CN106998466B - CMOS active pixel sensor expires the test method of trap after irradiation - Google Patents
CMOS active pixel sensor expires the test method of trap after irradiation Download PDFInfo
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Abstract
The present invention relates to the test methods that CMOS active pixel sensor after a kind of irradiation expires trap, it is by electrostatic test platform that this method, which is related to device, integrating sphere light source, three-dimensional sample adjusts platform, sample test plate, CMOS active pixel sample sensor, DC power supply and computer composition, when the saturation output before sample irradiation is less than 4000DN, by the difference for calculating the bright field average gray value of all pixels position and details in a play not acted out on stage, but told through dialogues average gray value after sample irradiation, draw photoresponse curve, pixel output gray level value of the photoresponse curve when reaching saturation is saturation output, it is to solve the full trap of irradiated sample by the value divided by conversion gain.When the saturation output before sample irradiation is more than or equal to 4000DN, completely trap can be just solved correctly after the gain of programmable gain amplifier in sample is transferred to less than 1.The present invention is easy to operate simple, can intuitively find out the variation of the performance indicators such as device dynamic range, signal-to-noise ratio, sensitivity after irradiating.
Description
Technical field
The invention belongs to photoelectronic imaging device parameter performance detection technique fields, and complementary metal aoxidizes after being related to a kind of irradiation
Object semiconductor active element sensor expires the test method of trap.
Background technology
With the rapid development of space technology, CMOS active pixel sensor
(Complementary Metal Oxide Semiconductor Active Pixel Sensor, abbreviation CMOS APS) has
Have integrated level is high, low in energy consumption, electrical functions comprehensively, can be achieved window selection and it is random the advantages such as read, be more in line with space and set
The requirements such as standby miniaturization, lightweight, low-power consumption are the ideal components of space and remotely sensed image.However in space environment there is
Radiation sources, the chronic exposures such as a large amount of high energy particle, electronics, proton, neutron, X ray, gamma-rays, α particles can cause device wink
Between failure or permanent damage.With space application, there is an urgent need to since the middle and later periods in 20th century, domestic and international associated mechanisms are equal
Start to study the radiation effect of CMOS active pixel sensor.
Full trap is the important indicator for characterizing CMOS active pixel sensor characteristics, theoretically, it
Characterization is maximum capacity that potential well can accommodate, unit e.Complementary metal oxide half can intuitively be embodied by full trap
The pixel units Key Performance Indicator such as dynamic range, signal-to-noise ratio, sensitivity of conductor CMOS active pixel sensor studies active pixel
Sensor full-well capacity has important meaning with the variation of irradiation dose for the ionization radiation effect for studying CMOS active pixel sensor
Justice.
For the CMOS active pixel sensor of k (k-bit), its digital gray value is 0 to (2k- 1) in the range of, thus may be used
See, if light intensity is sufficiently strong or during time for exposure long enough, gray value is always reaching a definite value, as saturation gray value, single
Position is DN.What it was characterized is the ability of the collected most strong useful signal of pixel institute energy.It should be noted that since total system increases
The different set of benefit, the size of saturation gray value also differs, thus, which saturation gray value is it is possible that reach (2k- 1) after,
It can not continue to lift up, illustrate that the saturation gray value of actual pixels is limited by the digit order number of analog-digital converter, have lost part letter
Number, leading to not to obtain full-well capacity with the increased variation tendency of ionization total-dose, this just needs the overall gain of adjustment system,
The saturation gray value of predose is enabled to be less than the maximum value (2 that analog-digital converter exportsk-1)。
Foreign countries be in accordance with 1288 testing standards of EMVA come quantification solution analysis complementary metal oxide semiconductor it is active
The performance parameter of element sensor and camera, but it does not provide the test method after full trap predose, however full trap can be straight
The pixel units Key Performance Indicators such as dynamic range, signal-to-noise ratio, the sensitivity of embodiment sensor of sight, therefore set forth herein irradiation
CMOS active pixel sensor expires the test method of trap afterwards, grasps variation tendency of the full trap with irradiation,
To study device radiation effect it is significant, more can be CMOS active pixel sensor in sky
Between radiation-hardened design when applying theoretical foundation and technical support are provided.
