CN107100832B - Run the method for vacuum pump system and the vacuum pump system using this method - Google Patents
Run the method for vacuum pump system and the vacuum pump system using this method Download PDFInfo
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- CN107100832B CN107100832B CN201710205850.9A CN201710205850A CN107100832B CN 107100832 B CN107100832 B CN 107100832B CN 201710205850 A CN201710205850 A CN 201710205850A CN 107100832 B CN107100832 B CN 107100832B
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The present invention relates to the method for operation vacuum pump system and use the vacuum pump system of this method.A method of operation vacuum pump system, the method comprising the steps of: operation includes the main vacuum pump of variable speed electric motors, particularly；At least two secondary vacuum pumps are connected in parallel with main vacuum pump；Secondary vacuum pump is grouped, every group includes at least one secondary vacuum pump；To each group of setting priority；It is characterized in that, this method further comprises the steps of: measurement inlet pressure p1, the inlet pressure p1 of measurement with scheduled pressure value p0 compared with, if p1 is higher than p0, in the first predetermined starting load S if secondary vacuum pump includes constant-seed motorstartup,1Start secondary vacuum pump, and/or in the second predetermined load (S if secondary vacuum pump includes variable speed electric motors, particularlystartup,2) start secondary vacuum pump.
Description
Technical field
The present invention relates to the methods of operation vacuum pump system, and the method comprising the steps of: operation includes that the master of variable speed electric motors, particularly is true
Sky pump；At least two secondary vacuum pumps are connected in parallel with main vacuum pump, each pair vacuum pump includes motor；By secondary vacuum pump point
Group, every group includes at least one secondary vacuum pump；And to each group of setting priority.
Background technique
The known system including multiple vacuum pumps, such as the US5522707B of Metropolitan Industries, Inc
Disclosed in system.In the system of patent description, start other pump using controller unit when vacuum increase in demand.
When variable speed vacuum pump reaches maximum output, controller unit starts constant speed vacuum pump and stops variable speed vacuum pump.
This system and control logic are not suitable for all types of applications.If with speed-variable pump than constant speed pump with higher
Ability for, this control logic can have an impact user application undesirable fluctuation.
In addition, this control logic is not avoided that for the application end that system is connected, design standard is not achieved in system
Or the case where being more than design standard, this is because what is considered is the service ability phase of starting with the speed-variable pump run with maximum output
Deng constant speed pump.
In addition, this control logic does not allow the energy efficiency of system user control system or minimizes maintenance cost, this
It is because user cannot influence running vacuum pump.
Summary of the invention
In view of disadvantages mentioned above, the object of the present invention is to provide a kind of pumping system, its ability can be adjusted to be adapted to use
The variation demand of family application.Therefore, even if the demand of user's application changes over time, which also will not both be not achieved design
Standard is not more than design standard.
It is a further object to provide a kind of permission users according to the pump of application demand adjustment system response time
System.The present invention also allows user to reduce maintenance cost, and the same abrasion respectively pumped in realization system.
Therefore, the purpose of the present invention is to provide it is a kind of flexibly, be easy to control and the vacuum system of low cost, same is applicable in
In the different application with different pressures demand, it is not necessarily to special service intervention.
Vacuum pump system operation method provided by the invention solves at least one above-mentioned and/or other problems, this method
Comprising steps of
Operation includes the main vacuum pump of variable speed electric motors, particularly；
At least two secondary vacuum pumps are connected in parallel with main vacuum pump, each pair vacuum pump includes motor；
Secondary vacuum pump is grouped, every group includes at least one secondary vacuum pump；
To each group of setting priority；
Wherein, method further comprises the steps of:
The first measurement of inlet pressure is carried out in the entrance of vacuum pump system；
The inlet pressure measured first is compared with scheduled pressure value, if the inlet pressure of measurement is higher than predetermined pressure
Value, then operation is set as the secondary vacuum pump of at least one of highest priority group；
The second measurement of inlet pressure is carried out in the entrance of vacuum pump system；
The inlet pressure measured second makes a reservation for compared with scheduled pressure value if the inlet pressure of the second measurement is higher than
Pressure value, then operation is set as the secondary vacuum pump of at least one of second high priority bank, wherein method further comprise the steps of: as
Fruit pair vacuum pump includes constant-seed motor, then starts secondary vacuum pump in the first predetermined starting load, and/or if secondary vacuum pump includes
Variable speed electric motors, particularly then starts secondary vacuum pump in the second predetermined load.
In fact, by the way that secondary vacuum pump is grouped and to each group of setting priority, to the working hours of each vacuum pump
Realize better control.Therefore, maintenance processing preferably can be carried out to each vacuum pump.
It is pre- in the first predetermined starting load or second and including constant-seed motor or variable speed electric motors, particularly according to secondary vacuum pump
Determine starting load and start secondary vacuum pump, the pressure that vacuum pump system allows preferably control to obtain in vacuum pump system inlet with
The load of each vacuum pump is preferably controlled, this will affect the time interval that the abrasion of each pump and thereby influence are safeguarded.
It therefore meets the demand of user's application, vacuum pump system are not not achieved design standard or the risk more than design standard.
In addition, this method can include different ability vacuum pumps system in implement, or even include can be real
The vacuum pump of existing high vacuum, which is also able to achieve in the system of the vacuum pump combination of low vacuum, to be implemented, also, in need for institute true
Empty level controls vacuum pump system by the method for implementing to limit herein in a very simplified manner.
In addition, inlet pressure can be sequentially and only to meet by starting secondary vacuum pump in the second predetermined starting load
The degree of user demand reduces.Therefore, if vacuum pump system includes ability pump, which will not be than user's application
It asks and is run under higher load.Therefore, ability pump can efficiently reach it is high, in or capabilities, do not have and design be not achieved
Standard matches flow more than the system of design standard to match the risk of user network demand.
According to the method for the present invention by application, vacuum pump system can be easily adapted to for meeting different vacuum requirements,
Therefore it can be used for different application without manual intervention.
Further, since vacuum pump is started in maximum load, and due to according to the method for the present invention by secondary vacuum pump
It is grouped and runs secondary vacuum pump according to the priority of setting, therefore all vacuum pumps can be made to reach same abrasion.
