CN107144224B - A kind of apparatus and method with F-P etalon measurement two-dimensional micro-displacement - Google Patents
A kind of apparatus and method with F-P etalon measurement two-dimensional micro-displacement Download PDFInfo
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Abstract
The invention discloses a kind of apparatus and method with F-P etalon measurement two-dimensional micro-displacement.Including light source, flexible optical fibre and face battle array image device, light source is connect with flexible optical fibre, placement-face battle array image device in front of flexible optical fibre output end, quasi-optical combiner is provided between flexible optical fibre and face battle array image device, beam treatment that flexible optical fibre is emitted at a series of concentric circles of coaxial concentric and is imaged on the battle array image device of face by quasi-optical combiner, quasi-optical combiner includes optical filter, F-P etalon and object lens；Each annulus is calculated respectively along the central coordinate of circle of change in coordinate axis direction, determines the central coordinate of circle of each annulus, is subtracted each other by the central coordinate of circle of the face mobile front and back of battle array image device and is obtained two-dimensional micro-displacement value.Measuring device of the present invention is simple and compact and cost is lower, and method micro-displacement repeatability standard deviation is up to 20nm hereinafter, accuracy is high.
Description
Technical field
The invention belongs to technical fields, and in particular to a kind of device and side with F-P etalon measurement two-dimensional micro-displacement
Method.
Background technique
At present there are many ways to measurement micro-displacement.The capacitor C of capacitance gage method is inversely proportional to micro-displacement x, i.e. C ∝ 1/x,
Capacitance measurement standard deviation SCOne timing micro-displacement standard deviation SxIt is approximately Sx∝x2SC, keep the measurement range of capacitance gage small.Electricity
The general specific capacitance micrometer of displacement effective resolution of sense micrometer wants order of magnitude greater.Grating subdivision mensuration effectively divides
Big 1~2 order of magnitude of repeated standard deviation all specific capacitance micrometer methods when resolution and displacement are close to 0.
Accuracy is high on laser interferance method micrometer displacement principle, uncertainty of measurement Ux≈c0+c1X, uncertainty of measurement
It is small, c in formula0Indicate constant item, c1Indicate proportional, constant item c0With the repeatability of interference fringe subdivision or signal phase subdivision
Standard deviation is positively correlated, proportional c1With wavelength X=λ0The uncertainty of/n is related, λ0Indicate vacuum wavelength, n indicates air refraction
Rate, c1With the relative uncertainty degree with wavelengthIn monotonic relationshi, under the U of subscripting is indicated in formula
The uncertainty of physical quantity shown in marking.C in principle0Even more small, the U up to 0.1nm magnitudeλ/ λ also can control 2 × 10-7With
Under.
But the influence of a variety of partial uncertainty factors is usually present in real system, for instance that the shadow of Abbe error
It rings, the inevitably influence of not busy journey (or being translated into dead journey) error, the uncertainty of a variety of influence amounts such as temperature, air pressure in optical path
Component and the linearity of interference fringe subdivision or signal phase subdivision influence.The combined influence of above-mentioned many factors usually makes
The micro-displacement expanded uncertainty of several millimeters of ranges is difficult to be reduced to 100nm or less.Two-dimensional measurement needs laser frequency stabilization
Two groups of interferometry optical paths and Signal Processing Element, make system complex and cost is high.
Summary of the invention
In order to solve the problems, such as background technique, measured it is an object of that present invention to provide a kind of with F-P etalon
The apparatus and method of two-dimensional micro-displacement.
To achieve the above object, The technical solution adopted by the invention is as follows:
One, a kind of device with F-P etalon measurement two-dimensional micro-displacement:
Device includes that light source, flexible optical fibre and face battle array image device, light source are connect with flexible optical fibre, flexible optical fibre output end
Front placement-face battle array image device is provided with quasi-optical combiner between flexible optical fibre and face battle array image device, passes through quasi-optical group
It closes component and beam treatment that flexible optical fibre be emitted at a series of concentric circles of coaxial concentric and is imaged onto face gust image device
On.
