CN107017335A - Electromechanical converter and the method for manufacturing electromechanical converter - Google Patents

Electromechanical converter and the method for manufacturing electromechanical converter Download PDF

Info

Publication number
CN107017335A
CN107017335A CN201710010252.6A CN201710010252A CN107017335A CN 107017335 A CN107017335 A CN 107017335A CN 201710010252 A CN201710010252 A CN 201710010252A CN 107017335 A CN107017335 A CN 107017335A
Authority
CN
China
Prior art keywords
layer
band
elasticity
electromechanical converter
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710010252.6A
Other languages
Chinese (zh)
Inventor
S.德内
A.迈尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of CN107017335A publication Critical patent/CN107017335A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
    • B32B3/04—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by at least one layer folded at the edge, e.g. over another layer ; characterised by at least one layer enveloping or enclosing a material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/04—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/04—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B25/047—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material of particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/04—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B25/08—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/14—Layered products comprising a layer of natural or synthetic rubber comprising synthetic rubber copolymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/20—Layered products comprising a layer of natural or synthetic rubber comprising silicone rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B32B5/16—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by features of a layer formed of particles, e.g. chips, powder or granules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00—Layers arrangement
    • B32B2250/04—4 layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00—Layers arrangement
    • B32B2250/05—5 or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/04—Coating on the layer surface on a particulate layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/10—Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2260/00—Layered product comprising an impregnated, embedded, or bonded layer wherein the layer comprises an impregnation, embedding, or binder material
    • B32B2260/02—Composition of the impregnated, bonded or embedded layer
    • B32B2260/025—Particulate layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2260/00—Layered product comprising an impregnated, embedded, or bonded layer wherein the layer comprises an impregnation, embedding, or binder material
    • B32B2260/04—Impregnation, embedding, or binder material
    • B32B2260/046—Synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2264/00—Composition or properties of particles which form a particulate layer or are present as additives
    • B32B2264/10—Inorganic particles
    • B32B2264/105—Metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2264/00—Composition or properties of particles which form a particulate layer or are present as additives
    • B32B2264/10—Inorganic particles
    • B32B2264/107—Ceramic
    • B32B2264/108—Carbon, e.g. graphite particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/202—Conductive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/204—Di-electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/30—Properties of the layers or laminate having particular thermal properties
    • B32B2307/308—Heat stability
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/51—Elastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/54—Yield strength; Tensile strength
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/546—Flexural strength; Flexion stiffness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Laminated Bodies (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Electromechanical converter（1）, it includes carrying at least four mutual consecutive smooth layers（3、4、5、6）Sequence of layer layer system, wherein, the first layer（3）And third layer（4）The first flexible material, and the second layer（5）With the 4th layer（6）The second flexible material, wherein, the first elastic material can be conductive, and the second material of elasticity has dielectric, and wherein, the 3rd material is with band（8）Form so install or put on the layer for the outside for entering the sequence of layer and/or the sequence of layer the layer（3、4、5、6）At least one in：So that improving in the band（8）Direction on the layer system rigidity.