In addition, depending on geographical location locating for vacuum pump system user of the present invention, vacuum pump system operating cost can be with
Difference, according to for example: electricity price, environmental condition, or property even easy to maintain.Therefore, in some geographic areas it is desirable that energy
Optimization, and be then better scheme in the abrasion optimization of other geographic areas.
It is all according to the method for the present invention feasible to both the above situation, this is because secondary vacuum pump is pre- first respectively
Determine starting load and the second predetermined starting load starting.Depending on the first predetermined starting load and the second predetermined starting load selection
To be relative high levels or low relative levels, which the user of vacuum pump system of the present invention selects in following two efficiency option
It is needed: the maintenance optimization or energy optimization of vacuum pump system.
Preferably, vacuum pump system includes exhaust end base of oil injection threaded bolt vacuum pump, be well known that at low than under high speed more
It is efficient.
In a preferred embodiment according to the present invention, the user of vacuum pump system passes through the second predetermined starting load of selection
Value selects the option of preference: if the second predetermined starting load selects relatively low value, it means that the speed of vacuum pump will
Relatively low, then energy efficiency is high and will have relatively more pump operation with meet demand.However, if the second predetermined starting load
Selecting relatively high value, it means that the speed of vacuum pump will be relatively high, then the vacuum efficiency of pump is lower than in the previous case,
But can realize the same abrasion of each vacuum pump, this is because the quantity or hours run with vacuum pump secondary in group can be more preferable
Control, it means that less vacuum pump needs service intervention in a time interval.
Preferably, when main vacuum pump is when the first maximum load is run, vacuum pump system starts secondary vacuum pump.
The invention further relates to vacuum pump systems, comprising:
Main vacuum pump including variable speed electric motors, particularly；
At least two secondary vacuum pumps being connected in parallel with main vacuum pump, each pair vacuum pump includes motor；
In the pressure sensor of vacuum pump system entrance measurement inlet pressure；
Control device, including communication device, for one in main vacuum pump and described at least two secondary vacuum pump the two
A or multiple communications；
Wherein, control device further includes processing unit, and processing unit includes the calculation being configured to Ying Yong according to the method for the present invention
Method.
Detailed description of the invention
In order to preferably indicate the feature of invention, described by way of non-limiting example hereinafter with reference to attached drawing of the invention
Some preferred dispositions, in which:
Fig. 1 schematically shows vacuum pump system according to an embodiment of the present invention；
Fig. 2 is schematically shown according to embodiments of the present invention the accessible maximum pressure of Fig. 1 vacuum pump system and minimum pressure
Power is divided into five pressure ranges；With
The specific energy that Fig. 3 schematically shows oil spout vacuum pump requires (SER) curve.
Specific embodiment
Fig. 1 shows vacuum pump system 1, the control unit 3 including multiple vacuum pumps 2 and control vacuum pump 2.The system
The vacuum user 4 in external user network is also connected to by flow duct 5.Vacuum pump system 1 can also include for from true
Sky pump 2 receives the buffer container 6 of fluid.The buffer container 6 increases the stability of vacuum pump system 1, because it ensure that for
The Fluid Volume that user network 4 uses immediately.
Control unit 3 passes through 7 control vacuum pump 2 of electrical connection.
The example of vacuum pump system according to the present invention is shown in FIG. 1, which includes four vacuum pumps 2, they
It is connected with each other by flow duct 8.
The present invention should not necessarily be limited by vacuum pump system 1 only including four vacuum pumps 2.It is suitable for packet according to the method for the present invention
The system of less vacuum pump 2 and the system including more vacuum pumps 2 are included, for example including three or four or more vacuum pumps 2
Vacuum pump system 1.
Preferably, one of vacuum pump 2 is confirmed as main vacuum pump.Preferably, main vacuum pump includes that variable speed electric motors, particularly (does not show
Out), so that its load can gradually increase.At least two secondary vacuum pumps are connected in parallel with main vacuum pump, each pair vacuum pump
Including motor (not shown).
Operation logic is very simple, as described below.
Vacuum requirement is received from vacuum user 4, runs main vacuum pump by control unit 3, main vacuum pump is supported on
First minimum load Smin,1With the first maximum load Smax,1Between run.
Preferably, when control unit 3 runs main vacuum pump, it is in the first minimum load Smin,1With the first maximum load
Smax,1Between load start main vacuum pump, it is preferred that be lower than the first maximum load Smax,1, and gradually increase the load with
Meets the needs of vacuum user 4.
For example, the load S that main vacuum pump can select between 10% to 90%startup,0Lower starting, for example, but it is unlimited
In: 30% load, 40% load, 50% load or 60% load or their any median.
In an embodiment according to the present invention, which can be according to concrete application and user preference between 5%-50%
The percentage K0 of selection is gradually increased, and such as, but not limited to, load can increase: 10% loads, 20% loads, 30% loads,
Or their any other median, this depends on the characteristic of user network and required response time.
It is preferably but not limited to, main vacuum pump is in Sstartup,0=40% load starting, and the load can be with k0=20%
It gradually increases.Using the increase, until main vacuum pump is in the first maximum load Smax,1Until operation.
According to another embodiment of the invention, main vacuum pump for example, by but be not limited to proportional integration (PI) or ratio
Example integral differential (PID) controller (not shown) controls.Preferably, control unit 3 is communicated with PI or PID controller.
Therefore, control unit 3 is preferably in load Sstartup,0Start main vacuum pump, and PI or PID controller preferably last for
Its load is adjusted, to keep steady pressure p1 in the entrance 11 of vacuum pump system 1, it is therefore an objective to reach 4 needs of vacuum network
Scheduled pressure value p0.Thus, PI or PID controller persistently adjust the motor speed of operation main vacuum pump and main vacuum pump mentions
The flow of confession, to meet the needs of user network 4, until main vacuum pump reaches its maximum load Smax,1Until.
If main vacuum pump is in the first maximum load Smax,1It runs and the pressure value p1 measured at entrance 11 is not
In or lower than scheduled pressure value p0, then control unit 3 will run secondary vacuum pump.It should be understood that p0 pairs of scheduled pressure value
It should be in the demand of vacuum user 4.
