CN106441694A - Fluid pressure sensor - Google Patents
Fluid pressure sensor Download PDFInfo
- Publication number
- CN106441694A CN106441694A CN201610882431.4A CN201610882431A CN106441694A CN 106441694 A CN106441694 A CN 106441694A CN 201610882431 A CN201610882431 A CN 201610882431A CN 106441694 A CN106441694 A CN 106441694A
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- China
- Prior art keywords
- fluid
- material layer
- pressure
- pdms material
- substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
Abstract
The invention discloses a fluid pressure sensor, which relates to the technical field of sensors and is used for solving a problem that a piezoresistive fluid pressure sensor in the prior art is reduced in operating performance and is shortened in service life because a resistor is directly contacted with the detection environment. The fluid pressure sensor comprises a substrate, a PDMS material layer, a pressure probe, electrodes and a current measurement device, wherein the PDMS material layer is arranged on the substrate, the bottom part of the PDMS material layer is provided with a through slot, and the through slot forms a fluid channel together with the top surface of the substrate; the pressure probe is arranged at the top surface of the PDMS material layer; two electrodes are respectively arranged at two pipe orifices of the fluid channel; the pressure probe is used for acquiring the value of an external force applied to the top surface of the PDMS material layer; and the two electrodes, a fluid flowing through the fluid channel and a power supply located outside the fluid channel form an electric circuit, the current measurement device is used for acquiring a current value of the electric circuit, and two ends of the power supply are connected with the two electrodes respectively.
Description
Technical field
The present invention relates to sensor technical field, more particularly relate to a kind of fluid pressure sensor.
Background technology
Fluid pressure sensor is a kind of changer that fluid pressure is converted into voltage or current signal, is related to
The subjects such as microelectronics, material, mechanics, chemistry, mechanics field.
The pressure size that conventional fluid pressure transducer is surveyed is change in resistance using foil gauge thus changing telecommunications
Number detecting.Traditional silicon piezoresistance type pressure sensor, its feature is that resistance is arranged in the outside of silicon fiml, direct and inspection
Survey environment to contact so that detecting the corrosive fluids that environment is brought, or the dust pollution in environment, all can be to pressure sensing
The normal work of device brings negative impact, so the whether element function of pressure transducer or its service life all can be big
Big minimizing.
In sum, there is resistance and directly contact with detection environment in pressure resistance type fluid pressure sensor of the prior art,
Service behaviour is led to reduce, the problem that service life reduces.
Content of the invention
The embodiment of the present invention provides a kind of fluid pressure sensor, in order to solve pressure resistance type Fluid pressure of the prior art
, there is resistance and directly contact with detection environment, lead to service behaviour to reduce, the problem that service life reduces in sensor.
The embodiment of the present invention provides a kind of fluid pressure sensor, including：Substrate, PDMS material layer, pressure probe, electrode
And current measuring device；
Described PDMS material layer is arranged on the substrate, and the bottom of described PDMS material layer is provided with groove, institute
The top surface stating groove with described substrate constitutes fluid passage；Described pressure probe is arranged on described PDMS material layer top surface；Two
Individual described electrode is separately positioned at two mouths of pipe of described fluid passage；
Described pressure probe, for obtaining the external force value being applied on described PDMS material layer top surface；Two described electrodes,
Flow through the fluid of described fluid passage and positioned at the electric power generating composition The electric loop outside described fluid passage, described current measurement
Device is used for obtaining the current value of described The electric loop, and wherein, the two ends of described power supply are connected with two described electrodes respectively.
It is preferred that described substrate adopts glass material.
It is preferred that described fluid passage is rectangular structure.
It is preferred that described current measuring device adopts ammeter, described ammeter is serially connected in described The electric loop, and institute
State ammeter to be located at outside described fluid passage.
It is preferred that described pressure probe is the pressure probe of sensor core sheet form.
In the embodiment of the present invention, provide a kind of fluid pressure sensor, this sensor adopts substrate of glass and PDMS material
Processed finished products PDMS pressure transducer, the fluid flowing through fluid passage, as resistance, is solved resistance and is directly connect with detection environment
Touch, lead to service behaviour to reduce, the problem that service life reduces；Further, being acted on using pressure makes it become on PDMS material
Shape, thus bring the flow of through-flow body change, and then change the CHARGE DISTRIBUTION in fluid and be energized thus changing fluid
The size of stream, by the change of current values indirectly to reflect the situation of change of pressure, improves response speed, shortens response
Time, under the performance condition ensureing higher sensitivity, the efficient pressure detecting realizing fluid, there is high precision, measurement
Scope is wide, life-span length, and structure is simple, and good frequency response can work under severe conditions, low cost, it is easy to accomplish miniaturization, whole
The features such as body and diversification of varieties.
