CN106995915A - Equipment is steamed in a kind of rotary multi-level resistance - Google Patents
Equipment is steamed in a kind of rotary multi-level resistance Download PDFInfo
- Publication number
- CN106995915A CN106995915A CN201710331221.0A CN201710331221A CN106995915A CN 106995915 A CN106995915 A CN 106995915A CN 201710331221 A CN201710331221 A CN 201710331221A CN 106995915 A CN106995915 A CN 106995915A
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- electrode
- electric pole
- rotary electric
- pole bar
- cylinder
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- 238000001704 evaporation Methods 0.000 claims abstract description 56
- 230000008020 evaporation Effects 0.000 claims abstract description 55
- 238000010025 steaming Methods 0.000 claims abstract description 31
- 239000000203 mixture Substances 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 43
- 238000009434 installation Methods 0.000 claims description 35
- 230000001360 synchronised effect Effects 0.000 claims description 25
- 238000001816 cooling Methods 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000002787 reinforcement Effects 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000007747 plating Methods 0.000 abstract description 5
- 239000012528 membrane Substances 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 10
- 239000000498 cooling water Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000306 recurrent effect Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 210000002435 tendon Anatomy 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Equipment is steamed the invention discloses a kind of resistance of rotary multi-level, mainly by erecting bed (1), be separately positioned on erecting bed (1) from electrode locking device and rotary electric pole bar (2), the motor (3) being connected with rotary electric pole bar (2), and the composition such as many steric hindrance steaming plates for being arranged in rotary electric pole bar (2) and being electrically connected with from electrode locking device.Many steric hindrance steaming plates set by the present invention can place multiple targets simultaneously, and the rotary electric pole bar 2 that the present invention is arranged in many steric hindrance steaming plates can carry out 360 ° of rotation under the drive of motor 3, many steric hindrance steaming plates is also carried out 360 ° of rotation, the conversion to the evaporation boat 6 of heating is realized well.Ensure that the present invention can be while place multiple targets, and the requirement of continuous plated film can be carried out to target, effectively shorten the plated film time of substrate, preferably improve very much the plating membrane efficiency of resistance evaporation film device.
Description
Technical field
Equipment is steamed the present invention relates to one kind resistance, a kind of rotary multi-level resistance is specifically referred to and steams equipment.
Background technology
Resistance evaporation film makes its surface component be evaporated with atomic group or ionic species generally by heating target, and
And the atomic group or ion of target is deposited in substrate surface, by film forming procedure, (scatterplot-island structure-fan walks structure-layer
Shape grows) form film.We usually can repeatedly be plated when to substrate coating to substrate using identical or different target
Film, to ensure the coating quality of substrate.
However, existing resistance evaporation film device, which is generally a formula, fixes resistance evaporation film device, the equipment can only in evaporation
Place a kind of target, it is impossible to while placing multiple targets, when needing to carry out multiple plated film to substrate, then need to close resistance evaporation film
By being manually added or changing target after equipment, cause the plated film time of substrate long, so that the serious resistance that have impact on is steamed
The plating membrane efficiency of filming equipment.
The content of the invention
Can not be while place multiple targets it is an object of the invention to overcome existing resistance evaporation film device, therefore can not
The defect that continuous plated film is carried out to substrate steams equipment there is provided a kind of resistance of rotary multi-level.
The purpose of the present invention passes through following technical proposals reality：Equipment is steamed in a kind of rotary multi-level resistance, mainly by erecting bed,
Be separately positioned on erecting bed from electrode locking device and rotary electric pole bar, the electrode lock electrically connected with rotary electric pole bar
Tight device, the motor being connected with rotary electric pole bar, and be arranged in rotary electric pole bar and with being locked from electrode
Many steric hindrance steaming plates composition of device electrical connection；Multiple evaporation boats, the rotary electric pole bar are provided with many steric hindrance steaming plates
It is connected to by timing belt on motor.
Many steric hindrance steaming plates include electrode disk, corresponded with evaporation boat set and electrically connect with evaporation boat from electrode
Ear, the elastic parts for being arranged on from electrode ear and being connected with electrode disk；It is described from electrode ear and electric from electrode locking device
Connection.
The elastic parts includes the felt pad being connected with from electrode ear, is arranged on the installing plate on felt pad, and
One end is connected with installing plate, the other end is connected to elastic component in electrode disk by reinforcement.
The rotary electric pole bar is connected on erecting bed by tensing connecting seat, is set respectively in the rotary electric pole bar
Support cylinder and water cooling tube and rotating device are equipped with, the rotating device is also connected with supporting cylinder and tensing connecting seat respectively,
The annular electrode disk being additionally provided with the rotary electric pole bar, the annular electrode disk is connected to rotatably by electrode anchor ear
On electrode stem and with electrode locking device.
The rotating device includes one end and supports cylinder to be connected, the other end is with tensing the rotatory vacuum that connecting seat is connected
Hermetically sealed case, one end is put by upper bearing (metal) outside rotating vacuum seals, the other end is arranged on by lower bearing and supports cylinder
On rotation interior axle, and spline fixed by timing belt be connected to timing belt in rotation interior axle and below the lower bearing
Wheel：The rotary electric pole bar is connected through rotation interior axle, and the rotary electric pole bar one end by static seal with rotation interior axle
Connect, the other end is fixed spline by interior axle and is connected with rotation interior axle, the synchronous pulley passes through timing belt and motor phase
Connection.
