CN106978592A - Equipment upset retaining device is steamed in one kind resistance - Google Patents
Equipment upset retaining device is steamed in one kind resistance Download PDFInfo
- Publication number
- CN106978592A CN106978592A CN201710340029.8A CN201710340029A CN106978592A CN 106978592 A CN106978592 A CN 106978592A CN 201710340029 A CN201710340029 A CN 201710340029A CN 106978592 A CN106978592 A CN 106978592A
- Authority
- CN
- China
- Prior art keywords
- cylinder
- antifouling board
- steamed
- expansion link
- retaining device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003373 anti-fouling effect Effects 0.000 claims abstract description 44
- 238000007789 sealing Methods 0.000 claims description 10
- 238000009834 vaporization Methods 0.000 abstract description 25
- 230000008016 vaporization Effects 0.000 abstract description 25
- 238000001704 evaporation Methods 0.000 abstract description 21
- 230000008020 evaporation Effects 0.000 abstract description 21
- 238000009987 spinning Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000010025 steaming Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Equipment upset retaining device is steamed the invention discloses one kind resistance, mainly by antifouling board (1), the link assembly being connected with antifouling board (1), and cylinder (2) composition being connected with link assembly；The link assembly is connected on the expansion link of cylinder (2) (11).The link assembly that the antifouling board that the present invention is set is connected is spun upside down in the kinetic energy of the expansion link of cylinder, 170 ° of rotations that the antifouling board of the present invention is spun upside down than existing antifouling board are compared, the antifouling board of the present invention carries out spinning upside down the space being greatly reduced shared by vaporization chamber of the antifouling board in resistance evaporation film machine, enable vaporization chamber that multiple resistances to be installed and steam equipment, so as to enable the invention to the utilization rate of the effective vaporization chamber for improving resistance evaporation film machine, and the operating efficiency of resistance evaporation film machine is improved well.
Description
Technical field
Steaming device retaining device is hindered the present invention relates to one kind, a kind of resistance is specifically referred to and steams equipment upset retaining device.
Background technology
Resistance evaporation film steams equipment generally by the resistance being arranged in coating machine makes its surface component with original to heat target
Son group or ionic species are evaporated, and the atomic group or ion of target is deposited in substrate surface, pass through film forming procedure
(scatterplot-island structure-fan walks structure-layer growth) forms film.In order to prevent substrate after the completion of plated film during resistance evaporation film
Remain in the group of the target atom in vaporization chamber or ion continues as substrate and carries out plated film, and influence the coating quality of target, we
Just the top for steaming equipment in resistance is provided with the retaining device for blocking target atom group or ion, makes to remain in vaporization chamber
Target atom group or ion will not be settled over the substrate surface.
However, its baffle plate when equipment is worked with rotary shield device is steamed in the resistance that existing people are used need to carry out 170 ° of rotations
Turn, and can be taken during baffle plate rotation and the most of space of vaporization chamber that equipment is steamed in resistance is installed, the vaporization chamber for causing to hinder evaporation film machine
Utilization rate is too low, causes evaporation chamber that multiple resistances can not be set to steam equipment, so that the serious work that have impact on resistance evaporation film machine
Make efficiency.
The content of the invention
Its baffle plate takes resistance during it is an object of the invention to overcome existing resistance to steam the work of equipment rotary shield device
The defect that the vaporization chamber space of evaporation film machine is excessive steams equipment upset retaining device there is provided one kind resistance.
The purpose of the present invention passes through following technical proposals reality：Equipment upset retaining device is steamed in one kind resistance, mainly by preventing
Dirty plate, the link assembly that is arranged on antifouling board and can drive antifouling board to move up and down, and the gas being connected with link assembly
Cylinder is constituted；The link assembly is connected on the expansion link of cylinder.
