CN107119259B - Vacuum deposition device for imprinting template - Google Patents
Vacuum deposition device for imprinting template Download PDFInfo
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- CN107119259B CN107119259B CN201710354493.2A CN201710354493A CN107119259B CN 107119259 B CN107119259 B CN 107119259B CN 201710354493 A CN201710354493 A CN 201710354493A CN 107119259 B CN107119259 B CN 107119259B
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- sealed cavity
- vacuum deposition
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- medicine
- template
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Prostheses (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a vacuum deposition device for an imprint template, which comprises: the device comprises a shell, a stamping template and a sealing cover, wherein a sealing cavity is arranged on the shell, the stamping template is placed in the sealing cavity, a medicine interface communicated with the sealing cavity is arranged on the shell, and gaseous FDTS enters the sealing cavity from the medicine interface; an evacuation assembly comprising: a vacuum interface communicated with the sealed cavity and a vacuum pumping device connected with the vacuum interface. The vacuum deposition device for the imprinting template is simple in structure and convenient and fast to operate, and can effectively and uniformly adhere a layer of FDTS film on the surface of the imprinting template, reduce the surface energy of the imprinting template and improve the hydrophobicity of the imprinting template.
Description
Technical Field
The invention relates to the field of micro-nano processing, in particular to a vacuum deposition device for an imprinting template.
Background
The nano-imprinting technology is an important technology in the manufacturing process of micro-nano devices, and is firstly proposed by professor Stephen Y Chou in 1995, which is a brand new pattern transfer technology different from the traditional photoetching technology. The definition of nanoimprint technology is: instead of photo-sensitive patterning of the photoresist using light or radiation, physical mechanisms are used to construct the nano-sized pattern directly on the silicon substrate or other substrate.
The soft template is a simple and convenient nano-imprint template replication material, is generally formed by mixing a body material and a curing agent according to a certain proportion, is poured on the surface of an imprint template (a master template) after bubbles are removed, and is cured into a working template of an elastic silicon rubber material through heating. The imprinting template is usually a silicon wafer, and a monomolecular FDTS layer is coated on the surface of the imprinting template before casting so as to reduce the surface energy of the surface of the imprinting template. The traditional coating method is to directly coat on an embossed template, so that the uniformity is poor and the efficiency is low.
Disclosure of Invention
In order to solve the technical problems, the invention provides a vacuum deposition device for an imprinting template, which is simple in structure and convenient and fast to operate, and can effectively and uniformly adhere a layer of FDTS film on the surface of the imprinting template, reduce the surface energy of the imprinting template and improve the hydrophobicity of the imprinting template.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a vacuum deposition apparatus for an imprint template, comprising: the device comprises a shell, a stamping template and a sealing cover, wherein a sealing cavity is arranged on the shell, the stamping template is placed in the sealing cavity, a medicine interface communicated with the sealing cavity is arranged on the shell, and gaseous FDTS enters the sealing cavity from the medicine interface; an evacuation assembly comprising: a vacuum interface communicated with the sealed cavity and a vacuum pumping device connected with the vacuum interface.
The invention has simple structure, realizes the film attaching effect on the imprinting template by depositing gaseous FDTS on the surface of the imprinting template, has high working efficiency, can attach films to a plurality of imprinting templates simultaneously, has uniform deposition of material FDTS on the imprinting template, uniform thickness and good quality of the FDTS film on the surface of the imprinting template, effectively reduces the surface energy of the imprinting template and improves the hydrophobicity of the imprinting template.
On the basis of the technical scheme, the following improvements can be made:
preferably, the method further comprises the following steps: medicine holding vessel and be used for the heating element of medicine holding vessel heating, medicine holding vessel passes through connecting pipe and medicine interface intercommunication, holds liquid FDTS in the medicine holding vessel.
Adopt above-mentioned preferred scheme, simple structure, medicine holding vessel adopts connecting pipe and medicine interface intercommunication, can not cause the pollution to external environment, effectively improves staff's factor of safety.
Preferably, a check valve is provided on the connection pipe.
By adopting the preferable scheme, the FDTS in the sealed cavity is prevented from flowing back to the interior of the medicine storage tank to cause pollution.
As preferred scheme, heating element is the heating pipe, and medicine holding vessel passes through the heating pipe with the connecting pipe and is connected.