Invention content
It is an object of the present invention to the limitation to solve existing measuring technology, provides complementary metal oxygen after a kind of irradiation
Compound semiconductor active element sensor expires the test method of trap, and it is by electrostatic test platform, integrating sphere that this method, which is related to device,
Light source, three-dimensional sample adjustment platform, sample test plate, CMOS active pixel sample sensor, direct current
Source and computer composition, the saturation output before sample irradiation are 20 times or so of predose details in a play not acted out on stage, but told through dialogues average gray value, and should
When saturation output is less than 4000DN, it is averaged by the bright field average gray value for calculating all pixels position after sample irradiation with details in a play not acted out on stage, but told through dialogues
The difference of gray value using the difference as ordinate, using the time of integration as abscissa, draws photoresponse curve, photoresponse curve exists
Pixel output gray level value when reaching saturation is saturation output, i.e., the value divided by conversion gain are solved irradiated sample
Full trap.In order to avoid there is truncation effect when solving full trap, when the saturation output before sample irradiation is more than or equal to 4000DN,
Need the gain by programmable gain amplifier in sample interior structure that could be solved just by the above method after being transferred to less than 1
True full trap.The present invention is easy to operate simple, can intuitively find out device dynamic range, signal-to-noise ratio, sensitivity etc. after irradiating
The situation of change of performance indicator.
CMOS active pixel sensor expires the test side of trap after a kind of irradiation of the present invention
Method, device involved in this method are by electrostatic test platform, integrating sphere light source, three-dimensional sample adjustment platform, sample test plate, complementation
Metal-oxide semiconductor (MOS) CMOS active pixel sensor sample, DC power supply and computer composition, divide on electrostatic test platform (1)
Not She You integrating sphere light source (2) and three-dimensional sample adjustment platform (3), be fixed with sample test plate in three-dimensional sample adjustment platform (3)
(4), CMOS active pixel sample sensor (5), sample test plate are placed on sample test plate (4)
(4) it is connect with DC power supply (6), electrostatic test platform (1) is connect with computer (7), before radiation involved in described this method mutually
Mend the saturation of metal-oxide semiconductor (MOS) CMOS active pixel sensor sample (5) is exported less than 4000DN or saturation output is more than etc.
In the test of 4000DN；
The saturation output of CMOS active pixel sample sensor (5) is less than before the radiation
4000DN, concrete operations follow these steps to carry out：
A, the saturation output of CMOS active pixel sample sensor (5) is predose before radiation
20 times of details in a play not acted out on stage, but told through dialogues average gray value, and saturation output is less than 4000DN, by the complementary metal oxide semiconductor after irradiation
CMOS active pixel sensor sample (5) is fixed on sample test plate (4), then by sample test plate (4) respectively with DC power supply (6)
It is connected with computer (7), proceeds by details in a play not acted out on stage, but told through dialogues test, details in a play not acted out on stage, but told through dialogues need to closes integrating sphere light source (2), and simultaneously close off test when testing
Other lighting sources in room, and live CMOS active pixel sample sensor with lighttight black box the cover
(5)；
B, under dark fieid conditions, time of integration range on computer testing software is set and takes 15 at equal intervals within this range
It is a, the gray level image of 20 frames 2048 × 2040 is adopted under each time of integration by imaging sensor, 20 are obtained by test software
The gray scale value matrix of group 2048 × 2040 calculates the details in a play not acted out on stage, but told through dialogues average gray value of all pixels position after irradiation；
C, under bright field conditions：Integrating sphere light source (2) is opened, and other lighting sources in test cabinet is kept to close, in step b
15 points are taken in the range of the time of integration of setting at equal intervals, 20 frames 2048 × 2040 are adopted by imaging sensor under each time of integration
Gray level image, 20 group 2048 × 2040 of gray scale value matrix can be obtained by test software, calculates all pixels after irradiation
The bright field average gray value of position；
D, using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
The difference of details in a play not acted out on stage, but told through dialogues average gray value put draws photoresponse curve, picture of the photoresponse curve when reaching saturation as ordinate
Plain output gray level value is saturation output, and the value divided by conversion gain are to expire trap；
The saturation output of CMOS active pixel sample sensor (5) is more than or equal to before the radiation
4000DN, concrete operations follow these steps to carry out：
A, the saturation output of CMOS active pixel sample sensor (5) is more than or equal to before radiation
4000DN, then the full trap of CMOS active pixel sample sensor (5) is needed complementary metal after irradiating
