CN107045269A - Development row's bulb apparatus and developing machine - Google Patents
Development row's bulb apparatus and developing machine Download PDFInfo
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- CN107045269A CN107045269A CN201710153680.4A CN201710153680A CN107045269A CN 107045269 A CN107045269 A CN 107045269A CN 201710153680 A CN201710153680 A CN 201710153680A CN 107045269 A CN107045269 A CN 107045269A
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- Prior art keywords
- bubble
- row
- pipeline
- poly
- developer solution
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Wet Developing In Electrophotography (AREA)
- Coating Apparatus (AREA)
Abstract
The present invention discloses a kind of development row's bulb apparatus and developing machine, wherein, development row's bulb apparatus includes liquid reserve tank；Recovery pipe, the first end of the recovery pipe is used to reclaim developer solution and the second end is connected with the liquid reserve tank；Poly bubble device, the poly bubble device is used to collect the bubble in the liquid reserve tank；And, row's bubble component, row's bubble component is used to discharge in the bubble in the poly bubble device.The poly bubble device for collecting bubble is provided with technical solution of the present invention, in liquid reserve tank, and the bubble in poly bubble device can be discharged by arranging bubble component, to reduce the air bubble content in developer solution.When developer solution being coated on into glass substrate through nozzle, air bubble content is less in developer solution, so as to prevent coating during coating developer solution caused by bubble uneven, it is thus possible to the fraction defective of glass substrate is greatly reduced, and then reduces the production cost of liquid crystal panel.
Description
Technical field
The present invention relates to manufacture field, more particularly to a kind of development row's bulb apparatus and developing machine.
Background technology
With expanding economy, people's living standard is improved, and various electric equipment products (for example, television set, computer etc.) are
Our life has been incorporated, and the liquid crystal panel in electric equipment products is the key for the performance and Consumer's Experience for influenceing electric equipment products
Factor.Wherein, in the gold-tinted array process of liquid crystal panel, developer solution is coated using developing machine platform, it is remaining after nozzle application
Developer solution fallen from the recovery pipe being connected with liquid reserve tank, finally flow into liquid reserve tank in.Action of Gravity Field can be during due to falling
Many bubbles are produced in recovery pipe, these bubbles enter in liquid reserve tank with developer solution, then the liquor charging through being connected with liquid reserve tank
Pipeline enters development section, and bubble can be attached to glass baseplate surface, has had a strong impact on the uniformity of developer solution coating, and then cause
The fraction defective rise of glass substrate.
Accordingly, it is desirable to provide a kind of can arrange bulb apparatus by the development of the bubble discharge in liquid reserve tank.
The content of the invention
The main object of the present invention is to provide a kind of development row bulb apparatus, it is intended to solve to there is bubble in liquid reserve tank and influence
The problem of developer solution coats uniformity.
To achieve the above object, development row bulb apparatus proposed by the present invention includes liquid reserve tank；Recovery pipe, the recovery tube
The first end on road is used to reclaim developer solution and the second end is connected with the liquid reserve tank；Poly bubble device, the poly bubble device is used to collect institute
State the bubble in liquid reserve tank；And, row's bubble component, row's bubble component is used to discharge in the bubble in the poly bubble device.
Alternatively, the poly bubble device is poly bubble guard, and the second end of the recovery pipe is stretched into the poly bubble guard.
Alternatively, row's bubble component includes pumping cells and row's bubble pipeline, the first end of row's bubble pipeline and institute
The second end for stating the connection of poly bubble guard and row bubble pipeline is connected with the pumping cells.
Alternatively, the pumping cells are included for the cleaning case of recovery and rinsing liquid and for discharging in the cleaning case
The drain line of cleaning fluid, the second end of row's bubble pipeline is connected with the drain line, and the position of the cleaning case is low
In the position of the poly bubble guard.
Alternatively, row's bubble pipeline is bending tube, from the first end of row bubble pipeline to the curved of row bubble pipeline
To inhale bubble section at folding, it is row's bubble section that the second end of pipeline is steeped in the bending place for steeping pipeline from the row to the row, and section is steeped in the suction
It is vertically arranged or is inclined upwardly along the flow direction of bubble, row's bubble section is tilted down along the flow direction of bubble.
Alternatively, it is provided with regulating valve in the recovery pipe.
Alternatively, the regulating valve is magnetic valve or pneumatic operated valve.
Alternatively, some or all of of the recovery pipe is transparent pipe.