Preferably, described at least two secondary vacuum pumps are in the second minimum load Smin,2With the second maximum load Smax,2Between
Operation.
In the context of the present invention it should be understood that the first minimum load Smin,1The second minimum load can be equal to
Smin,2Or the two loads can have different values.In addition, different secondary vacuum pumps can have the second different minimal negatives
Carry Smin,2.It should be understood that identical logic is suitable for the first maximum load Smax,1With the second maximum load Smax,2。
In an embodiment according to the present invention, the first minimum load Smin,1, the second minimum load Smin,2, it is first maximum negative
Carry Smax,1With the second maximum load Smax,2It is being higher than the value of the absolute minimum load of vacuum pump respectively and is being lower than the absolute highest of vacuum pump
The value of load is chosen, so that the service life of the motor of driving vacuum pump 2 extends.
Preferably, secondary vacuum pump is grouped, and every group includes at least one secondary vacuum pump, and preferential to each group of setting
Grade.
In the context of the present invention it should be understood that priority defines control unit selection group and runs the group
In at least one secondary vacuum pump according to sequence.
It as example but is not limited to, which can be the form of number or letter, or can distinguish appointing for each group
What other types of differentiation mode.In addition, logic is set to priority, the logic defines highest priority and minimum excellent
First grade, and thus define 3 selection group of control unit and start and/or stop secondary vacuum pump according to sequence.
If the pressure value p1 measured at vacuum pump system entrance 11 is not equal to or lower than scheduled pressure value p0, controls
The selection of unit 3 processed for example with the group for being set as highest priority and runs the secondary vacuum pump in this group.
In addition, control unit 3 is compared the pressure value p1 measured at entrance 11 with scheduled pressure value p0, if
The pressure value p1 measured at entrance 11 is still higher than scheduled pressure value p0, then it is preferential to be set as the second highest for the operation of control unit 3
The secondary vacuum pump of at least one of group of grade.It should be understood that one group may include more than one secondary vacuum pump, if it is this
If sample, then control unit 3 preferably runs another secondary vacuum pump in the group.
If the group does not have another the secondary vacuum pump that can be run, control unit 3 selects tool from remaining group
There is the group of next highest priority and runs the secondary vacuum pump in this group.
In the context of the present invention, load is understood as the power of motor of driving vacuum pump.
It is to be further understood that the pressure that the load of vacuum pump 2 directly depends on the revolving speed of motor, measures at entrance 11
Value p1 and fluid volume (hereinafter referred to as flow) for output needed for meeting 4 demand vacuum pump system 1 of user network.Should also
Understand, if the speed of the motor of control vacuum pump 2 increases, the intensity for flowing through the electric current of motor increases, it means that
The load of vacuum pump 2 increases.Therefore, if the flow demand of user network 4 increases, the pressure value p1 of measurement at entrance 11
Increase, also, in order to keep pressure value p1 constant, control unit 3 increases the speed of vacuum pump 2, to mean that operation should
The load of the motor of vacuum pump 2 increases.
In the context of the present invention, it should be appreciated that preferential with identical group set with the secondary vacuum pump in group
Grade.Which therefore, by restriction sequence and operation secondary vacuum pump, may be implemented to each secondary vacuum pump hours of operation more
Good control.
In addition, it should be understood that operation vacuum pump 2 refers to that control unit 2 starts the vacuum pump 2 and controls vacuum pump 2
Load.
It according to another embodiment of the invention, but is not limited to, control unit 3 can also be to the secondary vacuum in same group
Pump further sets priority, to limit the clear sequence of these secondary vacuum pumps of operation.
Such as, but not limited to, control unit 3 is run first is confirmed as having the pair of minimum hours of operation true in the group
Sky pump.
In addition, control unit 3 will preferably be run with the secondary vacuum for being confirmed as having next minimum hours of operation in group
Pump.
Preferably, these steps are repeated, until having run with all secondary vacuum pumps in group.If also needed
Words, then control unit 3 can be preferably to the group application identity logic in remaining set with next highest priority.
Preferably, if secondary vacuum pump includes constant-seed motor, secondary vacuum pump is in the first predetermined starting load Sstartup,1It opens
It is dynamic；And/or if secondary vacuum pump includes variable speed electric motors, particularly, secondary vacuum pump is in the second predetermined starting load Sstartup,2Starting.
According to another embodiment of the invention, method of the invention repeat the above-mentioned inlet pressure p1 measurement with
The step of scheduled pressure value p0 is compared, if the pressure p 1 then measured at entrance 11 is higher than scheduled pressure value p0,
The secondary vacuum pump of at least one of next highest priority group is run, until the pressure p 1 measured at entrance 11 reaches pre- level pressure
Until the value of force value p0, or until all secondary vacuum pump operations.
In a preferred embodiment according to the present invention, running the secondary vacuum pump of at least one of highest priority group is to pass through
One-shot one secondary vacuum pump carries out；If the pressure p 1 measured at entrance 11 is higher than scheduled pressure value p0, very
Empty pumping system 1 starts another secondary vacuum pump in the highest priority group；Alternatively, if all in the highest priority group
Vacuum pump is all being run, then this method further includes the steps that starting the secondary vacuum pump in the second highest priority group.
Preferably, it is true by one pair of one-shot for running the secondary vacuum pump of at least one of second highest priority group
Sky pumps to carry out；If the inlet pressure p1 of measurement is higher than scheduled pressure value p0, vacuum pump system 1 starts second highest
Another secondary vacuum pump in priority group；Alternatively, if all secondary vacuum pumps in second highest priority group are all being transported
Row, then this method further includes the steps that starting the secondary vacuum pump in next highest priority group.
It according to one embodiment of present invention, but is not limited to, if the secondary vacuum pump being currently running by control unit 3
Including variable speed electric motors, particularly, then control unit will identify that the pair vacuum pump is new main vacuum pump, and identify previous main vacuum pump
For secondary vacuum pump.Preferably, if secondary vacuum pump includes variable speed electric motors, particularly, the second predetermined starting load Sstartup,2Lower than
Two maximum load Smax,2.If secondary vacuum pump includes constant-seed motor, the first predetermined starting load Sstartup,1With the second maximum
Load Smax,2With about the same value.