The quasi-optical combiner includes the optical filter successively arranged in front of flexible optical fibre output end, F-P etalon
And object lens, one or more monochromatic light sources inject quasi-optical combiner by flexible optical fibre, what quasi-optical combiner generated
Output beam is a series of coaxial cone light beam of convergences to face gust image device, and the reference beam as measurement, coaxial circle
The central axis for boring light beam is the optical axis of quasi-optical combiner.
The receiving surface and quasi-optical combiner of the face battle array image device (hereinafter referred to as face battle array device or face battle array)
Optical axis it is vertical, and be overlapped with the focal plane of object lens.
The spacing distance of two pieces of mirror boards is d inside the F-P etalon.
The object lens are the object lens of mid-focal length or short focus.Mid-focal length or short focus refer to focal length f in 20~150mm model
In enclosing, focal length is partially short to reduce face battle array utilization rate, too long to will increase central coordinate of circle standard deviation.
One side of the face battle array image device and horizontal direction (X " axis direction in figure) are at 45 degree of angles.
The surface of face battle array image device forms a series of concentric loops 8, circle diameter square with annulus serial number it
Between near linear relationship.Battle array image device generates the opposite position perpendicular to optical axis relative to the optical axis of quasi-optical combiner face to face
When shifting, the center location of concentric loop 8 will change, the knots modification of the center location coordinate of concentric loop 8 be exactly face battle array at
Displacement as device relative to quasi-optical combiner optical axis.What apparatus of the present invention and method measured is this displacement.
Two, a kind of method with F-P etalon measurement two-dimensional micro-displacement:
Using above-mentioned apparatus, following steps are then used:
1) building is respectively parallel to the x-axis and y-axis in the adjacent two edges direction of face battle array image device face battle array rectangle, then constructs
With the adjacent two edges direction of face battle array image device face battle array rectangle at x " the axis and y " axis at 45 degree of angles, x " axis and y " axis is located at
Horizontal plane and vertical guide；
2) in a series of each annulus of the concentric circles formed for face battle array image device, x-axis is found in the following ways
The approximate central coordinate of circle value in direction and y-axis direction determines approximate centre point Θ by the approximate central coordinate of circle value of two axis directions, connects
Cross point Θ work two be respectively parallel to the parallel lines of x " axis and y " axis as approximate diameter；
The step 2) is specially that x-axis direction or y-axis direction are found out and sat on i-th of annulus along place axis direction
Scale value maximum and the smallest point are used as photosignal extreme point, and the coordinate value of two photosignal extreme points is averaged rear round numbers
Approximate central coordinate of circle value as place axis direction.
3) the face battle array pixel in opposite battle array image device carries out interpolation subdivision and signal smoothingization is handled, interpolation subdivision and letter
The photosignal of virtual small pixel after number smoothing according to interpolation subdivision with signal smoothing before close pixel optical telecommunications
Number value calculates, with interpolation subdivision with signal smoothing after the photosignal of virtual small pixel that obtains carry out the light of calculated for subsequent step
Electric signal；
The step 3) is specifically used application No. is 201710374595.0, applying date 2017.5.24, entitled
Summary of the invention in the application for a patent for invention file of " a kind of method of face battle array virtual pixel interpolation subdivision and signal smoothing "
The technical solution at place.
4) N " parallel lines are established within the scope of every side ± Nw of every approximate diameter two sides, is divided between adjacent parallel linesW indicates the average value being spaced between adjacent picture elements in the battle array image device of face, and N is positive integer,
On every parallel lines between the two neighboring small quasi- pixel of void between be divided intoIt is parallel to the axis side x " axis or y "
To respectively there is (2N "+1) parallel lines, and (2N "+1) parallel lines intersect a small line segment of formation altogether (8N "+4) with each annulus；
Every line segment both ends photosignal is small, and there is a signal peak in centre, and corresponding coordinate value is peak position coordinate.
5) each line segment of line segment a for (8N "+4), use the applying date for application No. is 201510217472.7 it is special
Sharp application specification or PCT international application no are in the patent application specification of PCT/CN2016/078164 to optical telecommunications
The acquiring method of number peak coordinate value, finds out the photosignal peak position coordinate and peak position coordinate standard deviation on each line segment, and every
Estimated value of the average value of two peak position coordinates on parallel lines as a central coordinate of circle on the parallel lines.
