CN107063514A - The pressure sensor and its method of work of a kind of utilization electrostatic principle - Google Patents
The pressure sensor and its method of work of a kind of utilization electrostatic principle Download PDFInfo
- Publication number
- CN107063514A CN107063514A CN201710406405.9A CN201710406405A CN107063514A CN 107063514 A CN107063514 A CN 107063514A CN 201710406405 A CN201710406405 A CN 201710406405A CN 107063514 A CN107063514 A CN 107063514A
- Authority
- CN
- China
- Prior art keywords
- cantilever beam
- drive block
- pressure sensor
- film
- conductive drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/08—Measuring force or stress, in general by the use of counterbalancing forces
- G01L1/086—Measuring force or stress, in general by the use of counterbalancing forces using electrostatic or electromagnetic counterbalancing forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
Abstract
The invention discloses a kind of pressure sensor of utilization electrostatic principle, including substrate, film, conductive drive block and cantilever beam, the top of substrate is provided with cavity, film is fixedly connected on the top surface of substrate, and film covering cavity, conductive drive block is fixedly connected on the top surface of film, and cantilever beam is fixedly connected on the top surface of substrate, and cantilever beam is located at the top of conductive drive block.The pressure sensor structure is simple.The embodiment of the present invention also provides the method for work of pressure sensor, take full advantage of the principle of electrostatic induction, it is to avoid the defect of conventional pressure sensor.The occasion of voltage and testing current is being appropriate for, pressure measxurement is carried out using the sensor of the present embodiment, it is very convenient.
Description
Technical field
The present invention relates to a kind of pressure sensor, it particularly relates to a kind of pressure sensor of utilization electrostatic principle and
Its method of work.
Background technology
In the product realized using silicon micromachining technology, pressure sensor is the earliest class of development.Traditional pressure
Sensor has a pressure resistance type, condenser type, resonant mode etc., and different occasions are can be applied to according to feature.Conventional pressure sensor resistance is deposited
In temperature drift, the shortcomings of small capacitance detection difficulty is big.
The content of the invention
Technical problem：The technical problem to be solved in the invention is to provide a kind of pressure sensor of utilization electrostatic principle
And its method of work, to avoid conventional pressure sensor resistance from there is temperature drift, the shortcomings of small capacitance detection difficulty is big.
Technical scheme：In order to solve the above technical problems, the technical scheme that the embodiment of the present invention is used is：
A kind of pressure sensor of utilization electrostatic principle, including substrate, film, conductive drive block and cantilever beam, substrate
Top is provided with cavity, and film is fixedly connected on the top surface of substrate, and film covering cavity, and conductive drive block is fixedly connected on film
Top surface, cantilever beam is fixedly connected on the top surface of substrate, and cantilever beam is located at the top of conductive drive block.
As preference, described cantilever beam includes connecting portion and horizontal part, and one end of connecting portion and horizontal part, which are fixed, to be connected
Connect, the other end of connecting portion is fixedly connected on substrate surface, and horizontal position is in the surface of conductive drive block.
As preference, the conductive drive block is located at directly over cavity.
The embodiment of the present invention also provides a kind of method of work of pressure sensor, and the method for work includes：Work as ambient pressure
When being applied to sensor surface, film bends, and the spacing of cantilever beam and conductive drive block changes, then in cantilever beam
Apply driving voltage between conductive drive block, electrostatic attraction is produced between cantilever beam and conductive drive block, with driving voltage
Increase, electrostatic attraction also increases；When driving voltage increases to certain value, make to inhale between cantilever beam and conductive drive block
Phenomenon is closed, now corresponding driving voltage is pick-up voltage, conductive drive block and cantilever beam occur adhesive phenomenon and contacted one
It is operating current to act the electric current produced, according to the operating current, obtains ambient pressure value.
Beneficial effect：Compared with prior art, the invention has the advantages that：The embodiment of the present invention is simple in construction.
The pressure sensor of the embodiment of the present invention, including substrate, film, conductive drive block and cantilever beam.The conduction of the embodiment of the present invention
Drive block, take full advantage of the principle of electrostatic induction, it is to avoid the defect of conventional pressure sensor.It is being appropriate for voltage and electricity
The occasion of current test, pressure measxurement is carried out using the sensor of the present embodiment, very convenient.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Have in figure：Substrate 1, film 2, conductive drive block 3, cantilever beam 4, cavity 101.
Embodiment
Below in conjunction with the accompanying drawings, the technical scheme to the embodiment of the present invention is described in detail.
As shown in figure 1, a kind of pressure sensor of utilization electrostatic principle of the embodiment of the present invention, including substrate 1, film 2,
Conductive drive block 3 and cantilever beam 4.The top of substrate 1 is provided with cavity 101.Film 2 is fixedly connected on the top surface of substrate 1, and film
2 covering cavitys 101.Conductive drive block 3 is fixedly connected on the top surface of film 2.Cantilever beam 4 is fixedly connected on the top surface of substrate 1, and
Cantilever beam 4 is located at the top of conductive drive block 3.
