CN107014494A - A kind of high precision surface source blackbody radiation source device applied under the conditions of vacuum and low temperature - Google Patents
A kind of high precision surface source blackbody radiation source device applied under the conditions of vacuum and low temperature Download PDFInfo
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- CN107014494A CN107014494A CN201710141240.7A CN201710141240A CN107014494A CN 107014494 A CN107014494 A CN 107014494A CN 201710141240 A CN201710141240 A CN 201710141240A CN 107014494 A CN107014494 A CN 107014494A
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- 230000005457 Black-body radiation Effects 0.000 title claims abstract description 78
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910052802 copper Inorganic materials 0.000 claims abstract description 48
- 239000010949 copper Substances 0.000 claims abstract description 48
- 238000005057 refrigeration Methods 0.000 claims abstract description 31
- 230000005855 radiation Effects 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims description 44
- 239000011159 matrix material Substances 0.000 claims description 25
- 238000009413 insulation Methods 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 6
- 238000012937 correction Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 230000009977 dual effect Effects 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 229910000737 Duralumin Inorganic materials 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 229920001187 thermosetting polymer Polymers 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 13
- 238000012360 testing method Methods 0.000 abstract description 9
- 238000011056 performance test Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000004907 flux Effects 0.000 description 11
- 238000009529 body temperature measurement Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 7
- 238000003331 infrared imaging Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 230000008685 targeting Effects 0.000 description 2
- 241000784732 Lycaena phlaeas Species 0.000 description 1
- 241000233855 Orchidaceae Species 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
The present invention relates to infrared radiation measurement and collimation technique field, more particularly to a kind of high precision surface source blackbody radiation source device that can be applied under the conditions of vacuum and low temperature, mainly include：Blackbody radiation source main body module, vacuum chamber, control cable, out of my cabin air plug through walls, control cable, refrigeration copper pigtail and controller module in cabin, the blackbody radiation source main body module is placed in the vacuum chamber, the blackbody radiation source main body module is connected by the copper pigtail that freezes with the inwall of the vacuum chamber, and the blackbody radiation source main body module, which is passed sequentially through, to be controlled cable, air plug through walls, controls cable to be connected with the controller module out of my cabin in the cabin.Beneficial effects of the present invention are：Prior art is efficiently solved demarcation and test for infrared detector and Low Temperature Target Performance Test System under vacuum environment can not be set up to provide application foundation while the problem of meeting effective emissivity, temperature homogeneity, wide temperature range.
Description
Technical field
The present invention relates to infrared radiation measurement and collimation technique field, more particularly to one kind can be under the conditions of vacuum and low temperature
The high precision surface source blackbody radiation source device of application.
Background technology
The infrared imaging load such as current military Infrared Imaging Seeker, thermal infrared imager, imaging spectrometer, infrared camera should
It is also more and more to radiating the demand of value targeting device accordingly with more and more, while to the performance indications of calibration facility
Requirement also more and more higher.Black matrix, as the standard device of calibration and the calibration of the infrared imaging devices such as imaging spectrometer, is red
External calibration and the critical component of calibration, therefore the property indices of the face source black matrix as calibration and calibration are also carried accordingly
Higher requirement is gone out.For face source black matrix demand to high emissivity, high temperature-controlled precision, high-temperature uniformity, wide temperature model
Enclose, the intelligent, direction of convenience is developed.
The development of infrared imaging device has for performance indications such as face source black body emissivity, temperature homogeneity, temperature ranges
Higher demand.The emissivity of blackbody radiation source is one of its leading indicator, usually, compared with ideal black-body, calibration blackbody
Emissivity closer to 1, the radiance of black matrix is more complete, during for detection calibration, and the degree of accuracy of calibration and precision are higher.
Blackbody radiation source temperature homogeneity is also to determine one of factor of its performance quality, and the spectral radiant power of ideal black-body is to meet
Planck law, if actual blackbody temperature skewness degree is excessive, the energy radiated is that black-body surface is different
At a temperature of mixed radiation, Planck law is not met, so that be allowed to can not accurate calibration infrared imaging device.In addition, right at present
Also progressively extended in the requirement of the temperature-measuring range of infrared imaging device, this calibration facility face just for being used under laboratory condition
The temperature range of source black matrix it is also proposed corresponding extension demand, and the temperature range that separate unit targeting device is covered is wider, infrared
The calibration curve of imager just can be preferably fitted in wider range.
