CN107134401A - A kind of control method, RF power divider and ICP equipment - Google Patents
A kind of control method, RF power divider and ICP equipment Download PDFInfo
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- CN107134401A CN107134401A CN201610109006.1A CN201610109006A CN107134401A CN 107134401 A CN107134401 A CN 107134401A CN 201610109006 A CN201610109006 A CN 201610109006A CN 107134401 A CN107134401 A CN 107134401A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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Abstract
This application discloses a kind of control method, RF power divider and ICP equipment, the control method includes：Obtain interior loop relative to exterior loop electric current than desired value；According to preset function, the capacitance of the second electric capacity and the capacitance of the 4th electric capacity are adjusted so that interior loop is in desired value relative to the electric current ratio of exterior loop.Power divider is two coil configuration, during the capacitance change of the capacitance of the second electric capacity and the 4th electric capacity, and interior loop is different relative to the electric current ratio of exterior loop, and then the electromagnetic field of the output of RF power divider is different.Control method is according to the functional relation between the capacitance of the second electric capacity and the capacitance of the 4th electric capacity and electric current ratio, can quickly determine different electric currents than when corresponding second electric capacity capacitance and the capacitance of the 4th electric capacity, directly regulation the second electric capacity and the 4th electric capacity obtain electric current than desired value, and then the electric current of power divider is adjusted, reach the purpose of adjustment power relative distribution.
Description
Technical field
The present invention relates to semiconductor devices manufacture technology field, in particular, be related to a kind of control method,
RF power divider and ICP equipment.
Background technology
With microelectronic mechanical devices and microelectromechanical systems (MicroElectromechanicalSystem,
Abbreviation MEMS) increasingly it is widely used in the field such as automobile and electricity charge electronics, silicon hole (Through
Silicon Via, abbreviation TSV) lithographic technique has bright prospects, deep silicon etching work in following encapsulation field
Skill is increasingly becoming one of technique most very powerful and exceedingly arrogant in MEMS manufacture fields and TSV technology.
Inductively coupled plasma (ICP) equipment is normal in a kind of MEMS manufacture field and TSV technology
With equipment, ICP equipment produces plasma by magnetic field, and the plasma is used to bombard Silicon Wafer, right
Silicon Wafer is performed etching.How adjusting magnetic field, to be that inductively coupled plasma apparatus field is urgently to be resolved hurrily ask
Topic.
The content of the invention
In order to solve the above problems, the invention provides a kind of control method, RF power divider and
ICP equipment, radio-frequency power can be adjusted by adjusting the interior loop relative to the electric current ratio of the exterior loop
The magnetic field of distributor.
To achieve these goals, the present invention provides following technical scheme：
A kind of control method, for RF power divider, the RF power divider includes：Exterior loop,
Interior loop, the first electric capacity, the second electric capacity, the 3rd electric capacity and the 4th electric capacity；One end of the exterior loop
By the first capacitance connection first node, its other end by the 3rd capacitance connection Section Point,
The first node is used to connect radio frequency matching circuit, and is connected to radio-frequency power supply by radio frequency matching circuit,
The Section Point is used to connect earth terminal；One end of the interior loop passes through the second capacitance connection institute
First node is stated, its other end passes through Section Point described in the 4th capacitance connection；
The control method includes：
Obtain the interior loop relative to the exterior loop electric current than desired value；
According to preset function, the capacitance of second electric capacity and the capacitance of the 4th electric capacity are adjusted,
So that in the RF power divider, the interior loop is in institute relative to the electric current ratio of the exterior loop
State desired value；
Wherein, the computational methods of the preset function include：
When the RF power divider is in poised state, the balancing capacitance of first electric capacity is obtained
Value C1b, the balancing capacitance value C2b of second electric capacity, the balancing capacitance value C3b of the 3rd electric capacity
And the balancing capacitance value C4b of the 4th electric capacity；
Be C1b in first electric capacity, and the 3rd electric capacity is when being C3b, obtain the electric current than
First linear function Ii1, Ii1=A1*Cinner+B1, A1 and B1 is constant；
First electric capacity be (1+ Δs) * C1b, and the 3rd electric capacity be (1+ Δs) * C3b when,
Obtain the electric current than the second linear function Ii2, Ii2=A2*Cinner+B2, A2 and B2 be normal
Number, Δ is the positive number less than 1；
First electric capacity be (1- Δs) * C1b, and the 3rd electric capacity be (1- Δs) * C3b when,
Obtain the electric current than third linear function Ii3, Ii3=A3*Cinner+B3, A3 and B3 be normal
Number；
Obtained according to first linear function, second linear function and the third linear function
The preset function, it is I to define the preset function, then I=α * Ii1+ γ * Ii2+ β * Ii3, α,
γ and β is constant；
Wherein, in the balance of voltage of the interior loop, Cinner is second electric capacity and described the
The combination capacitor value of four electric capacity.