By adopting the preferable scheme, the medicine in the medicine storage tank is vaporized by adopting the heating method of the heating pipe, the medicine in the medicine storage tank is not easy to pollute, the vaporized medicine above the heating pipe can enter the sealed cavity at an accelerated speed, the traveling time of the vaporized FDTS entering the sealed cavity is shortened, and the FDTS can be effectively deposited on the surface of the imprinting template.
As preferred scheme, heating element is the zone of heating of cladding in the medicine holding vessel outer wall, still attaches the heat preservation at the outer wall of zone of heating.
By adopting the preferable scheme and the heating method of the heating layer, the device is simple in structure, convenient to install, replace and maintain, and capable of quickly vaporizing the medicines in the medicine storage tank.
As the preferred scheme, still be equipped with the nitrogen gas interface with sealed cavity intercommunication on the casing, and be equipped with the pneumatic valve switch at the nitrogen gas interface.
By adopting the preferable scheme, nitrogen is filled into the sealed cavity, so that the pressure value in the sealed cavity is moderate, and the reaction effect between the FDTS and the surface of the imprinting template is good.
Preferably, a pressure sensor and/or a temperature sensor is arranged in the sealed cavity.
By adopting the preferable scheme, the pressure value and the temperature value in the sealed cavity are detected in real time, so that real-time adjustment is facilitated.
Preferably, one or more concentration sensors are arranged in the sealed cavity and are uniformly distributed, and the concentration sensors are used for detecting the concentration value of the medicine in the sealed cavity.
By adopting the preferable scheme, the concentration of the FDTS in the sealed cavity is detected in real time, whether the concentration of the FDTS is in a proper range is judged, and if the concentration of the FDTS is not in the proper range, the concentration of the FDTS in the sealed cavity is adjusted to reach a proper value by adjusting the heating temperature of the heating assembly.
Preferably, a clamping mechanism is arranged in the sealed cavity and used for clamping the imprinting template.
By adopting the preferable scheme, the imprinting template is clamped, and the FDTS can be uniformly deposited on the surface of the imprinting template.
Preferably, a rotating mechanism is further arranged in the sealed cavity and used for driving the stamping template to rotate.
With the preferred scheme, the FDTS can be more uniformly deposited on the surface of the imprinting template.
Drawings
Fig. 1 is a schematic structural diagram of a vacuum deposition apparatus for an imprint template according to an embodiment of the present invention.
FIG. 2 is a second schematic structural diagram of a vacuum deposition apparatus for an imprint template according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a medicine storage tank according to an embodiment of the present invention.
Wherein: the device comprises a shell 1, a sealed cavity 11, a medicine interface 12, a vacuum interface 13, a nitrogen interface 14, an air valve switch 15, a vacuum valve 2, a perspective window 3, a medicine storage tank 4, a connecting pipe 5, a check valve 6, a heating pipe 7, a heating layer 81 and a heat preservation layer 82.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
To achieve the objects of the invention, in some of its embodiments a vacuum deposition apparatus for imprint templates,
as shown in fig. 1 and 2, a vacuum deposition apparatus for an imprint template includes: a housing 1 and an evacuation assembly.
A sealed cavity 11 is provided in the housing 1, an imprint template (not shown) is placed in the sealed cavity 11, a drug interface 12 is provided in the housing 1, the drug interface 12 communicates with the sealed cavity, and gaseous FDTS enters the sealed cavity 11 from the drug interface 12.
The evacuation assembly includes: a vacuum port 13 communicating with the sealed cavity 11, and a vacuum pumping device (not shown in the figure) connected to the vacuum port 13. In a specific operation, the vacuum valve 2 is installed at the vacuum port 13.
In order to facilitate the cleaning of the FDTS cooled in the sealed cavity 11 in the later period, the sealed cavity 11 is a seamless cavity, and the inner wall of the cavity is a smooth arc curved surface. In specific implementation, can set up sealing door on casing 1, set up perspective window 3 on casing 1, the staff of being convenient for looks over the inside condition of sealed cavity.
The vacuum deposition device for the imprinting template has a simple structure, realizes the effect of attaching the film on the imprinting template by depositing gaseous FDTS on the surface of the imprinting template, has high working efficiency, can attach the film to a plurality of imprinting templates simultaneously, has uniform deposition of material FDTS on the imprinting template, uniform thickness and good quality of the FDTS film on the surface of the imprinting template, effectively reduces the surface energy of the imprinting template, and improves the hydrophobicity of the imprinting template.