Further, a kind of developing machine, it includes developing cell, development row's bulb apparatus as described above and for by institute
The liquor charging pipeline that the developer solution in liquid reserve tank sends into the developing cell is stated, the first end of the recovery pipe and the development are single
Member connection.
Alternatively, the pump for pumping developer solution is provided with the liquor charging pipeline.
The poly bubble device for collecting bubble is provided with technical solution of the present invention, in liquid reserve tank, and can be by by arranging bubble component
Bubble discharge in poly bubble device, to reduce the air bubble content in developer solution.When developer solution being coated on into glass substrate through nozzle, show
Air bubble content is less in shadow liquid, so as to prevent coating during coating developer solution caused by bubble uneven, it is thus possible to big
Width reduces the fraction defective of glass substrate, and then reduces the production cost of liquid crystal panel.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Structure according to these accompanying drawings obtains other accompanying drawings.
The structural representation of the developing machine of Fig. 1 embodiment of the present invention.
Drawing reference numeral explanation：
The realization, functional characteristics and advantage of the object of the invention will be described further referring to the drawings in conjunction with the embodiments.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of creative work is not made it is all its
His embodiment, belongs to the scope of protection of the invention.
It is to be appreciated that institute is directional in the embodiment of the present invention indicates that (such as up, down, left, right, before and after ...) is only used
In explaining relative position relation, motion conditions under a certain particular pose (as shown in drawings) between each part etc., if should
When particular pose changes, then directionality indicates also correspondingly therewith to change.
In addition, in the present invention such as relating to the description of " first ", " second " etc. be only used for describe purpose, and it is not intended that
Indicate or imply its relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ",
At least one this feature can be expressed or be implicitly included to the feature of " second ".In the description of the invention, " multiple " contain
Justice is at least two, such as two, three etc., unless otherwise specifically defined.
In the present invention, unless otherwise clearly defined and limited, term " connection ", " fixation " etc. should be interpreted broadly,
For example, " fixation " can be fixedly connected or be detachably connected, or integrally；Can be mechanically connect or
Electrical connection；Can be joined directly together, can also be indirectly connected to by intermediary, can be the connection or two of two element internals
The interaction relationship of individual element, unless otherwise clear and definite restriction.For the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
In addition, the technical scheme between each embodiment of the invention can be combined with each other, but must be general with this area
Logical technical staff can be implemented as basis, when the combination appearance of technical scheme is conflicting or can not realize it will be understood that this
The combination of technical scheme is not present, also not within the protection domain of application claims.
The present invention proposes a kind of development row bulb apparatus, it is intended to solve to there is bubble in liquid reserve tank and influence developer solution coating equal
The problem of even property.
Fig. 1 is refer to, in an embodiment of the present invention, development row's bulb apparatus, which includes liquid reserve tank 1, first end, to be used to reclaim
The recovery pipe 3 that developer solution and the second end are connected with liquid reserve tank 1, the poly bubble device (not indicating) for collecting bubble in liquid reserve tank 1
And for the row of the bubble discharge in poly bubble device to be steeped into component (not indicating).In technical solution of the present invention, set in liquid reserve tank 1
There is the poly bubble device for collecting bubble, and the bubble in poly bubble device can be discharged by arranging bubble component, to reduce the gas in developer solution
Steep content.When developer solution being coated on into glass substrate through nozzle 11, air bubble content is less in developer solution, so as to prevent coating
Coating during developer solution caused by bubble is uneven, it is thus possible to the fraction defective of glass substrate is greatly reduced, and then reduces liquid crystal
The production cost of panel.
Wherein, poly bubble device can be for that can collect the various structures of bubble, for example, guard or housing with holes etc..Make
For a kind of optional embodiment, poly bubble device can be poly bubble guard 2, and the second end of recovery pipe 3 is stretched into poly bubble guard 2, so that
Enable screening of the developer solution in recovery pipe 3 first through poly bubble guard 2, bubble is collected in poly bubble guard 2, and is allowed not
The developer solution of bubbles is flowed out out of poly bubble guard 2, to complete the collection to bubble in developer solution, when preventing coating developer solution because
The coating that bubble is caused is uneven.