The requirement to the emissivity for the standard area blackbody radiation source demarcated for meteorological satellite infrared payload has reached at present
To more than 0.99, the requirement to radiating aperture in the temperature homogeneity of more than 100mm face source black matrix is better than ± 0.1K, to black matrix
The requirement of temperature range also has been extended to -100 DEG C to 100 DEG C.
Some domestic at present metrological services are carrying out numerous studies in terms of blackbody radiation source, and form and accordingly set
It is standby, but these black body radiation source devices can not meet wide this several of effective emissivity, temperature homogeneity, temperature range simultaneously and refer to
Mark is required.It is domestic at present even without several index requests meet simultaneously more than for the Low Temperature Target set up under vacuum environment
The High-precision standard area blackbody radiation source of Performance Test System.
In order to solve the above problems, the present invention provides the high precision surface source blackbody radiation applied under the conditions of a kind of vacuum and low temperature
Source device, for setting up the High Precision Low Temperature target capabilities test system under vacuum environment, is with a wide range of applications.
The content of the invention
In view of above-mentioned analysis, the present invention is intended to provide the high precision surface source blackbody spoke applied under the conditions of a kind of vacuum and low temperature
Source device is penetrated, efficiently solving prior art can not be while meets that effective emissivity, temperature homogeneity, temperature range are wide to ask
Topic, demarcation and test for infrared detector and sets up Low Temperature Target Performance Test System under vacuum environment and provides application
Basis.
The purpose of the present invention is mainly achieved through the following technical solutions：
The high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature, mainly includes：Blackbody radiation source
Main body module, vacuum chamber, control cable, out of my cabin air plug through walls, control cable, refrigeration copper pigtail and controller module in cabin, it is described
Blackbody radiation source main body module is placed in the vacuum chamber, the blackbody radiation source main body module by freeze copper pigtail with it is described
The inwall of vacuum chamber is connected, and the blackbody radiation source main body module, which is passed sequentially through, controls cable, air plug through walls, cabin in the cabin
Outer control cable is connected with the controller module；The blackbody radiation source main body module is cylindrical empty cavity configuration.
Blackbody radiation source main body module is connected by the copper pigtail that freezes with vacuum chamber, is conducive to blackbody radiation source main body module
Sustainable cooling, equivalent to stable refrigeration work consumption is provided for black body radiation source device, can individually control heating plate plus
The size of thermal power, to realize the accurate control to blackbody temperature.
Further, the blackbody radiation source main body module is connected by 4~8 refrigeration copper pigtails with the inwall of vacuum chamber
Connect.
Further, control cable to be made using silver-plated strand copper wire in the cabin, and make in silver-plated strand copper wire outer end
It is bundled into polytetrafluoro band a branch of.
Cable is controlled to be made of the silver-plated strand copper wire of low-temperature-resistant environment in cabin, it is possible to decrease the vacuum deflation rate of cable,
Ensure that the control cable of part in cabin will not produce pollution simultaneously；Air plug head on cable and the boat socket-type on vacuum chamber flange
Number it need to carry out matching selection.
Further, the blackbody radiation source main body module mainly include bottom support plate, radiant panel, main heating plate, on
Cover plate, outer cover, thermal balance cover, heat conduction fixed plate, auxiliary heating sheet, thermal insulation board, thermal balance plate, copper pigtail installing plate；The heat is flat
The plate that weighs is located at the top of the bottom support plate, and the radiant panel is located at the top of the thermal balance plate, the main heating plate position
Between the radiant panel and the thermal balance plate, the thermal balance cover is connected by the thermal insulation board with the radiant panel,
The thermal balance cover external circumferential arranges the auxiliary heating sheet, and the heat conduction is installed on the outside of the auxiliary heating sheet and is fixed
Plate；The outer cover is fixed with outside the heat conduction fixed plate, upper cover plate is installed in the upper end of the outer cover.
Thermal insulation board is installed between thermal balance cover and radiant panel, is conducive to improving the temperature homogeneity of radiating surface.
Further, the thermal balance cover agent structure is processed from duralumin material, the upper end of the thermal balance cover
Exit has high emissivity pitch-dark provided with 10~20 ° of slope angles, the inner-wall spraying of the thermal balance cover.
