CN107100832A - Run the method and the vacuum pump system using this method of vacuum pump system - Google Patents

Run the method and the vacuum pump system using this method of vacuum pump system Download PDF

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Publication number
CN107100832A
CN107100832A CN201710205850.9A CN201710205850A CN107100832A CN 107100832 A CN107100832 A CN 107100832A CN 201710205850 A CN201710205850 A CN 201710205850A CN 107100832 A CN107100832 A CN 107100832A
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CN
China
Prior art keywords
vavuum pump
vacuum pump
pump
load
pressure value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710205850.9A
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Chinese (zh)
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CN107100832B (en
Inventor
J·科克尔伯格斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlas Copco Airpower NV
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Atlas Copco Airpower NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from BE2017/5008A external-priority patent/BE1024411B1/en
Application filed by Atlas Copco Airpower NV filed Critical Atlas Copco Airpower NV
Publication of CN107100832A publication Critical patent/CN107100832A/en
Application granted granted Critical
Publication of CN107100832B publication Critical patent/CN107100832B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • F04B49/065Control using electricity and making use of computers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08Regulating by delivery pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The present invention relates to the method for operation vacuum pump system and the vacuum pump system using this method.A kind of method for running vacuum pump system, the method comprising the steps of:Operation includes the main vacuum pump (9) of variable speed electric motors, particularly;At least two secondary vavuum pumps (10) are connected in parallel with main vacuum pump (9);By secondary vavuum pump (10) packet, every group includes at least one secondary vavuum pump (10);To each group of setting priority;Characterized in that, this method also includes step:Inlet pressure p1 is measured, the inlet pressure p1 of measurement is compared with scheduled pressure value p0, if p1 is higher than p0, in the first predetermined starting load S if secondary vavuum pump (10) includes constant-seed motorStartup, 1Start secondary vavuum pump (10), and/or in the second predetermined load (S if secondary vavuum pump (10) includes variable speed electric motors, particularlyStartup, 2) start secondary vavuum pump (10).

Description

Run the method and the vacuum pump system using this method of vacuum pump system
Technical field
The present invention relates to the method for operation vacuum pump system, the method comprising the steps of:The master that operation includes variable speed electric motors, particularly is true Empty pump;At least two secondary vavuum pumps are connected in parallel with main vacuum pump, each pair vavuum pump includes motor;By secondary vavuum pump point Group, every group includes at least one secondary vavuum pump;And to each group of setting priority.
Background technology
It is known to include the system of multiple vavuum pumps, such as Metropolitan Industries, Inc US5522707B Disclosed in system.In the system that the patent is described, other pump is started using controller unit when vacuum increase in demand. When variable speed vacuum pump reaches maximum output, controller unit starts constant speed vavuum pump and stops variable speed vacuum pump.
This system and control logic are not suitable for all types of applications.If had with speed-variable pump than constant speed pump higher Ability exemplified by, this control logic can produce influence user application undesirable fluctuation.
In addition, this control logic is not avoided that for the application end that system is connected system does not reach design standard Or more than the situation of design standard, because what is considered is to start and the service ability phase of the speed-variable pump run with maximum output Deng constant speed pump.
In addition, this control logic does not allow the energy efficiency of system user control system or minimizes maintenance cost, this It is because user can not influence operating vavuum pump.
The content of the invention
In view of disadvantages mentioned above, it is an object of the invention to provide a kind of pumping system, its ability can be adjusted to be adapted to use The change demand of family application.Therefore, even if the demand of user's application is changed over time, the pumping system will not both not reach design yet Standard is not more than design standard.
It is a further object to provide a kind of pump for allowing user to adjust system response time according to application demand System.The present invention also allows user to reduce maintenance cost, and realizes the equal abrasion of each pump in system.
It is therefore an object of the present invention to provide it is a kind of flexibly, be easily controlled and low cost vacuum system, equal is applicable In the different application with different pressures demand, without special service intervention.
The vacuum pump system operation method that the present invention is provided solves at least one above-mentioned and/or other problems, this method Including step:
- operation includes the main vacuum pump of variable speed electric motors, particularly;
- at least two secondary vavuum pumps are connected in parallel with main vacuum pump, each pair vavuum pump includes motor;
- be grouped secondary vavuum pump, every group includes at least one secondary vavuum pump;
- to each group of setting priority;
Wherein, method also includes step:
- vacuum pump system entrance carry out inlet pressure first measurement;
- inlet pressure of the first measurement is compared with scheduled pressure value, if the inlet pressure of measurement is higher than predetermined pressure Value, then operation is set as at least one secondary vavuum pump in highest priority group;
- vacuum pump system entrance carry out inlet pressure second measurement;
- inlet pressure of the second measurement is compared with scheduled pressure value, if the inlet pressure of the second measurement is higher than predetermined Pressure value, then operation is set as at least one secondary vavuum pump in the second high priority bank, wherein, method also includes step:Such as The secondary vavuum pump of fruit includes constant-seed motor, then starts secondary vavuum pump in the first predetermined starting load, and/or if secondary vavuum pump includes Variable speed electric motors, particularly, then start secondary vavuum pump in the second predetermined load.
In fact, by the way that secondary vavuum pump is grouped and to each group of setting priority, to the working hours of each vavuum pump Realize more preferable control.It therefore, it can preferably carry out maintenance processing to each vavuum pump.
It is pre- in the first predetermined starting load or second by including constant-seed motor or variable speed electric motors, particularly according to secondary vavuum pump Determine starting load and start secondary vavuum pump, vacuum pump system allow the pressure that preferably control is obtained in vacuum pump system porch and The load of each vavuum pump is preferably controlled, this can influence the time interval that the abrasion of each pump and thereby influence are safeguarded. It therefore meets the demand of user's application, vacuum pump system does not reach design standard or the risk more than design standard.
In addition, this method can be implemented in the system including different ability vavuum pumps, or even including can be real The vavuum pump of existing high vacuum can also be realized to be implemented in the system of the vavuum pump combination of low vacuum, also, in need true for institute Empty level, vacuum pump system is controlled by the method for implementing to limit herein in a very simplified manner.
