JP2012173243A - Three-dimensional measuring apparatus and three-dimensional measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional measuring apparatus and a three-dimensional measuring method capable of reducing influence of temperature drift on a projection device.SOLUTION: A three-dimensional measuring apparatus 1 including a light projection part 30 for applying light of a predetermined irradiation pattern and an imaging part 20 for picking up an image including reflected light of light applied by the light projection part 30 includes also a measurement part 40 for outputting an irradiation instruction for controlling an irradiation position of the light of the irradiation pattern to the light projection part 30 and calculating measurement data from image data picked up by the imaging part 20. The measurement part 40 allows the light projection part 30 to continuously apply light of the irradiation pattern, controls scanning so as to repeat in a measurement area including an area imaged by the imaging part 20, detects the irradiation position controlled by the irradiation instruction from the picked-up image data, mutually compares pieces of information indicating the irradiation positions by the irradiation instruction to the same position at detected different pieces of time, and corrects calibration data for calibrating measurement values.

Description

  The present invention relates to a three-dimensional measurement apparatus and a three-dimensional measurement method.

As a non-contact three-dimensional measurement method, there is a light cutting method. The light cutting method irradiates the object to be measured with the light irradiated by the projection device and moves the object to be measured at a constant speed, while the imaging device irradiates the irradiated light with a constant contour of the cross section of the object to be measured. The three-dimensional measuring device acquires one frame at an interval. Then, the coordinates of the image by the irradiation light extracted from the image of the outline of the cross-section illuminated by the acquired irradiation light (hereinafter referred to as the light cut image), the attachment position and angle of the projection apparatus, and the attachment position and angle of the imaging apparatus The object to be measured is measured by using the triangulation method.
In such a light cutting method, a laser beam irradiation device, a projector, or the like is used as a projection device. In addition, as a three-dimensional measurement method using the light section method, many methods such as a slit method, a lattice method, a phase shift method, a binary code method, and the like have been proposed.

  When a projector is used as the projection device, the projection device receives a pattern change to be projected due to the influence of an internal temperature change, and the pixel position to be projected changes. For this reason, a deviation occurs between the projected pixel position at the time of calibration and the projected pixel position at the time of measurement, and the measurement accuracy is deteriorated. The tendency of the deviation of the projection pixel position, which can be called temperature drift, becomes more conspicuous as the projection apparatus becomes smaller and cheaper, and it is necessary to manage the temperature inside the projection apparatus.

  For this reason, in the invention described in Patent Document 1, the projection apparatus scans the calibration slit pattern in the vertical direction and the horizontal direction and irradiates from the projection apparatus. Then, the imaging device captures the irradiated calibration pattern, and the arithmetic processing unit performs image processing on the captured image. Further, in the invention described in Patent Document 1, since the slit pattern in two vertical and horizontal directions is irradiated while the projection device is fixed, the projection position on the reference plane of the display pixel of the projection device can be associated. As a result, by associating the projection device element with the projection position on the reference plane on a one-to-one basis, even if there is aberration in the lens of the projection device, measurement data can be measured and stored by the imaging device. The three-dimensional measuring device was calibrated.

  In the invention described in Patent Document 2, an object to be measured whose width is measured is placed on a reference object whose width is already known. Then, the reference object and the object to be measured are irradiated from the two projection apparatuses, and images are taken by the imaging apparatus from the respective irradiation directions. Then, using the images taken by the two imaging devices, the position of each point of the reference object and the object to be measured is calculated using the principle of triangulation. Then, the distance between each point, each line, and each surface of the reference object and the object to be measured is calculated by subtracting the calculated positions of each point, each line, and each surface. This subtraction cancels out fluctuation errors due to circuit characteristics and errors in the three-dimensional sensor between the projection apparatus and the image pickup apparatus, and therefore does not require calibration.

Japanese Patent Laying-Open No. 2005-3410 JP 7-260429 A

  However, in the invention described in Patent Document 1, calibration can be automatically performed using a calibration pattern, and further, the influence of lens distortion of the projection apparatus can be calibrated. The effect of drift cannot be calibrated.

  Further, in the invention described in Patent Document 2, when the temperature drift characteristic and the temperature change are different for each of the two projectors and imaging devices, the influence of the temperature drift cannot be calibrated. Moreover, in the invention described in Patent Document 2, since the object to be measured is arranged on the reference object, the portion overlapping the reference object cannot be measured.

  SUMMARY An advantage of some aspects of the invention is that it provides a three-dimensional measurement apparatus and a three-dimensional measurement method that reduce the influence of a temperature drift of a projection apparatus.

  In order to achieve the above object, the present invention provides a three-dimensional structure having a light projecting unit that irradiates light of a predetermined irradiation pattern and an image capturing unit that captures an image including light reflected by the light irradiated by the light projecting unit. The measurement apparatus includes a measurement unit that outputs an irradiation instruction for controlling an irradiation position of light of an irradiation pattern to the light projecting unit, and calculates measurement data from image data captured by the imaging unit. The control unit causes the light projecting unit to continue to irradiate light of the irradiation pattern, and controls to repeat scanning within a measurement region including a region imaged by the imaging unit, and the irradiation position according to the irradiation instruction is captured. It is characterized in that calibration data for calibration of a measured value is corrected by comparing the detected information detected from the image data and comparing the detected information at different times and indicating the irradiation position by the irradiation instruction to the same position.

  According to the present invention, since the irradiation of the predetermined irradiation pattern is continuously performed while scanning from the light projecting unit, the predetermined irradiation pattern of the light projecting unit is irradiated only when measuring the measurement object. Compared to the effect of stabilizing the irradiation light. In addition, the three-dimensional measuring device has a special configuration in the light projecting unit by calibrating the calibration data by detecting and comparing the irradiation position by the display instruction to the same position at different times that are continuously irradiated. In addition, the error of the three-dimensional measurement result due to the influence of the temperature drift of the light projecting unit or the like can be corrected with high accuracy. As a result, the influence of the temperature drift of the projection apparatus can be reduced.

  In order to achieve the above object, in the three-dimensional measurement apparatus according to the present invention, the measurement unit detects an irradiation position at which light of the predetermined irradiation pattern is irradiated from image data captured by the imaging unit. The calibration data correction unit for correcting the calibration data by comparing the information indicating the irradiation position by the irradiation instruction at the different time and the same position detected by the irradiation position detection unit, and the calibration data correction unit And a three-dimensional data calculation unit that calculates three-dimensional measurement data using the calibration data.

  In order to achieve the above object, in the three-dimensional measurement apparatus according to the present invention, the measurement unit performs the projection based on a result of comparing pieces of information indicating irradiation positions according to the detected different times and irradiation instructions to the same position. A temperature calculation unit that calculates temperature control information to the light unit and outputs the calculated temperature control information to the light projecting unit may be provided.

