CN102723432B - Piezoelectric driving device integrating resistor strain sheet-type sensor and manufacture method thereof - Google Patents
Piezoelectric driving device integrating resistor strain sheet-type sensor and manufacture method thereof Download PDFInfo
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- CN102723432B CN102723432B CN201210227383.7A CN201210227383A CN102723432B CN 102723432 B CN102723432 B CN 102723432B CN 201210227383 A CN201210227383 A CN 201210227383A CN 102723432 B CN102723432 B CN 102723432B
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 4
- 239000004020 conductor Substances 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 9
- 238000003475 lamination Methods 0.000 abstract 4
- 238000002360 preparation method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a piezoelectric driving device integrating a resistor strain sheet-type sensor and a manufacture method thereof, relates to the piezoelectric driving device and the manufacture method, and solves the problem that the existing lamination pile type piezoelectric ceramic causes nonlinear displacement in a movement process due to delaying and creep property. The piezoelectric driving device comprises a lamination pile type piezoelectric ceramic and the resistor strain sheet-type sensor, two opposite first long lateral surfaces of the annular lamination pile type piezoelectric ceramic are respectively provided with an electrode lead, the resistor strain sheet-type sensor is simultaneously pasted on the other two second long lateral surfaces of the rectangular of the lamination pile type piezoelectric ceramic adjacent to the two first long side surfaces respectively, or the resistor strain sheet-type sensor is pasted on any second long lateral surface, a substrate of the resistor strain sheet-type sensor is pasted on the second long lateral surfaces, and a lead located on any long lateral face of the two first long lateral surfaces is welded on the resistor strain sheet-type sensor. The piezoelectric driving device is used in the field of precision positioning.
Description
Technical field
The present invention relates to a kind of Piexoelectric actuator and preparation method thereof, be specifically related to Piexoelectric actuator of integrated resistor strain-gauge transducer on a kind of piezoelectric ceramic and preparation method thereof.
Background technology
Existing laminate stack formula piezoelectric ceramic has highly sensitive, and fast response time is exerted oneself greatly and the little characteristics of energy consumption.But, existing laminate stack formula piezoelectric ceramic exists lagging characteristics and creep properties, when applied voltage, the change in displacement of laminate stack formula piezoelectric ceramic presents nonlinear Distribution, and can follow the prolongation of time and constantly change at the given voltage bottom offset, having a strong impact on the application of laminate stack formula piezoelectric ceramic in the precision positioning field.
Summary of the invention
The objective of the invention is for solving existing laminate stack formula piezoelectric ceramic due to the sluggishness and the creep properties that exist, cause displacement in motion process to be nonlinear problem, and then Piexoelectric actuator of a kind of integrated resistor strain-gauge transducer and preparation method thereof is provided.
The present invention addresses the above problem the technical scheme of taking to be:
The Piexoelectric actuator of a kind of integrated resistor strain-gauge transducer of the present invention comprises laminate stack formula piezoelectric ceramic and resistance strain-gauge transducer, described laminate stack formula piezoelectric ceramic be shaped as rectangle, be shaped as on two first relative long side surfaces of laminate stack formula piezoelectric ceramic of rectangle and there is respectively a contact conductor, be shaped as rectangle laminate stack formula piezoelectric ceramic be bonded with resistance strain-gauge transducer on adjacent two other second long side surface respectively with two the first long side surfaces simultaneously, or be bonded with resistance strain-gauge transducer on any one second long side surface on described two the second long side surfaces, on the substrate of resistance strain-gauge transducer the bonding second long side surface, be welded with the lead-in wire of any one long side surface that is arranged in two the first long side surfaces on resistance strain-gauge transducer.
The concrete steps of the manufacture method of the Piexoelectric actuator of realizing a kind of integrated resistor strain-gauge transducer of the present invention are:
Step 1, preliminary treatment, all clean the surface of laminate stack formula piezoelectric ceramic and the surface of resistance strain-gauge transducer, after cleaning, places dry;
Step 2, location, utilize scriber laminate stack formula piezoelectric ceramic and the first long side surfaces two contact conductor places mark on adjacent two the second long side surfaces respectively simultaneously or any one second long side surface on mark the sticking area of resistance strain-gauge transducer, sticking area is cleaned and dries in time;
Step 3, stickup, stick on resistance strain-gauge transducer in the sticking area separately of determining through step 2;
Step 4, curing, clamp the resistance strain-gauge transducer of having pasted in step 3, the laminate stack formula piezoelectric ceramic that is pasted with resistance strain-gauge transducer put into to drying baker and solidify;
Step 5, inspection, the sticking Quality of the resistance strain-gauge transducer of inspection after step 4 is solidified;
Step 6, wire bonds, at the solder joint place of the resistance strain-gauge transducer after step 5 checks welding lead, make the Piexoelectric actuator of integrated resistor strain-gauge transducer.
