CN107064565B - Magneto-electric-thermal multiparameter coupling microscope probe, preparation method and detection method thereof - Google Patents
Magneto-electric-thermal multiparameter coupling microscope probe, preparation method and detection method thereof Download PDFInfo
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- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 3
- 229920002492 poly(sulfone) Polymers 0.000 claims description 3
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
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- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
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- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
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- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 2
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- 229910000428 cobalt oxide Inorganic materials 0.000 claims 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 claims 1
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- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 claims 1
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- 229910045601 alloy Inorganic materials 0.000 description 2
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- KAGOZRSGIYZEKW-UHFFFAOYSA-N cobalt(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Co+3].[Co+3] KAGOZRSGIYZEKW-UHFFFAOYSA-N 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/14—Particular materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
The invention provides a magneto-electric-thermal multiparameter coupling microscope probe, which comprises a probe arm and a probe tip body connected with the probe arm, wherein a thermoelectric couple layer, a heat conduction insulating layer and a magnetic electric conduction layer are sequentially covered outwards from the surfaces of the probe arm and the probe tip body; the thermoelectric couple layer and an external circuit form a thermoelectric loop; the magnetic conductive layer and the sample and external circuit form a conductive loop. The probe has a simple structure and low preparation difficulty, can detect magnetic signals, electric signals and thermal signals of magneto-electric functional materials in situ in a micro-area, and can effectively avoid signal interference between a thermoelectric loop and an electric loop.
Description
Technical Field
The invention relates to a probe of a scanning probe microscope, in particular to a magnetic-electric-thermal multi-parameter coupling microscope probe, a preparation method and a detection method thereof.
Background
With the rapid development of information technology, the electronic components of integrated circuits tend to be miniaturized and integrated, and the size of the electronic components enters micro/nano scale, so that the problems of heat generation and heat dissipation become bottleneck problems for restricting further high integration. The physical properties related to heat are characterized in micro/nano scale, and the physical process of understanding heat generation and heat dissipation has become a brand new branch in modern thermal science, micro/nano scale thermal science. At the micro/nano scale, the microstructure and domain structure of the material (for magnetic, ferroelectric materials) are particularly important for thermal properties, and one micro-crack, hole, grain boundary, or even one domain wall may affect the thermal properties of the material. Taking multiferroic materials as an example, both magnetic/electric domain inversion (or domain wall movement) and leakage currents under external field drive cause micro-region heating. Although various technical means have been developed to study the parameters, so far, no technology and equipment can comprehensively characterize the parameters in situ-real time-synchronously, and the deep understanding of the physical mechanism of heating and heat dissipation in the material is limited, so that the heating and heat dissipation problem of the material in the micro/nano scale cannot be found out.
Atomic force microscopy is an important research means for researching nano science and technology, and has been developed rapidly. The scanning probe microscope technology is developed based on a scanning tunnel microscope, has the advantages of high spatial resolution, capability of changing temperature in various environments such as vacuum, atmosphere, even solution and the like, and can be widely applied to the research fields such as physics, chemistry, biology, electronics and the like. The surface morphology and other physical characteristics of the sample are detected by detecting various interaction forces or physical quantities such as current and the like between the probe and the surface of the sample, so that the technologies such as an atomic force microscope, a magnetic force microscope, a piezoelectric microscope, a conductive force microscope and the like are developed, and the method can be used for detecting the physical parameters such as the surface morphology, the domain structure, the micro-area conductivity and the like of the sample.
In recent years, a scanning thermal probe technology is developed, the scanning probe microscope technology is expanded to the field of thermal research, and the spatial distribution characterization and research of thermal properties such as material and device surface micro-area temperature, heat conduction and the like are realized. Although micro-area thermal imaging technology based on a scanning probe microscope has been developed, at present, thermal information can only be obtained singly based on the technology, and a plurality of information such as magnetic domain structures, ferroelectric/piezoelectric domain structures, conductive domain structures and the like cannot be obtained simultaneously in real time in situ, and especially the relevance of the time is unclear, so that magneto-electric-thermal coupling imaging cannot be performed, the deep understanding of the physical mechanism of heating and heat dissipation in the material is limited, and the heating and heat dissipation problems of the material in micro/nano scale cannot be found out.