  According to the present invention, the temperature calculation unit calculates the temperature control information to the light projecting unit based on the result of comparing the information indicating the irradiation position by the display instruction to the different position and the same position detected, The calculated temperature control information is output to the light projecting unit. For this reason, temperature control of a light projection part can be performed based on the influence by the temperature drift of a light projection part. And since the error which a light projection part has can be reduced by the temperature control of a light projection part, the influence by the temperature drift of a projection apparatus can be reduced.

  In order to achieve the above object, in the three-dimensional measurement apparatus according to the present invention, the control unit detects an irradiation position detected immediately after calibration of the light projecting unit, the imaging unit, and the three-dimensional measurement device, and the calibration. Compare the irradiation position by the irradiation instruction to the irradiation position detected immediately after the calibration detected at a time other than immediately after the calibration, and correct the calibration data for calibration of the measured value It may be.

  According to the present invention, the initial data to be compared is generated immediately after calibration with almost no influence of the temperature drift of the light projecting unit, and the generated initial data is compared with the irradiation position at a time different from that at the time of initial data generation. To do. As a result, the error of the three-dimensional measurement value can be suppressed to the same level as that immediately after the calibration with almost no influence of the temperature drift of the light projecting unit.

  In order to achieve the above object, in the three-dimensional measurement apparatus of the present invention, the control unit calculates the coordinates of the pixel at the irradiation position irradiated with light of the predetermined irradiation pattern from the image data captured by the imaging unit. You may make it calculate as information which shows an irradiation position.

  According to the present invention, since the coordinates of the pixel at the irradiation position irradiated with the light of the predetermined irradiation pattern are used for the information indicating the irradiation position from the image data captured by the imaging unit, the deviation of the irradiation position in units of pixels. In comparison, the three-dimensional measurement result can be corrected.

  In order to achieve the above object, in the three-dimensional measurement apparatus of the present invention, the control unit may detect the irradiation position at a place where an object to be measured is not placed in the measurement region.

  According to the present invention, since the irradiation position in the state where the measurement object is not placed in the measurement area is detected, the irradiation position can be detected at a position where the height of the measurement area where the measurement object is placed does not change. As a result, it is possible to accurately correct an error in the three-dimensional measurement result due to the influence of the temperature drift or the like of the light projecting unit without being affected by the measurement object.

  In order to achieve the above object, in the three-dimensional measuring apparatus of the present invention, the light of the predetermined irradiation pattern irradiated from the light projecting unit is slit light, and the measuring unit is configured to be at different times and at the same position. The irradiation position of the slit light irradiated by the irradiation instruction is detected, and information indicating the line position of the slit light irradiated by the irradiation instruction to the different time and the same position detected is compared with each other. Calibration data for calibration may be corrected.

  According to the present invention, the slit light is used for the predetermined irradiation pattern irradiated from the light projecting unit, and the measuring unit calculates the line position of the irradiated slit light as the irradiation position. Since the slit light is used, the irradiation position can be easily detected, and the error can be easily detected. For this reason, it is possible to reduce the cost of the three-dimensional measuring apparatus and increase the calculation speed.

  In order to achieve the above object, in the three-dimensional measurement apparatus of the present invention, the control unit uses image data captured by the imaging unit immediately after calibration of the light projecting unit, the imaging unit, and the three-dimensional measurement device. Information on the irradiation position irradiated with the slit light may be calculated by approximating the coordinates of two pixels included in the detected irradiation position.

  According to the present invention, when the irradiation pattern is slit light, the information on the irradiation position irradiated with the slit light from the image data captured by the imaging unit immediately after calibration is obtained from the two pixels included in the detected irradiation position. Since the calculation is performed by approximating the coordinates, the irradiation position can be easily detected, and further, the error can be easily detected. For this reason, it is possible to reduce the cost of the three-dimensional measuring apparatus and increase the calculation speed.

  In order to achieve the above object, the present invention provides a three-dimensional structure having a light projecting unit that irradiates light of a predetermined irradiation pattern and an image capturing unit that captures an image including light reflected by the light irradiated by the light projecting unit. In the three-dimensional measurement method of the measurement device, the measurement unit outputs an irradiation instruction for controlling the irradiation position of the light of the irradiation pattern irradiated by the light projecting unit, and the measurement data is obtained from the image data captured by the imaging unit. Including a measurement step to calculate, wherein the measurement step controls the light projecting unit to continuously emit light of a predetermined irradiation pattern and repeats scanning within a measurement region including a region imaged by the imaging unit. Calibration data for calibrating the measured value by detecting the irradiation position by the irradiation instruction from the captured image data, comparing the detected information at different times and the irradiation position by the irradiation instruction to the same position The It is characterized by positive to.

  According to the present invention, by continuously irradiating light of a predetermined irradiation pattern while scanning from the light projecting unit, the light of the predetermined irradiation pattern of the light projecting unit is irradiated only when measuring the object to be measured. There is an effect that the irradiation light of the light projecting unit is stabilized as compared with the case of doing. In the three-dimensional measurement method of the present invention, the calibration data is calibrated by detecting and comparing the irradiation positions according to the display instruction to the same position at different times that are continuously irradiated. For this reason, the three-dimensional measurement method of the present invention accurately corrects an error in a position where a predetermined irradiation pattern affected by a temperature drift of the light projecting unit is irradiated without adding a special configuration to the light projecting unit. Can do. As a result, the influence of the temperature drift of the projection apparatus can be reduced.

It is the schematic which shows the structural example of the whole system of the three-dimensional measuring apparatus which concerns on 1st Embodiment. It is a block diagram showing an example of composition of a measuring device concerning the embodiment. It is a graph which shows an example of the measured value immediately after calibration. It is a graph which shows an example of the measured value 15 minutes after calibration in the case where correction of this embodiment is not performed. It is a graph which shows an example of the measured value 30 minutes after calibration in the case where correction of this embodiment is not performed. 3 is a flowchart of initial data generation processing according to the embodiment. It is a figure explaining an example of the slit light irradiated on the workpiece | work which concerns on the same embodiment. FIG. 8 is a diagram illustrating an example of image data obtained by capturing an image by the slit light of FIG. 7 according to the embodiment. It is a figure explaining an example of the initial data memorize | stored in the measurement data storage part. It is a flowchart of the three-dimensional measurement process which concerns on the same embodiment. 5 is a flowchart of calibration data correction processing according to the embodiment. It is a figure which shows an example of the image data which imaged the state of FIG. 7 in the three-dimensional measurement process which concerns on the embodiment. It is a figure explaining an example of the calibration data memorize | stored in the calibration data memory | storage part which concerns on the embodiment. It is a graph which shows an example of the measured value immediately after calibration. When correction | amendment of this embodiment is performed, it is a graph which shows an example of the measured value 15 minutes after calibrating. When correction | amendment of this embodiment is performed, it is a graph which shows an example of the measured value 30 minutes after calibrating. It is a figure explaining the state of the slit light when a to-be-measured object is set | placed on the workpiece | work after the initial data acquisition which concerns on 2nd Embodiment. It is a figure which shows an example of the image data which imaged the image by the slit light of FIG. 17 which concerns on the embodiment. It is a flowchart of the three-dimensional measurement which concerns on the same embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited to the embodiment which concerns, A various change is possible within the range of the technical thought. Moreover, in the following drawings, in order to make each structure easy to understand, an actual structure and a scale, a number, and the like in each structure are different.

