CN107020380A - Can burning optimization on line increasing material manufacturing device and method - Google Patents

Can burning optimization on line increasing material manufacturing device and method Download PDF

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Publication number
CN107020380A
CN107020380A CN201710407026.1A CN201710407026A CN107020380A CN 107020380 A CN107020380 A CN 107020380A CN 201710407026 A CN201710407026 A CN 201710407026A CN 107020380 A CN107020380 A CN 107020380A
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China
Prior art keywords
powder bed
electron beam
material manufacturing
increasing material
working chamber
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CN201710407026.1A
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Chinese (zh)
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CN107020380B (en
Inventor
郭超
林峰
马旭龙
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Tianjin Qingyan Zhishu Technology Co Ltd
Tianjin Institute of Advanced Equipment of Tsinghua University
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Tianjin Qingyan Zhishu Technology Co Ltd
Tianjin Institute of Advanced Equipment of Tsinghua University
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Publication of CN107020380A publication Critical patent/CN107020380A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/10Auxiliary heating means
    • B22F12/13Auxiliary heating means to preheat the material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/32Process control of the atmosphere, e.g. composition or pressure in a building chamber
    • B22F10/322Process control of the atmosphere, e.g. composition or pressure in a building chamber of the gas flow, e.g. rate or direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/36Process control of energy beam parameters
    • B22F10/362Process control of energy beam parameters for preheating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/36Process control of energy beam parameters
    • B22F10/366Scanning parameters, e.g. hatch distance or scanning strategy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/70Gas flow means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/90Means for process control, e.g. cameras or sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/50Means for feeding of material, e.g. heads
    • B22F12/55Two or more means for feeding material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Abstract

The invention belongs to 3D printing field, disclose it is a kind of can burning optimization on line increasing material manufacturing device, including working chamber, inside has default rough vacuum, and which is provided with gas access and gas vent;Plasma generator, is communicated in working chamber, and preheating is scanned to the powder bed in working chamber for producing electron beam;Laser generator, in working chamber and positioned at the side of gas access, the powder bed is melted for producing laser beam;Controller, is connected to plasma generator and laser generator.The invention also discloses it is a kind of can burning optimization on line increasing material manufacturing method.The electron beam that using plasma generator is produced is scanned to powder bed and preheated, high vacuum environment is not needed, only needs rough vacuum to can be used, makes process stress low, part need not be additionally heat-treated after machining, it is ensured that the precision and surface quality of converted products.The laser beam produced using laser generator is melted to powder bed, accurately melts section.

Description

Can burning optimization on line increasing material manufacturing device and method
Technical field
The present invention relates to 3D printing technique field, more particularly to it is a kind of can burning optimization on line increasing material manufacturing device and side Method.
Background technology
Increasing material manufacturing (3D printing) is a kind of to manufacture 3D solid zero by continuously fusing the material of more than one thin layer The manufacturing technology of part.
The increasing material manufacturing of current powdering formula typically has two kinds of technology paths:Using laser is as thermal source and uses electron beam As thermal source, wherein:
During using laser as thermal source, general perfusion inert gas in working chamber so that gas flowing is formed in working chamber, The flowing of gas can be purged to the optics through laser, be allowed to the pollution from metallic vapour, powder impurity, be protected Hold enough transparencies.The hot spot of laser is small, and forming accuracy is high.But the power of laser is small, it is impossible to which powder bed is heated into very high temperature Spend (general 200 degrees centigrade, 500 degrees Celsius of highest), cause the part thermal stress of shaping very big, on the one hand can cause shaping Process easily ftractures, and on the other hand needs additionally to be heat-treated after such shaping, to eliminate residual stress.
During using electron beam as thermal source, because beam power is big, powder bed can be heated to very high temperature (500- 1000 degrees Celsius), forming process stress is low, and cracking risk is small;Just can directly it be used without heat treatment after shaping.But electronics The hot spot of beam is big, and forming accuracy is relatively low.
