CN107070295A - U-shaped accurate linear piezoelectric actuator and its motivational techniques - Google Patents
U-shaped accurate linear piezoelectric actuator and its motivational techniques Download PDFInfo
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- CN107070295A CN107070295A CN201710245066.0A CN201710245066A CN107070295A CN 107070295 A CN107070295 A CN 107070295A CN 201710245066 A CN201710245066 A CN 201710245066A CN 107070295 A CN107070295 A CN 107070295A
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- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000003068 static effect Effects 0.000 claims description 12
- 230000002463 transducing effect Effects 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 5
- 230000003111 delayed effect Effects 0.000 claims description 2
- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims 34
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- 238000004377 microelectronic Methods 0.000 abstract description 3
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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Abstract
U-shaped accurate linear piezoelectric actuator and its motivational techniques, belong to Precision Piezoelectric actuation techniques field, in order to meet big stroke, by force high speed, load, the demand of high precision performance that the technical fields such as micro-electronic manufacturing, nanometer manufacture, Aero-Space are proposed to precision actuation.Two horizontally disposed transducers of the present invention are parallel to each other, and two transducers arranged vertically are symmetrical, and the axis for the transducer arranged vertically is orthogonal with the axial space of horizontally disposed transducer；Transducer includes shell, piezoelectric stack, pretension block, alignment pin, end cap, output shaft, and this transducer can effectively reduce the moment of flexure that load is acted directly on piezoelectric stack, plays a part of increasing straight line mover power output.The present invention can realize on a large scale, high-speed motion while take into account high positioning precision；With advantages such as positioning precision height, big stroke, output speed and the adjustable, High power outputs of power output.
Description
Technical field
The invention belongs to Precision Piezoelectric actuation techniques field.
Background technology
Piezoelectric actuator is that one kind utilizes inverse piezoelectric effect, and the electric energy of input is converted into mechanical energy and the device exported.
The features such as piezoelectric actuator has that fast response time, anti-electromagnetic interference capability are strong, cut off self-lock, torque density is high, at present
It is widely applied to the fields such as precision instrument, high-end equipment manufacturing, Aero-Space.
Piezoelectric actuator common at present can be divided into resonant mode piezoelectric actuator and disresonance type pressure according to driving principle
Electric drive.When using elastomer composite oscillator resonance occurs for resonant mode piezoelectric actuator, produced at surface of elastomer driving foot
Elliptical orbit, pass through mover and driving foot between frictional force, drive mover motion.The piezoresistive material of resonant mode piezoelectric actuator
Material encourages state in high-frequency ac voltage, and now the translational speed of driver is fast, displacement resolving power is low.Disresonance type piezoelectricity drives
The elastic deformation that dynamic device is produced at a dc voltage using piezoelectric drives driving foot to produce driving track, by mover with driving
Frictional force between action spot, drives mover motion.Disresonance type piezoelectric actuator has resolving power height, the stroke of output displacement
It is small, the features such as speed is slow.With developing rapidly for the fields such as micro-electronic manufacturing, nanometer manufacture, Aero-Space, to precision actuation
Output performance proposes more stringent requirement.
The content of the invention
The invention aims to meet the technical fields such as micro-electronic manufacturing, nanometer manufacture, Aero-Space to drive precision
The dynamic big stroke proposed, high speed, it is strong carry, the demand of high precision performance, it is proposed that a kind of U-shaped accurate linear piezoelectric actuator and its
Motivational techniques.
