CN207586316U - Piezoelectric modulus measuring device - Google Patents
Piezoelectric modulus measuring device Download PDFInfo
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- CN207586316U CN207586316U CN201721451425.XU CN201721451425U CN207586316U CN 207586316 U CN207586316 U CN 207586316U CN 201721451425 U CN201721451425 U CN 201721451425U CN 207586316 U CN207586316 U CN 207586316U
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Abstract
The utility model discloses a kind of piezoelectric modulus measuring devices, it includes reinforcing structure, electrode contact structure, connecting line and support platform for connecting substrate in piezoelectric membrane sample for contacting first electrode contact in piezoelectric membrane sample, the reinforcing structure includes rigid portion and contact site, and the rigid portion is connect with contact site；The electrode contact structure includes contact tip portion and mobile jib, and the one end in the contact tip portion and one end of mobile jib connect, and another section of mobile jib is connect with external Electrical Measurement System, and the connecting line is connect with external Electrical Measurement System.The utility model by reinforcing structure by being arranged to rigid portion and contact site, so reinforcing structure does not need to be fixed on a larger structure, mobile range will not be restricted, measurement point can be accurately positioned, it is both since the hardness of contact is less than the hardness of metal, cause physical damage to avoid the electrode to piezoelectric membrane sample, small electrode piezoelectric material can be measured.
Description
Technical field
The utility model is related to piezoelectric modulus fields of measurement more particularly to a kind of piezoelectric modulus measuring devices.
Background technology
Prevailing with Internet of Things, sensor is applied to promote until rapid in life, wherein based on piezoelectric effect
Manufactured piezoelectric transducer is one kind important in sensor family.
Piezoelectric effect is divided into direct piezoelectric effect and inverse piezoelectric effect.Direct piezoelectric effect refers to material stressed effect outside
Lower generation charge, and inverse piezoelectric effect refers to that material generates mechanical deformation under the action of outer making alive, the two is same essence
Different expression form.The charge or the shape generated under unit voltage effect that piezoelectric material generates under unit pressure effect
Variable is referred to as piezoelectric modulus, it is the important parameter for characterizing piezoelectric material properties.
At present, the measuring method of piezoelectric modulus is divided into positive piezoelectric modulus measurement hair and inverse piezoelectric modulus mensuration.And it utilizes
Inverse piezoelectric modulus mensuration measurement is to apply voltage to piezoelectric material, piezoelectric modulus is calculated by the deformation quantity for measuring material.
In this case, the deformation quantity of material is very small, and in particular with the raising of integrated requirement, piezoelectric material is gradually from body material
Develop to thin-film material, so as to which the deformation quantity of making alive formation is also less and less, some is even in nanoscale, it is desirable to accurate to measure
Deformation small so is generally sent out using laser interference, atomic force microscope hair method etc.；The equipment of these measuring methods is expensive,
It is complicated for operation and also very high to environmental requirement.
And when utilizing positive piezoelectric modulus mensuration, it is simple in structure and economical；But for measuring the piezoresistive material of film class
Material, then be easy to cause physical destruction, lead to measurement result mistake.
Therefore, the prior art has yet to be improved and developed.
Utility model content
The utility model aim is to provide a kind of piezoelectric modulus measuring device, it is intended to solve existing piezoelectric modulus and measure dress
Application pressure is carried out to piezoelectric material by ferrule in putting, the piezoelectric property of material in the case of measurement small electrode is not easy to, holds
Physical destruction easily is formed to the electrode of film surface, leads to the measurement result of mistake and since ferrule upper end is fixed on
One larger structure, so that the technical issues of planar movement range is restricted, and measurement point is not easy to be accurately positioned.
In order to solve the above technical problems, the technical scheme that the utility model is provided is as follows：A kind of piezoelectric modulus measuring device,
It include reinforcing structure, for contacting electrode contact structure that first electrode in piezoelectric membrane sample contacts, for connecting piezoelectricity
The connecting line and support platform of substrate in film sample, the reinforcing structure include rigid portion and contact site, the rigid portion with
Contact site connects；The electrode contact structure includes contact tip portion and mobile jib, and the one end in the contact tip portion and one end of mobile jib connect,
Another section of mobile jib is connect with external Electrical Measurement System, and the connecting line is connect with external Electrical Measurement System.
The piezoelectric modulus measuring device, wherein, the connecting line electrode subsidiary with substrate is connect.
The piezoelectric modulus measuring device, wherein, the contact site is the contact site that insulating materials makes.
The piezoelectric modulus measuring device, wherein, the rigid portion is the rigid portion that inorganic metal material makes.
The piezoelectric modulus measuring device, wherein, the contact site is in segment shape.
The piezoelectric modulus measuring device, wherein, the horizontal plane cross-section product of the contact site is more than the level of rigid portion
Face sectional area.