In addition, by starting secondary vavuum pump in the second predetermined starting load, inlet pressure can sequentially and only be met The degree of user's request is reduced.Therefore, if vacuum pump system includes ability pump, the pump will not be wanted than user's application Ask and run under higher load.Therefore, ability pump can efficiently reach it is high, in or capabilities, do not have and do not reach design Standard or more than the system of design standard to match flow so as to matching the risk of user network demand.
By applying the method according to the invention, vacuum pump system can be easily adapted to for meeting different vacuum requirements, Therefore it can be used for different application without manual intervention.
Further, since vavuum pump is started in maximum load, and because the method according to the invention is by secondary vavuum pump It is grouped and secondary vavuum pump is run according to the priority of setting, therefore all vavuum pumps can be made to reach equal abrasion.
In addition, depending on the geographical position residing for vacuum pump system user of the present invention, vacuum pump system operating cost can be with Difference, according to for example:Electricity price, environmental condition, or property even easy to maintenance.Therefore, in some geographic areas it is desirable that energy Optimization, and be then more preferable scheme in the abrasion optimization of other geographic areas.
The method according to the invention is all feasible to both the above situation, because secondary vavuum pump is pre- first respectively Determine starting load and the second predetermined starting load starts.Depending on the first predetermined starting load and the second predetermined starting load selection To be relative high levels or low relative levels, which the user of vacuum pump system of the present invention selects in following two efficiency options It is desirable:The maintenance optimization of vacuum pump system, or energy optimization.
Preferably, vacuum pump system include exhaust end base of oil injection threaded bolt vavuum pump, its be well known that at low than under high speed more It is efficient.
In a preferred embodiment according to the present invention, the user of vacuum pump system is by selecting the second predetermined starting load Value selects the option of preference:If the second predetermined starting load selects relatively low value, it means that the speed of vavuum pump will Relatively low, then energy efficiency is high and will have relatively many pump operations to meet demand.If however, the second predetermined starting load Select relatively high value, it means that the speed of vavuum pump will be relatively high, then the vacuum efficiency of pump is lower than in the previous case, But the equal abrasion of each vavuum pump can be realized, because the quantity or hours run with secondary vavuum pump in group can be more preferable Control, it means that less vavuum pump needs service intervention in a time interval.
Preferably, when main vacuum pump is run in the first maximum load, vacuum pump system starts secondary vavuum pump.
The invention further relates to vacuum pump system, including:
- include the main vacuum pump of variable speed electric motors, particularly;
- at least two secondary vavuum pumps being connected in parallel with main vacuum pump, each pair vavuum pump includes motor;
- in the pressure sensor of vacuum pump system entrance measurement inlet pressure;
- control device, including communicator, for one in main vacuum pump and at least two secondary both vavuum pumps Individual or multiple communications;
Wherein, control device also includes processing unit, and processing unit includes being configured to apply the calculation according to the inventive method Method.
Brief description of the drawings
In order to preferably represent the feature of invention, describe the present invention's by non-limiting example hereinafter with reference to accompanying drawing Some preferred dispositions, wherein:
Fig. 1 schematically shows vacuum pump system according to embodiments of the present invention;
Fig. 2 is schematically shown according to embodiments of the present invention the accessible maximum pressure of Fig. 1 vacuum pump systems and minimum pressure Power is divided into five pressure ranges;With
Fig. 3 schematically shows specific energy requirement (SER) curve of oil spout vavuum pump.
Embodiment
Fig. 1 shows vacuum pump system 1, includes a control unit 3 of multiple vavuum pumps 2 and control vavuum pump 2.The system The vacuum user 4 in external user network is also connected to by flow duct 5.Vacuum pump system 1 can also include being used for from true Empty pump 2 receives the buffer container 6 of fluid.The buffer container 6 increases the stability of vacuum pump system 1, because it ensure that being available for The Fluid Volume that user network 4 is used immediately.
Control unit 3 controls vavuum pump 2 by electrical connection 7.
Figure 1 illustrates the example of the vacuum pump system according to the present invention, the system includes four vavuum pumps 2, they It is connected with each other by flow duct 8.
The present invention, which should not necessarily be limited by, only includes the vacuum pump system 1 of four vavuum pumps 2.The method according to the invention is applied to bag Include the system of less vavuum pump 2 and include the system of more vavuum pumps 2, such as including three or more than four vavuum pumps 2 Vacuum pump system 1.
Preferably, one of vavuum pump 2 is confirmed as main vacuum pump 9.Preferably, main vacuum pump 9 (does not show including variable speed electric motors, particularly Go out) so that its load can gradually increase.At least two secondary vavuum pumps 10 are connected in parallel with main vacuum pump 9, each pair vacuum Pump 10 includes motor (not shown).
Operation logic is very simple, as described below.
Vacuum requirement is received from vacuum user 4, main vacuum pump 9 is run by control unit 3, the load of main vacuum pump 9 In the first minimum load SMin, 1With the first maximum load SMax, 1Between run.
Preferably, when control unit 3 runs main vacuum pump 9, it is in the first minimum load SMin, 1With the first maximum load SMax, 1Between load start main vacuum pump 9, it is preferred that less than the first maximum load SMax, 1, and gradually increase the load To meet the demand of vacuum user 4.
For example, the load S that main vacuum pump 9 can be selected between 10% to 90%Startup, 0It is lower to start, for example but do not limit In:30% load, 40% load, 50% load or 60% load or their any median.
In an embodiment according to the present invention, the load can be according to concrete application and user preference between 5%-50% The percentage K0 of selection gradually increases, and such as, but not limited to, load can increase:10% loads, 20% loads, 30% loads, Or their any other median, this characteristic for depending on user network and required response time.
It is preferably but not limited to, main vacuum pump 9 is in SStartup, 0=40% load starts, and the load can be with k0= 20% gradually increases.Using the increase, until main vacuum pump 9 is in the first maximum load SMax, 1Untill operation.
According to another embodiment of the invention, main vacuum pump 6 for example, by but be not limited to proportional integration (PI) or PID (PID) controller (not shown) is controlled.Preferably, control unit 3 communicates with PI or PID controller.