The electrode locking device includes the electrode clamping plate electrically connected with annular electrode disk, is arranged under electrode clamping plate
Side and the pressure head for clamping annular electrode disk, and the first cylinder being arranged on pressure head；The pressure head is connected to the first gas
On first expansion link of cylinder；The electrode clamping plate is provided with installation base plate, and first cylinder is arranged on installation base plate；Institute
Installation base plate is stated provided with seat is kept, the electrode clamping plate is connected on holding seat and under holding seat by insulation board
Side, first expansion link is through installation base plate with keeping seat；The rotary electric pole bar is through installation base plate and by supporting
Cylinder is connected on installation base plate.
It is described from electrode locking device include with from electrode ear electrically connect from electrode tip holder, be arranged on from electrode tip holder top and
For clamping the chuck from electrode ear, and the second cylinder being arranged on chuck；The chuck is connected to the of the second cylinder
Described that conductive seat is provided with from electrode tip holder on two expansion links, the conductive seat is connected on erecting bed simultaneously by lower collets
Positioned at the lower section of erecting bed, it is provided with the erecting bed on the upper collets matched with lower collets, the conductive seat also
Mounting cylinder is provided with, second expansion link runs through mounting cylinder and conductive seat, and second expansion link passes through Telescopic rod fixing seat
It is connected on conductive seat.
One end of the evaporation boat is connected in electrode disk by electrode briquetting, its other end from electrode briquetting by connecting
From electrode ear.
The motor is arranged on installation base plate, is provided with the rotating shaft of described motor for adjusting driving
The transmission that timing belt is connected on synchronous pulley is provided with the speed changer of motor speed, the power transmission shaft of the speed changer same
Walk and be provided with encoder below belt wheel, the drive coordination belt wheel, the encoder is connected to speed change by rotating shaft adapter sleeve
On the power transmission shaft of device.
The lower end of the rotary electric pole bar is provided with Rotary Water joint, and the water cooling tube is through Rotary Water joint
It is connected to after mounting head in the water supply connector of Rotary Water joint.
The present invention has advantages below and beneficial effect compared with prior art：
(1) many steric hindrance steaming plates for setting of the present invention can be while place multiple targets provided with multiple evaporation boats, and this hair
Bright that rotary electric pole bar is provided with also in many steric hindrance steaming plates, the rotary electric pole bar is under the drive for the motor being connected
360 ° of rotation can be carried out, many steric hindrance steaming plates is also carried out 360 ° of rotation.Meanwhile, what the present invention was set locks dress from electrode
Putting can realize to the automatic conducting from electrode and electrode in many steric hindrance steaming plates with closing with electrode locking device, ensure that
The present invention can place multiple targets simultaneously, and the requirement of continuous plated film can be carried out to target, effectively shorten the plating of substrate
The film time, preferably improve very much the plating membrane efficiency of resistance evaporation film device.
(2) present invention is being provided with elastic parts between electrode ear and resistance steaming plate, and the elastic parts can make from electrode ear
Quickly reset, it is therefore prevented that evaporation boat occurs deforming or be broken after heated, so as to effectively raise the use longevity of evaporation boat
Life.
(3) water cooling tube is provided with rotary electric pole bar of the invention, it is fast that the water cooling tube can realize rotary electric pole bar
The cooling of speed, enables the temperature of rotary electric pole bar to be maintained at 25 DEG C or so, ensures that the rotary electric pole bar of the present invention
It will not deform, while ensure that the insulation being engaged with rotary electric pole bar and seal member will not be by high temperature failures, so that pole
The big service life for extending electrode assembly.
(4) tension connecting seat of the invention can be such that rotary electric pole bar is firmly fixed on erecting bed, and the present invention is set
Rotating device rotary electric pole bar can be made to realize under the drive of motor be freely rotatable.
(5) motor and encoder of the invention are engaged, and electrode stem can be made to carry out locating rotation, solved well
The power supply control apparatus of existing electrode stem can not make the problem of electrode stem carries out locating rotation.
(6) pressure head of electrode locking device of the invention can realize electrode under the drive of the first expansion link of the first cylinder
The automatic connection and disconnection of clamping plate and the annular electrode disk of rotary electric pole bar, and electrode locking device can make rotary electric
Annular electrode disk contact with electrode clamping plate of pole bar is closer, ensures that the electrode energy of rotary electric pole bar of the present invention
Automatically it is turned on or off, a stable electrode is provided for evaporation boat while ensure that, effectively raises resistance evaporation film machine pair
The evaporation rate of target.
(7) chuck from electrode locking device of the invention can be realized under the drive of the second expansion link of the second cylinder from
Electrode tip holder and the automatic connection from electrode ear and disconnection, and can make from electrode ear and connecing from electrode tip holder from electrode locking device
Touch closer, ensure that the present invention can be turned on or off automatically from electrode ear from electrode, while ensure that as evaporation boat
One stable electrode is provided, evaporation rate of the resistance evaporation film machine to target is effectively raised.
Brief description of the drawings
Fig. 1 is overall schematic of the invention.
Fig. 2 is the sectional view of the rotary electric pole bar of the present invention.
Fig. 3 is the top view of many steric hindrance steaming plates of the present invention.
Fig. 4 is the sectional view of many steric hindrance steaming plates of the present invention.
Fig. 5 is the partial sectional view of the electrode locking device of the present invention.
Fig. 6 is the structural representation of the electrode clamping plate of the present invention.
Fig. 7 is the sectional view from electrode locking device of the invention.
Fig. 8 is the structural representation from electrode tip holder of the invention.