6) each annulus central coordinate of circle along the central coordinate of circle of x " axis and y " axis direction, as each annulus respectively is calculated；
7) before and after face battle array image device is mobile, repeat the above steps 1)~6) calculate the central coordinate of circle of each annulus.It looks for
Out the peak position coordinate stdev average on (8N "+4) a line segment of single annulus close to minimum some annulus, with the circle
Two-dimensional micro-displacement value of the ring center before and after face battle array image device moves is moved as obtained face battle array image device is finally measured
Two-dimensional micro-displacement value.
Since the average value of the photosignal peak value of (8N "+4) a line segment on each annulus is different, photosignal distribution
Halfwidth (FWHM) is also different, and the average value of peak position standard deviation on each annulus is made also to have marked difference.Choose the mark of peak position coordinate
The average value of quasi- difference is approximately an annulus of minimum, is obtained the two-dimensional micro-displacement value in the annulus center of circle as final measurement
The mobile two-dimensional micro-displacement value of face battle array image device (7).
The step 2) specifically: for x-axis direction or y-axis direction, in series of concentric annulus described above
I-th of annulus from interior number outward, find out on i-th of annulus along place axis direction photosignal be maximum and coordinate value most
Big point, then finding out photosignal on the annulus is maximum and the smallest point of coordinate value, by the two photosignal maximum
Round numbers again after the coordinate value of point is averaged using average pixel spacing as relative unit, the approximate center of circle as place axis direction are sat
Target value.
The step 6) specifically obtains in the following ways along the central coordinate of circle of x " axis or y " axis direction: take every it is parallel
The average value of two peak position coordinates is made even again as center of circle estimated value, then by unidirectional (2N "+1) a center of circle estimated value on line
As the central coordinate of circle of the direction.
Annulus is identical along the central coordinate of circle calculation of x " axis and y " axis direction in the step 6), by y " for axis direction
Illustrate, specifically:
6.1) it is parallel to y " the j-th strip parallel lines of axis are with i-th of annulus in x " axis upper and lower and respectively intersects one small line of generation
Section, by the peak position coordinate that step 5) obtains the small line segment in top be y "+ijAnd its standard deviation isIt is small that lower section is obtained by step 5)
The peak position coordinate of line segment is y "-ijAnd its standard deviation is
6.2) the j-th strip parallel lines of i-th of annulus are calculated using the following equation along y " axis direction central coordinate of circle y "0ijAnd its
Standard deviation
y"0ij=(y "+ij+y"-ij)/2
Wherein, i indicates that the ordinal number of annulus, j indicate the ordinal number of parallel lines；
6.3) center of circle that acquisition is calculated after being intersected to i-th of circle with all (2N "+1) parallel lines using following formula is sat
Mark y "0ijThe weight averages such as work, the weight averages value such as acquisition
6.4) center of circle that acquisition is calculated after being intersected to i-th of circle with all (2N "+1) parallel lines using following formula is sat
Mark y "0ijAnd its standard deviationIt is weighted and averaged, obtains weighted average
6.5) i-th of annulus is calculated using the following equation along the central coordinate of circle value in the direction y ":
The present invention is using the knots modification of concentric circles central coordinate of circle as position of the face battle array image device relative to component optical axis in Fig. 1
Shifting amount.It is practical to calculate, process to simplify the calculation, sit scalar sum displacement first all to face battle array pixel spacing w (or) be
The numerical value of relative unit indicates, finally by using w as the displacement magnitude of relative unit multiplied by pixel spacing w (or) length
Angle value, obtain by nm or μm as unit of displacement magnitude.With the present invention, the standard deviation of central coordinate of circle can be less than 14nm, into
And it is less than the standard deviation of micro-displacement (central coordinate of circle change)
Beneficial effects of the present invention:
Measuring device of the present invention is simple and compact and cost is lower.
The present invention can reduce the influence of Abbe error.Making calibration measurement with prior art opposite battle array pixel spacing w, this
Inventive method can make the control limits of error of face battle array average eguivalent temperature within ± 5 degree, line caused by the temperature of face battle array matrix
Swollen index impacts can be controlled 9 × 10-6Within, and then the expanded uncertainty in 3mm measurement range can be made to be less than 60nm.
