CN107081491B - Novel sheet array microelectrode - Google Patents
Novel sheet array microelectrode Download PDFInfo
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- CN107081491B CN107081491B CN201710344079.3A CN201710344079A CN107081491B CN 107081491 B CN107081491 B CN 107081491B CN 201710344079 A CN201710344079 A CN 201710344079A CN 107081491 B CN107081491 B CN 107081491B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/04—Electrodes specially adapted therefor or their manufacture
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Abstract
The invention discloses a novel slice array microelectrode, which comprises an electrode body and a slice electrode; the electrode body is strip-shaped; the plurality of sheet electrodes are arranged and fixedly connected with one side edge of the electrode body in an array; the thin sheet electrode is a strip-shaped thin sheet, one end of the thin sheet electrode is fixedly connected with the electrode body, and the opposite end of the thin sheet electrode is a free end; the end surface of the free end is a processing end surface; the middle part of the thin sheet electrode is provided with a conformal hole which penetrates through the thin sheet electrode. The novel microelectrode of the slice queue is provided with the follow-up hole, so that an electroerosion product generated in the micro electric spark machining process can be discharged in time, and the decrement effect of the loss of the microelectrode of the slice queue is effectively reduced; and the reaction resisting groove is also arranged, so that the edge taper problem of the novel micro electric spark machining result of the thin sheet array microelectrode can be reduced, and the machining precision of the machined micro cavity under the condition that the side wall is a straight wall is improved.
Description
Technical Field
The invention relates to the field of electric spark machining electrodes, in particular to a novel microelectrode in a sheet array.
Background
① in the process of micro electric spark machining, the updating of a machining medium of a first sheet microelectrode and the discharge of an electric erosion product are the worst, so that the loss of the first sheet microelectrode is the largest, and the loss of the subsequent sheet microelectrode is gradually reduced, the phenomenon of gradual loss reduction of the sheet microelectrodes can generate adverse effects on the shape precision and the size precision of a micro electric spark machining result, and when ② sheet array microelectrodes are used for machining a micro cavity, the straight wall characteristic of the micro cavity has a certain taper, and the taper can generate adverse effects on the straight wall characteristic of the micro cavity.
In summary, in order to improve the precision of the micro electric discharge machining of the microelectrode in the sheet array, the decreasing effect of the loss of the microelectrode in the sheet array and the edge taper of the result of the micro electric discharge machining of the microelectrode in the sheet array need to be reduced.
Disclosure of Invention
The invention mainly aims to provide a novel sheet queue microelectrode which can reduce the decreasing effect of the loss of the sheet queue microelectrode in the micro electric discharge machining process.
The invention provides a novel slice array microelectrode, which comprises an electrode body and a slice electrode; the electrode body is strip-shaped; the plurality of sheet electrodes are arranged and fixedly connected with one side edge of the electrode body in an array; the thin sheet electrode is a strip-shaped thin sheet, one end of the thin sheet electrode is fixedly connected with the electrode body, and the opposite end of the thin sheet electrode is a free end; the end surface of the free end is a processing end surface; the thin sheet electrode is provided with a conformal hole penetrating through the thin sheet electrode in the thickness direction.
Furthermore, the processing end face is provided with a concave microstructure processing groove or a convex microstructure processing bulge.
Further, when the processing end face is provided with the concave microstructure processing groove, the shape of the overlapped part of the bottom of the microstructure processing groove and the side wall of the conformal hole is the same, so that the distance between the overlapped parts of the bottom of the microstructure processing groove and the side wall of the conformal hole is equal;
when the processing end face is provided with the convex microstructure processing bulge, the shape of the overlapped part of the microstructure processing bulge and the side wall of the conformal hole is the same, so that the distance between the overlapped part of the microstructure processing bulge and the side wall of the conformal hole is equal.
Further, the machined end face is a plane or an inclined plane.
Further, the novel sheet array microelectrodes are integral components.
Furthermore, two side walls of the sheet electrode are respectively provided with a reaction-resisting groove; the reaction resisting groove is a trapezoidal groove with an opening edge larger than the bottom of the groove; the depth distance of the reaction resisting groove is larger than the discharge gap.
Further, the two reaction-preventing grooves on the two side walls of the thin sheet electrode are symmetrical to each other.