The connecting rod that the link assembly includes being connected with the expansion link of cylinder and expansion link can be followed to move up and down, leads to
The trace that screw mandrel is connected in connecting rod and can followed connecting rod to move is crossed, and is connected with trace and can drive antifouling
The installed part that plate moves up and down；The antifouling board is connected on mountings by connecting shaft.
Connecting cylinder is provided with the cylinder, the expansion link of the cylinder runs through connecting cylinder, and the expansion link passes through straight line
Bearing is connected on connecting cylinder.
It is provided with the seal receptacle being connected with connecting cylinder on the expansion link of the cylinder, the expansion link of the cylinder passes through close
Seal ring is connected with seal receptacle.
The installed part is connected in mounting seat by zanjon bearing.
Pressure ring is provided with the seal receptacle.
Sealing pressure head is additionally provided with the expansion link of the cylinder, the sealing pressure head is also connected with seal receptacle.
Handle is provided with the antifouling board, the handle runs through after antifouling board and is connected with connecting shaft.
The cylinder is the cylinder of the straight reciprocating motion of DNC series.
The present invention has advantages below and beneficial effect compared with prior art：
(1) link assembly that the antifouling board that the present invention is set is connected is turned over above and below the kinetic energy of the expansion link of cylinder is carried out
Turn, 170 ° of rotations that antifouling board of the invention is spun upside down than existing antifouling board are compared, antifouling board of the invention is carried out
Spin upside down be greatly reduced antifouling board resistance evaporation film machine vaporization chamber shared by space, vaporization chamber is installed multiple
Equipment is steamed in resistance, so as to enable the invention to the utilization rate of the effective vaporization chamber for improving resistance evaporation film machine, and improves resistance well
The operating efficiency of evaporation film machine.
(2) link assembly of the invention, which is provided with connecting rod and trace and installed part, can effectively reduce link assembly
The space of the vaporization chamber of shared high resistant evaporation film machine.
(3) mounting seat that the present invention is set is used for installing connecting rods component, and the mounting seat can make the installment work of link assembly
It is more stable, and the compactness that upset retaining device is connected with vaporization chamber can effectively be improved by being arranged on the seal receptacle in mounting seat,
Effectively prevent air from entering vaporization chamber.
(4) present invention can improve antifouling board well in the zanjon bearing that the junction of link assembly and mounting seat is set and turn over
The flexibility turned.
(5) handle that the present invention is set on antifouling board can be easy to the installation and dismounting of antifouling board, and the present invention simultaneously has knot
Structure is simple, reasonable in design and the low advantage of production cost.
Brief description of the drawings
Fig. 1 is overall schematic of the invention.
Fig. 2 is partial sectional view of the invention.
Fig. 3 is operating diagram of the invention.
In above-mentioned accompanying drawing, the corresponding component names of reference are as follows：
1-antifouling board, 2-cylinder, 3-seal receptacle, 4-mounting seat, 5-connecting rod, 6-screw mandrel, 7-trace, 8-
Connecting cylinder, 9-handle, 10-pressure ring, 11-expansion link, 12-installed part, 13-connecting shaft, 14-linear bearing, 15-close
Seal ring, 16-zanjon bearing, 17-sealing pressure head, 18-bolt.
Embodiment
The present invention is described in further detail with reference to embodiment, but embodiments of the present invention are not limited to
This.
Embodiment
As shown in Figures 1 to 3, equipment upset retaining device is steamed the invention discloses one kind resistance, mainly by antifouling board 1, with
The link assembly that antifouling board 1 is connected, and the cylinder 2 being connected with link assembly are constituted；The link assembly is connected to gas
On the expansion link 11 of cylinder 2.Wherein, the link assembly is as shown in Fig. 2 it includes connecting rod 5, trace 7, installed part 12, with
And for connecting the screw mandrel 6 of connecting rod 5 and trace 7.