The invention provides a novel nano magnetic-electric-thermal multi-parameter coupling microscope probe, which overcomes the limitations of the existing single magnetic, electric and thermal functional modules, develops a probe with magnetic-electric-thermal characteristic detection, is provided with a corresponding signal detection and processing system, and can realize in-situ characterization of magnetic domains, ferroelectric domains, micro-area conductivity, micro-area heating property changes and mutual correlation thereof. Therefore, in the field of nano-test technology, development of novel nano-characterization technology, especially probe characterization technology, is one of the research hotspots in the related research field at present.
Disclosure of Invention
Aiming at the state of the art, the invention provides a nano magnetic-electric-thermal multi-parameter coupling microscope probe which has a simple structure, can synchronously measure multiple physical parameters such as magnetic, electric, thermal and the like in situ, and realizes the research on the influence rule of magnetic domains and electric domains on thermal properties.
The technical scheme of the invention is as follows: a magneto-electric-thermal multiparameter coupling microscope probe comprises a probe arm and a needle tip body connected with the probe arm, wherein the tip of the needle tip body is used for being contacted with a sample or not contacted with the sample so as to measure a sample signal; the method is characterized in that: the surface of the needle tip body is outwards provided with a thermal couple layer, a heat conducting insulating layer and a magnetic conductive layer in sequence;
The thermocouple layer covers an area A and an area B on the surface of the needle tip body, the area except the area A and the area B on the surface of the needle tip body is a residual area, and the area A and the area B are non-overlapping areas and are connected at the tip end part of the needle tip body; the material of the covering area A is material A, the material of the covering area B is material B, and the material A is different from the material B and forms a thermoelectric loop with an external circuit;
The heat conduction insulating layer covers the thermocouple layer and the rest area of the surface of the needle tip body;
the magnetic electric conduction layer is positioned on the surface of the heat conduction insulating layer and at least covers the tip part of the needle tip body, and forms an electric conduction loop together with the sample and an external circuit.
The three-dimensional structure of the needle tip body is not limited, and can be a pyramid, a cone, a pyramid table, a round table and the like.
In order to improve the detection sensitivity, it is preferable that the region a and the region B are not connected except for the tip portion of the needle tip.
Preferably, the probe arm surface comprises a region A 'and a region B', wherein the region A 'and the region B' have no overlapping region, the region A 'is connected with the region A, and the region B' is connected with the region B; the external circuit comprises a material A covering the surface of the area A 'and a material B covering the surface of the area B'.
The material A and the material B have conductivity, the material A and the material B are connected to form a loop, and when the temperature of a connecting point changes, potential difference is generated in the thermocouple loop. The material A is not limited, and comprises one material or a combination of more than two materials of metal and semiconductor with good conductive performance, such as at least one of metals including palladium, gold, bismuth (Bi), nickel (Ni), cobalt (Co), potassium (K) and the like, and alloys thereof, and semiconductors including graphite, graphene and the like. The material B is not limited, and comprises one material or a combination of more than two materials of metal and semiconductor with good conductive performance, such as at least one of metals including palladium, gold, bismuth (Bi), nickel (Ni), cobalt (Co), potassium (K) and the like, and alloys thereof, and semiconductors including graphite, graphene and the like.
The heat conduction and insulation have heat conduction and electrical insulation, and the materials are not limited, and include semiconductors, inorganic materials or organic materials with certain insulation performance, such as at least one of zinc oxide (ZnO), bismuth ferrite (BiFeO 3), lithium cobaltate (LiCoO 2), nickel oxide (NiO), cobalt oxide (Co 2O3), copper oxide (Cu x O), silicon dioxide (SiO 2), silicon nitride (SiN x), titanium dioxide (TiO 2), tantalum pentoxide (Ta 2O5), niobium pentoxide (Nb 2O5), tungsten oxide (WO x), hafnium dioxide (HfO 2), aluminum oxide (Al 2O3), graphene oxide, amorphous carbon, copper sulfide (Cu x S), silver sulfide (Ag 2 S), amorphous silicon, titanium nitride (TiN), polyimide (PI), polyamide (PAI), polysilxifylline (PA), polysulfone (PS) and the like.