Therefore, control unit 3 is preferably in load SStartup, 0Start main vacuum pump 6, and PI or PID controller are preferably held It is continuous to adjust its load, to keep steady pressure p1 in the entrance 11 of vacuum pump system 1, it is therefore an objective to reach that vacuum network 4 is needed The scheduled pressure value p0 wanted.Thus, PI or PID controller persistently adjust the motor speed and main vacuum for running main vacuum pump 6 The flow that pump 6 is provided, to meet the demand of user network 4, until main vacuum pump reaches its maximum load SMax, 1Untill.
If main vacuum pump 9 is in the first maximum load SMax, 1Run and the pressure value p1 of measurement is not at entrance 11 In or less than scheduled pressure value p0, then control unit 3 will run secondary vavuum pump 10.It should be appreciated that scheduled pressure value p0 Corresponding to the demand of vacuum user 4.
Preferably, described at least two secondary vavuum pumps 10 are in the second minimum load SMin, 2With the second maximum load SMax, 2It Between run.
In the context of the present invention it should be appreciated that the first minimum load SMin, 1The second minimum load can be equal to SMin, 2, or the two loads can have different values.In addition, different secondary vavuum pumps 10 can have different second minimum Load SMin, 2.It should be appreciated that identical logic is applied to the first maximum load SMax, 1With the second maximum load SMax, 2
In an embodiment according to the present invention, the first minimum load SMin, 1, the second minimum load SMin, 2, it is first maximum negative Carry SMax, 1With the second maximum load SMax, 2Respectively in the value higher than the absolute minimum load of vavuum pump and less than the absolute highest of vavuum pump The value of load is chosen, so that the life of the motor of driving vavuum pump 2.
Preferably, secondary vavuum pump 10 is grouped, and every group includes at least one secondary vavuum pump 10, and excellent to each group of setting First level.
In the context of the present invention it should be appreciated that priority defines control unit selection group and runs the group In at least one secondary vavuum pump 10 according to order.
As example but it is not limited to, the priority can be the form of numeral or letter, or appointing for each group can be distinguished What other types of differentiation mode.In addition, logic is set to priority, the logic defines limit priority and minimum excellent First level, and thus define the selection group of control unit 3 and start and/or stop secondary vavuum pump 10 according to order.
If the pressure value p1 measured at vacuum pump system entrance 11 is not equal to or less than scheduled pressure value p0, controlled Unit 3 processed selects for example with the group for being set as limit priority and runs the secondary vavuum pump 10 in this group.
In addition, the pressure value p1 and scheduled pressure value p0 that 3 pairs of control unit is measured at entrance 11 is compared, if The pressure value p1 measured at entrance 11 is still higher than scheduled pressure value p0, then the operation of control unit 3 is set as that the second highest is preferential At least one secondary vavuum pump 10 in the group of level.It should be appreciated that one group can include more than one secondary vavuum pump 10, if It is that like this then control unit 3 preferably runs another secondary vavuum pump 10 in the group.
If the group does not have another the secondary vavuum pump 10 that can be run, control unit 3 is selected from remaining group Group with next limit priority and run the secondary vavuum pump 10 in this group.
In the context of the present invention, load is understood as driving the power of motor of vavuum pump.
It is to be further understood that the load of vavuum pump 2 directly depends on the rotating speed of motor, the pressure measured at entrance 11 Value p1 and the fluid volume (hereinafter referred to as flow) for output needed for meeting the demand vacuum pump system 1 of user network 4.Should also Understand, if the speed increase of the motor of control vavuum pump 2, flow through the intensity increase of the electric current of motor, it means that The load increase of vavuum pump 2.Therefore, if the traffic demand increase of user network 4, the pressure value p1 measured at entrance 11 Increase, also, in order to keep pressure value p1 constant, control unit 3 increases the speed of vavuum pump 2, so as to mean that operation should The load increase of the motor of vavuum pump 2.
In the context of the present invention, it should be appreciated that excellent with identical group with setting of the secondary vavuum pump 10 in group First level.Therefore, restriction order and which secondary vavuum pump of operation are passed through, it is possible to achieve to each secondary hours of operation of vavuum pump 10 More preferable control.
Moreover, it will be appreciated that operation vavuum pump 2 refers to that control unit 2 starts the vavuum pump 2 and controls vavuum pump 2 Load.
According to another embodiment of the invention, but it is not limited to, control unit 3 can also be to the secondary vacuum in same group Pump 10 further sets priority, to limit the clear order for running these secondary vavuum pumps 10.
Such as, but not limited to, control unit 3 is run first is confirmed as the pair with minimum hours of operation very in the group Empty pump 10.
In addition, control unit 3 preferably will operation with being confirmed as the secondary vacuum with next minimum hours of operation in group Pump 10.
Preferably, these steps are repeated, untill having run with all secondary vavuum pumps 10 in group.If also needed to Words, then the group application identity logic in the meeting of control unit 3 preferred pair remaining set with next limit priority.
Preferably, if secondary vavuum pump 10 includes constant-seed motor, secondary vavuum pump 10 is in the first predetermined starting load SStartup, 1Start;And/or, if secondary vavuum pump 10 includes variable speed electric motors, particularly, secondary vavuum pump 10 is in the second predetermined starting load SStartup, 2Start.
According to another embodiment of the invention, method of the invention repeat the above-mentioned inlet pressure p1 measurement with The step of scheduled pressure value p0 is compared, if the pressure p 1 then measured at entrance 11 is higher than scheduled pressure value p0, Run at least one secondary vavuum pump 10 in next highest priority group, until at entrance 11 measure pressure p 1 reach it is predetermined Untill pressure value p0 value, or untill all secondary vavuum pump operations.
In a preferred embodiment according to the present invention, at least one secondary vavuum pump 10 in operation highest priority group is logical The secondary vavuum pump 10 of one-shot one is crossed to carry out;If the pressure p 1 measured at entrance 11 is higher than scheduled pressure value p0, Then vacuum pump system 1 starts another secondary vavuum pump 10 in the highest priority group;Or, if in the highest priority group All vavuum pumps all operation, then this method also include start the second highest priority group in secondary vavuum pump 10 the step of.