After the gain of programmable gain amplifier is transferred to less than 1 in oxide semiconductor sample CMOS active pixel sensor (5) internal structure,
CMOS active pixel sample sensor (5) after irradiation is fixed on sample test plate (4), then will
Sample test plate (4) is connected respectively with DC power supply (6) and computer (7), proceeds by details in a play not acted out on stage, but told through dialogues test, and details in a play not acted out on stage, but told through dialogues needs to close when testing
Integrating sphere light source (2) is closed, and simultaneously closes off other lighting sources in test cabinet, and complementary metal is lived with lighttight black box the cover
Oxide semiconductor CMOS active pixel sensor sample (5)；
B, under dark fieid conditions, time of integration range on computer testing software is set and takes 15 at equal intervals within this range
It is a, the gray level image of 20 frames 2048 × 2040 is adopted under each time of integration by imaging sensor, 20 are obtained by test software
The gray scale value matrix of group 2048 × 2040 calculates the details in a play not acted out on stage, but told through dialogues average gray value of all pixels position after irradiation；
C, under bright field conditions：Integrating sphere light source (2) is opened, and other lighting sources in test cabinet is kept to close, in step b
15 points are taken in the range of the time of integration of setting at equal intervals, 20 frames 2048 × 2040 are adopted by imaging sensor under each time of integration
Gray level image, 20 group 2048 × 2040 of gray scale value matrix can be obtained by test software, calculates all pixels after irradiation
The bright field average gray value of position；
D, using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
The difference of details in a play not acted out on stage, but told through dialogues average gray value put draws photoresponse curve, picture of the photoresponse curve when reaching saturation as ordinate
Plain output gray level value is saturation output, and the value divided by conversion gain are to expire trap.
CMOS active pixel sensor expires the test method of trap after a kind of irradiation of present invention offer,
Using the integrating sphere light source being placed on electrostatic test platform, three-dimensional sample adjustment platform, sample test plate, power supply, calculate unit
Into irradiation after CMOS active pixel sensor expire the test system of trap.This method is suitable for two kinds of feelings
Condition：
The first situation is 20 times or so of saturation output before the sample irradiation for predose details in a play not acted out on stage, but told through dialogues average gray value, and
And the saturation is exported when being less than 4000DN, concrete operations follow these steps to carry out：
CMOS active pixel sample sensor (5) after irradiation is fixed on sample test plate
(4) on, then sample test plate (4) with DC power supply (6) and computer (7) is connected respectively, proceeds by details in a play not acted out on stage, but told through dialogues test, details in a play not acted out on stage, but told through dialogues
Integrating sphere light source (2) need to be closed during test, and simultaneously closes off other lighting sources in test cabinet, and with lighttight black box the cover
Firmly CMOS active pixel sample sensor (5)；
Under dark fieid conditions, time of integration range on computer testing software is set and takes 15 at equal intervals within this range
Point is adopted the gray level image of 20 frames 2048 × 2040 by imaging sensor under each time of integration, 20 groups are obtained by test software
2048 × 2040 gray scale value matrix, gray scale value matrix are respectively y1[m][n]、y2[m][n]、……、y20[m] [n], wherein m
Represent the location of pixels (1≤m≤2048,1≤n≤2040, m, n all be positive integer) of some gray value with n, subscript dark and
D represents details in a play not acted out on stage, but told through dialogues, subscript q (1,2 ..., 20) represent the serial numbers of 20 frame images.Seek each location of pixels of details in a play not acted out on stage, but told through dialogues after irradiating
Average gray value：
Then the average value of the gray value of all pixels position under dark fieid conditions after irradiating, i.e. μ are calculatedy.dark：
Under bright field conditions：Integrating sphere light source (2) is opened, and other lighting sources in test cabinet is kept to close, is set in details in a play not acted out on stage, but told through dialogues
15 points are taken in the range of the time of integration put at equal intervals, 20 frames 2048 × 2040 are adopted by imaging sensor under each time of integration
Gray level image can obtain 20 group 2048 × 2040 of gray scale value matrix by test software.Gray scale value matrix is respectively y1[m]
[n]、y2[m][n]、……、y20[m] [n], wherein m and n represent some gray value location of pixels (1≤m≤2048,1≤n≤
2040, m, n all be positive integer), subscript q (1,2 ..., 20) represent 20 frame images serial number, ask irradiation after each picture of bright field
The average gray value of plain position：
The average value of the gray value of all pixels position under bright field conditions after irradiating, i.e. μ are calculated againy：
Using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
Details in a play not acted out on stage, but told through dialogues average gray value difference as ordinate, draw photoresponse curve, pixel of the photoresponse curve when reaching saturation
Output gray level value is saturation output, and the value divided by conversion gain are to expire trap.
