CN107081491A - New thin slice queue microelectrode - Google Patents

New thin slice queue microelectrode Download PDF

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Publication number
CN107081491A
CN107081491A CN201710344079.3A CN201710344079A CN107081491A CN 107081491 A CN107081491 A CN 107081491A CN 201710344079 A CN201710344079 A CN 201710344079A CN 107081491 A CN107081491 A CN 107081491A
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thin slice
electrode
micro
thin
processing
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CN201710344079.3A
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CN107081491B (en
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徐斌
伍晓宇
雷建国
梁雄
赵航
程蓉
郭登极
阮双琛
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Shenzhen University
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Shenzhen University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B23H1/04Electrodes specially adapted therefor or their manufacture

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

Present invention is disclosed a kind of new thin slice queue microelectrode, including electrode body and thin electrode;Electrode body is bar shaped;Thin electrode is provided with multiple, and multiple thin electrodes are into the side for being fixedly connected with electrode body of queue;Thin electrode is bar shaped thin slice, and its one end is fixedly connected with electrode body, and the relative other end is free end;The end face of free end is processing end face;It is provided with the middle part of thin electrode through the profile-followed hole of thin electrode.The new thin slice queue microelectrode of the present invention is not only provided with profile-followed hole, can discharge the galvanic corrosion product produced during micro EDM in time, and then the effective decreasing effect for reducing the loss of thin slice queue microelectrode;But also resistance reaction groove is provided with, the edge taper problem of new thin slice queue microelectrode micro EDM result can be reduced, improving processing microlaser cavity has side wall to be the machining accuracy in the case of straight wall.