Description

Electromechanical converter and the method for manufacturing electromechanical converter
Technical field
The present invention relates to electromechanical converter and for the method for the converter for manufacturing electromechanics.
Background technology
The electromechanical converter of capacitive from the Al of WO 2013/120494, the converter has thin polymer Layer, the polymeric layer is imbedded between two layers that can be conductive, wherein, all layers are on a direction parallel to the layer Construct to corrugated.It hereby is obtained that, this layer system possesses larger rigidity perpendicular to the direction of the undulatory form of expression, Especially when the layer that can be conductive is formed by stiff material, such as metal.
The content of the invention
Invention advantage
The electromechanical converter according to the present invention with the feature according to the present invention（Including mutually consecutive with least four The layer system of the sequence of layer of smooth layer）Accordingly had the advantage that with this, the rigidity of the layer system at two each other just On the direction of friendship（Plane of this both direction parallel to the layer system）It can substantially independent of one another set.Can be such as It is accomplished that, the layer system is flexible in one direction and elasticity, and it is not flexible on the direction orthogonal with this or possess High rigidity.This puts the use especially in the operation during the manufacturing process in layer system and after or further used It is favourable during the layer system.
Pliability in one direction or the rigidity on the direction orthogonal with this according to the electric of the present invention by turning Parallel operation realizes that the converter includes the layer system of the sequence of layer with least four mutual consecutive smooth layers, wherein, the One and the first flexible material of third layer, and second and the 4th layer of the second flexible material, wherein, the elasticity The first material can be conductive, and the second elastic material has dielectric, and wherein, the 3rd material is with band Form so install or put on the layer for the outside for entering the sequence of layer and/or at least one of the layer of the sequence of layer in： So that improving the rigidity of the layer system on the direction of the band.
By electromechanical converter it will be appreciated that being to include being installed in each one on two sidepieces of the layer that the electricity is situated between The device of elastic layer that is situated between of the electricity for being capable of conductive layer, wherein, by apply voltage between two layers that can be conductive, The power of electrostatic between two layers that can be conducted so works：So that the layer that therebetween elastic electricity is situated between is pressed Merge and be stretched herein.Herein advantageously, the material that the elastic electricity is situated between has small modulus of elasticity, high dielectric normal Several and high breakdown strengths.Typically, in about 30V/ μm of field strength, about 20% to 30% elastic electricity can be realized The extension of the layer of Jie.The thickness for the layer that the elastic electricity is situated between is usually located at about 20 μm.It can be considered that, the thickness model Enclose positioned between 5 μm and 100 μm.
Also the converter of electromechanics can also be used, to sense the power being applied to thereon.Here, can be conductive at two Layer on when applying voltage, voltage change can be determined, changed when by there is power to be measured to be applied on the converter of electromechanics When becoming the thickness for the layer that the elastic electricity is situated between.
Electromechanical converter for example can be normally used as linear actuator for so that having in regulation drive device Regulating element to be driven moves pre-qualified stroke, as peristaltic pump in medical technology or in microsystems technology or in tactile Display in be used to produce alternative and/or additional information channel by the surface characteristic that can change.The display of tactile Device can be used to show braille especially as variable display.Electromechanical converter can also be used as force snesor.
By layer it will be appreciated that being flat object, the object stretches in one plane, and the plane is orthogonal by two Direction strut, and the object possesses significantly smaller stretch on the orthogonal third direction in relative to two other directions Exhibition.The material of elasticity can be generally understood as the material with less rigidity.Typically, the rigidity of material depends on the material The elastic characteristic of material and the geometry of the material.Especially, the bending rigidity of hereinafter referred to as rigidity is material The product of the face the moment of inertia of the cross section of modulus of elasticity and material, wherein, the face rotary inertia depends on the horizontal stroke of the material The face the moment of inertia of the shape in section.Therefore it is possible that, layer or layer system change in its mechanical characteristic, especially rigidity, do Method is：For example an other material be installed into by form of parallel band the layer or layer system two sidepieces it On one.Herein, it can for example refer to the identical material of the layer or one of the material of the layer system.But also can Enough consider, it refers to other materials.The side perpendicular to the parallel band of the layer or described layer system To rigidity be not changed by these parallel bands substantially.Differently, the layer or the layer system rigidity On the direction parallel to the parallel band dependent on the single band cross section and its to each other away from progress Change or improve.Especially, the layer or the layer system rectangle of the rigidity in the band cross section in the case of according to Ratios of the Lai Yu between the height and width of the band.