In another embodiment, it but is not limited to, all secondary vacuum pumps have variable speed electric motors, particularly, and control unit 3 is excellent
It is selected in the second predetermined each secondary vacuum pump of starting load starting, and keeps the load constant.Therefore, vacuum pump system is more steady
Determine and is easy to control.
In this case, main vacuum pump can with otherwise be still in highest priority group it is true with minimum hours of operation
Sky pump 2 or the last secondary vacuum pump that can be identified as operation, which includes variable speed electric motors, particularly.Preferably, work as control
When the secondary vacuum pump of the identification of unit 3 one processed is new main vacuum pump, what matching was previously identified by the ability of newly identified main vacuum pump
The ability of main vacuum pump, so that vacuum user 4 will not undergo fluctuation.
In a preferred embodiment according to the present invention, the vacuum pump 2 in vacuum pump system 1 is split as group and first to group
Set priority.Priority can be set according to the ability of each vacuum pump 2, such as, but not limited to: highest priority can be with
It is set to the group of the vacuum pump 2 with highest-capacity, next highest priority can be set to the true of next highest-capacity
The group of sky pump 2.The step is repeated, until lowest priority is set to the group of the vacuum pump 2 with lowest capability.
It should be understood that the priority can be selected in different ways according to user demand.
If a group includes more than one vacuum pump 2, control unit 3 compares the hours of operation of these vacuum pumps 2
And set the sequence for running these vacuum pumps 2.
In this case, main vacuum pump preferably selects the vacuum pump in highest priority group with minimum hours of operation
2。
Preferably, main vacuum pump always includes variable speed electric motors, particularly.
It should be understood that control unit 3 can also select main vacuum pump using a different logic, for example, passing through
Compare the hours of operation of all vacuum pumps 2 in vacuum pump system 1, and selects the vacuum pump 2 with minimum hours of operation.
In a preferred embodiment according to the present invention, if secondary vacuum pump includes constant-seed motor, the first predetermined starting is negative
Carry Sstartup,1With the second maximum load Smax,2It is the same value, preferably 100%.If secondary vacuum pump includes variable speed electric motors, particularly,
Its starting load is preferably chosen as the second predetermined starting load Sstartup,2, there is the value selected between 10%-90%, example
Such as, but not limited to: any median or much higher value in 30% load, 40% load, 50% load or interval.
Preferably, the pressure after one-stage control time interval, at the entrance 11 of 3 Measuring Vacuum system 1 of control unit
P1, and by the inlet pressure p1 of measurement compared with scheduled pressure value p0.By applying this logic, the operational capability of whole system
It keeps minimum, while being kept for the response time of system short.
One variable speed electric motors, particularly also can control the more than two vacuum pumps 2 being connected in parallel, each 2 isolated operation of vacuum pump.This
A little vacuum pumps 2 can also be by same motor control and at the same time operation.
Applied between at the time of preferably, control unit measures pressure p 1 at entrance 11 and works as its operation pair vacuum pump etc.
To time interval.It will not shadow by the unexpected short-time fluctuations at application waiting time interval, the scheduled pressure value p0 of user network
Ring the work of vacuum pump system 1.
Therefore, if user network unexpected short-time load occurs since such as valve is thrown open, system will
It is necessary to time be started without come again stable and then stop secondary vacuum pump, vice versa.However, if user network
The scheduled pressure value p0 at place changes, then vacuum pump system 1 will meet in an efficient way such need in very short time interval
It asks, reduces based on the untrue change of demand and start or stop the risk of secondary vacuum pump.
In addition, by being maintained using the efficiency of latency period, system, without using complicated control to patrol
Volume.Further, since such implementation, allows secondary vacuum pump to be optimal operating parameter.
Waiting time interval can be any length, be preferably but not limited to select between 10 to 50 seconds, this is depended on
The requirement of user network.
In addition, for the very precise measurement to pressure p 1 at entrance 11, the sample rate of the pressure value be can choose as phase
To higher, such as, but not limited to: between about 1 second and about 200 milliseconds, more preferably 700 milliseconds to 200 milliseconds it
Between, it is about 200 milliseconds that even more preferably sample rate, which can choose,.In another embodiment, to pressure p 1 at entrance 11
Measurement be real-time perfoming.
In another embodiment, if all secondary vacuum pumps of vacuum pump system 1 are all in operation and at entrance 11
The pressure p 1 of measurement is still higher than scheduled pressure value p0, then vacuum pump system 1 is preferably the secondary vacuum pump for including variable speed electric motors, particularly
Load increases to the first operation load Srun,1, in the second predetermined starting load Sstartup,2With the second maximum load Smax,2Between
Selection.
The pair vacuum pump can arbitrarily be selected by control unit 3, or can apply logic, such as, but not limited to: the
One starting or the secondary vacuum pump finally started, or the secondary vacuum pump with most or minimum hours of operation, or there is lowest speed
Secondary vacuum pump of degree, etc..
According to another embodiment of the invention, the load of one of secondary vacuum pump between 5% and 50% to select
Percentage k1 increase, such as, but not limited to: 10% or 20% or 30% or interval in any other median or higher
Value.
Therefore, the load limited by k1 can be limited by following formula:
Load (k1)=Srun,1-Sstartup,2
It should be understood that the second predetermined starting load Sstartup,2Value and k1 selected according to the requirement of user network.
Preferably, if the inlet pressure p1 of measurement is higher than scheduled pressure value p0, control unit 3 is with the priority of setting
The load for including the secondary vacuum pump of each of variable speed electric motors, particularly is increased to the first operation load S by sequencerun,1。
For even higher efficiency, system can increase the load of all secondary vacuum pumps with variable speed electric motors, particularly.It is this
Can simultaneously all secondary vacuum pumps be carried out or once carry out to a secondary vacuum pump by increasing, until the pressure measured at entrance 11
Until power p1 is equal to or less than scheduled pressure value p0.
According to another embodiment of the invention, if the pressure p 1 measured at entrance 11 is higher than scheduled pressure value
The current operating load S of p0 and at least one secondary vacuum pumpsecondaryLower than the second maximum load Smax,2, then control unit into
One step increases the load of at least one secondary vacuum pump with same percentage k1.Therefore, at least one described secondary vacuum pump will have
Current operating load Ssecondary, can be calculated with following formula: Ssecondary=Srun,1+ [n loads (k1)], wherein n is nature
Number, preferably equal to or greater than 1.