Optionally, in above-mentioned control method, it is described obtain the electric current than the first linear function Ii1 bags
Include：
It is C1b in first electric capacity, and the 3rd electric capacity is when being C3b, adjusts second electric capacity
Capacitance and the 4th electric capacity capacitance so that after the balance of voltage of the interior loop, obtain
Different combination capacitor values and the corresponding electric current ratio of each combination capacitor value；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value,
Carry out linear fit and obtain the first linear function Ii1.
Optionally, in above-mentioned control method, it is described obtain the electric current than the second linear function Ii2 bags
Include：
First electric capacity be (1+ Δs) * C1b, and the 3rd electric capacity be (1+ Δs) * C3b when,
Adjust the capacitance of second electric capacity and the capacitance of the 4th electric capacity so that the interior loop
After the balance of voltage, different combination capacitor values and the corresponding electric current ratio of each combination capacitor value are obtained；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value,
Carry out linear fit and obtain the second linear function Ii2.
Optionally, in above-mentioned control method, it is described obtain the electric current than third linear function Ii3 bags
Include：
First electric capacity be (1- Δs) * C1b, and the 3rd electric capacity be (1- Δs) * C3b when,
Adjust the capacitance of second electric capacity and the capacitance of the 4th electric capacity so that the interior loop
After the balance of voltage, different combination capacitor values and the corresponding electric current ratio of each combination capacitor value are obtained；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value,
Carry out linear fit and obtain the third linear function Ii3.
Optionally, in above-mentioned control method, the variable quantity of second electric capacity is no more than the described second electricity
The 50% of the equilibrium valve of appearance, the variable quantity of the 4th electric capacity is no more than the equilibrium valve of the 4th electric capacity
50%.
Optionally, in above-mentioned control method, Δ is more than 0, and less than 50%.
Present invention also offers a kind of RF power divider, the RF power divider includes：Exterior loop,
Interior loop, the first electric capacity, the second electric capacity, the 3rd electric capacity and the 4th electric capacity；
One end of the exterior loop passes through described by the first capacitance connection first node, its other end
3rd capacitance connection Section Point, the first node is used to connect radio frequency matching circuit, and passes through radio frequency
Match circuit is connected to radio-frequency power supply, and the Section Point is used to connect earth terminal；
One end of the interior loop is passed through by first node described in second capacitance connection, its other end
Section Point described in 4th capacitance connection；
Wherein, the controller be used for obtain the interior loop relative to the exterior loop electric current than phase
Prestige value, according to preset function, adjusts the capacitance of second electric capacity and the electric capacity of the 4th electric capacity
Value so that in the RF power divider, the interior loop relative to the exterior loop electric current than at
In the desired value.
It is preferred that, in above-mentioned RF power divider, the controller includes：
Acquiring unit, the acquiring unit is used to obtain electric current of the interior loop relative to the exterior loop
The desired value of ratio；
Processing unit, the processing unit is used for the electric capacity that second electric capacity is adjusted according to preset function
The capacitance of value and the 4th electric capacity so that in the RF power divider, the interior loop phase
The desired value is in for the electric current ratio of the exterior loop.