If laser and electron beam, which are combined with each other, is formed operation, the high advantage of laser precision is both played, again The advantage that beam power is big, heating powder bed tempertaure is high can be played, but there is problems with aforesaid way:
The chamber of electron beam work generally requires high vacuum (10-2Pa magnitudes), if Chamber vacuum degree not enough, produces electronics Negative electrode residing for space vacuum it is also inadequate, the easy scaling loss of negative electrode of high temperature, it is impossible to work.And in the chamber of high vacuum almost In the absence of gas, it is impossible to form gas flowing, it is impossible to which the transmission glass of laser is purged, it is allowed to dirty from metallic vapour Dye.Therefore, laser, electron beam are difficult to work simultaneously together, there is either-or contradiction.That is, electronics beam request High vacuum environment is difficult to introduce laser heat source, and the gas flowing environment of laser requirement is difficult to introduce electron beam thermal source.
Therefore, how to design it is a kind of can be both using electron beam while the increasing material manufacturing device of laser can be used to be current The problem of solving.
The content of the invention
It is an object of the invention to provide it is a kind of can burning optimization on line increasing material manufacturing device and method, to solve existing increasing The high vacuum environment of material manufacture device electronics beam request is difficult to introduce laser heat source, and the gas flowing environment of laser requirement is difficult The problem of introducing electron beam thermal source.
For up to this purpose, the present invention uses following technical scheme:
It is a kind of can burning optimization on line increasing material manufacturing device, including:
Working chamber, inside has default rough vacuum, and which is provided with gas access and gas vent;
Plasma generator, is communicated in the working chamber, for producing electron beam, and by the electron beam to working chamber Interior powder bed scanning preheating;
Laser generator, in working chamber and positioned at the side of gas access, for producing laser beam to melt State powder bed;
Controller, is connected to the plasma generator and laser generator.
Preferably, the default rough vacuum is the vacuum of 10 ° of Pa magnitudes.
Preferably, being provided with gas generation apparatus at the gas access, the gas vent is connected with vacuum acquirement dress Put, gas generation apparatus and the vacuum acquirement device is respectively connected with the controller.
Preferably, provided with the flow control for being connected to controller between the gas generation apparatus and the gas access Device;
The pressure sensor for being connected to controller is additionally provided with the working chamber.
Preferably, also including substrate, the electron beam that the plasma generator is produced can be scanned to the substrate Heating.
The present invention provide it is a kind of can burning optimization on line increasing material manufacturing method,
Under default rough vacuum, electron beam is produced by plasma generator, and by the electron beam to powder Last layer is scanned preheating;
Laser beam is produced by laser generator, and the powder bed preheated through the electron beam scanning entered by laser beam Row fusing.
Preferably, also including:
Preheating step and fusing step are alternately scanned to powder bed successively, and the step of preheating is scanned to powder bed Rapid number is not less than number the step of fusing to powder bed.
Preheating is scanned to powder bed by the electron beam included preferably, described:
Powder bed is vertically divided into M1Individual horizontal zone, it is parallel in each horizontal zone to be provided with N1It is individual to sweep Retouch path H;
Powder bed is divided into M in the horizontal direction2Individual vertical region, N is provided with each vertical area in parallel2It is individual to sweep Retouch path V;
Electron beam is controlled along M1Scanning pattern H (m in individual horizontal zone1, n1) and M2Scanning road in individual vertical region Footpath V (m2, n2) alternately powder bed is scanned, until all scanning patterns are all used, wherein m1=1,2,3 ... M1, n1 =1,2,3 ... N1, m2=1,2,3 ... M2, n2=1,2,3 ... N2
Preferably, described included by laser beam to the powder bed progress fusing preheated through the electron beam scanning:
Powder bed is divided at least one profile, the profile in advance and is provided with some regions;
Control laser beam melts to the region in the profile and the profile, until the powder bed is complete Fusing.