Preferably, at least one secondary vavuum pump 10 in the second highest priority group of operation is by one pair of one-shot Vavuum pump 10 is carried out;If measurement inlet pressure p1 be higher than scheduled pressure value p0, vacuum pump system 1 start this second Another secondary vavuum pump 10 in highest priority group;Or, if all secondary vavuum pumps in second highest priority group 10 all in operation, then the step of this method also includes starting secondary vavuum pump 10 in next highest priority group.
According to one embodiment of present invention, but it is not limited to, if the secondary vavuum pump being currently running by control unit 3 10 include variable speed electric motors, particularly, then control unit will recognize that the secondary vavuum pump 10 is new main vacuum pump 9, and recognize that previous master is true Empty pump 9 is secondary vavuum pump 10.Preferably, if secondary vavuum pump 10 includes variable speed electric motors, particularly, then the second predetermined starting load SStartup, 2Less than the second maximum load SMax, 2.If secondary vavuum pump 10 includes constant-seed motor, then the first predetermined starting load SStartup, 1With the second maximum load SMax, 2With about the same value.
In another embodiment, but it is not limited to, all secondary vavuum pumps 10 have variable speed electric motors, particularly, and control unit 3 It is preferred that starting each secondary vavuum pump 10 in the second predetermined starting load, and keep the load constant.Therefore, vacuum pump system is more Plus stablize and be easily controlled.
In this case, or main vacuum pump 9 can be to be still to have minimum hours of operation in highest priority group Vavuum pump 2, or can be identified as the last secondary vavuum pump 10 of operation, the secondary vavuum pump 10 includes variable speed electric motors, particularly.Preferably It is that, when the secondary vavuum pump 10 of the identification of control unit 3 one is new main vacuum pump 9, the ability of the main vacuum pump 9 newly recognized will be matched The ability for the main vacuum pump 9 being previously identified, so that vacuum user 4 will not undergo fluctuation.
In a preferred embodiment according to the present invention, the vavuum pump 2 in vacuum pump system 1 is split as group and to group first Set priority.Priority can be set according to the ability of each vavuum pump 2, such as, but not limited to:Limit priority can be with The group of the vavuum pump 2 with highest-capacity is set to, next limit priority can be set to the true of next highest-capacity The group of empty pump 2.The step is repeated, untill lowest priority is set to the group of the vavuum pump 2 with lowest capability.
It should be appreciated that the priority can in a different manner be selected according to user's request.
If a group includes more than one vavuum pump 2, control unit 3 compares the hours of operation of these vavuum pumps 2 And set the order for running these vavuum pumps 2.
In this case, main vacuum pump 9 preferably selects the vacuum in highest priority group with minimum hours of operation Pump 2.
Preferably, main vacuum pump 9 always includes variable speed electric motors, particularly.
It should be appreciated that control unit 3 can also select main vacuum pump 9 using a different logic, for example, passing through Compare the hours of operation of all vavuum pumps 2 in vacuum pump system 1, and select the vavuum pump 2 with minimum hours of operation.
In a preferred embodiment according to the present invention, if secondary vavuum pump 10 includes constant-seed motor, the first predetermined startup Load SStartup, 1With the second maximum load SMax, 2It is the same value, preferably 100%.If secondary vavuum pump 10 includes speed change electricity Machine, then its starting load be preferably chosen as the second predetermined starting load SStartup, 2, with what is selected between 10%-90% Value, such as, but not limited to:Any median or much higher value in 30% load, 40% load, 50% load or interval.
Preferably, after one-stage control time interval, the pressure at the entrance 11 of the Measuring Vacuum system 1 of control unit 3 P1, and the inlet pressure p1 of measurement is compared with scheduled pressure value p0.By applying this logic, the operational capability of whole system Keep minimum, while the response time of the system of holding is short.
One variable speed electric motors, particularly also can control the two or more vavuum pump 2 being connected in parallel, each isolated operation of vavuum pump 2.This A little vavuum pumps 2 also can be by same motor control while operation.
Preferably, control unit at the entrance 11 measurement pressure p 1 and at the time of it runs secondary vavuum pump 10 between apply Latency period.By application waiting time interval, the scheduled pressure value p0 of user network unexpected short-time fluctuations will not Influence the work of vacuum pump system 1.
Therefore, if user network is because of situations such as such as valve is thrown open and unexpected short-time load occurs, system will The time being necessary stablizes and is started without and then stops secondary vavuum pump 10 again, and vice versa.If however, user network Scheduled pressure value p0 at network changes, then vacuum pump system 1 will meet such in an efficient way in very short time interval Demand, reduces the risk that secondary vavuum pump is started or stoped based on the untrue change of demand.
In addition, by applying latency period, the efficiency of system is maintained, without being patrolled using complicated control Volume.Further, since such implement, it is allowed to which secondary vavuum pump 10 is optimal operational factor.
Waiting time, interval can be any length, be preferably but not limited to select between 10 to 50 seconds, this is depended on The requirement of user network.
In addition, for the very accurate measurement to pressure p 1 at entrance 11, the sample rate of the pressure value can be selected as phase To higher, it is such as, but not limited to:Between about 1 second and about 200 milliseconds, more preferably 700 milliseconds to 200 milliseconds it Between, even more preferably still sample rate can select to be about 200 milliseconds.In another embodiment, to pressure p 1 at entrance 11 Measurement carry out in real time.
In another embodiment, if all secondary vavuum pumps 10 of vacuum pump system 1 are all in operation and in entrance 11 The pressure p 1 of place's measurement is still higher than scheduled pressure value p0, then vacuum pump system 1 is preferably the secondary vavuum pump including variable speed electric motors, particularly 10 load increases to the first operation load SRun, 1, it is in the second predetermined starting load SStartup, 2With the second maximum load SMax, 2 Between select.
The secondary vavuum pump 10 can arbitrarily be selected by control unit 3, or can apply logic, such as, but not limited to: The first secondary vavuum pump 10 for starting or finally starting, or the secondary vavuum pump 10 with most or minimum hours of operation, or have Secondary vavuum pump 10 of minimum speed, etc..
According to another embodiment of the invention, the load of one of secondary vavuum pump is with the selection between 5% and 50% Percentage k1 increase, such as, but not limited to:10% or 20% or 30% or interval in any other median or higher Value.