Slope angle is provided with the upper end outlet of thermal balance cover, black body effect can be preferably produced, face source black matrix spoke is improved
Penetrate the emissivity of source device；It is pitch-dark in thermal balance cover inner-wall spraying high emissivity, certain cavity effect can be formed, by black matrix
Emissivity bring up to more than 0.99.
Further, the radiant panel is using red copper as matrix material, and Surface Machining is into micro- wimble structure, in micro- cone
Surface spraying high emissivity is pitch-dark.
By radiant panel Surface Machining into micro- wimble structure, the emissivity of radiant panel can be improved to a certain extent；Micro- cone table
Face spraying high emissivity is pitch-dark, the emissivity of radiant panel can be brought up into more than 0.97.
Further, the thick heat conduction carbon films of 0.5~1mm are arranged between the two in the main heating plate and radiant panel, with true
Radiant panel is protected to be heated evenly.
Because inevitably there are certain irregularities in main heating plate and radiation plate surface, therefore in order that both
Uniformly contacted on whole contact surface, the good soft heat conduction carbon film of heat conductivility is arranged therebetween, to ensure radiation
Plate is heated evenly；The thickness of heat conduction carbon film is too thin, can cause to contact bad between main heating plate and radiant panel, heated to radiant panel
Uniformity affects；The thickness of heat conduction carbon film is too thick, and the power of main heating plate is needed to increase, and the efficiency of heating surface is caused
Because of influence.
Further, the controller module mainly includes cabinet, temperature controller, power switch, power interface, black matrix control
Air plug interface and temperature homogeneity detection air plug interface, the front panel of the cabinet are provided with temperature control instrument and power switch, after
Panel is provided with power standard interface, black matrix control air plug interface and temperature homogeneity detection air plug interface.
Further, the temperature controller temperature resolution is 0.01 DEG C, and the temperature controller carries PID expert algorithm and Self-tuning System
Function, with dual input, dual output function.
Further, the blackbody radiation source main body module also includes sensor, and the sensor is separately mounted to described
On main heating plate and the radiant panel；The sensor is the RTD of B/5 class precisions, is needed to sensor before install sensor
The thermometric and temperature-adjusting circuit constituted with temperature controller carries out overall metering and consistent correction.
Sensor is arranged on main heating plate and radiant panel, it is convenient to main heating plate temperature control, and ensure that to spoke
The test of plate temperature uniformity is penetrated, the temperature homogeneity and precision of area blackbody radiation source device is improved；To sensor and control
The thermometric and temperature-adjusting circuit of warm instrument composition, which carry out overall metering and consistent correction, can effectively improve area blackbody radiation source dress
The temperature measurement accuracy put.
The present invention has the beneficial effect that：
1) the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature that the present invention is provided, the device
Breach black under temperature sensor mounting process, vacuum condition under the amendment of surface source blackbody temperature sensor consistency, cryogenic conditions
Temperature uniformity is measured in real time, the equivalent emissivity of cylindrical cavity black matrix such as calculates at the key technology under non-isothermal condition；
2) the high precision surface source blackbody radiation source device worked under the vacuum low-temperature environment prepared by the present invention has occurred frequently
The characteristics of penetrating rate, high-temperature uniformity, wide temperature range, can be used in the demarcation and test of infrared detector, for setting up
Low Temperature Target Performance Test System under vacuum environment；
3) performance indications such as the effective emissivity of apparatus of the present invention, temperature measurement uncertainty, temperature homogeneity, temperature stability
It is excellent, pollution is not present under the conditions of vacuum and low temperature, can long-time stable work, and can be involved according to this invention
Technology expand to and answered on the source of infrared radiation applied under the conditions of more large radiation area, the vacuum and low temperature of more wide temperature range
With.
Brief description of the drawings
Accompanying drawing is only used for showing the purpose of specific embodiment, and is not considered as limitation of the present invention, in whole accompanying drawing
In, identical reference symbol represents identical part.
Fig. 1 is that area blackbody radiation source device of the present invention constitutes figure；
Fig. 2 is area blackbody radiation source main body module front view of the present invention；
Fig. 3 is area blackbody radiation source main body module upward view of the present invention.
