CN107042361B - Brittle material edge thermal polishing device and method - Google Patents

Brittle material edge thermal polishing device and method Download PDF

Info

Publication number
CN107042361B
CN107042361B CN201710342863.0A CN201710342863A CN107042361B CN 107042361 B CN107042361 B CN 107042361B CN 201710342863 A CN201710342863 A CN 201710342863A CN 107042361 B CN107042361 B CN 107042361B
Authority
CN
China
Prior art keywords
brittle material
heating
heat source
edge
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710342863.0A
Other languages
Chinese (zh)
Other versions
CN107042361A (en
Inventor
刘康林
杨锦邦
杨汉钟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Yaodeli Technology Co Ltd
Original Assignee
Shenzhen Yaodeli Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Yaodeli Technology Co Ltd filed Critical Shenzhen Yaodeli Technology Co Ltd
Publication of CN107042361A publication Critical patent/CN107042361A/en
Application granted granted Critical
Publication of CN107042361B publication Critical patent/CN107042361B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/354Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K7/00Cutting, scarfing, or desurfacing by applying flames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/02Iron or ferrous alloys
    • B23K2103/06Cast-iron alloys
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52Ceramics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass

Abstract

The invention discloses a brittle material edge hot polishing device and a method, wherein the device comprises: the heating jig, the heat source generator and the supporting seat; the heating jig is provided with at least one heating plane and an accommodating groove, the accommodating groove is used for accommodating part of the edge of the brittle material, the heating jig can move relative to the edge of the brittle material, and the thickness of the heating jig and the brittle material is smaller than the width of the accommodating groove; the heat source generator applies heat to the heating plane; the support base supports the brittle material. The method can reduce or even eliminate cracks at the edge of the brittle material, and is favorable for prolonging the service life of the brittle material.