It can be considered that, the parallel band of the 3rd material is installed in two of the layer or described layer system On sidepiece.Thus, the layer or the rigidity of the layer system can be advantageously on a direction parallel to the band Further improve.Pointedly, the parallel bar belt installed on a sidepiece of the layer or described layer system There is the lateral biasing relative to the parallel band, the band is installed in the other side of the layer or described layer system In portion.It can also consider, the band installed on a sidepiece of the layer or described layer system has relative Biased in the direction of the band, the band is installed on the other sidepiece of the layer or described layer system.It is furthermore possible to Consider, the cross section of the band changes along the band.The spacing of adjacent band can also be along the band Change.By the variations of previous enumeration, the rigidity of the layer or described layer system can be at one parallel to the bar It can be variably set on the direction of band or in the direction scope for being arranged essentially parallel to the band.
In addition it is appropriate that the parallel band of other material is integrated into the layer in the layer system.This point can For example it is achieved in, method is：The material is replaced in the layer of the layer system in the way of band.It means that one There is the band of other material in the intermediate space of the band of individual material.As long as the elastic characteristic of described two materials is enough Difference, or the difference of the modulus of elasticity of a material and other material are sufficiently large, then can be achieved in the side of the band The rigidity through raising of the upward layer or described whole layer system.
Due to the measure listed in preferred embodiment and other embodiments, electromechanical conversion illustrated in the present invention The favourable modification and improvement project of device are feasible.
Pointedly, the layer system can be rolled as volume actuator around the axis perpendicular to the band.This meaning , the flat layer system being capable of any continually phase each other by rolling for being carried out around the axis perpendicular to the band Set foldedly.Thus, enable in an advantageous manner on the direction perpendicular to a plane parallel to the layer Compression increase corresponding to the quantity of layer system that is stacked one upon the other or the quantity of sequence of layer or so manufactured actuator Extension can increase.In addition, rolling by the layer system based on parallel band, generates the object of tubular, should Object possesses high rigidity on the direction of the band or perpendicular to axis is rolled.By layer system by it is described roll into Capable multiplication, advantageously also achieves the multiplication of power being applied on the volume actuator or setting out.This point is advantageously able to For：Increase the application field of the electromechanical converter, and independent of：Whether the electromechanical converter is used as actuator Or it is used as generator or sensor application.
It is also advantageous that, the first elastic material is configured to electrode.Thus, institute can be touched in a straightforward manner State the layer for being capable of conduction.In addition it is appropriate that the dielectric build is elastomer.Because elastomer is situated between compared to other electricity Material it is very light and it has high elastic energy density.Thus, it can manufacture big and simultaneously light in an advantageous manner Electromechanical converter, the converter has high efficiency.
It is also advantageous that, the 3rd material compared to the first material and/or the second material have at least one with because The higher modulus of elasticity of number 2, preferably with the higher modulus of elasticity of factor 10, especially preferably with the higher springform of factor 100 Measure and very especially preferably with the higher modulus of elasticity of factor 1000.
Because the face the moment of inertia of the cross section except material, the modulus of elasticity of the material is to determine for the rigidity of the material Qualitatively.Through this, the rigidity of the whole layer system on the direction of the parallel band formed by the 3rd material is increased.
Pointedly, elastic first material that can be conductive is configured to composite, and the composite has true Determine the elastic carrier material of mechanical property and determine the component that can be conducted of conductance, especially metallic particles and/or carbon nanometer Pipe.The component that can be conducted of the conductance is determined by putting into, can be matched in an advantageous manner in certain scope described The conductibility of material, the mechanical property without significantly changing the material.Thus, it is possible to be obtained in the electromechanical converter of manufacture The other free degree.
It is also advantageous that, the second elastic material has silica gel and/or acrylic resin.Because silica gel or propylene Acid resin has especially small modulus of elasticity, and this causes its big ductility.In addition, it has high dielectric constant and high punctured Intensity, they are helpful for the use in electromechanical converter.
It is also advantageous that, first material, the second material and/or the 3rd material can handle to wet-chemical and/or Application.The process step or manufacturing step of wet-chemical are generally not to expend very much energy, because the process step or manufacturing step energy It is enough to implement at room temperature and do not need low pressure.In addition, the result can be reproduced well in the method and step through setting up. Thus, it is possible to be advantageously carried out small manufacturing cost.
In the method for the converter for manufacturing electromechanics, the converter includes mutually consecutive smooth with least four Layer sequence of layer layer system, this method carry step：The first layer of first material of elasticity is installed into bearing bed or load On film；The second layer of second material of elasticity is installed on first layer；The third layer of first material of elasticity is installed into the On two layers；The 4th layer of second material of elasticity is installed into third layer, wherein, the first elastic material can be led Electricity, and the second elastic material has dielectric, is provided that, is installing the first layer to the carrier material Before, after last layer is installed, and/or during the layer is installed, the 3rd material is so installed into ribbon form On the layer of the outside of the sequence of layer and/or so put into one of described layer of the sequence of layer：So that in the band Direction on improve the rigidity of the layer system.It is visible herein in addition that the advantage of the method is similar to above-mentioned embodiment：Institute The rigidity for stating layer system can be constructed changeably on the direction of the band.By improving described on the direction of the band The rigidity of layer system, for example can release the layer system from the film carrier more easily.Equally, the layer system is possible The follow-up follow-up manual behaviour being processed further by the rigidity simplification on the direction of the layer system or the layer system It is simplified.