Wherein, 1- vacuum chambers, the tops of 2- first refrigeration copper pigtail, the bottoms of 3- first refrigeration copper pigtail, the tops of 4- second refrigeration copper
Cable is controlled in pigtail, the bottoms of 5- second refrigeration copper pigtail, 6- cabins, the electric ring flanges of 7-, 8- controls cable, 9- controller moulds out of my cabin
Block, 10- legs, 11- bottom support plates, 12- bottom thermal insulation blocks, 13- radiant panels, 14- auxiliary copper pigtail installing plates, 15- upper cover plates,
16- thermal balance covers, 17- outer covers, 18- heat conduction fixed plates, 19- auxiliary heating sheets, 20- aiding sensors, 21- thermal insulation boards, 22- master
Heating plate, 23- master references, 24- thermal balance plates, the main copper pigtail installing plates of 25-, 26- vacuum air plugs.
Embodiment
The preferred embodiments of the present invention are specifically described below in conjunction with the accompanying drawings, wherein, accompanying drawing constitutes the application part, and
It is used for the principle for explaining the present invention together with embodiments of the present invention.
The high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature, mainly includes：Blackbody radiation source
Main body module, vacuum chamber 1, control cable 6, out of my cabin air plug through walls, the 8, first top of control cable refrigeration copper pigtail 2, first in cabin
Bottom the 3, second top of refrigeration copper pigtail refrigeration copper pigtail 4, the second bottom refrigeration copper pigtail 5 and controller module 9, air plug through walls are arranged on
On electric ring flange 7, wherein, blackbody radiation source main body module mainly includes leg 10, bottom support plate 11, bottom thermal insulation block
12nd, radiant panel 13, auxiliary copper pigtail installing plate 14, upper cover plate 15, outer cover 17, thermal balance cover 16, heat conduction fixed plate 18, auxiliary heating
It is piece 19, aiding sensors 20, thermal insulation board 21, main heating plate 22, master reference 23, thermal balance plate 24, main copper pigtail installing plate 25, true
Empty air plug 26；Controller module 9 includes cabinet, temperature controller, programmable power supply, fan, switch, power interface, black matrix control interface
Interface is detected with temperature homogeneity.
As shown in figure 1, blackbody radiation source main body module is placed in vacuum chamber 1 by leg 10, blackbody radiation source main body
Module is the first top refrigeration copper pigtail 2, the first bottom the 3, second top of refrigeration copper pigtail refrigeration copper pigtail 4 and by 4 refrigeration copper pigtails
Second bottom refrigeration copper pigtail 5 is connected with the inwall of vacuum chamber 1, makes the sustainable cooling of blackbody radiation source main body module, equivalent to
Blackbody radiation source main body module has a fixed refrigeration work consumption；In 4 refrigeration copper pigtails, the first bottom refrigeration copper pigtail 3 and the
One end of two bottoms refrigeration copper pigtail 5 is separately mounted to the lower end center of blackbody radiation source main body module, the other end respectively with
The lower half of vacuum chamber inwall is connected, and top refrigeration copper pigtail 4 one end of the first top refrigeration copper pigtail 2 and second is separately mounted to black matrix
The centre position of radiation source main body module left and right ends, the other end is connected with the first half of vacuum chamber inwall；Heating plate and sensing
Device is by controlling cable, air plug through walls and controlling cable to be connected with controller module out of my cabin in cabin.Cable in the present invention exists
Part is made using the silver-plated strand copper wire of low-temperature-resistant environment in vacuum chamber, and is bundled into its outer end using polytetrafluoro band
It is a branch of, it is possible to decrease the vacuum deflation rate of cable, it is ensured that the control cable of part will not produce pollution in cabin；Vacuum chamber outer control electricity
Cable uses common copper conductor, and is tied with outside wire the air plug head on polyamide fibre sheath, cable and the air plug on vacuum chamber flange
Seat model need to carry out matching selection.