Description

Brittle material edge thermal polishing device and method
Technical Field
The invention relates to the field of material processing, in particular to a brittle material edge thermal polishing device and method.
Background
Most of the existing brittle materials are polished mechanically by a numerical control machine after being carved and milled by the numerical control machine, the edges of the products are not smooth enough and generate tiny cracks, the brittle materials are cracked, the cracks existing at the edges of the brittle materials are all caused, and the cracks at the edges leave hidden troubles that cracks are easy to generate after the brittle materials are finished products.
Disclosure of Invention
The invention mainly solves the technical problem of providing a brittle material edge hot polishing device and method, which can reduce or even eliminate cracks existing at the edge of a brittle material and are beneficial to prolonging the service life of the brittle material.
In order to solve the technical problems, the invention adopts a technical scheme that: provided is a brittle material edge hot polishing device, comprising: the heating jig, the heat source generator and the supporting seat; the heating jig is provided with at least one heating plane and an accommodating groove, the accommodating groove is used for accommodating part of the edge of the brittle material, the heating jig can move relative to the edge of the brittle material, and the thickness of the heating jig and the brittle material is smaller than the width of the accommodating groove; the heat source generator applies heat to the heating plane; the support base supports the brittle material.
In order to solve the technical problems, the invention adopts a technical scheme that: providing a method for hot polishing the edge of a brittle material, the method comprising the steps of: the brittle material of the regular plane is fixed by a vacuum chuck in an adsorption way, and the brittle material is horizontally arranged; placing the edge of the brittle material in a holding tank of a heating jig, and separating the brittle material from the holding tank; heating any one or more surfaces of the heating jig by heat emitted by the heat source generator; and controlling the heating jig to move relative to the edge of the brittle material through a driving motor so as to polish all the edge parts of the brittle material.
Different from the prior art, the invention provides a brittle material edge thermal polishing device, which comprises: the heating jig, the heat source generator and the supporting seat; the heating jig is provided with at least one heating plane and an accommodating groove, the accommodating groove is used for accommodating part of the edge of the brittle material, the heating jig can move relative to the edge of the brittle material, and the thickness of the heating jig and the brittle material is smaller than the width of the accommodating groove; the heat source generator applies heat to the heating plane; the support base supports the brittle material. The method can reduce or even eliminate cracks at the edge of the brittle material, and is favorable for prolonging the service life of the brittle material.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a brittle material edge thermal polishing apparatus provided by the present invention;
FIG. 2 is a schematic structural diagram of another embodiment of an apparatus for hot polishing an edge of a brittle material according to the present invention;
FIG. 3 is a schematic structural diagram of a brittle material edge thermal polishing apparatus according to another embodiment of the present invention;
FIG. 4 is a schematic view illustrating the effect of a brittle material edge thermal polishing apparatus provided in the present invention after the brittle material is processed;
FIG. 5 is a schematic flow chart illustrating an embodiment of a method for thermal polishing an edge of a brittle material according to the present invention.
Detailed Description
The technical solution of the present invention will be further described in more detail with reference to the following embodiments. It is to be understood that the described embodiments are merely a few embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Brittle materials are materials that break with only a small amount of deformation under an external force (e.g., tension, impact, etc.). The brittle materials commonly used are cast iron, ceramics, stone, glass, sapphire, etc. The brittle material has the characteristics of high compressive strength, difficult bearing of tensile force, no plastic deformation after stress and brittle fracture when being damaged. Based on the above characteristics, during the mechanical processing (such as polishing) of the brittle material by the prior art, the edge tends to form micro cracks, which may eventually cause damage and loss of the brittle material. It is therefore necessary to reduce the cracking of the edges of brittle materials by technical means.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a brittle material edge thermal polishing apparatus according to the present invention. The brittle material edge thermal polishing apparatus 100 includes a heating fixture 110, a heat source generator 120 and a supporting base 130, and is used for polishing the edge surface of the brittle material 101.
The heating fixture 110 is a three-dimensional structure and includes at least one heating plane 111 and an accommodating groove 112. The accommodating groove 112 is used for accommodating a portion of the edge of the brittle material 101, and the heating fixture 110 can move relative to the edge of the brittle material 101. The thickness of the brittle material 101 is set to be smaller than the width of the accommodating groove 112, so that when part of the edge of the brittle material 101 is placed in the accommodating groove 112, the contact with the inside of the groove body of the accommodating groove 112 is avoided. The brittle material 101 is horizontally fixed on a supporting seat 130, and the supporting seat 130 provides a plane for supporting the brittle material 101. In this embodiment, the plane area of the support 130 for supporting the brittle material 101 is smaller than the area of the brittle material 101, so that the central portion of the brittle material is in contact with the support 130, the support 130 is a vacuum chuck, and the vacuum chuck adsorbs the central portion of the brittle material 110. The edge of the holding groove is in a suspended state and can be placed in the holding groove 112 without contacting with the groove body of the holding groove 112. The heat source generator 120 generates heat and applies the heat directly to the heating plane 111 to increase the temperature of the heating jig 110.