U-shaped accurate linear piezoelectric actuator of the present invention, including straight line mover and four transducers；
Four transducers are respectively：First transducer, second transducer, the 3rd transducer and 4th transducer；
The first transducer is horizontally disposed with 4th transducer, also, the axis and 4th transducer of first transducer
Axis be parallel to each other；
The second transducer is symmetrical arranged with the 3rd transducer, also, the axis of second transducer is changed with first simultaneously
The axis of energy device and the axial space of 4th transducer are orthogonal；
Four transducers include shell, piezo-electric stack, pretension block, alignment pin, end cap and output shaft；
The shell is provided with centre bore；
The piezo-electric stack is fixed in the centre bore of shell；
The end cap is by threaded engagement in the end of shell centre bore；
The head end of the output shaft is stretched into the centre bore of shell through end cap, also, output shaft passes through screw thread with end cap
Connection；
The pretension block is arranged on the end of piezo-electric stack, and the head end of output shaft compresses pretension block, realized to piezo-electric stack
Apply and alignment pin is provided between pretightning force, also, pretension block and end cap, alignment pin is used to limit the rotation of pretension block；
The output shaft end of first transducer and the output shaft end of 4th transducer are in contact with straight line mover respectively；
The output shaft end of second transducer is fixedly connected with the shell of first transducer；The output shaft end of 3rd transducer
End is fixedly connected with the shell of 4th transducer；The shell of second transducer is fixedly connected with the shell of the 3rd transducer.
The motivational techniques of U-shaped accurate linear piezoelectric actuator of the present invention, the motivational techniques are to be based on U-shaped precise direct
What line piezoelectric actuator was realized, it is the step motion motivational techniques of the motivational techniques including U-shaped accurate linear piezoelectric actuator, U-shaped
The quick motion-activated method of accurate linear piezoelectric actuator and the motion-activated method of U-shaped accurate linear piezoelectric actuator；
The step motion motivational techniques of the U-shaped accurate linear piezoelectric actuator for driving straight line mover realize upwards and to
The step motion method of lower both direction；
The quick motion-activated method of the U-shaped accurate linear piezoelectric actuator for driving straight line mover realize upwards and to
The quick movement technique of lower both direction；
The motion-activated method of the U-shaped accurate linear piezoelectric actuator be according to the target output speed of straight line mover and
Target output displacement selects motivational techniques.
The beneficial effects of the invention are as follows in four transducers, the centre bore of output shaft and end cap is connected through a screw thread, end
Lid is connected through a screw thread with shell, and this structure can be substantially reduced outer load while transducer maximum output displacement is not reduced
The moment of flexure that lotus is acted on piezoelectric stack, plays a part of protecting piezoelectric stack, so as to improve the output shaft and straight line of transducer
The maximum positive voltage power that can be acted between mover, and then improve the power output of U-shaped accurate linear piezoelectric actuator.Two horizontal cloth
The transducer put and the transducer arranged vertically are arranged by the way of orthogonal space, by controlling the driving voltage of transducer to believe
Number realize driving straight line mover motion.U-shaped accurate linear piezoelectric actuator proposed by the present invention can be according to target output speed
Motivational techniques are selected with target output displacement, having driver, impulse stroke is big, output speed is high, nanoscale is positioned, load
The characteristics of ability is strong.U-shaped accurate linear piezoelectric actuator disclosed by the invention is simple in construction to be easily assembled to, stroke is big, positioning accurate
The features such as degree height, High power output, output speed high, power output and output speed can be adjusted independently manufactured in electronic manufacture, nanometer,
The technical fields such as Aero-Space have preferable application.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the U-shaped accurate linear piezoelectric actuator described in embodiment one；
Fig. 2 is the plan cross-section structural representation of the U-shaped accurate linear piezoelectric actuator described in embodiment one, its
In, 3-1 is spring washer, and 3-2 is nut；
Fig. 3 is the driving principle figure that the cathetus mover of embodiment three steps up motion；
Fig. 4 is the driving principle figure that the cathetus mover of embodiment three is stepped down by motion；
Fig. 5 is the driving principle figure that the cathetus mover of embodiment four is quickly moved upwards；
Fig. 6 is the driving principle figure that the cathetus mover of embodiment four is quickly moved downwards.