Therefore, the load limited by k1 can be limited by below equation:
Load (k1)=SRun, 1-SStartup, 2
It should be appreciated that the second predetermined starting load SStartup, 2Value and k1 selected according to the requirement of user network.
Preferably, if the inlet pressure p1 of measurement is higher than scheduled pressure value p0, control unit 3 is with the priority of setting The load of each secondary vavuum pump 10 including variable speed electric motors, particularly is increased to the first operation load S by orderRun, 1
For the efficiency of even more high, system can increase the load of all secondary vavuum pumps 10 with variable speed electric motors, particularly.This Planting increase can carry out to all secondary vavuum pumps 10 or once a secondary vavuum pump 10 is carried out simultaneously, until being surveyed at entrance 11 Untill the pressure p 1 of amount is equal to or less than scheduled pressure value p0.
According to another embodiment of the invention, if the pressure p 1 measured at entrance 11 is higher than scheduled pressure value P0 and at least one secondary vavuum pump 10 current operating load SsecondaryLess than the second maximum load SMax, 2, then control unit Further increase the load of at least one secondary vavuum pump 10 with same percentage k1.Therefore, at least one described secondary vavuum pump will With current operating load Ssecondary, can be calculated with below equation:Ssecondary=SRun, 1+ [n loads (k1)], wherein, n is Natural number, preferably equal to or greater than 1.
In the context of the present invention it should be appreciated that calculating current operating load SsecondaryFormula used is to increase Flow function, n minimum value is 1, also, n is incremented by with 1 in subsequent step, until pressure p 1 of measurement etc. at entrance 11 In or less than untill scheduled pressure value p0, or until current operating load SsecondaryEqual to the second maximum load SMax, 2Untill.
It is preferably but not limited to, whenever control unit recognizes the pressure p 1 measured at entrance 11 higher than scheduled pressure value P0, the load of all secondary vavuum pumps 10 is just increased with k1, or until all secondary vavuum pumps 10 are all in the second maximum load SMax, 2Fortune Behavior stops.
When the pressure p 1 that the demand of user network is reduced and measured at entrance 11 is less than scheduled pressure value p0, control Unit 3 preferably persistently adjusts the load of main vacuum pump 6 by PI or PID controller, to meet the demand of user network 4.It is preferred that Ground, control unit 3 adjusts the load of main vacuum pump 6, until main vacuum pump reaches the first minimum load SMin, 1Untill.
The present invention is not limited to such control logic, it should be appreciated that can also be gradually reduced load, so that If the pressure p 1 measured at entrance 11 is less than scheduled pressure value p0, the load of main vacuum pump 9 is gradually reduced with k0, until Untill the pressure p 1 measured at the entrance 11 is equal to or higher than scheduled pressure value p0, or until the load of main vacuum pump 9 reaches the One minimum load SMin, 1Untill.
If the pressure p 1 measured at entrance 11 still is below scheduled pressure value p0, control unit 3 is including speed change The load of the secondary vavuum pump 10 of motor is from current operating load SsecondaryIt is reduced to the second predetermined starting load SStartup, 2
Preferably, before the load of secondary vavuum pump 10 is reduced, system application latency period t2.
Even further preferably, the load of secondary vavuum pump 10 is reduced with percentage k1 in every step.
In addition, control unit 3 preferably reduces the secondary vavuum pump in lowest priority group with highest hours of operation first 10 load.
If it is preferred that the pressure p 1 measured after latency period t2 at entrance 11 still is below scheduled pressure value P0, then control unit 3 reduce in same group with next highest hours of operation secondary vavuum pump 10 load.If institute in the group There is the load of secondary vavuum pump 10 decreased, then control unit 3 is by the group application identity logic of next lowest priority.
Preferably, repeat the above steps, until the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0 Untill.
But this logic be not considered as it is restricted because control unit 3 can also reduce limit priority first Secondary vavuum pump 10 loads and the secondary vavuum pump 10 in followed by next highest priority group in group.
According to another embodiment of the invention, whenever the pressure p 1 measured at entrance 11 is higher than scheduled pressure value P0, control unit 3 just reduces the load of all secondary vavuum pumps 10 with variable speed electric motors, particularly with k1, or until current operating load SsecondaryStarting load S predetermined equal to secondStartup, 2Untill.All secondary vavuum pumps 10 can be reduced simultaneously and loaded, or passed through A secondary vavuum pump 10 is once selected to reduce load.
According to another embodiment of the invention, control unit 3 reduces the load of secondary vavuum pump 10 first, and only Reach that operation load is equal to the second predetermined starting load S in all secondary vavuum pumps 7Startup, 2Afterwards, and at entrance 11 measure Pressure p 1 still be below scheduled pressure value p0, then control unit is gradually reduced the load of main vacuum pump 9 with k0, until entering Untill the pressure p 1 measured at mouth 11 is equal to or higher than scheduled pressure value p0, or until the load of main vacuum pump 9 reaches first most Small load SMin, 1Untill.
In a preferred embodiment, before any vavuum pump 2 is run, system application latency period t1 or t2, so as to: Reduce (t2) load, and increase (t1) load.
Preferably, as shown in Figure 2, after control unit 3 is arrived in scheduled pressure value p0 communications, control unit 3 creates five Individual virtual pressure span:Region zero arrive region four, they by vacuum pump system 1 in the exhausted of pressure p 1 obtained by entrance 11 To maximum 13 and between bare minimum 14 of the vacuum pump system 1 in pressure p 1 obtained by entrance 11.Preferably, in advance Level pressure force value p0 is located at intermediate region, i.e. region two, in fig. 2 with 15 marks.
Control unit 3 also limits different latency period t1 and t2 to each region in five regions.Preferably, etc. Treat that time interval t1 and t2 have and lower value is set to the comparison area one of region zero-sum region four and region three.
Preferably, latency period t1 and t2 are not applied in region two, because obtaining scheduled pressure value p0.
If it is to be further understood that the modulus Δ P=of difference | p1-p0 | fall within region four or region three, control Unit processed will either reduce the load of vavuum pump 2 or stop vavuum pump 2, therefore use t2 as latency period.
