CN106959588B - The two-sided automatic-alignment method and apparatus of anti-welding semi-automatic exposure machine - Google Patents
The two-sided automatic-alignment method and apparatus of anti-welding semi-automatic exposure machine Download PDFInfo
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- CN106959588B CN106959588B CN201710223295.2A CN201710223295A CN106959588B CN 106959588 B CN106959588 B CN 106959588B CN 201710223295 A CN201710223295 A CN 201710223295A CN 106959588 B CN106959588 B CN 106959588B
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- automatic
- pcb board
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
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Abstract
The invention discloses a kind of two-sided automatic-alignment method and apparatus of anti-welding semi-automatic exposure machine, the upper film is adsorbed on the glass surface of upper ledge and the lower film is adsorbed on the glass surface of center by vacuumizing, pcb board is put on center, pcb board is supported by the lower film;Upper ledge is mutually closed with lower frame and is pressed, each CCD vision systems are moved to designated position by control Multi-shaft movement mechanism, by the CCD vision systems for being set to the tops Multi-shaft movement mechanism A, calculate the film and the positive position deviation of pcb board, the automatic aligning mechanism B of lower frame bottom is controlled again, the pcb board position placed on center is adjusted, realizes pcb board front and upper film automatic aligning;By the CCD vision systems being set on Multi-shaft movement mechanism B, the position deviation of the lower film and pcb board reverse side is calculated, then the automatic aligning mechanism A that frame bottom is installed in adjusting, realizes the reverse side of pcb board and lower film automatic aligning;The present invention realizes that pcb board front is exposed with the upper film, reverse side and the contraposition of lower film automatic precision, precision.
Description
Technical field
The present invention relates to a kind of two-sided automatic-alignment method and apparatus of anti-welding semi-automatic exposure machine, it is used to solve at present
Conventional exposure machine can only single side automatic aligning, caused by low production efficiency technical barrier.
Background technology
Recently as the fast development of electronic technology, it is increased sharply for PCB industries for promoting production capacity demand, tradition
Anti-welding semi-automatic exposure machine, the limitation of the design concept based on traditional equipment mechanical structure, using more complicated positioning mechanism,
The structure space immediately below lower process box is occupied, the layout of the double-deck industrial CCD vision system can not be formed on device structure,
It can only be only used for realizing that the front of the film and pcb board is automatic in the surface mounting industrial CCD vision systems of upper process box
Contraposition carries out single side exposure, causes whole work efficiency low.This respect is with French Altix, Japan ORC, Taiwan river treasured CBT, platform
Gulf will sage Csun etc. is the anti-welding semi-automatic exposure machine manufacturing enterprise of representative, is all made of 4 industrial CCD vision systems and carries out single side
Contraposition, single side Exposure mode.
Domestic anti-welding semi-automatic exposure machine manufacturing enterprise starts late, basic using external ripe technical solution, Dongguan
Hai Sheng Electro-optical Technology, INC. (US) 62 Martin Road, Concord, Massachusetts 017 of city has made bold innovation, has invented a kind of semi-automatic anti-to improve production efficiency of equipment
Exposure desk frame module and exposure machine this technical solution are welded, core technology using thin film dielectrics to realize double-sided exposure, but also
It is that single side contraposition is carried out using 4, front industrial CCD vision system, due to continuing to use traditional more complicated contraposition platform machine
The reverse side contraposition of structure, pcb board can only use artificial contraposition or Pin nail contrapositions, can not achieve automatic aligning, therefore the invention is only
It can be used for part and expose plate required precision special demand, i.e. pcb board front precision is high, the low this occasion of reverse side precision, this
The application range of equipment is significantly limited, efficiency and precision problem could not be fundamentally solved.
Invention content
In order to solve the deficiencies in the prior art, the object of the present invention is to provide a kind of the double of anti-welding semi-automatic exposure machine
Face automatic aligning method realizes that the two-sided contraposition of high-precision, double-sided exposure, complete machine production capacity promote 1 times or more.The present invention also provides
A kind of two-sided automatic-alignment equipment of anti-welding semi-automatic exposure machine.