In order to further optimize the implementation effect of the present invention, in other embodiments, the remaining features are the same, except that: medicine holding vessel 4 and be used for the heating element of 4 heats of medicine holding vessel, medicine holding vessel 4 passes through connecting pipe 5 and medicine interface 12 intercommunication, holds liquid FDTS in the medicine holding vessel 4.
Adopt above-mentioned preferred scheme, simple structure, medicine holding vessel 4 adopts connecting pipe 5 and medicine interface 12 intercommunication, can not cause the pollution to external environment, effectively improves staff's factor of safety.
In order to prevent the FDTS in the sealed cavity from flowing backward into the inside of the drug storage tank 4 to cause contamination, a check valve 6 is provided on the connection pipe 5.
In order to further optimize the effect of the present invention, in other embodiments, the heating component is a heating tube 7, and the drug storage tank 4 and the connecting tube 5 are connected through the heating tube 7. The heating method of the heating pipe 7 is adopted to vaporize the medicines in the medicine storage tank 4, the medicines in the medicine storage tank 4 are not easy to pollute, the vaporized medicines above the heating pipe 7 can enter the sealed cavity at an accelerated speed, the traveling time of the vaporized FDTS entering the sealed cavity 11 is shortened, and the FDTS can be effectively deposited on the surface of the imprinting template.
As shown in fig. 3, in order to further optimize the implementation effect of the present invention, in other embodiments, the other features are the same, except that the heating component is a heating layer 81 covering the outer wall of the drug storage tank 4, and an insulating layer 82 is attached to the outer wall of the heating layer 81. The heating method of the heating layer 81 is adopted, the structure is simple, the installation, the replacement and the maintenance are convenient, and the medicine in the medicine storage tank 4 can be quickly vaporized.
In order to further optimize the implementation effect of the present invention, in other embodiments, a nitrogen interface 14 communicating with the sealed cavity 11 is further provided on the housing 1, and a gas valve switch 15 is provided at the nitrogen interface 14. And nitrogen is filled into the sealed cavity 11, so that the pressure value in the sealed cavity 11 is moderate, and the reaction effect of the FDTS and the surface of the imprinting template is good.
In order to further optimize the working effect of the present invention, in other embodiments, a pressure sensor (not shown) and a temperature sensor (not shown) are disposed in the sealed cavity 11. The pressure sensor and the temperature sensor can detect the pressure value and the temperature value in the sealed cavity 11 in real time, so that real-time adjustment is facilitated.
In order to further optimize the effect of the present invention, in other embodiments, one or more uniformly distributed concentration sensors (not shown) are disposed in the sealed cavity 11, and the concentration sensors are used for detecting the concentration value of the medicine in the sealed cavity. The concentration sensor can detect the FDTS concentration in the sealed cavity in real time, judge whether the FDTS concentration is in a proper range, and if not, adjust the heating temperature of the heating assembly so as to adjust the FDTS concentration in the sealed cavity to reach a proper value.
In order to further optimize the working of the invention, in other embodiments, a clamping mechanism (not shown) is provided in the sealed cavity 11, the clamping mechanism being used for clamping the imprint template. The clamping mechanism clamps the imprinting template, and ensures that the FDTS can be uniformly deposited on the surface of the imprinting template.
In order to deposit FDTS more uniformly on the surface of the imprint template, a rotation mechanism (not shown) is further disposed in the sealed cavity 11, and the rotation mechanism is used for driving the imprint template to rotate.
In order to further optimize the implementation effect of the present invention, in other embodiments, the inner wall of the sealed cavity 11 has a certain inclination angle, and a recovery hole communicated with a recovery vessel is provided at one end of the sealed cavity 11 for recovering the residual medicine in the sealed cavity 11 to prevent contamination.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, many variations and modifications can be made without departing from the inventive concept of the present invention, which falls into the protection scope of the present invention.
Claims (8)
1. A vacuum deposition apparatus for an imprint template, comprising:
the device comprises a shell, a stamping template and a sealing cover, wherein a sealing cavity is arranged on the shell, the stamping template is placed in the sealing cavity, a medicine interface communicated with the sealing cavity is arranged on the shell, and gaseous FDTS enters the sealing cavity from the medicine interface;
an evacuation assembly comprising: the vacuum interface is communicated with the sealed cavity, and the vacuumizing device is connected with the vacuum interface;
further comprising: medicine holding vessel and be used for giving the heating element of medicine holding vessel heating, the medicine holding vessel pass through the connecting pipe with medicine interface intercommunication, hold liquid FDTS in the medicine holding vessel, heating element is the heating pipe, the medicine holding vessel with the connecting pipe passes through the heating pipe is connected.
