CN107134400B - A kind of control method, RF power divider and ICP equipment - Google Patents
A kind of control method, RF power divider and ICP equipment Download PDFInfo
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- CN107134400B CN107134400B CN201610109005.7A CN201610109005A CN107134400B CN 107134400 B CN107134400 B CN 107134400B CN 201610109005 A CN201610109005 A CN 201610109005A CN 107134400 B CN107134400 B CN 107134400B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
Abstract
This application discloses a kind of control method, RF power divider, controller and ICP equipment, which includes: to obtain the desired value of electric current ratio of the interior loop relative to the exterior loop；The corresponding first capacitor and the capacitance of second capacitor when calculating the electric current than for the desired value；The capacitance of the first capacitor and second capacitor is adjusted according to calculated result, so that the interior loop is the desired value relative to the electric current ratio of the exterior loop.Control method is according to corresponding relationship between the first capacitor and the capacitance and electric current ratio of second capacitor, can quickly determine different electric currents than when the corresponding first capacitor and second capacitor capacitance, adjust first capacitor and the second capacitor directly according to determining capacitance to obtain the desired value of electric current ratio, and then the electric current of regulation power distributor, achieve the purpose that adjust output power relative distribution.
Description
Technical field
The present invention relates to semiconductor devices manufacture technology fields, more specifically, being related to a kind of control method, radio-frequency power
Distributor and ICP equipment.
Background technique
With microelectronic mechanical devices and microelectromechanical systems (MicroElectromechanical System, abbreviation
MEMS it) is more and more widely used in the fields such as automobile and electricity charge electronics, through silicon via (Through Silicon Via, abbreviation
TSV) lithographic technique has bright prospects in the following encapsulation field, and deep silicon etching technique is increasingly becoming MEMS manufacturing field and TSV
Most very powerful and exceedingly arrogant one of technique in technology.
Inductively coupled plasma body (ICP) equipment is the commonly used equipment in a kind of MEMS manufacturing field and TSV technology, ICP
Equipment generates plasma by magnetic field, and the plasma performs etching Silicon Wafer for bombarding Silicon Wafer.How to adjust
Magnetic field is inductively coupled plasma body apparatus field urgent problem to be solved.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of control method, RF power divider, controller and
ICP equipment, by adjust the interior loop relative to the exterior loop electric current than adjustable RF power divider magnetic
?.
To achieve the goals above, the invention provides the following technical scheme:
A kind of control method is used for RF power divider, and RF power divider includes: exterior loop, interior loop, first
Capacitor, the second capacitor, third capacitor and the 4th capacitor；One end of the exterior loop connects first segment by the first capacitor
Point, the other end are led to by the third capacitance connection second node, the first node for connecting radio frequency matching circuit
It crosses radio frequency matching circuit and is connected to radio-frequency power supply, the second node is for connecting ground terminal；One end of the interior loop passes through
First node described in second capacitance connection, the other end pass through second node described in the 4th capacitance connection；
The control method includes:
Obtain desired value of the interior loop relative to the electric current ratio of the exterior loop；
The corresponding first capacitor and described the are calculated when the electric current ratio is the desired value according to preset function
The capacitance of two capacitors；
The capacitance of the first capacitor and second capacitor is adjusted according to calculated result, so that the interior loop phase
Electric current ratio for the exterior loop is the desired value；
Wherein, the sum of the capacitance of the first capacitor and the capacitance of second capacitor are a preset constant；It is described
The capacitance of third capacitor and the 4th capacitor is fixed value；The preset function is C1=a*I3+b*I 2+ c*I+d, C1
For the capacitance of the first capacitor, a, b, c and d are constant, and I is the electric current ratio.
Preferably, described to calculate corresponding described the when the electric current ratio is the desired value in above-mentioned control method
The capacitance of one capacitor and second capacitor includes:
When the electric current ratio is the desired value, the capacitance of the first capacitor is calculated according to preset function；
According to the preset relation of the capacitance of the first capacitor and the capacitance of second capacitor, described second is calculated
The capacitance of capacitor.
Preferably, in above-mentioned control method, the calculation method of the preset function includes:
The capacitance of the first capacitor is subjected to series expansion by variable of the electric current ratio；
By testing the method taken a little, each power of the corresponding series expansion of the capacitance of the first capacitor is determined
The coefficient of item；
When the electric current ratio is the desired value, according to the capacitance of the first capacitor with the series of the electric current ratio
The capacitance of the relational expression of expansion, the first capacitor uniquely determines, and then the capacitance of second capacitor uniquely determines.