[First Embodiment]
FIG. 1 is a schematic diagram illustrating a configuration example of the entire system 1 of the three-dimensional measurement apparatus according to the present embodiment. As shown in FIG. 1, the system 1 of the three-dimensional measurement apparatus includes a stage 10, an imaging device 20, a projection display device 30, a measurement device 40, and an image display device 50. On the stage 10, a measurement object 5 to be measured is placed.

  The stage 10 is moved at a constant speed by the control unit 40 in order to cause the object to be measured 5 to scan with light of a pattern irradiated from the projection display device 30 (hereinafter referred to as irradiation light).

  The imaging device 20 (imaging unit) is composed of, for example, a light receiving lens and a CCD camera, and controls the photographing timing from the measuring device 40 to generate a light-cut image of the surface of the object 5 to be measured by reflected light of the irradiated light frame by frame. The captured image data is transmitted to the measuring device 40 as frame image data. Further, the imaging device 20 is controlled by the measuring device 40 in terms of the shooting angle with the object 5 to be measured, the focus adjustment with respect to the object 5 to be measured, and the distance to the object 5 to be measured.

  The projection display device 30 (light projecting unit), for example, generates slit-shaped irradiation light and irradiates the surface of the object to be measured 5 with the slit-shaped irradiation light. The projection display device 30 is, for example, a projector. In the projection display device 30, the irradiation position of the irradiation pattern of the irradiation light is controlled by the measurement device 40, and the rotation of the FAN (fan) in the projection display device 30 is controlled by the measurement device 40.

  The light section image 34 is a light section image formed by the irradiation light when the object to be measured 5 is irradiated with the slit-shaped irradiation light from the projection display device 30.

The measuring device 40 (measuring unit) controls the projection display device 30 to irradiate slit light as irradiation light. The measuring device 40 controls the FAN in the projection display device 30 based on a correction count calculated by comparing initial data and captured image data as will be described later. The measuring device 40 calculates and stores initial data from image data captured by the imaging device 20 in a state where nothing is placed on the workpiece 10 immediately after calibration. Further, the measurement device 40 calculates the position data of the coordinates of each pixel of the irradiation light from the captured image data, and compares the calculated position of the coordinates of each pixel of the irradiation light with the stored initial data. By doing so, the calibration data is updated. In addition, the measurement device 40 outputs the measured three-dimensional measurement result to the image display device 50.
The initial data refers to the coordinate value of the surface of the workpiece 10 calculated based on the image data captured in a state where nothing is placed on the workpiece 10 immediately after calibration (for example, the xy plane is on the workpiece 10 as described later). It is a plane coordinate, and the value of the z-axis indicates the height). As will be described later, the calibration data refers to the position of the coordinates of each pixel of the irradiation light detected from the image data when the position of the irradiation light irradiated on the workpiece 10 is shifted due to the influence of temperature drift. This is data for calibrating and correcting the amount of deviation with respect to.

  The image display device 50 displays the three-dimensional measurement result output from the measurement device 40.

Next, an example of the configuration of the measuring device 40 will be described. FIG. 2 is a block diagram illustrating an example of the configuration of the measurement apparatus according to the present embodiment.
As shown in FIG. 2, the measurement device 40 includes a control unit 41, an image acquisition unit 42, a measurement data storage unit 43, a line position calculation unit 44, a calibration data correction unit 45, a calibration data storage unit 46, and a three-dimensional data calculation unit. 47 and a temperature calculation unit 48 are provided. Further, the projection display device 30 includes an image control unit 31 and a FAN control unit 32.

The control unit 41 of the measuring device 40 initializes the initial data stored in the measurement data storage unit 43 and the calibration data stored in the calibration data storage unit 46. The control unit 41 outputs a control signal to the image control unit 31 and the line position calculation unit 44 of the projection display device 30 at a predetermined timing. The control unit 41 causes the projection display device 30 to display an image for generating initial data or irradiation light for measurement on the workpiece 10 by this control signal.
In the present embodiment, the irradiation light for generating initial data or the irradiation light for measurement is irradiation light of slit light.

  The image acquisition unit 42 converts the image data output from the imaging device 20 from an analog signal to a digital signal. The image acquisition unit 42 binarizes the converted image data with a predetermined threshold value, and stores the binarized image data in the measurement data storage unit 43.

  The measurement data storage unit 43 stores the pixel coordinates of the work coordinates corresponding to the pixel coordinates of the camera coordinates calculated by the line position calculation unit 44. The measurement data storage unit 43 stores image data binarized by the image acquisition unit 42. The camera coordinates are image data picked up by the image pickup apparatus 20 or coordinates in the image pickup element. Further, the workpiece coordinates are coordinates in the real space when an arbitrary point on the workpiece 10 or an arbitrary point is set in a space for measurement.

The line position calculation unit 44 reads the binarized image data stored in the measurement data storage unit 43 and detects the line position from the read image data. The line position is the position (coordinate) where the slit light image is formed in the work coordinates and camera coordinates of the slit light when the irradiation light is slit light. For example, each line position of each pixel forming the slit light A set of coordinates.
The line position calculation unit 44 calculates the line position at the camera coordinates from the captured image data, and calculates the line position at the work coordinates corresponding to the calculated camera coordinates. The line position calculation unit 44 associates all the pixels of the line detected by the camera coordinates with the coordinates of all the pixels of the calculated work coordinates and stores them in the measurement data storage unit 43. The line position calculation unit 44 determines whether or not the scanning of the predetermined range on the workpiece 10 is completed based on the control signal output from the control unit 41, and the scanning of the predetermined range on the workpiece 10 is completed. If it is determined, information indicating completion is output to the three-dimensional data calculation unit 47.