To sum up, micro-displacement repeatability standard deviation of the present invention is up to 20nm hereinafter, the accuracy of measurement two-dimensional micro-displacement
Height, the expanded uncertainty in 3mm measurement range are smaller than 60nm, be suitable for it is higher to microdisplacement measurement accuracy requirement but
Less high application field is required display resolution.
Detailed description of the invention
Fig. 1 is the schematic diagram with F-P etalon measurement two-dimensional micro-displacement.
Fig. 2 is the schematic diagram that central coordinate of circle is sought with the i-th ring j-th strip straight line.
Fig. 3 is the face battle array concentric loop figure of embodiment.
In figure: light source 1, flexible optical fibre 2, optical filter 3, F-P etalon 4, object lens 5, quasi-optical combiner 6, face battle array imaging
Device 7.
Specific embodiment
It elaborates below by way of specific embodiment to technology of the invention, but not limited to this.
As shown in Figure 1, measuring device of the invention include light source 1, flexible optical fibre 2 and face battle array image device 7, light source 1 with
Flexible optical fibre 2 connects, placement-face battle array image device 7 in front of flexible optical fibre 2 output end, flexible optical fibre 2 and face battle array image device 7 it
Between be provided with quasi-optical combiner 6, the beam treatment for being emitted flexible optical fibre 2 by quasi-optical combiner 6 is at coaxial concentric
A series of concentric circles 8 and be imaged onto face battle array image device 7 on.
Quasi-optical combiner 6 includes optical filter 3,4 and of F-P etalon successively arranged in front of 2 output end of flexible optical fibre
The spacing distance of object lens 5, the 4 two pieces of mirror boards in inside of F-P etalon is d.One or more monochromatic light sources 1 pass through
Flexible optical fibre 2 injects quasi-optical combiner 6, and the output beam that quasi-optical combiner 6 generates is a series of coaxial cone of convergences
Light beam is to face battle array image device 7, and the reference beam as measurement, the central axis of coaxial cone light beam are quasi-optical combiner 6
Optical axis.
The receiving surface of face battle array image device 7 (hereinafter referred to as face battle array device or face battle array) and the light of quasi-optical combiner 6
Axis is vertical, and is overlapped with the focal plane of object lens 5.One side of face battle array image device 7 and horizontal direction (X " axis direction in figure)
At 45 degree of angles.
The embodiment of the present invention is as follows:
Using above-mentioned apparatus, the concentric loop 8 obtained on the battle array image device 7 of opposite is as shown in figure 3, method includes:
1) building is respectively parallel to the x-axis and y-axis in the adjacent two edges direction of face 7 face of battle array image device battle array rectangle, then structure
Build x " axis and y " axis with the adjacent two edges direction of face 7 face of battle array image device battle array rectangle at 45 degree of angles, x " axis and y " axis difference
Positioned at horizontal plane and vertical guide；
2) in a series of each annulus of the concentric circles 8 formed for face battle array image device 7, x is found in the following ways
The approximate central coordinate of circle value of axis direction and y-axis direction determines approximate centre point Θ by the approximate central coordinate of circle value of two axis directions,
Then it crosses two, point Θ work and is respectively parallel to the parallel lines of x " axis and y " axis as approximate diameter；
The step 2) is specially that x-axis direction or y-axis direction are found out and sat on i-th of annulus along place axis direction
Scale value maximum and the smallest point are used as photosignal extreme point, and the coordinate value of two photosignal extreme points is averaged rear round numbers
Approximate central coordinate of circle value as place axis direction.
3) the face battle array pixel in opposite battle array image device 7 carries out interpolation subdivision and signal smoothingization is handled；
Specific implementation is entitled " a kind of using application No. is 201710374595.0, applying date 2017.5.24
Face battle array with virtual pixel interpolation subdivision and signal smoothing method " application for a patent for invention file in summary of the invention at skill
Art scheme.
4) N " parallel lines are established within the scope of every side ± Nw of every approximate diameter two sides, is divided between adjacent parallel linesW indicates the average value being spaced between adjacent picture elements in the battle array image device 7 of face, and N is positive integer,
On every parallel lines between two neighboring virtual small pixel between be divided intoIt is parallel to the axis side x " axis or y "
To respectively there is (2N "+1) parallel lines, and (2N "+1) parallel lines intersect a small line segment of formation altogether (8N "+4) with each annulus；
Every line segment both ends photosignal is small, and there is a signal peak in centre, and corresponding coordinate value is peak position coordinate.