Preferably, also including:The pressure inside working chamber is detected, and is entered according to the regulation of the pressure of detection in working chamber Inert gas flow.
The electron beam that using plasma generator of the present invention is produced is scanned preheating to powder bed, its work needed Temperature is low, it is not necessary to high vacuum environment, only needs rough vacuum to can be used, and can make that process stress is low, and part is processed After without being additionally heat-treated, it is ensured that the precision and surface quality of converted products.Using swashing that laser generator is produced Light beam is melted to powder bed, and powder bed can be heated to very high temperature, section is accurately melted.Pass through electron beam and laser The collective effect of beam, improves product quality and production efficiency.And plasma generator is used, gas flowing pair can be introduced The purging of laser generator optics, to realize fusing of the laser beam to powder bed.
Brief description of the drawings
Fig. 1 be the present invention can burning optimization on line increasing material manufacturing device structural representation;
Fig. 2 be the present invention can burning optimization on line increasing material manufacturing device show gas generation apparatus, vacuum acquirement device, The structural representation of flow controller and pressure sensor;
Fig. 3 be the present invention can burning optimization on line increasing material manufacturing method flow chart;
Fig. 4 is the scanning pattern schematic diagram that the present invention is scanned preheating by electron beam;
Fig. 5 is that powder bed shows profile when the present invention is scanned fusing by laser beam and one kind of interior zone is shown It is intended to;
Fig. 6 be the present invention when being scanned fusing by laser beam powder bed show the another of profile and interior zone Schematic diagram.
In figure:
1st, working chamber;2nd, plasma generator;3rd, laser generator;4th, controller;5th, gas generation apparatus;6th, vacuum Obtain device;7th, flow controller;8th, pressure sensor;9th, hopper;10th, powder delivery board;20th, powdering platform;30th, shape Cylinder;40th, piston;50th, scraper;11st, gas access;12nd, gas vent;31st, laser controller;32nd, optics;100th, take turns It is wide;101st, interior zone.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
The present invention provide it is a kind of can burning optimization on line increasing material manufacturing device, as shown in Figure 1 and Figure 2, this can online heat The increasing material manufacturing device of processing include working chamber 1, hopper 9, powder delivery board 10, powdering platform 20, formation cylinder 30, piston 40, Scraper 50, plasma generator 2, laser generator 3 and controller 4, wherein:
It is provided with working chamber 1 at least one hopper 9, the present embodiment and is arranged with two hoppers 9, in hopper 9 Equipped with dusty material, there is powder delivery board 10 below hopper 9, for the powder in conveyor hopper 9.In powder delivery board The dusty material that 10 lower section is provided with powdering platform 20, powder delivery board 10 is transported on powdering platform 20.It is flat in powdering Platform 20 is provided with formation cylinder 30, the formation cylinder 30 provided with the piston 40 that can be moved up and down.Being provided with the top of powdering platform 20 can Mobile scraper 50, the scraper 50 at least has the freedom of motion of horizontal direction, and it can be by the powder on powdering platform 20 Material is scraped to the piston 40 of formation cylinder 30, forms powder bed.In the present embodiment, above-mentioned scraper 50 can scrape powder with two-way, i.e., from It is left-to-right to scrape powder, powder can also be scraped from right to left.When carrying out the printing manufacture of three-dimensional body, first, by three-dimensional body Model storage in a computer, model is layered in a computer, and obtains each layer of machining information.The system of three-dimensional body Make and carried out in working chamber 1, powder delivery board 10 conveys dusty material, work of the scraper 50 in formation cylinder 30 on powdering platform 20 Powder is sprawled stratification by the top of plug 40, and produce electron beam by plasma generator 2 afterwards preheats to powder bed, passes through laser The laser beam that generator 3 is produced melts to powder, until first layer powder bed is completely melt;First layer is completed after fusing, Powder delivery board 10 is again to conveying dusty material on powdering platform 20, and scraper 50 is in the top of piston 40 of formation cylinder 30 by powder Straticulation is sprawled, second layer powder bed is formed, produce electron beam by plasma generator 2 preheats to powder bed, by swashing The laser beam that optical generator 3 is produced melts to powder, until second layer powder bed is completely melt ..., so circulation, passes through The powder layer building 3D solid that more than two layers of Continuous maching.Without the powder being melted, it can be recycled.
