CN106978631A - A kind of solar cell diffusion Sheng source device - Google Patents
A kind of solar cell diffusion Sheng source device Download PDFInfo
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- CN106978631A CN106978631A CN201610027719.3A CN201610027719A CN106978631A CN 106978631 A CN106978631 A CN 106978631A CN 201610027719 A CN201610027719 A CN 201610027719A CN 106978631 A CN106978631 A CN 106978631A
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- Prior art keywords
- diffusion
- source
- pipe
- snorkel
- solar cell
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C30B31/165—Diffusion sources
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Aeration Devices For Treatment Of Activated Polluted Sludge (AREA)
Abstract
The present invention relates to a kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle and the snorkel and escape pipe for being arranged at source bottle upper end, the source bottom of bottle portion is provided with the accommodating cavity of a back taper, the center and its lower end that the snorkel is located at source bottle upper end are stretched into the accommodating cavity, the snorkel bottom is connected with the diffusion hole that the diffusion tip and the diffusion tip of a spherical structure are passed through provided with some permission air-flows, and the snorkel is obliquely provided with diffusion looped pipeline close to one end of diffusion tip.The present invention can either absorb the source put together from high to lower so as to reduce the waste in source, it can avoid again because liquid level deficiency causes the unstable risk of square resistance performance, more importantly, the Sheng source device ensure that in whole diffusion processes, air-flow can produce stable diffusion effect with stable speed, ensure the stabilization of square resistance actual size, and then ensure the conversion efficiency of finished product.
Description
Technical field
The invention belongs to solar cell module production and research and development technology field, more particularly to a kind of solar cell diffusion
With Sheng source device.
Background technology
Process has making herbs into wool, diffusion, etching, PECVD, silk-screen in manufacture of solar cells, main wherein in diffusing procedure
Gas is POCl3, abbreviation source, diffusion heat treatments it is planned be passed through P sources after complete, the purity in source,
Flow can all directly influence the technological parameter square resistance of diffusion, due to the continuous consumption in source in production process, usually because
Cause the uneven and bigger than normal phenomenon of sheet resistance after diffusion for liquid level deficiency, square resistance is too big or too small directly influences into
Conversion efficiency after product, on the other hand, because liquid level is too low, the source liquid of bottom, which cancels, to be given up, and has both wasted that there is also safety
Hidden danger.In order to solve the above technical problems, patent ZL201220425747.8 discloses a kind of solar cell diffusion Sheng source
Device, it includes cylindrical source bottle and is arranged at snorkel and escape pipe of source bottle upper end, the inner bottom part of source bottle from bottle wall to
Interior thickness is gradually thinning, source bottle inner bottom part be stairstepping circular ring structure, stairstepping circular ring structure from source bottle bottle wall to
Centre is gradually tapered up, and the upper end of snorkel is located at the middle part of source bottle upper surface, and lower end is located adjacent to bottom circular ring structure
At bottom surface.
Although above-mentioned technical proposal extends to bottle by the stepped loop configuration that sets diameter to be gradually reduced, aspirating pipeline
Bottom can preferably absorb the source put together from high to lower, to a certain extent reduce source waste and avoid
Because liquid level is not enough and caused by the unstable risk of square resistance performance, still, in actual use, above-mentioned technology
Air inlet pipe in scheme is directly entered the bottom in source, when the initial level in source is higher, and the air-flow in air inlet pipe needs to break through
The resistance that pressure is produced to air-flow between the highest liquid level and minimum level in source, can spread out source, so expanding
Scattered starting stage, the efficiency of diffusion is not high, so that unsure state, meeting occurs in the overall process of diffusion
The actual effect of source diffusion is had influence on, so as to have influence on the actual size of square resistance, and then is directly influenced after finished product
Conversion efficiency.
The content of the invention
The present invention provides one kind compared to existing technologies to solve technical problem present in known technology, can
The source put together from high to lower is enough absorbed so as to reduce the waste in source, can be avoided the occurrence of again because liquid level deficiency is made
Into the unstable solar cell diffusion Sheng source device of square resistance performance.
The present invention is adopted the technical scheme that to solve technical problem present in known technology：
A kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle and be arranged at source bottle upper end snorkel and
Escape pipe, the source bottom of bottle portion be provided with a back taper accommodating cavity, the snorkel be located at the source bottle upper end center and
Its lower end is stretched into the accommodating cavity, and the snorkel bottom is connected with the diffusion tip of a spherical structure and the diffusion tip
The diffusion hole passed through provided with some permission air-flows, the snorkel is obliquely provided with diffusion looped pipeline close to one end of diffusion tip.