The piezoelectric modulus measuring device, wherein, the contact site is connect by connector sleeve with rigid portion.
The piezoelectric modulus measuring device, wherein, the hardness of the contact site is less than the hardness of rigid portion.
The beneficial effects of the utility model：The utility model by reinforcing structure by being arranged to rigid portion and contact site, institute
It not needing to be fixed on a larger structure with reinforcing structure, mobile range will not be restricted, and measurement point can be accurately positioned,
Be both due to contact hardness be less than metal hardness, cause physical damage to avoid the electrode to piezoelectric membrane sample,
Small electrode piezoelectric material can be measured.In addition, since reinforcing structure and electrode contact structure are mutual indepedent, it is provided separately, so
Respective positions can conveniently adjust, and can be accurately positioned measurement point.
Description of the drawings
Fig. 1 is a kind of structure diagram of the utility model.
Fig. 2 is another structure diagram of the utility model.
Fig. 3 is another example structure schematic diagram of the utility model.
Specific embodiment
To make the purpose of this utility model, technical solution and advantage clearer, clear and definite, develop simultaneously implementation referring to the drawings
The utility model is further described in example.
Since the first electrode of film surface is generally formed using sedimentation, thickness only has 150nm or so, and original survey
It is rigid material to apply stressed ferrule in amount structure, so when contact, the surface of ferrule must non-ordinary light
It is sliding, and to keep parallel well with film surface, it is otherwise easy to cause physical destruction to the electrode of sample, causes to survey
Result mistake is measured, and ferrule has certain size for the surface of contact, so the piezoelectric film material of small electrode is measured,
It is inconvenient.
As shown in Figs. 1-3, it the utility model discloses a kind of piezoelectric modulus measuring device, including reinforcing structure 1, is used for
First electrode 51 contacts in contact piezoelectric membrane sample 5 electrode contact structure 2, for connecting substrate in piezoelectric membrane sample 5
53 connecting line 3 and support platform 4, the reinforcing structure 1 include rigid portion 11 and contact site 12, and the rigid portion 11 is with contacting
Portion 12 connects；The electrode contact structure 2 includes contact tip portion 21 and mobile jib 22, the one end in the contact tip portion 21 and the one of mobile jib 22
End connection, another section of mobile jib 22 are connect with external Electrical Measurement System, the connecting line 3 and external Electrical Measurement System
Connection needs the piezoelectric membrane measured sample to be placed on support work platform 4, the piezoelectric membrane sample 5 by first electrode 51,
Piezoelectric membrane 52 and electroded substrate 53.
With the above structure, the reinforcing structure of the utility model is installed independently of each other with electrode contact structure, is separately set
It puts, so respective positions can conveniently adjust, realizes and be accurately positioned, simultaneously because the hardness of contact site is compared with original metal
Rigid portion in column and the utility model is small, so when reinforcing, it can be to avoid by the reasons such as non-parallel contact institute
Caused by the first electrode even physical damage of piezoelectric membrane, and the surface of contact site is also without being arranged to ten light splitting
It is sliding.In addition, since electrode contact structure includes contact tip portion and mobile jib, so contact tip portion can be in the smaller situation of electrode area
Under, avoid the presence due to electrode contact structure, when the contact site of reinforcing structure is contacted with first electrode, cause contact site by
Power is uneven.
When electrode 51 has through conducting wire and electronic pads（It is not marked in figure）In the case of being connected, electrode contact mechanism 2 can not
It is in direct contact with electrode 51, but is in contact with electronic pads.This be in order to avoid electrode area it is smaller in the case of, contact tip portion 21
Obstacle can be caused to the contact with electrode 51 of contact site 12 by being in direct contact with electrode 51.
In the utility model, electrode contact structure 2 can also be replaced using lead.
Furtherly, the connecting line 3 electrode subsidiary with substrate 53 is connect, and be connected with external electrical measuring system..
In the utility model, connecting line 3 can be the mechanism with contact tip similar with electrode contact structure 2.
Furtherly, the contact site 12 is the contact site 12 that insulating materials makes, since contact site 12 uses insulation material
Material makes, it is possible to and the charge prevented is shifted and is spread to reinforcing structure, ensures the accuracy of measurement result, while
In the case that first electrode area is smaller, and closeness is higher, even if contacted with adjacent electrode will not be mutual for contact site
Interference, can be to avoid the charge phase counterdiffusion between adjacent electrode.In practice, the utility model is generally smaller using hardness
Organic material makes.
Furtherly, the rigid portion 11 is the rigid portion 11 that inorganic metal material makes, generally using Fe, Al, W, Ti,
Cu, Ni, Cr, Mo, Co, Mn etc. are used as manufacture material.