As shown in Figure 2,3, blackbody radiation source main body module of the present invention is cylindrical structural, and is symmetrical structure, two branch
Pin 10 is respectively symmetrically installed on the lower section of bottom support plate 11, for supporting whole blackbody radiation source main body module, bottom support
Plate 11 is loop configuration, and the upper end outer rim of bottom support plate 11 is fixedly connected with outer cover 17, and the top dead center position of outer cover 17 is opened
There is circular port, the lower surface of upper cover plate 15 and the diameter of circular port match, and just can cover outer cover 17, upper cover plate 15
A handle, the convenient movement to upper cover plate 15 are fixed in upper end；It is fixed with the inside of the upper end of bottom support plate 11, outer cover 17
Bottom thermal insulation block 12；Thermal balance plate 24 is fixed with the upper end of bottom thermal insulation block 12, main heating plate 22 is arranged in the top of thermal balance plate 24,
The top of main heating plate 22 is radiant panel 13, and radiant panel 13 is connected with thermal balance plate 24 by the screw of surrounding, while can be by
Main heating plate 22 is firmly fixed therebetween；Because main heating plate 22 and the surface of radiant panel 13 are inevitably present necessarily
Irregularities, therefore in order that both uniformly contacted on whole contact surface, therebetween arrange heat conductivility it is good
The thick heat conduction carbon film of soft 0.5mm, to ensure that radiant panel 13 is heated evenly；Thermal balance cover 16 is fixed on radiant panel 13,
Thermal balance cover 16 is the annular structure of falling barreled, in order to not influence the temperature homogeneity of radiating surface, in thermal balance cover 16 and radiant panel
Thermal insulation board 21 is installed, thermal insulation board 21 is processed into loop configuration from polytetrafluoroethylmaterial material between 13；In the outside of thermal balance cover 16
Circumferentially 2 Kapton auxiliary heating sheets 19, uniform to cover thermal balance cover one week；Pacify in the outside of auxiliary heating sheet 19
The heat conduction fixed plate 18 of 2 semi-circumference shapes with mounting flange structure is filled, can be while clamping auxiliary heating sheet 19
Play even hot effect；Lower end or other any positions are fixed with auxiliary copper pigtail installing plate 14 in the outside of heat conduction fixed plate 18,
The structure for aiding in copper pigtail installing plate 14 is copper billet, to provide a constant refrigeration work consumption, auxiliary copper pigtail peace to thermal balance cover 16
Filling plate 14 is used to install the top refrigeration copper pigtail 4 of the first top refrigeration copper pigtail 2 and second, and main copper is provided with the bottom of thermal balance plate 24
Pigtail installing plate 25, main copper pigtail installing plate is circular configuration, and its diameter is identical with bottom support plate circular inside diameters, main copper pigtail installing plate
25 are used to install the first bottom refrigeration copper pigtail 3 and second bottom refrigeration copper pigtail 5.
Wherein, the agent structure of thermal balance cover 16 is processed from duralumin material, in the upper end outlet of thermal balance cover 16
Place is provided with 15 ° of slope angles, so as to preferably produce black body effect, lower end design processing mounting flange, by thermal insulation board 21 with
Radiant panel 13 is connected；Each 1 copper pigtail of self installation, is that thermal balance cover is integrally carried at the relative position in the both sides of heat conduction fixed plate 18
For a fixed refrigeration work consumption, the cooling for the part；Aiding sensors 20 are arranged in the Method for Installation of heat conduction fixed plate 18
At orchid, for the temperature of Real-time Feedback thermal balance cover 16, to form closed-loop control system；On radiant panel 13 and thermal balance cover 16
The heating plate of installation realizes that the accurate temperature of respective part is controlled by individual control loop, and the temperature for effectively improving radiation source is equal
Even property.
Radiant panel 13 is using red copper as matrix material, and Surface Machining, can be to a certain degree into tetragonal micro- wimble structure
The upper emissivity for improving radiating surface, the self emittance being applicable in the case where micro- poppet surface sprays vacuum condition is higher than 0.92 high emission
Rate is pitch-dark, and its emissivity can reach more than 0.97, and the pitch-dark F952 that can select Shanghai Institute of Organic Chemistry of high emissivity is pitch-dark；In order to
The requirement higher to radiation emission rate is met, using the structure type that thermal balance cover is installed above radiant panel, and in thermal balance
High emissivity of the cover inner-wall spraying self emittance higher than 0.92 is pitch-dark, forms certain cavity effect, can be by the transmitting of black matrix
Rate brings up to more than 0.99.
Heating plate in blackbody radiation source main body module selects Kapton heating plate, and its heating power is higher,
Operating voltage is direct current 110V, wherein, main heating plate 22 is processed as circular heating plate, maximum heating power 300W, thermal balance cover
Auxiliary heating sheet 19 on 16 processes rectangular, and maximum heating power is 500W.