It is also advantageous that, at least one methods described step has the method and step of wet-chemical, especially typography, example Such as gravure process, roll marks method and/or inkjet printing methods.In these printing processes through setting up, the layer is realized System it is favourable in cost, manufacture quickly and accurately, and the feasible program especially provided is, two-dimensionally structuring There is layer to be manufactured, such as by putting into ribbon structure.
It is also advantageous that, according at least one methods described step, realize drying steps or cure step.This promise , the single layer is stable in its geometry, and multiple layers stackedly set succeed one another or against each other Ground keeps attachment.For example it can be considered that, the drying steps or cure step by heated in stove the layer system or The single layer of the layer system and carry out, after these are installed.In the other structural scheme of the present invention, multiple layers It can for example be hardened after the layer is installed by UV light.The premise of this point is that single layer or multiple layers include component, The component changes the chemical characteristic of the component by the radiation of UV light and thus hardened.
It is also advantageous that, the layer system is rolled around the axis parallel to band.It can be considered that, in layer Or other layer install every time after rear and may be follow-up drying process, in order to be processed further, the layer system is rolled up Rise to volume.In subsequent steps（Wherein, the ensuing layer is installed）, the layer system can be then from previous warp The volume rolled is wound off again, and the layer for needing application can be installed, and possible follow-up drying process can occur, and the layer Furthermore system can be rolled as volume.Therefore, it is possible to consideration, for example layer install step every time after, the layer system is rolled For volume, and ensuing layer it is other install step before, the layer system is wound off again from the volume.For example it can also examine Consider, after the manufacturing process of the layer system is terminated, the layer system is from the film carrier leafing, method：The series of strata System is rolled up to volume, and the film carrier is rolled up to single volume.Here, it is noted that the axis（The layer system Rolled around the axis）Parallel to the band installed in a manufacturing method.
From following explanations of embodiment referring to the drawings and obtained in addition from preferred embodiment and other embodiments Advantage.
Brief description of the drawings
Diagram：
Fig. 1 is the schematic diagram of the electromechanical converter according to the present invention,
Fig. 2 is the top view of the other make of the electromechanical converter according to the present invention,
Fig. 3 is the top view of the other make of the electromechanical converter according to the present invention,
Fig. 4 is the schematic diagram in the electromechanical converter according to the present invention through rolling, and
Fig. 5 is the schematic diagram for manufacturing the method according to the invention of the converter of electromechanics.
Embodiment
Show the converter 1 of electromechanics in the perspective in Fig. 1, it is included in the different layers on film carrier 2.In addition, Illustrate the coordinate system 100 with three orthogonal axis 101,102 and 103.The film carrier 2 and electromechanical converter 1 Layer parallel to the plane strutted by axis 101 and 102.Extension of the layer in the plane can be calculated as several millimeters, excellent Select several centimetres and especially preferably several decimetres.Film carrier 2 is essentially flat, flexible and mechanically stable and thermally-stabilised, and And particularly it is used as the matrix of the layer for being installed after electromechanical converter 1 herein.
The electromechanical converter 1 have on the direction of axis 103 three with three different materials it is different Channel type.First layer 3 is directly installed on the film carrier 2.The material shape that the first layer 3 and third layer 4 are situated between by the electricity of elasticity Into the material can have about 15 μm to 50 μm of thickness.Herein, it can refer to such elastomer：It has Big ductility, high dielectric constant and high breakdown strength.It can especially refer to silica gel.
Used silica gel, which can have, herein is less than 1 N/mm2Modulus of elasticity, the dielectric constant more than 2.8 and big In 20 kV/mm breakdown strength.
The second layer 5 is directly installed on first layer 3.The second layer 5 and the 4th layer of 6 the material that can be conductive by elasticity Formed, the material there can be about 5 μm to 30 μm of thickness.Herein, it can refer to such silica gel again：It has The mixing of material that can be conductive.Herein, material that can be conductive is for example referred to by silver, graphite, carbon black and/or carbon nanometer The particle of pipe formation.The share for the material that can be conducted described at the volume of the layer can be chosen such that herein：Make The connection that can be conductive between the single particle of the material that can be conducted must be constructed.Third layer 4 is installed in On two layer 5, and the 4th layer 6 is installed in the third layer 4.
The second layer 5 and the 4th layer 6 can be configured to electrode, by external voltage supply portion 7 voltage can be installed to The electrode.Thus, the second layer 5 and it is described 4th layer 6 between be similar to capacitor on the direction of the axis 103 The power of electrostatic is constructed, the power presses third layer 4.Herein, the electric field can be calculated as about 90 V/ μm.Because described Third layer 4 is formed by almost incompressible material such as silica gel, then the third layer 4 in the layer plane parallel to axis 101 and 102 extend.This extending effect on the direction of the axis 101 and 102 and/or the compression effectiveness on axis 103 It can be used the power installed and for sensing machinery.