As shown in Figures 2 and 3, the contact site 12 of the utility model is in segment shape, and contact site is in segment shape, so contact surface
For arcwall face, first electrode is damaged when can preventing reinforcing structure from reinforcing or piezoelectric membrane is damaged.
As shown in Figures 2 and 3, the horizontal plane cross-section product of the contact site 12 of the utility model is cut more than the horizontal plane of rigid portion 11
Area since the horizontal sectional area of contact site 12 is more than the horizontal sectional area of rigid portion 11, so when applying pressure, can play
Protect the effect of piezoelectric membrane.
As shown in figure 3, the contact site 12 of the utility model is connect by connector sleeve 13 with rigid portion 11, contact site passes through company
Female connector 13 is connect with rigid portion 11, can select to replace contact site 12 according to the piezoelectric material for measuring different size.
Furtherly, the hardness of the contact site 12 is less than the hardness of rigid portion 11, so when reinforcing, can keep away
Exempt from the first electrode even physical damage of piezoelectric membrane caused by by the member such as non-parallel contact.
The utility model by reinforcing structure by being arranged to rigid portion and contact site, so reinforcing structure does not need to be fixed on
One larger structure, mobile range will not be restricted, and measurement point can be accurately positioned, and be both since the hardness of contact is less than
The hardness of metal, cause physical damage to avoid the electrode to piezoelectric membrane sample, small electrode piezoelectric material can be measured.
In addition, since reinforcing structure and electrode contact structure are mutual indepedent, it is provided separately, so respective positions can conveniently adjust,
Measurement point can be accurately positioned.
It should be understood that the application of the utility model is not limited to above-mentioned citing, those of ordinary skill in the art are come
It says, can be improved or converted according to the above description, all these modifications and variations should all belong to the appended power of the utility model
The protection domain of profit requirement.
Claims (8)
1. a kind of piezoelectric modulus measuring device, which is characterized in that including reinforcing structure, for contacting first in piezoelectric membrane sample
Electrode contact structure, the connecting line and support platform for connecting substrate in piezoelectric membrane sample of electrode contact, the reinforcing
Structure includes rigid portion and contact site, and the rigid portion is connect with contact site；The electrode contact structure includes contact tip portion and master
Bar, the one end in the contact tip portion and one end of mobile jib connect, and the other end of mobile jib is connect with external Electrical Measurement System, described
Connecting line is connect with external Electrical Measurement System.
2. piezoelectric modulus measuring device according to claim 1, which is characterized in that the connecting line and the subsidiary electricity of substrate
Pole connects.
3. piezoelectric modulus measuring device according to claim 1, which is characterized in that the contact site makes for insulating materials
Contact site.
4. piezoelectric modulus measuring device according to claim 1, which is characterized in that the rigid portion is inorganic metal material
The rigid portion of making.
5. piezoelectric modulus measuring device according to claim 3, which is characterized in that the contact site is in segment shape.
6. piezoelectric modulus measuring device according to claim 5, which is characterized in that the horizontal plane cross-section product of the contact site
Horizontal plane cross-section more than rigid portion is accumulated.
7. piezoelectric modulus measuring device according to claim 1, which is characterized in that the contact site is by connector sleeve and just
Property portion connection.
8. according to the piezoelectric modulus measuring device described in claim 1-7 any one, which is characterized in that the contact site it is hard
Degree is less than the hardness of rigid portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721451425.XU CN207586316U (en) | 2017-11-03 | 2017-11-03 | Piezoelectric modulus measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721451425.XU CN207586316U (en) | 2017-11-03 | 2017-11-03 | Piezoelectric modulus measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207586316U true CN207586316U (en) | 2018-07-06 |
Family
ID=62730806
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721451425.XU Active CN207586316U (en) | 2017-11-03 | 2017-11-03 | Piezoelectric modulus measuring device |
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| CN (1) | CN207586316U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579651A (en) * | 2019-09-05 | 2019-12-17 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring device |
| CN111044804A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN111044803A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN112067913A (en) * | 2020-09-17 | 2020-12-11 | 业成科技（成都）有限公司 | Piezoelectric coefficient measuring system and method |
-
2017
- 2017-11-03 CN CN201721451425.XU patent/CN207586316U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579651A (en) * | 2019-09-05 | 2019-12-17 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring device |
| CN111044804A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN111044803A (en) * | 2019-12-12 | 2020-04-21 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN111044804B (en) * | 2019-12-12 | 2022-05-20 | 佛山市卓膜科技有限公司 | Piezoelectric coefficient measuring method for piezoelectric material |
| CN112067913A (en) * | 2020-09-17 | 2020-12-11 | 业成科技（成都）有限公司 | Piezoelectric coefficient measuring system and method |
| CN112067913B (en) * | 2020-09-17 | 2023-05-05 | 业成科技（成都）有限公司 | System and method for measuring piezoelectric coefficient |
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