Further, row bubble component can it is optional include pumping cells and row bubble pipeline 4, row bubble pipeline 4 first end and
Poly bubble guard 2 connect and arrange bubble pipeline 4 the second end be connected with pumping cells, pumping cells can be in time by poly bubble guard 2
Bubble through row bubble pipeline 4 extract out, so as to prevent bubble from being run out of out of poly bubble guard 2.Wherein, pumping cells can be vavuum pump
Or other two ends that row can be made to steep pipeline 4 produce the structure of pressure difference, row is steeped the pressure of the first end of pipeline 4
More than the pressure at the second end of row's bubble pipeline 4, so that bubble can be from the first end of row's bubble pipeline 4 to the of row's bubble pipeline 4
Move at two ends.
For example, in an alternate embodiment of the invention, as shown in figure 1, pumping cells include the cleaning case 5 for recovery and rinsing liquid with
And for discharging the drain line 6 of the cleaning liquid inside of cleaning case 5, the second end of row's bubble pipeline 4 is connected with drain line 6, and cleaning
The position of case 5 is less than the position of poly bubble guard 2, in other words, and the liquid level in cleaning case 5 is less than the liquid level in liquid reserve tank 1.For right
The cleaning fluid that developing cell 10 is cleaned can be recycled to cleaning case 5 after the completion of cleaning process, then be discharged into through drain line 6
Follow-up liquid handling device is handled, to prevent contaminated cleaning solution environment.Wherein, in order to lift treatment effeciency, discharging tube
The flow velocity of cleaning fluid is larger in road 6, so that the pressure in drain line 6 is smaller.The first end and poly bubble net of row's bubble pipeline 4
Second end of the connection of cover 2 and row's bubble pipeline 4 is connected with drain line 6, because the pressure in poly bubble guard 2 is generally atmospheric pressure
By force, and the pressure of drain line 6 is smaller and will usually be less than atmospheric pressure, hence in so that the pressure of the first end of row's bubble pipeline 4 is big
Pressure in the second end of row's bubble pipeline 4, bubble can be from the first end of row's bubble pipeline 4 to the second end movement for arranging bubble pipeline 4.
Also, the position of cleaning case 5 is less than the position of poly bubble guard 2, in other words, the liquid level in cleaning case 5 is less than the liquid in liquid reserve tank 1
Face, so that the cleaning fluid in cleaning case 5 will not pour in down a chimney into poly bubble guard 2.
As a kind of optional embodiment, row's bubble pipeline 4 can be bending tube, from the first end of row's bubble pipeline 4 to row's bubble pipe
Section (not indicating) is steeped in the bending place on road 4 for suction, is to arrange to steep section (not from the bending place for steeping pipeline 4 is arranged to the second end that row steeps pipeline 4
Sign), inhale bubble section and be vertically arranged or be inclined upwardly along the flow direction of bubble, row's bubble section dips down along the flow direction of bubble
Tiltedly.Due to the lighter weight of bubble, it can be moved up inhaling bubble section bubble in the presence of pressure difference, and larger aobvious of quality
Shadow liquid can not then be moved up, so that bubble is separated with developer solution, prevent developer solution from entering row's bubble section.When bubble pass through it is curved
After at folding, in the presence of pressure difference and gravity, bubble can be smoothly entered in drain line 6, and cleaned liquid is forced to take out of.
The structure (cleaning case 5 and drain line 6) that the row's bubble component being arranged such can in itself have using developing machine completes row and steeped
Journey, clever structure is achieved many things at one stroke, and can the row of being greatly reduced soak this.In addition, carrying out row's bubble relative to using vavuum pump
Mode, the embodiment also has the advantages that space hold is small.
Further, regulating valve 9 is provided with order to control the Air Bubble Size entered in poly bubble guard 2, in recovery pipe 3.
When observing that the bubble in poly bubble guard 2 is excessive, developer solution in recovery pipe 3 can be reduced by controlling to adjust valve 9
Flow velocity, so that the size of the bubble contained by developer solution reduces, to reduce the difficulty of bubble collection.Wherein, regulating valve 9 can be with
Magnetic valve or pneumatic operated valve are chosen as, user can carry out remote control to the flow velocity of the developer solution in recovery pipe 3.And in order to
It is easy to observe the size of bubble, in an alternate embodiment of the invention, some or all of of recovery pipe 3 is transparent pipe, by transparent
Pipe can be intuitively to developer solution state observe.Wherein, transparent pipe can be acrylic pipe or transparent PVC (polyvinyl chloride)
Pipe etc..