  The calibration data correction unit 45 reads the initial data of the workpiece position stored in the measurement data storage unit 43. The calibration data correction unit 45 compares the read initial data of the work position with the coordinates of the pixel at the line position calculated by the line position calculation unit 44, and calculates a correction coefficient (temperature control information) for the work position. The calibration data correction unit 45 corrects and updates the calibration data stored in the calibration data storage unit 46 by calibration data correction processing described later, and updates the updated calibration data to the calibration data storage unit 46. Remember. The calibration data correction unit 45 outputs the calculated correction coefficient to the temperature calculation unit 48.

  In the calibration data storage unit 46, calibration data is stored in association with the work position.

  The three-dimensional data calculation unit 47 receives the information indicating that the scanning output from the line position calculation unit 44 is completed, and then uses the updated calibration data stored in the calibration data storage unit 46 to be described later. All the line position data measured so as to be corrected. The three-dimensional data calculation unit 47 outputs all corrected line position data to the image display device 50 as measurement data.

  The temperature calculation unit 48 estimates the internal temperature of the projection display device 30 based on the correction coefficient output from the calibration data correction unit 45. The temperature calculation unit 48 generates a control value for controlling the FAN of the projection display device 30 based on the estimated temperature of the projection device, and outputs the generated FAN control value to the FAN control unit 32 of the projection display device 30. To do.

  The image control unit 31 of the projection display device 30 irradiates the irradiation light for initial data generation or the irradiation light for measurement while sequentially scanning the stage 10 at the timing of the instruction by the control signal from the control unit 41. To do.

  The FAN control unit 32 controls the rotation speed of the FAN of the projection display device 30 based on the FAN control value from the temperature calculation unit 48.

Next, an example of a measurement error when the correction according to the present embodiment is not performed will be described with reference to FIGS. FIG. 3 is a graph illustrating an example of a measurement value immediately after calibration. FIG. 4 is a graph showing an example of measured values 15 minutes after calibration when correction according to the present embodiment is not performed. FIG. 5 is a graph showing an example of a measurement value 30 minutes after calibration in the case where the correction according to the present embodiment is not performed. 3 to 5, the horizontal axis is the x-axis of the camera coordinates, and the vertical axis is the y-axis of the camera coordinates. 3-5, each hatching 201-210 represents the dispersion | variation in the height of the surface of the measured z-axis direction. The hatching 201 represents −1450 [μm] to −1470 [μm], and the hatching 202 represents −1470 [μm] to −1490 [μm]. The hatching 203 represents −1490 [μm] to −1510 [μm], and the hatching 204 represents −1510 [μm] to −1530 [μm]. Hatching 205 represents -1530 [μm] to −1550 [μm], and hatching 206 represents −1550 [μm] to −1570 [μm]. A hatching 207 represents −1570 [μm] to −1590 [μm], and a hatching 208 represents −1590 [μm] to −1610 [μm]. Hatching 209 represents -1610 [μm] to -1630 [μm], and hatching 210 represents -1630 [μm] to −1650 [μm].
For example, in FIG. 3, if only the hatching 205 (−1530 [μm] to −1550 [μm]) is used, the error in the height direction (z-axis direction) of the measured surface is 20 [μm]. Represents.
3 to 5 measure an area of 100 [mm] × 70 [mm] in the same plane.

  As shown in FIG. 3, the measured value immediately after calibration by the light section method has a variation of about 20 [μm] in the height of the surface. As shown in FIG. 4, when the correction according to the present embodiment is not performed, when the same plane is measured 15 minutes after the calibration, the height of the surface has a variation of about 80 [μm]. Is measured. Furthermore, as shown in FIG. 5, when the correction according to the present embodiment is not performed, when the same plane is measured 30 minutes after the calibration, the height of the surface has a variation of about 200 [μm]. Is measured. That is, when the correction according to the present embodiment is not performed, the variation with respect to the height increases even if the same plane is measured every time after calibration. As shown in FIG. 5, the variation is about 10 times the variation immediately after calibration 30 minutes after calibration. Further, as shown in FIG. 5, the state of occurrence of variations is different even within the same plane. That is, the measured height decreases in the positive x-axis direction. One of these factors is a temperature drift caused by the projection display device 30.

Next, the initial data generation process will be described with reference to FIGS.
FIG. 6 is a flowchart of the initial data generation process according to the present embodiment.
FIG. 7 is a diagram illustrating an example of slit light irradiated on the workpiece 10 according to the present embodiment. 7 (a) is a diagram showing a state of the slit light when the position x _1, FIG. 7 (b) is a diagram showing a state of the slit light when the position x _2, FIG. 7 (c ) is a diagram showing a state of the slit light when the position x _3.
FIG. 8 is a diagram illustrating an example of image data obtained by capturing an image using the slit light of FIG. 7 according to the present embodiment. 8 (a) is a diagram image by the slit light position x ₁ indicates the image data imaged, FIG. 8 (b) shows an image data image by the slit light position x ₂ is captured a diagram, FIG. 8 (c), the image by the slit light position x ₃ is a diagram showing an image data imaged.
FIG. 9 is a diagram illustrating an example of initial data stored in the measurement data storage unit 43.
Note that the initial data generation processing in steps S <b> 1 to S <b> 5 in FIG. 6 is performed after calibration of the three-dimensional measurement system 1.

(Step S1)
First, the control unit 41 initializes initial data stored in the measurement data storage unit 43 and calibration data stored in the calibration data storage unit 46.
The image control unit 31 of the projection display apparatus 30 irradiates slit light for generating initial data to the x-axis position x ₁ on the stage 10 at the timing of the instruction by the control signal from the control unit 41. After step S1, the process proceeds to step S2.

(Step S2)
Next, the image acquisition unit 42 acquires the image data of the stage 10 irradiated with the slit light, which is image data captured by the imaging device 20 at the timing of the instruction by the control signal from the control unit 41. The image acquisition unit 42 converts the image data output from the imaging device 20 from an analog signal to a digital signal. The image acquisition unit 42 binarizes the converted image data with a predetermined threshold value, and stores the binarized image data in the measurement data storage unit 43. After step S2, the process proceeds to step S3.

(Step S3)
Next, the line position calculation unit 44 reads the binarized image data stored in the measurement data storage unit 43 and detects the line position from the read image data. The line position calculation unit 44 calculates the line position at the camera coordinates from the captured image data, and calculates the line position at the work coordinates corresponding to the calculated camera coordinates. For example, the line position calculation unit 44 includes all the pixels ((x ₁₁₁ , y ₁₁₁ ), (x ₁₁₂ , y ₁₁₂ ),..., (X _11m ) of the line 301 detected at the position of x _{11 in} the camera coordinates. , _y 11m)) (m for a natural number of 1 or more), the coordinates of all the pixels of position _{x 1} in the workpiece coordinate _{((x 11, y 11)} , (x 12, y 12), ···, (X _1m , y _1m )) is calculated. When it is determined that the position of all pixels is linearly interpolated with respect to the detected line 301 as shown in FIG. 8A and the calculated line position can be regarded as a straight line, the line position calculation unit 44 The position information may be calculated as line segment data (for example, the coordinates of the start point and the coordinates of the end point). Reference numeral 302 in FIG. 8 (b) is a detected line camera coordinate _{x 12,} reference numeral 303 in FIG. 8 (c) is a detected line camera coordinate _{x 13.}
When captured by the position x _1, there is little temperature drift immediately after the calibration. Therefore, as shown in FIG. 8 (a), a slit beam irradiated position x ₁ is detected as a high brightness linear to the position of x ₁₁ camera coordinate x-axis. After step S3 ends, the process proceeds to step S4.