Description

New thin slice queue microelectrode
Technical field
The present invention relates to electric discharging machining electrode field, a kind of new thin slice queue microelectrode is especially related to.
Background technology
Three-dimensional microstructures can be obtained by the processing of thin slice queue microelectrode micro spark now.But during implementation There is problems with:1. during micro EDM, the machining medium of first thin slice microelectrode updates and galvanic corrosion The discharge of product is worst, therefore the loss of first thin slice microelectrode is maximum, and the loss of subsequent thin slice microelectrode then can be gradually Reduce.The phenomenon that the loss of thin slice microelectrode is successively decreased can be produced not to the form accuracy and dimensional accuracy of micro- electric electrical discharge machining result Profit influence;2. during thin slice queue microelectrode micro EDM microlaser cavity, the straight wall feature of microlaser cavity can have certain cone again Degree, the taper can have a negative impact to the straight wall feature of microlaser cavity.
In summary, in order to improve the precision of thin slice queue microelectrode micro EDM, it is necessary to reduce thin slice queue The decreasing effect of microelectrode loss and the edge taper of thin slice queue microelectrode micro EDM result.
The content of the invention
The main object of the present invention can reduce the micro- electricity of thin slice queue during micro EDM to provide one kind The new thin slice queue microelectrode of the decreasing effect of pole loss.
The present invention proposes a kind of new thin slice queue microelectrode, including electrode body and thin electrode;Electrode body is Bar shaped;Thin electrode is provided with multiple, and multiple thin electrodes are into the side for being fixedly connected with electrode body of queue;Thin electrode is Bar shaped thin slice, its one end is fixedly connected with electrode body, and the relative other end is free end;The end face of free end is processing end face; Thin electrode thickness direction is provided with through the profile-followed hole of thin electrode.
Further, the micro-structural processing of micro-structural processing groove or evagination of the processing end face provided with indent is raised.
Further, when processing micro-structural processing groove of the end face provided with indent, micro-structural processing trench bottom and profile-followed hole Side wall overlap part shape it is identical, micro-structural is processed trench bottom and the distance phase between the equitant part of wall of profile-followed hole side Deng;
When processing micro-structural processing projection of the end face provided with evagination, micro-structural processing is raised to overlap with profile-followed hole side wall Partial shape is identical, makes the raised distance between the profile-followed hole side equitant part of wall of micro-structural processing equal.
Further, processing end face is plane or inclined-plane.
Further, new thin slice queue microelectrode is integrated component.
Further, two side walls of thin electrode are respectively equipped with resistance reaction groove;Resistance reaction groove is more than for opening edge The dovetail groove of bottom portion of groove;The depth distance of resistance reaction groove is more than discharging gap.
Further, two resistance reaction grooves on two side walls of thin electrode are symmetrical.
The new thin slice queue microelectrode of the present invention is not only provided with profile-followed hole, can be by during micro EDM The galvanic corrosion product of generation is discharged in time, and then effectively reduces the decreasing effect of new thin slice queue microelectrode loss;And Resistance reaction groove is additionally provided with, the edge taper that can reduce new thin slice queue microelectrode micro EDM result is asked Topic, improving processing microlaser cavity has side wall to be the machining accuracy in the case of straight wall.
Brief description of the drawings
Fig. 1 is the structural representation of the new embodiment of thin slice queue microelectrode one of the present invention;
Fig. 2 is the structure enlarged diagram in circle A in Fig. 1;
Fig. 3 is the structure enlarged diagram of another embodiment of thin electrode in Fig. 1;
Fig. 4 is the structure enlarged diagram of thin electrode 3rd embodiment in Fig. 1.
The realization, functional characteristics and advantage of the object of the invention will be described further referring to the drawings in conjunction with the embodiments.
Embodiment
It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not intended to limit the present invention.
Reference picture 1-2, a kind of new thin slice queue microelectrode, including electrode body 11 and thin electrode 12;Electrode sheet Body 11 is bar shaped;Thin electrode 12 is provided with multiple, and multiple thin electrodes 12 are into the side for being fixedly connected with electrode body 11 of queue Side;Thin electrode 12 is bar shaped thin slice, and its one end is fixedly connected with electrode body 11, and the relative other end is free end;Free end End face for processing end face 122;The thickness direction of thin electrode 12 is provided with through the profile-followed hole 121 of thin electrode 12.
New thin slice queue microelectrode is provided with profile-followed hole 121, can be effectively improved the renewal of machining medium, can also be by The galvanic corrosion product produced during micro EDM is discharged in time, and then effectively reduces the new micro- electricity of thin slice queue The decreasing effect of pole loss.
Reference picture 2-3, the micro-structural processing of micro-structural processing groove 123 or evagination of the processing end face 122 provided with indent is raised 125。
Reference picture 2, when processing micro-structural processing groove 123 of the end face 122 provided with indent, the bottom of micro-structural processing groove 123 With the profile-followed side wall of hole 121 overlap part shape it is identical, make the bottom of micro-structural processing groove 123 mutually overlapping with the profile-followed side wall of hole 121 Distance between folded part is equal;
Reference picture 3, when processing micro-structural processing raised 125 of the end face 122 provided with evagination, micro-structural processing projection 125 With the profile-followed side wall of hole 121 overlap part shape it is identical, micro-structural processing projection 125 is overlapped with the profile-followed side wall of hole 121 Part between distance it is equal.The shape of the lap is uniform, can make the uniform in effect of galvano-cautery, it is ensured that micro- knot of processing The machining accuracy of structure outer shape.
Reference picture 2, in the present embodiment, processing end face 122 are provided with the micro-structural processing groove 123 of indent;Micro-structural is processed Groove 123 is the micro-structural that arc can have arc convex with finished surface.
Reference picture 4, in certain embodiments, processing end face 122 are plane or inclined-plane.Fine put down can be processed accordingly Face structure and inclined-plane.
Reference picture 1, in the present embodiment, new thin slice queue microelectrode are integrated component.Electrode body 11 and thin slice Electrode 12 is integrated component, and stable connection between thin electrode 12 and electrode body 11, working effect is more stable, is less prone to thin slice The situation that machining accuracy declines caused by electrode 12 misplaces, and the processing of new thin slice queue microelectrode is more convenient.
Reference picture 2, in the present embodiment, two side walls of thin electrode 12 are respectively equipped with resistance reaction groove 124;Resistance reaction Groove 124 is the dovetail groove that opening edge is more than bottom portion of groove;The depth distance of resistance reaction groove 124 is more than discharging gap.
Because the depth distance of resistance reaction groove 124 is more than discharging gap, during micro EDM, processing Chamber side wall will not be discharged corrosion, it is to avoid go out situation of a processing cavity side wall by taper.
In the present embodiment, two resistance reaction grooves 124 on two side walls of thin electrode 12 are symmetrical.Symmetrically Design can ensure that the effect of micro EDM is more symmetrical, also more meet now symmetrical aesthetic.
The new thin slice queue microelectrode of the present invention is not only provided with profile-followed hole 121, can be by the mistake of micro EDM The galvanic corrosion product produced in journey is discharged in time, and then effectively reduces the decreasing effect of new thin slice queue microelectrode loss; But also provided with resistance reaction groove 124, the edge of new thin slice queue microelectrode micro EDM result can be reduced Taper problem, improving processing microlaser cavity has side wall to be the machining accuracy in the case of straight wall.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize Equivalent structure or equivalent flow conversion that description of the invention and accompanying drawing content are made, or directly or indirectly it is used in other correlations Technical field, be included within the scope of the present invention.