Present invention also offers a kind of inductively coupled plasma equipment, including above-mentioned RF power divider.
The control method of the RF power divider provided by foregoing description, the present invention, it is described to penetrate
Frequency power divider includes：Exterior loop, interior loop, the first electric capacity, the second electric capacity, the 3rd electric capacity and
4th electric capacity；One end of the exterior loop is led to by the first capacitance connection first node, its other end
The 3rd capacitance connection Section Point is crossed, the first node is used to connect radio frequency matching circuit, and leads to
Cross radio frequency matching circuit and be connected to radio-frequency power supply, the Section Point is used to connect earth terminal；The interior lines
One end of circle passes through the 4th electric capacity by first node described in second capacitance connection, its other end
Connect the Section Point.The control method includes：The interior loop is obtained relative to the exterior loop
Electric current than desired value；According to preset function, the capacitance and described the of second electric capacity is adjusted
The capacitance of four electric capacity so that in the RF power divider, the interior loop is relative to the outside line
The electric current ratio of circle is in the desired value.
The power divider is the electric capacity of two coil configuration, the capacitance of the second electric capacity and the 4th electric capacity
When value changes, the interior loop is different relative to the electric current ratio of the exterior loop, and then the radio-frequency power
The electromagnetic field of distributor output is different.The control method is according to the capacitance of second electric capacity and
Functional relation between the capacitance of four electric capacity and electric current ratio, when can quickly determine different electric current ratios
The capacitance of corresponding second electric capacity and the capacitance of the 4th electric capacity, directly adjust the second electric capacity with
And the 4th electric capacity obtain electric current than desired value, and then adjust power divider magnetic field, can pass through adjust
The electric current of power divider is saved, the purpose of adjustment power output relative distribution is reached.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to reality
The accompanying drawing used required for applying in example or description of the prior art is briefly described, it should be apparent that, below
Accompanying drawing in description is only embodiments of the invention, for those of ordinary skill in the art, not
On the premise of paying creative work, other accompanying drawings can also be obtained according to the accompanying drawing of offer.
A kind of structural representation for RF power divider that Fig. 1 provides for application embodiment；
A kind of flow for control method for RF power divider that Fig. 2 provides for the embodiment of the present application
Schematic diagram；
A kind of schematic flow sheet of the computational methods for preset function that Fig. 3 provides for the embodiment of the present application；
A kind of structural representation for controller that Fig. 4 provides for the embodiment of the present application.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the invention, and
The embodiment being not all of.Based on the embodiment in the present invention, those of ordinary skill in the art are not doing
Go out the every other embodiment obtained under the premise of creative work, belong to the scope of protection of the invention.
With reference to Fig. 1, a kind of structural representation for RF power divider that Fig. 1 provides for application embodiment,
The RF power divider includes：Exterior loop L1, interior loop L2, the first electric capacity C1, the second electric capacity C2,
3rd electric capacity C3 and the 4th electric capacity C4；One end of the exterior loop L1 passes through the first electric capacity C1 connections
First node A1, its other end passes through the 3rd electric capacity C3 connections first node A1, the first node
A1 is used to connect radio frequency matching circuit, and is connected to radio-frequency power supply by radio frequency matching circuit；The interior lines
L2 one end is enclosed by the second electric capacity C2 connections Section Point A2, its other end passes through described the
Four electric capacity C4 connections the Section Point A2, the Section Point A2 are for connecting earth terminal.
It should be noted that the RF power divider is used for ICP equipment, it is the plasma of ICP equipment
Chamber provides magnetic field.The magnetic field is used for excited gas source and generates plasma source.
In the embodiment of the present application, RF power divider is two coil configuration, including exterior loop L1 and interior
Coil L2.When exterior loop L1 and interior loop L2 transmission alternating currents, magnetic field, Jin Erke can be generated
Plasma source is generated with excited gas medium.The magnetic field that electric current is determined in exterior loop L1 and interior loop L2
Produce and maintain the power of plasma.