In the present embodiment, as shown in figure 1, gas access 11 and gas vent 12 are provided with working chamber 1, for circulating Inert gas needed for laser generator 3, above-mentioned gas entrance 11 is arranged on the vicinity of the optics 32 of laser generator 3, For the inert gas that circulated into working chamber 1, to realize the purging to optics 32, metallic vapour, dust are protected it from Pollution, it is ensured that it possesses enough laser percent of pass always.Gas vent 12 is used to discharge inert gas so that in working chamber 1 Inert gas can circulate, persistently purge optics 32.
Substrate (not shown) is additionally provided with above-mentioned working chamber 1, the substrate is the starting sheet of deposition formation, plasma During the electron beam scanning substrate that body generator 2 is produced, also no powder bed is laid on substrate, can before laying powder bed The electron beam produced by plasma generator 2 is heated to it.
Specifically, as shown in Fig. 2 provided with the gas generation apparatus 5 for being connected to controller 4, the gas at gas access 11 Body generation device 5 is used to produce inert gas, and it can be gas generating unit or gas storage device.In gas vent 12 Place is connected with vacuum acquirement device 6, and the vacuum acquirement device 6 is connected to controller 4, at least including mechanical (blade) pump, also may be used The devices such as molecular pump, diffusion pump can be needed, for the inert gas in working chamber 1 to be discharged, so that the indifferent gas in working chamber 1 Body is flowed, and then realization is purged to the optics 32 of laser generator 3.
In the present embodiment, above-mentioned inert gas is preferably helium or argon gas etc. and not sent out with raw material used The inert gas of biology reason or chemical reaction.On the one hand above-mentioned inert gas forms air-flow in working chamber 1, and laser beam is passed through Optics 32 purged, on the other hand replace working chamber 1 in air, protect dusty material in fusion process not by Oxidation.
In the present embodiment, further, flow control is additionally provided between above-mentioned gas generation device 5 and gas access 11 Device 7, is additionally provided with pressure sensor 8 in working chamber 1, and above-mentioned pressure sensor 8 is all connected to controller 4 with flow controller 7, Controller 4 detects the pressure in working chamber 1 by pressure sensor 8, and the atmospheric pressure value of detection is carried out with given atmospheric pressure value Compare, the flow of flow controller 7 is controlled according to comparative result.When the atmospheric pressure value of measurement is more than given atmospheric pressure value, pass through Flow controller 7 is lowered into the flow of the inert gas of working chamber 1;When the atmospheric pressure value of measurement is less than given atmospheric pressure value, Increase the flow for the inert gas for entering working chamber 1 by flow controller 7.
Controller noted above 4 can be other controllers such as PLC or PC.
In the present embodiment, further, the above-mentioned inside of working chamber 1 has default rough vacuum, and specifically this is default Rough vacuum is the vacuum (specific atmospheric pressure value is not less than 1Pa, is more than 10 ° of Pa magnitudes) of 10 ° of Pa magnitudes, the vacuum It disclosure satisfy that the requirement of the use environment of above-mentioned plasma generator 2.
