CN106959125A - One kind sensing cilium, sensor, clusters of sensors, artificial neuron system, intelligent robot - Google Patents

One kind sensing cilium, sensor, clusters of sensors, artificial neuron system, intelligent robot Download PDF

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Publication number
CN106959125A
CN106959125A CN201710222230.6A CN201710222230A CN106959125A CN 106959125 A CN106959125 A CN 106959125A CN 201710222230 A CN201710222230 A CN 201710222230A CN 106959125 A CN106959125 A CN 106959125A
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resistive layer
cilium
fine shape
sensing cilium
sensing
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CN106959125B (en
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刘伟
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Wenling Hengbao electromechanical Co., Ltd
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刘伟
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G01D5/165Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance by relative movement of a point of contact or actuation and a resistive track
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G01D5/165Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance by relative movement of a point of contact or actuation and a resistive track
    • G01D5/1655Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance by relative movement of a point of contact or actuation and a resistive track more than one point of contact or actuation on one or more tracks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C10/00Adjustable resistors
    • H01C10/02Liquid resistors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)

Abstract

One kind sensing cilium, it is characterised in that:Mainly it is made up of fine shape electrode, resistive layer;The whole of the fine shape electrode of resistive layer parcel;It is flexible on the whole after the fine shape electrode of resistive layer parcel.Sensor, with foregoing sensing cilium.Clusters of sensors, with foregoing sensor.Artificial neuron system, intelligent robot, with foregoing technical scheme.Simple in construction, long lifespan of the invention, it is with low cost, available for artificial intelligence equipment perceptually device.

Description

One kind sensing cilium, sensor, clusters of sensors, artificial neuron system, intelligent machine Device people
Technical field
The present invention relates to sensor, and in particular to one kind sensing cilium, sensor, clusters of sensors, artificial neuron system System, intelligent robot.
Background technology
Sensor is the important perception input equipment of intelligent robot, artificial neural network be existing artificial intelligence more Advanced technology.
Prior art has the disadvantages that:1st, the physics output node of existing sensor is few;2nd, existing sensing implements Reason makes required precision height, high cost, output mostly data signal, and output node number, which is difficult extension, causes itself and artificial neuron The connection of hardware needs complicated circuit.
In order to overcome problem above, the present invention proposes a kind of sensing cilium, and using the sensor of this cilium.
The content of the invention
The present invention invented sensing cilium using it is this sensing cilium sensor construction it is simple, with low cost, output section Point is more.
The present invention has following technology contents.
1st, a kind of sensing cilium, it is characterised in that:Mainly it is made up of fine shape electrode, resistive layer;The fine shape electricity of resistive layer parcel The part of pole;Maximum span of the resistive layer in fine shape electrode axial direction is more than maximum span of the resistive layer in fine shape electrode radially 2 times;The parcel section of the fine shape electrode of resistive layer parcel is flexible on the whole.
2nd, a kind of sensing cilium as described in technology contents 1:Described resistive layer is located at one end of fine shape electrode;Resistive layer The bottom surface at end where the resistive layer of the fine shape electrode of covering.
3rd, a kind of sensing cilium as described in technology contents 1:Described resistive layer is located at the interlude of fine shape electrode.
4th, a kind of sensing cilium as described in technology contents 1:Described resistive layer uses semiconductor fabrication.
5th, a kind of sensing cilium as described in technology contents 1:Described resistive layer parcel section is helical form.
6th, a kind of sensing cilium as described in technology contents 1:Described fine shape electrode is hollow.
7th, a kind of sensing cilium as described in technology contents 1:Described resistive layer is immersed in conducting liquid.
8th, a kind of sensing cilium, it is characterised in that:Mainly it is made up of fine shape electrode, resistive layer;The fine shape electricity of resistive layer parcel The whole of pole;It is flexible on the whole after the fine shape electrode of resistive layer parcel.
9th, a kind of sensing cilium as described in technology contents 7:Described fine shape electrode is hollow.
10th, a kind of sensing cilium as described in technology contents 7:Described fine shape electrode part or all helical forms.
11st, a kind of sensing cilium as described in technology contents 7:Described fine shape electrode is hollow.
12nd, a kind of sensing cilium as described in technology contents 7:Described resistive layer uses semiconductor fabrication.
