CN107144233A - The three dimensional shape measurement system that a kind of projected grating phase is combined with digital hologram - Google Patents
The three dimensional shape measurement system that a kind of projected grating phase is combined with digital hologram Download PDFInfo
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- CN107144233A CN107144233A CN201710230476.8A CN201710230476A CN107144233A CN 107144233 A CN107144233 A CN 107144233A CN 201710230476 A CN201710230476 A CN 201710230476A CN 107144233 A CN107144233 A CN 107144233A
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- phase
- digital image
- measurement
- projected grating
- holographic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
Abstract
The present invention relates to the three dimensional shape measurement system that a kind of projected grating phase is combined with digital hologram, belong to optical three-dimensional measurement field.The present invention measures the initial three-dimensional appearance of object first with projected grating phase, recycles dual wavelength or double light digital image plane holographics to obtain the wrapped phase figure of object.Then, generate virtual parcel phase diagram of the projected grating phase measurement result under digital image planes holophotal system, and calculate the interferometric phase for the virtual parcel phase diagram that digital image plane holographic wrapped phase figure is generated with projected grating phase, obtain projected grating phase and the phase deviation of digital image planes holographic measurement result, the measurement result of projected grating phase is compensated according to phase deviation and systematic parameter, the high-precision three-dimensional pattern of measured object is obtained.The present invention has the characteristics of big and digital image plane holographic measurement accuracy of projected grating phase depth direction measurement range is high concurrently.
Description
Technical field
The present invention relates to the three dimensional shape measurement system that a kind of projected grating phase is combined with digital hologram, belong to optics survey
Amount field.
Background technology
Non-contacting measuring three-dimensional morphology technology has that speed is fast, precision is high, it is harmless the features such as, in the last few years, with
This technology is continued to develop, and it measures visual field and incrementally increased, and its application field is more extensive, be progressively applied to heavy castings etc.
In the digital protection of the historical relic such as the three-dimensional modeling of industrial part and large-scale an inscription on a tablet.However, traditional measuring method speed is slower,
Point cloud is less, and measurement efficiency is low.This is accomplished by the premise of precision is taken into account, and improves monoscopic measurement range, when shortening measurement
Between.
Projected grating phase is one kind that striped projects 3 D measuring method.Use projector projects phase shifted sinusoidal bar
Line, the bar graph after being modulated through body surface is shot using monocular or binocular camera, is deployed through solving phase and phase position, is recycled triangle
Measuring principle or binocular stereo vision principle, obtain the three-dimensional appearance of measured object.The advantage of this method is measurement efficiency height, depth
Orientation measurement scope is big.But measurement accuracy is not high, 10-40 microns are can only achieve.
Traditional holography is come before marking wave using holographic dry plate, is unfavorable for automatically analyzing and handles.Digital hologram is used
The interference fringe of CCD or CMOS record object lights and reference light, it is reconstructed after obtain complex amplitude before Object light wave, then calculate strong
Degree figure and phase diagram.Wherein phase diagram represents the distance that arrive CCD or CMOS on the measured object surface of parcel at every.
Digital hologram can for measure object three-dimensional appearance, precision is up to several nanometers.But it is due to phase parcel, it is deep
Measurement range on degree direction can only achieve optical wavelength magnitude.Can be significantly using dual wavelength or double light digital holographic interferometries
Increase measurement range, up to hundreds of microns to several centimetres.But measurement accuracy also declines with the increase of measurement range.Using double
Digital holographic interferometry is exposed, the phase diagram before deforming and after deformation makees poor, can measure micro- deformation of object.
Digital image plane holographic by imaging len on CCD or CMOS target surfaces into object focusing picture, using with numeral dissipate
Spot interferes similar light path.From unlike digital speckle interference, employing off-axis reference light, it is possible to use Fourier transformation
Method extracts the amplitude and phase of object light.
The content of the invention
The present invention proposes the three dimensional shape measurement system that a kind of projected grating phase is combined with digital hologram, has projection concurrently
The characteristics of big and digital image plane holographic measurement accuracy of grid phase method depth direction measurement range is high, to achieve these goals, this
Invention uses following technical scheme.
The three dimensional shape measurement system structure chart of the present invention as shown in Figures 1 and 2, wherein, Fig. 1 is double light source framework
Structure chart, including laser 1, beam expanding lens 2, Amici prism 3, plane mirror 4,5, light-combining prism 6, convex lens 7,8, precision are flat
Moving stage 9, aperture diaphragm 10, left camera 11, right camera 12, projecting apparatus 13, measured object 14, computer 15.Fig. 2 is dual wavelength framework
Structure chart, including laser 1,2, beam expanding lens 3,4, light splitting plain film 5,6, plane mirror 7,8,9,10, light-combining prism 11,
12, convex lens 13,14, aperture diaphragm 15, left camera 16, right camera 17, projecting apparatus 18, measured object 19, computer 20.Need note
Meaning, Fig. 1 and Fig. 2 are two instantiations of present system structure, and the invention is not restricted to the structure of the figure in practice.
