CN106965337A - A kind of governing mechanism of tension of multi-line cutting machine - Google Patents

A kind of governing mechanism of tension of multi-line cutting machine Download PDF

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Publication number
CN106965337A
CN106965337A CN201710223558.XA CN201710223558A CN106965337A CN 106965337 A CN106965337 A CN 106965337A CN 201710223558 A CN201710223558 A CN 201710223558A CN 106965337 A CN106965337 A CN 106965337A
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CN
China
Prior art keywords
mover
tension
line
cutting machine
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710223558.XA
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Chinese (zh)
Inventor
乔卫民
翟新
马艳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd
Original Assignee
SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd filed Critical SUZHOU HRT ELECTRONIC EQUIPMENT TECHNOLOGY Co Ltd
Priority to CN201710223558.XA priority Critical patent/CN106965337A/en
Publication of CN106965337A publication Critical patent/CN106965337A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Tension Adjustment In Filamentary Materials (AREA)

Abstract

The invention discloses a kind of governing mechanism of tension of multi-line cutting machine, including:Line slideway, frame, stator module, magnetic railings ruler, mover assembly, slip wheel assembly and mover, line slideway are fixed in frame;Stator module is fixed in frame, and in the middle of two line slideways;Magnetic railings ruler is fixed in frame, and along side line slideway direction;Mover assembly is slidably arranged on line slideway;Slip wheel assembly links together with mover assembly;Mover connects and drives mover assembly.The governing mechanism of tension of the multi-line cutting machine ensure that the constant tension on diamond wire, reduce equipment outage.