In the present embodiment, above-mentioned plasma generator 2 is communicated in working chamber 1, can produce electron beam, the plasma Generator 2 produces low pressure glow discharge, forms plasma, and it functions as electron source, produces electron beam and by electron beam Convergence, for being scanned preheating to the powder bed in working chamber 1.Above-mentioned plasma generator 2 for vacuum level requirements compared with Low, the vacuum of 10 ° of Pa magnitudes can meet its use requirement.The electron beam that above-mentioned plasma generator 2 is produced only is used for Pre- hot substrate or powder bed, its required precision is not high.The spot size for the electron beam that plasma generator 2 is produced is larger, can To meet the requirement of pre- hot substrate or powder bed.In the present embodiment, about 200 microns of the minimum light spot diameter of above-mentioned electron beam, Accelerating potential 45-60kV, peak power is more than 3kW.It is preferred that, above-mentioned plasma generator 2 is to tilt to install so that production The origin of coordinates of the origin of coordinates of raw electron beam scanning and the surface area of formation cylinder 30 is essentially coincided.It is understood that Above-mentioned plasma generator 2 can also be arranged to upright installation.
Above-mentioned laser generator 3 is arranged in working chamber 1, and it includes laser controller 31 and optics 32, wherein Optics 32 is located at the side of gas access 11, and laser controller 31 is located at the top of optics 32, its laser produced Beam is injected in working chamber 1 by optics 32, for melting the powder bed preheated through electron beam scanning.In the present embodiment, on Stating optics 32 includes clear glass, and laser beam is injected in working chamber 1 by the clear glass.
In the present embodiment, by the setting of above-mentioned plasma generator 2 and laser generator 3, sent out by plasma The electron beam that raw device 2 is produced is scanned preheating to powder bed, its relatively low, operating temperature of size requirement to electron beam hot spot It is low, it is not necessary to high vacuum environment, only need rough vacuum to can be used, process stress can be made low, after part is machined Without being additionally heat-treated, it is ensured that the precision and surface quality of converted products.The laser beam pair produced by laser generator 3 Powder bed is melted, and accurately melts section.
And using plasma generator 2, it is not required to high vacuum environment, and then can introduce inert gas, also with regard to energy Laser generator 3 is enough introduced, and by the purging of the flowing of inert gas to the optics 32 of laser generator 3, to realize etc. Plasma generator 2 is used cooperatively with laser generator 3, completes preheating and fusing to powder bed.Pass through above-mentioned plasma The collective effect for the laser beam that the electron beam and laser generator 3 that body generator 2 is produced are produced, i.e., by electron beam to powder Layer scanning preheating, is melted to powder bed by laser beam, laser beam is disclosure satisfy that while electron beam use condition is met Use condition, be effectively improved product quality and production efficiency.
In the present embodiment, the number of above-mentioned plasma generator 2 and laser generator 3 can be set as needed Put, it can be disposed as one, can also be disposed as multiple.
In the present embodiment, it should be pointed out that the above-mentioned gas being passed through in working chamber 1 in addition to it can be inert gas, It can also be nitrogen.
The present embodiment also provide it is a kind of it is above-mentioned can burning optimization on line increasing material manufacturing method, specifically, as shown in figure 3, should Can the increasing material manufacturing method of burning optimization on line comprise the following steps:
S10, the vacuum in working chamber is adjusted to default rough vacuum.
Specifically, controller detects the pressure in working chamber by pressure sensor, and by the atmospheric pressure value of detection with giving Atmospheric pressure value be compared, the flow of flow controller is controlled according to comparative result, to adjust the vacuum that shaping is indoor.Wherein When the atmospheric pressure value of measurement is more than given atmospheric pressure value, the stream of the inert gas of working chamber is lowered into by flow controller Amount;When the atmospheric pressure value of measurement is less than given atmospheric pressure value, increased by flow controller into the inert gas of working chamber Flow.Controlled by the flow of above-mentioned inert gas, the vacuum in working chamber can be controlled to reach default rough vacuum.This In embodiment, above-mentioned default rough vacuum is specially that (specific atmospheric pressure value is not less than 1Pa, is for the vacuum of 10 ° of Pa magnitudes It is more than 10 ° of Pa magnitudes), the vacuum disclosure satisfy that the requirement of the use environment of plasma generator.
S20, electron beam produced by plasma generator, and preheating is scanned to powder bed by electron beam.