The measurement process of the three dimensional shape measurement system of the present invention comprises the following steps：
(1) a Binocular Stereo Vision System is constituted using two cameras, with reference to multifrequency heterodyne skill in projected grating phase
Art realizes the initial measuring three-dimensional morphology of object；
(2) the wrapped phase figure of object is obtained using dual wavelength or double light digital image plane holographics；
(3) virtual parcel phase diagram of the generation projected grating phase measurement result under digital image planes holophotal system；
(4) the interference phase for the wrapped phase figure that the wrapped phase figure of the digital image plane holographic of calculating is generated with projected grating phase
Position, obtains projected grating phase and the phase deviation of digital image planes holographic measurement result；
(5) measurement result of projected grating phase is compensated according to phase deviation and systematic parameter, obtains high accuracy
Measurement result.
Brief description of the drawings
Fig. 1 uses the structure of the three dimensional shape measurement system of double light source frameworks for the digital image planes holographic part of the present invention
Figure.In the figure, 1 is laser, and 2 be beam expanding lens, and 3 be Amici prism, and 4,5 be plane mirror, and 6 be light-combining prism, and 7,8 be convex
Lens, 9 be accurate translation stage, and 10 be aperture diaphragm, and 11,12 be camera, and 13 be projecting apparatus, and 14 be measured object, and 15 be computer.
Fig. 2 uses the structure of the three dimensional shape measurement system of dual wavelength framework for the digital image planes holographic part of the present invention
Figure.In the figure, 1,2 be laser, and 3,4 be beam expanding lens, and 5,6 be light splitting plain film, and 7,8,9,10 be plane mirror, and 11,12 are
Light-combining prism, 13,14 be convex lens, and 15 be aperture diaphragm, and 16,17 be camera, and 18 be projecting apparatus, and 19 be measured object, and 20 be meter
Calculation machine.
Fig. 3 measures the flow chart of object dimensional pattern for the present invention.
Embodiment
Technical scheme is described further with reference to the accompanying drawings and detailed description.
The system is before measuring, it is necessary to carry out some necessary demarcating steps.Including labeling projection grid phase measurement system
The inside and outside parameter of camera of system, illumination optical position, angle of digital image planes holophotal system etc..
Projection gate phase measuring system is mainly made up of projecting apparatus and two cameras.Two cameras constitute a binocular solid
Vision system, the phase shifted sinusoidal striped of the multiple frequencies of projector projects carries out phase unwrapping using multifrequency heterodyne technology, is easy to survey
Measure noncontinuous surface.Using phase as the feature of Stereo matching, the error that projecting apparatus nonlinear response is caused can be reduced, improved
Measurement accuracy.
Digital image planes holographic part uses off-axis reference light.As shown in Figure 2, beam of laser is from laser for double light source frameworks
1 sends, and through the beam-expanding collimation of beam expanding lens 2, through the beam splitting of Amici prism 3, wherein transmitted light beam reflects and convex lens through plane mirror 5
7 convergences, are irradiated on measured object 14.Plane mirror 5 and convex lens 7 are fixed on above accurate translation stage 9, can pass through regulation
The position of accurate translation stage 9, changes position and the angle of illumination light.The reflected light of measured object 14 first passes through aperture diaphragm 10, then
Planoconvex lens 8 is converged, through light-combining prism 6, is imaged on the CCD target surfaces of left camera 11.The reflected beams conduct of Amici prism 3
Reference light, reflects through plane mirror 4 and light-combining prism 5, on the CCD target surfaces that left camera 11 is incided at different angles.Throw
Shadow instrument 13 is shot through the surface modulation of measured object 14 to the projecting multiple frequency phase shifted sinusoidal striped of measured object 14, left camera 11 and right camera 12
Candy strip.
Claims (7)
1. the three dimensional shape measurement system that a kind of projected grating phase is combined with digital hologram, it is characterised in that：Mainly by laser
Device 1, light path element 2-10, left camera 11, right camera 12, projecting apparatus 13, computer 15 are constituted.Wherein left camera 11, the right side
Camera 12, projecting apparatus 13 constitute binocular projection gate phase measurement subsystem；Laser 1, light path element 2-10, left camera 11
Constitute digital image plane holographic subsystem.
2. system according to claim 1, it is characterised in that：Measurement procedure comprises the following steps：
(1) a Binocular Stereo Vision System is constituted using two cameras, it is real with reference to multifrequency heterodyne technology in projected grating phase
The initial measuring three-dimensional morphology of existing object；
(2) the wrapped phase figure of object is obtained using dual wavelength or double light digital image plane holographics；
(3) virtual parcel phase diagram of the generation projected grating phase measurement result under digital image planes holophotal system；
(4) the interference phase for the virtual parcel phase diagram that digital image plane holographic wrapped phase figure is generated with projected grating phase is calculated
Position, obtains projected grating phase and the phase deviation of digital image planes holographic measurement result；
(5) measurement result of projected grating phase is compensated according to phase deviation and systematic parameter, obtains high-precision survey
Measure result.