Description

A kind of governing mechanism of tension of multi-line cutting machine
Technical field
The present invention relates to multi-line cutting machine field, and in particular to a kind of governing mechanism of tension of multi-line cutting machine.
Background technology
Multi-line cutting machine is that the main of the hard brittle material such as current monocrystalline silicon, polysilicon and electronic-grade silicon, sapphire processing is set Standby, governing mechanism of tension is one of main function components of multi-line cutting machine.At present, multi-line cutting machine tension adjustment on the market Technology adjusts tension force usually using certain moment of torsion is applied to electric rotating machine, and its sensitivity is low, and tension adjustment is unstable, and easily broken Line.
The content of the invention
The technical problem to be solved:It is a primary object of the present invention to, it is ensured that the constant tension on diamond wire, reduce equipment Outage.
Technical scheme:In order to solve the above-mentioned technical problem, the invention provides a kind of tension adjustment machine of multi-line cutting machine Structure, the technical scheme is that:
A kind of governing mechanism of tension of multi-line cutting machine, including line slideway, frame, stator module, magnetic railings ruler, mover assembly, Slip wheel assembly and mover, line slideway are fixed in frame;Stator module is fixed in frame, and positioned at two line slideways It is middle;Magnetic railings ruler is fixed in frame, and is set along side line slideway direction;Mover assembly is slidably arranged in straight line and led On rail;Slip wheel assembly links together with mover assembly;Mover connects and drives mover assembly.
A kind of governing mechanism of tension of described multi-line cutting machine, the line slideway is fixed on machine by threaded fastener On frame.
A kind of governing mechanism of tension of described multi-line cutting machine, the magnetic railings ruler is parallel with line slideway.
Diamond wire, Buddha's warrior attendant are wound with a kind of governing mechanism of tension of described multi-line cutting machine, the slip wheel assembly Line goes out after entering on the upside of the slip wheel assembly from downside, and inlet wire and outlet are in same plane and parallel.
A kind of governing mechanism of tension of described multi-line cutting machine, the mover and stator module formation linear electric motors, and Mover assembly is driven to move by mover.
The tension adjustment of diamond wire is carried out using linear electric motors, this structural sensitivity is high, and response is fast, it is ensured that diamond wire On constant tension, greatly reduce outage.
Using magnetic railings ruler measurement distance, magnetic railings ruler cost is low compared with grating, and measurement accuracy is high, and distance feedback is accurate.
Tension adjustment component is oriented to and uses line slideway, line slideway stable drive so that tension adjustment structure non-jitter, Reduce outage.
Beneficial effect:The advantageous effects of the present invention are:The governing mechanism of tension of the present invention ensure that on diamond wire Constant tension, reduce equipment outage.
Brief description of the drawings
Fig. 1 is the front view of the governing mechanism of tension of multi-line cutting machine of the present invention.
Fig. 2 is the sectional view of the governing mechanism of tension of multi-line cutting machine of the present invention.
Embodiment
In order to further illustrate the principle of the present invention, the present invention is described in detail in conjunction with accompanying drawing.
As illustrated in fig. 1 and 2, the governing mechanism of tension of multi-line cutting machine includes line slideway 1, frame 2, stator module 3, magnetic Grid chi 4, mover assembly 5, slip wheel assembly 6 and mover 7, line slideway 1 are fixed in frame 2;Stator module 3 is fixed on frame On 2, and in the middle of two line slideways 2;Magnetic railings ruler 4 is fixed in frame 2, and is set along the direction of side line slideway 1; Mover assembly 5 is slidably arranged on line slideway 1;Slip wheel assembly 6 links together with mover assembly 5;Mover 7 is connected simultaneously Drive mover assembly 5.
As shown in figure 1, line slideway 1 is fixed in frame by threaded fastener.
Magnetic railings ruler 4 is parallel with line slideway 1.
Diamond wire is wound with slip wheel assembly 6, diamond wire goes out after entering from the upside of slip wheel assembly 6 from downside, inlet wire With outlet in same plane and parallel.
Mover 7 and the formation linear electric motors of stator module 3, and drive mover assembly 5 to move by mover 7, using straight-line electric Machine carries out the tension adjustment of diamond wire, and this structural sensitivity is high, and response is fast, it is ensured that the constant tension on diamond wire, significantly Reduce outage.
Using the measurement distance of magnetic railings ruler 4, the cost of magnetic railings ruler 4 is low compared with grating, and measurement accuracy is high, and distance feedback is accurate.
Tension adjustment component, which is oriented to, uses line slideway 1, the stable drive of line slideway 1 so that tension adjustment structure is without trembling It is dynamic, reduce outage.
After power-up, the mover assembly 5 of linear electric motors drives slip wheel assembly 6 to be moved on line slideway 1, when tension force is less than Rated tension, linear electric motors movement mover assembly 5 tenses diamond wire, reaches constant-tension, diamond wire is loosened, reach constant Tension force.
The governing mechanism of tension of the multi-line cutting machine can ensure the constant tension on diamond wire, reduce equipment outage.
The preferable possible embodiments of the present invention are the foregoing is only, are not limited the scope of the invention.It is every to utilize It is equivalent remote that description of the invention and accompanying drawing content are made, or is directly or indirectly used in other related technical fields, Similarly it is included within the scope of the present invention.

Claims (5)

1. a kind of governing mechanism of tension of multi-line cutting machine, including line slideway(1), frame(2), stator module(3), magnetic railings ruler (4), mover assembly(5), slip wheel assembly(6)And mover(7), it is characterised in that:The line slideway(1)It is fixed on frame (2)On;The stator module(3)It is fixed on frame(2)On, and positioned at two line slideways(2)It is middle;The magnetic railings ruler(4) It is fixed on frame(2)On, and along side line slideway(1)Direction is set;The mover assembly(5)It is slidably arranged in straight line Guide rail(1)On;The slip wheel assembly(6)With mover assembly(5)Link together;The mover(7)Connect and drive mover Component(5).
2. a kind of governing mechanism of tension of multi-line cutting machine as claimed in claim 1, it is characterised in that the line slideway (1)Frame is fixed on by threaded fastener(2)On.
3. a kind of governing mechanism of tension of multi-line cutting machine as claimed in claim 1, it is characterised in that the magnetic railings ruler(4) With line slideway(1)It is parallel.
4. a kind of governing mechanism of tension of multi-line cutting machine as claimed in claim 1, it is characterised in that the slip wheel assembly (6)On be wound with diamond wire, diamond wire is from the slip wheel assembly(6)Upside goes out after entering from downside, and inlet wire and outlet are same One plane and parallel.
5. a kind of governing mechanism of tension of multi-line cutting machine as claimed in claim 1, it is characterised in that the mover(7)With Stator module(3)Linear electric motors are formed, and pass through mover(7)Drive mover assembly(5)It is mobile.
CN201710223558.XA 2017-04-07 2017-04-07 A kind of governing mechanism of tension of multi-line cutting machine Pending CN106965337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710223558.XA CN106965337A (en) 2017-04-07 2017-04-07 A kind of governing mechanism of tension of multi-line cutting machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710223558.XA CN106965337A (en) 2017-04-07 2017-04-07 A kind of governing mechanism of tension of multi-line cutting machine