Vacuum in working chamber reaches after default rough vacuum that controller control plasma generator produces electricity Beamlet, subsequent electron beam is scanned preheating to the powder bed laid on piston.
In this step, above-mentioned scanning preheating is carried out using the scanning preheating method of raster pattern, the scanning of above-mentioned raster pattern Preheat and be:The scanning pattern of electron beam scanning pattern in the horizontal direction and vertical direction is alternate to be scanned to powder bed.
More specifically, Fig. 4 is can refer to, first, powder bed is vertically divided into M in advance1Individual horizontal zone, it is above-mentioned M1The cross section of the individual whole 3 d part of region overlay, N is provided with each area in parallel1Individual scanning pattern H;Afterwards, by powder Last layer is divided into M in the horizontal direction2Individual vertical region, N is provided with each vertical area in parallel2Individual scanning pattern V, likewise, on State M2Individual region also covers the cross section of whole 3 d part.
Afterwards, electron beam is controlled along M1Scanning pattern H (m in individual horizontal zone1, n1) and M2In individual vertical region Scanning pattern V (m2, n2) alternately powder bed is scanned, until all scanning patterns are all used, wherein m1=1,2, 3…M1, n1=1,2,3 ... N1, m2=1,2,3 ... M2, n2=1,2,3 ... N2
When carrying out pre-heating scan, first, the scanning pattern in above-mentioned each region is numbered, for example, by M1Individual region First interior scanning pattern number consecutively is H (1,1), H (2,1), H (3,1) ... H (m1, 1), by M1Article 2 in individual region Scanning pattern number consecutively is H (1,2), H (2,2), H (3,2) ... H (m1, 2), by that analogy, by M1N in individual region1Bar Scanning pattern number consecutively is H (1, n1), H (2, n1), H (3, n1)…H(m1, n1).Meanwhile, by M2First in individual region is swept Path number consecutively is retouched for V (1,1), V (2,1), V (3,1) ... V (m2, 1), by M2Article 2 scanning pattern in individual region is successively Numbering is V (1,2), V (2,2), V (3,2) ... V (m2, 2), by that analogy, by M2N in individual region2Bar scanning pattern is successively Numbering is V (1, n2), V (2, n2), V (3, n2)…V(m2, n2).By above-mentioned numbering, that is, the scanning formed needed for raster scanning Path.
Then, control electron beam is scanned according to the raster scanning path of above-mentioned formation successively, specifically controls electricity Beamlet is scanned to powder bed successively by following scanning rule:
H(1-1)、V(1-1)、H(2-1)、V(2-1)、H(3-1)、V(3-1)……H(m1-1)、V(m2-1);H(1-2)、V (1-2)、H(2-2)、V(2-2)、H(3-2)、V(3-2)……H(m1-2)、V(m2-2);……;H(1-n1)、V(1-n2)、H(2- n1)、V(2-n2)、H(3-n1)、V(3-n2)……H(m1-n1)、V(m2-n2), up to electron beam along all scanning patterns to powder Layer run-down, that is, complete whole raster scanning, then repeatedly above procedure, heat repeatedly the cross section carry out it is pre- Heat.
It should be noted that for M1Scanning pattern H in individual horizontal zone, the scanning sequency of the present embodiment can be from On down or from the bottom up;For M2Scanning pattern V in individual vertical region, scanning sequency can be from left to right or past from the right side It is left.Therefore four kinds of scanning sequencies can be amplified out, i.e.,:Turned left+from left to right, from top to bottom+from the right side, from the bottom up from top to bottom Turned left+from left to right and from the bottom up+from the right side, above-mentioned four kinds of scanning sequencies are in the protection domain of the present embodiment.This In embodiment, foregoing scanning rule be from the bottom up+from the scanning sequency turned left of the right side.