In above-mentioned accompanying drawing, the corresponding component names of reference are as follows：
1-erecting bed, 2-rotary electric pole bar, 3-motor, 4-timing belt, 5-electrode disk, 6-evaporation boat,
7-from electrode ear, 8-felt pad, 9-installing plate, 10-reinforcement, 11-elastic component, 12-from electrode briquetting, 13-electrode
Briquetting, 14-tense outside connecting seat, 15-support cylinder, 16-annular electrode disk, 17-electrode anchor ear, 18-rotating vacuum seals
Set, 19-upper bearing (metal), 20-lower bearing, 21-rotation interior axle, 22-synchronous pulley, 23-timing belt fixation spline, 24-quiet
Sealing, 25-interior axle fixes spline, 26-water cooling tube, 27-electrode clamping plate, 28-pressure head, the 29-the first cylinder, 30-the
One expansion link, 31-installation base plate, 32-keep seat, 33-insulation board, 34-from electrode tip holder, 35-chuck, the 36-the second gas
Cylinder, the 37-the second expansion link, 38-conductive seat, 39-lower collets, 40-upper collets, 41-mounting cylinder, 42-expansion link
Fixed seat, 43-speed changer, 44-power transmission shaft, 45-drive coordination belt wheel, 46-encoder, 47-rotating shaft adapter sleeve, 48-
Lower felt pad, 49-upper felt pad, 50-Rotary Water joint, 51-mounting head, 52-water supply connector, 53-water out adapter,
54-encoder installing plate, 55-tensioning wheel, 101-mounting groove, 102-electrode briquetting mounting hole, 103-groove is installed,
104-elastic component mounting hole, 105-reinforcement mounting hole, 106-slotted eye, 201-silk hole, 301-rotating seal ring, 302-
Synchronous belt washer, 303-belt wheel locking nut, 304-bushing, 305-chamber body sealing ring, 306-locking nut, 307-pad
Plate, 308-tense sealing ring, 309-cylinder shaft rataining ring, 501-fastening screw nut, 502-waterstop ring.
Embodiment
The present invention is described in further detail with reference to embodiment, but embodiments of the present invention are not limited to
This.
Embodiment
As shown in Fig. 1~8, equipment is steamed the invention discloses a kind of resistance of rotary multi-level, mainly by erecting bed 1, is set respectively
Put on erecting bed 1 from electrode locking device and rotary electric pole bar 2, the electrode locking electrically connected with rotary electric pole bar 2
Device, the motor 3 being connected with rotary electric pole bar 2, and be arranged in rotary electric pole bar 2 and with being locked from electrode
Many steric hindrance steaming plates composition of device electrical connection.Multiple evaporation boats 6, the rotary electric pole bar are provided with many steric hindrance steaming plates
2 are connected on motor 3 by timing belt 4.Wherein, described many steric hindrance steaming plates are as shown in Figure 3,4.It includes electrode disk 5,
From electrode ear 7, and elastic parts；The elastic parts includes felt pad 8, installing plate 9, and elastic component 11.The electrode
As shown in Figure 5,6, it includes electrode clamping plate 27, pressure head 28, and the first cylinder 29 to locking device.Described locked from electrode fills
Put as shown in Figure 7,8, it is included from electrode tip holder 34, chuck 35, the second cylinder 36.
The mounting hole for being equipped with and installing each part that equipment is steamed in resistance is preset during implementation, on described erecting bed 1.Such as Fig. 3,4 institutes
Show, described electrode disk 5 preferentially employs the strong steel disk of high temperature resistant, electric conductivity to realize, electrode disk 5 is set to by the present invention
Circle, as shown in figs. 34, is provided with the mounting groove 101 coordinated one by one with evaporation boat 6 in electrode disk 5, the mounting groove 101
Quantity can be adjusted according to the quantity of evaporation boat 6.Multiple electrodes briquetting mounting hole 102, elastic component are also provided with electrode disk 5
Mounting hole 104 and reinforcement mounting hole 105.The installation groove for installing rotary electric pole bar 2 is additionally provided with the electrode disk 5
103, the slotted eye 106 for being used for installing fixing screws is provided with the bottom of the installation groove 103, the slotted eye 106 is used to install to rotation
The screw that rotatable electrode stem 2 is fixed, rotary electric pole bar 2 is then fixed by screws in installation groove 103.Described steaming
Hair boat 6 preferentially employs resistant to elevated temperatures tungsten boat, and the evaporation boat 6 is arranged in the mounting groove 101 of electrode disk 5, one end of evaporation boat 6
Be connected to by electrode briquetting 13 in electrode disk 5, itself and the other end is then matched by being connected to from electrode briquetting 12 with electrode disk 5
Close from electrode ear 7, electrode briquetting 13 is fixed by the screw being engaged with the electrode briquetting mounting hole 102 in electrode disk 5
In electrode disk 5, be fixed on from electrode briquetting 12 again by screw from electrode ear 7, be so easy to evaporation boat 6 installation or
Change.
Long-term its hardness that works at high temperature of the electrode disk 5 is easily reduced, after preventing that the hardness of electrode disk 5 from reducing
Whole resistance is set to steam the problem of platform is deformed, the present invention is provided with a plurality of reinforcement 10 in the bottom of electrode disk 5, the reinforcement 10
The screw being connected by the screw thread of reinforcement mounting hole 105 with electrode disk 5 is fixed in electrode disk 5.The reinforcement 10
Invention is preferentially set to six, and this six are linked together, and the quantity of reinforcement 10 can be adjusted as needed, the reinforcement
The center hole being used in combination with the mounting groove 103 of electrode disk 5 is provided with 10, and is additionally provided with and electrode on the reinforcement 10
The corresponding through hole of elastic component mounting hole 104 on disk 5.Outside electrode input lever is then pacified after the through hole on reinforcement 10
Outside electrode is inputted after the slotted eye 106 on mounting groove 103 on the mounting groove 103 of electrode disk 5, and by screw
Bar is fixed in mounting groove 103.