13rd, a kind of sensing cilium as described in technology contents 7:Described resistive layer has lead connecting region, the region Resistance is less than other regions.
14th, a kind of sensing cilium as described in technology contents 7:Described resistive layer is immersed in conducting liquid.
15th, a kind of sensor, it is characterised in that:With the sensing cilium and conducting liquid described in technology contents 1-14;Lead The resistance layer surface of electro-hydraulic body contact induction cilium;There is current path between conducting liquid and sensing cilium.(conducting liquid with There is electrical potential difference between the fine shape electrode of sensing cilium).
16th, a kind of sensing cilium, it is characterised in that:It is main to be made up of at least 2 sensing ciliums, cavity volume, conducting liquids;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape The maximum span of electrode axial direction is more than 2 times of maximum span of the resistive layer in fine shape electrode radially;The fine shape electricity of resistive layer parcel The parcel section of pole is flexible on the whole;
The resistive layer overlay segment of at least 2 sensing ciliums is penetrated in cavity volume interface intervention cavity volume;Inside at least 2 intervention cavity volumes Sense 2 times that maximum span of the cilium on the vertical line direction at cavity volume interface is more than the average diameter of itself intervention plenum section; Conducting liquid is loaded in cavity volume;The volume of conducting liquid is less than the dischargeable capacity of cavity volume;At least 2 sensing ciliums can be simultaneously Touch conducting liquid;The fine shape electrode of at least 2 sensing ciliums is not directly contacted with conducting liquid.
17th, a kind of state sensor as described in technology contents 16:The quantity of described sensing cilium is at least four, extremely Few 3 sensings ciliums have that ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they are at cavity volume interface simultaneously Vertical line direction on maximum span be more than 2 times of average diameter of itself intervention plenum section, their resistive layer can be simultaneously Touch conducting liquid, their fine shape electrode and be not directly contacted with conducting liquid ' these three technical characteristics.
18th, a kind of sensor, it is characterised in that:It is main to be made up of at least 2 sensing ciliums, cavity volume, conducting liquids;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape The maximum span of electrode axial direction is more than 2 times of maximum span of the resistive layer in fine shape electrode radially;The fine shape electricity of resistive layer parcel The parcel section of pole is flexible on the whole;
The resistive layer overlay segment of at least 2 sensing ciliums is penetrated in cavity volume interface intervention cavity volume;Inside at least 2 intervention cavity volumes Sense 2 times that maximum span of the cilium on the vertical line direction at cavity volume interface is more than the average diameter of itself intervention plenum section; Conducting liquid fills cavity volume;The fine shape electrode of at least 2 sensing ciliums is not directly contacted with conducting liquid.
19th, a kind of sensor as described in technology contents 18:The quantity of described sensing cilium is at least 4;At least 3 Sense cilium has simultaneously, and ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they hang down cavity volume interface Maximum span on line direction is more than 2 times of the average diameter of itself intervention plenum section, their resistive layer can contact simultaneously Conducting liquid is not directly contacted with to conducting liquid, their fine shape electrode ' these three technical characteristics.
20th, a kind of sensor, it is characterised in that:It is main to sense cilium, at least one electrode, cavity volume, conduction by least 1 Liquid is constituted;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape The maximum span of electrode axial direction is more than 2 times of maximum span of the resistive layer in fine shape electrode radially;The fine shape electricity of resistive layer parcel The parcel section of pole is flexible on the whole;
The resistive layer overlay segment of at least 1 sensing cilium is penetrated in cavity volume interface intervention cavity volume;Inside at least 1 intervention cavity volume Sense 2 times that maximum span of the cilium on the vertical line direction at cavity volume interface is more than the average diameter of itself intervention plenum section; At least 1 strip electrode penetrate cavity volume interface intervention cavity volume in or with cavity volume coboundary;Conducting liquid is loaded in cavity volume;Conducting liquid Volume be less than cavity volume dischargeable capacity;At least one electrode and at least 1 sensing cilium can touch conducting liquid simultaneously; The fine shape electrode of at least 1 sensing cilium is not directly contacted with conducting liquid.
21st, a kind of sensor as described in technology contents 20:The quantity of described sensing cilium is more than 4;At least 3 senses Cilium is answered while have ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they cavity volume interface vertical line Maximum span on direction is more than 2 times of the average diameter of itself intervention plenum section, their resistive layer can touch simultaneously Conducting liquid, their fine shape electrode are not directly contacted with conducting liquid ' these three technical characteristics.