The second situation is when the saturation output before sample irradiation is more than or equal to 4000DN, and concrete operations follow these steps
It carries out：
In a computer less than 1, then the gain of programmable gain amplifier in sample (5) internal structure is transferred to first
According to be obtained the step of method during the first situation irradiation after CMOS active pixel sensor full trap
.
CMOS active pixel sensor expires the test problem of trap after the present invention solves irradiation, more
It has mended and has lacked CMOS active pixel sensor in 1288 testing standards of EMVA and expire trap this key performance
The deficiency of parameter test method.Method proposed by the present invention has fully considered the truncation effect being likely to occur during full trap test, and
For this situation presents corresponding solutions, it can intuitively find out CMOS active pixel sensor full-well capacity with irradiation agent
The variation of amount is of great significance for the ionization radiation effect for studying CMOS active pixel sensor.Therefore the present invention is suitable for needing
Device research institute, scientific research institutions and the boat of CMOS active pixel sensor performance after to master irradiation
Its load unit uses.
Description of the drawings
Fig. 1 is present invention test system schematic；
Fig. 2 is that the saturation output of example (5) predose in the present invention is 20 times of predose details in a play not acted out on stage, but told through dialogues average gray value
Left and right, and saturation output is less than under the premise of 4000DN before the sample irradiation that tests out, irradiation accumulated dose reaches 50Krad and
The photoresponse curve of 100Krad；
Fig. 3 is that the saturation output of example (5) predose in the present invention is more than or equal to 4000DN, but do not adjust programmable
Before the sample irradiation tested out under the premise of the gain of gain amplifier, irradiate the light sound that accumulated dose reaches 50Krad and 100Krad
Answer curve.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
Embodiment
CMOS active pixel sensor expires the test method of trap after irradiation of the present invention, should
It is by electrostatic test platform, integrating sphere light source, three-dimensional sample adjustment platform, sample test plate, complementary metal oxygen that method, which is related to device,
Compound semiconductor samples, DC power supply and computer composition, are respectively equipped with integrating sphere light source 2 and three on electrostatic test platform 1
Sample adjustment platform 3 is tieed up, sample test plate 4 is fixed on three-dimensional sample adjustment platform 3, complementary gold is placed on sample test plate 4
Belong to oxide semiconductor CMOS active pixel sensor sample 5, sample test plate 4 is connect with DC power supply 6, electrostatic test platform 1 and
Computer 7 connects；
The saturation output of CMOS active pixel sample sensor 5 is predose details in a play not acted out on stage, but told through dialogues before radiation
20 times or so of average gray value, and saturation output is less than 4000DN, then and there is complementary metal oxide semiconductor after irradiating
The full trap concrete operations of active picture sensor sample 5 follow these steps to carry out：
A, before details in a play not acted out on stage, but told through dialogues test, first by (its model of CMOS active pixel sample sensor 5
GSENSE400 gamma-ray irradiation) is carried out, dosage rate is 50rad (Si)/s, and a length of 1000s during irradiation, accumulated dose reaches 50krad
Shi Jinhang is tested, and CMOS active pixel sample sensor 5 then is inserted into (its type of sample test plate 4
Number be vesion1.1) on, fixing complementary metal oxide semiconductor with the zero insertion force socket on sample test plate 4 has source image
Plain sample sensor 5, then sample test plate 4 is connected respectively with DC power supply 6, computer 7, by the three of DC power supply after connection
Road is set as+5V, -5V and ground connection, and 4 running current under+5V of setting sample test plate is 435mA to 550mA, at this time
Current limliting is set as 800mA；The current limliting under -5V of sample test plate 4 is set as 100mA；The sequential of sample test plate 4 and configuration parameter
It is provided by Changchun Changguang Chenxin Optoelectronic Technology Co., Ltd., is divided into mode standard and high dynamic range mode, in this test process
Using the configuration parameter under high dynamic range mode sequential and this pattern；Selection output image resolution ratio is set as 2048 ×
2040, after DC power supply 6 and computer installation 7 are provided with, if CMOS active pixel passes before radiation
The saturation output of sensor sample 5 is 20 times or so of predose details in a play not acted out on stage, but told through dialogues average gray value, and saturation output is less than 4000DN,
Details in a play not acted out on stage, but told through dialogues test is then proceeded by, details in a play not acted out on stage, but told through dialogues need to close integrating sphere light source 2, and simultaneously close off other illumination lights in test cabinet when testing