The magnetic conductive layer has magnetism and conductivity, and materials of the magnetic conductive layer are not limited, and the magnetic conductive layer comprises ferromagnetic metals such as iron (Fe), cobalt (Co), nickel (Ni), magnetic alloy and the like.
In order to facilitate the connection of an external circuit, the ferromagnetic conductive layer can also cover other parts of the needle tip body except the tip part. As an implementation, in the working state, the ferromagnetic conductive layer is in contact with the sample, the sample is grounded, and the external circuit is connected to the ferromagnetic conductive layer, i.e. the external circuit, the ferromagnetic conductive layer, the sample and the ground form an electrical loop for measuring the electrical signal of the sample.
The invention also provides a method for preparing the magneto-electric-thermal multiparameter coupling microscope probe, which comprises the following steps:
Step 1: depositing a material A on the surface of the area A of the needle tip body and depositing a material B on the surface of the area B by utilizing a magnetron sputtering technology to obtain a thermoelectric couple layer;
step 2: depositing a heat conduction insulating layer on the surface of the thermocouple layer and the surface of the rest area except the area A and the area B on the surface of the needle tip body by utilizing a magnetron sputtering technology or a pulse laser technology;
Step 3: and depositing a magnetic conductive layer on the surface of the heat conducting insulating layer by utilizing a magnetron sputtering technology.
The magnetic-electric-thermal multi-parameter coupling microscope probe can be used for detecting the morphology, magnetic signals, electric signals and thermal signals of a sample, and the detection method comprises the following steps:
(1) Surface topography and magnetic signal detection of a sample
A contact mode is employed.
The probe driving unit drives the probe to enable the tip of the needle tip body to move to a certain initial position on the surface of the sample, the probe performs directional scanning on the surface of the sample from the initial position, the tip of the needle tip body is controlled to be in point contact or vibration point contact with the surface of the sample in the scanning process, displacement signals or vibration signals of the needle tip body are collected, and morphology signals of the sample are obtained through analysis;
and the probe returns to the initial position and is lifted upwards for a certain distance, then the surface of the sample is scanned according to the orientation, the tip of the needle tip body is controlled to displace or vibrate along the morphology image in the scanning process, the displacement signal or vibration signal of the needle tip body is collected, and the magnetic signal image of the sample is obtained through analysis.
(2) Thermal signal detection of a sample
The external circuit and the thermocouple layer of the probe form a closed thermoelectric loop, and when the temperature of the connecting point changes, the potential difference changes in the thermocouple loop. When the tip of the needle tip body is contacted with the surface of the sample, the heat exchange is carried out between the needle tip body and the sample through each cover layer of the tip, so that the potential difference in the thermal loop is changed, and a thermal signal image of the sample is obtained through collection and analysis.
(3) Electrical signal detection of a sample
The tip of the needle tip body is contacted with the surface of the sample, an external circuit, the magnetic conductive layer of the probe and the sample form a closed electrical loop, namely, an electrical signal flows into the magnetic conductive layer of the probe and the sample to form a voltage signal, and an electrical signal image of the sample is obtained through collection and analysis.
Compared with the prior art, the thermoelectric couple layer and the external power supply are independently formed into the thermoelectric loop, the sample to be tested, the magnetic conductive layer and the external power supply are independently formed into the electric loop, and the heat conduction insulating layer is arranged between the thermal resistance layer and the magnetic conductive layer, so that signal interference between the thermoelectric loop and the electric loop is effectively blocked, and in-situ micro-zone detection of magnetic signals, electric signals and thermal signals of the magnetoelectric functional material can be realized, including in-situ micro-zone detection of the magnetic signals, the electric signals and the thermal signals under micrometer and nanometer scales.
Drawings
FIG. 1 is a schematic diagram showing the front structure of a probe arm and a tip body of a magneto-electro-thermal multiparameter coupling microscope probe according to embodiment 1 of the present invention;
FIG. 2 is a schematic side elevational view of FIG. 1;
FIG. 3 is an enlarged schematic view of a thermocouple layer on the surface of the needle tip body shown in FIG. 1;
FIG. 4 is a schematic diagram of the structure of the thermocouple layer and a portion of the external circuit shown in FIG. 3;
FIG. 5 is a schematic view of the structure of the probe shown in FIG. 4 with a thermally conductive and insulating layer covering the surface thereof;
Fig. 6 and 7 are schematic views of the structure of the probe shown in fig. 5 with a magnetically conductive layer covering the surface.