In the context of the present invention it should be understood that calculating current operating load SsecondaryFormula used is to increase
Flow function, the minimum value of n are 1, also, n is incremented by with 1 in the next steps, until the pressure p 1 etc. measured at entrance 11
In or lower than until scheduled pressure value p0, or until current operating load SsecondaryEqual to the second maximum load Smax,2Until.
It is preferably but not limited to, is higher than scheduled pressure value whenever control unit recognizes the pressure p 1 measured at entrance 11
The load of p0, all pair vacuum pumps are just increased with k1, or until all secondary vacuum pumps are all in the second maximum load Smax,2It operates to
Only.
When the demand of user network reduces and the pressure p 1 measured at entrance 11 is lower than scheduled pressure value p0, control
Unit 3 preferably persistently adjusts the load of main vacuum pump by PI or PID controller, to meet the needs of user network 4.It is preferred that
Ground, control unit 3 adjusts the load of main vacuum pump, until main vacuum pump reaches the first minimum load Smin,1Until.
The present invention is not limited to such control logic, it should be appreciated that it can also be gradually reduced load, thus
If the pressure p 1 measured at entrance 11 is lower than scheduled pressure value p0, the load of main vacuum pump is gradually reduced with k0, until
Until the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or until the load of main vacuum pump reaches first
Minimum load Smin,1Until.
If the pressure p 1 measured at entrance 11 still is below scheduled pressure value p0, control unit 3 is including speed change
The load of the secondary vacuum pump of motor is from current operating load SsecondaryIt is reduced to the second predetermined starting load Sstartup,2。
Preferably, before the load of secondary vacuum pump is reduced, system application latency period t2.
Even further preferably, the load of secondary vacuum pump is reduced with percentage k1 in every step.
In addition, control unit 3 preferably reduces the secondary vacuum pump in lowest priority group with highest hours of operation first
Load.
If it is preferred that the pressure p 1 measured at entrance 11 after latency period t2 still is below scheduled pressure value
P0, then control unit 3 reduces the load with the secondary vacuum pump in group with next highest hours of operation.If owned in the group
The load of secondary vacuum pump is decreased, then control unit 3 is by the group application identity logic to next lowest priority.
Preferably, it repeats the above steps, until the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0
Until.
However this logic be not considered as it is restrictive because control unit 3 can also reduce highest priority first
The load of secondary vacuum pump and the secondary vacuum pump in followed by next highest priority group in group.
According to another embodiment of the invention, whenever the pressure p 1 measured at entrance 11 is higher than scheduled pressure value
P0, control unit 3 reduce the load with all secondary vacuum pumps of variable speed electric motors, particularly just with k1, or until current operating load
SsecondaryStarting load S predetermined equal to secondstartup,2Until.Load can be reduced to all secondary vacuum pumps simultaneously, or pass through one
The secondary vacuum pump of secondary selection one loads to reduce.
According to another embodiment of the invention, control unit 3 reduces the load of secondary vacuum pump first, and only exists
All pair vacuum pumps 7 reach operation load and are equal to the second predetermined starting load Sstartup,2Later, and at entrance 11 it measures
Pressure p 1 still is below scheduled pressure value p0, then control unit is gradually reduced the load of main vacuum pump with k0, until in entrance
Until the pressure p 1 measured at 11 is equal to or higher than scheduled pressure value p0, or until the load of main vacuum pump reaches the first minimal negative
Carry Smin,1Until.
In a preferred embodiment, before running any vacuum pump 2, system application latency period t1 or t2, so as to:
Reduce (t2) load, and increases (t1) load.
Preferably, as shown in Figure 2, after scheduled pressure value p0 is communicated to control unit 3, the creation of control unit 3 five
A virtual pressure span: region four is arrived in region zero, they are by the exhausted of the pressure p 1 obtained by entrance 11 of vacuum pump system 1
Between bare minimum 14 to maximum value 13 and by the pressure p 1 obtained by entrance 11 of vacuum pump system 1.Preferably, in advance
Level pressure force value p0 is located at intermediate region, i.e. region two, with 15 labels in Fig. 2.
Control unit 3 also limits each region in five regions different latency period t1 and t2.Preferably, etc.
Have to time interval t1 and t2 and lower value is set to region zero and four comparison area one of region and region three.
Preferably, latency period t1 and t2 are not applied in region two, because obtaining scheduled pressure value p0.
It is to be further understood that being controlled if the modulus Δ P=︱ p1-p0 ︱ of difference is fallen within region four or region three
Unit processed is by the load for either reducing vacuum pump 2 or stops vacuum pump 2, therefore uses t2 as latency period.
If the modulus Δ P=︱ p1-p0 ︱ of difference is fallen within region zero or region one, control unit 3 will increase true
The load of sky pump 2 or starting vacuum pump 2, therefore use t1 as latency period.
For the simplification of calculating, but it is not limited to, t1 of the selection for region zero is approximately equal to the t2 for selecting to be used for region four,
And the t1 for region one is selected to be approximately equal to the t2 for selecting to be used for region three.
It as example but is not limited to, t1 and t2 of the selection for region zero and region four can be respectively selected as about 10
Second, and select t1 and t2 for region one and region three that can be respectively selected as about 20 seconds or about 30 seconds.Should also
Understand, above-mentioned latency period does not limit the present invention, and any other numerical value is possible.Another possibility
It is to be differed slightly from one another respectively in region zero and region four and t1 and t2 in region one and region three.
According to another embodiment of the invention, according to five virtual pressure spans of Capacity Selection of buffer container 6:
Region four is arrived in region zero.Therefore, if buffer container 6 is relatively high capacity, region is arrived in virtual pressure span, that is, region zero
Four will be smaller, whereas if buffer container 6 is relatively low capacity, then virtual pressure span, that is, region zero to region four will more
Greatly.
If being reduced to the second predetermined starting load S in the load of all secondary vacuum pumpsstartup,2Later at entrance 11
The pressure p 1 of measurement is still less than scheduled pressure value p0, then the stopping of control unit 3 is set as having in lowest priority group most
The secondary vacuum pump of hours of operation.