The novel slice queue microelectrode is provided with the following hole, so that an electroerosion product generated in the micro electric spark machining process can be discharged in time, and the decrement effect of the loss of the novel slice queue microelectrode is effectively reduced; and the reaction resisting groove is also arranged, so that the edge taper problem of the novel micro electric spark machining result of the thin sheet array microelectrode can be reduced, and the machining precision of the machined micro cavity under the condition that the side wall is a straight wall is improved.
Drawings
FIG. 1 is a schematic view showing the structure of one embodiment of the novel microelectrode of the present invention;
FIG. 2 is an enlarged schematic view of the structure in circle A of FIG. 1;
FIG. 3 is an enlarged view of another embodiment of the foil electrode of FIG. 1;
fig. 4 is an enlarged schematic view of the structure of the third embodiment of the sheet electrode in fig. 1.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1-2, a novel thin plate array microelectrode comprises an electrode body 11 and a thin plate electrode 12; the electrode body 11 is strip-shaped; a plurality of sheet electrodes 12 are arranged, and the plurality of sheet electrodes 12 are fixedly connected with one side edge of the electrode body 11 in an array; the sheet electrode 12 is a strip-shaped sheet, one end of the sheet electrode is fixedly connected with the electrode body 11, and the opposite end is a free end; the end surface of the free end is a machined end surface 122; the sheet electrode 12 is provided with a conformal hole 121 penetrating the sheet electrode 12 in the thickness direction.
The novel sheet queue microelectrode is provided with the following hole 121, so that the updating of a processing medium can be effectively improved, an electroerosion product generated in the micro electric spark processing process can be timely discharged, and the decreasing effect of the loss of the novel sheet queue microelectrode is effectively reduced.
Referring to fig. 2-3, the tooling end face 122 is provided with a concave microstructure tooling groove 123 or a convex microstructure tooling protrusion 125.
Referring to fig. 2, when the processing end surface 122 is provided with the concave microstructure processing groove 123, the shape of the overlapped portion of the bottom of the microstructure processing groove 123 and the side wall of the conformal hole 121 is the same, so that the distance between the overlapped portion of the bottom of the microstructure processing groove 123 and the side wall of the conformal hole 121 is the same;
referring to fig. 3, when the processing end surface 122 is provided with the protruding microstructure processing protrusion 125, the overlapping portion of the microstructure processing protrusion 125 and the side wall of the conformal hole 121 has the same shape, so that the distances between the overlapping portions of the microstructure processing protrusion 125 and the side wall of the conformal hole 121 are the same. The shape of the overlapped part is uniform, so that the electric corrosion effect is uniform, and the processing precision of the external shape of the processed microstructure is ensured.
Referring to fig. 2, in the present embodiment, the machining end surface 122 is provided with a concave microstructure machining groove 123; the microstructure processing groove 123 is an arc-shaped microstructure having an arc-shaped protrusion on the processing surface.
Referring to fig. 4, in some embodiments, the machined end surface 122 is a flat surface or a beveled surface. Fine planar structures and bevels can be correspondingly machined.
Referring to fig. 1, in the present embodiment, the novel sheet array microelectronic device is an integral component. Electrode body 11 and thin slice electrode 12 component as an organic whole, and it is firm to be connected between thin slice electrode 12 and electrode body 11, and the working effect is more stable, is difficult for appearing the condition that the machining precision that thin slice electrode 12 misplaces and leads to descends, and the processing of neotype thin slice queue microelectrode is individual more convenient moreover.
Referring to fig. 2, in the present embodiment, two sidewalls of the sheet electrode 12 are respectively provided with a reaction-blocking groove 124; the reaction-resisting groove 124 is a trapezoidal groove with an opening edge larger than the bottom of the groove; the depth distance of the reaction-preventing groove 124 is greater than the discharge gap.
Because the depth distance of the reaction-resisting groove 124 is greater than the discharge gap, the side wall of the processing cavity cannot be corroded by discharge in the micro electric spark processing process, and the condition that the side wall of the processing cavity is tapered is avoided.
In the present embodiment, the two reaction-preventing grooves 124 on the two side walls of the sheet electrode 12 are symmetrical to each other. The symmetrical design can ensure that the micro electric discharge machining effect is more symmetrical and is more in line with the current symmetrical aesthetic.
