CN107110637A - Calibration to three-dimension measuring system is updated - Google Patents
Calibration to three-dimension measuring system is updated Download PDFInfo
- Publication number
- CN107110637A CN107110637A CN201580070356.5A CN201580070356A CN107110637A CN 107110637 A CN107110637 A CN 107110637A CN 201580070356 A CN201580070356 A CN 201580070356A CN 107110637 A CN107110637 A CN 107110637A
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- China
- Prior art keywords
- calibration
- correction
- video camera
- projecting apparatus
- correction matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012937 correction Methods 0.000 claims abstract description 95
- 238000000034 method Methods 0.000 claims abstract description 65
- 239000011159 matrix material Substances 0.000 claims abstract description 38
- 238000005259 measurement Methods 0.000 claims description 10
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- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 32
- 230000008859 change Effects 0.000 description 9
- 230000006870 function Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000012552 review Methods 0.000 description 5
- 230000003044 adaptive effect Effects 0.000 description 4
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- 230000015654 memory Effects 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
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Classifications
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- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
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- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
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- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
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Abstract
There is provided a kind of method calibrated to the three-dimension measuring system with multiple video cameras and at least one projecting apparatus.This method includes:To each video camera (118,120,122,124)/projecting apparatus (128) to performing complete calibration (100), the wherein at least two correction matrix set of complete calibration generation.Then to each video camera, (118,120,122,124/ projecting apparatus (128) updates calibration (200) to performing.Renewal calibration is changed to the correction matrix set all or fewer than correction matrix set.
Description
Copyright retains
A disclosed part for patent document includes material protected by copyright.Copyright holder does not oppose anyone
Progress duplication reproduction is disclosed patent file or patent (as long as it appears in patent document or record in Patent and Trademark Office
In), but copyright holder retains all copyrights anyway in other cases.
Background technology
Automatically obtain most important to many industries and process relative to the accurate three-dimensional information of surface or object.For example,
In electronic assemblies industry, the accurate three-dimensional information relative to the electric component on circuit board can be used whether to determine component
It is correctly positioned.In addition, before component installation, three-dimensional information can also be used for checking the solder paste deposits on circuit board, with true
Protect the correct position of the solder paste deposits of appropriate amount on circuit boards.In addition, three-dimensional information is in semiconductor wafer and flat-panel monitor
Inspection in be also useful.Finally, improved with the precision of this three-dimensional information, three-dimensional information for various additional industries and
Using becoming useful.However, the precision gathered with three-dimensional information is improved, change is compensated to a variety of causes that mini system is disturbed
Obtain more and more important.Therefore, for becoming more and more important to the calibration for obtaining three-dimensional system.
The calibration process of three-dimensional structure light measuring sensor should carry out normal optical imperfection to projecting apparatus and video camera
The compensation of (including lens geometry distortion, inclination/keystone effect, rotation error and error on line of sight).In these imperfections
Some will not significant change over time, so as to influence measurement accuracy.However, after pick up calibration, other unreasonablys
The property thought may drift about very greatly within a few minutes to the period of several days, and will influence measurement performance.For example, change due to environment
Thermal expansion, sight may substantially change.
In the presence of complicated method accurately to be calibrated to three-dimension sensor, and usually require such as kinematic system and school
The accurate device of quasi- workpiece etc.Obtain the necessary image of calibration workpiece and also relatively time-consuming are analyzed to them.
The content of the invention
There is provided a kind of side calibrated to the three-dimension measuring system with multiple video cameras and at least one projecting apparatus
Method.This method includes:Complete calibration is performed to each video camera/projecting apparatus, wherein complete at least two schools of calibration generation
Positive matrices set.Calibration then is updated to performing to each video camera/projecting apparatus.Calibration is updated to all or fewer than correction matrix collection
The correction matrix set of conjunction is changed.
Brief description of the drawings
Fig. 1 is the flow chart for being used to perform the method calibrated completely according to embodiments of the present invention.
Fig. 2 is the schematic views for showing full correction process according to embodiments of the present invention.