In the pressure sensor of above-described embodiment, drive block 3 and cantilever beam 4 constitute upper/lower electrode.Operationally, the external world is worked as
When pressure is applied to sensor surface, film 2 bends, and the spacing of cantilever beam 4 and conductive drive block 3 changes, then
Apply driving voltage between cantilever beam 4 and conductive drive block 3, electrostatic attraction produced between cantilever beam 4 and conductive drive block 3,
With the increase of driving voltage, electrostatic attraction also increases；When driving voltage increases to certain value, cantilever beam is set to be driven with conductive
Adhesive phenomenon occurs between block, now corresponding driving voltage is pick-up voltage, adhesive occurs for conductive drive block 3 and cantilever beam 4
The electric current of phenomenon and the generation that contacts is operating current, according to the operating current, obtains ambient pressure value.
In the above-mentioned course of work, the electric current for the generation that contacts due to drive block 3 and the generation adhesive phenomenon of cantilever beam 4
For operating current I.The initial spacing g of the size and two-plate of pick-up voltage and operating current0There is substantial connection.Due to different
Pressure P can cause the deformation quantity of film 2 different so that g0It is of different sizes, so occur adhesive phenomenon when driving voltage Vin
Also it is different.That is, driving voltage VinIt is one-to-one relation between ambient pressure P.As shown in table 1.
Table 1
| Occurs driving voltage V during adhesive phenomenonin | Ambient pressure P |
| Vin1 | P1 |
| Vin2 | P2 |
| … | … |
As long as measuring driving voltage V when occurring adhesive phenomenonin, it is possible to ambient pressure P is measured, is reached pressure sensing
Effect.
In above-described embodiment, the structure of cantilever beam 4 can have a variety of.Preferably, described cantilever beam 4 includes connecting portion
And horizontal part, one end of connecting portion is fixedly connected with horizontal part, and the other end of connecting portion is fixedly connected on the top surface of substrate 1, and water
Flat portion is located at the surface of conductive drive block 3.The cantilever beam 4 of this structure is simple in construction.The horizontal part of cantilever beam 4 and conductive driving
Adhesive phenomenon occurs between block 3.
As preference, the conductive drive block 3 is located at directly over cavity 101.Ambient pressure is acted on film 2, and
Film 2 is located at directly over cavity 101, can occur obvious displacement.Therefore, conductive drive block 3 also be located at cavity 101 just on
Side so that adhesive phenomenon easily occurs for conductive drive block 3 and cantilever beam 4.
The pressure sensor of the embodiment of the present invention, pressure sensitive film is used as using the film 2 on substrate 1.The embodiment of the present invention
Conductive drive block and cantilever beam are set, using conductive drive block as conductor.So when cantilever beam is deformed upon, just it can utilize quiet
Electric principle is measured to pressure.Amount of pressure is easily converted into electrical quantities using electrostatic principle and measured by the present embodiment.
It is easy to operate that is, will be measurement to electric current to the measures conversion of pressure, it is adapted to various be convenient for measuring voltage and electric current
Occasion.
The basic principles, principal features and advantages of the present invention have been shown and described above.Those skilled in the art should
Understand, the present invention do not limited by above-mentioned specific embodiment, the description in above-mentioned specific embodiment and specification be intended merely into
One step illustrate the present invention principle, without departing from the spirit and scope of the present invention, the present invention also have various change and
Improve, these changes and improvements all fall within the protetion scope of the claimed invention.The scope of protection of present invention will by right
Ask book and its equivalent thereof.
Claims (4)
1. a kind of pressure sensor of utilization electrostatic principle, it is characterised in that the pressure sensor includes substrate (1), film
(2), conductive drive block (3) and cantilever beam (4), the top of substrate (1) are provided with cavity (101), and film (2) is fixedly connected on substrate
(1) top surface, and film (2) covering cavity (101), conductive drive block (3) are fixedly connected on the top surface of film (2), cantilever beam
(4) top surface of substrate (1) is fixedly connected on, and cantilever beam (4) is located at the top of conductive drive block (3).
2. according to the pressure sensor of the utilization electrostatic principle described in claim 1, it is characterised in that described cantilever beam (4)
Including connecting portion and horizontal part, one end of connecting portion is fixedly connected with horizontal part, and the other end of connecting portion is fixedly connected on substrate
(1) top surface, and horizontal position is in the surface of conductive drive block (3).
3. according to the pressure sensor of the utilization electrostatic principle described in claim 1 or 2, it is characterised in that the conductive driving
Block (3) is located at directly over cavity (101).