3. system according to claim 1, it is characterised in that：Projected grating phase and digital image plane holographic are combined
Come, have the characteristics of big and digital image plane holographic measurement accuracy of projected grating phase measurement range is high concurrently.System construction drawing such as accompanying drawing 1
Or shown in Fig. 2, it should be noted that Fig. 1 or Fig. 2 are an instantiation of present system structure, of the invention in practice
It is not limited to the structure of the figure.
4. system according to claim 1, it is characterised in that：The step (2) uses dual wavelength or double-light source off-axis number
The framework of word image plane holographic.It is in order that depth direction measurement range is more than projected grating phase using dual wavelength or double light sources
Measurement error, it is to avoid parcel phenomenon occurs in phase deviation；It is in order that zero-order image and interference image are in frequency spectrum using off-axis reference light
Upper separation, is easy to extract phase using the volume method of Fourier transformation.Coaxial reference light can also be used, phase is rebuild with phase shift method
Position；Image plane holographic on CCD target surfaces into object focusing picture, and the pinhole camera model of vision measurement system is general, Ke Yihe
Projection gate phase measuring system shares a camera, two systems measurement result is mapped；If in addition, using dual wavelength
Digital image plane holographic, two wavelength use different reference angles of light, while obtaining the hologram of two wavelength, can also adopt
Angle of light is referred to identical, the hologram of two wavelength is successively obtained respectively.
5. system according to claim 1, it is characterised in that：The step (3) is according to the several of digital image planes holophotal system
What framework, calculates the light path of every on projected grating phase measurement pointcloud, further according to used wavelength, calculates every double
Light source or dual wavelength interferometric phase, obtain virtually wrapping up phase diagram.
6. system according to claim 1, it is characterised in that：The step (4) calculates digital image plane holographic wrapped phase
Figure and the interferometric phase of the virtual parcel phase diagram generated in step (3) by projected grating phase measurement data, obtain projection gate
Phase method and the phase deviation of digital image planes holographic measurement result.
7. system according to claim 1, it is characterised in that：The projection gate phase that the step (5) obtains according to step (4)
Phase deviation between position method and digital image planes holographic measurement result, and systematic parameter, to the measurement knot of projected grating phase
Fruit compensates.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110332895A (en) * | 2019-07-11 | 2019-10-15 | 广东工业大学 | A kind of method, system and the equipment of cuboid package length and width infomation detection |
| CN110378473A (en) * | 2019-07-26 | 2019-10-25 | 清华大学 | Method and device is chromatographed based on deep learning and the phase of random pattern |
| CN112665524A (en) * | 2020-12-17 | 2021-04-16 | 北京航空航天大学 | Three-dimensional shape detection method of quartz vibrating beam accelerometer pendulous reed based on digital holography |
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| US6268923B1 (en) * | 1999-10-07 | 2001-07-31 | Integral Vision, Inc. | Optical method and system for measuring three-dimensional surface topography of an object having a surface contour |
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| CN106325032A (en) * | 2016-09-28 | 2017-01-11 | 中国石油大学(华东) | Digital holographic recording device with off-axis angle precisely adjustable in real time |
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Patent Citations (6)
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| US6268923B1 (en) * | 1999-10-07 | 2001-07-31 | Integral Vision, Inc. | Optical method and system for measuring three-dimensional surface topography of an object having a surface contour |
| CN101762243A (en) * | 2010-01-04 | 2010-06-30 | 北京航空航天大学 | Structured light vision method for measuring three-dimensional profile of restricted space |
| CN102768025A (en) * | 2012-07-19 | 2012-11-07 | 西安交通大学 | Multi-step variable frequency projected fringe measurement method for measuring each point on object independently |
| CN103376072A (en) * | 2013-07-11 | 2013-10-30 | 西安交通大学 | Digital holography interference and variable frequency projection stripe duplex measurement system and method |
| CN104331897A (en) * | 2014-11-21 | 2015-02-04 | 天津工业大学 | Polar correction based sub-pixel level phase three-dimensional matching method |
| CN106325032A (en) * | 2016-09-28 | 2017-01-11 | 中国石油大学(华东) | Digital holographic recording device with off-axis angle precisely adjustable in real time |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110332895A (en) * | 2019-07-11 | 2019-10-15 | 广东工业大学 | A kind of method, system and the equipment of cuboid package length and width infomation detection |
| CN110378473A (en) * | 2019-07-26 | 2019-10-25 | 清华大学 | Method and device is chromatographed based on deep learning and the phase of random pattern |
| CN112665524A (en) * | 2020-12-17 | 2021-04-16 | 北京航空航天大学 | Three-dimensional shape detection method of quartz vibrating beam accelerometer pendulous reed based on digital holography |
| CN112665524B (en) * | 2020-12-17 | 2022-07-22 | 北京航空航天大学 | Three-dimensional shape detection method of quartz vibrating beam accelerometer pendulous reed based on digital holography |
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Application publication date: 20170908 |