Source, and live CMOS active pixel sample sensor 5 with lighttight black box the cover；
B, under dark fieid conditions, test environment temperature setting is 25 DEG C, and humidity is set as 30%RH, is tested in computer 7
The time of integration range of software is set as 1-10000linetime, takes 15 points in the range of the time of integration at equal intervals, each to integrate
The gray level image of 20 frames 2048 × 2040 is adopted under time by imaging sensor, by test software can obtain 20 group 2048 ×
2040 gray scale value matrix, gray scale value matrix are respectively y1[m][n]、y2[m][n]、……、y20[m] [n], wherein m and n are represented
The location of pixels (1≤m≤2048,1≤n≤2040, m, n are positive integer) of some gray value, subscript dark and d are represented
Details in a play not acted out on stage, but told through dialogues, subscript q (1,2 ..., 20) represent 20 frame images serial number.Formula (1) is first passed through according to this 20 groups of gray scale value matrixs
The average gray value of each location of pixels of predose details in a play not acted out on stage, but told through dialogues is obtained, then predose details in a play not acted out on stage, but told through dialogues all pixels position is obtained by formula (2)
The average value for the gray value put, i.e. μy.dark；
When calculating irradiation 1000s accumulated doses in 15 different times of integration and reaching 50krad, details in a play not acted out on stage, but told through dialogues all pixels position
Gray value average results as in table 1 the 3rd big row details in a play not acted out on stage, but told through dialogues export shown in small row；The data of predose are datum in table 1
According to；
Reach the details in a play not acted out on stage, but told through dialogues of different accumulated doses and the average gray value test knot of bright field all pixels position after 1 sample irradiation of table
Fruit (the saturation output of sample is 20 times or so of predose details in a play not acted out on stage, but told through dialogues average gray value, and saturation output is less than 4000DN)
Sample continuation is irradiated into 1000s again, when accumulated dose reaches 100krad, then carries out details in a play not acted out on stage, but told through dialogues test.It is selected before
When the fixed 15 different times of integration calculate irradiation 2000s accumulated doses and reach 100krad, the gray scale of details in a play not acted out on stage, but told through dialogues all pixels position
The average results of value are as shown in the 4th small row of big row details in a play not acted out on stage, but told through dialogues output in table 1；
C, under bright field conditions：Bright field test is carried out when sample irradiation 1000s accumulated doses are reached 50krad, opens integrating sphere
Light source 2, and other lighting sources in test cabinet is kept to close, test environment temperature is still set as 25 DEG C, and humidity is set as 30%
RH, sample test plate 4 need to be adjusted the position that platform 3 adjusts tri- directions of X, Y, Z by three-dimensional sample, make itself and integrating sphere light source 2
Distance 5cm, and integrate 5 face of CMOS active pixel sample sensor on sample test plate 4
Ball light source light-emitting window is simultaneously aligned with light-emitting window edge, the time of integration range identical with details in a play not acted out on stage, but told through dialogues is set in test software, in step
Take 15 points at equal intervals in the range of the time of integration of rapid b settings, under each time of integration by imaging sensor adopt 20 frames 2048 ×
2040 gray level image can obtain 20 group 2048 × 2040 of gray scale value matrix, gray scale value matrix difference by test software
For y1[m][n]、y2[m][n]、……、y20[m] [n], wherein m and n represent some gray value location of pixels (1≤m≤M, 1
≤ n≤N, m, n, M, N all be positive integer), subscript q (1,2 ..., 20) represent 20 frame images serial number, according to this 20 groups ash
Angle value matrix first passes through the average gray value that each location of pixels of predose bright field is obtained in formula (3), then is obtained by formula (4)
The average value of the gray value of bright field all pixels position, i.e. μ after irradiationy；
When calculating irradiation 1000s accumulated doses in 15 different times of integration and reaching 50krad, bright field all pixels position
Gray value average results as in table 1 the 3rd big row bright field export shown in small row；
Sample continuation is irradiated into 1000s again, when accumulated dose reaches 100krad, then a bright field test is carried out, is selected before
When the fixed 15 different times of integration calculate irradiation 2000s accumulated doses and reach 100krad, the gray scale of bright field all pixels position
The average results of value are as shown in the 4th small row of big row bright field output in table 1；
D, using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
The difference of details in a play not acted out on stage, but told through dialogues average gray value put draws photoresponse curve, as shown in Figure 2 as ordinate.Photoresponse curve is reaching
Pixel output gray level value during saturation is saturation output, and the value divided by conversion gain are to expire trap.