It is described to be electrically connected from electrode ear 7 with from electrode locking device, and clamped from electrode locking device from electrode ear 7
When the position from electrode ear 7 can be made to change, if can not be resetted in time from electrode ear 7 when being opened from electrode locking device,
Deforming or being broken just easily occur in the evaporation boat 6 being connected with from electrode ear 7.The present invention is in order to prevent evaporation boat 6 from deforming or breaking
Split, elastic parts is being provided between electrode ear 7 and electrode disk 5.The elastic parts can when being opened from electrode locking device,
Make quickly to reset from electrode ear 7, occur deforming or be broken so as to be effectively prevented evaporation boat 6.
As shown in Figure 3,4, it includes felt pad 8, installing plate 9, and elastic component 11 to the elastic parts.Wherein, it is described
Felt pad 8 preferentially employ the felt pad that ceramic material is made, the felt pad 8 is fixedly installed on from electrode ear 7 by screw
Bottom, installing plate 9 is then fixedly installed on felt pad 8 by screw.What installing plate 9 was made present invention employs metal material
Installing plate, the installing plate 9 is then used to install elastic component 11, and elastic component 11 is arranged on installing plate 9 by screw, and the elastic component
11 one end by screw be arranged on installing plate 9 on, and the other end by after the through hole in strengthening tendons 10 with electrode disk 5
The screw that elastic component mounting hole 104 is threadedly coupled is fixedly installed on reinforcement 10.The present invention of elastic component 11 is preferential to be used
There is stronger elastic spring steel plate to be made.The elastic component 11 can pass through elastic component when being opened from electrode locking device
11 elasticity having make the evaporation boat 6 being connected with from electrode ear 7 quickly reset, so as to prevent evaporation boat 6 heated
After deform, and effectively raise the service life of evaporation boat 6.
As shown in Fig. 2 the described present invention of rotary electric pole bar 2 preferentially employs hollow rotary electric pole bar 2, the rotation
Formula electrode stem 2 can improve the radiating effect of rotary electric pole bar 2 well, and the upper end of rotary electric pole bar 2 is provided with for pacifying
The silk hole 201 of dress and the resistance attachment screw of steaming plate 5, the rotary electric pole bar 2 is arranged in the installation groove 103 of resistance steaming plate 5 and led to
The screw matched with silk hole 201 is crossed to be fixed.Rotary electric pole bar 2 is cooled down automatically in order to realize, the present invention is in rotation
Water cooling tube 26 is provided with the hollow body of formula electrode stem 2, the water cooling tube 26 preferentially employs stainless steel tube, the water cooling tube 26 goes out
Water swivel is 1 ㎝ with the distance from top of rotary electric pole bar 2, enables the cooling water of the outflow of water cooling tube 26 sufficiently and rotary electrode
The top of bar 2 is in contact, so that the cooling effect of rotary electric pole bar 2 is more preferable.Described water cooling tube 26 goes out in the present invention
Water swivel can be adjusted as needed with the distance from top of rotary electric pole bar 2.And the cooling water flowed into rotary electric pole bar 2
Flowed out after the heat of rotary electric pole bar 2 is absorbed by being connected to the lower end Rotary Water joint 50 of rotary electric pole bar 2, the rotation
The mounting head 51 of rotatable water swivel 50 is then threadedly attached at the lower ending opening of rotary electric pole bar 2, and by being arranged on rotation
Transition seat 16 is fixed fastening screw nut 501 on rotatable electrode stem 2, and the fastening screw nut 501 then leads to rotary electric pole bar 2
Threaded connection is crossed, is also provided with what is overflowed for preventing water in the opening of rotary electric pole bar 2 and the contact surface of mounting head 51
Waterstop ring 502.
Logical heart via is provided with described mounting head 51, water cooling tube 26 is then connected to rotatably through the logical heart via
On water swivel 50, the Rotary Water joint 50 is preferentially employed and set on diplopore Rotary Water joint, and the Rotary Water joint 50
Water supply connector 52 and water out adapter 53 are equipped with, the Rotary Water joint 50 can be in mounting head 51 after being flexibly connected with mounting head 51
Carry out 360 ° of rotations.Its water cooling tube 26 is connected with the water supply connector 52 of Rotary Water joint 50, and the water hole of mounting head 51
It is movably connected on the water out adapter 53 of Rotary Water joint 50, is ensured that in rotary electric pole bar 2 by sealing ring
Cooling water can keep recurrent state, the temperature of rotary electric pole bar 2 at work is kept stable at 25 DEG C or so.
During implementation, the present invention is also provided with the rotating device being engaged with rotary electric pole bar 2, and the rotating device can make rotation
Rotatable electrode stem 2 is freely rotated.The rotating device is as shown in Fig. 2 it includes rotating vacuum seals overcoat 18, rotation interior axle
21, and synchronous pulley 22.One end of described rotating vacuum seals overcoat 18 is with supporting cylinder 15 to be connected, the other end and tension
Connecting seat 14 is connected, and the mounting hole of its upper and lower side, peace of the invention are provided through on the rotating vacuum seals overcoat 18
Dress hole is preferentially set to 4, and the rotating vacuum seals overcoat 18 is with tensing connecting seat 14 and supporting cylinder 15 to form one after being connected
Vacuum body, makes other parts in rotating vacuum seals overcoat 18 not damaged by high-temperature, in rotating vacuum seals overcoat 18
It is additionally provided with rotation interior axle 21.