Change electric currents of the interior loop L2 relative to exterior loop L1 the power of change from interior loop L2 generations is external
Coil L1 power ratio.For RF power divider shown in Fig. 1, it is possible to achieve power dividing function, tool
There is wider electric current adjustable range.Electric current ratios of the interior loop L2 relative to exterior loop L1 is Ii/ (Ii+Io),
The electric current of shown RF power divider than adjustable range be 10%-90%, adjusted with wider electric current
Scope.Wherein, Ii is interior loop L2 output current, and Io is exterior loop L1 output current.
First electric capacity C1, the second electric capacity C2, the 3rd electric capacity C3 and the 4th electric capacity C4 have two functions.The
One function is the electric current ratio for changing interior loop L2 and exterior loop L1.Have as the capacitor of circuit element
The impedance of alternating current, changes the electric current ratio that electric capacity will change in circuit.Second function is balance in interior lines
The voltage's distribiuting enclosed on L2 and exterior loop L1, specifically, the first electric capacity C1 and the 3rd electric capacity C3 are used for
Exterior loop L1 voltage adjustment, can cause outside line by adjusting the first electric capacity C1 and the 3rd electric capacity C3
Circle L1 voltage's distribiutings are that to be tapered into from the ceiling voltage V/2 of one end by central area be zero, finally to another
One end has between-V/2 voltage, two ends in the case of voltage difference holding V, and absolute value remains to be maintained at V/2
Below.Second electric capacity C2 and the 4th electric capacity C4 are the voltage adjustment for interior loop L2, pass through regulation the
Two electric capacity C2 and the 4th electric capacity C4 can cause interior loop L2 to have and coil L1 identical voltage's distribiutings.
The radio-frequency power reflected by electric capacity C3, C4 can be adjusted by the above-mentioned regulation to electric capacity C3, C4 capacitance,
Final incident power and reflection power are superimposed to form standing wave, and coil L1, L2 reach balance of voltage state.It is in
Voltage during balance of voltage state on coil is symmetrical in whole loop length, with least absolute value.
When preparing plasma source, to any coil, if its voltage can not reach poised state, line
Voltage on circle is too high, produces electric interfering field, and the electric interfering field will be arranged in plasma chamber room
The Silicon Wafer of lower section is perceived by capacity coupled mode, so that the etching quality of Silicon Wafer is influenceed, this
It is that many corona treatment application institutes are unwanted.RF power divider can described in the embodiment of the present application
Adjusted with the voltage that coil is realized by adjusting electric capacity.
In above-mentioned RF power divider, it is only necessary to which correspondence adjusts one or the size of multiple electric capacity is
Adjustable current ratio, control method simple and fast.At the same time it can also the uniformity of voltage on control coil,
Ensure the etching quality of Silicon Wafer.
The RF power divider also includes controller 11.The controller 11 is used to automatically adjust second
The capacitance of electric capacity and the 4th electric capacity.Controller 11 is connected respectively with each electric capacity, the controller 11
For obtain the interior loop relative to the exterior loop electric current than desired value, according to preset function,
Adjust the capacitance of second electric capacity and the capacitance of the 4th electric capacity so that the radio-frequency power
In distributor, the interior loop is in the desired value relative to the electric current ratio of the exterior loop.Therefore,
The controller 11 automatically controls the electric current ratio in RF power divider by the control method of setting.
Specifically, the control method is as shown in Figure 2.A kind of use that Fig. 2 provides for the embodiment of the present application
In the schematic flow sheet of the control method of RF power divider, the control method includes：
Step S11：Obtain electric currents of the interior loop L2 relative to the exterior loop L1 than desired value.
Step S12：According to preset function, the capacitance and the described 4th of the second electric capacity C2 is adjusted
Electric capacity C4 capacitance so that in the RF power divider, the interior loop L2 is relative to described
Exterior loop L1 electric current ratio is in the desired value.