If the modulus Δ P=of difference | p1-p0 | fall within region zero or region one, control unit 3 will increase true The load of empty pump 2 starts vavuum pump 2, therefore uses t1 as latency period.
For the simplification of calculating, but it is not limited to, selects to be approximately equal to t2 of the selection for region four for the t1 in region zero, And select to be approximately equal to t2 of the selection for region three for the t1 in region one.
As example but it is not limited to, selects that for the t1 and t2 in region zero-sum region four about 10 can be respectively chosen as Second, and select to be respectively chosen as about 20 seconds or about 30 seconds for the t1 and t2 in region one and region three.Should also Understand, above-mentioned latency period does not limit the present invention, and any other numerical value is possible.Another possibility It is to be differed slightly from one another respectively in region zero-sum region four and t1 and t2 in region one and region three.
According to another embodiment of the invention, according to the virtual pressure span of Capacity Selection five of buffer container 6: Region four is arrived in region zero.Therefore, if buffer container 6 is relatively high capacity, virtual pressure span is region zero to region Four will be smaller, whereas if buffer container 6 is relatively low capacity, then virtual pressure span is that region zero will more to region four Greatly.
If being reduced to the second predetermined starting load S in the load of all secondary vavuum pumps 10Startup, 2Afterwards in entrance 11 Locate the pressure p 1 of measurement still less than scheduled pressure value p0, then the stopping of control unit 3 is set as having most in lowest priority group The secondary vavuum pump 10 of many hours of operations.
If the pressure p 1 measured at entrance 11 is still less than scheduled pressure value p0, control unit 3 is preferably then stopped The secondary vavuum pump 10 with the second highest hours of operation that only another in same lowest priority group is still run.If should Group stops the secondary vacuum in next lowest priority group without another the secondary vavuum pump 10 that can stop, then control unit 3 Pump 10.
In addition, control unit 3 applies identical logic, make a reservation for until the pressure p 1 measured at entrance 11 is equal to or higher than Untill pressure value p0, or untill all secondary vavuum pumps 10 stop.
If simultaneously including the secondary vavuum pump 10 with constant-seed motor and the secondary vavuum pump 10 with variable speed electric motors, particularly in one group, Then control unit 3 will preferably reduce the load of all secondary vavuum pumps 10 with variable speed electric motors, particularly in whole vacuum pump system 1 first, Then stop the secondary vavuum pump 10 in lowest priority group with highest hours of operation, no matter the secondary vavuum pump 10 is to include determining Speed motor still includes variable speed electric motors, particularly.
In another embodiment in accordance with the invention, if after all secondary vavuum pumps 10 have stopped at entrance 11 The pressure p 1 of measurement stops main vacuum pump 9 still less than scheduled pressure value p0, then control unit 3.
According to another embodiment of the invention, if the pressure p 1 measured at entrance 11 is less than scheduled pressure value The p0 and load of all secondary vavuum pumps 10 was previously reduced to the second predetermined starting load S by control unit 3Startup, 2, then control All vavuum pumps 2 of the preferred pair vacuum pump system 1 of unit 3 processed are compared, to recognize the vacuum with highest hours of operation Pump 2.Control unit 3 further stops the vavuum pump 2.
According to another embodiment of the invention, if the pressure p 1 measured at entrance 11 is less than scheduled pressure value The p0 and load of all secondary vavuum pumps 10 was previously reduced to the second predetermined starting load S by control unit 3Startup, 2, then control Vavuum pump 2 in the preferred pair lowest priority group of unit 3 processed is compared.There is highest to run small in the identification group of control unit 3 When number vavuum pump 2 and stop it.
If this vavuum pump 2 is previously identified as main vacuum pump 9, control unit is from the vavuum pump 2 of residue operation The vavuum pump 2 for having minimum hours of operation in identification highest priority group is used as new main vacuum pump 9.
According to another embodiment of the invention, but it is not limited to, control unit 3 can be known from lowest priority group Not Ju You the vavuum pump 2 of minimum hours of operation be used as new main vacuum pump 9.
Preferably, control unit 3 makes the main vacuum pump 9 newly recognized match the load of previous main vacuum pump 9.
The step is repeated, untill the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or directly Untill when the only main vacuum pump 9 is run.
In addition, it will nevertheless be understood that (now, the pressure value p1 at entrance 11 during the stable operation of vacuum pump system 1 Match scheduled pressure value p0), control unit 3 does not change the load of vavuum pump 2 and does not stop or start any vavuum pump 2.
In a preferred embodiment according to the present invention, if the group comprising main vacuum pump 9 includes more than one vavuum pump 2, Then control unit 3 preferably monitors the hours of operation of these vavuum pumps 2, and if the ratio of main vacuum pump 9 is with a vacuum in group Pump 2 has more hours runs, then control unit 3 changes into main vacuum pump 9 that with minimum hours of operation.
Preferably, once priority level initializing is run to each vavuum pump 2 in vacuum pump system 1 in vacuum pump system 1 Period does not just change priority, and only can just change priority after the subsequent start-up of vacuum pump system 1.
If pressure value p1 matching scheduled pressure value p0 and user network during vacuum pump system 1 is run at entrance 11 The load of the traffic demand increase of network, then preferred vavuum pump 2 of the increase with variable speed electric motors, particularly of control unit 3.The vavuum pump 2 can be with It is not in the first maximum load SMax, 1The main vacuum pump 9 of operation, or vavuum pump 2 can be not in the second maximum load SMax, 2The secondary vavuum pump 10 of operation.
As an example, also how to run the second vavuum pump 10 described in one group, what particularly secondary vavuum pump 10 stopped Sequentially.For the purpose of the example, the group is set to the group of lowest priority.
It is therefore contemplated that the group includes the secondary vavuum pump 10 that quantity is N.
If the pressure p 1 measured at entrance 11 is less than scheduled pressure value p0, preferably in control unit 3 main true The load of empty pump 9 is reduced to load SStartup, 0The load of all secondary vavuum pumps 10 is reduced in control unit 3 afterwards and preferably For the second predetermined starting load SStartup, 2Afterwards, control unit recognizes the secondary vavuum pump in the group with highest hours of operation 10, and stop this secondary vavuum pump 10.