Parallel band 8 has been installed parallel to axis 102 on described 4th layer 6.The parallel band 8 can be such as Manufactured by painting, the paint, which has, higher compared to material in the layer 3,4,5,6 is greater than 2000 N/mm2Bullet Property modulus.The parallel band 8 has cross section 9, and the cross section is further defined except the modulus of elasticity of used material The rigidity of the parallel band 8 on the direction of the axis 102.The cross section 9 can be, for example, square or square Shape.In the cross section 9 of rectangle, the length on the direction of the axis 103 of the parallel band 8 can be advantageously big In the length on the direction of the axis 101 of the parallel band 8, to realize on the direction of the axis 102 The parallel band 8 and thus whole electromechanical converter 1 rigidity as high as possible.
It can also consider, cross section 9 of the parallel band 8 on the direction of the axis 101 changeably structure Make and/or can also change on the direction of the axis 102.
Spacing of the parallel band 8 on the direction of the axis 101 can be constructed equably.It can be considered that It is that the spacing of such as two adjacent parallel bands 8 is equal to the length of the parallel band 8 on the direction of the axis 101 Degree.It can also consider, the ground of the gap variable on the direction of the axis 101 between the parallel band 8 structure Make and/or can also change on the direction of the axis 102.
In addition, the present invention an alternative structural scheme in it can be considered that, the first layer 3 and the described 3rd Layer 4 is formed by the conductive material of being capable of of elasticity, and the second layer 5 and described 4th layer 6 have elastic electricity Jie Material.
Show another embodiment of the electromechanical converter 1 according to the present invention in side view in fig. 2.Displaying Parallel to the cross section of the electromechanical converter 1 of the axis 101 and 103.The layer system of the electromechanical converter 1 is again It is installed on the film carrier 2.Difference with the embodiment in Fig. 1 is that the parallel band 8 is not installed in described 4th layer On 6, but positioned at the first layer 3 times or interior.It is possible that the parallel band 8 is directly installed on film carrier 9, and In follow-up process steps, the first layer 3 is applied and is attached on the parallel band 8.It is possible that herein, described One layer 3 of material is also got into the intermediate space 10 of the parallel band 8 and partially or even wholly filled in the middle of these Space.In an alternative structural scheme, in being oriented with the parallel identical of band 8 on the film carrier 2 The extra layer portion of the parallel band 8 is optionally installed on described 4th layer 6, described electromechanical further to improve The rigidity of converter 1.
It is possible that the first layer 3 is by the parallel generation of band 8 in the alternative embodiment of the present invention Replace, wherein, the follow-up second layer 5, third layer 4 and the 4th layer 6 of order are not changed.It is described to make through this guarantee The second layer 5 worked for electrode and the 4th layer of 6 holding electric current point when the electromechanical converter 8 is rolled as volume actuator From.
Show another alternative embodiment party of the electromechanical converter 1 according to the present invention in side view in figure 3 Formula.Illustrate the cross section of the electromechanical converter 1 parallel to the axis 101 and 103.The layer of the electromechanical converter 1 System is installed on the film carrier 2.Difference with the embodiment in Fig. 1 or Fig. 2 is that the parallel band 8 is located at described In the second layer 5.Thus, the second layer 5 has the composite bed of strip-form, and the composite bed includes the parallel of the 3rd material The parallel band of band 8 and the intermediate space of the filling parallel band 8 of the second other material, second material has Elasticity and can be conductive.Advantageously, parallel band example of the material that can be conductive on the direction of the axis 101 Such as it is connected with each other by unshowned horizontal contact pin in figure 3, also to ensure the electricity on the direction in the axis 101 Lead.When voltage is installed to the second layer 5 and the 4th layer 6, the power of electrostatic is constructed between the two layers, and the power is by third layer 4 Pressing.Because the electrode of bottom（It is formed here by the material that can be conductive of the strip-form in the second layer 5）It is uneven Uniform flat, then elastic dielectric extension on the direction of the axis 101 in the third layer 4 is different Extension on the direction in the axis 102.It is possible that described parallel in the alternative embodiment of the present invention Band 8 extraly and/or be alternatively integrated in described 4th layer 6, so as to further improve in the direction of the axis 102 On the electromechanical converter 1 rigidity.
Illustrate in Fig. 4 and be rolled-up to roll up the electromechanical converter 1 of actuator 20.In addition, illustrate with three that The coordinate system 100 of this orthogonal axis 101,102 and 103.
The volume actuator 20 has a previously illustrated layer 3,4,5,6, and the layer is for according to functionally using as machine The converter 1 of electricity is helpful.In addition, being simplifiedly demonstrated as other layer according to the parallel band 8 of the present invention.It is logical Cross the layer to roll in multiple times to roll up actuator 20, the compression effectiveness also doubles, in the compression effectiveness, electromechanical converter The third layer 4 pressed.In addition, first layer 3 is also pressed because by it is described roll the not only third layer 4 and The second layer 5 and the 4th layer of 6 encapsulating that the first layer 3 is worked as electrode.Installed by voltage to the second layer 5 and the 4th During layer 6, thus the first layer 3 and the third layer 4 are pressed, and the volume actuator 20 is supportted by axis 101 and 102 Compressed in the plane opened along radial direction.The parallel band 8（It is oriented parallel to the axis 102）Assign the volume Actuator 20 is in this side up the rigidity through raising, and this, which facilitates the electromechanical converter 1, turns into the volume of volume actuator 20 The process of rising also facilitates the operation of the volume actuator 20.