The invention has the beneficial effects as follows: the present invention is due to the integrated resistor strain-gauge transducer, utilize the resistance strain-gauge transducer own characteristic can make the moving displacement of former laminate stack formula piezoelectric ceramic be linear change by nonlinear compensation, can realize compensating lagging characteristics and the creep properties of former piezoelectric ceramic.It is simple that the present invention has method, advantage reasonable in design, that manufacturing cost is lower, solved sluggishness and creep properties that former laminate stack formula piezoelectric ceramic exists, and displacement is nonlinear problem in motion process, product of the present invention can meet the application requirements in precision positioning field.
The accompanying drawing explanation
Fig. 1 is the perspective view of a kind of Piexoelectric actuator of the present invention, Fig. 2 is the perspective view of another kind of Piexoelectric actuator of the present invention, Fig. 3 is driving voltage and the output displacement graph of a relation before the Piexoelectric actuator compensation that makes of the present invention, and Fig. 4 is given displacement after the Piexoelectric actuator compensation that makes of the present invention and the graph of a relation of measured displacements.
Embodiment
Embodiment one: present embodiment is described in conjunction with Fig. 1 and Fig. 2, the Piexoelectric actuator of a kind of integrated resistor strain-gauge transducer of present embodiment comprises laminate stack formula piezoelectric ceramic 1 and resistance strain-gauge transducer 2, described laminate stack formula piezoelectric ceramic 1 be shaped as rectangle, be shaped as on two first relative long side surface 1-3 of laminate stack formula piezoelectric ceramic 1 of rectangle and there is respectively a contact conductor 3, be shaped as rectangle laminate stack formula piezoelectric ceramic 1 be bonded with resistance strain-gauge transducer 2 on adjacent two other second long side surface 1-4 respectively with two the first long side surface 1-3 simultaneously, or be bonded with resistance strain-gauge transducer 2 on any one the second long side surface 1-4 on described two the second long side surface 1-4, on the long side surface 1-4 of the substrate of resistance strain-gauge transducer 2 bonding second, be welded with the lead-in wire A of any one long side surface that is arranged in two the first long side surface 1-3 on resistance strain-gauge transducer 2.
Embodiment two: in conjunction with Fig. 1 and Fig. 2, present embodiment is described, the described resistance strain-gauge transducer 2 of present embodiment is the metal wire type resistance strain-gauge transducer.So arrange, simple in structure, functional, meet the design requirements and the actual needs.Other is identical with embodiment one.
Embodiment three: in conjunction with Fig. 1 and Fig. 2, present embodiment is described, present embodiment a kind of realizes that the concrete steps of manufacture method of Piexoelectric actuator of the integrated resistor strain-gauge transducer of embodiment one are:
Step 1, preliminary treatment, all clean the surface of the surface of laminate stack formula piezoelectric ceramic 1 and resistance strain-gauge transducer 2, after cleaning, places dry;
Step 2, location, utilize scriber laminate stack formula piezoelectric ceramic 1 and the first long side surface 1-3 two contact conductor 3 places mark on adjacent two the second long side surface 1-4 respectively simultaneously or any one second long side surface 1-4 on mark the sticking area 1-2 of resistance strain-gauge transducer 2, sticking area 1-2 is cleaned and dries in time;
Step 3, stickup, stick on resistance strain-gauge transducer 2 in the sticking area 1-2 separately determined through step 2;
Step 4, curing, clamp the resistance strain-gauge transducer 2 of having pasted in step 3, the laminate stack formula piezoelectric ceramic 1 that is pasted with resistance strain-gauge transducer 2 put into to drying baker and solidify;
Step 5, inspection, the sticking Quality of the resistance strain-gauge transducer 2 of inspection after step 4 is solidified;
Step 6, wire bonds, at the solder joint place of the resistance strain-gauge transducer 2 after step 5 checks welding lead, make the Piexoelectric actuator of integrated resistor strain-gauge transducer.
Adjacent two surfaces also be the surface of the non-contact conductor end of piezoelectric ceramic respectively with the surface at two contact conductor places described in the step 2 of present embodiment, two contact conductors are respectively power line and earth connection.
The surface clean of sticking area in step 2 in present embodiment, and to dry in time purpose be to have dirt residual for fear of surface, exert an influence to the sensitivity of resistance strain-gauge transducer.
The purpose of the inspection of present embodiment step 5 is to meet quality requirement, if exist quality problems should get rid of in time or adhering resistance strain sheets formula transducer again.
Before the compensation of Piexoelectric actuator moving displacement that present embodiment makes and the curve chart after compensation as shown in Figure 3 and Figure 4.
Operation principle
In conjunction with Fig. 1-Fig. 4, operation principle of the present invention is described, Piexoelectric actuator of the present invention in use, when the laminate stack formula piezoelectric ceramic after the integrated resistor strain-gauge transducer is followed change in voltage, the resistance meeting respective change of resistance strain-gauge transducer, now utilize charge amplifier that the real-time signal of telecommunication of resistance strain-gauge transducer is amplified, the collecting sensor signal processing mode is that corresponding lead-in wire is drawn simultaneously respectively.