Brief description
Fig. 1 is a kind of fluid pressure sensor structural representation provided in an embodiment of the present invention；
Fig. 2 is a kind of fluid pressure sensor side view provided in an embodiment of the present invention；
Fig. 3 is a kind of pressure under four kinds of voltage for the fluid pressure sensor provided in an embodiment of the present invention and current curve
Figure；
Fig. 4 is the pressure based on a kind of fluid pressure sensor under four kinds of voltage provided in an embodiment of the present invention and electricity
The Linear Fit Chart of flow curve figure；
Fig. 5 is that a kind of deformation of fluid pressure sensor provided in an embodiment of the present invention fluid passage at various pressures is shown
It is intended to；
Fig. 6 is a kind of deformation of fluid pressure sensor provided in an embodiment of the present invention PDMS material layer at various pressures
Schematic diagram；
Fig. 7 (a) be in a kind of fluid pressure sensor provided in an embodiment of the present invention fluid passage center from the height of substrate
Degree is with pressure history figure；
Fig. 7 (b) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid in the case of additional 1V voltage
Equivalent conductance in passage is with pressure history figure；
Fig. 8 (a) is for PDMS material layer in a kind of fluid pressure sensor provided in an embodiment of the present invention under different-thickness
PDMS fluid passage center from substrate height with pressure history figure；
Fig. 8 (b) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid in the case of additional 1V voltage
Equivalent conductance in passage is with pressure history figure；
Fig. 9 (a) is a kind of fluid pressure sensor 1V in the case of different Young's provided in an embodiment of the present invention
During voltage fluid passage center from the height of substrate with pressure history figure；
Fig. 9 (b) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid in the case of additional 1V voltage
Equivalent conductance in passage is with pressure history figure；
Figure 10 (a) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid under different fluid channel height
Channel center from substrate height with pressure history figure；
Figure 10 (b) is that a kind of fluid pressure sensor provided in an embodiment of the present invention is additional under different fluid channel height
Equivalent conductance in 1V voltage fluid passage is with pressure history figure
Description of reference numerals：
1- substrate, 2-PDMS material layer, 21- fluid passage, 3- pressure probe, 4- electrode.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work
Embodiment, broadly falls into the scope of protection of the invention.
Fig. 1 is a kind of fluid pressure sensor structural representation provided in an embodiment of the present invention.As shown in figure 1, the present invention
A kind of fluid pressure sensor that embodiment provides includes：Substrate 1, PDMS material layer 2, pressure probe 3, electrode 4 and electric current are surveyed
Amount device.
It should be noted that substrate 1 adopts glass material, constitute substrate of glass.
Need to have a talk about bright, PDMS material layer 2 refers to polydimethylsiloxane (PDMS) material layer.
Specifically, PDMS material layer 2 is arranged on the base 1, and the bottom of PDMS material layer 2 is provided with groove, groove
Constitute fluid passage 21 with the top surface of substrate 1；Pressure probe 3 is arranged on PDMS material layer 2 top surface；Two electrodes 4 set respectively
Put at two mouths of pipe of fluid passage 21.
It should be noted that fluid passage 21 is rectangular structure；PDMS material layer 2 and substrate 1 are bonded, and forming two ends has
Port, remaining position closing integral conduit.
Specifically, pressure probe 3, for obtaining the external force value being applied on PDMS material layer 2 top surface；Two electrodes 4, streams
Fluid through fluid passage 21 and be located at electric power generating composition The electric loop outside fluid passage 21, current measuring device is used for obtaining
The current value in power taking loop, wherein, the two ends of power supply are connected with two electrodes 4 respectively.
It should be noted that the current measuring device in the present invention adopts ammeter, ammeter is serially connected in The electric loop, and
And ammeter is located at outside fluid passage 21；Power supply and two electrodes 4 convection cell that is connected applies electric field, ammeter measurement fluid electricity
Stream size.