To solve the problems of the prior art, the present invention is provided with above-mentioned technical proposal.
Compared with prior art, improvements of the invention are as follows：
One is：The structure of snorkel bottom is improved, i.e.,：The snorkel bottom is connected with the diffusion of a spherical structure
Why the diffusion hole that head and the diffusion tip are passed through provided with some permission air-flows, design diffusion tip and allow in order to right
The air-flow for entering source bottle from snorkel bottom enters after row constraint to be disperseed again, in order to ensure the uniform of Diffusion of gas stream, this
The invention design diffusion tip is spherical, and its side wall is provided with the diffusion hole for allowing air-flow to pass through.Air-flow is through diffusion hole
When can be constrained by diffusion hole, along diffusion hole design attitude spread, actual use in, operator can be according to outlet
The position of pipe sets the tightness degree of diffusion hole exact arrangement.
The second is：The structure of snorkel side wall is improved, i.e.,：The snorkel is obliquely set close to one end of diffusion tip
There is diffusion looped pipeline, it is the place in order to ensure when bottle endogenous liquid level in source is in higher position why to design diffusion looped pipeline
Spread out under the drive for the air-flow that the source of higher position can gush out in diffusion looped pipeline from escape pipe, this design can
To ensure the starting stage in diffusion, the efficiency of diffusion is still higher so that diffusion overall process in remain compared with
For stable state.Why design diffusion looped pipeline is obliquely installed, and is to strengthen the speed of Diffusion of gas stream.
In technical scheme, on the one hand, enter row constraint to the air-flow entered from snorkel bottom in the bottle of source, with
The actual effect of enhanced dispersion；On the other hand, diffusion looped pipeline is set to ensure at the efficiency of the starting stage diffusion of diffusion
In stable state, by above-mentioned improvement, technical problem of the prior art is efficiently solved, the present invention ensure that
In whole diffusion processes, air-flow can produce stable diffusion effect with stable speed, it is ensured that square resistance is actual
The stabilization of size, and then ensure the conversion efficiency of finished product.
In order to effectively be constrained the air-flow for entering source bottle in self-diffusion looped pipeline, the present invention can also use following technology
Measure：The secondary head of diffusion of the end provided with spherical structure and the secondary rostral wall of the diffusion of the diffusion looped pipeline are provided with some diffusions
Hole.Design herein in, air-flow can be constrained when through diffusion hole by diffusion hole, be expanded along the design attitude of diffusion hole
Dissipate, in actual use, operator can set the tightness degree of diffusion hole exact arrangement according to the position of escape pipe.
In order to further ensure the actual efficiency and stability of diffusion, the present invention can also use following technical measures：
Obliquely pipe is helped in the middle part of the snorkel provided with diffusion and the diffusion helps diffusion of the end provided with spherical structure of pipe to help head,
The diffusion helps rostral wall to help hole provided with some diffusions.Design herein in, air-flow is helping Kong Shihui to be spread through diffusion
Help the constraint in hole, help the design attitude in hole spread along diffusion, it is actual use in, operator can be according to the position of escape pipe
To set the tightness degree that diffusion helps hole exact arrangement.
During actual use, in order to effectively match the practical effect that diffusion helps pipe and diffusion looped pipeline, this hair
It is bright to use following technical measures：The diffusion looped pipeline and the diffusion help the incline direction of pipe in the same direction or reverse.I.e.
Include following three kinds of situations：Diffusion looped pipeline and diffusion help pipe in the same direction and upward；Diffusion looped pipeline helps pipe reverse with diffusion；Diffusion
Looped pipeline and diffusion help pipe in the same direction and down.
Diffusion looped pipeline and diffusion why can be designed and help pipe in the same direction and upward, diffusion looped pipeline is allowed for and diffusion helps pipe can be with
Diffusion rate of the common enhancing source in the bottle of source.
Diffusion looped pipeline why can be designed is helped pipe reversely with diffusion, two kinds of situations is contained again, i.e.,：One is：Diffusion is secondary
Pipe is upward and diffusion helps pipe down, and diffusion looped pipeline upward can strengthen diffusion rate of the source in the bottle of source, diffusion directed downwardly
Help pipe directly air-flow can be contacted with each other with source when the liquid level in source helps the outlet of pipe close to diffusion, strengthen the expansion in source
Dissipate efficiency；The second is：Diffusion looped pipeline is down and diffusion helps pipe upward, and diffusion upward helps pipe to strengthen source in the bottle of source
Diffusion rate, diffusion looped pipeline directed downwardly can source liquid level close to diffusion looped pipeline outlet when, directly cause air-flow and
Source contacts with each other, and strengthens the diffuser efficiency in source.