(Step S4)
Next, the line position calculation unit 44 associates all the pixels of the line 301 detected at the position of the camera coordinate x _{11 with} the coordinates of all the calculated pixels of the work coordinate x _{1 in} the measurement data storage unit 43. Remember. As shown in FIG. 9, the measurement data storage unit 43 includes, for example, pixel coordinates ((x _1n1 , y _1n1 ), (x _1n2 , y _1n2 ), camera coordinates x _1n (n is a natural number of 1 or more), _{···, (x 1nm, y 1nm} ) in response to) the coordinates of the pixels in the workpiece coordinate _{x n ((x n1, y} n1), (x n2, y n2), ···, (x nm, y _nm )) is stored. After step S4 ends, the process proceeds to step S5.

(Step S5)
Next, the line position calculation unit 44 determines whether or not the work coordinate of the line position output by the control unit 41 is _xn . If the work coordinate at the line position is _xn (step S5; Yes), the initial data generation process is terminated. When the work coordinate at the line position is not _xn (step S5; No), steps S1 to S5 are repeated until the work coordinate is _xn .

Next, the three-dimensional measurement process will be described with reference to FIGS. 7 and 10 to 12.
FIG. 10 is a flowchart of the three-dimensional measurement process according to this embodiment. FIG. 11 is a flowchart of calibration data correction processing according to the present embodiment. FIG. 12 is a diagram illustrating an example of image data obtained by capturing the state of FIG. 7 in the three-dimensional measurement process according to the present embodiment. 12 (a) is a diagram slit beam position x ₁ indicates the image data imaged, FIG. 12 (b) is a diagram showing an image data slit light position x ₂ is captured, Figure 12 (c) is a diagram slit beam position x ₃ indicates the image data imaged.
In the present embodiment, the measurement object 5 is not on the workpiece 10.

(Step S101)
Image control unit 31 of the projection-type display device 30, a slit light for measurement at the timing of the instruction by the control signal from the control unit 41 continues to irradiation after calibration position x ₁ of x-axis on the stage 10 . In the present embodiment, after step S101 ends, the process proceeds to step S102.

(Step S102)
Next, the image acquisition unit 42 acquires the image data of the stage 10 irradiated with the slit light imaged by the imaging device 20 at the timing of the instruction by the control signal from the control unit 41. The image acquisition unit 42 converts the image data output from the imaging device 20 from an analog signal to a digital signal. The image acquisition unit 42 binarizes the converted image data with a predetermined threshold value, and stores the binarized image data in the measurement data storage unit 43. After step S102, the process proceeds to step S103.

(Step S103)
Next, the line position calculation unit 44 reads the binarized image data stored in the measurement data storage unit 43 and detects the line position from the read image data. In the line position detection, the line position calculation unit 44 calculates the line position at the camera coordinates from the captured image data, and calculates the line position at the work coordinates corresponding to the calculated camera coordinates.
For example, the line position calculation unit 44 includes all the pixels ((x ₁₁₁ ′, y ₁₁₁ ′), (x ₁₁₂ ′, y ₁₁₂ ′) detected at the position of x ₁₁ ′ in the camera coordinates,. _{·, (x 11m ', y} 11m')) (m for a natural number of 1 or more), 'coordinates of all pixels _{((x 11'} position _{x 1} in the workpiece _{coordinate, y 11} '), (x ₁₂ ′, y ₁₂ ′),... (X _1m ′, y _1m ′)) are calculated. The line position calculation unit 44 coordinates ((x ₁₁ ′, y ₁₁ ′), (x ₁₂ ′, y ₁₂ ′),... (X _1m ) of all pixels at the position x ₁ ′ in the calculated work coordinates. ', Y _1m ')) is output to the calibration data correction unit 45.
If capturing a slit beam irradiated on the position x _1, since there is little temperature drift immediately after calibration, as shown in FIG. 8 (a), a high brightness at a position of x ₁₁ camera coordinate x-axis line Detected as However, as time elapses after calibration, the coordinates of the irradiated line position shift as shown by a curve 401 in FIG. The temperature drift caused by such a projection display device 30 is, for example, the influence of the brightness setting of the light source, the influence of the outside air of the projection display device 30, and the glass of the lens unit (not shown) of the projection display device 30. These are the influence of temperature, the influence of the temperature of the internal circuit of the projection display device 30, and the time change of these influences.
Further, reference numeral 402 in FIG. 12 (b), 'a detected line, reference numeral 403 in FIG. 12 (c), the camera coordinate _{x 13'} camera coordinate _{x 12} is detected lines.
After step S103 ends, the process proceeds to step S104.

(Step S104)
Next, the calibration data correction unit 45 corrects the calibration data stored in the calibration data storage unit 46 by a calibration data correction process, which will be described later, and updates and stores the corrected calibration data in the calibration data storage unit 46. Let

(Step S105)
Next, the line position calculation unit 44 determines whether or not the work coordinate of the line position output by the control unit 41 is _xn . When the work coordinates are _xn (step S105; Yes), the process proceeds to step S106. When the workpiece coordinates are not _xn (step S105; No), steps S101 to S105 are repeated until the workpiece coordinates are _xn .
When the scanning of the predetermined range on the workpiece 10 is completed, the line position calculation unit 44 outputs information indicating that the scanning is completed to the three-dimensional data calculation unit 47.

(Step S106)
Next, the three-dimensional data calculation unit 47 uses the updated calibration data stored in the calibration data storage unit 46 after information indicating that the scanning output from the line position calculation unit 44 has been completed is input. Correct all the measured line position data. The three-dimensional data calculation unit 47 outputs the corrected data to the image display device 50 as measurement data.
After the process of steps S101 to S106 is completed, the process returns to step S101, and steps S101 to S106 are repeated.

  Next, the calibration data correction process in step S104 will be described with reference to FIG. Note that the initial state of the calibration data stored in the calibration data storage unit 46 is set by the initial setting from the control unit 41 to an error of 0 at all work positions.