It is made to deform on PDMS material it should be noted that external force acts on, so that the through-flow body of institute in PDMS material layer 2
Flow change further such that the CHARGE DISTRIBUTION in fluid changes, thus leading to the alive size of fluid institute to change,
Pressure is indirectly reflected by electric current it is achieved that pressure signal to the signal of telecommunication conversion.
It is preferred that pressure probe 3 is the pressure probe of sensor core sheet form.
It should be noted that pressure probe 3 can be pressure probe device or the biography with pressure detection function
Sensor chip, specifically, pressure probe 3 includes the various forms of pressure probe such as sensor chip.
Fig. 2 is a kind of fluid pressure sensor side view provided in an embodiment of the present invention.As shown in Fig. 2 PDMS material layer 2
Arrow downward pressure is applied with top surface, the fluid in fluid passage 21 creates arrow anti-work upwards to PDMS material layer 2
Firmly.
Fig. 3 is a kind of pressure under four kinds of voltage for the fluid pressure sensor provided in an embodiment of the present invention and current curve
Figure.As shown in figure 3, when the supply voltage in The electric loop is respectively adopted 1V, 5V, 10V and 20V, the pressure value of measurement and current value
Homologous thread relation.As can be seen that the change of the current value being caused by the change of voltage is reached unanimity, in approximate linear
Relation.
Fig. 4 is the pressure based on a kind of fluid pressure sensor under four kinds of voltage provided in an embodiment of the present invention and electric current
The Linear Fit Chart of curve chart.Fig. 4 is the fitted figure that four shown in Fig. 3 kind pressure to current curve chart is carried out with linear fit, its
The linearity is good, thus, it can be known that the fluid pressure sensor high precision of present invention design, sensitivity height.
Fig. 5 is that a kind of deformation of fluid pressure sensor provided in an embodiment of the present invention fluid passage at various pressures is shown
It is intended to.As shown in figure 5, in figure shows that under simulation different pressures in COMSOL Mulitphysics simulation software, fluid leads to
The deformation simulation result in road.Wherein, F=0N in Fig. 5 (a), fluid passage 21 does not deform upon；F=in Fig. 5 (b)
1.5mN, fluid passage 21 there occurs slight deformation；F=3mN in Fig. 5 (c), fluid passage 21 deforms upon, and inner passage is subject to
Certain extrudes and deforms；F=4.5mN in Fig. 5 (d), fluid passage 21 produces compared with large deformation, and fluid flux in passage reduces,
Thus causing the change of electric current.
Fig. 6 is a kind of deformation of fluid pressure sensor provided in an embodiment of the present invention PDMS material layer at various pressures
Schematic diagram.As shown in fig. 6, in figure shows that PDMS material layer 2 is in different pressures in COMSOL Mulitphysics simulation software
The analog case of the deformation under power change.Wherein, the load pressure of four width in figures：Fig. 6 (a) is 0mN, and Fig. 6 (b) is
1.5mN, Fig. 6 (c) be 3mN, Fig. 6 (d) be 4.5mN it can be seen that while pressure becomes larger PDMS material layer 2 deformation
Degree also increases continuous.
Fig. 7 (a) be in a kind of fluid pressure sensor provided in an embodiment of the present invention fluid passage center from the height of substrate
Degree is with pressure history figure.Wherein, be continuously increased with pressure, fluid passage 21 center from the height of substrate linear under
Fall.
Fig. 7 (b) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid in the case of additional 1V voltage
Equivalent conductance in passage is with pressure history figure.Wherein, when pressure is continuously increased, in fluid passage, equivalent conductance is in
Camber line constantly declines.
Fig. 8 (a) is for PDMS material layer in a kind of fluid pressure sensor provided in an embodiment of the present invention under different-thickness
PDMS fluid passage center from substrate height with pressure history figure.Wherein, variation tendency and Fig. 7 (a) variation tendency
Identical, three change curves of in figure, from top to bottom the thickness of PDMS material layer 2 be followed successively by 150 μm, 125 μm and 100 μm.
Fig. 8 (b) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid in the case of additional 1V voltage
Equivalent conductance in passage is with pressure history figure.Wherein, variation tendency is identical with Fig. 7 (b) variation tendency, in figure three
Change curve, from top to bottom the thickness of PDMS layer be followed successively by 150 μm, 125 μm and 100 μm.