Present invention technical solution used for the above purpose is:
A kind of two-sided automatic-alignment method of automatic exposure machine, includes the following steps:
(1) process box, including sequentially connected upper ledge, center, lower frame are set;Upper ledge is equipped with optical glass A, the optics
The bottom surfaces glass A are adsorbed with the film;Center is equipped with optical glass B, and the fronts optical glass B are adsorbed with the lower film, and center is embedding
Enter to inside lower frame;
(2) automatic aligning mechanism is set, including is set to the automatic aligning mechanism A of middle frame bottom, and is set to lower frame
The automatic aligning mechanism B of bottom;
(3) Multi-shaft movement mechanism is set, including is set to the Multi-shaft movement mechanism A on process box top, and is set to work
Make the Multi-shaft movement mechanism B of frame bottom;
(4) CCD vision systems are set, including the CCD vision systems being set on Multi-shaft movement mechanism A, and are set to
CCD vision systems on Multi-shaft movement mechanism B;
(5) work is powered up, the upper film is adsorbed on the glass surface of upper ledge and during the lower film is adsorbed on by vacuumizing
On the glass surface of frame, pcb board is put on center, and pcb board is supported by the lower film;Upper ledge is mutually closed with lower frame and is pressed, is controlled
Each CCD vision systems are moved to designated position by Multi-shaft movement mechanism, by the CCD for being set to the tops Multi-shaft movement mechanism A
Vision system calculates the film and the positive position deviation of pcb board, then controls the automatic aligning mechanism B of lower frame bottom, adjusts
Pcb board front and upper film automatic aligning are realized in the pcb board position placed on center;By being set on Multi-shaft movement mechanism B
CCD vision systems, calculate the position deviation of the lower film and pcb board reverse side, then the automatic aligning that frame bottom is installed in adjusting
Mechanism A realizes the reverse side of pcb board and lower film automatic aligning;Realize that pcb board front and the upper film, reverse side and the lower film are automatic
Two-sided accurate exposure is realized in precision contraposition.
It is further improved as this method, the mechanical structure of the lower frame is in " returning " character form structure, and the center is embedded into
Lower frame " returns " on character form structure position.
It is further improved as this method, the lower frame is mutually fixed by movable pin with upper ledge.
Be further improved as this method, including at least four be set to Multi-shaft movement mechanism A CCD vision systems, with
And the CCD vision systems on Multi-shaft movement mechanism B are set to including at least four.
A kind of two-sided automatic-alignment equipment of automatic exposure machine, including:
Process box, process box include sequentially connected upper ledge, center, lower frame;Upper ledge is equipped with optical glass A, the optics
The bottom surfaces glass A are adsorbed with the film;Center is equipped with optical glass B, and the fronts optical glass B are adsorbed with the lower film, and center is embedding
Enter to inside lower frame;
Automatic aligning mechanism, including be set to the automatic aligning mechanism A of middle frame bottom, and be set to lower frame bottom from
Dynamic positioning mechanism B;
Multi-shaft movement mechanism, including it is set to the Multi-shaft movement mechanism A on process box top, and it is set to work frame bottom
Multi-shaft movement mechanism B;
CCD vision systems, CCD vision systems include the CCD vision systems being set on Multi-shaft movement mechanism A, Yi Jishe
The CCD vision systems being placed on Multi-shaft movement mechanism B.
It is further improved as this equipment, the mechanical structure of the lower frame is in " returning " character form structure, and the center is embedded into
Lower frame " returns " on character form structure position.
It is further improved as this equipment, the lower frame is mutually fixed by movable pin with upper ledge.
Be further improved as this equipment, including at least four be set to Multi-shaft movement mechanism A CCD vision systems, with
And the CCD vision systems on Multi-shaft movement mechanism B are set to including at least four.
The advantage of the invention is that:By improvement frame and the layout of positioning mechanism, it is more complicated to solve tradition
Positioning mechanism leads to the structure space for occupying process box, can not multiple industrial CCD visions system be installed in process box simultaneously
System;The two-sided automatic-alignment equipment of anti-welding semi-automatic exposure machine provided by the invention can be realized in same stand-alone device
Two-sided automatic-alignment, double-sided exposure, under conditions of ensureing precision, production capacity promotes one times.