5) each line segment of line segment a for (8N "+4), use the applying date for application No. is 201510217472.7 it is special
Sharp application specification or PCT international application no are in the patent application specification of PCT/CN2016/078164 to optical telecommunications
The acquiring method of number peak coordinate value, finds out the photosignal peak position coordinate and and peak position coordinate standard deviation on each line segment.
6) average value of two peak position coordinates on every parallel lines is taken to make respectively along x " axis and y " axis direction each annulus
For center of circle estimated value, then unidirectional (2N "+1) a center of circle estimated value taken into the average central coordinate of circle as the direction again.
By y " for axis direction specifically:
6.1) as shown in Fig. 2, being parallel to y " the j-th strip parallel lines of axis are with i-th of annulus in x " axis upper and lower respectively intersects production
A raw small line segment is y " by the peak position coordinate that step 5) obtains the small line segment in top+ijAnd its standard deviation isBy step 5)
The peak position coordinate for obtaining the small line segment in lower section is y "-ij, standard deviation is
6.2) the j-th strip parallel lines of i-th of annulus are calculated using the following equation along y " axis direction central coordinate of circle y "0ijAnd its
Standard deviationAnd using the midpoint of two peak position coordinates of upper and lower line segment as the j-th strip parallel lines of i-th of annulus along the side y "
To central coordinate of circle:
y"0ij=(y "+ij+y"-ij)/2
Wherein, i indicates that the ordinal number of annulus, j indicate the ordinal number of parallel lines；
6.3) center of circle that acquisition is calculated after being intersected to i-th of circle with all (2N "+1) parallel lines using following formula is sat
Mark y0"ijThe weight averages such as work, the weight averages value such as acquisitionAnd standard deviation
6.4) center of circle that acquisition is calculated after being intersected to i-th of circle with all (2N "+1) parallel lines using following formula is sat
Mark y0"ijAnd its standard deviationIt is weighted and averaged, obtains weighted average
6.5) again with Zhu Henian the in " publishing house, new concept Fundamental Physics Experiments handout Tsinghua University, version in 2013 "
The method that 2 chapters are page 46 is according to weighted averageCalculate average difference S in the group for acquiring weighted averageintIt is outer with group
Average difference Sext；
6.6) the power average value standard deviation such as takeAverage difference S in groupintWith the outer average difference S of groupextIn maximum
Person, as i-th of annulus central coordinate of circle y " coordinate in axis direction standard deviation:
6.7) embodiment shows to wait the difference very little of weight averages value and weighted average by lot of experimental data,Central coordinate of circle value of i-th of annulus along the direction y " is taken as:
Coordinate value x of i-th of center of circle along x " axis direction0"iAnd its standard deviationAccording to above-mentioned steps y " axis direction phase
Same method calculates.
7) before and after face battle array image device 7 is mobile, repeat the above steps 1)~6) calculate the central coordinate of circle of each annulus.It looks for
Out the peak position coordinate stdev average on (8N "+4) a line segment of single annulus close to minimum some annulus, i.e. in Fig. 3
The 15th circle.It is obtained using two-dimensional micro-displacement value of the annulus center of circle before and after face battle array image device 7 is mobile as final measurement
The mobile two-dimensional micro-displacement value of face battle array image device 7.
Since the average value of the photosignal peak value of (8N "+4) a line segment on each annulus is different, photosignal distribution
Halfwidth (FWHM) is also different, and the average value of peak position standard deviation on each annulus is made also to have marked difference.Choose peak position standard deviation
Average value is approximately an annulus of minimum, using the two-dimensional micro-displacement value in the annulus center of circle as finally measuring obtained face
The mobile two-dimensional micro-displacement value of battle array image device 7.
Embodiment only makes the light of wavelength X ≈ 546.1nm first pass through the F-P standard of spacing d ≈ 2.0mm with interferometric filter
Tool, using a series of concentric loops of shape in the focal plane of lens of focal length f ≈ 75mm, F=1.8, as shown in Figure 3.Olympic bar
The face battle array size 17.4*13mm of this EN-F type camera2, pixel sum about 10368 × 7776, the average pixel spacing of face battle array is w
≈1.675μm.Typical calculation processing is made to several from inside to outside the 15th annulus.