(Step S201)
The calibration data correction unit 45 reads the initial data of the workpiece position x ₁ stored in the measurement data storage unit 43. Then, calibration data correcting unit 45 compares the read initial data in the work position x ₁ (coordinates of the pixels of the line 301), and the pixel of the line position calculating unit 44 to calculate line position x _{1 'coordinate} calculates a correction coefficient for work position x _1.
For example, the correction coefficient is calculated by the following equation (1). After step S201 ends, the process proceeds to step S202.

Correction factor = (the coordinates of each pixel of the work positions _{x 1)} / (the coordinates of each pixel of the work positions _{x 1} ') ··· ₍₁₎

For example, the coordinates of the pixel at the work position x ₁ stored in the calibration data storage unit 46 are (1.0, 1.0), and the coordinates of the pixel at the work position x ₁ ′ calculated in step S103 are (1. 1 and 1.1), the calibration data correction unit 45 calculates correction coefficient = 1.0 / 1.1 = 0.92 for both the x-axis and the y-axis.

(Step S202)
Next, the calibration data correction unit 45 updates the calibration data stored in the calibration data storage unit 46 using the calculated correction coefficient.
For example, when the correction coefficient is calculated as 0.9, the calibration data correction unit 45 calculates the calibration data of the line position x ₁ based on the correspondence between the correction coefficient and the error stored in advance in the calibration data storage unit 46. Is updated from 0 to 0.1.
FIG. 13 is a diagram illustrating an example of calibration data stored in the calibration data storage unit 46. As shown in FIG. 13, for example, to correspond to the work position x _2, calibration data h ₂ are stored in association with.

(Step S203)
Next, the calibration data correction unit 45 outputs the calculated correction coefficient to the temperature calculation unit 48. The temperature calculation unit 48 estimates the internal temperature of the projection display device 30 based on the correction coefficient output from the calibration data correction unit 45. The temperature calculation unit 48 generates a control value for controlling the FAN of the projection display device 30 based on the estimated temperature of the projection device, and outputs the generated FAN control value to the FAN control unit 32 of the projection display device 30. To do.

It should be noted that the interval between the slit lights irradiated for generating the initial data may not be the same as the interval between the slit lights at the time of measurement. For example, the slit interval of time measurement, in the case of n times from x ₀ to x _n, the interval of the slit beam irradiated to generate the initial data may be one half of n. In this case, the calibration data correction unit 45 may perform calibration once for the positions of the x-axes x ₀ ′, x ₂ ′,. Alternatively, the position information of x ₁ ′ may be compared with the position information of the previous position x ₀ , or may be compared using the average value of the position information x ₀ and the previous position information x _2. May be.

Next, an example of a measurement error when correction according to the present embodiment is performed will be described with reference to FIGS. FIG. 14 is a graph illustrating an example of a measurement value immediately after calibration. FIG. 15 is a graph showing an example of measured values 15 minutes after calibration when correction according to the present embodiment is performed. FIG. 16 is a graph showing an example of measured values 30 minutes after calibration when correction according to the present embodiment is performed. 14 to 16, the horizontal axis is the x-axis of the camera coordinates, and the vertical axis is the y-axis of the camera coordinates. Further, in FIGS. 14 to 16, each hatching 201 to 210 represents variation in the measured height of the surface in the z-axis direction as in FIGS. 3 to 5.
14 to 16 measure an area of 100 [mm] × 70 [mm] in the same plane as in FIGS. 3 to 5.

As shown in FIG. 14, the measurement value immediately after calibration according to the present embodiment has a variation of about 20 [μm] in the height of the surface. As shown in FIG. 15, when the correction according to the embodiment is performed, the height of the same plane measured 15 minutes after calibration is measured with a variation of about 20 [μm]. Yes. Furthermore, as shown in FIG. 16, when the correction according to the embodiment is performed, the height of the surface obtained by measuring the same plane 30 minutes after the calibration is measured with a variation of about 20 [μm]. . That is, when the correction according to the embodiment is performed, every time after calibration, even if the same plane is measured, the variation with respect to the height does not increase and it remains almost immediately after calibration.
According to the present embodiment, after calibrating, if the calibration according to the present embodiment is not performed after 15 minutes, the variation in the height of the surface is about 80 [μm] (FIG. 4) as described above. The variation is improved by a quarter. Furthermore, when the calibration according to the present embodiment is not performed after 30 minutes from the calibration, the variation in the height of the surface is about 200 [μm] (FIG. 5) as described above. Has been improved.

As described above, the control unit 40 calculates each line position from the captured image data in a state where nothing is placed on the workpiece 10 immediately after calibration, and measures the coordinates of each pixel of the calculated line position. Data is stored in the data storage unit 43 as initial data.
Next, the control unit 40 controls the projection display device 30 so that the workpiece 10 in a state where nothing is placed on the workpiece 10 is continuously irradiated and scanned with the slit light. The control unit 40 detects line data from the image data irradiated with the slit light, and calculates the coordinates of each pixel at each line position corresponding to the detected line data. Then, the control unit 40 calculates a correction value for calibration by comparing the coordinates of each pixel at the calculated line position with the initial data (coordinates of each pixel) stored in the measurement data storage unit 43. Based on the calculated correction value, the calibration data stored in the calibration data storage unit 46 is corrected and updated. And the control part 40 calculates three-dimensional measurement data using this calibration data.
As a result, even if an error occurs in the position of the irradiation light due to the temperature drift caused by the projection display device 30, the three-dimensional measurement data is calculated using the calibration data stored in the calibration data storage unit 46. Therefore, the influence of temperature drift can be prevented.
Moreover, since the measurement part 40 controls FAN of the projection type display apparatus 30, temperature control of a light projection part is performed based on the influence by the temperature drift of a light projection part. As a result, since the error of the light projecting unit can be reduced by controlling the temperature of the light projecting unit, the influence of the temperature drift of the projection device can be reduced.

[Second Embodiment]
In the first embodiment, the example in which the slit light is irradiated in a state where nothing is placed on the work 10 and compared with the data in the initial state in which no temperature drift has occurred has been described. In the second embodiment, a case where the measurement object 5 is placed on the workpiece 10 will be described.
The configuration of the measuring device 40 is the same as that in FIG. The initial data generation process performed after the calibration of the projection display device 30 is the same as the procedure of FIG. 6 of the first embodiment.

FIG. 17 is a diagram for explaining the state of the slit light when the measurement object 5 is placed on the work 10 after the initial data acquisition according to the present embodiment. As shown in FIG. 17, the projection-type display device 30, as in the first embodiment, from x ₀ to x _n with respect to the x-axis, repeated irradiation of the slit light. 17 (a) is a diagram showing a state of the slit light position _{x 1,} FIG. 17 (b) is a diagram showing a state of the slit light position _{x 2,} FIG. 17 (c) position it is a diagram showing a state of the slit light in x _3.
FIG. 18 is a diagram illustrating an example of image data obtained by capturing an image using the slit light of FIG. 17 according to the present embodiment. Figure 18 (a) is a diagram showing a captured image data when the position x _1, FIG. 18 (b) is a diagram showing a captured image data when the position x _2, FIG. 18 (c) is a diagram showing a captured image data when the position x _3.