One end of the rotation interior axle 21 is arranged in rotating vacuum seals overcoat 18 by upper bearing (metal) 19, and the other end then passes through
Lower bearing 20 be arranged on support cylinder 15 on, in order to ensure rotating vacuum seals overcoat 18 with rotation interior axle 21 sealing effectiveness,
Rotate the present invention between interior axle 21 and rotating vacuum seals overcoat 18 and be provided with rotating seal ring 301, the rotating seal ring 301 is adopted
It is made of the elastomeric material of bad high temperature.And rotate interior axle 21 for hollow shaft, rotary electric pole bar 2 then through rotation interior axle 21,
Rotary electric pole bar 2, which is located to be provided between one end in rotating vacuum seals overcoat 18 and rotation interior axle 21, prevents air from entering
Static seal 24 in rotating vacuum seals overcoat 18, the other end is then fixed spline 25 by interior axle and is connected with rotation interior axle 21,
The interior axle, which fixes spline 25, can make rotation interior axle 21 keep rotating together at the same speed with rotary electric pole bar 2.
Meanwhile, it is located in rotation interior axle 21 on one end below lower bearing 20 and is also provided with for the driving motor with outside
The synchronous pulley 22 being engaged, the synchronous pulley 22 is then fixed spline 23 by timing belt and is connected in rotation interior axle 21, and this is same
The fixed spline 23 of step band can make rotation interior axle 21 and synchronous pulley 22 keep synchronized same to rotate.To be rotated to synchronous pulley 22
Installation site in interior axle 21 is mutually limited, and synchronous belt washer 302 is provided between synchronous pulley 22 and lower bearing 20, and pass through
Synchronous pulley 22 is fixed the belt wheel locking nut 303 being threadedly coupled with rotary electric pole bar 2.And lower bearing 20 with it is upper
It is also provided between bearing 19 for spacing bushing 304, the bushing 304, which is located at, to be supported between cylinder 15 and rotation interior axle 21.This
The synchronous pulley 22 of invention is connected by same portion's band 4 with the rotating shaft of motor 3 when in use, passes through turning for motor 3
It is dynamic then rotary electric pole bar 2 can be driven to be rotated.
The electrode stem 2 of the present invention is connected on erecting bed 1 by tensing connecting seat 14, and described tension connecting seat 14 is preferential
Employ the circular hollow that stainless steel is made, the rotary electric pole bar 2 is through tensing connecting seat 14, the tension connecting seat
4 through holes corresponding with the mounting hole on rotating vacuum seals overcoat 18 are provided with 14, by screw from up to during installation
The lower connecting seat 14 that will be tensed after the through hole and the mounting hole of rotating vacuum seals overcoat 18 that tense connecting seat 14 is fixed on branch
Hold on cylinder 15.The present invention is provided with chamber body sealing ring 305 on connecting seat 14 is tensed, and the chamber body sealing ring 305 can connect tension
Joint chair 14 contacts closer with the upper installing hole of erecting bed 1, to prevent air enters resistance from steaming in the resistance steam room of equipment.Described is lower exhausted
Edge pad 48 is arranged on chamber body sealing ring 305, and the lower felt pad 48 is with being arranged on the phase of upper felt pad 49 tensed on connecting seat 14
It can effectively prevent that erecting bed 1 is powered after cooperation, ensure that the safety of operator well, lower felt pad 48 of the invention and upper
Felt pad 49 preferentially employs the felt pad that the good ceramics of insulation effect are made.
Described tension connecting seat 14 is then preferentially fixed on erecting bed 1 by locking nut 306, in order to ensure locking screw
Mother 306 will not damage felt pad 49 in locking, and the present invention is provided with backing plate between locking nut 306 and upper felt pad 49
307, in order to ensure tensing the sealing effectiveness of connecting seat 14 and the junction of rotating vacuum seals overcoat 18, tense connecting seat 14 with
It is also provided with tensing sealing ring 308 between the junction of rotating vacuum seals overcoat 18.
In order to prevent the power connection equipment of rotary electric pole bar 2 from being damaged in power-up by high current, the present invention as shown in Fig. 2
Annular electrode disk 16 is provided with rotary electric pole bar 2, the annular electrode disk 16 is connected to rotatably by electrode anchor ear 17
On electrode stem 2, annular electrode disk 16 can be firmly fixed in rotary electric pole bar 2 by the electrode anchor ear 17.Annular electrode disk
16 are fixed on electrode anchor ear 17 by welding or screw, and the annular electrode disk 16 is rotated without interface in rotary electric pole bar 2
When annular electrode disk 16 can be connected well with electrode locking device, current loss is effectively reduced, so as to save well
About electric power resource.
Meanwhile, described electrode locking device as shown in Figure 5,6, mainly by electrode clamping plate 27, pressure head 28, and first
Cylinder 29 is constituted, and is also provided with the installation base plate 31 that is used in combination with above-mentioned background, keeps seat 32, insulation board 33.Institute
The installation base plate 31 stated preferentially employs stainless steel plate to realize, the present invention is provided with for installing rotation on the installation base plate 31
Turn the installation through-hole of electrode stem 2, electric rotating pole bar 2 is fixed by screws on installation base plate 31 after running through installation base plate 31.Institute
The first cylinder 29 stated is fixedly mounted on installation base plate 31 by screw, and the first cylinder 29 of the present invention is preferentially employed
The cylinder of the straight reciprocating motion of DNC series, first cylinder 29 is connected with outside compressor by tracheae.Described guarantor
The present invention of seat 32 is held then to be fixedly installed on installation base plate 31 by screw, and holding seat 32 is located under the first cylinder 29
Side.First expansion link 30 of the first described cylinder 29 is connected on the first cylinder 29 after seat 32 is kept, first cylinder
29 the first expansion link 30 is connected on holding seat 32 by cylinder shaft rataining ring 309, the in the presence of outside compressor
First expansion link 30 of one cylinder 29 carries out straight reciprocating motion.Described pressure head 28 sets the first expansion link of the first cylinder 29
30 are located on the one end kept outside seat 32, and the pressure head 28 is fixed on the first expansion link 30 of the first cylinder 29 by locking nut
On, pressure head 28 can keep synchronized motion in the same direction with the first expansion link 30.