The present invention also provides a kind of RF power divider, the RF power divider include: controller, exterior loop,
Interior loop, first capacitor, the second capacitor, third capacitor and the 4th capacitor；
One end of the exterior loop connects first node by the first capacitor, and the other end passes through the third capacitor
Second node is connected, the first node is connected to radio frequency electrical by radio frequency matching circuit for connecting radio frequency matching circuit
Source, the second node is for connecting ground terminal；
One end of the interior loop passes through the described 4th by first node described in second capacitance connection, the other end
Second node described in capacitance connection；
Wherein, the controller is for acquiring unit for obtaining electric current ratio of the interior loop relative to the exterior loop
Desired value, the capacitor of the corresponding first capacitor and second capacitor when calculating the electric current than for the desired value
Value；The capacitance of the first capacitor and second capacitor is adjusted according to calculated result so that the interior loop relative to
The electric current ratio of the exterior loop is the desired value.
Preferably, in above-mentioned RF power divider, the controller includes:
Acquiring unit, the acquiring unit is for obtaining expectation of the interior loop relative to the electric current ratio of the exterior loop
Value；
Processing unit, the processing unit calculate the corresponding first capacitor when electric current ratio is the desired value
And the capacitance of second capacitor；The capacitor of the first capacitor and second capacitor is adjusted according to calculated result
Value, so that the interior loop is the desired value relative to the electric current ratio of the exterior loop.
Preferably, in above-mentioned RF power divider, the processing unit is also used to calculate the preset function.
The present invention also provides a kind of inductively coupled plasma body equipment, comprising: above-mentioned RF power divider.
As can be seen from the above description, the control method of RF power divider provided by the invention, the radio-frequency power point
Orchestration includes: exterior loop, interior loop, first capacitor, the second capacitor, third capacitor and the 4th capacitor；The one of the exterior loop
End is by first capacitor connection first node, and the other end is by the third capacitance connection second node, and described first
Node is connected to radio-frequency power supply for connecting radio frequency matching circuit, and by radio frequency matching circuit, and the second node is for connecting
Connect ground terminal；By first node described in second capacitance connection, the other end passes through described for one end of the interior loop
Second node described in four capacitance connections.The control method includes: the electric current for obtaining the interior loop relative to the exterior loop
The desired value of ratio；The electricity of the corresponding first capacitor and second capacitor when calculating the electric current than for the desired value
Capacitance；The capacitance of the first capacitor and second capacitor is adjusted according to calculated result, so that the interior loop is mutually
The electric current ratio of the exterior loop is in the desired value.
The power divider is two coil configuration, the capacitance change of the first capacitor and second capacitor
When, the interior loop is different relative to the electric current ratio of the exterior loop, and then the magnetic field of the RF power divider is different.Institute
Control method is stated according to corresponding relationship between the first capacitor and the capacitance and electric current ratio of second capacitor, it can
With quickly determine different electric currents than when the corresponding first capacitor and second capacitor capacitance, according to determining electricity
Capacitance adjusts first capacitor and the second capacitor directly to obtain the desired value of electric current ratio, and then the magnetic of regulation power distributor
?.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of structural schematic diagram for the RF power divider for applying for that embodiment provides；
Fig. 2 is a kind of flow diagram of the control method for RF power divider provided by the embodiments of the present application；
Fig. 3 is provided by the embodiments of the present application a kind of calculates corresponding described first when the electric current ratio is the desired value
The flow diagram of the calculation method of the capacitance of capacitor and second capacitor；
Fig. 4 is a kind of flow diagram of the calculating method method of preset function provided by the embodiments of the present application；
Fig. 5 a provides the linear fit function graft of a kind of preset constant and electric current ratio for the embodiment of the present application；
Fig. 5 b provides the linear fit function graft of a kind of first capacitor and electric current ratio for the embodiment of the present application；
Fig. 5 c provides the linear fit function graft of a kind of second capacitor and electric current ratio for the embodiment of the present application；
Fig. 6 is a kind of structural representation of controller provided by the embodiments of the present application.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
With reference to Fig. 1, Fig. 1 is a kind of structural schematic diagram for the RF power divider for applying for that embodiment provides, the radio frequency function
Rate distributor includes: exterior loop L1, interior loop L2, first capacitor C1, the second capacitor C2, third capacitor C3 and the 4th capacitor
C4；One end of the exterior loop L1 passes through the third electricity by the first capacitor C1 connection first node A1, the other end
Hold C3 connection second node A2, the first node A1 is connected for connecting radio frequency matching circuit, and by radio frequency matching circuit
To radio-frequency power supply；By the second capacitor C2 connection first node A1, the other end is logical for one end of the interior loop L2
The 4th capacitor C4 connection second node A2 is crossed, the second node A2 is for connecting ground terminal.