The heating fixture 110 is a cube structure, one surface of which is formed with an accommodating groove 112 inward, one or more of the other surfaces of the heating fixture 110 are used as the heating planes 111, and the heat source generator 120 includes heat source generating devices with the same number as the heating planes to heat each heating plane 111 respectively. In the present embodiment, three adjacent surfaces of the cubic structure are provided inward of the receiving groove 112, and the remaining three surfaces are all the heating surfaces 111. A rectangular parallelepiped structure is cut from one surface of the heating fixture 110 to the opposite surface to form a receiving groove 112, and the cross-sectional structure of the heating fixture 110 is concave. The cut-out structure is not limited to a rectangular parallelepiped, and may be a circular arc shape or the like at the bottom of the accommodating groove 112, that is, the bottom of the accommodating groove 112 may be provided according to the structure of the edge of the brittle material 101, as shown in fig. 2 and 3. Taking the heating fixture 110 with the concave structure as an example, in the cubic structure, three surfaces which are not contacted when the cuboid structure is cut off are all heating planes 111, at this time, three heat source generators 120 are provided to heat the heating fixture 110 from three different directions by the three heating planes respectively. The heat source generator 120 may be one or both of a laser beam emitter or a flame emitter. The heat source controller 140 is connected to each heat source generator 120, and is configured to control and adjust heat source parameters of the heat source generator 120, where the heat source parameters include power, energy, heating time, and shape of the heat source. The heat source shape parameter refers to a spot shape of a laser beam emitted when the heat source is raised by the laser beam emitter. The above parameters can be adjusted and changed by the heat source controller 140 corresponding to the brittle materials 101 of different materials, so as to realize the thermal polishing of the brittle materials of different materials.
After the brittle material 101 is adsorbed on the vacuum chuck, the edge of the brittle material is positioned in the accommodating groove 112 of the heating fixture 110. After the heat source generator 120 is turned on to start heating, the temperature of the heating fixture 110 rises. The heating fixture 110 is made of tungsten steel or hafnium alloy Ta4HfC5And has a higher melting point. The brittle material treated by the present invention is usually one of glass, ceramic and sapphire, and has a melting point lower than that of the material of the heating fixture 110. The heating temperature is controlled by the heat source controller 140, so that the temperature of the heating jig 110 reaches the melting point of the brittle material 101, the heating jig 110 has good heat conduction property, heat is conducted to the edge of the brittle material 101, the temperature of the edge of the brittle material 101 rises, the brittle material melts when reaching the melting point, cracks and uneven feeling of the edge are eliminated, the edge of the brittle material 101 becomes flat, and the service life of the brittle material can be prolonged.
A driving motor 150 is provided, and the driving motor 150 is connected to the heating fixture 110 to drive the heating fixture 110 to move along the edge of the brittle material 101. The heating fixture 110 is supported by other supporting structures, so that the distance between the interior of the groove body of the accommodating groove 112 and the surface of the brittle material 101 is always kept constant. The distance of the groove body 112 from the edge of the brittle material 101 may be in the order of micrometers, but it is necessary to ensure that there is no contact. The driving motor 150 controls the heating fixture 110 to stay at a certain position of the edge of the brittle material 101, the heat source generator 120 heats the heating plane 111 for a set time, and then the polishing process is completed at the position, at this time, the driving motor 150 controls the heating fixture 110 to move, and the operation is repeated when the unprocessed edge position is reached, until the thermal polishing process of the edge of the brittle material 101 is completed. The driving motor 150, the heat source controller 140, and the heat source generator 120 all generate electricity to operate by the same power source.
The effect of the brittle material processed by the apparatus 100 is shown in fig. 4. As can be seen from fig. 4, after the edge of the brittle material is subjected to the thermal polishing process, the original cracks and the uneven protrusions are melted at a high temperature, and after the process is completed, the surface of the edge of the brittle material becomes relatively flat, so that the service life of the edge of the brittle material can be prolonged when the edge is used as a terminal screen manufacturing material.
Different from the prior art, the invention provides a brittle material edge thermal polishing device, which comprises: the heating jig, the heat source generator and the supporting seat; the heating jig is provided with at least one heating plane and an accommodating groove, the accommodating groove is used for accommodating part of the edge of the brittle material, the heating jig can move relative to the edge of the brittle material, and the thickness of the heating jig and the brittle material is smaller than the width of the accommodating groove; the heat source generator applies heat to the heating plane; the support base supports the brittle material. The method can reduce or even eliminate cracks at the edge of the brittle material, and is favorable for prolonging the service life of the brittle material.
Referring to fig. 5, fig. 5 is a schematic flow chart of a brittle material edge thermal polishing method according to the present invention. The method comprises the following steps:
s210: the brittle material of the regular plane is fixed by a vacuum chuck in an adsorption way, and the brittle material is horizontally arranged.