Claims (1)
1. the Piexoelectric actuator manufacture method of an integrated resistor strain-gauge transducer, described drive unit comprises laminate stack formula piezoelectric ceramic (1) and resistance strain-gauge transducer (2), described laminate stack formula piezoelectric ceramic (1) be shaped as rectangle, be shaped as on two first relative long side surfaces (1-3) of laminate stack formula piezoelectric ceramic (1) of rectangle and there is respectively a contact conductor (3), be shaped as rectangle laminate stack formula piezoelectric ceramic (1) respectively on adjacent two other second long side surface (1-4), be bonded with resistance strain-gauge transducer (2) with two the first long side surfaces (1-3) simultaneously, or be bonded with resistance strain-gauge transducer (2) on any one second long side surface (1-4) on described two the second long side surfaces (1-4), on the substrate bonding second long side surface (1-4) of resistance strain-gauge transducer (2), be welded with the lead-in wire (A) of any one long side surface that is arranged in two the first long side surfaces (1-3) on resistance strain-gauge transducer (2), it is characterized in that: the concrete steps of described manufacture method are:
Step 1, preliminary treatment, all clean the surface of the surface of laminate stack formula piezoelectric ceramic (1) and resistance strain-gauge transducer (2), after cleaning, places dry;
Step 2, location, utilize scriber laminate stack formula piezoelectric ceramic (1) and the first long side surface (1-3) two contact conductors (3) place mark on adjacent two the second long side surfaces (1-4) respectively simultaneously or any one second long side surface (1-4) on mark the sticking area (1-2) of resistance strain-gauge transducer (2), sticking area (1-2) is cleaned also and dries in time;
Step 3, stickup, stick on resistance strain-gauge transducer (2) in the sticking area separately (1-2) of determining through step 2;
Step 4, solidify, clamp the resistance strain-gauge transducer (2) of having pasted in step 3, the laminate stack formula piezoelectric ceramic (1) that will be pasted with resistance strain-gauge transducer (2) is put into drying baker and is solidified;
Step 5, inspection, the sticking Quality of the resistance strain-gauge transducer (2) of inspection after step 4 is solidified;
Step 6, wire bonds, at the solder joint place of the resistance strain-gauge transducer after step 5 checks (2) welding lead, make the Piexoelectric actuator of integrated resistor strain-gauge transducer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210227383.7A CN102723432B (en) | 2012-07-04 | 2012-07-04 | Piezoelectric driving device integrating resistor strain sheet-type sensor and manufacture method thereof |
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| CN201210227383.7A CN102723432B (en) | 2012-07-04 | 2012-07-04 | Piezoelectric driving device integrating resistor strain sheet-type sensor and manufacture method thereof |
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| CN102723432B true CN102723432B (en) | 2013-12-25 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103192279B (en) * | 2013-03-11 | 2015-03-18 | 东莞华中科技大学制造工程研究院 | Two-dimension decoupling motion platform |
| CN105423885B (en) * | 2015-11-10 | 2018-01-05 | 中国科学院长春光学精密机械与物理研究所 | The displacement detector and detection method of built-in strain sheet type piezoelectric ceramic |
| CN105510147B (en) * | 2015-11-30 | 2017-12-05 | 浙江工商大学 | A kind of plastic pallet mechanical strength detection means based on stress section |
| CN105527152B (en) * | 2015-11-30 | 2017-12-19 | 浙江工商大学 | A kind of plastic pallet mechanical strength detection alignment system and method |
| CN108957150A (en) * | 2018-08-06 | 2018-12-07 | 三峡大学 | A kind of electric-field sensor based on electrostriction effect |
| CN112720790B (en) * | 2020-12-25 | 2021-11-05 | 南京航空航天大学 | High-precision press system for ceramic preparation based on piezoelectric structure |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1451162A (en) * | 2000-03-30 | 2003-10-22 | 西加特技术有限责任公司 | Microacturator assisted seek and hysteresis correction method and apparatus for a disc drive |
| CN201696394U (en) * | 2010-06-03 | 2011-01-05 | 西北工业大学 | High-pressure hydraulic pulse test system for aircraft |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6647797B2 (en) * | 1997-11-06 | 2003-11-18 | Powerco, S.P.A. | Strain gauge strip and applications thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1451162A (en) * | 2000-03-30 | 2003-10-22 | 西加特技术有限责任公司 | Microacturator assisted seek and hysteresis correction method and apparatus for a disc drive |
| CN201696394U (en) * | 2010-06-03 | 2011-01-05 | 西北工业大学 | High-pressure hydraulic pulse test system for aircraft |
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Effective date of registration: 20191212 Address after: No. 632-639, floor 6, No. 41, Hanguang street, Nangang District, Harbin City, Heilongjiang Province 1500001 Patentee after: Harbin Core Tomorrow Science & Technology Co., Ltd. Address before: Nangang District of Heilongjiang city in Harbin province Han Guang street 150080 No. 41 Jinhua Mansion, 6 floor Patentee before: Chen Feng |
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