of 1g acceleration, voltage with frequency transformation curve;
Fig. 5 (a) is 2 sections of beams under the excitation of 1g acceleration, the electric charge that PZT-5H gathers on surface with frequency transformation curve;
Fig. 5 (b) is 2 sections of beams under the excitation of 1g acceleration, voltage with frequency transformation curve;
Collector electric charge is with frequency variation curve when Fig. 6 (a) is n=2;
Collector voltage is with frequency variation curve when Fig. 6 (b) is n=2.
Embodiment:
The present invention is described in detail below in conjunction with the accompanying drawings:
The invention discloses a kind of broad band low frequency vibration energy collector of use piezoelectric beam-lumped mass interphase structure,
The new collector is made up of n sections of beams and n mass, and wherein n value can be determined according to actual power demand, can be to wait to energize
Equipment provides accurately energization schemes.Consider scale effect influence factor, improve its kinetic model, with reference to finite element analysis and
The accuracy of the method validation model of experiment test, while verifying whether new collector meets takes into account low resonant frequency and wide work
Make the demand of frequency band.
(1) Minitype energy collector structure design
A kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure, including:Cantilever beam and n are individual
Mass;One end of cantilever beam is fixing end, and the other end is free end;On a cantilever beam according to setting interval difference fixed mass
Cantilever beam is divided into n sections by block, mass, and the terminal part of each section of cantilever beam is respectively and fixedly provided with mass, for reducing every section of beam
Intrinsic frequency.With mi(i=1,2 ..., n) represent the quality of mass, mnPositioned at the end of cantilever beam, as shown in Figure 1.
The total length of beam should be met first:Under dynamic excitation, the fixing end stress of collector is used less than the need of material should
Power.N value can be determined according to actual power demand, be typically difficult too big;It is to encourage collector low using the purpose of n sections of beams
There is the resonant frequency of two or more in the range of frequency, and each resonant frequency is more or less the same, while the response on resonance point can
To mutually promote.
Collector mainly has five-layer structure:Mass, upper piezoelectric layer, Si beams, lower piezoelectric layer are followed successively by from top to bottom, and
The just face of upper and lower piezoelectric layer be covered with above and below Cu electrodes;PZT material is pasted onto on Si cantilever beams, is vibrated with Si cantilever beams,
And Cu electrodes paste the upper and lower surface in PZT material, the electric energy for exporting collector conversion.
The cross section of the collector is as shown in Fig. 2 wherein tb、tpAnd teThe respectively thickness of Si beams, PZT material and Cu electrodes
Degree, b is the width of beam.Whole cantilever beam is divided into n sections according to the position of each additional mass, and remember each section of beam length and
Rigidity is respectively liAnd EiIi(i=1,2 ..., n), and each section of straight beam is composite beam, i.e. the upper and lower surface in Si materials Ji Liang
With PZT piezoelectrics coating and Cu electrodes.
Under dynamic excitation, collector vibrates, and Si beams occur bending and deformation in structure, and then causes PZT material
Deformation is produced, so that the vibration mechanical energy in environment is converted into electric energy, electric energy is exported by follow-up power supply circuit.
(2) kinetic model of collector
Consider scale effect influence, scale coefficient is introduced, with wi(x, t) (i=1,2 ..., n) represent that each section of beam is accelerating
Transverse vibrational displacement under degree excitation, then each wi(x, t) meets the differential equation:
ρiAiwi,tt+(EiIi+μAil2)wi,xxxx=0 (i=1,2 ..., n)
Wherein, ρiFor the line density of every section of beam, AiFor the cross-sectional area of every section of beam, wiFor every section of vibration of beam displacement, EiFor
The equivalent elastic modulus of material, IiJust arrived for bending resistance, μ is Lame Coefficient, l is the intrinsic length of material.
(3) performance evaluation of new collector
The performance of collector is analyzed by taking n=2 as an example, its structural representation is as shown in Figure 3.Ignore the shadow of upper and lower Cu electrodes
Ring, choose PZT-5H as piezoelectric, and only pasted in the side of Si beams.With b1、tb1、tp11、b2、tb2The 1st He is represented respectively
The width and thickness of 2 sections of beams, tp12、tp12The thickness of PZT-5H on the 1st and 2 section of beam is represented respectively, and its physical dimension refers to the institute of table 1
Show.
The physical dimension of collector during table 1n=2
Incorporating parametric in table 1 is updated to the output performance obtained in the dynamic excitation response model obtained by formula (1)
It is identical with the result of experiment test, illustrates that scale effect is do exist in micro-structural, and can not ignore;Also fill simultaneously
Divide the accuracy for demonstrating and improving kinetic model, theory is provided and referred to for the design of subsequent acquisition device, performance optimization and development
Lead.
Experiment condition:Pass through the techniques such as Sol-gel techniques, sputtering, photoetching, SU8 glue in " general MEMS technology laboratory "
The preparation of new minute-pressure electric energy collect and acquisition is completed, and is packaged in PCB.
Testing equipment:Signal generator, power amplifier, actuating vibration table, acceleration transducer, voltage-stabilized power supply, data acquisition
Card, laser vibration measurer etc..