The brittle material is horizontally and fixedly arranged on a vacuum chuck, and the vacuum chuck provides a plane to support the brittle material. In this embodiment, the area of the plane for supporting the brittle material by the vacuum chuck is smaller than the area of the brittle material, so that the central portion of the brittle material is in contact with the vacuum chuck.
S220: the edge of the brittle material is placed in a holding tank of a heating jig, and the brittle material is separated from the holding tank.
The heating fixture is of a three-dimensional structure and comprises at least one heating plane and an accommodating groove. The holding tank is used for holding part of the edge of the brittle material, and the heating fixture can move relative to the edge of the brittle material. The thickness that sets up this fragile material is less than the width of holding tank to when making the partial edge of fragile material place in the holding tank, can not take place the contact with the cell body inside of holding tank. The edge of the holding groove is in a suspended state and can be placed in the holding groove without contacting with the holding groove body. One surface of the heating plate is inwards formed into a containing groove, and one or more of the other surfaces are used as the heating plane. The heat source generator comprises heat source generating devices with the same number as the heating planes, and the heat source generating devices are used for heating each heating plane respectively. In this embodiment, three adjacent surfaces of the cubic structure are provided with the accommodating groove inwardly, and the remaining three surfaces are heating surfaces. A cuboid structure is cut from one surface of the heating jig to the opposite surface to form a containing groove, and the cross section structure of the heating jig is concave. The cut-off structure is not limited to a rectangular parallelepiped, and may be a circular arc shape or the like at the bottom of the storage tank, that is, the bottom of the storage tank may be provided according to the structure of the edge of the brittle material.
S230: the heat source generator emits heat to heat any one or more surfaces of the heating jig.
The heat source generator generates heat and directly applies the heat to the heating plane so as to improve the temperature of the heating jig. Taking the heating jig with the concave structure as an example, in the cubic structure, three surfaces which are not contacted when the cuboid structure is cut off are heating planes, and at the moment, three heat source generators are arranged to respectively heat the heating jig from three different directions on the three heating planes. The heat source generator may be one or both of a laser beam emitter or a flame emitter. The heat source control device is connected with each heat source generator and used for controlling and adjusting heat source parameters of the heat source generator, wherein the heat source parameters comprise power, energy, heating time and heat source shape of the heat source. The heat source shape parameter refers to a spot shape of a laser beam emitted when the heat source is raised by the laser beam emitter. The parameters can be adjusted and changed by the heat source controller corresponding to the brittle materials of different materials, so that the thermal polishing of the brittle materials of different materials is realized.
S240: and controlling the heating jig to move relative to the edge of the brittle material through a driving motor so as to polish all the edge parts of the brittle material.
After the brittle material is adsorbed on the vacuum chuck, the edge of the brittle material is positioned in the accommodating groove of the heating jig. And after the heat source generator is started to heat, the temperature of the heating jig rises. The heating fixture is made of tungsten steel or hafnium alloy Ta4HfC5And has a higher melting point. The brittle material treated by the invention is usually one of glass, ceramic and sapphire, and has a melting point lower than that of the heating jig material. The heating temperature is controlled by the heat source controller, so that the temperature of the heating jig reaches the melting point of the brittle material, the heating jig has good heat conduction characteristic, heat is conducted to the edge of the brittle material, the temperature of the edge of the brittle material rises, the brittle material melts when reaching the melting point, cracks and uneven feeling at the edge are eliminated, the edge of the brittle material is smooth, and the service life of the brittle material can be prolonged.
And arranging a driving motor, wherein the driving motor is connected with the heating jig so as to drive the heating jig to move along the edge of the brittle material. The heating jig is supported by other supporting structures, so that the distance between the interior of the groove body of the accommodating groove and the surface of the brittle material is always kept unchanged. The distance from the groove body to the edge of the brittle material can be in the micron level, but does not contact with the groove body. The driving motor controls the heating jig to stay at a certain position of the edge of the brittle material, the heat source generator heats the heating plane for a set time, the polishing treatment work at the position is completed, the driving motor controls the heating jig to move at the moment, and the operation is repeated when the heating jig reaches the unprocessed edge position until the thermal polishing treatment work of the edge of the brittle material is completed.
Different from the prior art, the invention discloses a brittle material edge hot polishing method, which comprises the following steps: the brittle material of the regular plane is fixed by a vacuum chuck in an adsorption way, and the brittle material is horizontally arranged; placing the edge of the brittle material in a holding tank of a heating jig, and separating the brittle material from the holding tank; heating any one or more surfaces of the heating jig by heat emitted by the heat source generator; and controlling the heating jig to move relative to the edge of the brittle material through a driving motor so as to polish all the edge parts of the brittle material. The method can reduce or even eliminate cracks at the edge of the brittle material, and is favorable for prolonging the service life of the brittle material.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (10)