Diffusion looped pipeline and diffusion why can be designed and help pipe in the same direction and down, diffusion looped pipeline is allowed for and diffusion helps pipe can be with
Respectively source liquid level close to during the two outlet, directly air-flow is contacted with each other with source, the diffuser efficiency in enhancing source.
The present invention can also use following technical measures：Obliquely pipe and the diffusion are helped in the middle part of the snorkel provided with diffusion
Diffusion of the end provided with spherical structure of pipe is helped to help head, the diffusion helps rostral wall to help hole provided with some diffusions.
In order to constrain and design the position that looped pipeline is spread in accommodating cavity, the present invention can also use following technical measures：
The accommodating cavity wall is from top to bottom provided with some grades of ring-shaped steps.In actual use, operator completely can be according to platform
Position and the quantity of looped pipeline are spread to design in the position of rank.
In order to prevent the bending place of step from can be impacted to the diffusion in source, the present invention can also use following technical measures：
Step bending place arc transition.
The present invention has the advantages and positive effects of：
Improvement based on above-mentioned technical proposal, one aspect of the present invention is carried out to the air-flow entered from snorkel bottom in the bottle of source
Constraint, with the actual effect of enhanced dispersion；On the other hand, diffusion looped pipeline is set to ensure the starting stage diffusion in diffusion
Efficiency be in stable state, by above-mentioned improvement, efficiently solve technical problem of the prior art, the present invention
It ensure that in whole diffusion processes, air-flow can produce stable diffusion effect with stable speed, it is ensured that square
The stabilization of resistance actual size, and then ensure the conversion efficiency of finished product.Based on the improvement of above-mentioned optimal technical scheme, this hair
Bright technical scheme is able to further perfect, more efficiently solves above-mentioned technical problem.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention (diffusion looped pipeline and diffusion help pipe in the same direction and upward)；
Fig. 2 is the structural representation (being provided with step in accommodating cavity, diffusion looped pipeline and diffusion help pipe in the same direction and upward) of the present invention；
Fig. 3 is the structural representation (step being provided with accommodating cavity, diffusion looped pipeline is upward and diffusion helps pipe down) of the present invention；
Fig. 4 is the structural representation (step being provided with accommodating cavity, diffusion looped pipeline is down and diffusion helps pipe upward) of the present invention；
Fig. 5 is the structural representation (being provided with step in accommodating cavity, diffusion looped pipeline and diffusion help pipe in the same direction and down) of the present invention.
In figure：1st, source bottle；2nd, snorkel；3rd, escape pipe；4th, accommodating cavity；5th, diffusion tip；6th, diffusion hole；7、
Spread looped pipeline；8th, secondary head is spread；9th, diffusion helps pipe；10th, diffusion helps head；11st, diffusion helps hole；12nd, step.
Embodiment
The embodiment to the present invention is described further below in conjunction with the accompanying drawings.Herein it should be noted that for this
The explanation of a little embodiments is used to help understand the present invention, but does not constitute limitation of the invention.In addition, being retouched below
Just can mutual group as long as the technical characteristic being related in each the of the invention embodiment stated does not constitute conflict each other
Close.
Embodiment one：
Referring to Fig. 1, a kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle 1 and the source that is arranged at bottle 1
The snorkel 2 and escape pipe 3 of upper end, 1 bottom of source bottle are provided with the accommodating cavity 4 of a back taper, the snorkel 2
Stretched into the center and its lower end of the source 1 upper end of bottle in the accommodating cavity 4, the bottom of snorkel 2 is connected with a ball
The diffusion hole 6 that the diffusion tip 5 and the diffusion tip 5 of shape structure are passed through provided with some permission air-flows, the snorkel 2
Diffusion looped pipeline 7 is obliquely provided with close to one end of diffusion tip 5.
In the present embodiment, the inwall of accommodating cavity 4 is from top to bottom provided with some grades of ring-shaped steps 12.
In the present embodiment, the bending place arc transition of step 12.