It should be noted that the RF power divider is used for ICP equipment, the plasma chamber for ICP equipment is provided
Magnetic field.The magnetic field generates plasma source for excited gas source.
In the embodiment of the present application, RF power divider is two coil configuration, including exterior loop L1 and interior loop L2.When
When exterior loop L1 and interior loop L2 transmission alternating current, can be generated magnetic field, and then can be generated with excited gas medium etc. from
Daughter source.The magnetic field that electric current determines in exterior loop L1 and interior loop L2 generates and maintains the power of plasma.
The power generated from interior loop L2 will be changed to exterior loop L1 relative to the electric current of exterior loop L1 by changing interior loop L2
Power ratio.For RF power divider shown in Fig. 1, power dividing function may be implemented, there is wider current regulation model
It encloses.Interior loop L2 is Ii/ (Ii+Io), the tune of the electric current ratio of shown RF power divider relative to the electric current ratio of exterior loop L1
Adjusting range is 10%-90%, has wider current regulation scope.Wherein, Ii is the output electric current of interior loop L2, and Io is outside line
Enclose the output electric current of L1.
There are two functions by first capacitor C1, the second capacitor C2, third capacitor C3 and the 4th capacitor C4.First function be
Change the electric current ratio of interior loop L2 and exterior loop L1.There is the impedance of alternating current as the capacitor of circuit element, change electricity
The electric current ratio in circuit will be changed by holding.Second function is the voltage's distribiuting balanced on interior loop L2 and exterior loop L1, specifically,
Voltage of the first capacitor C1 and third capacitor C3 for exterior loop L1 adjusts, by adjusting first capacitor C1 and third capacitor
C3 can make exterior loop L1 voltage's distribiuting be that gradually become smaller from the ceiling voltage V/2 of one end by central area be zero, finally
There is the voltage of-V/2 to the other end, in the case that voltage difference keeps V between both ends, absolute value remains to be maintained at V/2 or less.The
Two capacitor C2 and the 4th capacitor C4 are the voltage adjustment for interior loop L2, pass through and adjust the second capacitor C2 and the 4th capacitor
C4 can make interior loop L2 have voltage's distribiuting identical with coil L1.It can by the above-mentioned adjusting to capacitor C3, C4 capacitance
To adjust the radio-frequency power by capacitor C3, C4 reflection, final incident power and reflection power are superimposed to form standing wave, coil L1,
L2 reaches balance of voltage state.Voltage when in balance of voltage state on coil is symmetrical in entire coil length, has most
Small absolute value.
When preparing plasma source, to any coil, if its voltage cannot reach equilibrium state, the voltage on coil
It is too high, electric interfering field is generated, the Silicon Wafer which will be arranged on lower section in plasma chamber room passes through capacitor coupling
The mode of conjunction perceives, to influence the etching quality of Silicon Wafer, this is that many corona treatment application institutes are unwanted.This
Apply for that RF power divider described in embodiment can realize that the voltage of coil is adjusted by adjusting capacitor.
In above-mentioned RF power divider, it is only necessary to which electricity can be adjusted in the size of corresponding adjustment one or multiple capacitors
Ratio is flowed, control method is simple and fast.At the same time it can also the uniformity of voltage on control coil, guarantee the etching quality of Silicon Wafer.
The RF power divider further includes controller 11.The controller 11 for automatically adjust the second capacitor and
The capacitance of 4th capacitor.It is separately connected by a controller 11 with each capacitor, the controller 11 is used for acquiring unit
In the desired value for obtaining the electric current ratio of the interior loop relative to the exterior loop, when to calculate the electric current ratio be the desired value
The capacitance of the corresponding first capacitor and second capacitor；The first capacitor and institute are adjusted according to calculated result
The capacitance of the second capacitor is stated, so that the interior loop is the desired value relative to the electric current ratio of the exterior loop.Therefore, should
Controller 11 automatically controls the electric current ratio in RF power divider by the control method of setting.