Along the effect or the volume actuator axially of the compression of the volume actuator 20 of radial direction 20 extension can be used in installing and for sensing mechanical power.
The embodiment of the method according to the invention for manufacturing electromechanical converter 1 is illustrated in Figure 5.Optional side Method step frame by a dotted line or arrow are characterized.In an optional application step 80, by with high modulus of elasticity The layer of the parallel formation of band 8 of paint be installed on flexible, mechanically stable and heat-staple film carrier 2.The film carrier 2 is herein Wound off by one, the parallel band 8 is for example by ink ejecting method on the traffic direction of the film carrier 2 or perpendicular to axle Line（The film carrier is wound off around the axis）It is printed on the film carrier 2.In optional drying steps 90, the parallel bar Band 8 or the paint are dried, and method is：The film carrier 2 is for example directed through stove, and the stove is heated to dependent on used material In the specific temperature of material.Followed by the first application step 30, in the application step, the first layer formed by silica gel 3 by roll-in applications be installed on the film carrier 2 or the parallel band 8 on.In follow-up optional drying steps 91, The first layer 3 is similar to previously illustrated process and dried.As option, can now realize it is extra and/or Alternative application step 81, in the application step, the layer that the parallel band 8 by painting is formed is by ink ejecting method described It is installed on the traffic direction of film carrier 2 on the first layer 3.As option, carry out extra and/or alternative dry and walk Rapid 92, in the drying steps, the parallel band 8 is similar to previously illustrated process and is dried.
Followed by the second application step 40, in the application step, by from silica gel and the silver that can be conducted The second layer 5 of the composite formation of grain is installed into the parallel band 8 or first layer 3 formed by silica gel by roll-in application On.In follow-up optional drying steps 93, the second layer 5 is similar to previously illustrated process and dried.As appoint Scheme is selected, extra and/or alternative application step 82 can be now realized, in the application step, parallel by what is painted The layer of the formation of band 8 is installed on the second layer 5 by ink ejecting method on the traffic direction of the film carrier 2.As optional Scheme, carries out extra and/or alternative drying steps 94, in the drying steps, and the parallel band 8 is similar to previous Illustrated process is dried.
Followed by the 3rd application step 50, in the application step, the third layer 4 formed by silica gel is passed through roll-in Application is installed on parallel band 8 or the second layer 5 by being formed from silica gel and the composite for the Argent grain that can be conducted. In follow-up optional drying steps 95, the third layer 5 is similar to previously illustrated process and dried.It is used as optional side Case, can now realize extra and/or alternative application step 83, in the application step, the parallel band 8 by painting The layer of formation is installed into the third layer 4 by ink ejecting method on the traffic direction of the film carrier 2.As option, Extra and/or alternative drying steps 96 are carried out, in the drying steps, the parallel band 8 is similar to previously described Bright process is dried.
Followed by the 4th application step 60, in the application step, by from silica gel and the silver that can be conducted The 4th layer 6 of the composite formation of particle is installed into the parallel band 8 formed by silica gel or third layer 4 by roll-in application On.In follow-up optional drying steps 97, described 4th layer 6 is similar to previously illustrated process and is dried.As appoint Scheme is selected, extra and/or alternative application step 84 can be now realized, in the application step, parallel by what is painted The layer of the formation of band 8 is installed on described 4th layer 6 by ink ejecting method on the traffic direction of the film carrier 2.As optional Scheme, carries out extra and/or alternative drying steps 98, in the drying steps, and the parallel band 8 is similar to previous Illustrated process is dried.
It can be considered that, the present invention an alternative embodiment in, the drying steps 90,91,92,93, 94th, 95,96,97,98 are replaced by the drying steps uniquely terminated.In addition it is possible that as to drying steps 90, 91st, 92,93,94,95,96,97,98 alternative or additional aspects, at least one is carried out in the material using photaesthesia Cure step, the material or the layer through application are radiated preferably by ultraviolet light.
In a follow-up leafing step 85, the electromechanical converter 1 is released from the film carrier 2.This step is favourable Thus ground simplify：I.e. the electromechanical converter 1 at least one layer lower section, above and/or the inside install or put into The parallel band 8 of paint with high modulus of elasticity, the band improves the electromechanics on the direction of the parallel band 8 Converter 1 rigidity.From the electromechanical converter 1 of the leafing of film carrier 2 it is follow-up roll to roll in step 200 held for volume Row device 20.
The application step 30 that is initially mentioned, 40,50,60 can implement by the different printing processes through setting up, In the printing process, used material exists in solvent, liquid state is for example dissolved with.Except ink ejecting method, Volume to volume method, such as gravure process, raised relief printing method, uninterrupted printing process or planographic method also be can be regarded as This.
It is possible that the single layer 3,4,5,6 passes through the list in the alternative embodiment of the present invention The coextrusion of individual material and be installed into simultaneously on the film carrier 2 and the parallel bar realized in a follow-up step With 8 application.
In addition it is possible that the single layer 3,4,5,6 is manufactured in single manufacture method, and it is single or common Ground, which is folded, to be set on the film carrier 2.Herein, the application of the parallel band 8 can be carried out in a follow-up step.