Wherein: 1 probe arm, 2 needle tip body, 3 needle tip body one side, 4 needle tip body another side, 5 needle tip body front, 6 needle tip body back, 7 heat conduction insulating layer, 8 magnetism conducting layer.
Detailed Description
The invention is described in further detail below in connection with the following examples, which are intended to facilitate an understanding of the invention and are not to be construed as limiting the invention in any way.
Example 1:
In this embodiment, a commercially available uncoated Si probe is selected, and the structure of the uncoated Si probe is shown in fig. 1, and the uncoated Si probe includes a probe arm 1 and a tip body 2 connected to the probe arm 1. As shown in fig. 1 and 2, the needle tip body 2 has a tetrahedral pyramid structure and is composed of a front surface 5, a back surface 6 opposite to the front surface, and two side surfaces 3 and 4.
As shown in fig. 3, the surface of the needle tip body is divided into a region a, a region B, and the regions other than the region a and the region B are the remaining regions. The area filled with the lines in the surface of the needle tip body in fig. 3 is area a (i.e. one side 3 of the needle tip body) and the rectangular filled area is area B (i.e. the other side 4 of the needle tip body), the area a and the area B being non-overlapping and being connected only at the tip portion of the needle tip body.
As shown in fig. 4, the probe arm surface includes a region a 'and a region B', the line of the probe arm surface fills the region a 'in fig. 4, the rectangular fills the region B', the area a 'has no overlapping area and is not connected with the area B', the area a 'is connected with the area a, and the area B' is connected with the area B.
The following coating layer was prepared on the surface of the probe.
(1) The uncoated Si probe was cleaned with an ultrasonic wave of 50000Hz for 5min.
(2) As shown in fig. 3, a mask plate with a specific shape and size is designed, platinum is plated on the surface of the area a, and gold is plated on the surface of the area B by using a magnetron sputtering technology or a pulse laser technology, so as to form a thermoelectric couple layer. As shown in fig. 4, platinum is evaporated on the surface of the region a ', and gold is evaporated on the surface of the region B', thereby forming a part of the external circuit. The thermoelectric couple layer and the external circuit form a thermoelectric loop for measuring a thermal signal of the sample.
(3) As shown in fig. 5, silicon dioxide is deposited on the surface of the thermocouple layer and the surface of the rest area (namely, the front surface 5 and the back surface 6 of the needle tip body) except the area a and the area B on the surface of the needle tip body by utilizing a magnetron sputtering technology or a pulse laser technology to obtain a heat conduction insulating layer 7, as shown by filling transverse lines in fig. 5;
(4) As shown in fig. 6, an iron-based magnetic conductive layer 8 is deposited on the surface of the thermocouple layer by using a magnetron sputtering technology or a pulse laser technology, and is filled with grid lines in fig. 6. The ferromagnetic conductive layer is communicated with an external circuit, and in a working state, the ferromagnetic conductive layer is contacted with the sample, the sample is grounded, and the external circuit is communicated with the ferromagnetic conductive layer, namely, the external circuit, the ferromagnetic conductive layer, the sample and the ground form an electric loop for measuring the electric signal of the sample.