Figure 17 (a) and FIG. 18 (a), the and as shown in FIG. 18 (c) 17 and (c), if there is no object to be measured 5 on the work 10, the line of the camera coordinate _{x 11} and _{x 13} In 601 and 603, the same image data as in FIGS. 8A and 8C of the first embodiment is obtained.
On the other hand, as shown in FIGS. 17B and 18B, when the measurement object 5 is on the workpiece 10, the line 602 of the camera coordinate x _{12 is} a line 602-in the area where the measurement object 5 is not present. 1 and 602-2, and a line 602-2 in a region where the measurement object 5 is present. The luminance of the line 602-2 is higher than that of the lines 602-1 and 602-3. In FIG. 18B, the line 602-2 with high luminance is represented by a thicker line segment than the line 602-1 with low luminance for convenience.
That is, in the image data captured by the imaging device 20, the detected brightness differs between the area where the measurement object 5 is present and the area where it is not present. For this reason, it is possible to identify whether the reflection is due to the measurement object 5 or the reflection line due to the work 10 by setting a threshold value for luminance in advance through experiments. In the present embodiment, the case where the brightness of the reflected light from the object to be measured 5 is higher than the brightness of the reflected light from the work 10 will be described, but the same applies even if the brightness of the reflected light from the object to be measured 5 is lower. Can be processed.

Next, the three-dimensional measurement process of this embodiment will be described.
FIG. 19 is a flowchart of three-dimensional measurement according to the present embodiment.

(Step S301)
The image control unit 31 of the projection display device 30 irradiates the slit light for calibration to the x-axis position x ₁ on the stage 10 at the timing of the instruction by the control signal from the control unit 41. After step S301 ends, the process proceeds to step S302.

(Step S302)
Next, the image acquisition unit 42 acquires the image data of the stage 10 irradiated with the slit light imaged by the imaging device 20 at the timing of the instruction by the control signal from the control unit 41. The image acquisition unit 42 converts the image data output from the imaging device 20 from an analog signal to a digital signal. Then, the image acquisition unit 42 gradations the converted image data with a predetermined threshold value, and stores the gradation image data in the measurement data storage unit 43. After step S302 ends, the process proceeds to step S303.

(Step S303)
Next, the line position calculation unit 44 reads out the gradation image data stored in the measurement data storage unit 43, and sets a line having a luminance lower than a predetermined threshold with respect to the read image data. Detected as line 10 above.
After step S303 ends, the process proceeds to step S304.

(Step S304)
Next, the line position calculation unit 44 calculates the coordinates of each pixel in the camera coordinates corresponding to the detected line, and calculates the coordinates of each pixel in the line position in the work coordinates corresponding to the calculated camera coordinates. For example, the line position calculation unit 44 includes all the pixels ((x ₁₁₁ ′, y ₁₁₁ ′), (x ₁₁₂ ′, y ₁₁₂ ′) detected at the position of x ₁₁ ′ in the camera coordinates,. _{·, (x 11m ', y} 11m')) (m for a natural number of 1 or more), 'coordinates of all pixels _{((x 11'} position _{x 1} in the workpiece _{coordinate, y 11} '), (x ₁₂ ′, y ₁₂ ′),... (X _1m ′, y _1m ′)) are calculated. The line position calculation unit 44 coordinates ((x ₁₁ ′, y ₁₁ ′), (x ₁₂ ′, y ₁₂ ′),..., (X _1m ′) at the position x1 ′ in the calculated work coordinates. , Y _1m ′)) is output to the calibration data correction unit 45.
After step S304 ends, the process proceeds to step S305.

(Step S305)
Next, the calibration data correction unit 45 corrects the calibration data stored in the calibration data storage unit 46 by the calibration data correction process described above, and updates and stores the corrected calibration data in the calibration data storage unit 46. Let After step S305 ends, the process proceeds to step S306.

(Step S306)
Next, the line position calculation unit 44 determines whether or not the work coordinates output by the control unit 41 are _xn . When the work coordinates are _xn (step S306; Yes), the process proceeds to step S307. When the work coordinates are not _xn (step S306; No), steps S301 to S306 are repeated until the work coordinates are _xn .
The line position calculation unit 44 outputs information indicating completion to the three-dimensional data calculation unit 47 when scanning of a predetermined range on the workpiece 10 is completed.

(Step S307)
Next, the three-dimensional data calculation unit 47 uses the updated calibration data stored in the calibration data storage unit 46 after information indicating that the scanning output from the line position calculation unit 44 has been completed is input. Correct all the measured line position data. The three-dimensional data calculation unit 47 outputs the corrected data to the image display device 50 as measurement data.
After the process of steps S301 to S307 is completed, the process returns to step S301, and steps S301 to S307 are repeated.

As described above, the control unit 40 calculates each line position from the captured image data in a state where nothing is placed on the workpiece 10 immediately after calibration, and measures the coordinates of each pixel of the calculated line position. Data is stored in the data storage unit 43 as initial data.
Next, the control unit 40 controls the projection display device 30 so as to continue irradiating the irradiation light on the workpiece 10 even after calibration.
Next, the control unit 40 detects line data on the workpiece 10 that is reflected light other than the measurement object 5 from the image data irradiated with the slit light, and each line position corresponding to the detected line data. The coordinates of each pixel are calculated. Then, the control unit 40 calculates the correction value for calibration by comparing the coordinates of each pixel at the calculated line position with the initial data stored in the measurement data storage unit 43, and sets the calculated correction value. Based on this, the calibration data stored in the calibration data storage unit 46 is corrected and updated. And the control part 40 calculates three-dimensional measurement data using this calibration data.
As a result, even when the object to be measured 5 is placed on the workpiece 10, even if an error occurs in the position of the irradiation light due to the influence of the temperature drift by the projection display device 30, it is stored in the calibration data storage unit 46. Since the three-dimensional measurement data is calculated using the calibration data, it is possible to prevent the influence of temperature drift.

  In this embodiment, an example in which slit light is used as irradiation light emitted by the projection display device 30 has been described. However, spot light, a lattice pattern, a binary code, and the like may be used. Also in this case, each pixel position of the image by the irradiation pattern irradiated immediately after calibration is detected, and initial data is generated from the coordinates of the detected pixel position. Then, after the initial data is generated, the same irradiation pattern as that in the initial data generation may be continuously irradiated, and the calibration data may be corrected based on the result of comparing the detected position data with the initial data. The irradiation position of the irradiation pattern is detected using a known detection method such as pattern matching or feature amount detection.