Fig. 3 A show the camera calibration including checkerboard pattern and two halftoning circles according to embodiments of the present invention
Target.
Fig. 3 B show Fig. 3 A detail section.
Fig. 4 is some of the camera calibration target in the measurement volume that have recorded Z location according to embodiments of the present invention
The schematic views of discrete Z location.
Fig. 5 is projection correction's target according to embodiments of the present invention.
Fig. 6 is a series of schematic views of the multiple Z locations for having projected sine streak patterns according to embodiments of the present invention.
Fig. 7 is the schematic views of the reference pattern projected in projector calibration target according to embodiments of the present invention.
Fig. 8 is the flow chart of the method according to embodiments of the present invention being updated to calibration.
Embodiment
According to multiple embodiments described herein there is provided accurate, complete calibration process, it is to conventional imperfection
Compensate, promote quick runtime processing and generate that the reference data set of measurement calibration drift can be subsequently applied to.
Although the complete calibration is time-consuming, only need to perform once, or at least perform infrequently, reason is that it will be directed to the time not
The imperfection of meeting significant change is compensated.Renewal process is calibrated there is provided one kind further according to embodiment as described herein,
It measures the amount of calibration drift, and if desired, only updates those parts for expecting to drift about in calibration completely with the time.Calibration
Renewal process is to perform comparatively faster process, and only needs relatively simple calibration workpiece.
For each video camera and projecting apparatus pair, complete calibration process will generate two corrections for each X, Y and Z-direction
Set, then applies two set of correction during measurement process.First set of correction includes can be between the shorter time
Every the calibration correction of drift in (such as in a few minutes or the magnitude of several days).Second set of correction includes can be in the longer time
The calibration correction of drift in interval (such as in the magnitude or never of some months).These first set of correction are updated by calibrating
The set of correction that process updates, and the second set of correction is the second set of correction only updated during follow-up full correction.
Fig. 1 is performed for the schematic flow sheet of the method for the complete calibration of the three-dimension measuring system shown in Fig. 2.Note,
The all component shown in Fig. 2 can not be shown although describing the subsequent diagram of three-dimension measuring system, this omission is not indicated that
In the absence of these components.On the contrary, it is clear for description, these figures are simplified.
Method 100 starts in square frame 102, and camera calibration is performed at square frame 202.To the and of video camera 118,120,122
124 progress calibrations include:The image (shown in Fig. 2) of the calibration target 114 of well-characterized is obtained, wherein in calibration target 114
Image (as shown in Figure 4) is obtained while positioned at different height position (the expecting calibration) place of scope for z.By controller 126 or
Other suitable processor logics are analyzed those images, to set up between camera pixel space and physical space
Geometric transformation.Next, at square frame 104, projector calibration is performed, by pattern projection to same target in projector calibration
In 114 or another targets, and each video camera shoots the image of pattern in z range.By controller 126 or other are suitable
Processor logic is analyzed those images, to set up the change of the geometry between camera pixel space and source pattern space
Change.Square frame 104 is repeated for each projecting apparatus 128 in system.Note, in the illustrated example shown in fig. 2, show single projection
Instrument 128.Next, in square frame 106, in turn, controller 126 or other suitable processing logics are to video camera and projection for process
Instrument conversion is combined, with for each video camera and projecting apparatus to producing overall calibration.Therefore, if there is two video cameras
With four projecting apparatus, there will be the set of 8 complete calibration data;One is gathered for each projecting apparatus/video camera.Connect down
Come, in square frame frame 108, reference pattern is projected in target.The example of the reference pattern is shown in Fig. 7.In square frame 110
Place, each video camera 118,120,122 and 124 obtains the image of reference pattern.At square frame 112, controller 126 or other conjunctions
Suitable processor logic is analyzed those images, several between camera pixel space and reference pattern space to determine
What is converted.