If the pressure p 1 measured at entrance 11 is still less than scheduled pressure value p0, control unit 3 is preferably then stopped
The only secondary vacuum pump with the second highest hours of operation that another in same lowest priority group is still run.If the group
Without another the secondary vacuum pump that can stop, then control unit 3 stops the secondary vacuum pump in next lowest priority group.
In addition, control unit 3 applies identical logic, make a reservation for until the pressure p 1 measured at entrance 11 is equal to or higher than
Until pressure value p0, or until all secondary vacuum pumps stop.
If including simultaneously the secondary vacuum pump with constant-seed motor and the secondary vacuum pump with variable speed electric motors, particularly in one group, control
Unit 3 processed has the load of all secondary vacuum pumps of variable speed electric motors, particularly by preferably reducing first in entire vacuum pump system 1, then stop
Only in lowest priority group with highest hours of operation secondary vacuum pump, no matter the pair vacuum pump include constant-seed motor or
Including variable speed electric motors, particularly.
In another embodiment in accordance with the invention, if surveyed at entrance 11 after all secondary vacuum pumps have stopped
The pressure p 1 of amount is still less than scheduled pressure value p0, then control unit 3 stops main vacuum pump.
According to another embodiment of the invention, if the pressure p 1 measured at entrance 11 is less than scheduled pressure value
The load of all secondary vacuum pumps had previously been reduced to the second predetermined starting load S by p0 and control unit 3startup,2, then control
Unit 3 is preferably compared all vacuum pumps 2 of vacuum pump system 1, to identify the vacuum pump with highest hours of operation
2.Control unit 3 further stops the vacuum pump 2.
According to another embodiment of the invention, if the pressure p 1 measured at entrance 11 is less than scheduled pressure value
The load of all secondary vacuum pumps had previously been reduced to the second predetermined starting load S by p0 and control unit 3startup,2, then control
Unit 3 is preferably compared the vacuum pump 2 in lowest priority group.There is highest hours run in 3 identification group of control unit
Several vacuum pumps 2 and stop it.
If this vacuum pump 2 is previously identified as main vacuum pump, control unit is known from the vacuum pump 2 of residue operation
Vacuum pump 2 in other highest priority group with minimum hours of operation is as new main vacuum pump.
It according to another embodiment of the invention, but is not limited to, control unit 3 can be known from lowest priority group
Not Ju You minimum hours of operation vacuum pump 2 as new main vacuum pump.
Preferably, control unit 3 makes newly identified main vacuum pump match the load of previous main vacuum pump.
The step is repeated, until the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or it is straight
Until when the operation of the only main vacuum pump.
Furthermore, it will nevertheless be understood that (at this point, the pressure value p1 at entrance 11 during 1 stable operation of vacuum pump system
Match scheduled pressure value p0), control unit 3 does not change the load of vacuum pump 2 and does not stop or start any vacuum pump 2.
In a preferred embodiment according to the present invention, if the group comprising main vacuum pump includes more than one vacuum pump 2,
Control unit 3 preferably monitors the hours of operation of these vacuum pumps 2, and if main vacuum pump ratio with a vacuum pump 2 in group
With more hours runs, then control unit 3 changes into main vacuum pump that with minimum hours of operation.
Preferably, once priority level initializing is run to each vacuum pump 2 in vacuum pump system 1 in vacuum pump system 1
Period does not just change priority, and priority only just can be changed after the subsequent start-up of vacuum pump system 1.
If pressure value p1 matching scheduled pressure value p0 and user network during vacuum pump system 1 is run at entrance 11
The flow demand of network increases, then control unit 3 is preferred increases the load with the vacuum pump 2 of variable speed electric motors, particularly.The vacuum pump 2 can be with
It is not in the first maximum load Smax,1The main vacuum pump or vacuum pump 2 of operation can be not in the second maximum load
Smax,2The secondary vacuum pump of operation.
As an example, also how the second vacuum pump described in one group is run, the sequence that especially secondary vacuum pump stops.
For the exemplary purpose, which is set to the group of lowest priority.
It is therefore contemplated that the group includes the secondary vacuum pump that quantity is N.
If the pressure p 1 measured at entrance 11 is lower than scheduled pressure value p0, preferably in control unit 3 main true
The load of sky pump is reduced to load Sstartup,0The load of all secondary vacuum pumps is reduced in control unit 3 later and preferably
Second predetermined starting load Sstartup,2Later, control unit identifies the secondary vacuum pump in the group with highest hours of operation, and
And stop this secondary vacuum pump.
If the pressure p 1 measured at entrance 11 still is below scheduled pressure value p0, control unit 3 is identified in the group
Which is that have one of highest hours of operation, and stop this secondary vacuum pump in the secondary vacuum pump of N-1 remaining operation.
The step is repeated, until the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or is changed
For until pressure p 1 is fallen within region two as shown in Figure 2, or until all secondary vacuum pumps stop over of the group
Until only.
If the pressure p 1 that all secondary vacuum pumps in this group measure at entrance 11 after having stopped still being below
Scheduled pressure value p0, then control unit 3 selects the group for being set as lowest priority from remaining set, and applies phase as defined above
Same logic.
The step is repeated, until the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or is fallen
Until entering within region two as shown in Figure 2, or until all groups of all secondary vacuum pumps stop.
It should be understood that opposite logic is applied to start secondary vacuum pump.Therefore, if the pressure measured at entrance 11
P1 is higher than scheduled pressure value p0, then control unit 3 identifies the secondary vacuum with minimum hours of operation from highest priority group
Pump, and in the first predetermined starting load S if the pair vacuum pump includes constant-seed motorstartup,1Start the pair vacuum pump, or
Person is if the pair vacuum pump includes variable speed electric motors, particularly in the second predetermined starting load Sstartup,2Start secondary vacuum pump.Preferably, exist
Before starting secondary vacuum pump, control unit 3 applies latency period t1.Preferably, waiting time interval t1 is single in control
Member 3 is detected to be started when the pressure p 1 measured at entrance 11 is higher than scheduled pressure value p0.If in waiting time interval t1
The pressure p 1 measured at entrance 11 later is still higher than scheduled pressure value p0, then control unit will start secondary vacuum pump.