Fig. 9 (a) is a kind of fluid pressure sensor 1V in the case of different Young's provided in an embodiment of the present invention
During voltage fluid passage center from the height of substrate with pressure history figure.Wherein, it is continuously increased with pressure, fluid leads to
Road 21 center linearly declines from the height of substrate 1, the Young's moduluss that three curves represent from top to bottom be successively 900GPa,
800GPa and 700GPa.
Fig. 9 (b) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid in the case of additional 1V voltage
Equivalent conductance in passage is with pressure history figure.Wherein, it is continuously increased with pressure, equivalent conductance declines continuous,
The Young's moduluss that three curves represent from top to bottom are 900GPa, 800GPa and 700GPa successively.
Figure 10 (a) is a kind of fluid pressure sensor provided in an embodiment of the present invention fluid under different fluid channel height
Channel center from substrate height with pressure history figure.Wherein, applied voltage is 1V, three curve fluids from top to bottom
Channel height is followed successively by 150 μm, 120 μm and 100 μm it can be seen that being continuously increased with pressure, and fluid passage 21 center is from base
The height at bottom 1 linearly declines, simultaneously three oriented parallel, illustrates that different runner height convection cell passage 21 deformation do not have shadow
Ring.
Figure 10 (b) is that a kind of fluid pressure sensor provided in an embodiment of the present invention is additional under different fluid channel height
Equivalent conductance in 1V voltage fluid passage is with pressure history figure.Article three, runner height is curve successively from top to bottom
150 μm, 120 μm and 100 μm, curvilinear trend is identical and parallel, illustrates that different runners highly do not affect on equivalent conductance.
A kind of fluid pressure sensor provided in an embodiment of the present invention, its technological process is：Design channel on silicon crystal slate,
It is subsequently poured into the dimethyl siloxane of liquid in these silicon crystal slates and to heat and make dimethyl siloxane hardening, work as dimethyl siloxane
Remove, even micron-sized microchannel structural design details also can be imprinted on PDMS (polydimethylsiloxane) plate, using reaction
Ion etching machine (RIE) carries out hydrophilic surface modification, and surface bond is destroyed, and typically one piece microscope slide is placed on the one of activation
Sidechain siloxane (vestige of side), bond returns to normal condition, and glass is permanent and the hardened conjunction of PDMS, from script silicon crystal slate
Design channel becomes Waterproof passages.There is this technology, qurer makes fluid channel, micro-mixer, Micropump, micro-valve door etc.
Element, minimum physical dimension also can reach nano-scale.
In sum, a kind of fluid pressure sensor provided in an embodiment of the present invention, this sensor adopt substrate of glass and
PDMS material processed finished products PDMS pressure transducer, the fluid flowing through fluid passage, as resistance, solves resistance directly and examines
Survey environment contact, lead to service behaviour to reduce, the problem that service life reduces；Further, act on PDMS material using pressure
On so that it is deformed, thus bring the flow of through-flow body change, and then change the alive size of fluid institute, by electric current
Indirectly to reflect pressure, to improve response speed, to shorten response time, under the performance condition ensureing higher sensitivity, high
The pressure detecting realizing fluid of efficiency, has high precision, and measurement range is wide, life-span length, and structure is simple, good frequency response, energy
Work under severe conditions, low cost, it is easy to accomplish the features such as miniaturization, integration and diversification of varieties.
The several specific embodiments being only the present invention disclosed above, those skilled in the art can be carried out to the present invention
Various change and modification without departing from the spirit and scope of the present invention, if the present invention these modification and modification belong to the present invention
Within the scope of claim and its equivalent technologies, then the present invention is also intended to comprise these changes and modification.
Claims (5)
1. a kind of fluid pressure sensor is it is characterised in that include：Substrate (1), PDMS material layer (2), pressure probe (3), electricity
Pole (4) and current measuring device；
Described PDMS material layer (2) is arranged in described substrate (1), and the bottom of described PDMS material layer (2) be provided with logical
Groove, described groove constitutes fluid passage (21) with the top surface of described substrate (1)；Described pressure probe (3) is arranged on described PDMS
On material layer (2) top surface；Two described electrodes (4) are separately positioned at two mouths of pipe of described fluid passage (21)；
Described pressure probe (3), for obtaining the external force value being applied on described PDMS material layer (2) top surface；Two described electricity
Pole (4), the fluid flowing through described fluid passage (21) and the electric power generating composition electricity time positioned at described fluid passage (21) outside
Road, described current measuring device is used for obtaining the current value of described The electric loop, wherein, the two ends of described power supply respectively with two institutes
State electrode (4) to connect.