When the probe prepared by the method is used for detecting the morphology, magnetic signals, thermal signals and electric signals of the sample, the detection method is as follows:
(1) For detecting surface topography and magnetic signals of a sample
The probe driving unit drives the probe to enable the tip of the probe tip body to move to a certain initial position on the surface of the sample, the probe performs directional scanning on the surface of the sample along the transverse direction from the initial position, the tip of the probe tip body is controlled to be in point contact or vibration point contact with the surface of the sample in the scanning process, longitudinal displacement signals or vibration signals of the probe tip body are collected, and the appearance signals of the sample are obtained through analysis;
The probe returns to the initial position and is lifted upwards for a certain distance, then the surface of the sample is scanned according to the transverse orientation, the tip of the needle tip body is controlled to longitudinally displace or vibrate along the morphology image in the scanning process, the longitudinal displacement signal or vibration signal of the needle tip body is collected, and the magnetic signal image of the sample is obtained through analysis;
(2) Thermal signal for detecting a sample
The external circuit and the thermocouple layer of the probe form a closed thermal loop, and when the temperature of the connection point of the tip of the needle point changes, the thermocouple loop generates potential difference change; the probe driving unit drives the probe to move to a certain position on the surface of the sample, so that the tip of the needle tip body is contacted with the surface of the sample, the needle tip body performs heat exchange with the sample through each covering layer, the potential signal in the thermal loop is changed, and a thermal signal image of the sample is obtained through collection and analysis;
(3) Electrical signal for detecting a sample
The probe driving unit drives the probe to move to a certain position on the surface of the sample, so that the tip of the needle tip body is contacted with the surface of the sample, an external circuit, the magnetic conductive layer of the probe and the sample form a closed electrical loop, namely, an electrical signal flows into the magnetic conductive layer of the probe and the sample to form a voltage signal, and an electrical signal image of the sample is obtained through collection and analysis.
Example 2:
in this example, the probe structure is substantially the same as the Si probe structure in example 1, with the only difference that the step (4) is as follows:
As shown in fig. 7, an iron-based magnetic conductive layer 8 is deposited on the surface of the thermocouple layer by using a magnetron sputtering technology or a pulse laser technology, and is filled with grid lines in fig. 7. That is, compared to fig. 6, the iron-based magnetic conductive layer 8 in fig. 7 covers the entire front surface of the probe tip and covers the front end of the probe body, which facilitates the communication of the magnetic conductive layer to an external circuit. When in working state, the ferromagnetic conductive layer is in contact with the sample, the sample is grounded, and the external circuit is communicated with the ferromagnetic conductive layer, namely, the external circuit, the ferromagnetic conductive layer, the sample and the ground form an electric loop for measuring the electric signal of the sample.
While the foregoing embodiments have been described in detail in connection with the embodiments of the invention, it should be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and any modifications, additions, substitutions and the like made within the principles of the invention are intended to be included within the scope of the invention.
Claims (8)
1. A magneto-electric-thermal multiparameter coupling microscope probe comprises a probe arm and a needle tip body connected with the probe arm, wherein the tip of the needle tip body is used for being contacted with a sample or not contacted with the sample so as to measure a sample signal; the method is characterized in that: the surface of the needle tip body is outwards provided with a thermal couple layer, a heat conducting insulating layer and a magnetic conductive layer in sequence;
The thermocouple layer covers an area A and an area B on the surface of the needle tip body, the area of the surface of the needle tip body except the area A and the area B is a residual area, the area A and the area B are not overlapped and are connected at the tip part of the needle tip body, and the area A and the area B are not connected except the tip part of the needle tip; the material of the covering area A is material A, the material of the covering area B is material B, the material A is different from the material B, a thermoelectric loop is formed by the material A and an external circuit, the material A is deposited on the surface of the area A of the needle tip body by utilizing a magnetron sputtering technology, and the material B is deposited on the surface of the area B; the probe arm surface comprises a region A 'and a region B', wherein the region A 'and the region B' are non-overlapped, the region A 'is connected with the region A, and the region B' is connected with the region B; the external circuit comprises a material A covering the surface of the area A 'and a material B covering the surface of the area B'; when the tip of the needle tip body is contacted with the surface of the sample, the heat exchange is carried out between the needle tip body and the sample through each cover layer of the tip, so that the potential difference in the thermal loop is changed, and a thermal signal image of the sample is obtained through collection and analysis;
The heat conduction insulating layer covers the thermocouple layer and the rest area of the surface of the needle tip body;
the magnetic electric conduction layer is positioned on the surface of the heat conduction insulating layer and at least covers the tip part of the needle tip body, and forms an electric conduction loop together with the sample and an external circuit.
2. The magneto-electro-thermal multiparameter coupling microscope probe of claim 1, wherein: the three-dimensional structure of the needle tip body comprises a pyramid, a cone, a pyramid platform and a truncated cone.