Publications (1)

Publication Number Publication Date
CN106965337A true CN106965337A (en) 2017-07-21

Family

ID=59336319

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710223558.XA Pending CN106965337A (en) 2017-04-07 2017-04-07 A kind of governing mechanism of tension of multi-line cutting machine

Country Status (1)

Country Link
CN (1) CN106965337A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109773988A (en) * 2019-03-07 2019-05-21 徐克军 A kind of mounting structure of diamond wire saw machine guide roller

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0970746A (en) * 1995-09-05 1997-03-18 Moriya Kogyo:Kk Wire saw cutting method
CN202037744U (en) * 2011-03-30 2011-11-16 苏州市汇峰机械设备厂 Multi-wire cutting machine
CN102862240A (en) * 2011-07-08 2013-01-09 浙江思博恩新材料科技有限公司 Diamond wire coiling system
CN104057545A (en) * 2014-06-04 2014-09-24 上海日进机床有限公司 Multi-wire cutting equipment and tension adjusting mechanism thereof
CN105855626A (en) * 2016-04-22 2016-08-17 北京微纳精密机械有限公司 Automatic tensioning structure device for ring wire saw
CN106115315A (en) * 2016-08-16 2016-11-16 无锡先导智能装备股份有限公司 Membrane unwinding device
CN106273019A (en) * 2016-08-25 2017-01-04 西安理工大学 A kind of reciprocating diamond wire saw cutting machine tension control mechanism and control method thereof
CN205951054U (en) * 2016-08-19 2017-02-15 台州维尔德机械设备有限公司 Multi -wire saw's line arranging device that receive and releases constructs
CN206703319U (en) * 2017-04-07 2017-12-05 苏州赫瑞特电子专用设备科技有限公司 A kind of governing mechanism of tension of multi-line cutting machine

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0970746A (en) * 1995-09-05 1997-03-18 Moriya Kogyo:Kk Wire saw cutting method
CN202037744U (en) * 2011-03-30 2011-11-16 苏州市汇峰机械设备厂 Multi-wire cutting machine
CN102862240A (en) * 2011-07-08 2013-01-09 浙江思博恩新材料科技有限公司 Diamond wire coiling system
CN104057545A (en) * 2014-06-04 2014-09-24 上海日进机床有限公司 Multi-wire cutting equipment and tension adjusting mechanism thereof
CN105855626A (en) * 2016-04-22 2016-08-17 北京微纳精密机械有限公司 Automatic tensioning structure device for ring wire saw
CN106115315A (en) * 2016-08-16 2016-11-16 无锡先导智能装备股份有限公司 Membrane unwinding device
CN205951054U (en) * 2016-08-19 2017-02-15 台州维尔德机械设备有限公司 Multi -wire saw's line arranging device that receive and releases constructs
CN106273019A (en) * 2016-08-25 2017-01-04 西安理工大学 A kind of reciprocating diamond wire saw cutting machine tension control mechanism and control method thereof
CN206703319U (en) * 2017-04-07 2017-12-05 苏州赫瑞特电子专用设备科技有限公司 A kind of governing mechanism of tension of multi-line cutting machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109773988A (en) * 2019-03-07 2019-05-21 徐克军 A kind of mounting structure of diamond wire saw machine guide roller

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Application publication date: 20170721

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