An approximate diameter is respectively taken to x ", y " axis direction is parallel to.In the model of every approximate diameter two sides ± Nw=± 9w
Enclose it is interior respectively take N "=12 between be divided intoAdjacent parallel lines, adjacent of the virtual pixel of square on every parallel lines
It is divided intoTwo directions respectively have (2N "+1)=25 parallel lines to intersect formation altogether (8N "+4)=100 small lines with each annulus
Section.The peak position coordinate and its standard deviation of photosignal on these small line segments are found out on 100 line segments.
Calculated result according to the 15th round central coordinate of circle of this method calculating is as shown in the table.
Upper table explanation, central coordinate of circle standard deviation has been significantly less than 14nm, so as to be less than micro-displacement standard deviation
Present case only only used middle-grade civil digital camera host as face battle array image device, and F-P etalon is by producing
The Systematic Errors of annulus ovalization caused by the factors such as technique are not yet corrected.Take the parameter of (2N "+1)=25 the reason is that: (2N "
+ 1) when changing in the range of 9~25,Variation is smaller, does not occurEvident regularity, thus it is basic
It can useMain component as coordinate position standard deviation parameter.
Claims (7)
1. a kind of device with F-P etalon measurement two-dimensional micro-displacement, it is characterised in that: including light source (1), flexible optical fibre (2)
With face battle array image device (7), light source (1) is connect with flexible optical fibre (2), placement-face battle array imaging in front of flexible optical fibre (2) output end
Device (7) is provided with quasi-optical combiner (6) between flexible optical fibre (2) and face battle array image device (7), passes through quasi-optical combination section
Beam treatment that flexible optical fibre (2) is emitted at a series of concentric circles (8) of coaxial concentric and is imaged onto face battle array imaging by part (6)
On device (7)；
The quasi-optical combiner (6) includes the optical filter (3) successively arranged in front of flexible optical fibre (2) output end, F-P mark
Quasi- tool (4) and object lens (5), one or more monochromatic light sources (1) inject quasi-optical combiner (6) by flexible optical fibre (2),
The output beam that quasi-optical combiner (6) generates is a series of coaxial cone light beam of convergences to face battle array image device (7), and is made
For the reference beam of measurement, the central axis of coaxial cone light beam is the optical axis of quasi-optical combiner (6)；
The object lens (5) are the object lens of mid-focal length or short focus, and mid-focal length or short focus refer to focal length f in 20~150mm model
In enclosing；
One side of the face battle array image device (7) is from the horizontal by 45 degree of angles.
2. a kind of device with F-P etalon measurement two-dimensional micro-displacement according to claim 1, it is characterised in that: described
Face battle array image device (7) receiving surface it is vertical with the optical axis of quasi-optical combiner (6), and with the focal plane of object lens (5) weigh
It closes.