Specifically, the control method is as shown in Figure 2.Fig. 2 is provided by the embodiments of the present application a kind of for radio-frequency power
The flow diagram of the control method of distributor, the control method are used for RF power divider as shown in Figure 1, the controlling party
Method includes:
Step S11: desired value of the interior loop L2 relative to the electric current ratio of the exterior loop L1 is obtained.
Step S12: according to preset function calculate when the electric current ratio is the desired value the corresponding first capacitor with
And the capacitance of second capacitor.
Step S13: the capacitance of the first capacitor and second capacitor is adjusted according to calculated result, so that described
Interior loop is the desired value relative to the electric current ratio of the exterior loop.
Wherein, the sum of the capacitance of the first capacitor and the capacitance of second capacitor are a preset constant；It is described
The capacitance of third capacitor and the 4th capacitor is fixed value；The preset function is C1=a*I3+b*I 2+ c*I+d, C1
For the capacitance of the first capacitor, a, b, c and d are constant, and I is the electric current ratio.Specifically, the third capacitor and
The capacitance of 4th capacitor is capacitance when RF power divider is in equilibrium state, is known constant.
When RF power divider is in equilibrium state, first capacitor C1, the second capacitor C2, third capacitor C3 and
Four capacitor C4 all have corresponding balancing capacitance value.After changing first capacitor C1 and the second capacitor C2, frequency power point
Electric current ratio in orchestration will change, and then magnetic field will change.
With reference to Fig. 3, Fig. 3 be it is provided by the embodiments of the present application it is a kind of calculate it is corresponding when the electric current ratio is the desired value
The flow diagram of the calculation method of the first capacitor and the capacitance of second capacitor, this method comprises:
Step S21: when the electric current ratio is the desired value, the capacitor of the first capacitor is calculated according to preset function
Value.
Step S22: it according to the preset relation of the capacitance of the first capacitor and the capacitance of second capacitor, calculates
The capacitance of second capacitor.
Optionally, the capacitance of the first capacitor and the preset relation of the capacitance of second capacitor are: described
The sum of the capacitance of one capacitor and the capacitance of second capacitor are a preset constant.The control method is only by adusting first
Capacitor C1 and the second capacitor C2 adjusts the current distribution of RF power divider, in order to guarantee exterior loop L1 and interior loop L2
The balance of voltage, it is required that the amplitude of accommodation of first capacitor C1 and the second capacitor C2 are smaller.
The sum of the capacitance that the present embodiment passes through setting first capacitor C1 and the second capacitor C2 is a preset constant, in this way
When adjusting first capacitor C1 and the second capacitor C2, the maximal regulated amplitude of the two does not exceed the preset constant, avoids first
The amplitude of accommodation of the capacitance of capacitor C1 and the second capacitor C2 is excessive, guarantees the balance of voltage of two coils.Described in the present embodiment
Control method is suitable for a small range and adjusts first capacitor C1 and the second capacitor C2 to change the control method of electric current ratio, operation
Simply, adjustment speed is fast.
With reference to Fig. 4, Fig. 4 is a kind of flow diagram of the calculating method method of preset function provided by the embodiments of the present application,
The calculation method includes:
Step S31: the capacitance of the first capacitor is subjected to series expansion by variable of the electric current ratio.
Step S32: by testing the method taken a little, the corresponding series expansion of the capacitance of the first capacitor is determined
The coefficient of each power item.
When the electric current ratio is the desired value, according to the capacitance of the first capacitor with the series of the electric current ratio
The capacitance of the relational expression of expansion, the first capacitor uniquely determines, and then the capacitance of second capacitor uniquely determines.Root
According to identified capacitance, first capacitor and the second capacitor in RF power divider can be quickly adjusted, so that electric current ratio
For the desired value.
In order to guarantee series expansion relational expression accuracy, the highest power that the relational expression of series expansion is arranged is not less than
3.Constant a, b, c and d can be determined by the method for linear fit.
The linear fit letter of a kind of preset constant and electric current ratio is provided with reference to Fig. 5 a- Fig. 5 c, Fig. 5 a for the embodiment of the present application
Several figures, Fig. 5 b provide the linear fit function graft of a kind of first capacitor and electric current ratio, Fig. 5 c for the embodiment of the present application
The linear fit function graft of a kind of second capacitor and electric current ratio is provided for the embodiment of the present application.In each figure, horizontal axis indicates electricity
Ratio is flowed, the longitudinal axis indicates capacitor, unit pF.
In Fig. 5 a- Fig. 5 c, each linearity fitting function can be determined by the method for linear fit.