For more clearly illustrate the present invention structure feature and effect, come below in conjunction with the accompanying drawings with specific embodiment to its into
Row is described in detail.
Description of the drawings
Fig. 1 is the overall construction schematic diagram of the present invention;
Fig. 2 is process box overall structure of the explosion figure of the present invention;
Fig. 3 is pcb board placement location schematic diagram of the present invention;
In figure:1, multiaxial motion platform A;2, industrial CCD vision system;3, upper ledge;4, center;5, lower frame;6, industrial CCD
Vision system;7, multiaxial motion platform B;8, optical glass A;9, optical glass;10, automatic aligning mechanism A;11, automatic aligning
Mechanism B;12, movable pin;13, the upper film;14, the lower film;15, pcb board.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Attached drawing 1 is please referred to attached drawing 3, present embodiments provides a kind of two-sided automatic-alignment method of automatic exposure machine, is wrapped
Include following steps:
(1) process box, including sequentially connected upper ledge 3, center 4, lower frame 5 are set;Upper ledge 3 is equipped with optical glass A8,
The bottom surfaces optical glass A8 are adsorbed with the film 13;Center 4 is equipped with optical glass B9, and the fronts optical glass B9 are adsorbed with down
The film 14, center 4 are embedded into inside lower frame 5;
(2) automatic aligning mechanism is set, including is set to the automatic aligning mechanism A10 of 4 bottom of center, and is set to down
The automatic aligning mechanism B11 of 5 bottom of frame;
(3) Multi-shaft movement mechanism is set, including is set to the Multi-shaft movement mechanism A1 on process box top, and is set to work
Make the Multi-shaft movement mechanism B7 of frame bottom;
(4) CCD vision systems are set, including the CCD vision systems 2 being set on Multi-shaft movement mechanism A1, and setting
In the CCD vision systems 6 on Multi-shaft movement mechanism B7;
(5) work is powered up, the upper film 13 is adsorbed on the glass surface of upper ledge 3 and the lower film 14 adsorbs by vacuumizing
On the glass surface of center 4, pcb board 15 is put on center 4, pcb board 15 is supported by the lower film 14;By upper ledge 3 and 5 phase of lower frame
Closure is pressed, and each CCD vision systems are moved to designated position by control Multi-shaft movement mechanism, by being set to multiaxial motion machine
The CCD vision systems 2 on the tops structure A1 calculate the film 13 and 15 positive position deviation of pcb board, then control 5 bottom of lower frame
Automatic aligning mechanism B11, adjust 15 position of pcb board placed on center 4, realize that 15 front of pcb board and the upper film 13 are automatic
Contraposition;By the CCD vision systems 6 being set on Multi-shaft movement mechanism B7, the position of the lower film 14 and pcb board reverse side is calculated
Deviation, then the automatic aligning mechanism A10 of 4 bottom of center installation is adjusted, realize that the reverse side of pcb board 15 is automatic right with the lower film 14
Position;It realizes that 15 front of pcb board is aligned with the upper film 13, reverse side and lower 14 automatic precision of the film, realizes two-sided accurate exposure.
The mechanical structure of lower frame 5 is in " returning " character form structure, and center 4 is embedded on lower frame 5 " time " character form structure position.Lower frame
5 are fixed by movable pin 12 and 3 phase of upper ledge.
The CCD vision systems 2 for being set to Multi-shaft movement mechanism A1 including at least four, and be set to including at least four
CCD vision systems 6 on Multi-shaft movement mechanism B7.
The two-sided automatic-alignment equipment for present embodiments providing automatic exposure machine further includes:
Process box, including sequentially connected upper ledge 3, center 4, lower frame 5;Upper ledge 3 is equipped with optical glass A8, the optics glass
The bottom surfaces glass A8 are adsorbed with the film 13;Center 4 is equipped with optical glass B9, and the fronts optical glass B9 are adsorbed with the lower film 14,
Center 4 is embedded into inside lower frame 5;The mechanical structure of lower frame 5 is in " returning " character form structure, and center 4 is embedded into lower frame 5 " time " font knot
On structure position.Lower frame 5 is fixed by movable pin 12 and 3 phase of upper ledge.