During implementation, the present invention of described antifouling board 1 is preferential to be employed curved panel that stainless steel is made to realize, this is antifouling
Plate 1 is provided with the through hole for mounting knob 9.Handle 9 is connected in connecting shaft 13 after the through hole on antifouling board 1, this
Hand 9 is attached with connecting shaft 13 by the way of being threadedly coupled, and handle 9 is used to antifouling board 1 being fixedly connected on connecting shaft 13
On.Handle 9 need to only be backed out with hand when that need to be dismantled to antifouling board 1 just can complete the dismounting to antifouling board 1, it is not necessary to other
Aid just can be completed.Described connecting shaft 13 is connected on link assembly.
As shown in Figure 2,3, it includes connecting rod 5, trace 7, installed part 12 to the link assembly, and connects for connection
The screw mandrel 6 of extension bar 5 and trace 7.Described installed part 12 is provided with through hole and two mounting holes, and described connecting shaft 13 passes through
The mode of threaded connection is arranged in one of mounting hole on installed part 12.Mounting seat 4, the peace are provided with installed part 12
Filling seat 4 is used for installing connecting rods component and connection cylinder 2, and described installed part 12 is arranged in mounting seat 4, in order that installed part 12
Can be in the cofree rotation of mounting seat 4, the present invention is used in the slotted eye of connection mounting 12 be provided with zanjon bearing in mounting seat 4
16, the zanjon bearing 16 can make installed part 12 realize free rotation.Described one end of trace 7 is threadedly attached in installed part
In 12 another mounting hole, and the mode that the other end is then connected through a screw thread is connected on one end of screw mandrel 6, the trace 7
For folding trace, can be reduced using folding trace 7 makes high resistant evaporation film machine shared by whole link assembly
The space of vaporization chamber.
Meanwhile, described extension bar in succession 5 is then threadedly attached on the other end of screw mandrel 6, makes extension bar 5 and screw mandrel in succession
6 and trace 7 and one end that screw mandrel 6 is connected can under the drive of the expansion link 11 of cylinder 2 together with expansion link 11 to fortune
It is dynamic, and the direction of motion of one end that trace 7 is connected with installed part 12 then with expansion link 11 is on the contrary, installed part 12 is in trace 7
Drive under also moved with expansion link 11 it is opposite.Seal receptacle 3 is also provided with described mounting seat 4, the seal receptacle 3, which is located at, to be installed
More than two center holes are provided with the lower section of seat 4, the lower end of the seal receptacle 3, seal receptacle 3 is arranged on the present invention when mounted
The lower end of the erecting bed of vaporization chamber, and the mounting seat 4 that seal receptacle 3 is connected then is located in vaporization chamber, runs through screw during installation
Center hole on seal receptacle 3 is connected in mounting seat 4.In order that mounting seat 4 can be contacted closely with the erecting bed of vaporization chamber, with
Prevent air from entering in vaporization chamber, the present invention is provided with pressure ring 10 in vaporization chamber between vaporization chamber, the pressure ring 10 is arranged on
On seal receptacle 3, the pressure ring 10 present invention preferentially employs the pressure ring that exotic material is made.
Further, the present invention is provided with connecting cylinder 8 in the lower section of seal receptacle 3, and the connecting cylinder 8 is used to install cylinder 2, gas
Cylinder 2 is arranged on by screw on the lower end of connecting cylinder 8, and the expansion link 11 of cylinder 2 sequentially passes through connecting cylinder 8 and sealing from bottom to up
Seat 3.Meanwhile, the expansion link 11 of cylinder 2 is connected on connecting cylinder 8 by linear bearing 14, the expansion link 11 of cylinder 2 and by close
Seal ring 15 is connected on seal receptacle 3, in order that the connection of sealing ring 15 and the expansion link 11 and seal receptacle 3 of cylinder 2 is closer, this
Invention is also provided with sealing pressure head 17 on seal receptacle 3, and the sealing pressure head 17 preferentially employs the smooth pressure head of its endoporus.It is described
The expansion link 11 of cylinder 2 is connected after the endoporus of sealing pressure head 17 with connecting rod 5, and connecting rod 5 is simultaneously vertical by bolt 18
It is fixed on the expansion link 11 of cylinder 2, the expansion link 11 of cylinder 2 is driven and moved along a straight line above and below the progress of connecting rod 5.