Embodiment
Embodiment one：Illustrate present embodiment, the U-shaped accurate straight line described in present embodiment with reference to Fig. 1 and Fig. 2
Piezoelectric actuator, including straight line mover 1 and four transducers；
Four transducers are respectively：First transducer 2-1, second transducer 2-2, the 3rd transducer 2-3 and the 4th transducing
Device 2-4；
The first transducer 2-1 and 4th transducer 2-4 are horizontally disposed with, also, first transducer 2-1 axis and the
Four transducer 2-4 axis is parallel to each other；
The second transducer 2-2 and the 3rd transducer 2-3 is symmetrical arranged, also, second transducer 2-2 axis simultaneously
It is orthogonal with first transducer 2-1 axis and 4th transducer 2-4 axial space；
Four transducers include shell 2-11, piezo-electric stack 2-12, pretension block 2-13, alignment pin 2-14, end cap 2-15
With output shaft 2-16；
The shell 2-11 is provided with centre bore；Locating dowel 2- is equipped with the shell 2-11 of four transducers centre bore
11-1；Locating dowel 2-11-1 section is circular or is the closed curve with two sections of isocentric circular arcs；Piezoelectric stack 2-12 is embedding
It is enclosed on locating dowel 2-11-1；
The piezo-electric stack 2-12 is fixed in shell 2-11 centre bore；
The end cap 2-15 is by threaded engagement in the end of shell 2-11 centre bores；
First transducer 2-1 and 4th transducer 2-4 output shaft 2-16 is provided with one end that straight line mover 1 is contacted
It is cylinder or hemispherical to drive foot 2-16-1, the driving foot 2-16-1；
The head end of the output shaft 2-16 is stretched into shell 2-11 centre bore through end cap 2-15, also, output shaft 2-
16 are connected through a screw thread with end cap 2-15；
The pretension block 2-13 is arranged on piezo-electric stack 2-12 end, and output shaft 2-16 head end compresses pretension block 2-
13, realize to being provided with alignment pin 2- between piezo-electric stack 2-12 application pretightning force, also, pretension block 2-13 and end cap 2-15
14, alignment pin 2-14 are used to limit pretension block 2-13 rotations；
First transducer 2-1 output shaft 2-16 ends and 4th transducer 2-4 output shaft 2-16 ends respectively with directly
Line mover 1 is in contact；
Second transducer 2-2 output shaft 2-16 ends are fixedly connected with first transducer 2-1 shell 2-11；3rd changes
Energy device 2-3 output shaft 2-16 ends are fixedly connected with 4th transducer 2-4 shell 2-11；Second transducer 2-2 shell
2-11 is fixedly connected with the 3rd transducer 2-3 shell 2-11.
In the present embodiment, locating dowel 2-1-2 section is circle, and driving foot 2-16-1 is cylinder；Second transducing
Device 2-2 output shaft 2-16 ends are fixedly connected with mode with first transducer 2-1 shell 2-11：Pass through second transducer 2-
The screw thread and nut 3-2 of 2 output shaft 2-16 ends are spun together, and spring washer 3-1 therein plays a part of to loosen；3rd
Transducer 2-3 output shaft 2-16 ends are fixedly connected with mode with 4th transducer 2-4 shell 2-11：Pass through the 3rd transducing
The screw thread and nut 3-2 of device 2-3 output shaft 2-16 ends are spun together, and spring washer 3-1 therein plays a part of to loosen.
Embodiment two：The motivational techniques of U-shaped accurate linear piezoelectric actuator described in present embodiment, the excitation
Method is realized based on the U-shaped accurate linear piezoelectric actuator described in claim 1, and the motivational techniques include U-shaped precise direct
The step motion motivational techniques of line piezoelectric actuator, the quick motion-activated method of U-shaped accurate linear piezoelectric actuator and U-shaped essence
The motion-activated method of close linear piezoelectric actuator；
The step motion motivational techniques of the U-shaped accurate linear piezoelectric actuator for driving straight line mover 1 realize upwards and
The step motion method of downward both direction；
The quick motion-activated method of the U-shaped accurate linear piezoelectric actuator for driving straight line mover 1 realize upwards and
The quick movement technique of downward both direction；
The motion-activated method of the U-shaped accurate linear piezoelectric actuator is the target output speed according to straight line mover 1
Motivational techniques are selected with target output displacement.