22nd, a kind of sensor, it is characterised in that:It is main to sense cilium, at least one electrode, cavity volume, conduction by least 1 Liquid is constituted;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape The maximum span of electrode axial direction is more than 2 times of maximum span of the resistive layer in fine shape electrode radially;The fine shape electricity of resistive layer parcel The parcel section of pole is flexible on the whole;
The resistive layer overlay segment of at least 1 sensing cilium is penetrated in cavity volume interface intervention cavity volume;Inside at least 1 intervention cavity volume Sense 2 times that maximum span of the cilium on the vertical line direction at cavity volume interface is more than the average diameter of itself intervention plenum section; At least one electrode penetrate cavity volume interface intervention cavity volume in or with cavity volume coboundary;Conducting liquid fills cavity volume.
23rd, a kind of sensor as described in technology contents 22:The quantity of described sensing cilium is more than 4;At least 3 senses Cilium is answered while have ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they cavity volume interface vertical line Maximum span on direction is more than 2 times of the average diameter of itself intervention plenum section, their resistive layer can touch simultaneously Conducting liquid, their fine shape electrode are not directly contacted with conducting liquid ' these three technical characteristics.
24th, a kind of sensor, it is characterised in that:Increase an elasticity on the basis of scheme described in technology contents 15-23 Film;Elastic membrane and cavity volume coboundary.(fluctuation of elastic membrane can be transmitted on sensing cilium by conducting liquid, according to different designs Different purposes are done, the technical program can be as motion sensor or sound transducer, but is not excluded for other usages).
25th, a kind of sensor as described in technology contents 24:Described cavity volume is spiral tube chamber;Elastic membrane and spiral tube chamber Exit face coboundary;Sense cilium helix tube in the radial direction on maximum span be more than itself intervention plenum section 2 times of average diameter.(fluctuation of elastic membrane can be transmitted on sensing cilium by conducting liquid, and different use are done according to different designs On the way, the technical program can be as motion sensor or sound transducer, but is not excluded for other usages).
26th, a kind of sensor as described in technology contents 25:Described cavity volume is the spiral tube chamber of caliber gradual change.It is (main As sound transducer, but it is not excluded for other usages).
27th, a kind of sensor as described in technology contents 26:Described cavity volume is spiral case cavity-like.(according to different designs Different purposes can be done, when spiral case describes chamber in the case where conducting liquid volume is less than cavity volume dischargeable capacity, appropriate design is led The volume of electro-hydraulic body so that when tail of cavity body has a small air cavity, be particularly suitable for sound transducer, its principle is mould Apery ear;It is not excluded for other usages).
28th, a kind of sensor, it is characterised in that:Increase has enlarged cavity on the basis of technology contents 25;Enlarged cavity is main It is made up of the elastic membrane described in eardrum, tympanic canal, technology contents 7;Tympanic canal caliber is gradual change;It is big that eardrum is located at tympanic canal cross-sectional area One end;Elastic membrane is located at the small one end of tympanic canal cross-sectional area;Elastic membrane side and container coboundary, elastic membrane opposite side and amplification Chamber coboundary.(can be used for the sensing of sound, however not excluded that other usages).
29th, a kind of sensor as described in technology contents 28:Eardrum center also has heavy ball.(it can be used for moving, shake Sensing, however not excluded that other usages).
30th, a kind of sensor, it is characterised in that:Chosen any one kind of them in technology contents 15-29 sensor, increase at least one Earth resistance;The fine shape electrode of the sensing cilium of sensor is connected with the ungrounded end of earth resistance.
31st, a kind of sensor, it is characterised in that:Chosen any one kind of them in technology contents 15-30 sensor, increase at least one Voltage signal amplifying device or original paper;By fine shape electrode and the voltage signal amplifying device of the sensing cilium of sensor or original paper Voltage signal inputs are connected.
32nd, a kind of sensor, it is characterised in that:Chosen any one kind of them in technology contents 15-31 sensor, increase at least one Resistance bridge;The connection end of fine shape electrode as the variable resistor of the sensing cilium of sensor is connected with resistance bridge.