Claims (7)

1. a kind of new thin slice queue microelectrode, it is characterised in that including electrode body and thin electrode;
The electrode body is bar shaped;
The thin electrode is provided with multiple, and multiple thin electrodes are into the side for being fixedly connected with the electrode body of queue Side;
The thin electrode is bar shaped thin slice, and its one end is fixedly connected with the electrode body, and the relative other end is free end;
The end face of the free end is processing end face;
The thin electrode thickness direction is provided with through the profile-followed hole of the thin electrode.
2. new thin slice queue microelectrode according to claim 1, it is characterised in that the processing end face is provided with indent Micro-structural processing groove or evagination micro-structural processing it is raised.
3. new thin slice queue microelectrode according to claim 2, it is characterised in that when the processing end face is provided with interior During recessed micro-structural processing groove, the micro-structural processing trench bottom and the profile-followed hole side wall overlap part shape it is identical, Make the micro-structural processing trench bottom equal with the distance between the equitant part of profile-followed hole side wall;
When the micro-structural of the processing end face provided with evagination processes raised, the micro-structural processing is raised with the profile-followed hole side Wall overlap part shape it is identical, make micro-structural processing it is raised between the equitant part of profile-followed hole side wall away from From equal.
4. new thin slice queue microelectrode according to claim 1, it is characterised in that the processing end face be plane or Inclined-plane.
5. new thin slice queue microelectrode according to claim 1, it is characterised in that the new thin slice queue is micro- Electrode is integrated component.
6. new thin slice queue microelectrode according to claim 1, it is characterised in that two sides of the thin electrode Wall is respectively equipped with resistance reaction groove;
The resistance reaction groove is the dovetail groove that opening edge is more than bottom portion of groove;
The depth distance of the resistance reaction groove is more than discharging gap.
7. new thin slice queue microelectrode according to claim 6, it is characterised in that two sides of the thin electrode Two resistance reaction grooves on wall are symmetrical.
CN201710344079.3A 2017-05-16 2017-05-16 Novel sheet array microelectrode Active CN107081491B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107931753A (en) * 2017-11-14 2018-04-20 深圳大学 The method for processing micro- rotary structure
CN111037015A (en) * 2019-12-20 2020-04-21 深圳大学 Three-dimensional microstructure processing method and three-dimensional microstructure

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CN202224784U (en) * 2011-09-14 2012-05-23 上海交通大学 Microelectrode array with hollow structure
KR20120106069A (en) * 2011-03-17 2012-09-26 숭실대학교산학협력단 A method to manufacture electric discharge machining microelectrode
CN102773572A (en) * 2012-02-07 2012-11-14 上海交通大学 Overlaid plate type internal solution filling forming electrode for high-speed electric discharge machining
CN103480929A (en) * 2013-09-25 2014-01-01 深圳大学 Processing method of three-dimensional microstructure prepared by minute electric sparks based on sheet electrodes
CN203778908U (en) * 2014-04-08 2014-08-20 山东大学 Lossless electrode for electric spark machining
CN105537709A (en) * 2016-01-28 2016-05-04 深圳大学 Three-dimensional microstructure processing method based on bidirectional three-dimensional feature stacking
CN106077854A (en) * 2016-07-11 2016-11-09 南京航空航天大学 Interior hydrojet electrolytic mill Milling Machining system and method
CN206747734U (en) * 2017-05-16 2017-12-15 深圳大学 New thin slice queue microelectrode

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201172029Y (en) * 2008-04-10 2008-12-31 汕头市先宁电子有限公司 Ultrasonic microatomization transducer
KR20120106069A (en) * 2011-03-17 2012-09-26 숭실대학교산학협력단 A method to manufacture electric discharge machining microelectrode
CN202224784U (en) * 2011-09-14 2012-05-23 上海交通大学 Microelectrode array with hollow structure
CN102773572A (en) * 2012-02-07 2012-11-14 上海交通大学 Overlaid plate type internal solution filling forming electrode for high-speed electric discharge machining
CN103480929A (en) * 2013-09-25 2014-01-01 深圳大学 Processing method of three-dimensional microstructure prepared by minute electric sparks based on sheet electrodes
CN203778908U (en) * 2014-04-08 2014-08-20 山东大学 Lossless electrode for electric spark machining
CN105537709A (en) * 2016-01-28 2016-05-04 深圳大学 Three-dimensional microstructure processing method based on bidirectional three-dimensional feature stacking
CN106077854A (en) * 2016-07-11 2016-11-09 南京航空航天大学 Interior hydrojet electrolytic mill Milling Machining system and method
CN206747734U (en) * 2017-05-16 2017-12-15 深圳大学 New thin slice queue microelectrode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107931753A (en) * 2017-11-14 2018-04-20 深圳大学 The method for processing micro- rotary structure
CN107931753B (en) * 2017-11-14 2019-03-08 深圳大学 The method for processing micro- rotary structure
CN111037015A (en) * 2019-12-20 2020-04-21 深圳大学 Three-dimensional microstructure processing method and three-dimensional microstructure

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