During the camera calibration process described with reference to square frame 102, by controller 126 or other suitable processing logics
Circuit is analyzed image, to set up the geometric transformation between pixel space and physical space.During the analysis, Ke Yitong
Equation 1 is crossed to describe to calibrate the X of target 114, Y-coordinate, the relation between camera pixel coordinate α and β and target location Z:
(X, Y)=f1(α, β, Z) equation 1
X, Y are accurately known according to the calibration target 114 (such as the chessboard or argyle design of photoengraving pattern) of well-characterized
Coordinate, wherein the Z location of calibration target is for example accurately known using the precise translation stage with encoder, and wherein f1
() is any three-variable function.
During the projector calibration process described with reference to square frame 104, a series of patterns are projected in target, and is taken the photograph
Camera obtains the image of pattern in z range.For example, can by with 0, three sinusoidal patterns of 120 and 240 degree of phases project
In the target at each Z location.Referring to Fig. 6.By controller 126 or other suitable processor logics to camera review
Analyzed, to calculate the phase at each pixel using the image phase retrieval technique of standard three, with set up pixel space with
Geometric transformation between projecting apparatus pattern space.During the analysis, sinusoidal pattern in target can be described by equation 2
Calculate phase, the relation between camera pixel coordinate α and β and target location Z:
φ=f2(α, β, Z) equation 2
The Z location of calibration target, and wherein f2 are for example accurately obtained using the precise translation stage with encoder
() is any three-variable function.
During the X, Y, the run time of Z coordinate of each camera pixel is rebuild, equation 3 and 4:
(X, Y)=f1(α, β, Z) equation 3
φ=f2(α, β, Z) equation 4
It is difficult to what is rebuild, reason is that Z is independent variable, and it is unknown again.On the contrary, equation 5 must be provided
The function of form:
(X, Y, Z)=f3(α, β, φ) equation 5
Promoting an important insight of actual reconstruction is, can be not to letter for any pixel of given calibration image
Number form formula unknown quantity (X, Y, Z, α, β, φ) is associated in the case of any hypothesis.It is appropriate according to this hexa-atomic group
Larger set, can redistribute independent variable and dependent variable, wherein ternary multinomial is suitable fitting function by returning.
Therefore, below equation computed altitude Z is passed through:
Z=(adaptive height) * φc/ 2 equations 6
Wherein adaptive height (wrap height) is from phasecTo height Z nominal scaling, phase is after correction:
φc=P (α, β, φ) equation 7
And the lateral attitude X and Y corrected by below equation:
X=Q1(α, β, φ) equation 8
Y=Q2(α, β, φ) equation 9
P (), Q1 () and Q2 () are by returning the ternary multinomial found.Recurrence can be carried out in prover time
Once, its result be stored in the memory 130 of controller 126 or any other suitable memory in, for later fortune
The row time is applied.
This method has some advantages.One advantage is that telecentricity will not cause the special feelings in singular point or needs processing
Condition, reason is it dependent on the process for determining effective pupil height.On the contrary, associated correction coefficient is very small or is zero.
Another advantage is automatic modeling and considers pupil distortion.Another advantage is can be entangled using only multiplication and addition to apply
Just, this is conducive to high speed processing;Division or iteration are not needed.
For ease of calibration renewal process, complete calibration process generates two calibration sets for each X, Y and Z-direction and merges life
Into reference data set.When sinusoidal phase-shift pattern be used for rebuild when, then Z location with correct after phase it is directly proportional.One
In individual embodiment, first phase set of correction is relative to the skew school of the reference planes at nominal optimum focusing (Z=0) place
Just, and second phase set of correction is the zoom factor for considering the change of triangulation angle on stripe direction and the visual field.First X
Set of correction is the offset correction at nominal optimum focusing (Z=0) place, and the second set of correction is characterized and moved by the X of working volume
Position.Similarly, corrected for Y, the first Y set of correction is the offset correction at nominal optimum focusing (Z=0) place, the second correction
Set is characterized to be shifted by the Y of working volume.In addition, completely calibration process produce calibrate renewal process during use it is some
Reference data set.