The embodiment of the present application, which only needs to adjust first capacitor C1 and the second capacitor C2 in smaller range, both may be implemented
Adjust the purpose of electric current ratio.
Alternatively, in other embodiments, the control method of RF power divider includes: by database purchase difference
Corresponding electric current ratio under first capacitor and the second capacitor of C1 C2, first capacitor and the capacitance of the second capacitor of C1 C2 are at this time
Preset constant；When needing to obtain the electric current ratio of desired value, it is only necessary to by searching the desired value corresponding in the database
The capacitance of one capacitor and the second capacitor of C1 C2, adjusting first capacitor C1 and the second capacitor C2 is corresponding electricity in database
Capacitance is that may make that the electric current ratio of RF power divider is required desired value.At this point, the RF power divider
Controller is stored with the database.The controller is also used to obtaining the interior loop L2 relative to the exterior loop L1's
When the desired value of electric current ratio, the capacitor of the desired value corresponding first capacitor C1 and the second capacitor C2 is searched in the database
Value, adjusting first capacitor C1 and the second capacitor C2 is that corresponding capacitance may make RF power divider in database
Electric current ratio is required desired value.
In the control method described in the embodiment of the present application, first capacitor C1 and the second capacitor can be adjusted by small range
C2 quickly adjusts the electric current ratio of RF power divider, and then realizes the purpose for adjusting magnetic field.Due to first capacitor C1 and
The amplitude of accommodation of two capacitors is smaller, and adjusting can guarantee that the voltage of interior loop is uniform every time, guarantees the etching quality of Silicon Wafer.
The structure of controller described in the embodiment of the present application is as shown in fig. 6, Fig. 6 is a kind of control provided by the embodiments of the present application
The structural representation of device, the controller include: acquiring unit 41, the acquiring unit 41 for obtain the interior loop L2 relative to
The desired value of the electric current ratio of the exterior loop L1；Processing unit 42, the processing unit 42 are institute for calculating the electric current ratio
State the corresponding first capacitor and the capacitance of second capacitor when desired value；Described first is adjusted according to calculated result
The capacitance of capacitor and second capacitor, so that the interior loop is the expectation relative to the electric current ratio of the exterior loop
Value.The controller can automatic first capacitor C1 and the second capacitor C2, obtain preset electric current and compare desired value.
The controller further includes the storage unit connecting with the processing unit, and the storage unit is stored with above-mentioned number
According to library.It should be noted that the storage unit is not shown in Fig. 6.The processing unit is also used to obtaining the interior loop
When desired value of the L2 relative to the electric current ratio of the exterior loop L1, the corresponding first capacitor C1 of the desired value is searched in the database
And the second capacitor C2, adjusting first capacitor C1 and the second capacitor C2 is that corresponding capacitance may make radio frequency in database
The electric current ratio of power divider is required desired value.
Processing unit calculation method according to above-described embodiment calculates the electricity of first capacitor and the second capacitor
Capacitance.When calculating the first capacitor and second capacitor, the processing unit is used in the electric current ratio be described
When desired value, the capacitance of the first capacitor is calculated according to preset function；According to the capacitance of the first capacitor with it is described
The preset relation of the capacitance of second capacitor calculates the capacitance of second capacitor.The processing unit is also used to calculate institute
State preset function.When calculating the preset function, the processing unit is used for the capacitance of the first capacitor with described
Electric current ratio is that variable carries out series expansion；By testing the method taken a little, the corresponding grade of the capacitance of the first capacitor is determined
The coefficient of each power item of number expansion.When the electric current ratio is the desired value, according to the capacitor of the first capacitor
With the relational expression of the series expansion of the electric current ratio, the capacitance of the first capacitor uniquely determines value, and then second electricity
The capacitance of appearance uniquely determines.
Control method described in the embodiment of the present application can automatically adjust the capacitance of first capacitor and the second capacitor, according to
Calculated result adjusts first capacitor and the second capacitor, so that electric current, than the desired value in setting, regulative mode is simple
Fast.