The present invention processes 2 apertures in the center of main heating plate 22, for arranging master reference 23, wherein one draws
In to the main temperature control of heating plate 22, one is used to back up in addition；The sensor selected in blackbody radiation source main body module is B/5 grades
The RTD of precision.
The present invention processes 6 apertures in the surrounding of radiant panel 13, thermometric thermocouple is respectively mounted, for equal to radiating surface temperature
The test of even property.
Controller module of the present invention, mainly including cabinet, temperature controller, programmable power supply, fan, power switch, power interface,
Black matrix controls air plug interface and temperature homogeneity detection air plug interface, and the present invention uses standard 4U cabinets, and front panel installs temperature control
Instrument and power switch, rear board install 1 power standard interface, 1 black matrix control air plug interface and 1 temperature homogeneity inspection
Survey air plug interface.Wherein temperature controller is the critical component in the system, and the temperature controller that the present invention is selected works in blackbody radiation source
Temperature resolution in temperature range is 0.01 DEG C, and the temperature controller carries PID expert algorithm and self-setting function, with double
Input, dual output function；The present invention is in order to reduce electromagnetic interference of the blackbody radiation source to other vacuum equipments, and blackbody radiation source is adopted
Heated with programme-controlled dc power, selected power supply has the characteristics of wide input voltage range, output voltage have linearly been spent, can
Meet the system application.
Above-mentioned master reference and aiding sensors are temperature sensor.
The present invention is prepared for the area blackbody radiation source device of cylindrical cavity formula structure, wherein, the diameter of micro- cone radiant panel
It is about 0.98 for 150mm, emissivity, the side wall of area blackbody radiation source device is 200mm is high, emissivity is about 0.92.In order to
The computational problem of the resulting radiation temperature emissivity at non-isothermal cavity accent is solved, is entered from the road radiation transmission process in cavity
Hand, calculates the radiation flux at accent.Radiation flux source at accent leads to for the radiation that bottom of chamber and chamber ring directly reach accent
Amount and its after intracavitary multiple reflections reach accent radiation flux summation.In calculating process, variable is straight for cylindrical cavity
Footpath d, cavity length L, bottom of chamber emissivity ε d, chamber ring emissivity ε h, bottom of chamber temperature Td, chamber circumstance temperature degree Th.Calculate and directly reach chamber
Mouthful radiation flux and its intracavitary once, reach the radiation flux of accent after secondary, triple reflection after, can analyze and draw and be derived from
It is 0.068 that the ratio between radiation flux next time and last time of accent are reached after the reflection of bottom of chamber；Accent is reached after reflection from chamber ring
Radiation flux next time and the ratio between last time be 0.070.The integration of infinite series is carried out to the radiation flux of multiple reflections again, can be counted
Calculation obtains the radiation flux at accent.The ratio of the radiation flux sum of the radiation flux of accent and bottom of chamber and chamber ring is cylinder
The equivalent emissivity of cavity black matrix.
In order to improve the temperature measurement accuracy of area blackbody radiation source device, it is necessary to the survey constituted to temperature sensor and temperature controller
Temperature and temperature-adjusting circuit carry out overall metering and consistent correction, and the temperature sensor that the present invention is selected is the platinum electricity of B/5 class precisions
Resistance, its franchise value is ± (0.06 DEG C+0.001 | t |), | t | be the absolute value of measurement temperature, unit for DEG C.
The method that the thermometric and temperature-adjusting circuit of temperature sensor and temperature controller composition carry out overall metering and consistent correction
For：The a collection of sensor of selection is examined and determine first, from temperature deviation is smaller and the preferable sensor of temperature consistency is made
For alternative sensor, the Electrical Measuring Instrument now used provides for calibration authority；Again by the higher temperature controller of the precision measured (essence
Spend grade and meet 5/10000ths ranges, i.e., temperature measurement accuracy is better than ± 0.05 DEG C in the range of -100 DEG C~100 DEG C) it is used as electrical measuring instrument
Device integrally carries out examining and determine for second after with alternative sensor being connected, so as to the measurement temperature integrally produced to sensor and temperature controller
Difference is disposably corrected；Carry out using line between multiple spot amendment, every 2 temperature spots in -100 DEG C~100 DEG C temperature ranges
Its temperature value of property interpolation method amendment；Temperature sensor and temperature control instrument are measured as an entirety, and to measurement result
It is modified.Final revised uncertainty of measurement includes：The partial uncertainty that measurement reproducibility is produced；Measurement criteria is permanent
The partial uncertainty that the temperature difference is introduced between warm groove jack；The uncertainty that the measurement error of electric logging equipment is introduced in measurement criteria
Component；The uncertainty of measurement component of standard platinum resistance itself；The partial uncertainty that self-heating is introduced.Metrological service of the current country
The uncertainty of measurement for examining and determine the overall temperature measurement circuit of platinum sensor and temperature control instrument composition is better than 0.06 DEG C.