2. sensor as claimed in claim 1 is it is characterised in that described substrate (1) adopts glass material.
3. sensor as claimed in claim 1 is it is characterised in that described fluid passage (21) are rectangular structure.
4. sensor as claimed in claim 1 is it is characterised in that described current measuring device adopts ammeter, described electric current
Table is serially connected in described The electric loop, and described ammeter is located at described fluid passage (21) outside.
5. sensor as claimed in claim 1 is it is characterised in that described pressure probe (3) is the pressure of sensor core sheet form
Force probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610882431.4A CN106441694A (en) | 2016-10-10 | 2016-10-10 | Fluid pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610882431.4A CN106441694A (en) | 2016-10-10 | 2016-10-10 | Fluid pressure sensor |
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|---|---|
| CN106441694A true CN106441694A (en) | 2017-02-22 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610882431.4A Pending CN106441694A (en) | 2016-10-10 | 2016-10-10 | Fluid pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112736187A (en) * | 2020-12-30 | 2021-04-30 | 中国航空工业集团公司金城南京机电液压工程研究中心 | Exhaust device and method based on self-excitation type piezoelectric element |
| CN112955755A (en) * | 2018-09-14 | 2021-06-11 | Koa株式会社 | Current detection device |
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| CN85104740A (en) * | 1985-06-24 | 1987-01-07 | 北京航空学院 | Hydraulic dynamic testing system used for pressure sensor |
| CN103185612A (en) * | 2011-12-27 | 2013-07-03 | 中国科学院上海微系统与信息技术研究所 | Single-silicon chip microflow sensor suitable to be packaged in surface mounting way and manufacturing method for single-silicon chip microflow sensor |
| CN103604556A (en) * | 2013-11-26 | 2014-02-26 | 无锡市纳微电子有限公司 | Fluid pressure sensor |
| CN105228515A (en) * | 2013-03-12 | 2016-01-06 | 引导介入公司 | Comprise the system of the seal wire for test fluid pressure |
| CN105424261A (en) * | 2015-12-08 | 2016-03-23 | 上海交通大学 | Flexible MEMS bubble pressure sensor, and application and preparation method thereof |
| WO2016153429A1 (en) * | 2015-03-24 | 2016-09-29 | National University Of Singapore | A resistive microfluidic pressure sensor |
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2016
- 2016-10-10 CN CN201610882431.4A patent/CN106441694A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85104740A (en) * | 1985-06-24 | 1987-01-07 | 北京航空学院 | Hydraulic dynamic testing system used for pressure sensor |
| CN103185612A (en) * | 2011-12-27 | 2013-07-03 | 中国科学院上海微系统与信息技术研究所 | Single-silicon chip microflow sensor suitable to be packaged in surface mounting way and manufacturing method for single-silicon chip microflow sensor |
| CN105228515A (en) * | 2013-03-12 | 2016-01-06 | 引导介入公司 | Comprise the system of the seal wire for test fluid pressure |
| CN103604556A (en) * | 2013-11-26 | 2014-02-26 | 无锡市纳微电子有限公司 | Fluid pressure sensor |
| WO2016153429A1 (en) * | 2015-03-24 | 2016-09-29 | National University Of Singapore | A resistive microfluidic pressure sensor |
| CN105424261A (en) * | 2015-12-08 | 2016-03-23 | 上海交通大学 | Flexible MEMS bubble pressure sensor, and application and preparation method thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112955755A (en) * | 2018-09-14 | 2021-06-11 | Koa株式会社 | Current detection device |
| CN112955755B (en) * | 2018-09-14 | 2024-02-20 | Koa株式会社 | Current detection device |
| CN112736187A (en) * | 2020-12-30 | 2021-04-30 | 中国航空工业集团公司金城南京机电液压工程研究中心 | Exhaust device and method based on self-excitation type piezoelectric element |
| CN112736187B (en) * | 2020-12-30 | 2024-02-02 | 中国航空工业集团公司金城南京机电液压工程研究中心 | Exhaust device and method based on self-excitation type piezoelectric element |
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