When RF power divider is in poised state, the first electric capacity C1, the second electric capacity C2, the 3rd electricity
Hold C3 and the 4th electric capacity C4 and be respectively provided with each self-corresponding balancing capacitance value.Change the second electric capacity C2 with
And the 4th after electric capacity C4, electric current ratio will change, and then magnetic field will change.
With reference to Fig. 3, a kind of flow of the computational methods for preset function that Fig. 3 provides for the embodiment of the present application is shown
It is intended to, this method includes：
Step S21：When the RF power divider is in poised state, first electric capacity is obtained
C1 balancing capacitance value C1b, the balancing capacitance value C2b of the second electric capacity C2, the 3rd electric capacity
C3 balancing capacitance value C3b and the 4th electric capacity C4 balancing capacitance value C4b.
Step S22：The first electric capacity C1 be C1b, and the 3rd electric capacity C3 be C3b when,
Obtain the electric current than the first linear function Ii1, Ii1=A1*Cinner+B1, A1 and B1 be normal
Number.
Ii1 is fitting function, and the acquisition function and A1 and B1 can be calculated by way of linear fit
Value.When Cinner is to timing, i.e. the second electric capacity C2 and the 4th electric capacity C4 is one group of known electric capacitance
When, now Ii1 is a corresponding electric current ratio.
Step S23：It is (1+ Δs) * C1b in the first electric capacity C1, and the 3rd electric capacity C3 is
During (1+ Δs) * C3b, obtain the electric current than the second linear function Ii2, Ii2=A2*Cinner+B2,
A2 and B2 is constant, and Δ is the positive number less than 1.
Similarly, Ii2 is fitting function, and the acquisition function and A2 can be calculated by way of linear fit
With B2 value.When Cinner is to timing, i.e. the second electric capacity C2 and the 4th electric capacity C4 is known to one group
During capacitance, now Ii2 is a corresponding electric current ratio.
Step S24：It is (1- Δs) * C1b in the first electric capacity C1, and the 3rd electric capacity C3 is
During (1- Δs) * C3b, obtain the electric current than third linear function Ii3, Ii3=A3*Cinner+B3,
A3 and B3 is constant.
Similarly, Ii3 is fitting function, and the acquisition function and A3 can be calculated by way of linear fit
With B3 value.When Cinner is to timing, i.e. the second electric capacity C2 and the 4th electric capacity C4 is known to one group
During capacitance, now Ii3 is a corresponding electric current ratio.
Step S25：According to first linear function, second linear function and the third linear
Function obtains the preset function, and it is I to define the preset function, then I=α * Ii1+ γ * Ii2+ β * Ii3,
α, γ and β are constant.
First linear function Ii1, the second linear function Ii2 and third linear function Ii3 can be by
The known function that linear fit is determined.First linear function Ii1, the second linear function Ii2 and the 3rd line
Electric current when property function Ii3 is illustrated respectively in different electric currents than adjustable range compares function.The preset function
Electric current than adjustable range include the first linear function Ii1, the second linear function Ii2 and third linear letter
The corresponding electric currents of number Ii3 compare adjustable range.α, γ and β can by test obtaining value method determine,
Electric current ratio is measured under known second electric capacity C2 and the 4th electric capacity C4, after repeatedly measuring, is passed through
Equation group calculates the value for obtaining α, γ and β.When obtaining each fitting function and constant calculations,
Corresponding electric current ratio is needed, Io and Ii in RF power divider can be now read by galvanometer and is entered
And obtain electric current ratio.
Wherein, in the balance of voltage of the interior loop L2, Cinner be the second electric capacity C2 and
The combination capacitor value of the 4th electric capacity C4.When any of the second electric capacity C2's and the 4th electric capacity C4
Capacitance is fixed, and when interior loop L2 is in balance of voltage state, another capacitance is uniquely determined, this
When, the electric current ratio of unique one determination of correspondence.
Optionally, it is described obtain the electric current than the first linear function Ii1 include：In first electric capacity
C1 is C1b, and the 3rd electric capacity C3 is when being C3b, adjust the capacitance of the second electric capacity C2 with
And the capacitance of the 4th electric capacity C4 so that after the balance of voltage of the interior loop L2, obtain different
Combination capacitor value and the corresponding electric current ratio of each combination capacitor value；According to multiple combination electricity
Capacitance, and the corresponding electric current ratio of each described combination capacitor value, carry out linear fit and obtain described
First linear function Ii1.Wherein, one group of combination capacitor value is one group of second electric capacity C2 uniquely determined
And the 4th electric capacity C4.
Optionally, it is described obtain the electric current than the second linear function Ii2 include：In first electric capacity
C1 be (1+ Δs) * C1b, and the 3rd electric capacity C3 be (1+ Δs) * C3b when, regulation described second
The capacitance of electric capacity C2 capacitance and the 4th electric capacity C4 so that the electricity of the interior loop L2
Flatten after weighing apparatus, obtain different combination capacitor values and the corresponding electric current ratio of each combination capacitor value；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value, enter
Row linear fit obtains the second linear function Ii2.Wherein, one group of combination capacitor value is one group uniquely true
The second fixed electric capacity be C2's and the 4th electric capacity C4.
Optionally, it is described obtain the electric current than third linear function Ii3 include：In first electric capacity
C1 be (1- Δs) * C1b, and the 3rd electric capacity C3 be (1- Δs) * C3b when, regulation described second
The capacitance of electric capacity C2 capacitance and the 4th electric capacity C4 so that the electricity of the interior loop L2
Flatten after weighing apparatus, obtain different combination capacitor values and the corresponding electric current ratio of each combination capacitor value；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value, enter
Row linear fit obtains the third linear function Ii3.Wherein, one group of combination capacitor value is one group uniquely true
The second fixed electric capacity be C2's and the 4th electric capacity C4.
In the embodiment of the present application, the variable quantity of the second electric capacity C2 is no more than the second electric capacity C2's
The 50% of equilibrium valve, the variable quantity of the 4th electric capacity C4 is no more than the equilibrium valve of the 4th electric capacity C4
50%.Δ is more than 0, and less than 50%.The embodiment of the present application only needs to adjust in smaller range
Two electric capacity C2 and the 4th electric capacity C4 size, can both realize on a large scale regulation electric current than purpose,
The purpose of adjustment power output relative distribution can be reached by adjusting the electric current of power divider.
Or, in other embodiments, the control method of RF power divider includes：Pass through data
Corresponding electric current ratio under the different combination capacitor value of library storage the second electric capacity C2 and the 4th electric capacity C4；When
When needing to obtain the electric current ratio of desired value, it is only necessary to by searching the desired value corresponding the in database
Two electric capacity C2 and the 4th electric capacity C4, regulation the second electric capacity C2 and the 4th electric capacity C4 is in databases
Corresponding capacitance is that may be such that the electric current of RF power divider than for required desired value.Now,
The controller of the RF power divider is stored with the database.The controller is additionally operable to obtaining
Electric currents of the interior loop L2 relative to the exterior loop L1 than desired value when, in database search
The desired value corresponding second electric capacity C2 and the 4th electric capacity C4, the second electric capacity C2 of regulation and the 4th electricity
It is required for corresponding capacitance may be such that the electric current ratio of RF power divider is in database to hold C4
Desired value.
, can be by adjusting the electricity of the second electric capacity C2 and the 4th in control method described in the embodiment of the present application
Hold the electric current ratio of C4 quick regulation RF power dividers, and then realize the purpose in regulation magnetic field.Adjust every time
Section can ensure that the voltage of interior loop is uniform, it is ensured that the etching quality of Silicon Wafer.