  In the present embodiment, the example in which the temperature calculation unit 48 controls the FAN of the projection display device 30 using the correction coefficient calculated by the calibration data correction unit 45 has been described. You may make it control the temperature in the projection type display apparatus 30 with a cooling device. Further, the temperature calculation unit 48 only needs to update the calibration data by using the correction coefficient calculated by the calibration data correction unit 45 to correct the three-dimensional measurement data, and without controlling the FAN of the projection display device 30. Also good.

  In the present embodiment, the calibration data correction unit 45 calculates the correction coefficient by comparing the line position measured immediately after the calibration with the line position measured after that, but at different times. The correction coefficient may be calculated by comparing the line positions. In this case, line positions calculated from image data captured at different times may be compared, and the calibration data may be updated based on a preset table in accordance with the slope of the error. This preset table may be calculated by experiments or simulations and stored in the calibration data storage unit 46.

Further, in the present embodiment, the example in which the detection of the line position is performed for each line after the line is irradiated has been described, but all the image data from the x axis x ₀ to x _{n is} stored in the measurement data storage unit 43. May be performed together after storing. Alternatively, the line position may be detected collectively for a predetermined line.

Note that a program for realizing the function of each unit of the control unit 40 in FIG. 2 of the embodiment is recorded on a computer-readable recording medium, and the program recorded on the recording medium is read into a computer system and executed. The processing of each unit may be performed as necessary. Here, the “computer system” includes an OS and hardware such as peripheral devices.
Further, the “computer system” includes a homepage providing environment (or display environment) if the WWW system is used.
“Computer-readable recording medium” means a flexible disk, a magneto-optical disk, a ROM (Read Only Memory), a portable medium such as a CD-ROM, and a USB (Universal Serial Bus) I / F (interface). A storage device such as a USB memory or a hard disk built in a computer system. Further, the “computer-readable recording medium” includes a medium that holds a program for a certain period of time, such as a volatile memory inside a computer system serving as a server or a client. The program may be a program for realizing a part of the above-described functions, or may be a program that can realize the above-described functions in combination with a program already recorded in a computer system.

10... Stage 20... Imaging device (imaging unit)
30... Projection type display device (light projection unit)
40 ... Measuring device (measuring unit)
50 ... Image display device 41 ... Control unit 42 ... Image acquisition unit 43 ... Measurement data storage unit 44 ... Line position calculation unit 45 ... Calibration data correction unit 46 ... Calibration data Storage unit 47 ... 3D data calculation unit 48 ... temperature calculation unit

Claims (9)

A three-dimensional measuring apparatus having a light projecting unit that irradiates light of a predetermined irradiation pattern and an image capturing unit that captures an image including reflected light from the light irradiated by the light projecting unit,
A measurement unit that outputs an irradiation instruction for controlling an irradiation position of light of an irradiation pattern to the light projecting unit, and calculates measurement data from image data captured by the imaging unit;
The measuring unit is
The light projecting unit is continuously irradiated with the light of the irradiation pattern, and controlled to repeat scanning within a measurement region including a region imaged by the imaging unit,
The irradiation position according to the irradiation instruction is detected from the imaged image data, the information indicating the irradiation position according to the detected different time and the irradiation position to the same position is compared, and calibration data for calibrating the measurement value is obtained. A three-dimensional measuring device characterized by correcting. The measuring unit is
An irradiation position detection unit that detects an irradiation position where light of the predetermined irradiation pattern is irradiated from image data captured by the imaging unit;
A calibration data correction unit that corrects calibration data by comparing information indicating irradiation positions at different times and irradiation instructions to the same position detected by the irradiation position detection unit;
A three-dimensional data calculation unit that calculates three-dimensional measurement data using the calibration data corrected by the calibration data correction unit;
The three-dimensional measuring apparatus according to claim 1, comprising: The measuring unit is
Based on the result of comparing the information indicating the irradiation positions according to the detected different times and the irradiation instructions to the same position, the temperature control information to the light projecting unit is calculated, and the calculated temperature control information is calculated. The three-dimensional measurement apparatus according to claim 1, further comprising a temperature calculation unit that outputs to the optical unit. The controller is
Irradiation position detected immediately after the calibration of the light projecting unit, the imaging unit, and the three-dimensional measuring apparatus, and irradiation position detected immediately after the calibration detected at a time other than immediately after the calibration The three-dimensional according to any one of claims 1 to 3, wherein the calibration data for calibration of the measured value is corrected by comparing the irradiation position by the irradiation instruction to the same position as the instruction. Measuring device. The controller is
The coordinate of the pixel of the irradiation position where the light of the said predetermined irradiation pattern is irradiated is calculated from the image data which the said imaging part imaged as information which shows an irradiation position. The three-dimensional measurement apparatus according to any one of the above. The controller is
The three-dimensional measurement apparatus according to any one of claims 1 to 5, wherein the irradiation position of a place where an object to be measured is not placed in the measurement region is detected. The light of the predetermined irradiation pattern irradiated from the light projecting unit is slit light,
The measuring unit is
Detecting the irradiation position of the slit light irradiated by the irradiation instruction to the same position at different times and information indicating the line position of the slit light irradiated by the irradiation instruction to the different time detected and the same position 7. The three-dimensional measurement apparatus according to claim 1, wherein the calibration data for calibration of the measurement value is corrected by comparison. 8. The controller is
Immediately after calibration of the light projecting unit, the imaging unit, and the three-dimensional measuring apparatus, information on the irradiation position irradiated with the slit light from image data captured by the imaging unit is included in the detected irradiation position. The three-dimensional measuring apparatus according to claim 7, wherein the three-dimensional measuring apparatus is calculated by approximating the coordinates of the two pixels to be calculated. A three-dimensional measurement method of a three-dimensional measurement apparatus, comprising: a light projecting unit that irradiates light of a predetermined irradiation pattern; and an image capturing unit that captures an image including reflected light from the light irradiated by the light projecting unit,
A measurement unit that outputs an irradiation instruction for controlling an irradiation position of light of an irradiation pattern irradiated by the light projecting unit, and includes a measurement step of calculating measurement data from image data captured by the imaging unit,
The measurement step includes
Control to repeat scanning within a measurement region including a region imaged by the imaging unit, allowing the light projecting unit to continue to emit light of a predetermined irradiation pattern,
The irradiation position according to the irradiation instruction is detected from the imaged image data, the information indicating the irradiation position according to the detected different time and the irradiation position to the same position is compared, and calibration data for calibrating the measurement value is obtained. A three-dimensional measurement method characterized by correcting.