3. The magneto-electro-thermal multiparameter coupling microscope probe of claim 1, wherein: the material A is one material or a combination material of more than two materials selected from metal and semiconductor with good conductive performance;
The material B is one material or a combination material of more than two materials selected from metal and semiconductor with good conductive performance.
4. The magneto-electro-thermal multiparameter coupling microscope probe of claim 1, wherein: the material A comprises one or more than two of palladium, gold, bismuth, nickel, cobalt, potassium, graphite and graphene; the material B comprises one or more than two of palladium, gold, bismuth, nickel, cobalt, potassium, graphite and graphene.
5. The magneto-electro-thermal multiparameter coupling microscope probe of claim 1, wherein: the heat conduction insulating layer material comprises one or more than two of zinc oxide, bismuth ferrite, lithium cobaltate, nickel oxide, cobalt oxide, copper oxide, silicon dioxide, silicon nitride, titanium dioxide, tantalum pentoxide, niobium pentoxide, tungsten oxide, hafnium dioxide, aluminum oxide, graphene oxide, amorphous carbon, copper sulfide, silver sulfide, amorphous silicon, titanium nitride, polyimide, polyamide, polysilsesquioxane and polysulfone.
6. The magneto-electro-thermal multiparameter coupling microscope probe of claim 1, wherein: the magnetic conductive layer material comprises ferromagnetic metals such as iron, cobalt, nickel and magnetic alloy.
7. The method for preparing the magneto-electric-thermal multiparameter coupling microscope probe according to any one of claims 1 to 6, wherein the method comprises the following steps: the method comprises the following steps:
Step 1: depositing a material A on the surface of the area A of the needle tip body and depositing a material B on the surface of the area B by utilizing a magnetron sputtering technology to obtain a thermoelectric couple layer;
step 2: depositing a heat conduction insulating layer on the surface of the thermocouple layer and the surface of the rest area except the area A and the area B on the surface of the needle tip body by utilizing a magnetron sputtering technology or a pulse laser technology;
Step 3: and depositing a magnetic conductive layer on the surface of the heat conducting insulating layer by utilizing a magnetron sputtering technology.
8. The method for detecting the morphology and magnetic signals, thermal signals and electrical signals of a sample by using the magneto-electric-thermal multi-parameter coupling microscope probe according to any one of claims 1 to 6 comprises the following steps:
(1) Surface topography and magnetic signal detection of a sample
The method comprises the steps that a contact mode is adopted, the tip of a needle tip body is displaced to a certain initial position of a sample surface, directional scanning is conducted on the sample surface from the initial position, the tip of the needle tip body is controlled to be in point contact or vibration point contact with the sample surface in the scanning process, displacement signals or vibration signals of the needle tip body are collected, and appearance signals of the sample are obtained through analysis;
The probe returns to the initial position and is lifted upwards for a certain distance, then the surface of the sample is scanned according to the orientation, the tip of the needle tip body is controlled to displace or vibrate along the morphology image in the scanning process, the displacement signal or vibration signal of the needle tip body is collected, and the magnetic signal image of the sample is obtained through analysis;
(2) Thermal signal detection of a sample
The external circuit and the thermocouple layer of the probe form a closed thermoelectric loop, when the temperature of the connecting point changes, the potential difference in the thermocouple loop changes, when the tip of the needle tip body is contacted with the surface of the sample, the needle tip body and the sample are subjected to heat exchange through each cover layer of the tip, so that the potential signal in the thermal loop changes, and a thermal signal image of the sample is obtained through collection and analysis;
(3) Electrical signal detection of a sample
The tip of the needle tip body is contacted with the surface of the sample, an external circuit, the magnetic conductive layer of the probe and the sample form a closed electrical loop, namely, an electrical signal flows into the magnetic conductive layer of the probe and the sample to form a voltage signal, and an electrical signal image of the sample is obtained through collection and analysis.
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| CN110333372A (en) * | 2019-07-18 | 2019-10-15 | 中国科学院宁波材料技术与工程研究所 | A kind of magnetic scanning microscope probe and preparation method thereof |
| CN113504394B (en) * | 2021-07-12 | 2024-01-23 | 中国科学院半导体研究所 | Wafer level preparation method of coating probe and coating probe |
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