CN205662594U - Novel coating film tool - Google Patents

Novel coating film tool Download PDF

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Publication number
CN205662594U
CN205662594U CN201620381516.XU CN201620381516U CN205662594U CN 205662594 U CN205662594 U CN 205662594U CN 201620381516 U CN201620381516 U CN 201620381516U CN 205662594 U CN205662594 U CN 205662594U
Authority
CN
China
Prior art keywords
connecting rod
model
tool
film coating
coating jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620381516.XU
Other languages
Chinese (zh)
Inventor
李忠华
马力
马一力
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin University of Science and Technology
Original Assignee
Harbin University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin University of Science and Technology filed Critical Harbin University of Science and Technology
Priority to CN201620381516.XU priority Critical patent/CN205662594U/en
Application granted granted Critical
Publication of CN205662594U publication Critical patent/CN205662594U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a the utility model relates to an install the coating film tool in vacuum coating equipment, the baffled particular form's of neotype periphery that says so more specifically coating film tool can be under the circumstances that does not change vacuum coating tool cavity volume, as much as possible many materials carry out and the time coating film, and through the installation baffle, make the coating film material of treating of evaporation assemble in the aspect of material lower as far as possible, reduce the pollution of avoiding waiting to plate the material even, improve product quality. The hole is placed to the material of a sizing of distributing uniformly on the conical tool dress model, tool dress model install the baffle that forms certain contained angle to the outside all around, have ascending connecting rod I on the conical tool dress model apex angle, the upper end of connecting rod I is fixed with splint, can dismantle through the bolt between splint and anchor clamps folder, the anchor clamps folder passes through connecting rod II can be continuous with the fastening of vacuum coating equipment cavity.

Description

A kind of novel film coating jig
Technical field
This utility model relates to a kind of film coating jig being installed in vacuum coating equipment, is a kind of novel in particular The film coating jig of the baffled special shape of periphery.
Background technology
In existing coating process, the lower section of vacuum coating equipment is provided with the evaporation of electron beam or electric resistor heating type Source, coating materials heating to be plated evaporates into steam and converges under film coating jig, thus completes the plating of the lower section one side of material to be plated Film works, and first, owing to vacuum coating equipment needs evacuation, so its cavity volume can not be too big, come into operation now Film coating jig is the most flat, and the number of materials that disposably can carry out plated film is less;Second, for the handling of film coating jig In convenience and holding coating process, the at the uniform velocity rotation of tool, also exists one between the cavity of film coating jig and vacuum coating equipment Space, causes coating materials to be plated can rise to the top of tool, and the another side at material to be plated plates a small amount of coating materials, and some material two Face needs to plate coating materials of different nature, can cause the pollution of material under this situation, affects the various performances of material.
Summary of the invention
This utility model mainly solving the technical problems that provide a kind of novel film coating jig, first, can not change Become in the case of vacuum coating tool cavity volume, as much as possible carry out plated film while more than one piece material;Second, by installing Baffle plate, makes the coating materials to be plated of evaporation converge in the lower aspect of material as far as possible, reduces the pollution even avoiding material to be plated, improve Product quality.
For solving above-mentioned technical problem, this utility model relates to a kind of film coating jig, is a kind of novel in particular The film coating jig of the baffled special shape of novel periphery, fills model, baffle plate, material putting hole, connecting rod including tool I, clamping plate, fixture folder, bolt and connecting rod II, can to the greatest extent may be used in the case of not changing vacuum coating tool cavity volume What energy was many carries out plated film while more than one piece material;And by installing baffle plate, make the coating materials to be plated of evaporation converge in material as far as possible The lower aspect of material, reduces the pollution even avoiding material to be plated, improves product quality.
A certain size material putting hole, the surrounding peace of tool dress model it is evenly distributed on the tool dress model of taper The baffle plate formed an angle equipped with shape laterally, the tool dress model drift angle of taper has connecting rod I upwards, connecting rod I Upper end is fixed with clamping plate, and detachable by bolt between clamping plate and fixture folder, fixture folder can be with Vacuum Deposition by connecting rod II The fastening of film device cavity is connected.
Further as the technical program optimizes, connecting rod I He described in a kind of novel film coating jig of this utility model Connecting rod II material is identical, and structure is identical.
As the further optimization of the technical program, fixture folder described in a kind of novel film coating jig of this utility model and Clamping plate are for being flexibly connected.
Further as the technical program optimizes, film coating jig dress described in a kind of novel film coating jig of this utility model Model and baffle plate form certain angle.
Further as the technical program optimizes, film coating jig described in a kind of novel film coating jig of this utility model Dress model and baffle plate connect for fixing.
Further as the technical program optimizes, film coating jig dress described in a kind of novel film coating jig of this utility model Model and baffle plate material therefor are aluminum.
Having the beneficial effect that of a kind of novel film coating jig of this utility model
A kind of novel film coating jig of this utility model, can be in the situation not changing vacuum coating tool cavity volume Under, as much as possible carry out plated film while more than one piece material;And by installing baffle plate, make the coating materials to be plated of evaporation converge as far as possible Gather the lower aspect at material, reduce the pollution even avoiding material to be plated, improve product quality.
Accompanying drawing explanation
The utility model is described in more detail with specific implementation method below in conjunction with the accompanying drawings.
Fig. 1 is the structural representation of a kind of novel film coating jig of this utility model.
Fig. 2 is tool dress model and the structural representation of baffle plate thereof of taper in Fig. 1.
Fig. 3 is the structural representation of the fixture being connected with vacuum coating equipment in Fig. 1.
In figure: tool fills model 1, baffle plate 2, material putting hole 3, connecting rod I 4, clamping plate 5, fixture folder 6, bolt 7, connects Extension bar II 8.
Detailed description of the invention
Detailed description of the invention one:
Below in conjunction with Fig. 1,2 explanation present embodiments, this utility model relates to a kind of film coating jig, is one in particular Plant the film coating jig of the novel novel baffled special shape of periphery, place including tool dress model 1, baffle plate 2, material Hole 3, connecting rod I 4, clamping plate 5, fixture folder 6, bolt 7 and connecting rod II 8, can not change vacuum coating tool cavity body In the case of Ji, as much as possible carry out plated film while more than one piece material;And by installing baffle plate, make treating of evaporation as far as possible Plated film material converges in the lower aspect of material, reduces the pollution even avoiding material to be plated, improves product quality.
A certain size material putting hole 3, the four of tool dress model 1 it are evenly distributed on the tool dress model 1 of taper The baffle plate 2 that shape forms an angle laterally is installed in week, tool dress model 1 drift angle of taper has connecting rod I 4 upwards, even The upper end of extension bar I 4 is fixed with clamping plate 5, and detachable by bolt 7 between clamping plate 5 and fixture folder 6, fixture folder 6 passes through connecting rod II 8 can be connected with the fastening of vacuum coating equipment cavity.
Detailed description of the invention two:
Below in conjunction with Fig. 1,2,3, present embodiment being described, embodiment one is described further by present embodiment, described Connecting rod I is identical with connecting rod II material, and structure is identical.
Detailed description of the invention three:
Below in conjunction with Fig. 1,2 explanation present embodiments, embodiment one is described further by present embodiment, described folder Tool folder and clamping plate are for being flexibly connected.
Detailed description of the invention four:
Below in conjunction with Fig. 1,2 explanation present embodiments, embodiment one is described further by present embodiment, described plating Film tool dress model and baffle plate form certain angle.
Detailed description of the invention five:
Below in conjunction with Fig. 1,2 explanation present embodiments, embodiment one is described further by present embodiment, described plating Film tool dress model and baffle plate connect for fixing.
Detailed description of the invention six:
Below in conjunction with Fig. 1,2 explanation present embodiments, embodiment one is described further by present embodiment, described plating Film tool dress model and baffle plate material therefor are aluminum.
Certainly, described above is not limitation of the utility model, and this utility model is also not limited to the example above, this skill Change that the those of ordinary skill in art field is made in essential scope of the present utility model, retrofit, add or replace, also belong to In protection domain of the present utility model.