1. A brittle material edge thermal polishing apparatus, comprising: the heating jig, the heat source generator and the supporting seat;
the heating jig is provided with at least one heating plane and an accommodating groove, the accommodating groove is used for accommodating part of the edge of the brittle material, the heating jig can move relative to the edge of the brittle material, and the thickness of the brittle material is smaller than the width of the accommodating groove; the heat source generator applies heat to the heating plane; the support seat supports the brittle material.
2. The apparatus according to claim 1, wherein the heating fixture is a cubic structure, one surface of the heating fixture penetrates the opposite surface along the adjacent surface to form the receiving groove, one or more of the remaining surfaces of the heating fixture are used as the heating planes, and the heat source generator comprises a number of heat source generating devices equal to the number of the heating planes to heat each of the heating planes.
3. The apparatus according to claim 2, wherein the heating fixture is a cube structure.
4. The apparatus of claim 1, wherein the heat source generator is one or both of a laser beam emitter or a flame emitter.
5. The apparatus according to claim 4, further comprising a heat source controller connected to the heat source generator for adjusting a heat source parameter of the heat source generator; wherein the heat source parameters comprise power, energy, heating time and heat source shape of the heat source.
6. The apparatus according to claim 1, wherein the support base is a vacuum chuck, and the vacuum chuck adsorbs a central portion of the brittle material.
7. The apparatus according to claim 1, wherein the heating fixture is made of tungsten steel or Ta alloy4HfC5
8. The apparatus of claim 1, wherein the brittle material is one of glass, ceramic and sapphire.
9. The apparatus according to claim 1, further comprising a driving motor, wherein the driving motor is connected to the heating fixture to control the heating fixture to move relative to the brittle material edge.
10. A method of edge thermal polishing of a brittle material, comprising:
adsorbing and fixing the brittle material of the regular plane through a vacuum chuck, and horizontally arranging the brittle material;
placing the edge of the brittle material in a holding tank of a heating jig, and separating the brittle material from the holding tank;
heating any one or more surfaces of the heating jig by heat emitted by a heat source generator;
and controlling the heating jig to move relative to the edge of the brittle material through a driving motor so as to polish all the edge parts of the brittle material.
CN201710342863.0A 2016-12-26 2017-05-08 Brittle material edge thermal polishing device and method Active CN107042361B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201611271057 2016-12-26
CN2016112710570 2016-12-26