Wherein, the electrode holder electrically connected with the annular electrode disk 16 on electrode stem 2 is provided with described holding seat 32
Tight plate 27, the electrode clamping plate 27 is fixed by screws on holding seat 32, is provided with outer for connecting on electrode clamping plate 27
The connecting hole of portion's electrode, outer electrode is fixed by screws on the connecting hole of electrode clamping plate 27.Electrode clamping plate 27 and pressure
First 28 be engaged after formed a fixture, pressure head 28 is under the drive of the first expansion link 30 of the first cylinder 29 by annular electrode disk
16 are firmly pressed on electrode clamping plate 27, effectively ensure that electrode clamping plate 27 and the electrode transmission of annular electrode disk 16
Stability.Keep seat 32 powered during in order to prevent that electrode clamping plate 27 is connected with outer electrode, the present invention is in electrode clamping plate 27
With keeping being also provided with insulation board 33 between seat 32.The insulation board 33 preferentially employs Ceramic insulator to realize.
The motor 3 of the present invention is fixed on installation base plate 31 when installing as shown in Figure 5,6 using screw, and the driving
Motor 3 is connected by timing belt 4 with rotary electric pole bar 2.The electrode input of motor 3 is with outside control when using
System is connected.In order to be able to which the rotating speed to motor 3 is adjusted, speed changer 43 is provided with the rotating shaft of motor 3, should
Speed changer 43 is fixedly mounted on installation base plate 31 by screw.Encoder 46 is provided with the power transmission shaft 44 of the speed changer 43,
The encoder 46 is then connected on the power transmission shaft 44 of speed changer 43 by angle measurement axle by rotating shaft connector 47, the survey of encoder 6
Angle axle just can keep synchronized in the same direction with the power transmission shaft 44 of speed changer 43 and rotate.Encoder is additionally provided with described installation base plate 31
Installing plate 54, the encoder 46 by screw be arranged on encoder installing plate 54 on, the signal output part of its encoder 46 with
External control system is connected.Encoder 46 is acquired by angle measurement axle to the rotational angle of motor 3, and encoder 46 is simultaneously
The rotation information of the motor 3 of collection is converted into control system of the electric signal transmission to external connection, external control system
Then according to the information of reception come the rotation and stopping of controlled motor.The external control system of the present invention is respectively to the He of motor 3
The working condition for the outside condenser that first cylinder 29 is connected is controlled.
Further, transmission drive pulley 45, the drive pulley are additionally provided with the power transmission shaft 44 of described speed changer 43
45 are located between rotating shaft connector 47 and installation base plate 31, and the power transmission shaft 44 of the synchronous pulley 45 and speed changer 43 keeps same phase
It is synchronized to rotate.Drive pulley 45 is connected by timing belt 4 with the synchronous pulley 22 in rotary electric pole bar 2 when in use, with
Realize the purpose that motor 3 drives rotary electric pole bar 2 to be rotated.In order that connection drive pulley 45 and rotary electrode
The timing belt 4 of bar 2 contacts closer with drive pulley 45 and synchronous pulley 22, and the present invention is positioned at drive pulley 45 and rotatably
Tensioning wheel 55 is provided with installation base plate 31 between electrode stem 2, the tensioning wheel 55 makes timing belt 4 after being engaged with timing belt 4
Contact closer with synchronous pulley 8 and synchronous pulley 22, so that the rotating speed of the rotating speed of rotary electric pole bar 2 and drive pulley 45
It is consistent, effectively raises the accuracy that the present invention works.
As shown in Figure 7,8, it is described to include from electrode locking device from electrode tip holder 34, chuck 35, the second cylinder 36；And from
Electrode locking device is also provided with the conductive seat 38 being engaged with above-mentioned part, lower collets 39, upper collets 40, mounting cylinder
41, Telescopic rod fixing seat 42.
Further, described conductive seat 38 is connected on erecting bed 1 by lower collets 39, and on erecting bed 1
The upper collets 40 matched with lower collets 39 are provided with, upper collets 40 are also connected with conductive seat 38, on conductive seat 38
It is provided with for conductive seat 38 to be fixed on into the top nut of erecting bed 1, tighten nut just can be fixed on erecting bed 1 by conductive seat 38
On.Meanwhile, conductive seat 38 is electrically connected by screw with outside from electrode.Mounting cylinder 41 is provided with described conductive seat 38,
One end of the mounting cylinder 41 is then provided with the second cylinder 36 by the lower section in conductive seat 38 of screw on the other end.It is described
The second expansion link 37 of the second cylinder 36 sequentially pass through mounting cylinder 41 and conductive seat 38, and second expansion link 37 pass through it is flexible
Bar fixed seat 42 is connected on conductive seat 38.Described is then arranged on conductive seat 38 from electrode tip holder 34, and the present invention is preferential to be used
The mode that screw is fixed will be fixed on conductive seat 38 from electrode tip holder 34, should be electrically connected from electrode tip holder 34 with from electrode ear 7.
Closer from the contact with from electrode ear 7 of electrode tip holder 34 in order to can ensure that, the present invention is the second of the second cylinder 36
Chuck 35 is provided with expansion link 37, the chuck 35 is fixed by screws on the second expansion link 37 of the second cylinder 36, chuck
35 can keep synchronous motion in the same direction with the second expansion link 37 of the second cylinder 36, and described chuck 35 is engaged with from electrode tip holder 34
A fixture is formed afterwards, and energy will be from the presence of the second cylinder 36 for chuck 35 from electrode tip holder 34 and after being electrically connected from electrode ear 7
Firmly fixation is pressed in from electrode tip holder 34 electrode ear 7, and effectively ensure that from electrode ear 7 can provide one surely for evaporation boat 6
It is fixed from electrode, be to make the heating of evaporation boat 6 more stable.