2. A vacuum deposition apparatus for an imprint template according to claim 1, wherein a one-way valve is provided on the connection tube.
3. The vacuum deposition apparatus for imprinting templates of claim 2, wherein the heating assembly is a heating layer covering the outer wall of the drug storage tank, and an insulating layer is attached to the outer wall of the heating layer.
4. A vacuum deposition apparatus for an imprint template according to any one of claims 1 to 3, wherein a nitrogen gas interface is further provided on the housing in communication with the sealed cavity, and a gas valve switch is provided at the nitrogen gas interface.
5. A vacuum deposition apparatus for an imprint template according to claim 4, wherein a pressure sensor and/or a temperature sensor is provided within the sealed cavity.
6. A vacuum deposition apparatus for an imprint template according to claim 5, wherein one or more evenly distributed concentration sensors are provided within the sealed cavity for detecting a concentration value of a drug within the sealed cavity.
7. A vacuum deposition apparatus for an imprint template according to claim 6, wherein a clamping mechanism is provided within the sealed cavity, the clamping mechanism being configured to clamp the imprint template.
8. The vacuum deposition apparatus for an imprint template of claim 7, wherein a rotation mechanism is further disposed within the sealed cavity, the rotation mechanism configured to drive rotation of the imprint template.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710354493.2A CN107119259B (en) | 2017-05-18 | 2017-05-18 | Vacuum deposition device for imprinting template |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710354493.2A CN107119259B (en) | 2017-05-18 | 2017-05-18 | Vacuum deposition device for imprinting template |
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| Publication Number | Publication Date |
|---|---|
| CN107119259A CN107119259A (en) | 2017-09-01 |
| CN107119259B true CN107119259B (en) | 2019-12-24 |
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| CN201710354493.2A Active CN107119259B (en) | 2017-05-18 | 2017-05-18 | Vacuum deposition device for imprinting template |
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Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7862756B2 (en) * | 2006-03-30 | 2011-01-04 | Asml Netherland B.V. | Imprint lithography |
| CN102218833B (en) * | 2010-01-07 | 2013-07-03 | 上海交通大学 | Preparation method of soft template in lattice structure for ultraviolet nano imprinting |
| US20140087016A1 (en) * | 2012-09-26 | 2014-03-27 | HGST Netherlands B.V. | Nanoimprinting master template and method for making |
| CN103279009B (en) * | 2013-06-14 | 2015-09-30 | 中国科学院光电技术研究所 | A kind of flexible ultraviolet impressing composite shuttering and preparation method thereof |
| CN103436853B (en) * | 2013-09-04 | 2016-03-16 | 苏州锦元纳米科技有限公司 | Mix fluorine diamond like carbon film, its preparation method and comprise the impression block of this film |
| US9809712B2 (en) * | 2013-11-26 | 2017-11-07 | Baker Hughes, A Ge Company, Llc | Hydrophobic and oleophobic coatings |
| CN103631089B (en) * | 2013-12-08 | 2016-08-17 | 中国科学院光电技术研究所 | A kind of preparation method of ultraviolet light curing nano impressing polymer template |
| CN103762272B (en) * | 2014-01-09 | 2016-08-17 | 上海交通大学 | Porous silicon is the method for the flexible antireflection layer of template preparation |
| CN206783749U (en) * | 2017-05-18 | 2017-12-22 | 苏州光舵微纳科技股份有限公司 | A kind of vacuum deposition apparatus for impression block |
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2017
- 2017-05-18 CN CN201710354493.2A patent/CN107119259B/en active Active
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| CN107119259A (en) | 2017-09-01 |
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Address after: 215000 floors 1 and 2, building 7C, Changshu advanced manufacturing science and Technology Park, No. 2 Jianye Road, Yushan high tech Zone, Changshu, Suzhou, Jiangsu Patentee after: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. Address before: 215500 102, building 2, kechuangyuan, Changshu Economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee before: SUZHOU GUANGDUO MICRO, NANO-DEVICE Co.,Ltd. |
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