More specifically, calculating phase calibration φ by equation 10c
φc=P (α, β, φ)=d φ0+φοdφc/ d φ equations 10
φc, d φ0, φ, d φc/ d φ, are the two-dimensional matrixs matched with image size.Match with the size of image
Mean that matrix has and the equal number of element of pixel in image.Therefore, in the examples described above, there are four different squares
Battle array, each matrix has and the equal number of element of pixel in image.First phase correction matrix d φ0It is relative to image
In each pixel coordinate (α, β) flat reference face Z=0 at phase offset.Each element of φ matrixes is by phase
The nominal phase of that pixel position of shifting method generation.Second phase correction matrix d φc/ d φ are to each in visual field
The adaptive height of pixel carries out the non-unity matrix for the compensation that stripe direction and triangulation angle change.φοdφc/dφ
It is two matrixes by element product, also referred to as Hadamard products.
Then the height at each pixel is provided by equation 11.
Z=(adaptive height) * φc/ 2 equations 11
The X position of the correction of each pixel is calculated by equation 12:
X=Q1(α, β, φ)=Xnom+dX0+ φ ο dX/d φ equations 12
Wherein X, Xnom, dX0, φ, dX/d φ be all the two-dimensional matrix matched with image size.XnomEach member of matrix
Element is the nominal X image coordinates based on pixel coordinate and nominal resolution.First X correction matrixs dX0It is for every in image
The X skews of geometric distortion at individual pixel coordinate (α, β) correction Z=0.2nd X correction matrix dX/d φ characterize lateral shift
For the function of nominal phase.φ ο dX/d φ are two matrixes by element product.
The Y-coordinate of the correction of each pixel is calculated by the similar process of the X corrections with being illustrated in equation 13:
Y=Q2(α, β, φ)=Ynom+ dY0+ φ ο dY/d φ equations 13
Wherein Y, Ynom、dY0, φ, dY/d φ be all the two-dimensional matrix matched with image size.YnomEach member of matrix
Element is the nominal Y image coordinates based on pixel coordinate and nominal resolution.First Y correction matrixs dY0It is for every in image
The Y skews of geometric distortion at the correction Z=0 of individual pixel coordinate (α, β).2nd Y correction matrix dY/d φ are by lateral shift table
Levy the function for nominal phase.φ ο dY/d φ are two matrixes by element product.
Fig. 2 will be referred to further and illustrates complete calibration process.Each video camera 118,120,122 and 124 pairs of careful signs
Camera calibration target 114 be imaged.Pattern in camera calibration target 114 can be checkerboard pattern (such as in institute
In example), argyle design, and reference marker can also be patterned in camera calibration target 114, clearly to build
The coordinate system 114 of vertical camera calibration target.In one embodiment, camera calibration target includes halftone pattern to set up
Its coordinate system.
Fig. 3 A show the camera calibration target including two halftoning circles in checkerboard pattern and checkerboard pattern
Example.Circle sets up common coordinate system for all video cameras.
Fig. 3 B show Fig. 3 A detail section.Controller 126 or other suitable processor logics are to each shooting
Machine image is analyzed, with (X, the Y) position for the calibration target signature for determining each camera pixel coordinate (α, β).Video camera
The Z location of calibration target 114 is also recorded in memory 130 or other suitable memories.As shown in Figure 4, due to taking the photograph
Camera calibration target 114 is located at some discrete Z locations in the measurement volume of three-dimension sensor and repeats the process.
As shown in Figure 5, to be calibrated to projecting apparatus 128, video camera school can be replaced by projector calibration target
Quasi- target 114.As shown in Figure 6, at each Z location of projector calibration target, each video camera is to a series of sinusoidal bars
Line is projected and is imaged.The image from each video camera is divided by controller 126 or other suitable processor logics
Analysis, to calculate the phase at each pixel coordinate (α, β) place.