Embodiment two：
Referring to Fig. 1, a kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle 1 and the source that is arranged at bottle 1
The snorkel 2 and escape pipe 3 of upper end, 1 bottom of source bottle are provided with the accommodating cavity 4 of a back taper, the snorkel 2
Stretched into the center and its lower end of the source 1 upper end of bottle in the accommodating cavity 4, the bottom of snorkel 2 is connected with a ball
The diffusion hole 6 that the diffusion tip 5 and the diffusion tip 5 of shape structure are passed through provided with some permission air-flows, the snorkel 2
Diffusion looped pipeline 7 is obliquely provided with close to one end of diffusion tip 5, the end of the diffusion looped pipeline 7 is provided with the expansion of spherical structure
Dissipate pair first 8 and the secondary first 8 side wall of the diffusion is provided with some diffusion holes 6.
In the present embodiment, the inwall of accommodating cavity 4 is from top to bottom provided with some grades of ring-shaped steps 12.
In the present embodiment, the bending place arc transition of step 12.
Embodiment three：
Referring to Fig. 1, a kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle 1 and the source that is arranged at bottle 1
The snorkel 2 and escape pipe 3 of upper end, 1 bottom of source bottle are provided with the accommodating cavity 4 of a back taper, the snorkel 2
Stretched into the center and its lower end of the source 1 upper end of bottle in the accommodating cavity 4, the bottom of snorkel 2 is connected with a ball
The diffusion hole 6 that the diffusion tip 5 and the diffusion tip 5 of shape structure are passed through provided with some permission air-flows, the snorkel 2
Diffusion looped pipeline 7 is obliquely provided with close to one end of diffusion tip 5, the end of the diffusion looped pipeline 7 is provided with the expansion of spherical structure
Dissipate pair first 8 and the secondary first 8 side wall of the diffusion is provided with some diffusion holes 6, the middle part of snorkel 2 is obliquely helped provided with diffusion
The diffusion that pipe 9 and the diffusion help the end of pipe 9 to be provided with spherical structure helps first 10, if the diffusion helps first 10 side wall to be provided with
Dry diffusion helps hole 11.
In the present embodiment, referring to Fig. 2, the diffusion looped pipeline 7 and described spread help the incline direction of pipe 9 in the same direction and upward.
In the present embodiment, referring to Fig. 3, the diffusion looped pipeline 7 and described spread help the incline direction of pipe 9 reverse, diffusion
Looped pipeline is upward and diffusion helps pipe down.
In the present embodiment, referring to Fig. 4, the diffusion looped pipeline 7 and described spread help the incline direction of pipe 9 reverse, diffusion
Looped pipeline is down and diffusion helps pipe upward.
In the present embodiment, referring to Fig. 5, the diffusion looped pipeline 7 and described spread help the incline direction of pipe 9 in the same direction and down.
In the present embodiment, the inwall of accommodating cavity 4 is from top to bottom provided with some grades of ring-shaped steps 12.
In the present embodiment, the bending place arc transition of step 12.
Example IV：
A kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle 1 is supplied gas with 1 upper end of the source that is arranged at bottle
Pipe 2 and escape pipe 3,1 bottom of source bottle are provided with the accommodating cavity 4 of a back taper, and the snorkel 2 is located at source bottle
The center of 1 upper end and its lower end is stretched into the accommodating cavity 4, the bottom of snorkel 2 is connected with the diffusion of a spherical structure
First 5 and the diffusion tip 5 provided with some diffusion holes 6 for passing through of permission air-flows, the snorkel 2 is close to diffusion tip 5
One end be obliquely provided with diffusion looped pipeline 7, the middle part of the snorkel 2 obliquely helps pipe 9 provided with diffusion and described spread is helped
Diffusion of the end of pipe 9 provided with spherical structure helps first 10, and the diffusion helps first 10 side wall to help hole 11 provided with some diffusions.
In the present embodiment, the inwall of accommodating cavity 4 is from top to bottom provided with some grades of ring-shaped steps 12.
In the present embodiment, the bending place arc transition of step 12.
It these are only the preferred embodiment of the present invention, it is noted that for those skilled in the art,
Without departing from the technical principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (7)
1. a kind of solar cell diffusion Sheng source device, including：Cylindrical source bottle (1) and it is arranged on source bottle (1)
The snorkel (2) and escape pipe (3) at end, it is characterised in that：Described source bottle (1) bottom is accommodating provided with a back taper
Chamber (4), the snorkel (2) is located at the center of source bottle (1) upper end and the accommodating cavity (4) is stretched into its lower end
Interior, snorkel (2) bottom is connected with the diffusion tip (5) and the diffusion tip (5) of a spherical structure if being provided with
The dry diffusion hole (6) for allowing air-flow to pass through, the snorkel (2) is obliquely provided with close to one end of diffusion tip (5)
Spread looped pipeline (7).