Automatic aligning mechanism, including at least four be set to 4 bottom of center automatic aligning mechanism A10, and at least four
A automatic aligning mechanism B11 for being set to 5 bottom of lower frame;
Multi-shaft movement mechanism, including it is set to the Multi-shaft movement mechanism A1 on process box top, and be set under process box
The Multi-shaft movement mechanism B7 in portion;
CCD vision systems, including the CCD vision systems 2 that are set on Multi-shaft movement mechanism A1, and it is set to multiaxis fortune
CCD vision systems 6 on motivation structure B7;
By improvement frame and the layout of positioning mechanism, solves the more complicated positioning mechanism of tradition, cause to occupy
The structure space of process box can not install multiple industrial CCD vision systems in process box simultaneously;It is provided in this embodiment anti-
The two-sided automatic-alignment equipment of semi-automatic exposure machine is welded, can realize two-sided automatic-alignment in same stand-alone device, it is two-sided
Exposure, under conditions of ensureing precision, production capacity promotes one times.
The above described is only a preferred embodiment of the present invention, being not intended to limit the present invention in any form.Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore every content without departing from technical solution of the present invention, equivalent change made by shape according to the present invention, construction and principle
Change, should all be covered by protection scope of the present invention.
Claims (4)
1. a kind of two-sided automatic-alignment method of anti-welding semi-automatic exposure machine, which is characterized in that include the following steps:
(1) process box, including sequentially connected upper ledge, center, lower frame are set;Upper ledge is equipped with optical glass A, the optical glass
The bottom surfaces A are adsorbed with the film;Center is equipped with optical glass B, and the fronts optical glass B are adsorbed with the lower film, and center is embedded into
Inside lower frame;
(2) automatic aligning mechanism is set, including is set to the automatic aligning mechanism A of middle frame bottom, and is set to lower frame bottom
Automatic aligning mechanism B;
(3) Multi-shaft movement mechanism is set, including is set to the Multi-shaft movement mechanism A on process box top, and is set to process box
The Multi-shaft movement mechanism B of lower part;
(4) CCD vision systems are set, including the CCD vision systems being set on Multi-shaft movement mechanism A, and are set to multiaxis
CCD vision systems on motion B;
(5) work is powered up, the upper film is adsorbed on the glass surface of upper ledge and the lower film is adsorbed on center by vacuumizing
On glass surface, pcb board is put on center, and pcb board is supported by the lower film;Upper ledge is mutually closed with lower frame and is pressed, multiaxis is controlled
Each CCD vision systems are moved to designated position by motion, by the CCD visions for being set to the tops Multi-shaft movement mechanism A
System calculates the film and the positive position deviation of pcb board, then controls the automatic aligning mechanism B of lower frame bottom, adjusts center
Pcb board front and upper film automatic aligning are realized in the pcb board position of upper placement;By being set on Multi-shaft movement mechanism B
CCD vision systems, calculate the position deviation of the lower film and pcb board reverse side, then the automatic alignment machine that frame bottom is installed in adjusting
Structure A realizes the reverse side of pcb board and lower film automatic aligning;Realize pcb board front and the upper film, reverse side and lower film automatic precision
Close contraposition, accurate exposure.
2. the two-sided automatic-alignment method of anti-welding semi-automatic exposure machine according to claim 1, which is characterized in that the lower frame
Mechanical structure be in " returning " character form structure, the center is embedded into lower frame and " returns " on character form structure position.
3. the two-sided automatic-alignment method of anti-welding semi-automatic exposure machine according to claim 1, which is characterized in that the lower frame
It is mutually fixed with upper ledge by movable pin.
4. the two-sided automatic-alignment method of anti-welding semi-automatic exposure machine according to claim 1, which is characterized in that including at least
Four CCD vision systems for being set to Multi-shaft movement mechanism A, and be set on Multi-shaft movement mechanism B including at least four
CCD vision systems.
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