Above-mentioned development row bulb apparatus can be applied on developing machine, and developer solution is coated on into glass substrate through nozzle 11
When, air bubble content is less in developer solution, uneven so as to prevent from coating coating during developer solution caused by bubble, thus energy
Enough beneficial effects for producing the production cost that the fraction defective of glass substrate is greatly reduced and liquid crystal panel is reduced.
In addition, the present invention also provides a kind of developing machine, as shown in figure 1, it includes developing cell 10, development as described above
Arrange bulb apparatus and the liquor charging pipeline 7 for the developer solution in liquid reserve tank 1 to be sent into developing cell 10, the first of recovery pipe 3
End is connected with developing cell 10.Wherein, the first end of liquor charging pipeline 7 is connected with liquid reserve tank 1 and the second end of liquor charging pipeline 7 is set
There is nozzle 11, so as to which the developer solution in liquid reserve tank 1 is sent into developing cell 10, developer solution is coated on glass by nozzle 11
On substrate.In technical solution of the present invention, the poly bubble device for collecting bubble is provided with liquid reserve tank 1, and can be by by arranging bubble component
Bubble discharge in poly bubble device, to reduce the air bubble content in developer solution.When developer solution being coated on into glass substrate through nozzle 11,
Air bubble content is less in developer solution, so as to prevent coating during coating developer solution caused by bubble uneven, it is thus possible to
The fraction defective of glass substrate is greatly reduced, and then reduces the production cost of liquid crystal panel.
Wherein, the pump 8 for pumping developer solution is additionally provided with liquor charging pipeline 7, to provide power to the conveying of developer solution.
Pump 8 herein can be centrifugal pump or vane pump etc..When pumping developer solution using pump 8, it is necessary to note making liquor charging pipeline 7
First end is submerged under the liquid level of liquid reserve tank 1, and bubble is produced to prevent air from entering in liquor charging pipeline 7, and is meeting development
On the premise of the conveying requirement of liquid, it should try one's best and turn the power of pump 8 down, to reduce the flow velocity of developer solution in liquor charging pipeline 7, prevent gas
Bubble is produced.
The alternative embodiment of the present invention is the foregoing is only, is not intended to limit the scope of the invention, it is every at this
Under the inventive concept of invention, the equivalent structure transformation made using description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical fields in the scope of patent protection of the present invention.
Claims (10)
1. one kind development row's bulb apparatus, it is characterised in that including：
Liquid reserve tank；
Recovery pipe, the first end of the recovery pipe is used to reclaim developer solution and the second end is connected with the liquid reserve tank；
Poly bubble device, the poly bubble device is used to collect the bubble in the liquid reserve tank；And,
Row's bubble component, row's bubble component is used to discharge in the bubble in the poly bubble device.
2. development row bulb apparatus as claimed in claim 1, it is characterised in that the poly bubble device is poly bubble guard, the recovery
Second end of pipeline is stretched into the poly bubble guard.
3. development row bulb apparatus as claimed in claim 2, it is characterised in that row's bubble component includes pumping cells and row
Pipeline is steeped, the first end of row's bubble pipeline is connected with the poly bubble guard and the row steeps the second end of pipeline and the pumping
Unit is connected.
4. development row bulb apparatus as claimed in claim 3, it is characterised in that the pumping cells include being used for recovery and rinsing liquid
Cleaning case and drain line for discharging the cleaning case cleaning liquid inside, the second end of row's bubble pipeline and the row
Liquid pipeline is connected, and position of the position less than the poly bubble guard of the cleaning case.
5. development row bulb apparatus as claimed in claim 4, it is characterised in that row's bubble pipeline is bending tube, from the row
The first end for steeping pipeline steeps the bending place of pipeline to inhale bubble section to the row, and the bending place for steeping pipeline from the row is steeped to the row
Second end of pipeline is row's bubble section, and the suction bubble section is vertically arranged or is inclined upwardly along the flow direction of bubble, row's bubble
Section is tilted down along the flow direction of bubble.
6. development row's bulb apparatus as any one of claim 1-5, it is characterised in that be provided with the recovery pipe
Regulating valve.
7. development row bulb apparatus as claimed in claim 6, it is characterised in that the regulating valve is magnetic valve or pneumatic operated valve.
8. development row bulb apparatus as claimed in claim 6, it is characterised in that some or all of of the recovery pipe be
Bright pipe.
9. a kind of developing machine, it is characterised in that the developing machine includes developing cell, as any one of claim 1-8
Development row's bulb apparatus and liquor charging pipeline for the developer solution in the liquid reserve tank to be sent into the developing cell, described time
The first end on closed tube road is connected with the developing cell.