Embodiment three：Illustrate present embodiment with reference to Fig. 3 and Fig. 4, present embodiment is to embodiment
The motivational techniques of U-shaped accurate linear piezoelectric actuator described in two are further limited, in the present embodiment, drive straight line mover
1 realizes that the step motion method of both direction up and down includes straight line mover 1 and realizes the motivational techniques for stepping up motion
The motivational techniques for being stepped down by motion are realized with straight line mover 1；
The straight line mover 1 realizes that the motivational techniques for stepping up motion comprise the following steps：
Step one by one, original state when, the first transducer 2-1 output shaft 2-16 ends and in the presence of pretightning force
Four transducer 2-4 output shaft 2-16 ends are in contact with straight line mover 1, and straight line mover 1 is static；
Apply positive voltage in step one two, first transducer 2-1, its output shaft 2-16 extends and compresses straight line mover 1, together
When 4th transducer 2-4 apply negative voltage, its output shaft 2-16 retracts simultaneously to be separated with straight line mover 1, and straight line mover 1 keeps quiet
Only；
Apply positive voltage, second transducer 2-2 output on step one three, second transducer 2-2 and the 3rd transducer 2-3
Axle 2-16 drives first transducer 2-1 to move up, the 3rd transducer 2-3 output shaft 2-16 drive 4th transducer 2-4 to
Lower movement, first transducer 2-1 output shaft 2-16 drives the motion upwards of straight line mover 1 in the presence of frictional force；
Apply positive voltage in step one four, 4th transducer 2-4, its output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage on step First Five-Year Plan, first transducer 2-1, its output shaft 2-16 is separated with straight line mover 1, straight line is moved
Sub 1 remains stationary；
Apply negative voltage, second transducer 2-2 output on step one six, second transducer 2-2 and the 3rd transducer 2-3
Axle 2-16 drives first transducer 2-1 to move down, the 3rd transducer 2-3 output shaft 2-16 drive 4th transducer 2-4 to
Upper movement, 4th transducer 2-4 output shaft 2-16 drives the motion upwards of straight line mover 1 in the presence of frictional force；
Apply positive voltage in step one seven, first transducer 2-1, its output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step one eight, 4th transducer 2-4, its output shaft 2-16 is separated with straight line mover 1, straight line is moved
Sub 1 remains stationary；
Step one nine, one or three are repeated the above steps to step one eight, so as to realize that straight line mover 1 steps up motion；
The straight line mover 1 realizes that the motivational techniques for being stepped down by motion comprise the following steps：
When step 2 one, original state, the first transducer 2-1 output shaft 2-16 ends and in the presence of pretightning force
Four transducer 2-4 output shaft 2-16 ends are in contact with straight line mover 1, and straight line mover 1 is static；
Apply negative voltage in step 2 two, first transducer 2-1, its output shaft 2-16 retracts and separated with straight line mover 1,
4th transducer 2-4 applies positive voltage simultaneously, and its output shaft 2-16 extends and compresses straight line mover 1, and straight line mover 1 keeps quiet
Only；
Apply positive voltage, second transducer 2-2 output on step 2 three, second transducer 2-2 and the 3rd transducer 2-3
Axle 2-16 drives first transducer 2-1 to move up, the 3rd transducer 2-3 output shaft 2-16 drive 4th transducer 2-4 to
Lower movement, 4th transducer 2-4 output shaft 2-16 drives straight line mover 1 to move downward in the presence of frictional force；
Apply positive voltage in step 2 four, first transducer 2-1, its output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step 2 five, 4th transducer 2-4, its output shaft 2-16 is separated with straight line mover 1, straight line is moved
Sub 1 remains stationary；
Apply negative voltage, second transducer 2-2 output on step 2 six, second transducer 2-2 and the 3rd transducer 2-3
Axle 2-16 drives first transducer 2-1 to move down, the 3rd transducer 2-3 output shaft 2-16 drive 4th transducer 2-4 to
Upper movement, first transducer 2-1 output shaft 2-16 drives straight line mover 1 to move downward in the presence of frictional force；
Apply positive voltage in step 2 seven, 4th transducer 2-4, its output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step 2 eight, first transducer 2-1, its output shaft 2-16 is separated with straight line mover 1, straight line is moved
Sub 1 remains stationary；
Step 2 nine, two or three are repeated the above steps to step 2 eight, so as to realize that straight line mover 1 is stepped down by motion.