Claims (12)

1. electromechanical converter（1）, it includes carrying at least four mutual consecutive smooth layers（3、4、5、6）Sequence of layer Layer system,
Wherein, first layer（3）And third layer（4）The first flexible material, and the second layer（5）With the 4th layer（6）Have Second material of elasticity,
Wherein, the first elastic material can be conductive, and the second material of elasticity has dielectric,
Characterized in that,
3rd material is with band（8）Form so install or put on the layer for the outside for entering the sequence of layer and/or described The layer of sequence of layer（3、4、5、6）At least one in：So that improving in the band（8）Direction on the layer system Rigidity.
2. according to the electromechanical converter described in claim 1（1）, it is characterised in that the layer system is surrounded perpendicular to described Band（8）Axis can roll.
3. according to the electromechanical converter described in claim 1 or 2（1）, it is characterised in that elastic the first material construction For electrode.
4. the electromechanical converter as any one of preceding claims（1）, it is characterised in that the dielectric is elasticity Body.
5. the electromechanical converter as any one of preceding claims（1）, it is characterised in that the 3rd material is compared There is at least one with the higher modulus of elasticity of factor 2 in the first material and/or the second material, preferably with the higher bullet of factor 10 Property modulus, especially preferably with the higher modulus of elasticity of factor 100 and very especially preferably with the higher bullet of factor 1000 Property modulus.
6. the electromechanical converter as any one of preceding claims（1）, it is characterised in that the first elastic material Material is configured to composite, and the composite has the elastic carrier material for determining mechanical property and determines can passing for conductance The component led, especially metallic particles and/or CNT.
7. the electromechanical converter as any one of preceding claims（1）, it is characterised in that the second elastic material Material has silica gel and/or acrylic resin.
8. the electromechanical converter as any one of preceding claims（1）, it is characterised in that first material, Two materials and/or the 3rd material can be handled to wet-chemical and/or application.
9. the converter for manufacturing electromechanics（1）Method, the converter include with least four mutually it is consecutive smooth Layer（3、4、5、6）Sequence of layer layer system, this method carry step：
By the first layer of the first material of elasticity（3）It is installed into film carrier（2）On；
By the second layer of the second material of elasticity（5）It is installed on first layer（3）；
By the third layer of the first material of elasticity（4）It is installed into the second layer（5）On；
By the 4th layer of the second material of elasticity（6）It is installed into third layer（4）On,
Wherein, the first elastic material can be conductive, and the second elastic material has dielectric,
Characterized in that, installing the first layer（3）To the film carrier（2）Go forward, installing last layer（6）Afterwards, and/or Installing the layer（3、4、5、6）Period, by the 3rd material with band（8）Form be so installed into the outer of the sequence of layer On the layer in portion and/or so put the layer into the sequence of layer（3、4、5、6）One of in：So that in the band（8）'s The rigidity of the layer system is improved on direction.
10. in accordance with the method for claim 9, it is characterised in that methods described step（30、40、50、60、80、81、82、 83、84）At least one have wet-chemical method and step, especially typography, such as gravure process, roll marks method and/ Or inkjet printing methods.
11. according to the method described in claim 9 or 10, it is characterised in that in methods described step（30、40、50、60、80、 81、82、83、84）At least one after, step is dried（90、91、92、93、94、95、96、97、98）Or cure step.
12. according to the method any one of claim 9-11, it is characterised in that in methods described step（30、40、50、 60、80、81、82、83、84）At least one after, progress roll step（200）, in this rolls step, the layer system is surrounded Perpendicular to the band（8）Axis roll.
CN201710010252.6A 2016-01-08 2017-01-06 Electromechanical converter and the method for manufacturing electromechanical converter Pending CN107017335A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016200148.5 2016-01-08
DE102016200148.5A DE102016200148A1 (en) 2016-01-08 2016-01-08 Electromechanical transducer and method of making an electromechanical transducer