The performances such as the resonant frequency and output voltage of novel energy collector are have studied by taking n=2 as an example, are as a result shown and list
One cantilever beam collector is compared, and its resonant frequency is substantially reduced, and working band obtains larger widen.
The quantity of electric charge and voltage produced respectively using every section of beam deformation of collector is analyzed it and become with frequency as research object
The situation of change.Fig. 4 (a), Fig. 4 (b), Fig. 5 (a), Fig. 5 (b) are respectively the 1st, 2 sections of beams under the excitation of 1g acceleration, PZT-5H tables
The electric charge and voltage that face is gathered with frequency transformation curve.The resonant frequency of collector is greatly reduced, in 50Hz internal memories
In two resonance points of 15.25Hz and 23.08Hz, low-frequency ambient vibrations can be preferably matched.From Fig. 6 (a), Fig. 6 (b):When
When output voltage is 80mV, effective working band of collector is 20.32Hz, compensate for single resonant frequency collector energy and turns
Change the low deficiency of efficiency.
The performance comparision of several beam type energy collecting devices of table 2
The advantage of structure of the present invention is that multiple resonant frequencies and each resonant frequency can be brought to differ smaller, so as to be formed effectively
Bandwidth of operation.As shown in Table 2, the resonant frequency of such collector and effective working band are optimized, and can be according to reality
Power demands adjust the parameter of collector, greatly optimize the performance of micro battery, so as to more preferably meet the confession for treating powering device
Can demand.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, not to present invention protection model
The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not
Need to pay various modifications or deform still within protection scope of the present invention that creative work can make.
Claims (6)
1. a kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure, it is characterised in that including:It is outstanding
Arm beam and n mass;One end of the cantilever beam is fixing end, and the other end is free end;According to setting on the cantilever beam
Cantilever beam is divided into n sections by fixed interval difference fixed mass block, the mass, and the terminal part of each section of cantilever beam is respectively and fixedly provided with matter
Gauge block, wherein, n is positive integer.
2. a kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure as claimed in claim 1, its
It is characterised by, the upper and lower surface of the cantilever beam is respectively with PZT piezoelectric coatings, the upper following table of PZT piezoelectric coatings
Copper electrode is pasted respectively in face.
3. a kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure as claimed in claim 1, its
It is characterised by, the length and width of each section of cantilever beam are adjusted according to practical situations.
4. a kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure as claimed in claim 1, its
It is characterised by, under dynamic excitation, collector vibrates, and cantilever beam occurs bending and deformation in structure, and then causes PZT material
Also deformation is produced, so that the vibration mechanical energy in environment is converted into electric energy, electric energy is exported by follow-up power supply circuit.
5. a kind of broad band low frequency vibration energy collector of piezoelectric beam-lumped mass interphase structure as claimed in claim 1, its
It is characterised by, with wi(x, t) (i=1,2 ... n) represent transverse vibrational displacement of each section of cantilever beam under acceleration excitation, then
Each wi(x, t) meets the differential equation:
ρiAiwi,tt+(EiIi+μAil2)wi,xxxx=0 (i=1,2 ..., n);
Wherein, ρiFor the line density of every section of cantilever beam, AiFor the cross-sectional area of every section of cantilever beam, EiFor the Equivalent Elasticity mould of material
Amount, IiJust arrived for bending resistance, μ is Lame Coefficient, l is the intrinsic length of material;wiFor the vibration displacement of every section of cantilever beam,
wi,ttFor wiTo time t second-order partial differential coefficient, wi,xxxxFor wiTo x quadravalence partial derivative.
6. a kind of broad band low frequency vibration energy collector of piezoelectric beam as claimed in claim 1-lumped mass interphase structure
Method of work, it is characterised in that including:
(1) resonant frequency and actual power demand according to required for practical application, determine the number n of mass;
(2) mass is pasted on a cantilever beam according to the spacing of setting, it is ensured that the terminal part of each section of cantilever beam is respectively and fixedly provided with
Mass, to reduce the intrinsic frequency of each section of cantilever beam;
(3) under dynamic excitation, collector vibrates, and cantilever beam occurs bending and deformation in structure, and then so that is attached to outstanding
The PZT piezoelectric coatings of arm beam upper and lower surface also produce deformation, are converted to the vibration mechanical energy in environment by copper electrode
Electric energy, electric energy is exported by follow-up power supply circuit.
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CN108448935A (en) * | 2018-05-02 | 2018-08-24 | 南京邮电大学 | A kind of double class's circular arc type piezoelectric type energy collectors |
CN109687763A (en) * | 2019-01-16 | 2019-04-26 | 江苏大学 | A kind of piezoelectricity and Electromagnetic heating formula power supply unit towards wireless sensor |
CN111049425A (en) * | 2019-12-31 | 2020-04-21 | 厦门大学 | Novel low-frequency multidirectional vibration energy collecting device with liquid as energy capturing medium |
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CN109687763A (en) * | 2019-01-16 | 2019-04-26 | 江苏大学 | A kind of piezoelectricity and Electromagnetic heating formula power supply unit towards wireless sensor |
CN111049425A (en) * | 2019-12-31 | 2020-04-21 | 厦门大学 | Novel low-frequency multidirectional vibration energy collecting device with liquid as energy capturing medium |
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