4. the method for work of pressure sensor described in a kind of claim 1, it is characterised in that the method for work includes：Work as the external world
When pressure is applied to sensor surface, film (2) bends, and cantilever beam (4) and the spacing of conductive drive block (3) change
Become, then apply driving voltage between cantilever beam (4) and conductive drive block (3), cantilever beam (4) and conduction drive block (3) it
Between produce electrostatic attraction, with the increase of driving voltage, electrostatic attraction also increases；When driving voltage increases to certain value, make
Occurs adhesive phenomenon between cantilever beam and conductive drive block, now corresponding driving voltage is pick-up voltage, conductive drive block (3)
The electric current for occurring adhesive phenomenon and the generation that contacts with cantilever beam (4) is operating current, according to the operating current, is obtained
Ambient pressure value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710406405.9A CN107063514A (en) | 2017-06-01 | 2017-06-01 | The pressure sensor and its method of work of a kind of utilization electrostatic principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710406405.9A CN107063514A (en) | 2017-06-01 | 2017-06-01 | The pressure sensor and its method of work of a kind of utilization electrostatic principle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107063514A true CN107063514A (en) | 2017-08-18 |
Family
ID=59615583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710406405.9A Pending CN107063514A (en) | 2017-06-01 | 2017-06-01 | The pressure sensor and its method of work of a kind of utilization electrostatic principle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107063514A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114323408A (en) * | 2021-11-15 | 2022-04-12 | 歌尔微电子股份有限公司 | Multi-range multi-sensitivity pressure MEMS chip |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060075836A1 (en) * | 2004-10-13 | 2006-04-13 | Anis Zribi | Pressure sensor and method of operation thereof |
| CN101577174A (en) * | 2009-03-20 | 2009-11-11 | 北京大学 | MEMS adjustable inductor of static driving conductor thin film and manufacturing method thereof |
| CN104108678A (en) * | 2013-04-22 | 2014-10-22 | 精工爱普生株式会社 | Mems Pressure Sensor, Electronic Device, Altimeter, Electronic Apparatus, And Moving Object |
| CN105293417A (en) * | 2014-05-26 | 2016-02-03 | 精工爱普生株式会社 | MEMS structure, electronic apparatus, and moving object |
-
2017
- 2017-06-01 CN CN201710406405.9A patent/CN107063514A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060075836A1 (en) * | 2004-10-13 | 2006-04-13 | Anis Zribi | Pressure sensor and method of operation thereof |
| CN101577174A (en) * | 2009-03-20 | 2009-11-11 | 北京大学 | MEMS adjustable inductor of static driving conductor thin film and manufacturing method thereof |
| CN104108678A (en) * | 2013-04-22 | 2014-10-22 | 精工爱普生株式会社 | Mems Pressure Sensor, Electronic Device, Altimeter, Electronic Apparatus, And Moving Object |
| CN105293417A (en) * | 2014-05-26 | 2016-02-03 | 精工爱普生株式会社 | MEMS structure, electronic apparatus, and moving object |
Non-Patent Citations (2)
| Title |
|---|
| 张敏亮 等: "ZnO压电薄膜微悬臂梁的结构设计及研究", 《机械制造》 * |
| 聂萌 等: "多层悬臂梁静电作用下的弯曲及吸合电压分析", 《机械工程学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114323408A (en) * | 2021-11-15 | 2022-04-12 | 歌尔微电子股份有限公司 | Multi-range multi-sensitivity pressure MEMS chip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104792255B (en) | A kind of film thickness test device and film thickness test method | |
| CN103344377B (en) | Capacitive barometric sensor of micro electro mechanical system | |
| CN203365045U (en) | Capacitive air pressure sensor of microelectronic mechanical system | |
| CN104266780B (en) | A kind of flexible force sensor measuring normal direction and tangential force | |
| CN103487474B (en) | A kind of have the MEMS capacitive humidity sensor that high sensitivity quickly responds | |
| CN201653604U (en) | Pressure sensor | |
| CN103018289B (en) | Capacitive humidity sensor | |
| CN106017751A (en) | High-sensitivity piezoresistive pressure sensor and preparation method thereof | |
| CN103111492B (en) | Method for calibrating hitting force of pressure machine in real time | |
| CN107036739A (en) | The pressure sensor and its method of work of a kind of utilization piezoelectric principle measurement pressure | |
| CN103792267A (en) | Differential capacitive humidity sensor | |
| CN204964077U (en) | Pressure drag formula pressure sensor pressure detection circuit | |
| CN102723432B (en) | Piezoelectric driving device integrating resistor strain sheet-type sensor and manufacture method thereof | |
| CN107063514A (en) | The pressure sensor and its method of work of a kind of utilization electrostatic principle | |
| CN105136352A (en) | Capacitive pressure sensor and preparation method thereof | |
| CN104568304B (en) | One kind enhancing strain force sensor data collecting system | |
| CN105759130A (en) | Measurement device and measurement method for piezoelectric coefficient d33 of nanowire | |
| CN209470838U (en) | A kind of flexible-packed battery leak test mechanism | |
| CN115575661A (en) | Two-dimensional capacitance differential MEMS wind speed and direction sensor | |
| CN107037108B (en) | Using MoS2The method of film F ET detection glucose concentration | |
| CN106441694A (en) | Fluid pressure sensor | |
| CN108362407A (en) | Capacitance pressure transducer, and pressure measurement circuitry | |
| CN209181802U (en) | A kind of beam type paper base sensor | |
| CN107246928A (en) | The pressure sensor and its method of work of a kind of utilization electromagnetic principle | |
| CN203732596U (en) | Glass glaze high voltage division resistor for voltage transformer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170818 |
|
| RJ01 | Rejection of invention patent application after publication |