The cylinder of the preferential straight reciprocating motion for employing DNC series of heretofore described cylinder 2, the cylinder 2 with it is outer
The compressor in portion is connected by tracheae, when outside compressor carries out air-breathing workmanship to cylinder 2, the expansion link 11 of cylinder 2 to
The contract of cylinder 2, when outside compressor is inflated workmanship to cylinder 2, the expansion link 11 of cylinder 2 stretches to outside cylinder 2.
During present invention operation, when resistance evaporation film machine carries out plated film to substrate, it is outer that control system control is connected with cylinder 2
The compressor in portion is inflated workmanship to cylinder 2, and the expansion link 11 of cylinder 2 drives connecting rod 5 to move upwards, and connecting rod 5 makes
Trace 7 drives the antifouling board 1 being connected to by the installed part 12 of connecting shaft 13 to prolong the zanjon bearing 16 in mounting seat 4 to installation
The lower end motion of seat 4, makes the atomic group or ion of the target in evaporation boat be deposited in substrate surface, so as to realize the plating to substrate
Film.After the completion of plated film, the compressor for the outside that control system control is connected with cylinder 2 carries out air-breathing workmanship, gas to cylinder 2
The expansion link 11 of cylinder 2 drives connecting rod 5 to move downward, and connecting rod 5 makes the drive of trace 7 connect by the installed part 12 of connecting shaft 13
The zanjon bearing 16 that the antifouling board 1 being connected on prolongs in mounting seat 4 is rotated to the upper end of mounting seat 4, antifouling board 1 is blocked evaporation boat
The atomic group or ion of interior target, substrate surface will not be deposited in by making the atomic group or ion of target, so as to prevent residual
Target atom group or ion in the vaporization chamber of resistance evaporation film machine are deposited on substrate, effectively ensure that the quality of plated film.
Above and below the link assembly that the present invention is connected by antifouling board 1 is realized under the drive of the expansion link 11 of cylinder 2
Upset, 180 ° of rotations that antifouling board 1 of the invention is spun upside down than existing antifouling board are compared, antifouling board 1 of the invention
Carry out spinning upside down the space being greatly reduced shared by vaporization chamber of the antifouling board in resistance evaporation film machine, vaporization chamber is installed
Equipment is steamed in multiple resistances, so as to enable the invention to the utilization rate of the effective vaporization chamber for improving resistance evaporation film machine, and is improved well
The operating efficiency of resistance evaporation film machine.
As described above, the present invention just can be realized well.
Claims (9)
1. equipment upset retaining device is steamed in one kind resistance, it is characterised in that：Mainly by antifouling board (1), it is arranged on antifouling board (1)
And the link assembly that antifouling board (1) can be driven to move up and down, and cylinder (2) composition being connected with link assembly；The company
Bar assembly is connected on the expansion link of cylinder (2) (11).
2. equipment upset retaining device is steamed in a kind of resistance according to claim 1, it is characterised in that：The link assembly bag
The connecting rod (5) for being connected with the expansion link (11) of cylinder (2) and expansion link (11) being followed to move up and down is included, passes through screw mandrel
(6) trace (7) that is connected in connecting rod (5) and can follow connecting rod (5) to move, and be connected simultaneously with trace (7)
The installed part (12) that antifouling board (1) can be driven to move up and down；The antifouling board (1) is connected to installed part by connecting shaft (13)
(12) on.
3. equipment upset retaining device is steamed in a kind of resistance according to claim 2, it is characterised in that：On the cylinder (2)
Connecting cylinder (8) is provided with, the expansion link (11) of the cylinder (2) runs through connecting cylinder (8), and the expansion link (11) passes through linear axis
(14) are held to be connected on connecting cylinder (8).