The structure of controller described in the embodiment of the present application is as shown in figure 4, Fig. 4 provides for the embodiment of the present application
A kind of controller structural representation, the controller includes：Acquiring unit 41, the acquiring unit 41 is used
In obtain the electric current of the interior loop L2 relative to the exterior loop L1 than desired value；Processing unit 42,
The processing unit 42 is used for capacitance and the institute that the second electric capacity C2 is adjusted according to preset function
State the 4th electric capacity C4 capacitance so that in the RF power divider, the interior loop L2 is relative
The desired value is in the electric current ratio of the exterior loop L1.The controller can automatically adjust the second electric capacity
C2 and the 4th electric capacity C4 obtains default electric current and compares desired value.
The controller also includes the memory cell being connected with the processing unit, the memory cell storage
There is above-mentioned database.It should be noted that the memory cell not shown in Fig. 4.The processing unit
Be additionally operable to obtain the electric current of the interior loop L2 relative to the exterior loop L1 than desired value when,
The desired value corresponding second electric capacity C2 and the 4th electric capacity C4 is searched in database, the second electric capacity is adjusted
C2 and the 4th electric capacity C4 is the electricity that may be such that RF power divider for corresponding capacitance in database
Stream is than for required desired value.
The processing unit 42 is additionally operable to calculate the preset function.The processing unit 42 calculates described
Preset function principle can be found in above-mentioned control method, will not be repeated here.
The embodiment of the present application additionally provides a kind of inductively coupled plasma equipment, including above-mentioned embodiment
Described RF power divider.There is the inductively coupled plasma equipment above-mentioned radio-frequency power to distribute
Device, can be by adjusting the control of the second electric capacity and the realization of the 4th electric capacity to magnetic field, while can pass through
Second electric capacity and the 4th electric capacity cause interior loop voltage uniform, are made by the first electric capacity and the 3rd electric capacity
Obtain exterior loop voltage uniform.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use
The present invention.A variety of modifications to these embodiments will be aobvious and easy for those skilled in the art
See, generic principles defined herein can without departing from the spirit or scope of the present invention,
Realize in other embodiments.Therefore, the present invention is not intended to be limited to the embodiments shown herein,
And it is to fit to the most wide scope consistent with features of novelty with principles disclosed herein.
Claims (9)
1. a kind of control method, for RF power divider, it is characterised in that the radio-frequency power is distributed
Device includes：Exterior loop, interior loop, the first electric capacity, the second electric capacity, the 3rd electric capacity and the 4th electric capacity；
One end of the exterior loop passes through the described 3rd by the first capacitance connection first node, its other end
Capacitance connection Section Point, the first node is used to connect radio frequency matching circuit, and passes through radio-frequency match
Circuit is connected to radio-frequency power supply, and the Section Point is used to connect earth terminal；One end of the interior loop leads to
First node described in second capacitance connection is crossed, its other end passes through described in the 4th capacitance connection
Two nodes；
The control method includes：
Obtain the interior loop relative to the exterior loop electric current than desired value；
According to preset function, the capacitance of second electric capacity and the capacitance of the 4th electric capacity are adjusted,
So that in the RF power divider, the interior loop is in institute relative to the electric current ratio of the exterior loop
State desired value；
Wherein, the computational methods of the preset function include：
When the RF power divider is in poised state, the balancing capacitance of first electric capacity is obtained
Value C1b, the balancing capacitance value C2b of second electric capacity, the balancing capacitance value C3b of the 3rd electric capacity
And the balancing capacitance value C4b of the 4th electric capacity；
Be C1b in first electric capacity, and the 3rd electric capacity is when being C3b, obtain the electric current than
First linear function Ii1, Ii1=A1*Cinner+B1, A1 and B1 is constant；
First electric capacity be (1+ Δs) * C1b, and the 3rd electric capacity be (1+ Δs) * C3b when,
Obtain the electric current than the second linear function Ii2, Ii2=A2*Cinner+B2, A2 and B2 be normal
Number, Δ is the positive number less than 1；
First electric capacity be (1- Δs) * C1b, and the 3rd electric capacity be (1- Δs) * C3b when,
Obtain the electric current than third linear function Ii3, Ii3=A3*Cinner+B3, A3 and B3 be normal
Number；
Obtained according to first linear function, second linear function and the third linear function
The preset function, it is I to define the preset function, then I=α * Ii1+ γ * Ii2+ β * Ii3, α,
γ and β is constant；
Wherein, in the balance of voltage of the interior loop, Cinner is second electric capacity and described the
The combination capacitor value of four electric capacity.