In addition, control unit 3 preferably applies latency period t2 before stopping secondary vacuum pump.Waiting time interval
T2 starts when control unit 3 detects the pressure p 1 measured at entrance 11 lower than scheduled pressure value p0.If when waiting
Between the pressure p 1 that is measured at entrance 11 after the t2 of interval still be below scheduled pressure value p0, then control unit 3 will stop secondary true
Sky pump.
In a preferred embodiment according to the present invention, the user of vacuum pump system 1 selects before the starting of vacuum pump system 1
Second minimum load Smin,2Value.Therefore, if the second minimum load Smin,2Relatively higher value is selected, then the dimension of vacuum pump 2
Shield is optimised, this is because hours of operation can be controlled preferably.If the second minimum load Smin,2It is selected as relatively more
Small value, then the energy utilization of vacuum pump system 1 is optimised.
Therefore, vacuum pump system 1 according to the present invention can according to user require and adjust, and according to geographical location with
The availability or electricity price of electricity, adjustable vacuum pump system 1 is to provide the result of full blast.
The invention further relates to vacuum pump systems, comprising: main vacuum pump comprising variable speed electric motors, particularly, it can be in the first minimal negative
Carry Smin,1With the first maximum load Smax,1Between run.Vacuum pump system 1 further includes at least two be connected in parallel with main vacuum pump
A pair vacuum pump, each pair vacuum pump includes motor, can be in the second minimum load Smin,2With the second maximum load Smax,2Between
Operation.
In addition, setting 12 (not shown) of pressure sensor, for the inlet pressure at 1 entrance 11 of Measuring Vacuum system
p1；And control device comprising communication device, for one in main vacuum pump and described at least two secondary vacuum pump the two
Or multiple communications.
Preferably, control device further includes processing unit, and processing unit includes being configured to using according to the method for the present invention
Algorithm.
Control device can be the form of control unit 3, and control unit 3 is a part or the outside of vacuum pump system 1
A part of computing unit or a part in cloud.External computing unit (can be wired communication media by communication media
Or wireless communication medium) receive measurement data from vacuum pump system 1 and data are sent back to vacuum pump system 1.
In an embodiment according to the present invention, processing unit can be the form of processor, be one of control unit 3
Point or processing unit can be a part in external computing unit or cloud.
It is preferably but not limited to, control unit 3 is a part of vacuum pump system 1.
According to another embodiment of the invention, communication device can pass through wired or wireless communication media implementation.
Preferably, communication device is realized by wired communication media.
In addition, control unit 3 can be communicated with main vacuum pump, and main vacuum pump can be further single by control itself
First (not shown) is communicated with secondary vacuum pump.
In another embodiment, control unit 3 can be communicated with all vacuum pumps 2 of vacuum pump system 1, in the case
All vacuum pumps 2 preferably include control unit itself.
In another embodiment, vacuum pump system 1 further includes user interface (not shown), and the user of the system can lead to
User interface is crossed to manually select at least one or even all following parameters: scheduled pressure value p0, when main vacuum pump starts
Load Sstartup,0, main vacuum pump load increase percentage k0, the first predetermined starting load S usedstartup,1, second is predetermined
Starting load Sstartup,2, the load of secondary vacuum pump increases or decreases percentage k1 used, to five virtual region, that is, regions zero
Into region four, each region is used to stop or start the latency period t1 and t2 and user preference vacuum of secondary vacuum pump
Pump 1 is still run in maintenance efficiency mode in energy efficiency mode operation.
In a preferred embodiment according to the present invention, described at least two secondary vacuum pumps each include variable speed electric motors, particularly or fixed
Speed motor.
It is highly preferred that at least one motor is variable speed electric motors, particularly.
It is further preferred that all pair vacuum pumps include variable speed electric motors, particularly.
Preferably, at least one of both main vacuum pump and secondary vacuum pump are exhaust end base of oil injection threaded bolt vacuum pumps.
According to a further advantageous embodiment of the invention, all vacuum pumps 2 in vacuum pump system 1 are exhaust end base of oil injection threaded bolt
Vacuum pump.
It only includes exhaust end base of oil injection threaded bolt vacuum pump that the present invention, which should not necessarily be limited by, but be should understand that applicable according to the method for the present invention
In having any type vacuum pump for being similar to specific energy shown in Fig. 3 and requiring (SER) curve, SER curve indicates and in high speed
Under the SER value that reaches compared to vacuum pump 2 reach SER lower value under the low speed.
The present invention is not limited solely to description and embodiment shown in the drawings in example, which can be with all
The variants of type are realized, without departing from the scope of the present invention.Equally, the present invention is not limited to the vacuum pump system fortune as described in example
Row method, this method can realize in different ways, while still within the scope of the present invention.
Claims (15)
1. a kind of method for running vacuum pump system, method includes the following steps:
Operation includes the main vacuum pump of variable speed electric motors, particularly；
At least two secondary vacuum pumps are connected in parallel with main vacuum pump, each pair vacuum pump includes motor；
Secondary vacuum pump is grouped, every group includes at least one secondary vacuum pump；
To each group of setting priority；
It is characterized in that, this method is further comprising the steps of:
First measurement of inlet pressure (p1) is carried out at the entrance (11) of vacuum pump system (1)；
The inlet pressure (p1) measured first is compared with scheduled pressure value (p0), if the inlet pressure (p1) of the first measurement
Higher than scheduled pressure value (p0), then operation is set as the secondary vacuum pump of at least one of group of highest priority；
Second measurement of inlet pressure (p1) is carried out at the entrance (11) of vacuum pump system (1)；
The inlet pressure (p1) measured second is compared with scheduled pressure value (p0), if the inlet pressure (p1) of the second measurement
Higher than scheduled pressure value (p0), then operation is set as the secondary vacuum pump of at least one of group of the second high priority, wherein the party
Method is further comprising the steps of: if secondary vacuum pump includes constant-seed motor, in the first predetermined starting load (Sstartup,1) starting pair
Vacuum pump；And/or if secondary vacuum pump includes variable speed electric motors, particularly, in the second predetermined starting load (Sstartup,2) start secondary vacuum
Pump.