If the pressure p 1 measured at entrance 11 still is below scheduled pressure value p0, control unit 3 is recognized in the group Which is one with highest hours of operation in the secondary vavuum pump 10 of N-1 remaining operation, and stops this secondary vacuum Pump 10.
The step is repeated, untill the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or is changed For untill pressure p 1 is fallen within region two as shown in Figure 2, or until the group all secondary vavuum pumps 10 Untill stopping.
If the pressure p 1 that all secondary vavuum pumps 10 in this group are measured after having stopped at entrance 11 is still low In scheduled pressure value p0, then control unit 3 selects to be set as the group of lowest priority from remaining set, and application is as defined above Identity logic.
The step is repeated, untill the pressure p 1 measured at entrance 11 is equal to or higher than scheduled pressure value p0, or is fallen Untill entering within region two as shown in Figure 2, or untill all groups of all secondary vavuum pumps 10 stop.
It should be appreciated that opposite logic is applied to start secondary vavuum pump.Therefore, if the pressure measured at entrance 11 P1 is higher than scheduled pressure value p0, then control unit 3 recognizes the secondary vacuum with minimum hours of operation from highest priority group Pump 10, and in the first predetermined starting load S if the secondary vavuum pump 10 includes constant-seed motorStartup, 1Start the secondary vacuum Pump 10, or in the second predetermined starting load S if the secondary vavuum pump 10 includes variable speed electric motors, particularlyStartup, 2Start secondary vavuum pump 10.Preferably, before secondary vavuum pump 10 is started, the application latency period of control unit 3 t1.Preferably, waiting time Interval t1 starts when control unit 3 detects the pressure p 1 measured at entrance 11 higher than scheduled pressure value p0.If at this The pressure p 1 measured after latency period t1 at entrance 11 is still higher than scheduled pressure value p0, then control unit will start Secondary vavuum pump 10.
In addition, control unit 3 preferably applies latency period t2 before secondary vavuum pump 10 is stopped.Between waiting time Start every t2 when control unit 3 detects the pressure p 1 measured at entrance 11 less than scheduled pressure value p0.If waited The pressure p 1 measured after time interval t2 at entrance 11 still is below scheduled pressure value p0, then control unit 3 will stop secondary Vavuum pump 10.
In a preferred embodiment according to the present invention, the user of vacuum pump system 1 selects before the startup of vacuum pump system 1 Second minimum load SMin, 2Value.Therefore, if the second minimum load SMin, 2Select the dimension of relatively higher value, then vavuum pump 2 Shield is optimised, because hours of operation can be better controled over.If the second minimum load SMin, 2Select as relatively more Small value, then the energy utilization of vacuum pump system 1 be optimised.
Therefore, according to the present invention vacuum pump system 1 can according to user require and adjust, and according to geographical position with The availability or electricity price of electricity, vacuum pump system 1 can be adjusted to provide the result of full blast.
The invention further relates to vacuum pump system, including:Main vacuum pump 9, it includes variable speed electric motors, particularly, can be in the first minimal negative Carry SMin, 1With the first maximum load SMax, 1Between run.Vacuum pump system 1 also includes being connected in parallel at least with main vacuum pump 9 Two secondary vavuum pumps 10, each pair vavuum pump 10 includes motor, can be in the second minimum load SMin, 2With the second maximum load SMax, 2Between run.
In addition, the (not shown) of pressure sensor 12 is set, for the inlet pressure at the entrance 11 of Measuring Vacuum system 1 p1;And control device, it includes communicator, for in main vacuum pump 9 and at least two secondary both vavuum pumps 10 One or more communications.
Preferably, control device also includes processing unit, and processing unit includes being configured to apply according to the inventive method Algorithm.
Control device can be the form of control unit 3, and control unit 3 is a part or the outside of vacuum pump system 1 A part for computing unit or the part in high in the clouds.Outside computing unit (can be wired communication media by communication media Or wireless communication medium) receive measurement data from vacuum pump system 1 and data are sent back to vacuum pump system 1.
In an embodiment according to the present invention, processing unit can be the form of processor, be one of control unit 3 Point, or processing unit can be the part in outside computing unit or high in the clouds.
It is preferably but not limited to, control unit 3 is a part for vacuum pump system 1.
According to another embodiment of the invention, communicator can pass through wired or wireless communication media implementation. Preferably, communicator is realized by wired communication media.
In addition, control unit 3 can communicate with main vacuum pump 9, and main vacuum pump 9 can be controlled further by itself Unit (not shown) communicates with secondary vavuum pump 10.
In another embodiment, control unit 3 can communicate with all vavuum pumps 2 of vacuum pump system 1, in the case All vavuum pumps 2 preferably include control unit itself.
In another embodiment, vacuum pump system 1 also includes user interface (not shown), and the user of the system can lead to User interface is crossed to manually select at least one or even all following parameters:Scheduled pressure value p0, when main vacuum pump 9 starts Load SStartup, 0, percentage k0, the first predetermined starting load S used in the load increase of main vacuum pump 9Startup, 1, second is pre- Determine starting load SStartup, 2, the load of secondary vavuum pump 10 increases or decreases percentage k1 used, is area to five virtual regions Domain zero the latency period t1 and t2 of each region for stopping or starting secondary vavuum pump 10 into region four, and user are inclined Good vavuum pump 1 is still run in energy efficiency mode operation in maintenance efficiency mode.
In a preferred embodiment according to the present invention, described at least two secondary vavuum pumps 10 each include variable speed electric motors, particularly or Constant-seed motor.
It is highly preferred that at least one motor is variable speed electric motors, particularly.
It is further preferred that all secondary vavuum pumps 10 include variable speed electric motors, particularly.
Preferably, at least one in main vacuum pump 9 and secondary both vavuum pumps 10 is exhaust end base of oil injection threaded bolt vavuum pump.
According to a further advantageous embodiment of the invention, all vavuum pumps 2 in vacuum pump system 1 are exhaust end base of oil injection threaded bolt Vavuum pump.
The present invention, which should not necessarily be limited by, only includes exhaust end base of oil injection threaded bolt vavuum pump, but should be understood that the method according to the invention is applicable In with any types vavuum pump that (SER) curve is required similar to specific energy shown in Fig. 3, SER curves are represented and at a high speed The SER values being issued to reach SER lower values under the low speed compared to vavuum pump 2.