Publications (1)

Publication Number Publication Date
CN107017335A true CN107017335A (en) 2017-08-04

Family

ID=59119053

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710010252.6A Pending CN107017335A (en) 2016-01-08 2017-01-06 Electromechanical converter and the method for manufacturing electromechanical converter

Country Status (4)

Country Link
CN (1) CN107017335A (en)
DE (1) DE102016200148A1 (en)
FR (1) FR3046675B1 (en)
IT (1) IT201600131977A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10250165B2 (en) * 2015-05-27 2019-04-02 Snu R&Db Foundation High speed actuator including active stiffness controller and method of driving the same
DE102022126523B3 (en) 2022-10-12 2023-09-21 Tdk Electronics Ag Sensor element and method for producing a sensor element

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102064275A (en) * 2009-11-12 2011-05-18 拜尔材料科学股份公司 Two-layer or multi-layer ferroelectric electret and preparation method thereof
CN102420285A (en) * 2010-08-11 2012-04-18 富士胶片株式会社 Piezoelectric film and method of manufacturing same, piezoelectric device and liquid ejection apparatus
CN103985815A (en) * 2014-05-30 2014-08-13 中南大学 Cutting method for manufacturing piezoelectric fiber composites
CN104157783A (en) * 2013-05-14 2014-11-19 罗伯特·博世有限公司 Mixed film applied to energy converter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104247067A (en) 2012-02-14 2014-12-24 丹佛斯聚能公司 A capacitive transducer and a method for manufacturing a transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102064275A (en) * 2009-11-12 2011-05-18 拜尔材料科学股份公司 Two-layer or multi-layer ferroelectric electret and preparation method thereof
CN102420285A (en) * 2010-08-11 2012-04-18 富士胶片株式会社 Piezoelectric film and method of manufacturing same, piezoelectric device and liquid ejection apparatus
CN104157783A (en) * 2013-05-14 2014-11-19 罗伯特·博世有限公司 Mixed film applied to energy converter
CN103985815A (en) * 2014-05-30 2014-08-13 中南大学 Cutting method for manufacturing piezoelectric fiber composites

Also Published As

Publication number Publication date
FR3046675B1 (en) 2020-01-17
IT201600131977A1 (en) 2018-06-29
DE102016200148A1 (en) 2017-07-13
FR3046675A1 (en) 2017-07-14

Similar Documents

Publication Publication Date Title
Wu Stretchable electronics: functional materials, fabrication strategies and applications
Harnchana et al. Enhanced power output of a triboelectric nanogenerator using poly (dimethylsiloxane) modified with graphene oxide and sodium dodecyl sulfate
Lin et al. Facile and efficient patterning method for silver nanowires and its application to stretchable electroluminescent displays
EP3482425B1 (en) Shape change device
US9836125B2 (en) Multilayer transformable device and display device comprising the same
EP3539164B1 (en) Stiffness control for electroactive actuators
Chen et al. Large-deformation curling actuators based on carbon nanotube composite: advanced-structure design and biomimetic application
Wang et al. Electricity-triggered self-healing of conductive and thermostable vitrimer enabled by paving aligned carbon nanotubes
JP6464317B2 (en) Actuator devices based on electroactive or photoactive polymers
JP3959104B2 (en) Polymer actuator
US7804227B2 (en) Tear resistant electroactive polymer transducers
US9748469B2 (en) Multilayer actuator and display device comprising the same
JP6457151B2 (en) Actuators or sensor devices based on electroactive or photoactive polymers
WO2012105095A1 (en) Gel actuator and gel used therein
EP2819293A1 (en) Gel actuator and method for producing same
CN107017335A (en) Electromechanical converter and the method for manufacturing electromechanical converter
JP2015501132A5 (en)
US8891222B2 (en) Capacitive transducer and a method for manufacturing a transducer
JP6663046B2 (en) Electroactive polymer actuator
KR101676760B1 (en) Electro-spinning apparatus using electric field and method of manufacturing a transparent electrode using the same
KR101701602B1 (en) Electro-spinning apparatus using electric field and method of manufacturing a transparent electrode using the same
Liang et al. Flexible and Stretchable Paper-based Structures for Electronic Applications
KR20100133197A (en) Fabrication method of electron emission source and device adopting the source
DE102019123907B4 (en) Dielectric with different elastic properties for a dielectric device
KR100847676B1 (en) Micro-patterned thin film roll printing of electronic devices by static electric spray method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20170804

WD01 Invention patent application deemed withdrawn after publication