The mounting process of temperature sensor can produce certain influence to its thermometric accuracy.When blackbody radiation source works,
The measured value of temperature sensor and the true temperature of radiant panel might have certain deviation, especially low-temperature zone (- 50 DEG C with
Under), wire temperature can be higher than the temperature of sensor temperature-sensitive chip, if not taking sensor lead special mounting process,
Heat can be delivered at temperature-sensitive chip, so will result in the inaccurate of thermometric.The occurrence of in order to avoid this, in sensor
To ensure that it is contacted well with radiant panel during installation, and the lead of sensor will also make to draw with the abundant good contact of radiant panel
Line temperature is as consistent with sensor local environment temperature as possible, it is ensured that not because the temperature difference of lead and sensor causes sensor to survey
Warm is inaccurate.When sensor is installed, its lead is set to be drawn again after radiant panel backside trench, so that wire temperature and thermometric
The temperature of point is tried one's best unanimously, it is ensured that temperature accuracy during low-temperature measurement.
The temperature homogeneity of blackbody radiation source is required to carry out real-time testing under vacuum, and the present invention uses thermometric
The repeated device that preferably thermocouple is measured as temperature homogeneity, and the test data of thermocouple can pass through boat through walls
Insert and be drawn out in high-accuracy voltage table out of my cabin, to carry out real-time monitored to temperature homogeneity.Tested for temperature homogeneity
Thermocouple is screened in ice bath in a pre-installation, and selecting the preferable 6 pairs of thermocouples of uniformity, (thermometric uniformity is better than
0.01K) it is arranged on the back side of black body radiation plate.One end of 6 pairs of thermocouples is fixed together during installation so that the thermocouple end
Temperature it is consistent, other end is separately mounted at the diverse location on radiant panel circumference, 6 voltages shown by voltmeter
Value can detect the temperature homogeneity in black body radiation face in real time；To ensure that contact is good during the installation of TC, to avoid peace as far as possible
Measurement error caused by dress.
After tested, the technical indicator that area blackbody radiation source device of the present invention can reach is as follows：
Black matrix operating temperature range：200K-350K；
Black body radiation bore：Φ150mm；
Temperature stability：Better than ± 0.08K/30 minutes；
Net long wave radiation face temperature homogeneity：Better than ± 0.09K；
Temperature measurement uncertainty：±0.06K；
Emissivity：0.99.
In summary, the high precision surface source blackbody radiation source dress applied under the conditions of a kind of vacuum and low temperature that the present invention is provided
Put, breach under the amendment of surface source blackbody temperature sensor consistency, cryogenic conditions under temperature sensor mounting process, vacuum condition
Blackbody temperature uniformity is measured in real time, the equivalent emissivity of cylindrical cavity black matrix such as calculates at the key technology, institute under non-isothermal condition
The high precision surface source blackbody radiation source device worked under the vacuum low-temperature environment of preparation have high emissivity, high-temperature uniformity,
The characteristics of wide temperature range, it can be used in the demarcation and test of infrared detector, for setting up Low Temperature Target under vacuum environment
Performance Test System；Meanwhile, effective emissivity, temperature measurement uncertainty, temperature homogeneity, temperature stability of apparatus of the present invention etc.
Performance indications are excellent, under the conditions of vacuum and low temperature be not present pollution, can long-time stable work, and can according to this invention
The technology being involved in expands to the source of infrared radiation applied under the conditions of more large radiation area, the vacuum and low temperature of more wide temperature range
On be applied.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can be readily occurred in,
It should all be included within the scope of the present invention.