2. the method according to claim 1, wherein this method repeats the inlet pressure (p1) measurement and makes a reservation for
The step of pressure value (p0) compares runs setting if the inlet pressure (p1) then measured is higher than scheduled pressure value (p0)
At least one of group for next highest priority pair vacuum pump, until the pressure (p1) measured at entrance (11) reaches pre-
Until level pressure force value (p0), or until all secondary vacuum pump operations.
3. method according to claim 1 or 2, which is characterized in that at least one of operation highest priority group is secondary true
Sky pump is completed by one-shot one secondary vacuum pump, if the inlet pressure (p1) of measurement is higher than scheduled pressure value
(p0), then vacuum pump system (1) starts another secondary vacuum pump in same highest priority group, or if the highest is preferential
All secondary vacuum pumps in grade group are all being run, then this method further includes starting the step of secondary vacuum pump in the second highest priority group
Suddenly.
4. according to the method described in claim 3, it is characterized in that, at least one of second highest priority group of operation is secondary true
Sky pump is completed by one-shot one secondary vacuum pump, if the inlet pressure (p1) of measurement is higher than scheduled pressure value
(p0), then vacuum pump system (1) starts another secondary vacuum pump in same second highest priority group, or if this second
All secondary vacuum pumps in highest priority group are all being run, then this method further include start it is secondary true in next highest priority group
The step of sky pump.
5. according to the method described in claim 1, further comprising the steps of: after a control time interval, in vacuum pump system (1)
Entrance (11) at measure pressure (p1) and the inlet pressure of measurement (p1) compared with scheduled pressure value (p0).
6. if all run and what is measured enters according to the method described in claim 5, further comprising the steps of: all secondary vacuum pumps
Mouth pressure (p1) is higher than scheduled pressure value (p0), then the load for the secondary vacuum pump for including variable speed electric motors, particularly is increased to the first operation and born
Carry (Srun,1), the first operation load (Srun,1) in the second predetermined starting load (S of the pair vacuum pumpstartup,2) and it is scheduled
Second maximum load (Smax,2) between select.
7. according to the method described in claim 6, it is characterized in that, if this method further comprises the steps of: the inlet pressure of measurement
(p1) it is higher than scheduled pressure value (p0), then to set the sequence of priority the load for including the secondary vacuum pump of each of variable speed electric motors, particularly
Increase to the first operation load (Srun,1)。
8. method according to claim 6 or 7, further includes: if the inlet pressure (p1) of measurement is lower than scheduled pressure value
(p0), then the load for the secondary vacuum pump for including variable speed electric motors, particularly from current operating load (Ssecondary) be reduced to second and predetermined open
Dynamic load (Sstartup,2)。
9. according to the method described in claim 8, further include: if the inlet pressure (p1) of measurement is lower than scheduled pressure value
(p0), then stop being set as the secondary vacuum pump in the group of lowest priority with most hours of operations.
10. according to the method described in claim 9, further include: if the inlet pressure (p1) of measurement is lower than scheduled pressure value
(p0), then then stop being set as another pair still run in lowest priority group with the second highest hours of operation
Vacuum pump.
11. a kind of vacuum pump system, comprising:
Main vacuum pump including variable speed electric motors, particularly；
At least two secondary vacuum pumps being connected in parallel with main vacuum pump, each pair vacuum pump includes motor；
The pressure sensor (12) of inlet pressure (p1) is measured at the entrance (11) of vacuum pump system (1)；
Control device, including communication device, for one in main vacuum pump and described at least two secondary vacuum pump the two or
Multiple communications；
It is characterized in that, control device further includes processing unit, processing unit includes being configured to using according to claim 1 to 10
The algorithm of any one the method.
12. vacuum pump system according to claim 11, which is characterized in that communication device is wire communication device.
13. vacuum pump system according to claim 11 or 12, which is characterized in that each pair vacuum pump includes motor.
14. vacuum pump system according to claim 13, which is characterized in that at least one motor is variable speed electric motors, particularly.
15. vacuum pump system according to claim 11, which is characterized in that at least one in main vacuum pump and secondary vacuum pump
A is exhaust end base of oil injection threaded bolt vacuum pump.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662298788P | 2016-02-23 | 2016-02-23 | |
| US62/298,788 | 2016-02-23 | ||
| BE2017/5008 | 2017-01-10 | ||
| BE2017/5008A BE1024411B1 (en) | 2016-02-23 | 2017-01-10 | Method for operating a vacuum pump system and vacuum pump system applying such a method. |
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| Publication Number | Publication Date |
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| CN107100832A CN107100832A (en) | 2017-08-29 |
| CN107100832B true CN107100832B (en) | 2019-08-09 |
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| CN201710205850.9A Active CN107100832B (en) | 2016-02-23 | 2017-02-23 | Run the method for vacuum pump system and the vacuum pump system using this method |
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| CN (1) | CN107100832B (en) |
| WO (1) | WO2017143410A1 (en) |
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| CN107942918B (en) * | 2017-12-22 | 2023-04-18 | 大连华锐重工集团股份有限公司 | Self-adaptive dry type vacuum mechanical pump electric control system and control method |
| CN112262260B (en) | 2018-06-08 | 2023-01-13 | 流体处理有限责任公司 | Device for pumping and method for pumping |
| JP6954642B2 (en) * | 2018-12-25 | 2021-10-27 | オリオン機械株式会社 | Exhaust system and exhaust system control method |
| JP6947413B2 (en) * | 2019-01-15 | 2021-10-13 | オリオン機械株式会社 | Exhaust system and exhaust system control method |
| CN112855515B (en) * | 2021-03-12 | 2022-01-28 | 深圳市鑫路远电子设备有限公司 | Vacuum pump safety monitoring method and device |
| CN115791014A (en) * | 2022-12-22 | 2023-03-14 | 中国核工业二三建设有限公司 | Portable large-flow stepped leakage detection pressure stabilizing system |
| CN118669343A (en) * | 2024-08-22 | 2024-09-20 | 中国空气动力研究与发展中心超高速空气动力研究所 | High-flow high-pressure ratio centrifugal vacuum pump unit |
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| WO2017143410A1 (en) | 2017-08-31 |
| CN107100832A (en) | 2017-08-29 |
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