In the present embodiment, above-mentioned scanning pattern H (m1, n1) and scanning pattern H (m1+ 1, n1) the distance between D1More than described Scanning pattern H (m1, n1) and scanning pattern H (m1, n1+ 1) the distance between d1, wherein, above-mentioned m1Less than M1, above-mentioned n1Less than N1
Above-mentioned scanning pattern V (m2, n2) and scanning pattern V (m2+ 1, n2) the distance between D2More than above-mentioned scanning pattern V (m2, n2) and scanning pattern V (m2, n2+ 1) the distance between d2, wherein, above-mentioned m2Less than M2, above-mentioned n2Less than N2.Generally, it is above-mentioned Apart from D1And D2In more than 5mm, apart from d1And d2Between 0.1mm-2mm, in order to multiple scanning, and by level, hang down Directly scanning alternately can make the temperature field of pre-heating scan formation more uniform, and charge concentration is also avoided to greatest extent.
In the present embodiment, multipass preheating can be carried out using aforesaid way so that material in scanning area (substrate or Person's dusty material) temperature heat up or cool according to default speed.
S30, laser beam produced by laser generator, and the powder bed preheated through electron beam scanning is entered by laser beam Row fusing.
After the scanning preheating that step S20 completes a powder bed, controller control laser generator produces laser beam, by The laser beam melts to the powder bed after scanning preheating.
Specifically, as shown in figs.5 and 6, powder bed can be divided at least one profile 100, and positioned at profile 100 Interior interior zone 101, above-mentioned laser beam can first scan fusing interior zone 101, and then scanning fusing profile 100, also may be used First to scan fusing profile 100, then fusing interior zone 101 is scanned, until powder bed is scanned fusing completely.Above-mentioned profile 100 can be one or a plurality of after biasing, be parallel to each other between a plurality of profile 100.
Further, can be by its interior zone when the area of interior zone 101 that above-mentioned profile 100 is surrounded is larger 101 are divided into smaller subregion, such as checkerboard partitioning scheme as shown in Figure 5, or as striated as shown in Figure 6 is split Mode.Laser beam is in a fixed order or random sequence scans described subregion, and all subregions and profile 100 are common Constitute powder bed.The path of above-mentioned scanning subregion can be one group of parallel line segment, and the direction of line segment can be 0 degree, 90 degree And other angles, laser beam is successively or at random along the fusing of all line-segment sweeps, you can complete the fusing of the subregion.This reality Apply in example, the minimum light spot of above-mentioned laser beam is a diameter of 20-50 microns, to reach the required precision needed for scanning fusing.
In the present embodiment, it is preferred that the order of the scanning preheating in above-mentioned steps S20 and the fusing in step S30 can To be adjusted as needed, for example, it can first carry out the scanning preheating in step S20, carry out again in step S30 afterwards Fusing, to complete the forming process of powder bed.The scanning preheating in step S20 can also be first carried out, is then carried out in step S30 Fusing, carry out once again afterwards in rapid S20 scanning preheating, with reach further eliminate stress purpose.Can be with advanced Scanning preheating in row step S20, is then melted, Zhi Houzai by the fusing in step S30 to a part for powder bed The scanning preheating in once rapid S20 is carried out, then another part of powder bed is melted by the fusing in step S30, Circulation said process until powder bed is completely melted shaping, with suitable for cross section very greatly, laser beam melts process it is oversize, Powder layer surface is not belonging to the more environment of temperature drop in the region in section.
Preheating step and fusing step are alternately scanned to powder bed successively by above-mentioned, and powder bed is scanned The step of preheating, number was not less than number the step of fusing to powder bed, up to powder bed is completely melted the mode of shaping, energy It is enough more accurately to melt section, improve the precision and surface quality of converted products.And powder bed is scanned by electron beam Preheating, it has carried out burning optimization on line equivalent to powder bed, it is to avoid crackle caused by thermal stress, reduces the residual of drip molding Stay stress, part to be additionally heat-treated after machining, save the time, improve product quality.