Evaporation boat 6 is all numbered in many steric hindrance steaming plates of the present invention, each evaporation boat more than 6 has corresponding volume
Number, external control system is simultaneously locked to the position of the evaporation boat 6 accordingly numbered in many steric hindrance steaming plates, outside control system
The evaporation boat 6 of each numbering of system memory storage has a fixed angle of rotation angle value, in order to which we with the present invention by being connected
External control system accurately selection needed for heating evaporation boat 6.External control system of the present invention is existing control
Therefore system processed, the present invention it is not described in detail.
The first cylinder 29 and the second cylinder 36 of the present invention is connected on same outside condenser.During operation, outside pressure
Contracting machine carries out air-breathing workmanship to the first cylinder 29 and the second cylinder 36 simultaneously, receives the first expansion link 30 and the second expansion link 37
Contracting.Now, the annular electrode disk 16 on electrode stem 2 is firmly pressed in electrode clamping plate 27 by the pressure head 28 on the first expansion link 30
On, rotary electric pole bar 2 it is electric after electrode is transferred to electrode disk 5；Meanwhile, the chuck 35 on the second expansion link 37 will be from electrode
Ear 7 is firmly pressed in from electrode tip holder 34, obtains electric from electrode ear 7, evaporation boat 6 starts to heat target.Meanwhile, rotatably
Water cooling tube 26 in electrode stem 2 starts to cool down rotary electric pole bar 2.
When we need to heat the target in other evaporation boat 6 in many steric hindrance steaming plates, we only need to be in this hair
The digit of corresponding evaporation boat 6 is inputted on bright connected external control system, external control system will control external compression
Machine carries out deflation workmanship to the first cylinder 29 and the second cylinder 36, and pressure head 28 unclamps annular electrode disk 16, rotary electric pole bar 2
Can be freely automatic；Chuck 35 will unclamp from electrode ear 7, from electrode ear 7 rotary electric pole bar 2 can be followed to carry out turn synchronized in the same direction
It is dynamic.Meanwhile, external control system control motor 3 is rotated, and motor 3 drives rotary electric pole bar 2 to rotate, and encodes
Device 46 then detects that the information detected is simultaneously converted to electric signal by encoder 46 to the rotational angle of the rotating shaft of motor 3
After be transferred to external control system, external control system obtains motor 3 after being analyzed and processed to the electric signal of reception
Rotational angle, external control system is by corresponding to the digit of the rotational angle of obtained motor 3 and the evaporation boat 6 of setting
The rotational angle of the rotating shaft of motor 3 is compared, and external control system is by the rotational angle of obtained motor 3 and setting
Evaporation boat 6 digit corresponding to the rotating shaft of motor 3 rotational angle it is consistent when, external control system control motor
3 stop operating 3, and rotary electric pole bar 2 also stops operating；External control system controls outside condenser to the first cylinder 29 and the
Two cylinders 36 carry out air-breathing workmanship, and annular electrode disk 16 is firmly pressed on electrode clamping plate 27 by pressure head 28, rotary electrode
Bar 2 obtains electrode；Chuck 35 will be firmly pressed in from electrode tip holder 34 from electrode ear 7, be obtained from electrode ear 7 from electrode, now
Evaporation boat 6 starts to heat target.
When we need more to need when changing evaporation boat 6 of heating again, working procedure recited above only need to be repeated, just can be real
Now the evaporation boat 6 of required digit is heated.Therefore, many steric hindrance steaming plates set by the present invention can place multiple targets simultaneously
Material, and the rotary electric pole bar 2 that the present invention is arranged in many steric hindrance steaming plates can carry out 360 ° under the drive of motor 3
Rotation, makes many steric hindrance steaming plates also to carry out 360 ° of rotation, the conversion to the evaporation boat 6 of heating is realized well.Meanwhile, this
Invention also by from electrode locking device and electrode locking device realize in many steric hindrance steaming plates from electrode and electrode from
Dynamic conducting ensures that the present invention can be while place multiple targets, and can carry out continuous plated film to target and want with closing
Ask, effectively shorten the plated film time of substrate, preferably improve very much the plating membrane efficiency of resistance evaporation film device.
As described above, the present invention just can be realized well.
Claims (10)
1. equipment is steamed in a kind of rotary multi-level resistance, it is characterised in that：Mainly by erecting bed (1), it is separately positioned on erecting bed (1)
From electrode locking device and rotary electric pole bar (2), the electrode locking device electrically connected with rotary electric pole bar (2), with rotation
The motor (3) that rotatable electrode stem (2) is connected, and be arranged in rotary electric pole bar (2) and filled with being locked from electrode
Put many steric hindrance steaming plates composition of electrical connection；Multiple evaporation boats (6), the rotary electric pole bar are provided with many steric hindrance steaming plates
(2) it is connected to by timing belt (4) on motor (3).
2. equipment is steamed in a kind of rotary multi-level resistance according to claim 1, it is characterised in that：Many steric hindrance steaming plates include
Electrode disk (5), corresponded with evaporation boat (6) set and electrically connect with evaporation boat (6) from electrode ear (7), be arranged on from electricity
The elastic parts being connected on lug (3) and with electrode disk (5)；It is described to be electrically connected from electrode ear (7) with from electrode locking device.
3. equipment is steamed in a kind of rotary multi-level resistance according to claim 2, it is characterised in that：The elastic parts include with
The felt pad (8) being connected from electrode ear (7), is arranged on the installing plate (9) on felt pad (8), and one end and installing plate (9)
It is connected, the other end is connected to elastic component (11) in electrode disk (5) by reinforcement (10).