2. a kind of solar cell diffusion Sheng source device according to claim 1, it is characterised in that：The diffusion
The end of looped pipeline (7) is provided with the secondary head (8) of diffusion of spherical structure and secondary head (8) side wall of the diffusion is provided with some diffusions
Hole (6).
3. a kind of solar cell diffusion Sheng source device according to claim 2, it is characterised in that：It is described to supply gas
Obliquely pipe (9) is helped in the middle part of pipe (2) provided with diffusion and described spread helps diffusion of the end of pipe (9) provided with spherical structure
Head (10) is helped, the diffusion helps head (10) side wall to help hole (11) provided with some diffusions.
4. a kind of solar cell diffusion Sheng source device according to claim 3, it is characterised in that：The diffusion
Looped pipeline (7) and described spread help the incline direction of pipe (9) in the same direction or reverse.
5. a kind of solar cell diffusion Sheng source device according to claim 1, it is characterised in that：It is described to supply gas
Obliquely pipe (9) is helped in the middle part of pipe (2) provided with diffusion and described spread helps diffusion of the end of pipe (9) provided with spherical structure
Head (10) is helped, the diffusion helps head (10) side wall to help hole (11) provided with some diffusions.
6. a kind of solar cell diffusion according to any one of claim 1 to 5 is existed with source device, its feature is contained
In：Accommodating cavity (4) inwall is from top to bottom provided with some grades of ring-shaped steps (12).
7. a kind of solar cell diffusion Sheng source device according to claim 6, it is characterised in that：The step
(12) bending place arc transition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610027719.3A CN106978631A (en) | 2016-01-15 | 2016-01-15 | A kind of solar cell diffusion Sheng source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610027719.3A CN106978631A (en) | 2016-01-15 | 2016-01-15 | A kind of solar cell diffusion Sheng source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106978631A true CN106978631A (en) | 2017-07-25 |
Family
ID=59341161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610027719.3A Pending CN106978631A (en) | 2016-01-15 | 2016-01-15 | A kind of solar cell diffusion Sheng source device |
Country Status (1)
| Country | Link |
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| CN (1) | CN106978631A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108092216A (en) * | 2018-01-11 | 2018-05-29 | 重庆市东泰电器实业有限公司 | A kind of cable branch babinet and cable branch box |
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| CN202626353U (en) * | 2012-04-06 | 2012-12-26 | 南京远景新能源有限公司 | Source bottle for diffusion of solar cell |
| CN202786518U (en) * | 2012-08-27 | 2013-03-13 | 中节能太阳能科技（镇江）有限公司 | Source accommodation device for solar cell diffusion |
| CN202786519U (en) * | 2012-09-07 | 2013-03-13 | 宁波尤利卡太阳能科技发展有限公司 | Quartz source bottle for diffusion in solar battery |
| CN202881452U (en) * | 2012-07-25 | 2013-04-17 | 浙江贝盛光伏股份有限公司 | Gas inlet pipe structure of solar battery silicon slice diffusion furnace |
| CN103710683A (en) * | 2014-01-09 | 2014-04-09 | 北京七星华创电子股份有限公司 | Source bottle applied to atomic layer deposition equipment |
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2016
- 2016-01-15 CN CN201610027719.3A patent/CN106978631A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004066025A (en) * | 2002-08-01 | 2004-03-04 | Kobe Steel Ltd | Difer |
| CN102134753A (en) * | 2010-12-14 | 2011-07-27 | 浙江宝利特新能源股份有限公司 | Automatic liquid-replenishing device for diffusion furnace in solar battery production |
| CN202410507U (en) * | 2012-02-15 | 2012-09-05 | 陈剑亮 | Gas filter |
| CN202626353U (en) * | 2012-04-06 | 2012-12-26 | 南京远景新能源有限公司 | Source bottle for diffusion of solar cell |
| CN202881452U (en) * | 2012-07-25 | 2013-04-17 | 浙江贝盛光伏股份有限公司 | Gas inlet pipe structure of solar battery silicon slice diffusion furnace |
| CN202786518U (en) * | 2012-08-27 | 2013-03-13 | 中节能太阳能科技（镇江）有限公司 | Source accommodation device for solar cell diffusion |
| CN202786519U (en) * | 2012-09-07 | 2013-03-13 | 宁波尤利卡太阳能科技发展有限公司 | Quartz source bottle for diffusion in solar battery |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108092216A (en) * | 2018-01-11 | 2018-05-29 | 重庆市东泰电器实业有限公司 | A kind of cable branch babinet and cable branch box |
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Application publication date: 20170725 |