Embodiment 2
The saturation output of CMOS active pixel sample sensor 5 is more than or equal to before radiation
4000DN, then the full trap of CMOS active pixel sample sensor 5 is needed complementary metal oxygen after irradiating
After the gain of programmable gain amplifier is transferred to less than 1 in 5 internal structure of compound semiconductor active element sensor sample, then ask
Solving correctly expires trap, and concrete operations follow these steps to carry out：
A, the saturation output of CMOS active pixel sample sensor (5) is more than or equal to before radiation
4000DN, then the full trap of CMOS active pixel sample sensor (5) is needed complementary metal after irradiating
After the gain of programmable gain amplifier is transferred to less than 1 in oxide semiconductor sample CMOS active pixel sensor (5) internal structure,
CMOS active pixel sample sensor (5) after irradiation is fixed on sample test plate (4), then will
Sample test plate (4) is connected respectively with DC power supply (6) and computer (7), proceeds by details in a play not acted out on stage, but told through dialogues test, and details in a play not acted out on stage, but told through dialogues needs to close when testing
Integrating sphere light source (2) is closed, and simultaneously closes off other lighting sources in test cabinet, and complementary metal is lived with lighttight black box the cover
Oxide semiconductor CMOS active pixel sensor sample (5)；
B, under dark fieid conditions, test environment temperature setting is 25 DEG C, and humidity is set as 30%RH, is tested in computer 7
The time of integration range of software is set as 1-10000linetime, takes 15 points in the range of the time of integration at equal intervals, each to integrate
The gray level image of 20 frames 2048 × 2040 is adopted under time by imaging sensor, by test software can obtain 20 group 2048 ×
2040 gray scale value matrix, gray scale value matrix are respectively y1[m][n]、y2[m][n]、……、y20[m] [n], wherein m and n are represented
The location of pixels (1≤m≤2048,1≤n≤2040, m, n are positive integer) of some gray value, subscript dark and d are represented
Details in a play not acted out on stage, but told through dialogues, subscript q (1,2 ..., 20) represent 20 frame images serial number.Formula (1) is first passed through according to this 20 groups of gray scale value matrixs
The average gray value of each location of pixels of predose details in a play not acted out on stage, but told through dialogues is obtained, then predose details in a play not acted out on stage, but told through dialogues all pixels position is obtained by formula (2)
The average value for the gray value put, i.e. μy.dark；
When calculating irradiation 1000s accumulated doses in 15 different times of integration and reaching 50krad, details in a play not acted out on stage, but told through dialogues all pixels position
Gray value average results as in table 1 the 3rd big row details in a play not acted out on stage, but told through dialogues export shown in small row；
Sample continuation is irradiated into 1000s again, when accumulated dose reaches 100krad, then carries out details in a play not acted out on stage, but told through dialogues test.It is selected before
When the fixed 15 different times of integration calculate irradiation 2000s accumulated doses and reach 100krad, the gray scale of details in a play not acted out on stage, but told through dialogues all pixels position
The average results of value are as shown in the 4th small row of big row details in a play not acted out on stage, but told through dialogues output in table 1；
C, under bright field conditions：Bright field test is carried out when sample irradiation 1000s accumulated doses are reached 50krad, opens integrating sphere
Light source 2, and other lighting sources in test cabinet is kept to close, test environment temperature is still set as 25 DEG C, and humidity is set as 30%