4. equipment upset retaining device is steamed in a kind of resistance according to claim 3, it is characterised in that：The cylinder (2)
The seal receptacle (3) being connected with connecting cylinder (8) is provided with expansion link (11), the expansion link (11) of the cylinder (2) is by close
Seal ring (15) is connected with seal receptacle (3).
5. equipment upset retaining device is steamed in a kind of resistance according to claim 4, it is characterised in that：The installed part (12)
It is connected to by zanjon bearing (16) in mounting seat (4).
6. equipment upset retaining device is steamed in a kind of resistance according to claim 5, it is characterised in that：The seal receptacle (3)
On be provided with pressure ring (10).
7. equipment upset retaining device is steamed in a kind of resistance according to claim 6, it is characterised in that：The cylinder (2)
Sealing pressure head (17) is additionally provided with expansion link (11), the sealing pressure head (17) is also connected with seal receptacle (3).
8. equipment upset retaining device is steamed in a kind of resistance according to claim 7, it is characterised in that：The antifouling board (1)
On be provided with handle (9), the handle (9) is connected afterwards and with connecting shaft (13) through antifouling board (1).
9. equipment upset retaining device is steamed in a kind of resistance according to claim 8, it is characterised in that：The cylinder (2) is
The cylinder of the straight reciprocating motion of DNC series.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710340029.8A CN106978592A (en) | 2017-05-15 | 2017-05-15 | Equipment upset retaining device is steamed in one kind resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710340029.8A CN106978592A (en) | 2017-05-15 | 2017-05-15 | Equipment upset retaining device is steamed in one kind resistance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106978592A true CN106978592A (en) | 2017-07-25 |
Family
ID=59342882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710340029.8A Pending CN106978592A (en) | 2017-05-15 | 2017-05-15 | Equipment upset retaining device is steamed in one kind resistance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106978592A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112899626A (en) * | 2019-11-19 | 2021-06-04 | 杭州朗旭新材料科技有限公司 | Planar magnetron sputtering cathode target surface protection shielding device |
| CN114576181A (en) * | 2022-05-05 | 2022-06-03 | 成都高真科技有限公司 | High vacuum turbo molecular pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201334517Y (en) * | 2008-12-10 | 2009-10-28 | 中国电子科技集团公司第四十八研究所 | Single-drive double-motion baffle mechanism |
| CN204779783U (en) * | 2015-07-09 | 2015-11-18 | 沈阳腾鳌真空技术有限公司 | Pneumatic baffle of umbrella -type |
| CN205662594U (en) * | 2016-05-03 | 2016-10-26 | 哈尔滨理工大学 | Novel coating film tool |
-
2017
- 2017-05-15 CN CN201710340029.8A patent/CN106978592A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201334517Y (en) * | 2008-12-10 | 2009-10-28 | 中国电子科技集团公司第四十八研究所 | Single-drive double-motion baffle mechanism |
| CN204779783U (en) * | 2015-07-09 | 2015-11-18 | 沈阳腾鳌真空技术有限公司 | Pneumatic baffle of umbrella -type |
| CN205662594U (en) * | 2016-05-03 | 2016-10-26 | 哈尔滨理工大学 | Novel coating film tool |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112899626A (en) * | 2019-11-19 | 2021-06-04 | 杭州朗旭新材料科技有限公司 | Planar magnetron sputtering cathode target surface protection shielding device |
| CN114576181A (en) * | 2022-05-05 | 2022-06-03 | 成都高真科技有限公司 | High vacuum turbo molecular pump |
| CN114576181B (en) * | 2022-05-05 | 2022-07-05 | 成都高真科技有限公司 | High vacuum turbo molecular pump |
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| SE01 | Entry into force of request for substantive examination | ||
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| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20240319 |
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