The novel slice queue microelectrode is provided with the following hole 121, so that an electroerosion product generated in the micro electric spark machining process can be discharged in time, and the decrement effect of the loss of the novel slice queue microelectrode is effectively reduced; and the reaction resisting groove 124 is also arranged, so that the edge taper problem of the novel micro electric spark machining result of the thin sheet array microelectrode can be reduced, and the machining precision of the machined micro cavity under the condition that the side wall is a straight wall is improved.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (5)
1. A novel slice queue microelectrode is characterized by comprising an electrode body and a slice electrode;
the electrode body is strip-shaped;
the plurality of sheet electrodes are fixedly connected with one side edge of the electrode body in an array;
the thin sheet electrode is a strip-shaped thin sheet, one end of the thin sheet electrode is fixedly connected with the electrode body, and the opposite other end of the thin sheet electrode is a free end;
the end face of the free end is a machined end face;
the shape following holes penetrating through the thin sheet electrodes are formed in the thickness direction of the thin sheet electrodes;
the processing end face is provided with a concave microstructure processing groove or a convex microstructure processing bulge;
when the processing end face is provided with an inwards concave microstructure processing groove, the shape of the overlapped part of the bottom of the microstructure processing groove and the side wall of the conformal hole is the same, so that the distance between the overlapped parts of the bottom of the microstructure processing groove and the side wall of the conformal hole is equal;
when the processing end face is provided with the convex microstructure processing bulge, the shape of the overlapped part of the microstructure processing bulge and the shape following hole side wall is the same, so that the distance between the overlapped part of the microstructure processing bulge and the shape following hole side wall is equal.
2. The novel sheet alignment microelectrode according to claim 1, wherein said machined end surface is flat or beveled.
3. The novel sheet alignment microelectrode according to claim 1, wherein said novel sheet alignment microelectrode is an integral component.
4. The novel microelectrode of claim 1, wherein the two side walls of the thin sheet electrode are respectively provided with a reaction-inhibiting groove;
the reaction resisting groove is a trapezoidal groove with an opening edge larger than the bottom of the groove;
the depth distance of the reaction resisting groove is larger than the discharge gap.
5. The novel sheet alignment microelectrode according to claim 4, wherein the two reaction-inhibiting recesses on the two side walls of the sheet electrode are symmetrical to each other.
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CN107931753B (en) * | 2017-11-14 | 2019-03-08 | 深圳大学 | The method for processing micro- rotary structure |
CN111037015B (en) * | 2019-12-20 | 2021-04-16 | 深圳大学 | Three-dimensional microstructure processing method and three-dimensional microstructure |
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KR20120106069A (en) * | 2011-03-17 | 2012-09-26 | 숭실대학교산학협력단 | A method to manufacture electric discharge machining microelectrode |
CN102773572A (en) * | 2012-02-07 | 2012-11-14 | 上海交通大学 | Overlaid plate type internal solution filling forming electrode for high-speed electric discharge machining |
CN103480929A (en) * | 2013-09-25 | 2014-01-01 | 深圳大学 | Processing method of three-dimensional microstructure prepared by minute electric sparks based on sheet electrodes |
CN203778908U (en) * | 2014-04-08 | 2014-08-20 | 山东大学 | Lossless electrode for electric spark machining |
CN105537709A (en) * | 2016-01-28 | 2016-05-04 | 深圳大学 | Three-dimensional microstructure processing method based on bidirectional three-dimensional feature stacking |
CN106077854A (en) * | 2016-07-11 | 2016-11-09 | 南京航空航天大学 | Interior hydrojet electrolytic mill Milling Machining system and method |
CN206747734U (en) * | 2017-05-16 | 2017-12-15 | 深圳大学 | New thin slice queue microelectrode |
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CN201172029Y (en) * | 2008-04-10 | 2008-12-31 | 汕头市先宁电子有限公司 | Ultrasonic microatomization transducer |
KR20120106069A (en) * | 2011-03-17 | 2012-09-26 | 숭실대학교산학협력단 | A method to manufacture electric discharge machining microelectrode |
CN202224784U (en) * | 2011-09-14 | 2012-05-23 | 上海交通大学 | Microelectrode array with hollow structure |
CN102773572A (en) * | 2012-02-07 | 2012-11-14 | 上海交通大学 | Overlaid plate type internal solution filling forming electrode for high-speed electric discharge machining |
CN103480929A (en) * | 2013-09-25 | 2014-01-01 | 深圳大学 | Processing method of three-dimensional microstructure prepared by minute electric sparks based on sheet electrodes |
CN203778908U (en) * | 2014-04-08 | 2014-08-20 | 山东大学 | Lossless electrode for electric spark machining |
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