The present invention is not limited solely to the embodiment described in example and shown in accompanying drawing, and the vacuum pump system 1 can be with all The variants of type are realized, without departing from the scope of the present invention.Equally, the invention is not restricted to the fortune of the vacuum pump system as described in example Row method, this method can be realized by different way, while still within the scope of the present invention.

Claims (15)

1. a kind of method for running vacuum pump system, this method comprises the following steps:
- operation includes the main vacuum pump (9) of variable speed electric motors, particularly;
- at least two secondary vavuum pumps (10) are connected in parallel with main vacuum pump (9), each pair vavuum pump (10) includes motor;
- be grouped secondary vavuum pump (10), every group includes at least one secondary vavuum pump (10);
- to each group of setting priority;
Characterized in that, this method is further comprising the steps of:
- vacuum pump system (1) entrance (11) place carry out inlet pressure (p1) first measurement;
- inlet pressure (p1) of the first measurement is compared with scheduled pressure value (p0), if the inlet pressure (p1) of the first measurement Higher than scheduled pressure value (p0), then operation is set as at least one secondary vavuum pump (10) in the group of limit priority;
- vacuum pump system (11) entrance (11) place carry out inlet pressure (p1) second measurement;
- inlet pressure (p1) of the second measurement is compared with scheduled pressure value (p0), if the inlet pressure (p1) of the second measurement Higher than scheduled pressure value (p0), then operation is set as at least one secondary vavuum pump (10) in the group of the second high priority, wherein, This method is further comprising the steps of:If secondary vavuum pump (10) includes constant-seed motor, in the first predetermined starting load (SStartup, 1) start secondary vavuum pump (10);And/or, if secondary vavuum pump (10) includes variable speed electric motors, particularly, in the second predetermined startup Load (SStartup, 2) start secondary vavuum pump (10).
2. according to the method described in claim 1, it is characterised in that this method repeats the inlet pressure (p1) measurement with making a reservation for The step of pressure value (p0) compares, if the inlet pressure (p1) then measured is higher than scheduled pressure value (p0), operation setting For at least one secondary vavuum pump (10) in the group of next limit priority, until the pressure (p1) measured at entrance (11) place reaches Untill scheduled pressure value (p0), or untill all secondary vavuum pump (10) operations.
3. method according to claim 1 or 2, it is characterised in that at least one in operation highest priority group is secondary true Empty pump (10) is completed by one secondary vavuum pump (10) of one-shot, if the inlet pressure (p1) of measurement is higher than predetermined Pressure value (p0), then vacuum pump system (1) start another secondary vavuum pump (10) in same highest priority group, or if All secondary vavuum pumps (10) in the highest priority group are all in operation, then this method is also including starting the second highest priority group The step of middle secondary vavuum pump (10).
4. method according to claim 3, it is characterised in that at least one in the second highest priority group of operation is secondary true Empty pump (10) is completed by one secondary vavuum pump (10) of one-shot, if the inlet pressure (p1) of measurement is higher than predetermined Pressure value (p0), then vacuum pump system (1) start another secondary vavuum pump (10) in same second highest priority group, or If all secondary vavuum pumps (10) in second highest priority group are all in operation, this method also includes starting next highest In priority groups the step of secondary vavuum pump (10).
5. the method according to any preceding claims, in addition to step:After a control time interval, in vavuum pump Entrance (11) place measurement pressure (p1) of system (1) simultaneously compares the inlet pressure (p1) of measurement with scheduled pressure value (p0).
6. method according to claim 5, in addition to step:If all secondary vavuum pumps (10) are all being run and measured Inlet pressure (p1) be higher than scheduled pressure value (p0), then the load of the secondary vavuum pump (10) including variable speed electric motors, particularly is increased to the One operation load (SRun, 1), the first operation load (SRun, 1) in the second predetermined starting load of the secondary vavuum pump (10) (SStartup, 2) and the second predetermined maximum load (SMax, 2) between select.
7. method according to claim 6, it is characterised in that this method also includes step:If the inlet pressure of measurement (p1) it is higher than scheduled pressure value (p0), then to set the order of priority each secondary vavuum pump (10) including variable speed electric motors, particularly Load increases to the first operation load (SRun, 1)。
8. the method according to claim 6 or 7, in addition to:If the inlet pressure (p1) of measurement is less than scheduled pressure value (p0), then the load of the secondary vavuum pump (10) including variable speed electric motors, particularly from current operating load (Ssecondary) to be reduced to second pre- Determine starting load (SStartup, 2)。
9. method according to claim 8, in addition to:If the inlet pressure (p1) of measurement is less than scheduled pressure value (p0) the secondary vavuum pump (10) for being set as that there are most hours of operations in the group of lowest priority, is then stopped.
10. method according to claim 9, in addition to:If the inlet pressure (p1) of measurement is less than scheduled pressure value (p0) another pair still run for being set as that there is the second highest hours of operation in lowest priority group, is then then stopped Vavuum pump (10).
11. a kind of vacuum pump system, including:
- include the main vacuum pump (9) of variable speed electric motors, particularly;
- at least two secondary vavuum pumps (10) being connected in parallel with main vacuum pump (9), each pair vavuum pump (10) includes motor;
- measure the pressure sensor (12) of inlet pressure (p1) at entrance (11) place of vacuum pump system (1);
- control device, including communicator, for main vacuum pump (9) and at least two secondary vavuum pump (10) in the two One or more communications;
Characterized in that, control device also includes processing unit, processing unit includes being configured to apply according to claim 1 to 11 The algorithm of any one methods described.
12. vacuum pump system according to claim 11, it is characterised in that communicator is wire communication device.
13. the vacuum pump system according to claim 11 or 12, it is characterised in that each pair vavuum pump (10) includes electricity Machine.
14. vacuum pump system according to claim 13, it is characterised in that at least one motor is variable speed electric motors, particularly.
15. vacuum pump system according to claim 11, it is characterised in that in main vacuum pump (9) and secondary vavuum pump (10) At least one be exhaust end base of oil injection threaded bolt vavuum pump.
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