RH, sample test plate 4 need to be adjusted the position that platform 3 adjusts tri- directions of X, Y, Z by three-dimensional sample, make itself and integrating sphere light source 2
Distance 5cm, and integrate 5 face of CMOS active pixel sample sensor on sample test plate 4
Ball light source light-emitting window is simultaneously aligned with light-emitting window edge, the time of integration range identical with details in a play not acted out on stage, but told through dialogues is set in test software, in step
Take 15 points at equal intervals in the range of the time of integration of rapid b settings, under each time of integration by imaging sensor adopt 20 frames 2048 ×
2040 gray level image can obtain 20 group 2048 × 2040 of gray scale value matrix, gray scale value matrix difference by test software
For y1[m][n]、y2[m][n]、……、y20[m] [n], wherein m and n represent some gray value location of pixels (1≤m≤M, 1
≤ n≤N, m, n, M, N all be positive integer), subscript q (1,2 ..., 20) represent 20 frame images serial number, according to this 20 groups ash
Angle value matrix first passes through the average gray value that each location of pixels of predose bright field is obtained in formula (3), then is obtained by formula (4)
The average value of the gray value of bright field all pixels position, i.e. μ after irradiationy；
When calculating irradiation 1000s accumulated doses in 15 different times of integration and reaching 50krad, bright field all pixels position
Gray value average results as in table 1 the 3rd big row bright field export shown in small row；
Sample continuation is irradiated into 1000s again, when accumulated dose reaches 100krad, then a bright field test is carried out, is selected before
When the fixed 15 different times of integration calculate irradiation 2000s accumulated doses and reach 100krad, the gray scale of bright field all pixels position
The average results of value are as shown in the 4th small row of big row bright field output in table 1；
D, using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
The difference of details in a play not acted out on stage, but told through dialogues average gray value put draws photoresponse curve, as shown in Figure 2 as ordinate.Photoresponse curve is reaching
Pixel output gray level value during saturation is saturation output, and the value divided by conversion gain are to expire trap.
If the saturation output to predose CMOS active pixel sample sensor 5 is more than or equal to
4000DN does not do the Gain tuning of programmable gain amplifier, and irradiation accumulation directly is obtained to different total agent by 1 step of embodiment
After measuring 50Krad, 100Krad, the bright field average gray value of all pixels position and the details in a play not acted out on stage, but told through dialogues average gray of all pixels position
Value, relevant test data are as shown in table 2.
Reach the details in a play not acted out on stage, but told through dialogues of different accumulated doses and the average gray value test knot of bright field all pixels position after 2 sample irradiation of table
Fruit
(the saturation output of predose sample is more than or equal to 4000DN, but do not adjust the gain of programmable gain amplifier)
Predose data in table 2 are given data, using the difference of the two as ordinate, using the time of integration as horizontal seat
Mark draws photoresponse curve, as shown in figure 3, can intuitively see that the saturation output gray level value of actual pixels occurs from Fig. 3
Truncation effect, has lost part signal, leads to not be obtained correctly completely trap.
The above, CMOS active pixel sensor after a kind of irradiation only provided by the invention
The specific embodiment of the test method of full trap, but protection scope of the present invention is not limited thereto.