Obviously, the above embodiment of the present invention is just for the sake of clear explanation example of the present invention, and is not pair The restriction of embodiments of the present invention.For those of ordinary skill in the field, may be used also on the basis of the above description To make other changes in different forms.There is no necessity and possibility to exhaust all the enbodiments.It is all this Any modifications, equivalent substitutions and improvements made within the spirit and principle of invention etc., should be included in the claims in the present invention Protection domain within.

Claims (10)

1. it is a kind of can burning optimization on line increasing material manufacturing device, it is characterised in that including:
Working chamber (1), inside has default rough vacuum, and which is provided with gas access (11) and gas vent (12);
Plasma generator (2), is communicated in the working chamber (1), for producing electron beam, and by the electron beam to shaping Powder bed scanning preheating in room (1);
Laser generator (3), on working chamber (1) and positioned at the side of gas access (11), for producing laser beam Melt the powder bed;
Controller (4), is connected to the plasma generator (2) and laser generator (3).
2. it is according to claim 1 can burning optimization on line increasing material manufacturing device, it is characterised in that it is described default low true Reciprocal of duty cycle is the vacuum of 10 ° of Pa magnitudes.
3. it is according to claim 1 can burning optimization on line increasing material manufacturing device, it is characterised in that the gas access (11) place is provided with gas generation apparatus (5), and the gas vent (12) is connected with vacuum acquirement device (6), and the gas is produced Device (5) and vacuum acquirement device (6) are respectively connected with the controller (4).
4. it is according to claim 3 can burning optimization on line increasing material manufacturing device, it is characterised in that the gas produces dress Put between (5) and the gas access (11) provided with the flow controller (7) for being connected to controller (4);
The pressure sensor (8) for being connected to controller (4) is additionally provided with the working chamber (1).
5. it is according to claim 1 can burning optimization on line increasing material manufacturing device, it is characterised in that also including substrate, institute Heating can be scanned to the substrate by stating the electron beam of plasma generator generation.
6. it is a kind of can burning optimization on line increasing material manufacturing method, it is characterised in that
Under default rough vacuum, electron beam is produced by plasma generator, and by the electron beam to powder bed It is scanned preheating;
Laser beam is produced by laser generator, and the powder bed preheated through the electron beam scanning melted by laser beam Change.
7. it is according to claim 6 can burning optimization on line increasing material manufacturing method, it is characterised in that also include:
The step of being alternately scanned preheating step to powder bed successively and melt step, and preheating is scanned to powder bed number Not less than number the step of fusing to powder bed.
8. it is according to claim 6 can burning optimization on line increasing material manufacturing method, it is characterised in that it is described to pass through the electricity Beamlet is scanned preheating to powder bed to be included:
Powder bed is vertically divided into M1Individual horizontal zone, it is parallel in each horizontal zone to be provided with N1Individual scanning road Footpath H;
Powder bed is divided into M in the horizontal direction2Individual vertical region, N is provided with each vertical area in parallel2Individual scanning road Footpath V;
Electron beam is controlled along M1Scanning pattern H (m in individual horizontal zone1, n1) and M2Scanning pattern V in individual vertical region (m2, n2) alternately powder bed is scanned, until all scanning patterns are all used, wherein m1=1,2,3 ... M1, n1=1, 2,3 ... N1, m2=1,2,3 ... M2, n2=1,2,3 ... N2
9. it is according to claim 6 can burning optimization on line increasing material manufacturing method, it is characterised in that it is described to pass through laser beam Carrying out fusing to the powder bed preheated through the electron beam scanning includes:
Powder bed is divided at least one profile, the profile in advance and is provided with some regions;
Control laser beam melts to the region in the profile and the profile, until the powder bed is melted completely Change.
10. it is according to claim 6 can burning optimization on line increasing material manufacturing method, it is characterised in that also include:Detect into The pressure of shape chamber interior, and the inert gas flow entered in working chamber is adjusted according to the pressure of detection.
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