As shown in Figure 7, then by the way that reference pattern to be projected to next life in the projector calibration target at Z=0
Into the reference data for calibrating renewal process.Reference pattern image is analyzed, it is every in reference pattern coordinate system to determine
The position of the reference projection pattern characteristics of individual camera pixel.Assuming that the shared physics X of reference pattern coordinate system, Y-coordinate system, but by
May slight distortion in the distortion of projection optical device.Then, for each camera review, generation refers to X correction matrixs
dX0, ref, with reference to X correction matrixs dX0, refProvide the X skews for each pixel being directed in reference pattern coordinate system in each image.
Similarly, for each camera review, generation is with reference to Y correction matrixs dY0, ref, with reference to Y correction matrixs dY0, refProvide reference
The Y skews for each pixel being directed in patterns coordinate system in each image.Although illustrate only a projection as shown in figures 2-6
Instrument, but in other embodiments, three-dimension sensor system can have more than one projecting apparatus.In those embodiments, pin
To each video camera and projecting apparatus pair, X, Y first set and second set, phasing matrix and reference X and Y schools are generated
Positive matrices.
In another embodiment, same target is used for both camera calibration and projector calibration.For video camera school
Standard, can irradiate target by diffused backlit, to watch camera calibration pattern.The surface of the target may also slightly become
Coarse so that when projecting apparatus is irradiated from the front, the surface of the target carries out diffusing scattering to light.
After the completion of complete calibration process, per when needed, more fresh target can be calibrated in Z=0 (sensors by adjusting
Nominal optimum focusing) place relative position, relatively quickly to perform calibration renewal process.Fig. 8 is according to embodiments of the present invention
The flow chart of method being updated to correction.Method 200 starts at square frame 202, in the alignment of square frame 202 more fresh target
It is positioned at the position of optimum focusing.In one embodiment, calibration more fresh target is preferably plane surface.In square frame 204
Place, will be used to generate with reference to X during complete calibration process and projects to calibration more with reference to the same reference pattern of Y correction matrixs
On fresh target.At square frame 206, X correction matrixs and Y correction matrixs are updated.More specifically, for the generation of each camera review
Update X correction matrixs dX0, upd, update X correction matrixs dX0, updProvide each picture in each image in reference pattern coordinate system
The X skews of element.Similarly, Y correction matrixs dY is updated for the generation of each camera review0, upd, update Y correction matrixs dY0, upd
Provide the Y skews of each pixel in reference pattern coordinate system in each image.At square frame 208, then will have and calibration
The aggregate projection of the sine streak of the sine streak same alike result used in complete process to calibration more fresh target on.In square frame
At 210, phasing matrix d φ are then calculated0, upd.Then, at square frame 212, each shooting is updated by following relation
First correction matrix set of machine:
dX0=dX0, full+(dX0, upd-dX0, ref) equation 14
dY0=dY0, full+(dY0, upd-dY0, ref) equation 15
dφ0=d φ0, updEquation 16
Wherein dX0, fullAnd dY0, fullIt is the first X correction matrixs set and generated during complete calibration process respectively
One Y correction matrix set.Difference matrix (dX0, upd-dX0, ref) and (dX0, upd-dX0, ref) it is the measurement that calibration is drifted about.Even if by
There are some distortions of reference pattern in projection optical device, there is also identical during complete calibration and calibration renewal processing
Distortion, and by obtaining refer to and update the difference of correction matrix and eliminate these distortions.If these difference matrixs is residual
Difference is sufficiently low, then the first correction matrix set is maintained at the correction matrix set produced in complete calibration process:
dX0=dX0, full
dY0=dY0, full
dφ0=d φ0, full
Wherein d φ0, fullIt is the first phase correction matrix produced in complete calibration process.
Have been disclosed for providing the complete calibration process of the first calibration correction set and the second calibration correction set.It is public
The simple alignment renewal process for updating the first set of correction is opened.In a most general sense, calibration renewal process updates complete
The only a part of calibration.Although it is disclosed that for video camera, projecting apparatus, with reference to and update calibration AD HOC, still
The invention is not restricted to these AD HOCs.
Claims (20)
1. a kind of method calibrated to the three-dimension measuring system with multiple video cameras and at least one projecting apparatus, the side
Method includes:
To each video camera/projecting apparatus to performing complete calibration, at least two correction matrix set of the complete calibration generation;With
And
Calibration then is updated to performing to each video camera/projecting apparatus, wherein described update calibration to all or fewer than correction matrix
The correction matrix set of set is changed.
2. according to the method described in claim 1, wherein calibration completely described in the renewal orientation ratio is more frequently performed.
3. according to the method described in claim 1, wherein the complete calibration produces the first correction matrix set and the second correction
Set of matrices, and it is described update calibration the first correction matrix set be changed, and keep second school simultaneously
Positive matrices set is constant.
4. method according to claim 3, wherein the first correction matrix set is included on relative short time interval
The calibration correction of drift.
5. method according to claim 4, wherein the short time interval is less than two days.
6. method according to claim 3, wherein the second correction matrix set is included in the time of at least some months
The calibration correction of drift in section.
7. according to the method described in claim 1, wherein, correction matrix set includes the correction on three orthogonal directions.
8. according to the method described in claim 1, wherein performing calibration completely includes performing camera calibration, in camera calibration
In each video camera obtained at multiple different known altitudes well-characterized calibration target image.
9. method according to claim 8, wherein being analyzed the image obtained by video camera to set up video camera picture
Geometric transformation between plain space and physical space.
10. according to the method described in claim 1, wherein performing calibration completely includes performing projector calibration, in projecting apparatus school
Projected a pattern into standard in target, and each video camera is obtained and thrown when the target is positioned at multiple different heights
The image of shadow pattern.
11. method according to claim 10, wherein being analyzed the image obtained during projector calibration to build
Vertical geometric transformation between camera pixel space and source pattern.
12. according to the method described in claim 1, wherein the complete calibration includes the group that video camera conversion and projecting apparatus are converted
Close, to produce the overall calibration for each video camera/projecting apparatus pair.
13. a kind of method calibrated to the three-dimension measuring system with multiple projecting apparatus and at least one video camera, described
Method includes:
There are at least two correction matrix set to performing complete calibration, the complete calibration to each video camera/projecting apparatus;With
And
Calibration then is updated to performing to each video camera/projecting apparatus, wherein described update calibration to all or fewer than correction matrix
The correction matrix set of set is changed.
14. a kind of obtain the method that three-dimensional optical image obtains the calibration data of system, methods described includes:
The set for being defined as six items of information by hexa-atomic group, described information includes the seat in one of physical space and image space
Mark;
Hexa-atomic group of enough numbers is obtained so that multiple multinomials are corresponding with hexa-atomic group information;
At least one in phase calibration, the horizontal X position of correction and the horizontal Y location of correction is obtained using the multiple multinomial
It is individual.
15. method according to claim 14, wherein, the multiple multinomial is used to obtain phase calibration, correction transverse direction X
Position and the horizontal Y location of correction.
16. method according to claim 14, wherein, one in the multiple multinomial is used to obtain the correction phase
Position, second in the multiple multinomial is used to obtaining the horizontal X position of the correction, and the in the multiple multinomial
Three are used to obtain the horizontal Y location of correction.
17. a kind of three-dimensional optical image obtains system, including:
Multiple video cameras, each video camera is configured as watching measurement space from different points of view;
At least one projecting apparatus, is configured as projecting a pattern on measurement space;
Controller, is configured as that the multiple video camera and at least one described projecting apparatus are performed calibration completely to produce at least
First set of correction values and the second set of correction values;And
Wherein described controller is configured as updating to performing calibration relative to each video camera/projecting apparatus, wherein the calibration
Influence first set of correction values is updated, and second set of correction values is kept constant simultaneously.
18. system according to claim 17, wherein, first set of correction values and the second set of correction values are stored in
In system storage.
19. system according to claim 18, wherein, access first set of correction values and the second set of correction values with
It is corrected to updating the three-dimensional measurement value obtained after completion in calibration.
20. system according to claim 18, wherein, first set of correction values and the second set of correction values are respectively
First correction matrix and the second correction matrix.
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