CN107076932A - 一种光栅耦合器及制备方法 - Google Patents

一种光栅耦合器及制备方法 Download PDF

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CN107076932A
CN107076932A CN201580055453.7A CN201580055453A CN107076932A CN 107076932 A CN107076932 A CN 107076932A CN 201580055453 A CN201580055453 A CN 201580055453A CN 107076932 A CN107076932 A CN 107076932A
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waveguide
chain
relevant
optical signal
grating coupler
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CN107076932B (zh
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李明
涂鑫
付红岩
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

一种光栅耦合器及其制备方法。该光栅耦合器包括：依次排列的衬底层(0)、下限制层(1)、波导芯层(2)和上限制层(3)。该波导芯层(2)包括亚微米波导(4)、第一锥形波导(5)和波导阵列(6)。该波导阵列(6)包括至少两个波导群，该波导群包括至少一条波导链，该波导链包括至少两个宽度不同的波导，该波导链中的该波导相互连接。同一该波导群的该波导链中波导的宽度和排列结构相同，不同该波导群的该波导链中波导的宽度和/或排列结构不同。该波导阵列(6)中该波导链的一端与该第一锥形波导(5)宽的一端连接，该第一锥形波导(5)窄的一端与该亚微米波导(4)连接。该光栅耦合器能提高带宽。

Description

PCT国内申请，说明书已公开。

Claims (20)

  1. PCT国内申请，权利要求书已公开。
CN201580055453.7A 2015-06-11 2015-06-11 一种光栅耦合器及制备方法 Active CN107076932B (zh)

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PCT/CN2015/081270 WO2016197376A1 (zh) 2015-06-11 2015-06-11 一种光栅耦合器及制备方法

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US (1) US10317584B2 (zh)
EP (1) EP3296782B1 (zh)
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WO (1) WO2016197376A1 (zh)

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CN110389407B (zh) * 2018-04-19 2021-02-02 北京万集科技股份有限公司 光学天线、相控阵激光雷达及光学天线的制备方法
US11428869B2 (en) * 2019-04-22 2022-08-30 The Chinese University Of Hong Kong Multimode waveguide grating coupler
US10935720B2 (en) 2019-04-29 2021-03-02 Ii-Vi Delaware, Inc. Laser beam product parameter adjustments
US11448828B2 (en) * 2021-02-22 2022-09-20 Taiwan Semiconductor Manufacturing Company, Ltd. Optical device for coupling light
US11754784B2 (en) 2021-09-08 2023-09-12 Cisco Technology, Inc. Grating coupler
CN114089482B (zh) * 2021-12-02 2022-10-18 清华大学 一种光栅耦合器

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Publication number Publication date
EP3296782A4 (en) 2018-06-06
EP3296782A1 (en) 2018-03-21
EP3296782B1 (en) 2021-03-03
US10317584B2 (en) 2019-06-11
WO2016197376A1 (zh) 2016-12-15
CN107076932B (zh) 2019-10-18
US20180095199A1 (en) 2018-04-05

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