3. a kind of method with F-P etalon measurement two-dimensional micro-displacement, it is characterised in that: any described using claim 1-2
Device, method include:
1) building is respectively parallel to the x-axis and y-axis in the adjacent two edges direction of face battle array image device (7) face battle array rectangle, then constructs
With face battle array image device (7) face battle array rectangle adjacent two edges direction at 45 degree angles x " axis and y " axis, x " axis and y " axis distinguish
Positioned at horizontal plane and vertical guide；
2) in a series of each annulus of the concentric circles (8) formed for face battle array image device (7), x is found in the following ways
The approximate central coordinate of circle value of axis direction and y-axis direction determines approximate centre point Θ by the approximate central coordinate of circle value of two axis directions,
Then it crosses two, point Θ work and is respectively parallel to the parallel lines of x " axis and y " axis as approximate diameter；
3) the face battle array pixel in opposite battle array image device (7) carries out interpolation subdivision and handles with signal smoothingization, with interpolation subdivision with
The photosignal of the virtual small pixel obtained after signal smoothing carrys out the photosignal of calculated for subsequent step；
4) N " parallel lines are established within the scope of every side ± Nw of every approximate diameter two sides, is divided between adjacent parallel linesW indicates the average value being spaced between adjacent picture elements in face battle array image device (7), and N is positive integer,
On every parallel lines between two neighboring virtual small pixel between be divided intoIt is each to be parallel to x " axis or y " axis direction
There are (2N "+1) parallel lines, and after (2N "+1) parallel lines intersect with the edge of each annulus and face battle array image device (7)
(4N "+2) a small line segment is obtained altogether in two sides, shared (4N "+2) parallel lines of x " axis and y " axis direction are corresponding to be obtained altogether (8N "+
4) a small line segment；
5) line segment a for (8N "+4) finds out the peak position coordinate of photosignal on each line segment and the standard deviation of peak position coordinate；
6) each annulus is calculated respectively along the central coordinate of circle of x " axis and y " axis direction, and then obtains the central coordinate of circle of each annulus；
7) in the mobile front and back of face battle array image device (7), repeat the above steps 1)~6) central coordinate of circle that calculates each annulus, it finds out
Peak position coordinate stdev average of the annulus on (8N "+4) a line segment close to minimum single annulus, with the annulus center of circle
In the two-dimensional micro-displacement value of the mobile front and back of face battle array image device (7) as finally measuring obtained face gust image device (7) movement
Two-dimensional micro-displacement value.
4. a kind of method with F-P etalon measurement two-dimensional micro-displacement according to claim 3, it is characterised in that: described
Step 2) specifically: for x-axis direction or y-axis direction, for being counted outward from interior in series of concentric annulus described above
I-th of annulus, finding out on i-th of annulus along place axis direction photosignal is maximum and the maximum point of coordinate value, then is looked for
Out on the annulus photosignal be maximum and the smallest point of coordinate value, by the coordinate value of the two photosignal maximum points with
Average pixel spacing is round numbers again after relative unit is averaged, the value of the approximate central coordinate of circle as place axis direction.
5. a kind of method with F-P etalon measurement two-dimensional micro-displacement according to claim 3, it is characterised in that: described
Step 6) specifically obtains in the following ways along the central coordinate of circle of x " axis or y " axis direction: two peak positions on every parallel lines being taken to sit
Target average value is as center of circle estimated value, then unidirectional (2N "+1) a center of circle estimated value is taken again average as the direction
Central coordinate of circle.
6. a kind of method with F-P etalon measurement two-dimensional micro-displacement according to claim 3, it is characterised in that: described
Step 6) is specifically: to (2N "+1) parallel lines for being parallel to x " axis or y " axis direction of i-th of annulus, take every it is parallel
The peak position coordinate average value of two sides line segment on line, a central coordinate of circle estimated value as parallel lines in this direction；To x " axis or
Person y " in axis direction (2N "+1) the central coordinate of circle estimated values of parallel lines is averaged, as i-th of annulus in the center of circle of the direction
Coordinate value.
7. a kind of method with F-P etalon measurement two-dimensional micro-displacement according to claim 3, it is characterised in that: described
Annulus is identical along the central coordinate of circle calculation of x " axis and y " axis direction in step 6), " is illustrated for axis direction, specifically by y
Are as follows:
6.1) it is parallel to y " the j-th strip parallel lines of axis are with i-th of annulus in x " axis upper and lower and respectively intersects one small line segment of generation, by
The peak position coordinate that step 5) obtains the small line segment in top is y "+ijAnd its standard deviation isThe small line segment in lower section is obtained by step 5)
Peak position coordinate is y "-ijAnd its standard deviation is
6.2) the j-th strip parallel lines of i-th of annulus are calculated using the following equation along y " axis direction central coordinate of circle y0"ijAnd its standard
Difference
Wherein, i indicates that the ordinal number of annulus, j indicate the ordinal number of parallel lines；
6.3) central coordinate of circle of acquisition is calculated after intersecting to i-th of circle with all (2N "+1) parallel lines using following formula
y0"ijThe weight averages such as work, the weight averages value such as acquisition
6.4) central coordinate of circle of acquisition is calculated after intersecting to i-th of circle with all (2N "+1) parallel lines using following formula
y0"ijAnd its standard deviationIt is weighted and averaged, obtains weighted average
6.5) i-th of annulus is calculated using the following equation along the central coordinate of circle value in the direction y ":
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