The embodiment of the present application also provides a kind of inductively coupled plasma body equipment, including penetrating described in above embodiment
Frequency power divider.The inductively coupled plasma body equipment has above-mentioned RF power divider, can be by adjusting by a small margin
The control of first capacitor and the realization of the second capacitor to magnetic field is saved, while guaranteeing the balance of voltage of interior loop.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (7)
1. a kind of control method, be used for RF power divider, which is characterized in that the RF power divider include: exterior loop,
Interior loop, first capacitor, the second capacitor, third capacitor and the 4th capacitor；One end of the exterior loop passes through first electricity
Hold connection first node, the other end is by the third capacitance connection second node, and the first node is for connecting radio frequency
Match circuit, and radio-frequency power supply is connected to by radio frequency matching circuit, the second node is for connecting ground terminal；The interior lines
One end of circle is passed through second described in the 4th capacitance connection by first node described in second capacitance connection, the other end
Node；
The control method includes:
Obtain desired value of the interior loop relative to the electric current ratio of the exterior loop；
The corresponding first capacitor and second electricity when electric current ratio is the desired value are calculated according to preset function
The capacitance of appearance；
The capacitance of the first capacitor and second capacitor is adjusted according to calculated result so that the interior loop relative to
The electric current ratio of the exterior loop is the desired value；
Wherein, the sum of the capacitance of the first capacitor and the capacitance of second capacitor are a preset constant；The third
The capacitance of capacitor and the 4th capacitor is fixed value；The preset function is C1=a*I3+b*I2+ c*I+d, C1 are institute
The capacitance of first capacitor is stated, a, b, c and d are constant, and I is the electric current ratio.
2. control method according to claim 1, which is characterized in that when the calculating electric current ratio is the desired value
The corresponding first capacitor and the capacitance of second capacitor include:
When the electric current ratio is the desired value, the capacitance of the first capacitor is calculated according to preset function；
According to the preset relation of the capacitance of the first capacitor and the capacitance of second capacitor, second capacitor is calculated
Capacitance.
3. control method according to claim 2, which is characterized in that the calculation method of the preset function includes:
The capacitance of the first capacitor is subjected to series expansion by variable of the electric current ratio；
By testing the method taken a little, each power item of the corresponding series expansion of the capacitance of the first capacitor is determined
Coefficient；
When the electric current ratio is the desired value, according to the capacitance of the first capacitor with the series expansion of the electric current ratio
Relational expression, the capacitance of the first capacitor uniquely determines, and then the capacitance of second capacitor uniquely determines.
4. a kind of RF power divider, which is characterized in that the RF power divider includes: controller, exterior loop, interior lines
Circle, first capacitor, the second capacitor, third capacitor and the 4th capacitor；
One end of the exterior loop connects first node by the first capacitor, and the other end passes through the third capacitance connection
Second node, the first node are connected to radio-frequency power supply by radio frequency matching circuit for connecting radio frequency matching circuit, institute
Second node is stated for connecting ground terminal；
One end of the interior loop passes through the 4th capacitor by first node described in second capacitance connection, the other end
Connect the second node；
Wherein, the controller is for obtaining desired value of the interior loop relative to the electric current ratio of the exterior loop, according to pre-
The corresponding first capacitor and the capacitance of second capacitor when if function calculates the electric current than for the desired value；
The capacitance of the first capacitor and second capacitor is adjusted according to calculated result, so that the interior loop is relative to described
The electric current ratio of exterior loop is the desired value, wherein the capacitance of the capacitance of the first capacitor and second capacitor it
With for a preset constant；The capacitance of the third capacitor and the 4th capacitor is fixed value；The preset function is C1
=a*I3+b*I2+ c*I+d, C1 are the capacitance of the first capacitor, and a, b, c and d are constant, and I is the electric current ratio.
5. RF power divider according to claim 4, which is characterized in that the controller includes:
Acquiring unit, the acquiring unit is for obtaining desired value of the interior loop relative to the electric current ratio of the exterior loop；
Processing unit, the processing unit calculate when the electric current ratio is the desired value the corresponding first capacitor and
The capacitance of second capacitor；The capacitance that the first capacitor and second capacitor are adjusted according to calculated result, makes
It is the desired value that the interior loop, which is obtained, relative to the electric current ratio of the exterior loop.
6. RF power divider according to claim 5, which is characterized in that the processing unit is also used to calculate described
Preset function.
7. a kind of inductively coupled plasma body equipment characterized by comprising such as radio-frequency power described in claim 5 or 6 point
Orchestration.
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| CN201610109005.7A CN107134400B (en) | 2016-02-26 | 2016-02-26 | A kind of control method, RF power divider and ICP equipment |
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| CN201610109005.7A CN107134400B (en) | 2016-02-26 | 2016-02-26 | A kind of control method, RF power divider and ICP equipment |
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| US9082591B2 (en) * | 2012-04-24 | 2015-07-14 | Applied Materials, Inc. | Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator |
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