Publications (2)

Publication Number Publication Date
CN107042361A CN107042361A (en) 2017-08-15
CN107042361B true CN107042361B (en) 2020-02-07

Family

ID=59547070

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710342863.0A Active CN107042361B (en) 2016-12-26 2017-05-08 Brittle material edge thermal polishing device and method

Country Status (1)

Country Link
CN (1) CN107042361B (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1042684A (en) * 1988-10-25 1990-06-06 博士伦百慕达科技有限公司 The laser polishing of lens surface
US6257954B1 (en) * 2000-02-23 2001-07-10 Memc Electronic Materials, Inc. Apparatus and process for high temperature wafer edge polishing
CN1931506A (en) * 2006-09-27 2007-03-21 江苏大学 Deburring method and apparatus based on laser shock wave
CN101506112A (en) * 2006-08-21 2009-08-12 康宁股份有限公司 Process and apparatus for thermal edge finishing a glass sheet with reduced residual stress
CN101658975A (en) * 2009-09-11 2010-03-03 克恩-里伯斯(太仓)有限公司 Pulse type laser deburring method
CN204075512U (en) * 2014-06-13 2015-01-07 宁波智天档案管理咨询有限公司 A kind of laser polishing equipment
CN105772947A (en) * 2016-03-23 2016-07-20 中国科学院上海光学精密机械研究所 Dual light source combined laser beam polishing device
CN106001927A (en) * 2016-07-05 2016-10-12 温州大学 Measurement and processing integrated laser leveling polishing method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1042684A (en) * 1988-10-25 1990-06-06 博士伦百慕达科技有限公司 The laser polishing of lens surface
US6257954B1 (en) * 2000-02-23 2001-07-10 Memc Electronic Materials, Inc. Apparatus and process for high temperature wafer edge polishing
CN101506112A (en) * 2006-08-21 2009-08-12 康宁股份有限公司 Process and apparatus for thermal edge finishing a glass sheet with reduced residual stress
CN1931506A (en) * 2006-09-27 2007-03-21 江苏大学 Deburring method and apparatus based on laser shock wave
CN101658975A (en) * 2009-09-11 2010-03-03 克恩-里伯斯(太仓)有限公司 Pulse type laser deburring method
CN204075512U (en) * 2014-06-13 2015-01-07 宁波智天档案管理咨询有限公司 A kind of laser polishing equipment
CN105772947A (en) * 2016-03-23 2016-07-20 中国科学院上海光学精密机械研究所 Dual light source combined laser beam polishing device
CN106001927A (en) * 2016-07-05 2016-10-12 温州大学 Measurement and processing integrated laser leveling polishing method

Also Published As

Publication number Publication date
CN107042361A (en) 2017-08-15

Similar Documents

Publication Publication Date Title
JP5850152B2 (en) Magnet piece manufacturing apparatus constituting field pole magnet body and manufacturing method thereof
KR102132051B1 (en) Substrate processing device
JP5707889B2 (en) Semiconductor substrate cutting method and semiconductor substrate cutting apparatus
JP5847298B2 (en) Wire electrical discharge machining apparatus and semiconductor wafer manufacturing method using the same
KR20140129055A (en) Method and apparatus for separation of strengthened glass and articles produced thereby
WO2009091640A2 (en) High temperature vacuum chuck assembly
JP2015076115A (en) Disk-shaped glass substrate for magnetic recording medium, and manufacturing method of disk-shaped glass substrate for magnetic recording medium
JP2015223589A (en) METHOD FOR PRODUCTION OF SiC PLATE-LIKE WORKPIECE
CN107042361B (en) Brittle material edge thermal polishing device and method
KR101867255B1 (en) METHOD FOR MANUFACTURING BONDING MEMBER
JP2004186589A (en) Method and apparatus for manufacturing semiconductor substrate
JP2008162012A (en) Workpiece clamping structure of cutting device
JPH1179765A (en) Production of glass container and apparatus for production
US6667485B2 (en) Ion implanting apparatus and sample processing apparatus
JP4353997B2 (en) Work cutting device
JP2008188724A (en) Cutting method and cutting device for workpiece
JP7174850B2 (en) Method and system for shearing a workpiece of material
KR102145002B1 (en) Method of manufacturing fine wire
JP6515396B1 (en) Object to be heated for electromagnetic induction heating device, method for heating object to be heated, and method for manufacturing aluminum wheel
CN112723732A (en) Non-contact cutting method for cambered surface glass
KR20170116613A (en) Bonding method for quartz glass
KR100968292B1 (en) Method and machine for winding voice coil of micro speaker
CN115180814B (en) Cutting and separating method and system for optical lens
JP7179239B1 (en) Multi-wire electrical discharge machine, multi-wire electrical discharge machining method, thin plate manufacturing method, and semiconductor wafer manufacturing method
JP2008044076A (en) Workpiece cutting method and cutting device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant