CN104247067A - A capacitive transducer and a method for manufacturing a transducer - Google Patents
A capacitive transducer and a method for manufacturing a transducer Download PDFInfo
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- CN104247067A CN104247067A CN201380018804.8A CN201380018804A CN104247067A CN 104247067 A CN104247067 A CN 104247067A CN 201380018804 A CN201380018804 A CN 201380018804A CN 104247067 A CN104247067 A CN 104247067A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/098—Forming organic materials
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Micromachines (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
A capacitive transducer (1) and a method of manufacturing a capacitive transducer (1) are disclosed. The capacitive transducer (1) comprises a polymer film (2) having a first surface and a second surface, a first electrically conductive layer (3) arranged on the first surface of the polymer film (2), and a second electrically conductive layer (3) arranged on the second surface of the polymer film (2). The polymer film (2) is at least partly made from a material having a molecular weight which is at least 21,000 g/mol. The inventors have surprisingly found that silicone polymer materials with high molecular weights, such as liquid silicone rubbers (LSR) or high temperature vulcanizing (HTV) elastomers, have high electrical breakdown strengths, even though technical data sheets from manufacturers state almost identical electrical breakdown strengths similar to that of RTV-2 elastomers. Using such materials in capacitive transducers therefore allows high electrical fields to be applied to the transducer without risking electrical breakdown. Thereby increased performance is exhibited by the transducer.
Description
Invention field
The present invention relates to a kind of capacitance-type transducer making polymer film arrangement type between two electrodes, these electrodes are arranged on the apparent surface of this polymer film with the form of conductive layer.The invention further relates to a kind of method for the manufacture of this capacitance-type transducer.
Background of invention
Provide capacitance-type transducer before, these capacitance-type transducers comprise thin polymer film, one of them first electrode (form with the first conductive layer) is arranged on a first surface of this polymer film, and on the right surface of second electrode (form with the second conductive layer) second-phase being arranged at this polymer film.These electrodes define a kind of polymer film that makes and are arranged in capacitor wherein thus.If apply potential difference in-between the electrodes, these electrodes attract each other, and this polymer film with the direction of electrode vertical on compress, and with the direction of electrode runs parallel on elongate.If design transducer in a careful manner, this causes becoming mechanical power from the mechanical trip of this transducer, the electric energy conversion that is namely supplied to electrode, and namely this transducer serves as a kind of actuator.
Similarly, if these electrodes mechanically attract each other, and if then apply potential difference in-between the electrodes, so by mechanically reducing the distance between electrode, namely by with comperession polymer film on the direction of electrode vertical, and with the direction of electrode runs parallel on elongate polymer film, be likely electric energy by changes mechanical energy.If design transducer in a careful manner, this causes mechanical power to change into electric energy, and namely this transducer serves as a kind of generator of electric energy.
Similarly, if electrode is pushed to each other or from drawn apart from one another, due to the distance changed between electrode, the electric capacity of capacitor changes.This kind of mechanism can be used for sensing object, and any change in size wherein in this transducer can be monitored by reading the capacitance variations produced.
Making us desirably can in long and thin net, applicable manufacturing technology (comprising spin coating, spraying, curtain coating and/or volume to volume method) is preferably used to manufacture this type of capacitance-type transducer, so that can be simple and cost-benefit mode produces transducer in a large number with one.The material be before selected for this polymer film had relatively low viscosity (in the scope of 1,000-100,000mPas) before this polymer film of solidification, was easy to process in the above-mentioned methods to make this polymeric material.
When this transducer be operate by this way make electric energy be converted into mechanical power time, or vice versa, the performance of this transducer depends on the intensity of the electric field that the polymer film striding across this transducer applies, the electric field strength reached in the sense that is higher, when this transducer serves as actuator, the percentage elongation of transducer is larger, or the electric energy obtained when this transducer serves as generator is more.But, when being applied across the high electric field strength of polymer film, existing in transducer and electrical breakdown occurs, thus cause the risk damaging electrode and/or polymer film.The ability of polymer film opposing electrical breakdown is called as electric breakdown strength or dielectric breakdown strength.This is a kind of material behavior.But the impurity in material, flaw or defect are tended to reduce electric breakdown strength.When operate both transducers, applied voltage should keep enough low with the electric breakdown strength preventing the electric field strength being applied to this capacitance-type transducer from exceeding polymer film.Because the percentage elongation of electric field strength determination transducer applied, the percentage elongation of maximum possible, and can be limited by the maximum machine merit of serving as the transducer transmission of the actuator electric breakdown strength by polymer film thus.Similarly, the electric energy of the maximum possible obtained for the transducer serving as generator limits by the electric breakdown strength of polymer film.Therefore, in some instances, the maximum potential of transducer can not likely be utilized fully.
Summary of the invention
An object of embodiments of the invention is to provide a kind of capacitance-type transducer, and wherein electric breakdown strength increases compared with the capacitance-type transducer of prior art.
Another object of embodiments of the invention is to provide a kind of capacitance-type transducer, and this capacitance-type transducer can produce more mechanical power than the capacitance-type transducer of prior art in single stroke.
Another object again of embodiments of the invention is to provide a kind of capacitance-type transducer, and this capacitance-type transducer can produce more electric energy than the capacitance-type transducer of prior art in single cycle.
Another object again of embodiments of the invention is to provide a kind of method for the manufacture of capacitance-type transducer, and wherein produced capacitance-type transducer has the electric breakdown strength of increase compared with the capacitance-type transducer of prior art.
According to first aspect, the invention provides a kind of capacitance-type transducer, comprising:
-there is a polymer film of a first surface and a second surface,
-be arranged in first conductive layer on the first surface of this polymer film, and
-be arranged in second conductive layer on the second surface of this polymer film,
Wherein this polymer film is that the material being at least 21,000g/mol by a kind of molecular weight is at least in part made.
As mentioned above, this first conductive layer forms first electrode, and this second conductive layer forms second electrode.This polymer film is arranged between these electrodes, and forms a capacitor thus.
This polymer film is that the material being at least 21,000g/mol by a kind of molecular weight is at least in part made.This type of material has relatively high viscosity usually, typically higher than 100,000mPas, and therefore they be considered to be not suitable for use in the manufacturing process comprising intaglio printing, slit die head (slot-die), spin coating, spraying, curtain coating or similar techniques usually.Particularly, in order to heavy viscous material being used for above-mentioned process, be necessary to use solvent to this material, and be necessary before curing schedule, to comprise this material of drying with the extra processing step except desolventizing.In addition, the equipment of most of solvent requirement ATEX certification.This is disadvantageous, because it makes manufacturing process complicate.In addition, use heavy viscous material to be considered to add risk impurity or defect (pin hole or bubble) introduced in material, and therefore technical staff will think that the use of this type of material will reduce electric breakdown strength.
It is known that use the polymeric material with HMW, as people such as such as Sankar, " machinery of electroactive nano-structured polymer and the behavior of actuating ", transducer and actuator A, 151st volume the 1st phase (2009) 46-52 page (Sankar et al. " Mechanical and actuation behaviour of electroactive nanostructured polymers ", Sensors and Actuators A vol.151nr.1 (2009) pages46-52) describes.The dielectric of active actuators (EAP) is defined at this SEBS (styrene-ethylene butylene-styrene).SEBS belongs to thermoplastic elastomer (TPE) and is three block rubber and is cross-linked because polystyrene end group is separated into the cinnamic territory of the richness connected by ethylene-butylene chain.This is separated and causes this elastomeric physical crosslinking.
Thermoplastic elastomer (TPE) is also sometimes referred to as thermoplastic elastomer and is copolymer or the physical mixture of the polymer (normally plastics and rubber) that a class is made up of the material with both thermoplasticity and rubber elastomer characteristics.Although most of elastomer is thermosets, thermoplastics is easy to use in the mill by contrast relatively, such as, pass through injection-molded.Thermoplastic elastomer (TPE) demonstrates the typical advantages of both elastomeric material and plastic material.
The main distinction between thermo-setting elastomer and thermoplastic elastomer (TPE) is the type of the cross-bond in its structure.In fact, crosslinked is contribute to giving of high resiliency characteristic crucial structural factor.The crosslinked of thermosetting polymer is the covalent bond produced in the curing process, is the elastomer of chemical crosslinking, contrary with the elastomer of physical crosslinking (as SEBS, wherein this is crosslinked is more weak dipole or hydrogen bond or occurs in a stage of material).
But, this analog thermoplastic elastomer (as SEBS) only show be used to traditionally capacitance-type transducer, as having about 16, the dielectric breakdown strength of electric breakdown strength in same range of the polymeric material of 000g/mol molecular weight, and belong to one group have within the scope of 40-90V/ μm puncture, sometimes referred to as cold curing (RTV-2) elastomeric silicone elastomer.They are seldom observed more than 100V/ μm.
The example that the SEBS of dielectric breakdown strength measures can in the impact of mechanical property " in the electrical breakdown of poly-styrene ethylene butadiene-styrenic thermoplastic elastomer " of the people such as Killosche, electroactive polymer actuator and equipment (EAPAD) 2009, Proc.of SPIE [SPIE's progress] volume 7287, find in 729729, such as show the several measurements a little more than 100V/ μm, but wherein these measurements can find out it is controversial compared with contiguous relevant measurement, and it may be the measurement of mistake.
Can (about reduction uses the arguement of puncturing of SEBS and other shortcomings, you help?)
But ladies and gentlemen inventor of the present invention has been surprisingly found that molecular weight is that (and/or thermosetting) polymeric material of the chemical crosslinking of at least 21,000g/mol shows very high electric breakdown strength, as more than 100V/ μm.Therefore, when the polymer film of capacitance-type transducer be at least in part by this class material make time, likely apply larger electric field to this transducer and there is no the risk of electrical breakdown.Therefore, this transducer can transmit more mechanical power in single stroke, or transmits more electric energy in a cycle, and does not damage the risk of this transducer.In some applications, the performance of this improvement of transducer is so favourable, and making to obtain the performance improved is prior compared with the simple manufacturing process of maintenance.In this case, the shortcoming of manufacturing process is used to the performance exchanging improvement for.
Conductive layer preferably can be made up of a kind of metal or a kind of electrical conductivity alloy, such as, be made up of a kind of metal being selected from group that silver, gold, copper, aluminium and nickel forms.Alternately, other metal be applicable to or electrical conductivity alloies can be selected.
This polymer film can be made up of a kind of material at least in part, and this material has at least 300, as at least 500, as 300 and 1, between 000, as 500 and 1, between 000, or at least 1,000, as at least 5,000, as 5,000 and 10, the degree of polymerization between 000.The large degree of polymerization of polymeric material has implied large molecule.Therefore a kind of material with HMW may also have the large degree of polymerization.
This polymer film can be made up of a kind of material at least in part, this material has by weight at least 10%, as by weight at least 25%, as by weight at least 30%, as by weight 10% and by weight between 35%, as by weight 25% and by weight between 35% or by weight 30% and SiO by weight between 45%
2filler content.There is high SiO
2filler content, or the polymeric material with pyrolysis (gas phase) silica of high-load, precipitated silica or other reinforcing fillers has higher tearing strength usually compared with the material of this type of filler with low content.Therefore, according to this embodiment, polymer film expection shows high-tear strength.
Therefore, this polymer film can be made up of a kind of material at least in part, this material has by weight at least 10%, as by weight at least 25%, as by weight at least 30%, as by weight 10% and by weight between 35%, as by weight 25% and by weight between 35% or by weight 30% and fumed silica filler content by weight between 45%.
Polymer film can be made up of a kind of material at least in part, and this material comprises a kind ofly increases the relative permittivity of this polymer film or the additive of dielectric constant.According to this embodiment, this polymer film showing high electric breakdown strength also has high relative permittivity or dielectric constant.This makes the mechanical power that provided by transducer or electric energy be increased, and hence improves the overall performance of this transducer.
This additive can be such as a kind of conduction or nonconducting, microparticle or nano particle, surface-treated or organic or inorganic filler that is untreated, that prepared by grafting or the another kind of method be applicable to.Such as, this additive can be carbon, graphite, based on polyaniline, titanium dioxide, barium titanate, nanoclay etc.Preferably these additives carry out, coated with increasing the compatibility with the polymer film with HMW, allowing thus realize very high relative permittivity and have high electric breakdown strength simultaneously with suitable surface treatment.
Additive capacity in this polymer film can be by weight at least 0.1%, as by weight 0.1% and by weight between 30%, as by weight 0.2% and by weight between 10%.
This polymer film can be made up of a kind of elastomer.Elastomer is a kind of polymer with viscoelastic property, usually has low Young's modulus or low elastic modulus and high yield strain.Therefore, elastomer film is highly stretchable, allows capacitance-type transducer to extend in response to the electric field applied thus.This elastomer can be a kind of silicone elastomer, as a kind of addition curing silicone elastomer, the silicone elastomer of platinum catalysis, or dimethyl silicone polymer (PDMS), as the silicone elastomer be made up of linear polysiloxane, at least there is the polysiloxanes of vinyl terminal, there is the polysiloxanes etc. of side direction and/or terminal ethylenyl groups.
This polymer film can be made up of a kind of material at least in part, and this material has at least 35,000g/mol, as between 35,000g/mol and 350,000g/mol, as the molecular weight between 35,000g/mol and 72,000g/mol.One group of silicone elastomer being called as liquid silastic (LSR) has 35,000g/mol to 72, molecular weight within 000g/mol interval, the degree of polymerization within 500 to 1000 intervals, and at the SiO by weight within 25% to 35% interval by weight
2filler content.Medical application is used to, as medical pipe and Wound healing and bone regeneration article before this elastic-like material.But, due to the high viscosity (being 100,000mPas to 8, within 000,000mPas interval) of these materials, be considered to before them to be not suitable for use in the manufacturing process of such as volume to volume coating, spin coating, spraying or curtain coating always.But ladies and gentlemen inventor of the present invention have been surprisingly found that the breakdown strength of LSR elastomeric material is very high, typically beyond 100V/ μm, and for some materials even up to about 160V/ μm.This makes LSR elastomer be very suitable for using in capacitance-type transducer, although they have full-bodied shortcoming.It is further noted that in typical manufacturer technical data sheet, the numerical value of elastomeric electric breakdown strength is almost equal to independent of this elastomeric molecular weight.
This polymer film can be made up of a kind of material at least in part, and this material has at least 350,000g/mol, as the molecular weight between 350,000g/mol and 720,000g/mol.Being called as the elastomeric one group of solid silicone elastomer of hot setting (HTV) has 350,000g/mol to 720, molecular weight within 000g/mol interval, 5,000 to 10, the degree of polymerization within 000 interval, and by weight 30% to by weight 45%, or the SiO within even higher interval
2filler content.Be used in before this type of elastomer in high pressure (HV) cable.But, these materials have compares the even higher viscosity of LSR elastomer, 150,000, within 000mPas to 250,000,000mPas interval, and be completely not flowable, and be therefore considered to before them even more be not suitable for using in the manufacturing process of such as volume to volume coating, spin coating, spraying or curtain coating than LSR elastomer always.But ladies and gentlemen inventor of the present invention have been surprisingly found that the breakdown strength of HTV elastomeric material is very high, typically higher than 100V/ μm, and for some materials even up to about 160V/ μm.This makes HTV elastomer be very suitable for using in capacitance-type transducer, although they have the shortcoming that viscosity is very high.
The second surface of the first surface of this polymer film and/or this polymer film can comprise protruding with picture on surface that the is surface portion of depression, and this first conductive layer and/or this second conductive layer can be deposited on this first and/or second surface picture on surface on, this first conductive layer and/or this second conductive layer have bellows-shaped thus.
One or two conductive layer with bellows-shaped is provided in the above described manner, makes the elongation of this capacitance sensor, and this or these electrode formed by this or these conductive layer that need not stretch.On the contrary, the bellows-shaped of this or these conductive layer is evened up this polymer film stretching simultaneously simply substantially.Therefore, this or these electrode is compliance (compliant).Compare the transducer with plate electrode thus, the mechanical power obtained in single stroke or each capacitance-type transducer electric energy obtained that circulates significantly increases.
Particularly advantageously in the capacitance-type transducer with ripple electrode, use the polymer film that the material being at least 21,000g/mol by the molecular weight had at least in part is made.As mentioned above, due to this or these compliance electrode, this kind of transducer can transmit the high electric energy gain of very large mechanical power or each cycle in single stroke.In order to obtain high mechanical power or power level, be necessary to apply high electric field strength to this transducer.Therefore, making us desirably this polymer film is be made up of the material with high electric breakdown strength, to avoid the electrical breakdown when this transducer is to use its full potential mode to operate.As mentioned above, ladies and gentlemen inventor of the present invention has been surprisingly found that the polymeric material with HMW has high electric breakdown strength, and therefore they are particularly advantageous in this case.
This first and/or second surface projection can have shape along at least one direction periodic variation on respective surface and/or size with the surface portion of depression.According to this embodiment, this corrugated conducting layer is compliance along a first direction, but along one second, the direction of perpendicular is relative stiffness.Thus provide anisotropic compliance electrode.This allows the direction of mechanical trip or the elongation of transducer to be controlled.More effectively can utilize the electric energy of mechanical energy or the acquisition of being transmitted by transducer thus.
Protruding can be relative macroscopic view with the change of the surface portion of depression and easily be detected by the naked eyes of people, and they can be the results of producer's intentional act.Cyclic variation can comprise by the mark caused for the manufacture of one or more joints that the roller of film is formed or the marking.Alternately or additionally, these cyclic variations can occur at the yardstick of a microcosmic substantially.In this case, these cyclic variations may be the orders of magnitude of the manufacturing tolerance of the instrument (as roller) used in the manufacture process of film.Even if be intended to and attempt to provide the perfect roller with perfect pattern, in practice because manufacturing tolerance will always have little change in the pattern limited by roller.No matter how little this change have, and by Reusability roller, they cause generating period to change by the film produced.By this way, this film may have two kinds of cyclic variations, the first is the stamping surface pattern of structure, such as be shaped to the ripple perpendicular to this film, this pattern can be called as the sub-pattern of change, and repeating impression further due to the same roller for impressing or egative film plate, a kind of hypergraph case of sub-pattern may be duplicated.
This picture on surface can comprise formation in fact at the crest of a common direction extension and the ripple of trough, and each ripple defines a height, and this is highly the beeline between crest and contiguous trough.According to this embodiment, these crests and trough are similar to the standing wave with substantial parallel wavefront.But these ripples must not be sinusoidal wave, but can have any applicable shape, as long as limit crest and trough.According to this embodiment, crest (or trough) by limiting the outline line of substantial linear, namely generally along the line of a part of ripple of the double altitudes had relative to this polymer film.The line of this at least substantial linear is by least substantially parallel to the similar outline line formed by other crests and trough, and the direction of this at least line of substantial linear limits this common direction.This common direction limited by this way has the anisotropic result of generation, and the conductive layer be arranged on this corrugated surface is compliance in the direction perpendicular to this common direction.
The average height of ripple can be between 1/3 and 20 μm, as between 1 μm and 15 μm, as between 2 μm and 10 μm, as between 4 μm and 8 μm.
The thickness that this first conductive layer and/or this second conductive layer have can be in the scope of 0.01 to 0.2 μm, as in the scope of 0.01 to 0.1 μm, such as in the scope of 0.1 to 0.2 μm, as in the scope of 0.02 μm to 0.09 μm, as in the scope of 0.05 μm to 0.07 μm.Therefore, this conductive layer is preferably administered to this film with a very thin layer.This contributes to good performance and is conducive to this conductive layer can follow the surface of film wave pattern when being out of shape.
This polymer film can be the structure comprising at least two polymer material layers, wherein at least the first polymer material layer is at least 21 by a kind of molecular weight had, the material of 000g/mol is made, and at least the second polymer material layer is for 7 by a kind of molecular weight had, material between 000g/mol and 21,000g/mol is made.According to this embodiment, this first polymer material layer has HMW, and has high-electric breakdown strength and high viscosity thus.On the other hand, this second polymer material layer has low-molecular-weight, corresponding to the polymeric material being generally used for capacitance-type transducer, and has lower electric breakdown strength and lower viscosity thus.Therefore, this ground floor ensure that this polymer film has required high-electric breakdown strength, and this second layer due to lower viscosity be easier in the fabrication process process.Therefore, this second layer can advantageously generate the part that of this polymer film requires carefully process in the fabrication process, as made a conductive layer arrangement part thereon, and/or has a part of picture on surface (as wavy surface pattern).This ground floor can form the part that of this polymer film does not require so carefully process in the fabrication process.
This polymer film can be the structure comprising at least three polymer material layers, at least one ground floor wherein in these polymer material layers is at least 21 by a kind of molecular weight had, the material of 000g/mol is made, at least one second layer in these polymer material layers is for 7 by a kind of molecular weight had, 000g/mol and 21, material between 000g/mol is made, and at least one third layer in these polymer material layers is for 7 by a kind of molecular weight had, 000g/mol and 21, material between 000g/mol is made, and wherein this ground floor is arranged between this second layer and this third layer.According to this embodiment, there is HMW and there is high-electric breakdown strength and a full-bodied polymer material layer thus and be arranged at there is low-molecular-weight, and have thus between lower electric breakdown strength and low viscous two layers of polymers material.In this case, the first surface of this polymer film and both second surfaces of this polymer film can be made up of low viscosity polymer material, and therefore they be easy to process in the fabrication process.This means the deposition of any picture on surface (as ripple) and conductive layer, comprise any required surface treatment, can carry out in a kind of polymeric material, this polymeric material is well-known for this object and is suitable for suitable manufacture process.Meanwhile, this second layer be arranged between this ground floor and this third layer forms a barrier layer, and this barrier layer provides the high-electric breakdown strength desired by this structure.
The second layer in these polymer material layers can be preferably one of kind of above-mentioned material, as LSR elastomer or HTV elastomer.Such as, the second layer at least in these polymer material layers can have at least 300 by one, and as at least 500, as 500 and 1, the material of the degree of polymerization between 000 is made.
According to second aspect, the invention provides a kind of method for the manufacture of capacitance-type transducer, the method comprises the following steps:
-polymer film with a first surface and a second surface is provided,
-on the first surface of this polymer film, deposit first conductive layer, and
-on the second surface of this polymer film, deposit second conductive layer,
Wherein provide the step of polymer film to comprise and provide a kind of polymer film, this polymer film is that the material being at least 21,000g/mol by a kind of molecular weight had at least in part is made.
Can be preferably transducer according to a first aspect of the invention by the transducer of method manufacture according to a second aspect of the invention.Therefore, the explanation of above elaboration is equally applicable to this.Particularly, make because this polymer film is the material being at least 21,000g/mol by a kind of molecular weight had at least in part, this polymer film shows high-electric breakdown strength, and likely increases the performance obtained of transducer as above thus.
There is provided the step of polymer film to comprise a kind of solvent is added in a kind of polymeric material.As mentioned above, the polymeric material with HMW often has high viscosity.Therefore, in order to process this polymer film, such as, in order to produce the thin polymer film may with corrugated surface, may be necessary to add a kind of solvent in this polymeric material, reducing the viscosity of this material thus.
Alternatively, or additionally, the step of polymer film is provided to comprise the following steps:
-a kind of polymeric material is provided,
-a kind of curing agent is provided,
-this polymeric material is mixed with this curing agent, obtain a kind of polymeric blends thus,
-form a kind of polymer film from this polymeric blends, and
-this polymer film is solidified.
According to this embodiment, this polymer film is after this curing agent has been added into this polymeric material, but is shaped before the solidification of this polymeric blends.This allows this polymeric material of process.Once this polymer film has cured, the shape of this polymer film is kept.This curing agent can be through a kind of curing agent that specified time interval causes polymer film to solidify after mixing with this curing agent at this polymeric material.This curing schedule is occurring simply after specified time interval in this case.Alternately, this curing agent can be a kind of curing agent requiring activation (as thermal activation) before the solidification of this polymer film occurs.Allow the step that this polymer film solidifies to comprise the step activating this curing agent in this case, such as, require, when thermal activation, this polymer film is heated to relevant curing temperature at curing agent.
The method may further include following steps:
-in this polymeric material, add a kind of solvent, and
-in this curing agent, add a kind of solvent,
Wherein said step was carried out before this polymeric material of mixing and this curing agent.
According to this embodiment, solvent is joined in polymeric material and curing agent.Then make the mixture of polymeric material and solvent mix with the mixture of curing agent and solvent, obtain polymeric blends thus.Because add the viscosity that solvent reduces polymeric material and curing agent, suitably blended polymer materials and curing agent become easier.More easily obtain a kind of uniform polymeric blends thus.
As an alternative, solvent only can be joined in polymeric material or only join in curing agent.This may be relevant, if only have one to have high viscosity in these materials.
As an alternative, first can mix this polymeric material and this curing agent, and before polymer film is formed, solvent can be joined in polymeric blends.
As mentioned above, this polymer film can be advantageously made up of a kind of elastomer (as silicone elastomer).Silicone elastomer typically comprises silicone substrate, filler, catalyst (such as platinum, tin or other catalyst be applicable to) and crosslinking agent.In addition, this silicone elastomer can comprise other compositions, as pigment, stabilizer, silicone oil etc.
Some silicone elastomers are bicomponent type, mix with B component by component A, and allow this mixture solidified when this elastomer film is formed.Such as, component A can be a kind of silicone substrate, and B component can be a kind of curing agent.In this case, in can filler being joined in component A, joining in B component or join both.Be equally applicable to pigment and/or silicone oil.Crosslinking agent can be joined in component A, and catalyst is joined in B component.Alternately, crosslinking agent can be joined in B component, and catalyst is joined in component A.But, both crosslinking agent and catalyst can not be joined in component A or in B component, because this may cause the partially cured of described component.But when crosslinking agent and catalyst are added in component separately, as component A and B component mixing, this catalyst is by this crosslinking agent of activation, and allows solidification after blending thus, instead of occurs before.Therefore, component A can be or serve as silicone substrate in this case, and B component can be or serve as curing agent, or vice versa.
There is provided the step of polymer film to comprise to provide have protruding with the first surface of this polymer film that the is picture on surface of the surface portion of depression and/or the second surface of this polymer film.As mentioned above, thereby is achieved corrugated surface, it deposits conductive material layer.Thereby is achieved a kind of compliance electrode, this compliance electrode response allows the longer elongation of transducer in the electricity of this transducer or mechanical excitation.
Picture on surface can such as be provided by the element (such as with the form of roller or mould) limiting shape, and this element is used to this picture on surface to be impressed on the surface of this polymer film.
The step of polymer film is provided to comprise the following steps:
-first polymer material layer is provided,
-allow described first polymer material layer solidification,
-second polymer material layer is administered on a surface of described first polymer material layer, and
-allow described second polymer material layer solidification.
According to this embodiment, the polymer film obtained is sandwich construction.This sandwich construction is by being administered to by a new layer on the layer that has cured, and the layer then making this newly use solidification and accumulating gradually.
The step of polymer film is provided to may further include following steps:
-a terpolymer material layer is provided to this second polymer material layer surface on or be provided on the surface of this first polymer material layer, and
-allow described terpolymer material layer to solidify.
According to this embodiment, an additional polymer material layer is joined this sandwich construction.In principle, this program can be repeated many times as required to obtain a kind of desired sandwich construction.Therefore, can by the 4th layer, layer 5, layer 6 etc. join in this structure in a kind of continuous print mode, and every one deck was solidified before using lower one deck.
The material of this first polymer material layer can be different from the material of this second polymer material layer.According to this embodiment, the material of one deck can have low-molecular-weight and have low electric breakdown strength thus, but has low viscosity, makes this layer be easy to process in the fabrication process thus.Another layer can have HMW and have high-electric breakdown strength thus, but has high viscosity, makes this layer process in the fabrication process more difficult thus.Draw thus, some part of the sandwich construction obtained can process in the fabrication process simply, and other parts of this sandwich construction guarantee desired high-electric breakdown strength.
According to an alternate embodiment, the polymer film being in sandwich construction form can be solidified by the formable layer that makes these independent, and makes these layers be attached to one another subsequently, such as, obtain by making these be pressed together layer by layer.According to this embodiment, this first and second conductive material layer can deposit in relevant surfaces before these layers are attached to one another.Such as, the substantially the same layer of two of polymeric material can be formed by any applicable polymeric material showing desired viscosity characteristics, and without the need to considering the characteristic about the electric breakdown strength of this polymeric material.An electric conducting material is deposited on the surface of each of these two polymeric layers.The surface it depositing electric conducting material can have picture on surface before deposition conductive material layer as above.Then additional polymer material layer can be formed by the polymeric material showing the desired characteristic about electric breakdown strength, namely has HMW but without the need to the polymeric material of the viscosity characteristics of considering this polymeric material.This additional polymer material layer does not have picture on surface, and does not have electric conducting material to be deposited on the surface of this extra play.Finally, these three layers be attached to one another by this way this extra play is arranged at have this of conductive material layer two-layer between, and make this conductive material layer form the outer surface of the structure obtained by this way.This kind of laminar structure is sometimes referred to as back to back structure.
As an alternative, this first and second conductive material layer can deposit to first and second of a sandwich construction on the surface after these layers are attached to one another.
Alternatively, these layers can laminated togetherly by this way make one or more conductive layer be arranged in this laminar structure.Such as, this two-layer (separately there is conductive layer) can by this way the conductor planes of a layer that makes laminated together to the surface without conductive layer of another layer.This kind of layer structure sometimes referred to as front to rear structure.
Also observe the transducer (or being exactly film) of the material of the present invention that stretches by experiment times over its resting length, such as such as with 300% to 500% strain, significantly dielectric breakdown strength is improved, as easily relative to the multiple of its unstrained length (resting length) 2-3.Equally observed when this film compresses, create the effect identical with when the strain that the thickness of this film is lowered.Also observed and created significant increase in dielectric breakdown strength.
Brief Description Of Drawings
The present invention is further described with reference to accompanying drawing, wherein:
Fig. 1 a and 1b respectively illustrates the capacitance-type transducer according to an embodiment of the invention being exposed to zero potential difference and high potential difference,
Fig. 2 shows the mixed process of the part forming a kind of method according to an embodiment of the invention,
Fig. 3 shows the alternative mixed process of a part for formation a kind of method according to an alternative embodiment of the invention,
Fig. 4-6 shows the flow chart of the method step of the method for different embodiment according to the subject invention,
Fig. 7 a and 7b shows the figure of the performance of the capacitance-type transducer of prior art,
Fig. 8 a and 8b shows the figure of the performance of capacitance-type transducer according to an embodiment of the invention,
Fig. 9 is the sectional view of capacitance-type transducer according to an embodiment of the invention, and
Figure 10 is the sectional view of capacitance-type transducer according to an alternative embodiment of the invention.
Accompanying drawing describes in detail
Fig. 1 a and 1b shows capacitance-type transducer 1 according to an embodiment of the invention.This capacitance-type transducer 1 comprises the polymer film 2 with a first surface and a second surface.These two surfaces all have protruding with picture on surface that the is surface portion of depression.This projection be formed in the ripple of crest that common direction extends and trough with the surface portion of depression.
Conductive layer 3 deposits on each surface of polymer film 2, and deposits conductive material makes this conductive layer 3 being formed with the pattern of the surface portion of depression according to projection.Thereby is achieved the corrugated contours of these conductive layers 3 of design.
These conductive layers 3 form the electrode of transducer 1, and they are electrically connected to a power supply.These conductive layers 3 are exposed to zero potential difference in fig 1 a, and these conductive layers 3 are exposed to high potential difference in Figure 1b.When these conductive layers 3 are exposed to high potential difference, these conductive layers 3 are attached to one another.Thus reduce the thickness of the polymer film 2 be arranged between these conductive layers 3, and this polymer film 2 is stretched along the direction of the common direction perpendicular to the ripple limited by this picture on surface (namely elongating).The elongation of polymer film 2 causes the ripple of picture on surface substantially to even up.Because conductive layer 3 follows picture on surface, when this polymer film 2 is elongated, the crest of these conductive layers 3 and trough are also evened up substantially.Therefore, the electrode defined by conductive layer 3 is compliance, allows the remarkable elongation of this polymer film 2 thus and does not damage the risk of these conductive layers 3.
Fig. 2 shows the mixed process of the part forming a kind of method according to an embodiment of the invention.Make to be in the component A of polymeric material form and a kind of solvent to form a kind of mixture (mixture A).Thus reduce the viscosity of this polymeric material.In addition, the B component of curing agent form and a kind of solvent is made to be in form a kind of mixture (mixture B).Also reduce the viscosity of this curing agent thus.Finally, these two kinds of mixtures (mixture A and mixture B) are made to mix to form a kind of final mixture (final mixture).The viscosity of the reduction of this polymeric material and this curing agent makes it to be easier to obtain a kind of uniform final mixture.
This final mixture can subsequently in one way for the formation of polymer film, and which will in following further description.Because these two kinds of mixtures (mixture A and mixture B) all contain solvent, final mixture (final mixture) is also containing solvent.Thus, if the situation that the ratio of viscosities of final mixture does not add solvent is lower, and ensure that this final mixture is easy to process.
Fig. 3 shows the mixed process of a part for formation a kind of method according to an alternative embodiment of the invention.The component A being in polymeric material form is made to mix with the B component being in curing agent form to form a kind of mixture (mixture A+B).Next, make this mixture (mixture A+B) and a kind of solvent to form a kind of final mixture (final mixture).Similar with the method shown in Fig. 2, due to the solvent added, reduce the viscosity of final mixture, thus ensure that this final mixture is easy to process.
This final mixture can subsequently in one way for the formation of polymer film, and which will in following further description.
Fig. 4 shows the flow chart of the method step of method according to an embodiment of the invention.Provide a kind of polymeric blends.This polymeric blends can such as provide with reference to Fig. 2 or Fig. 3 in the above described manner.Use applicable paint-on technique, as polymeric blends is coated on an element being in the restriction shape of the form of mould or carrier web by rotogravure application, slot coated, spin coating or other similar technology.This carrier web advantageously has picture on surface, and along with this polymeric blends is applied in this carrier web, this picture on surface is stamped on this polymer film.Allow this polymeric blends to solidify, and as a result, obtain the elastomer film being coated to this carrier web.
This elastomer film is then from this carrier web delamination.This carrier web returns, and this polymeric blends is applied in this carrier web again.This carrier web can be or form a part for roller.The method creates the net of the length of elastomer film.In this case, this carrier web has picture on surface, and this elastomer film also has picture on surface, and this is the marking of the picture on surface of this carrier web.The elastomer film of winding delamination, and thereby is achieved the volume of elastomer film.
Next, be provided to by this elastomer film in a vacuum deposition chamber, in this vacuum deposition chamber, a metal level deposits on the surface of this elastomer film.A kind of electrode is formed on the surface of this elastomer film thus.In this case, this surface has picture on surface as above, and the metal level of this deposition follows picture on surface, and the electrode obtained is compliance.
Finally, the elastomer film with metal electrode is reeled, obtain the volume with the elastomer film of metal electrode thus.
Fig. 5 shows the flow chart of the method step of method according to an embodiment of the invention.Provide the volume of elastomer film.The volume of one or more elastomer film can have the metal electrode be deposited on the surface of this elastomer film.In the case, this elastomer film can manufacture in the above described manner with reference to Fig. 4.But one or more elastomer film can be a kind of elastomer film without metal electrode.
Two-layer or more layer elastomer film uses the lamination be applicable to laminated together, obtains the volume of laminated film thus.When one or more elastomer film have deposit to this elastomer film at least one surface on metal electrode, laminating method can perform the outer surface making the surface with metal electrode form this laminate by this way.Laminar structure obtained thus defines a kind of capacitance-type transducer, and this capacitance-type transducer comprises the metal electrode be arranged between multilayer elastomeric film.This kind of structure is sometimes referred to as laminate back-to-back.Optionally, laminating method can perform by this way and one or more metal electrode is arranged in this laminar structure.This can such as by arranging the metal electrode of a layer to make it obtain towards the surface without metal electrode of another layer by this way.This kind of structure sometimes referred to as front to rear laminate.
The layer of these elastomer films can be made up of identical polymeric material.But these layers alternately can be made up of the different polymeric material demonstrating different qualities.Such as, some layers are easy to process by what have that low viscous polymeric material makes to allow these layers, and other layers are by having HMW and the polymeric material thus with high-electric breakdown strength is made, to guarantee that laminated film has high-electric breakdown strength.According to an embodiment, this laminated film can comprise two layers having and be arranged at the metal electrode had on a surface of picture on surface.These two layers advantageously can have low viscous polymeric material by one and make, and make it be easy to process, particularly about providing picture on surface thus.In addition, this laminated film can comprise be arranged in above-mentioned two-layer between an extra play.This extra play can have HMW and the polymeric material thus with high-electric breakdown strength is made by a kind of.These metal levels form the outer surface of laminar structure.Thus provide the capacitance-type transducer with high-electric breakdown strength.
Fig. 6 shows the flow chart of the method step of method according to an alternative embodiment of the invention.Be similar to the said method with reference to Fig. 4, polymeric blends be coated on an element being in the restriction shape of the form of mould or carrier web and make it solidify, obtaining the elastomer film being attached to carrier web thus.
Next, polymeric blends is coated to is attached on the elastomer film of this carrier web.This polymeric blends can be the kind identical with the polymeric blends for the formation of the first elastomer film.Alternately, can use another kind of polymeric blends, such as a kind of characteristic had is different from the polymeric blends of the characteristic of this first polymeric blends.Add an additional polymeric layer to this elastomer film thus.Make this further layer, and formation comprises two-layer elastomer film thus.The method can be repeated until obtained the sandwich construction comprising the desired number of plies.Then this type of sandwich construction from this carrier web delamination, can obtain the volume of multilayer elastomeric film thus.
Fig. 7 a and 7b shows a kind of electric breakdown strength of polymeric material, is used to capacitance-type transducer before this polymeric material.Fig. 7 a shows the number of the breakdown events become with the electric field strength applied, and Fig. 7 b shows the cumulative failure probability because electrical breakdown becomes with the electric field strength applied.The polymeric material tested has the molecular weight of about 16,000g/mol, and belongs to sometimes referred to as the elastomeric one group of silicone elastomer of cold curing (RTV-2).These elastomers have relatively low viscosity, and are easy to thus process in the fabrication process.Reason for this reason, the before preferred capacitance-type transducer these elastomers being used for wherein thin layer of elastomer and being arranged between the conductive layers always.
Fig. 8 a and 8b shows the figure similar with the figure of Fig. 7 a and 7b.But the material tested has the molecular weight of about 35,000g/mol, be namely significantly higher than the material tested in figs. 7 a and 7b.The polymeric material tested in Fig. 8 a and 8b belongs to one group of silicone elastomer sometimes referred to as liquid silastic (LSR).For goals of medicine before these materials, as applied for medical pipe and Wound healing and bone regeneration.
Fig. 7 a compares with 7b and Fig. 8 a with 8b, be clear that the typical electric breakdown strength of the elastomer film be made up of LSR is significantly higher than the typical electric breakdown strength of the elastomer film be made up of RTV-2 elastomer, even if state the electric breakdown strength similar with RTV-2 elastomer from the technical data sheet of manufacturer.More specifically, can find out for RTV-2 elastomer film (as illustrated in figs. 7 a and 7b), typically there is electrical breakdown at about 65V/ μm, and for LSR elastomer film (as shown in figs. 8 a and 8b), typically at about 135V/ μm, electrical breakdown occurs.Therefore, in capacitance-type transducer, use LSR elastomer film to allow apply remarkable higher electric field to this transducer and there is no the risk of the electrical breakdown of transducer, namely significantly improve the performance of this transducer.
Fig. 9 is the sectional view of capacitance-type transducer 1 according to an embodiment of the invention.Similar with the embodiment shown in Fig. 1 a and 1b, the capacitance-type transducer 1 of Fig. 9 comprises the elastomer film 2 containing a first surface and a second surface, and each surface has protruding with picture on surface that the is surface portion of depression.Conductive layer 3 is deposited to this elastomer film 2 each on the surface.
This elastomer film 2 comprises the sandwich construction of three layers.Ground floor 2a is arranged at the core of elastomer film 2, and second layer 2b and third layer 2c is arranged at contiguous this ground floor 2a and at the opposite side of this ground floor 2a.This second layer 2b and this third layer 2c comprise the surface with picture on surface and have the conductive layer 3 of deposition on it.
This ground floor 2a is that the polymeric material being at least 21,000g/mol by a kind of molecular weight is made.This material can be such as a kind of liquid silastic (LSR).This ground floor 2a has high-electric breakdown strength as above thus, and therefore elastomer film 2 demonstrates high-electric breakdown strength.This second layer 2b and this both third layer 2c is made up of a kind of material being different from the material of this ground floor 2a.This second layer 2b can be made up of identical material with this third layer 2c, or they can be made from a variety of materials, and three layers of 2a, 2b, 2c of this elastomer film 2 are made up of three kinds of different materials in this case.
This or these materials advantageously can choosing this second layer 2b and this third layer 2c, to have low viscosity before curing, make it to be easy in the manufacture process of capacitance-type transducer 1, process this second layer 2b and this third layer 2c thus.Therefore, in the embodiment shown in fig. 9, this ground floor 2a of this elastomer film 2 serves as a barrier layer, for this elastomer film 2 provides desired high breakdown strength.Meanwhile, due to the low viscosity of the material for these layer of 2b, 2c, this second layer 2b and this third layer 2c of forming the part being difficult to the elastomer film 2 manufactured are easy to process.
In the capacitance-type transducer 1 of Fig. 9, these conductive layers 3 are arranged on the outer surface of this elastomer film 2.Therefore, the capacitance-type transducer 1 of Fig. 9 is one sandwich construction back-to-back.Layer 2a, 2b, 2c of this elastomer film 2 can manufacture separately and subsequent layer forces together.As an alternative, this elastomer film 2 can manufacture by be added to by these layers subsequently in structure and make every one deck solidify before one deck under interpolation.
Figure 10 is the sectional view of capacitance-type transducer 1 according to an alternative embodiment of the invention.Similar with the embodiment shown in Fig. 9, the capacitance-type transducer 1 of Figure 10 comprises the elastomer film 2 be arranged between these two conductive layers 3.Ground floor 2a is that the polymeric material being at least 21,000g/mol by a kind of molecular weight is made, and has high breakdown strength thus.Second layer 2b is made up of a kind of different material, such as, have low viscosity before curing.With reference to Fig. 9 and above-mentioned situation similar, this ground floor 2a forms a barrier layer, provides this high breakdown strength desired by elastomer film 2.
The capacitance-type transducer 1 of Figure 10 is a kind of front to rear sandwich construction.Therefore, one in these conductive layers 3 is arranged between the ground floor 2a of elastomeric material and third layer 2c.This third layer 2c can such as be made up of the material identical with this second layer 2b, with reference to Fig. 9 and above-mentioned situation similar.
In Fig. 10, demonstrate between this ground floor 2a and the conductive layer 3 being arranged between this ground floor 2a and this third layer 2c and there is little air gap.But, should be understood that these air gaps can alternately be filled with a kind of material, such as, for by coarctate for this structure sheaf glue.
Claims (26)
1. a capacitance-type transducer (1), comprising:
-there is a polymer film (2) of a first surface and a second surface,
-be arranged in first conductive layer (3) on the first surface of this polymer film (2), and
-be arranged in second conductive layer (3) on the second surface of this polymer film (2),
Wherein this polymer film (2) is that the material being the chemical crosslinking of at least 21,000g/mol by a kind of molecular weight had at least in part is made.
2. capacitance-type transducer according to claim 1 (1), wherein this polymer film (2) is that the material being at least 300 by a kind of degree of polymerization had at least in part is made.
3. capacitance-type transducer according to claim 2 (1), wherein this polymer film (2) is that the material being at least 500 by a kind of degree of polymerization had at least in part is made.
4., according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is at least in part by a kind of SiO had
2filler content be by weight at least 10% material make.
5., according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is that the material being by weight at least 10% by a kind of fumed silica filler content had at least in part is made.
6. according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is made up of a kind of material comprising additive at least in part, and this additive adds relative permittivity or the dielectric constant of this polymer film (2).
7., according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is made up of a kind of elastomer.
8. capacitance-type transducer according to claim 7 (1), wherein this elastomer is a kind of silicone elastomer.
9., according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is that the material being at least 35,000g/mol by a kind of molecular weight had at least in part is made.
10., according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is that the material being at least 350,000g/mol by a kind of molecular weight had at least in part is made.
11. according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein the first surface of this polymer film (2) and/or the second surface of this polymer film (2) comprise protruding with picture on surface that the is surface portion of depression, and wherein this first conductive layer (3) and/or this second conductive layer (3) be deposited on this first and/or second surface picture on surface on, this first conductive layer (3) and/or the second conductive layer (3) have bellows-shaped thus.
12. capacitance-type transducers according to claim 11 (1), wherein this first and/or second surface projection with the surface portion of depression, there is shape and/or the size of at least one direction periodic variation on the surface along correspondence.
13. capacitance-type transducers (1) according to claim 11 or 11, wherein this picture on surface comprises formation in fact at the crest of a common direction extension and the ripple of trough, each ripple defines a height, and this is highly the beeline between a crest and contiguous trough.
14. capacitance-type transducers according to claim 13 (1), wherein the average height of this ripple is between 1/3 μm and 20 μm.
15. according to capacitance-type transducer in any one of the preceding claims wherein (1), and wherein this first conductive layer (3) and/or this second conductive layer (3) have the thickness within the scope of 0.01-0.2 μm.
16. according to capacitance-type transducer in any one of the preceding claims wherein (1), wherein this polymer film (2) is a kind of structure comprising at least two polymer material layers, at least one ground floor wherein in these polymer material layers is at least 21 by a kind of molecular weight had, the material of 000g/mol is made, and at least one second layer in these polymer material layers is for 7 by a kind of molecular weight had, material between 000g/mol and 21,000g/mol is made.
17. capacitance-type transducers according to claim 16 (1), wherein this polymer film (2) is a kind of structure comprising at least three polymer material layers, at least one ground floor wherein in these polymer material layers is at least 21 by a kind of molecular weight had, the material of 000g/mol is made, at least one second layer in these polymer material layers is for 7 by a kind of molecular weight had, 000g/mol and 21, material between 000g/mol is made, and at least one third layer in these polymer material layers is for 7 by a kind of molecular weight had, 000g/mol and 21, material between 000g/mol is made, and wherein this ground floor is arranged between this second layer and this third layer.
18. capacitance-type transducers (1) according to claim 16 or 17, at least this second layer wherein in these polymer material layers is that the material being at least 300 by a kind of degree of polymerization had is made.
19. 1 kinds of methods for the manufacture of capacitance-type transducer (1), the method comprises the following steps:
-polymer film (2) with a first surface and a second surface is provided,
-first conductive layer (3) is deposited on the first surface of this polymer film (2), and
-second conductive layer (3) is deposited on the second surface of this polymer film (2),
Wherein provide the step of polymer film (2) to comprise and provide a kind of polymer film (2), this polymer film (2) is that the material being at least 21,000g/mol by a kind of molecular weight had at least in part is made.
20. methods according to claim 19, wherein this provides the step of polymer film (2) to comprise to be joined in a kind of polymeric material by a kind of solvent.
21. methods according to claim 19 or 20, wherein this provides the step of polymer film (2) to comprise the following steps:
-a kind of polymeric material is provided,
-a kind of curing agent is provided,
-this polymeric material is mixed with this curing agent, obtain a kind of polymeric blends thus,
-form a kind of polymer film (2) from this polymeric blends, and
-this polymer film (2) is solidified.
22. methods according to claim 21, further comprising the steps:
-in this polymeric material, add a kind of solvent, and
-in this curing agent, add a kind of solvent,
Wherein said step was carried out before this polymeric material of mixing and this curing agent.
23. according to claim 19 to the method according to any one of 22, wherein this provide the step of polymer film (2) comprise for the first surface of this polymer film (2) and/or the second surface of this polymer film (2) provide have protruding with picture on surface that the is surface portion of depression.
24. according to claim 19 to the method according to any one of 23, and wherein this provides the step of polymer film (2) to comprise the following steps:
-first polymer material layer is provided,
-allow described first polymer material layer solidification,
-second polymer material layer is administered on the surface of described first polymer material layer, and
-allow described second polymer material layer solidification.
25. methods according to claim 24, wherein this provides the step of polymer film (2) further comprising the steps:
-a terpolymer material layer is provided to this second polymer material layer a surface on or be provided on a surface of this first polymer material layer, and
-allow described terpolymer material layer to solidify.
26. methods according to claim 24 or 25, wherein the material of this first polymer material layer is different from the material of this second polymer material layer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DKPA201200118 | 2012-02-14 | ||
| DKPA201200118 | 2012-02-14 | ||
| PCT/DK2013/000015 WO2013120494A1 (en) | 2012-02-14 | 2013-02-13 | A capacitive transducer and a method for manufacturing a transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104247067A true CN104247067A (en) | 2014-12-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380018804.8A Pending CN104247067A (en) | 2012-02-14 | 2013-02-13 | A capacitive transducer and a method for manufacturing a transducer |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2815442A1 (en) |
| CN (1) | CN104247067A (en) |
| WO (1) | WO2013120494A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018095431A1 (en) * | 2016-11-28 | 2018-05-31 | Nano And Advanced Materials Institute Limited | Resilient wave-shaped energy-generating device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10119532B2 (en) | 2015-02-16 | 2018-11-06 | Hamilton Sundstrand Corporation | System and method for cooling electrical components using an electroactive polymer actuator |
| DE102016200148A1 (en) | 2016-01-08 | 2017-07-13 | Robert Bosch Gmbh | Electromechanical transducer and method of making an electromechanical transducer |
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| CN101222016A (en) * | 2006-11-03 | 2008-07-16 | 丹佛斯公司 | A multilayer composite and a method of making such |
| WO2009081691A1 (en) * | 2007-12-25 | 2009-07-02 | Konica Minolta Medical & Graphic, Inc. | Organic piezoelectric material, process for producing the organic piezoelectric material, and ultrasonic vibrator and ultrasonic probe using the organic piezoelectric material |
| CN101798429A (en) * | 2008-12-12 | 2010-08-11 | 三星电子株式会社 | The actuator and the manufacture method thereof of solid electrolyte polymer, use polymkeric substance |
| WO2010137366A1 (en) * | 2009-05-25 | 2010-12-02 | コニカミノルタエムジー株式会社 | Organic piezoelectric material, ultrasonic transducer, ultrasound probe, and medical ultrasound image diagnosis system |
| CN102265332A (en) * | 2008-12-23 | 2011-11-30 | 罗伯特·博世有限公司 | Ultrasonic transducer for use in a fluid medium |
-
2013
- 2013-02-13 EP EP13709751.5A patent/EP2815442A1/en not_active Withdrawn
- 2013-02-13 CN CN201380018804.8A patent/CN104247067A/en active Pending
- 2013-02-13 WO PCT/DK2013/000015 patent/WO2013120494A1/en active Application Filing
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|---|---|---|---|---|
| US4933479A (en) * | 1987-07-27 | 1990-06-12 | Idemitsu Petrochemical Co., Ltd. | Crosslinked polyphosphazenes as piezoelectric materials |
| CN101222016A (en) * | 2006-11-03 | 2008-07-16 | 丹佛斯公司 | A multilayer composite and a method of making such |
| WO2009081691A1 (en) * | 2007-12-25 | 2009-07-02 | Konica Minolta Medical & Graphic, Inc. | Organic piezoelectric material, process for producing the organic piezoelectric material, and ultrasonic vibrator and ultrasonic probe using the organic piezoelectric material |
| CN101798429A (en) * | 2008-12-12 | 2010-08-11 | 三星电子株式会社 | The actuator and the manufacture method thereof of solid electrolyte polymer, use polymkeric substance |
| CN102265332A (en) * | 2008-12-23 | 2011-11-30 | 罗伯特·博世有限公司 | Ultrasonic transducer for use in a fluid medium |
| WO2010137366A1 (en) * | 2009-05-25 | 2010-12-02 | コニカミノルタエムジー株式会社 | Organic piezoelectric material, ultrasonic transducer, ultrasound probe, and medical ultrasound image diagnosis system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2018095431A1 (en) * | 2016-11-28 | 2018-05-31 | Nano And Advanced Materials Institute Limited | Resilient wave-shaped energy-generating device |
| CN110121792A (en) * | 2016-11-28 | 2019-08-13 | 纳米及先进材料研发院有限公司 | Elastic waveform stereoscopic energy producing unit |
| CN110121792B (en) * | 2016-11-28 | 2021-03-05 | 纳米及先进材料研发院有限公司 | Elastic wave energy generating device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2013120494A1 (en) | 2013-08-22 |
| EP2815442A1 (en) | 2014-12-24 |
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