During above-mentioned four transducers of excitation realize that straight line mover 1 is moved up and down, it should be ensured that each
At least one in individual moment first transducer 2-1 and 4th transducer 2-2 output shaft 2-16 keeps connecing with straight line mover 1
Touch, to ensure that straight line mover 1 is not moved by the interference of external force.Applied in the above-mentioned motion process of driving straight line mover 1
Driving voltage signal can be square wave, triangular wave or trapezoidal wave.In the motion process of straight line mover 1, the mobile speed of straight line mover 1
Degree and maximum output power can be adjusted individually, the translational speed of its cathetus mover 1 can by control second transducer 2-2 and
The amplitude for the driving voltage signal that 3rd transducer 2-3 is applied is adjusted；The maximum output power of straight line mover 1 can pass through
Control first transducer 2-1 and the 4th amplitude for changing the driving voltage signal that transducer 2-4 is applied are adjusted.
Embodiment four：Illustrate present embodiment with reference to Fig. 5 and Fig. 6, present embodiment is to embodiment
The motivational techniques of U-shaped accurate linear piezoelectric actuator described in two are further limited, in the present embodiment, drive straight line mover
1 realizes that the specific method of the quick motion of both direction up and down is：
Apply the ac-excited voltage of frequency identical to four transducers, to encourage four transducers to produce extensional vibration；
It is 180 degree to ensure the phase difference between first transducer 2-1 and 4th transducer 2-4 driving voltage, second transducer 2-2's
Driving voltage phase is identical with the 3rd transducer 2-3 driving voltage phase, and with the phase of first transducer 2-1 driving voltage
Potential difference is 90 degree, now, and U-shaped accurate linear piezoelectric actuator is in resonance state, and four extensional vibrations are mutually compounded in first and changed
Energy device 2-1 and 4th transducer 2-4 output shaft 2-16 ends, which are produced, to continue and stable elliptical orbit, in first transducer 2-
Between 1 output shaft 2-16 or 4th transducer 2-4 output shaft 2-16 and straight line mover 1 in the presence of frictional force, straight line is moved
Son 1 realizes movement；When the second transducer 2-2 phases for applying driving voltage surpass than the phase that first transducer 2-1 is applied
At first 90 degree, straight line mover 1 is moved downward；When second transducer 2-2 applies the phase of driving voltage than first transducer 2-1
During 90 degree of the delayed phase applied, straight line mover 1 is moved upwards.
During above-mentioned excitation transducer realizes that straight line mover 1 moves up and down, the ripple of the ac voltage signal applied
Shape can be sine wave, square wave, triangular wave and trapezoidal wave.
Embodiment five：Present embodiment is to the U-shaped accurate straight line Piezoelectric Driving described in embodiment two
The motivational techniques of device are further limited, in the present embodiment, according to the target output speed and target carry-out bit of straight line mover 1
Move selection excitation specific method be：When exporting target velocity more than the maximum that step motion motivational techniques can reach,
High speed, larger displacement output are realized using quick motion-activated method first, encouraged close to after displacement of targets using step motion
Method realizes final precision positioning；It can be reached most when target output speed is less than or equal to step motion motivational techniques
During big value, directly using step motion motivational techniques until reaching target output displacement.