Claims (10)
1. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature, it is characterised in that mainly include：It is black
Body radiation source main body module, vacuum chamber, control cable, out of my cabin air plug through walls, control cable, refrigeration copper pigtail and controller mould in cabin
Block, the blackbody radiation source main body module is placed in the vacuum chamber, and the blackbody radiation source main body module passes through the copper that freezes
Pigtail is connected with the inwall of the vacuum chamber, and the blackbody radiation source main body module, which is passed sequentially through, to be controlled cable, wears in the cabin
Wall air plug, out of my cabin control cable are connected with the controller module；The blackbody radiation source main body module is cylindrical cavity knot
Structure.
2. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 1, its
It is characterised by, the blackbody radiation source main body module is connected by 4~8 refrigeration copper pigtails with the inwall of vacuum chamber.
3. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 1 or 2,
Characterized in that, controlling cable to be made using silver-plated strand copper wire in the cabin, and poly- four are used in silver-plated strand copper wire outer end
Fluorine band is bundled into a branch of.
4. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 1, its
It is characterised by, the blackbody radiation source main body module mainly includes bottom support plate, radiant panel, main heating plate, upper cover plate, outer
Cover, thermal balance cover, heat conduction fixed plate, auxiliary heating sheet, thermal insulation board, thermal balance plate, copper pigtail installing plate；The thermal balance plate is located at
The top of the bottom support plate, the radiant panel is located at the top of the thermal balance plate, and the main heating plate is located at the spoke
Penetrate between plate and the thermal balance plate, the thermal balance cover is connected by the thermal insulation board with the radiant panel, it is flat in the heat
The cover external circumferential that weighs arranges the auxiliary heating sheet, and the heat conduction fixed plate is installed on the outside of the auxiliary heating sheet；It is described to lead
The outer cover is fixed with outside thermosetting fixed board, upper cover plate is installed in the upper end of the outer cover.
5. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 4, its
It is characterised by, the thermal balance cover agent structure is processed from duralumin material, is set at the upper end outlet of the thermal balance cover
There are 10~20 ° of slope angles, the inner-wall spraying of the thermal balance cover has high emissivity pitch-dark.
6. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 4, its
It is characterised by, the radiant panel is using red copper as matrix material, and Surface Machining is sprayed into micro- wimble structure in micro- poppet surface
High emissivity is pitch-dark.
7. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 5 or 6,
Characterized in that, the thick heat conduction carbon films of 0.5~1mm are arranged between the two in the main heating plate and radiant panel, to ensure radiation
Plate is heated evenly.
8. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 4, its
It is characterised by, the controller module mainly includes cabinet, temperature controller, power switch, power interface, black matrix control air plug interface
Air plug interface is detected with temperature homogeneity, the front panel of the cabinet is provided with temperature control instrument and power switch, and rear board is installed
There are power standard interface, black matrix control air plug interface and temperature homogeneity detection air plug interface.
9. the high precision surface source blackbody radiation source device applied under the conditions of a kind of vacuum and low temperature according to claim 8, its
It is characterised by, the temperature controller temperature resolution is 0.01 DEG C, the temperature controller carries PID expert algorithm and self-setting function, tool
There are dual input, dual output function.
10. the high precision surface source blackbody radiation source dress applied under the conditions of a kind of vacuum and low temperature according to claim 8 or claim 9
Put, it is characterised in that the blackbody radiation source main body module also includes sensor, the sensor is separately mounted to the master and added
On backing and the radiant panel；The sensor is the RTD of B/5 class precisions, is needed to sensor and control before install sensor
The thermometric and temperature-adjusting circuit of warm instrument composition carry out overall metering and consistent correction.
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| CN107677375A (en) * | 2017-09-21 | 2018-02-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of infrared radiation measurement system robot scaling equipment and calibrating method |
| CN109029734A (en) * | 2018-06-28 | 2018-12-18 | 电子科技大学 | Infrared focal plane detector multicore test device and test method |
| CN109459140A (en) * | 2018-12-06 | 2019-03-12 | 西安应用光学研究所 | A kind of overlarge area infra-red radiation target plate for infra-red radiation field testing |
| CN109556725A (en) * | 2017-09-25 | 2019-04-02 | 北京振兴计量测试研究所 | Suction surface source radiation plate and area blackbody radiation source device with it |
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