4. equipment is steamed in a kind of rotary multi-level resistance according to claim 3, it is characterised in that：The rotary electric pole bar
(2) it is connected to by tensing connecting seat (14) on erecting bed (1), support cylinder is respectively arranged with the rotary electric pole bar (2)
(15) and water cooling tube (26) and rotating device, the rotating device is also respectively with supporting cylinder (15) and tension connecting seat (14) phase
The annular electrode disk (16) being additionally provided with connection, the rotary electric pole bar (2), the annular electrode disk (16) passes through electrode
Anchor ear (17) be connected in rotary electric pole bar (2) and with electrode locking device.
5. equipment is steamed in a kind of rotary multi-level resistance according to claim 4, it is characterised in that：The rotating device includes one
End is with supporting cylinder (15) to be connected, the other end is with tensing the rotating vacuum seals overcoat (18) that connecting seat (14) is connected, one end
It is arranged on by upper bearing (metal) (19) on rotating vacuum seals overcoat (18), the other end is arranged on by lower bearing (20) and supports cylinder
(15) the rotation interior axle (21) on, and be connected to by timing belt fixation spline (23) in rotation interior axle (21) and positioned at lower axle
Hold the synchronous pulley (22) below (20)：The rotary electric pole bar (2) runs through rotation interior axle (21), and the rotary electric pole bar
(2) one end is connected by static seal (24) with rotation interior axle (21), the other end is fixed in spline (25) and rotation by interior axle
Axle (21) is connected, and the synchronous pulley (22) is connected by timing belt (4) with motor (3).
6. equipment is steamed in a kind of rotary multi-level resistance stated according to claim 5, it is characterised in that：The electrode locking device includes
The electrode clamping plate (27) electrically connected with annular electrode disk (16), is arranged on below electrode clamping plate (27) and for clamping annular
The pressure head (28) of electrode disk (16), and the first cylinder (29) being arranged on pressure head (28)；The pressure head (28) is connected to
On the first expansion link (30) of one cylinder (29)；The electrode clamping plate (27) is provided with installation base plate (31), first gas
Cylinder (29) is arranged on installation base plate (31)；The installation base plate (31) is provided with holding seat (32), the electrode clamping plate
(27) it is connected to and is kept on seat (32) and positioned at the lower section for keeping seat (32), first expansion link (30) by insulation board (33)
Through installation base plate (31) with keeping seat (32)；The rotary electric pole bar (2) is through installation base plate (31) and by supporting cylinder
(15) it is connected on installation base plate (31).
7. equipment is steamed in a kind of rotary multi-level resistance according to claim 6, it is characterised in that：It is described from electrode locking device
Including with from electrode ear (7) electrically connect from electrode tip holder (34), be arranged on above the electrode tip holder (34) and for clamping from electrode
The chuck (35) of ear (7), and the second cylinder (36) being arranged on chuck (35)；The chuck (35) is connected to the second cylinder
(36) described that conductive seat (38) is provided with from electrode tip holder (34) on the second expansion link (37), the conductive seat (38) passes through
Lower collets (39) are connected on erecting bed (1) and are provided with the lower section of erecting bed (1), the erecting bed (1) with
Mounting cylinder (41) is additionally provided with the upper collets (40) that collets (39) match, the conductive seat (38), described second stretches
Contracting bar (37) is connected through mounting cylinder (41) and conductive seat (38), second expansion link (37) by Telescopic rod fixing seat (42)
On conductive seat (38).
8. equipment is steamed in a kind of rotary multi-level resistance according to claim 7, it is characterised in that：The one of the evaporation boat (6)
End is connected in electrode disk (5) by electrode briquetting (13), its other end from electrode briquetting (12) by being connected to from electrode ear
(7) on.
9. equipment is steamed in a kind of rotary multi-level resistance according to any one of claim 1~8, it is characterised in that：The driving
Motor (3) is arranged on installation base plate (31), is provided with the rotating shaft of described motor (3) for adjusting motor
(3) it is provided with timing belt (4) on the speed changer (43) of rotating speed, the power transmission shaft (44) of the speed changer (43) and is connected to synchronization
Encoder (46) is provided with below drive coordination belt wheel (45) on belt wheel (22), the drive coordination belt wheel (45), it is described
Encoder (46) is connected on the power transmission shaft of speed changer (43) (44) by rotating shaft adapter sleeve (47).
10. equipment is steamed in a kind of rotary multi-level resistance according to claim 9, it is characterised in that：The rotary electric pole bar
(2) lower end is provided with Rotary Water joint (50), and the water cooling tube (26) runs through the mounting head of Rotary Water joint (50)
(51) it is connected to after in the water supply connector (52) of Rotary Water joint (50).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710331221.0A CN106995915A (en) | 2017-05-11 | 2017-05-11 | Equipment is steamed in a kind of rotary multi-level resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710331221.0A CN106995915A (en) | 2017-05-11 | 2017-05-11 | Equipment is steamed in a kind of rotary multi-level resistance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106995915A true CN106995915A (en) | 2017-08-01 |
Family
ID=59435793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710331221.0A Pending CN106995915A (en) | 2017-05-11 | 2017-05-11 | Equipment is steamed in a kind of rotary multi-level resistance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106995915A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108359937A (en) * | 2018-02-27 | 2018-08-03 | 温州驰诚真空机械有限公司 | Change type physical vapour deposition (PVD) particle source |
| CN110453182A (en) * | 2019-08-22 | 2019-11-15 | 南阳光驰科技有限公司 | A kind of rotary multi-level resistance steaming boat |
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