Claims (10)
1.U types precision linear piezoelectric actuator, it is characterised in that including straight line mover (1) and four transducers；
Four transducers are respectively：First transducer (2-1), second transducer (2-2), the 3rd transducer (2-3) and the 4th are changed
Can device (2-4)；
The first transducer (2-1) and 4th transducer (2-4) are horizontally disposed with, also, the axis of first transducer (2-1) with
The axis of 4th transducer (2-4) is parallel to each other；
The second transducer (2-2) is symmetrical arranged with the 3rd transducer (2-3), also, the axis of second transducer (2-2) is same
When it is orthogonal with the axis of first transducer (2-1) and the axial space of 4th transducer (2-4)；
Four transducers include shell (2-11), piezo-electric stack (2-12), pretension block (2-13), alignment pin (2-14), end cap
(2-15) and output shaft (2-16)；
The shell (2-11) is provided with centre bore；
The piezo-electric stack (2-12) is fixed in shell (2-11) centre bore；
The end cap (2-15) is by threaded engagement in the end of shell (2-11) centre bore；
The head end of the output shaft (2-16) is stretched into shell (2-11) centre bore through end cap (2-15), also, output shaft
(2-16) is connected through a screw thread with end cap (2-15)；
The pretension block (2-13) is arranged on piezo-electric stack (2-12) end, and the head end of output shaft (2-16) compresses pretension block
(2-13), is realized to being provided between piezo-electric stack (2-12) application pretightning force, also, pretension block (2-13) and end cap (2-15)
Alignment pin (2-14), alignment pin (2-14) is used to limit pretension block (2-13) rotation；
Output shaft (2-16) end of first transducer (2-1) and output shaft (2-16) end difference of 4th transducer (2-4)
It is in contact with straight line mover (1)；
Output shaft (2-16) end of second transducer (2-2) is fixedly connected with the shell (2-11) of first transducer (2-1)；The
Output shaft (2-16) end of three transducers (2-3) is fixedly connected with the shell (2-11) of 4th transducer (2-4)；Second transducing
The shell (2-11) of device (2-2) is fixedly connected with the shell (2-11) of the 3rd transducer (2-3).
2. U-shaped accurate linear piezoelectric actuator according to claim 1, it is characterised in that the shell (2- of four transducers
11) locating dowel (2-11-1) is equipped with centre bore；The section of locating dowel (2-11-1) is circular or is same with two sections
The closed curve of heart circular arc；Piezoelectric stack (2-12) is nested in locating dowel (2-11-1).
3. U-shaped accurate linear piezoelectric actuator according to claim 1, it is characterised in that first transducer (2-1) and
The output shaft (2-16) of four transducers (2-4) is provided with driving foot (2-16-1) with one end that straight line mover (1) is contacted, described
Driving foot (2-16-1) is cylinder or hemispherical.
The motivational techniques of 4.U types precision linear piezoelectric actuator, it is characterised in that the motivational techniques are to be based on claim 1 institute
What the U-shaped accurate linear piezoelectric actuator stated was realized, the motivational techniques include the step motion of U-shaped accurate linear piezoelectric actuator
The motion of motivational techniques, the quick motion-activated method of U-shaped accurate linear piezoelectric actuator and U-shaped accurate linear piezoelectric actuator
Motivational techniques；
The step motion motivational techniques of the U-shaped accurate linear piezoelectric actuator for driving straight line mover (1) realize upwards and to
The step motion method of lower both direction；
The quick motion-activated method of the U-shaped accurate linear piezoelectric actuator for driving straight line mover (1) realize upwards and to
The quick movement technique of lower both direction；
The motion-activated method of the U-shaped accurate linear piezoelectric actuator be according to the target output speed of straight line mover (1) and
Target output displacement selects motivational techniques.
5. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 4, it is characterised in that driving straight line
Mover (1) realizes that the motivational techniques of the step motion of both direction up and down include straight line mover (1) realization and stepped up
The motivational techniques and straight line mover (1) of motion realize the motivational techniques for being stepped down by motion；
The straight line mover (1) realizes that the motivational techniques for stepping up motion comprise the following steps：
Step one by one, original state when, output shaft (2-16) end of first transducer (2-1) and in the presence of pretightning force
Output shaft (2-16) end of four transducers (2-4) is in contact with straight line mover (1), and straight line mover (1) is static；
Apply positive voltage in step one two, first transducer (2-1), its output shaft (2-16) extends and compresses straight line mover (1),
4th transducer (2-4) applies negative voltage simultaneously, and its output shaft (2-16) is retracted and separated with straight line mover (1), straight line mover
(1) remains stationary；
Apply positive voltage on step one three, second transducer (2-2) and the 3rd transducer (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move up, and the output shaft (2-16) of the 3rd transducer (2-3) drives the 4th to change
Energy device (2-4) is moved down, and the output shaft (2-16) of first transducer (2-1) drives straight line mover in the presence of frictional force
(1) motion upwards；
Apply positive voltage in step one four, 4th transducer (2-4), its output shaft (2-16) compresses straight line mover (1), straight line is moved
Sub (1) is static；
Apply negative voltage on step First Five-Year Plan, first transducer (2-1), its output shaft (2-16) is separated with straight line mover (1), straight line
Mover (1) remains stationary；
Apply negative voltage on step one six, second transducer (2-2) and the 3rd transducer (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move down, and the output shaft (2-16) of the 3rd transducer (2-3) drives the 4th to change
Energy device (2-4) is moved up, and the output shaft (2-16) of 4th transducer (2-4) drives straight line mover in the presence of frictional force
(1) motion upwards；
Apply positive voltage in step one seven, first transducer (2-1), its output shaft (2-16) compresses straight line mover (1), straight line is moved
Sub (1) is static；
Apply negative voltage in step one eight, 4th transducer (2-4), its output shaft (2-16) is separated with straight line mover (1), straight line
Mover (1) remains stationary；
Step one nine, one or three are repeated the above steps to step one eight, so as to realize that straight line mover (1) steps up motion；
The straight line mover (1) realizes that the motivational techniques for being stepped down by motion comprise the following steps：
When step 2 one, original state, output shaft (2-16) end of first transducer (2-1) and in the presence of pretightning force
Output shaft (2-16) end of four transducers (2-4) is in contact with straight line mover (1), and straight line mover (1) is static；
Apply negative voltage in step 2 two, first transducer (2-1), its output shaft (2-16) is retracted and divided with straight line mover (1)
From while 4th transducer (2-4) applies positive voltage, its output shaft (2-16) extends and compresses straight line mover (1), straight line mover
(1) remains stationary；
Apply positive voltage on step 2 three, second transducer (2-2) and the 3rd transducer (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move up, and the output shaft (2-16) of the 3rd transducer (2-3) drives the 4th to change
Energy device (2-4) is moved down, and the output shaft (2-16) of 4th transducer (2-4) drives straight line mover in the presence of frictional force
(1) move downward；
Apply positive voltage in step 2 four, first transducer (2-1), its output shaft (2-16) compresses straight line mover (1), straight line is moved
Sub (1) is static；
Apply negative voltage in step 2 five, 4th transducer (2-4), its output shaft (2-16) is separated with straight line mover (1), straight line
Mover (1) remains stationary；
Apply negative voltage on step 2 six, second transducer (2-2) and the 3rd transducer (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move down, and the output shaft (2-16) of the 3rd transducer (2-3) drives the 4th to change
Energy device (2-4) is moved up, and the output shaft (2-16) of first transducer (2-1) drives straight line mover in the presence of frictional force
(1) move downward；
Apply positive voltage in step 2 seven, 4th transducer (2-4), its output shaft (2-16) compresses straight line mover (1), straight line is moved
Sub (1) is static；
Apply negative voltage in step 2 eight, first transducer (2-1), its output shaft (2-16) is separated with straight line mover (1), straight line
Mover (1) remains stationary；
Step 2 nine, two or three are repeated the above steps to step 2 eight, so as to realize that straight line mover (1) is stepped down by motion.
6. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 5, it is characterised in that four transducings
The waveform of the driving voltage signal applied on device is any time the during triangular wave, square wave or trapezoidal wave, and driving
At least one output among the output shaft (2-16) of one transducer (2-1) and the output shaft (2-16) of 4th transducer (2-4)
Axle (2-16) keeps contacting with straight line mover (1).
7. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 5, it is characterised in that straight line mover
(1) power output and output speed can be adjusted independently, wherein, by controlling first transducer (2-1) and 4th transducer (2-
4) amplitude of the driving voltage applied, can adjust the maximum output power of straight line mover (1)；By adjusting second transducer
The amplitude for the driving voltage that (2-2) and the 3rd transducer (2-3) are applied, can adjust the output speed of straight line mover (1).
8. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 4, it is characterised in that driving straight line
Mover (1) realizes that the specific method of the quick motion of both direction up and down is：
Apply the ac-excited voltage of frequency identical to four transducers, to encourage four transducers to produce extensional vibration；Ensure
Phase difference between the driving voltage of first transducer (2-1) and 4th transducer (2-4) is 180 degree, second transducer (2-2)
Driving voltage phase it is identical with the driving voltage phase of the 3rd transducer (2-3), and with the excitation of first transducer (2-1) electricity
The phase difference of pressure is 90 degree, now, and U-shaped accurate linear piezoelectric actuator is in resonance state, and four extensional vibrations are mutually compounded in
Output shaft (2-16) end of first transducer (2-1) and 4th transducer (2-4), which is produced, to continue and stable elliptical orbit,
Between the output shaft (2-16) of first transducer (2-1) or the output shaft (2-16) of 4th transducer (2-4) and straight line mover (1)
In the presence of frictional force, straight line mover (1) realizes movement；When the phase that second transducer (2-2) applies driving voltage compares
When the phase that one transducer (2-1) is applied is advanced 90 degree, straight line mover (1) is moved downward；When second transducer (2-2) is applied
Plus during 90 degree of the delayed phase that is applied than first transducer (2-1) of the phase of driving voltage, straight line mover (1) is moved upwards.
9. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 8, it is characterised in that four transducings
The waveform of the ac-excited voltage signal applied on device includes sine wave, triangular wave, square wave and trapezoidal wave.
10. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 4, it is characterised in that according to straight line
Mover (1) target output speed and target output displacement selection motivational techniques specific method be：When output target velocity is big
When the maximum that step motion motivational techniques can reach, high speed, big displacement are realized using quick motion-activated method first
Output, final precision positioning is being realized close to after displacement of targets using step motion motivational techniques；When target output speed is small
In or equal to step motion motivational techniques can reach maximum when, directly using step motion motivational techniques until reach
Target output displacement.
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| CN111181439A (en) * | 2020-02-24 | 2020-05-19 | 南京航空航天大学 | Surface mount type rotary dual-drive piezoelectric actuator and working method thereof |
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| CN105450081A (en) * | 2016-01-26 | 2016-03-30 | 哈尔滨工业大学 | Stepping peristalsis type driving and exciting method based on multi-piezoelectric-vibrator bending movement |
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| US7923898B2 (en) * | 2007-11-08 | 2011-04-12 | Taiyo Yuden Co., Ltd. | Piezo drive system |
| CN101262185A (en) * | 2008-04-29 | 2008-09-10 | 哈尔滨工业大学 | Bending layer energy converter round disk stator and ultrasonic electromotor using this stator |
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