Claims (6)

1. a novel film coating jig, including tool dress model (1), baffle plate (2), material putting hole (3), connecting rod I (4), Clamping plate (5), fixture folder (6), bolt (7) and connecting rod II (8), it is characterised in that: tool dress model (1) of taper is upper uniformly Be dispersed with a certain size material putting hole (3), the surrounding of tool dress model (1) is provided with what shape laterally formed an angle Baffle plate (2), tool dress model (1) drift angle of taper has connecting rod I (4) upwards, and the upper end of connecting rod I (4) is fixed with folder Plate (5), detachable by bolt (7) between clamping plate (5) and fixture folder (6), fixture folder (6) can be with by connecting rod II (8) The fastening of vacuum coating equipment cavity is connected.
A kind of novel film coating jig the most according to claim 1, it is characterised in that: described connecting rod I (4) and connecting rod II (8) material is identical, and structure is identical.
A kind of novel film coating jig the most according to claim 1, it is characterised in that: described fixture folder (6) and clamping plate (5) for being flexibly connected.
A kind of novel film coating jig the most according to claim 1, it is characterised in that: described film coating jig dress model (1) Certain angle is formed with baffle plate (2).
A kind of novel film coating jig the most according to claim 1, it is characterised in that: described film coating jig dress model (1) Connect for fixing with baffle plate (2).
A kind of novel film coating jig the most according to claim 1, it is characterised in that: described film coating jig dress model (1) It is aluminum with baffle plate (2) material therefor.
CN201620381516.XU 2016-05-03 2016-05-03 Novel coating film tool Expired - Fee Related CN205662594U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620381516.XU CN205662594U (en) 2016-05-03 2016-05-03 Novel coating film tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620381516.XU CN205662594U (en) 2016-05-03 2016-05-03 Novel coating film tool

Publications (1)

Publication Number Publication Date
CN205662594U true CN205662594U (en) 2016-10-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620381516.XU Expired - Fee Related CN205662594U (en) 2016-05-03 2016-05-03 Novel coating film tool

Country Status (1)

Country Link
CN (1) CN205662594U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106978592A (en) * 2017-05-15 2017-07-25 成都西沃克真空科技有限公司 Equipment upset retaining device is steamed in one kind resistance
CN107557749A (en) * 2017-09-30 2018-01-09 宣城托新精密科技有限公司 PVD vacuum coating tool fixtures
CN110331374A (en) * 2019-07-23 2019-10-15 清华大学 A kind of sample stage being prepared on a large scale surface enhanced Raman substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106978592A (en) * 2017-05-15 2017-07-25 成都西沃克真空科技有限公司 Equipment upset retaining device is steamed in one kind resistance
CN107557749A (en) * 2017-09-30 2018-01-09 宣城托新精密科技有限公司 PVD vacuum coating tool fixtures
CN107557749B (en) * 2017-09-30 2024-05-17 宣城托新精密科技有限公司 PVD vacuum coating tool fixture
CN110331374A (en) * 2019-07-23 2019-10-15 清华大学 A kind of sample stage being prepared on a large scale surface enhanced Raman substrate

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161026

Termination date: 20170503