Claims (1)
1. CMOS active pixel sensor expires the test method of trap after a kind of irradiation, which is characterized in that
Device involved in this method is by electrostatic test platform, integrating sphere light source, three-dimensional sample adjustment platform, sample test plate, complementary gold
Belong to oxide semiconductor CMOS active pixel sensor sample, DC power supply and computer composition, in electrostatic test platform（1）Upper difference
Equipped with integrating sphere light source（2）Platform is adjusted with three-dimensional sample（3）, platform is adjusted in three-dimensional sample（3）On be fixed with sample test plate
（4）, in sample test plate（4）Upper placement CMOS active pixel sample sensor（5）, sample test plate
（4）With DC power supply（6）Connection, electrostatic test platform（1）With computer（7）Connection, complementary gold before radiation involved in this method
Belong to oxide semiconductor CMOS active pixel sensor sample（5）Saturation output less than 4000DN or saturation output be more than or equal to
The test of 4000DN；
CMOS active pixel sample sensor before the radiation（5）Saturation output less than 4000DN
Test, concrete operations follow these steps to carry out：
A, the CMOS active pixel sample sensor before radiation（5）Saturation output for predose details in a play not acted out on stage, but told through dialogues
20 times of average gray value, and saturation output is less than 4000DN, the complementary metal oxide semiconductor after irradiation is active
Element sensor sample（5）It is fixed on sample test plate（4）On, then by sample test plate（4）Respectively with DC power supply（6）And meter
Calculation machine（7）It is connected, proceeds by details in a play not acted out on stage, but told through dialogues test, details in a play not acted out on stage, but told through dialogues need to closes integrating sphere light source when testing（2）, and simultaneously close off in test cabinet
Other lighting sources, and live CMOS active pixel sample sensor with lighttight black box the cover（5）；
B, under dark fieid conditions, time of integration range on computer testing software is set and takes 15 at equal intervals within this range
Point is adopted the gray level image of 20 frames 2048 × 2040 by imaging sensor under each time of integration, 20 groups are obtained by test software
2048 × 2040 gray scale value matrix calculates the details in a play not acted out on stage, but told through dialogues average gray value of all pixels position after irradiation；
C, under bright field conditions：Open integrating sphere light source（2）, and other lighting sources in test cabinet is kept to close, it is set in step b
The time of integration in the range of take 15 points at equal intervals, the ash of 20 frames 2048 × 2040 is adopted under each time of integration by imaging sensor
Image is spent, 20 group 2048 × 2040 of gray scale value matrix can be obtained by test software, calculates all pixels position after irradiation
Bright field average gray value；
D, using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
The difference of details in a play not acted out on stage, but told through dialogues average gray value draws photoresponse curve, picture of the photoresponse curve when reaching saturation as ordinate
Plain output gray level value divided by conversion gain are to expire trap；
CMOS active pixel sample sensor before the radiation（5）Saturation output be more than or equal to
The test of 4000DN, concrete operations follow these steps to carry out：
A, the CMOS active pixel sample sensor before radiation（5）Saturation output be more than or equal to
4000DN, then CMOS active pixel sample sensor after irradiating（5）Full trap need complementary metal
Oxide semiconductor sample CMOS active pixel sensor（5）After the gain of programmable gain amplifier is transferred to less than 1 in internal structure,
By the CMOS active pixel sample sensor after irradiation（5）It is fixed on sample test plate（4）On, then will
Sample test plate（4）Respectively with DC power supply（6）And computer（7）It is connected, proceeds by details in a play not acted out on stage, but told through dialogues test, details in a play not acted out on stage, but told through dialogues needs to close when testing
Close integrating sphere light source（2）, and other lighting sources in test cabinet are simultaneously closed off, and complementary metal is lived with lighttight black box the cover
Oxide semiconductor CMOS active pixel sensor sample（5）；
B, under dark fieid conditions, time of integration range on computer testing software is set and takes 15 at equal intervals within this range
Point is adopted the gray level image of 20 frames 2048 × 2040 by imaging sensor under each time of integration, 20 groups are obtained by test software
2048 × 2040 gray scale value matrix calculates the details in a play not acted out on stage, but told through dialogues average gray value of all pixels position after irradiation；
C, under bright field conditions：Open integrating sphere light source（2）, and other lighting sources in test cabinet is kept to close, it is set in step b
The time of integration in the range of take 15 points at equal intervals, the ash of 20 frames 2048 × 2040 is adopted under each time of integration by imaging sensor
Image is spent, 20 group 2048 × 2040 of gray scale value matrix can be obtained by test software, calculates all pixels position after irradiation
Bright field average gray value；
D, using the time of integration as abscissa, with the bright field average gray value of all pixels position after irradiation and all pixels position
The difference of details in a play not acted out on stage, but told through dialogues average gray value draws photoresponse curve, picture of the photoresponse curve when reaching saturation as ordinate
Plain output gray level value divided by conversion gain are to expire trap.
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