2. control method according to claim 1, it is characterised in that the acquisition electric current ratio
The first linear function Ii1 include：
It is C1b in first electric capacity, and the 3rd electric capacity is when being C3b, adjusts second electric capacity
Capacitance and the 4th electric capacity capacitance so that after the balance of voltage of the interior loop, obtain
Different combination capacitor values and the corresponding electric current ratio of each combination capacitor value；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value,
Carry out linear fit and obtain the first linear function Ii1.
3. control method according to claim 1, it is characterised in that the acquisition electric current ratio
The second linear function Ii2 include：
First electric capacity be (1+ Δs) * C1b, and the 3rd electric capacity be (1+ Δs) * C3b when,
Adjust the capacitance of second electric capacity and the capacitance of the 4th electric capacity so that the interior loop
After the balance of voltage, different combination capacitor values and the corresponding electric current ratio of each combination capacitor value are obtained；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value,
Carry out linear fit and obtain the second linear function Ii2.
4. control method according to claim 1, it is characterised in that the acquisition electric current ratio
Third linear function Ii3 include：
First electric capacity be (1- Δs) * C1b, and the 3rd electric capacity be (1- Δs) * C3b when,
Adjust the capacitance of second electric capacity and the capacitance of the 4th electric capacity so that the interior loop
After the balance of voltage, different combination capacitor values and the corresponding electric current ratio of each combination capacitor value are obtained；
According to multiple combination capacitor values, and the corresponding electric current ratio of each described combination capacitor value,
Carry out linear fit and obtain the third linear function Ii3.
5. control method according to claim 1, it is characterised in that the change of second electric capacity
Amount is no more than the 50% of the equilibrium valve of second electric capacity, and the variable quantity of the 4th electric capacity is no more than described
The 50% of the equilibrium valve of 4th electric capacity.
6. control method according to claim 1, it is characterised in that Δ is more than 0, and less than 50%.
7. a kind of RF power divider, it is characterised in that the RF power divider includes：Controller,
Exterior loop, interior loop, the first electric capacity, the second electric capacity, the 3rd electric capacity and the 4th electric capacity；
One end of the exterior loop passes through described by the first capacitance connection first node, its other end
3rd capacitance connection Section Point, the first node is used to connect radio frequency matching circuit, and passes through radio frequency
Match circuit is connected to radio-frequency power supply, and the Section Point is used to connect earth terminal；
One end of the interior loop is passed through by first node described in second capacitance connection, its other end
Section Point described in 4th capacitance connection；
Wherein, the controller be used for obtain the interior loop relative to the exterior loop electric current than phase
Prestige value, according to preset function, adjusts the capacitance of second electric capacity and the electric capacity of the 4th electric capacity
Value so that in the RF power divider, the interior loop relative to the exterior loop electric current than at
In the desired value.
8. RF power divider according to claim 7, it is characterised in that the controller bag
Include：
Acquiring unit, the acquiring unit is used to obtain electric current of the interior loop relative to the exterior loop
The desired value of ratio；
Processing unit, the processing unit is used for the electric capacity that second electric capacity is adjusted according to preset function
The capacitance of value and the 4th electric capacity so that in the RF power divider, the interior loop phase
The desired value is in for the electric current ratio of the exterior loop.
9. a kind of inductively coupled plasma equipment, it is characterised in that including：Such as claim 7 or 8
Described RF power divider.
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| CN201610109006.1A CN107134401A (en) | 2016-02-26 | 2016-02-26 | A kind of control method, RF power divider and ICP equipment |
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| CN201610109006.1A CN107134401A (en) | 2016-02-26 | 2016-02-26 | A kind of control method, RF power divider and ICP equipment |
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Application publication date: 20170905 |