10. developing machine as claimed in claim 9, it is characterised in that be provided with the liquor charging pipeline for pumping developer solution
Pump.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710153680.4A CN107045269B (en) | 2017-03-15 | 2017-03-15 | Development row's bulb apparatus and developing machine |
| PCT/CN2018/077829 WO2018166358A1 (en) | 2017-03-15 | 2018-03-02 | Developing and bubble-expelling apparatus and developing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710153680.4A CN107045269B (en) | 2017-03-15 | 2017-03-15 | Development row's bulb apparatus and developing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107045269A true CN107045269A (en) | 2017-08-15 |
| CN107045269B CN107045269B (en) | 2019-09-20 |
Family
ID=59544659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710153680.4A Active CN107045269B (en) | 2017-03-15 | 2017-03-15 | Development row's bulb apparatus and developing machine |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107045269B (en) |
| WO (1) | WO2018166358A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108543640A (en) * | 2018-04-02 | 2018-09-18 | 深圳市华星光电技术有限公司 | A kind of liquid discharge device |
| WO2018166358A1 (en) * | 2017-03-15 | 2018-09-20 | 惠科股份有限公司 | Developing and bubble-expelling apparatus and developing machine |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108319116A (en) * | 2018-02-07 | 2018-07-24 | 武汉华星光电技术有限公司 | Developer solution retracting device |
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| JPH0817787A (en) * | 1994-07-04 | 1996-01-19 | Fujitsu Ltd | Chemical liquid treatment device |
| JP2005340322A (en) * | 2004-05-25 | 2005-12-08 | Hitachi High-Tech Electronics Engineering Co Ltd | Substrate treatment apparatus and method of manufacturing substrate |
| KR20060057706A (en) * | 2004-11-24 | 2006-05-29 | 삼성전자주식회사 | Apparatus for controlling filter housing and method for controlling filter housing |
| CN201783231U (en) * | 2010-09-03 | 2011-04-06 | 扬博科技股份有限公司 | Device for removing bubbles in liquid during wet process of baseplate |
| CN205880498U (en) * | 2016-08-03 | 2017-01-11 | 昆山龙腾光电有限公司 | Photoresistance supply system |
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| US6402821B1 (en) * | 1998-08-18 | 2002-06-11 | Tokyo Electron Limited | Filter unit and solution treatment unit |
| JP2005000767A (en) * | 2003-06-10 | 2005-01-06 | Renesas Technology Corp | Filtration apparatus and semiconductor manufacturing apparatus |
| CN102114360A (en) * | 2010-01-05 | 2011-07-06 | 东京化工机株式会社 | Foam processing apparatus |
| CN107045269B (en) * | 2017-03-15 | 2019-09-20 | 惠科股份有限公司 | Development row's bulb apparatus and developing machine |
-
2017
- 2017-03-15 CN CN201710153680.4A patent/CN107045269B/en active Active
-
2018
- 2018-03-02 WO PCT/CN2018/077829 patent/WO2018166358A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0817787A (en) * | 1994-07-04 | 1996-01-19 | Fujitsu Ltd | Chemical liquid treatment device |
| JP2005340322A (en) * | 2004-05-25 | 2005-12-08 | Hitachi High-Tech Electronics Engineering Co Ltd | Substrate treatment apparatus and method of manufacturing substrate |
| KR20060057706A (en) * | 2004-11-24 | 2006-05-29 | 삼성전자주식회사 | Apparatus for controlling filter housing and method for controlling filter housing |
| CN201783231U (en) * | 2010-09-03 | 2011-04-06 | 扬博科技股份有限公司 | Device for removing bubbles in liquid during wet process of baseplate |
| CN205880498U (en) * | 2016-08-03 | 2017-01-11 | 昆山龙腾光电有限公司 | Photoresistance supply system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018166358A1 (en) * | 2017-03-15 | 2018-09-20 | 惠科股份有限公司 | Developing and bubble-expelling apparatus and developing machine |
| CN108543640A (en) * | 2018-04-02 | 2018-09-18 | 深圳市华星光电技术有限公司 | A kind of liquid discharge device |
| CN108543640B (en) * | 2018-04-02 | 2020-07-03 | 深圳市华星光电技术有限公司 | Liquid discharge device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018166358A1 (en) | 2018-09-20 |
| CN107045269B (en) | 2019-09-20 |
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