33rd, a kind of sensor application circuit, it is characterised in that:A kind of sensing is reasonably selected in technology contents 15-32 Device, is reasonably connected to the sound induced signal input node of circuit.
34th, a kind of sensor application circuit, it is characterised in that:A kind of sensing is reasonably selected in technology contents 15-32 Device, is reasonably connected to the motional induction signal input node of circuit.
35th, a kind of sensor application circuit, it is characterised in that:A kind of sensing is reasonably selected in technology contents 15-32 Device, is reasonably connected to the attitude induced signal input node of circuit.
36th, a kind of sensor application equipment, it is characterised in that:Sensor with technology contents 15-32.
37th, a kind of sensor application equipment, it is characterised in that:Sensor application circuit with technology contents 33-35.
Technology contents illustrate and its advantage.
Central principle.
Principle 1:In the case where conducting liquid volume is less than cavity volume dischargeable capacity, the present invention is equal in electrical principles Regulate and control resistance or the resistance group of resistance by conducting liquid, the main distribution using resistivity is come expression status data;The original of change Reason be the resistive layer sensed on cilium can be considered as it is many in parallel after be connected on conducting liquid and sensing cilium fine shape electrode it Between resistance, change when conducting liquid is moved between the resistive layer of conducting liquid and fine shape electrode be electrically connected volume, area, Length and cause change in resistance (length in parallel of resistive layer is changed) between electrode, so as to influence all-in resistance;It is noticeable It is:In the case that conducting liquid volume is less than cavity volume dischargeable capacity, the present invention needs those skilled in the art when implementing design With reference to common knowledge, prior art, technology convention, purpose of design, according to cavity volume, sensing cilium, electrode, cavity volume interface layout To determine the occurrence of conducting liquid volume, to avoid losing or weaken technique effect, if rough use hundred in the present invention Point than limiting conducting liquid volume, be then difficult to the purpose for reaching good protection, this be it will be appreciated by those skilled in the art that 's.
Principle 2:In the case where conducting liquid is full of cavity volume, because the resistive layer on sensing cilium can be considered as much simultaneously The resistance between conducting liquid and the fine shape electrode for sensing cilium is associated in, sensing cilium deformation causes piezoresistive effect to change parallel connection Total resistance, the resistance variations or the resistivity distribution of resistance group that the deformation that cilium relies primarily on the motive force cilium of fluid is produced become Change (weaker than the change of principle 1 many a lot, difference is very big) and carry out expression status data.
By principle 1,2 this understand the sensing cilium of the present invention can be used for the testing the speed of trickle current (make sensing cilium with Electric path is formed between tested water), the resistive layer that appropriate semi-conducting material manufacturing senses cilium is chosen, can be also used for surveying Temperature, light (coordinating transparent vessel, electrically conducting transparent liquid), pressure, color (coordinating transparent vessel, electrically conducting transparent liquid) etc. (coordinate Appropriate conducting liquid).
Words and phrases are explained:' cavity volume ' refers to the space with carrying capacity, it can be single container inner chamber or Receiving space with multiple element, except should be noted that cloth is not in the know when cavity volume is designed, it is further noted that selection, necessary When can be without prejudice to appropriate design be carried out under the premise of common knowledge and technical purpose from appropriate conductive material;
' dischargeable capacity ' refers to the part for allowing conducting liquid to be full of in cavity volume;
' coboundary ' refers to that signified body surface is also the part at chamber interface (cavity volume interface or enlarged cavity interface), i.e., signified thing Body surface face perceives instinctively to be not present and significantly penetrated with the chamber interface (cavity volume interface or enlarged cavity interface) around signified object Sense, people instinctively will be considered that signified body surface is the part on chamber surface from perception;
' resistive layer ' refers to that resistive layer is preferably film (such as carbon resistance in the layer with electronics mobile obstacle ability, the present invention Film, metallic resistance film), thin slice (such as pellet resistance material), thin layer (layer for the generation that is such as vapor-deposited) shape, but be also not excluded for Other qualified shapes;Resistive layer can be that good conductor can also be semiconductor, and resistive layer does not include superconductor and insulation Body (not including thin to the insulating materials thin layer that may be constructed electron tunnel knot and passed through by electronics), resistive layer can be single thing Texture into can also be mixture constitute (such as many kinds of substance is made by mixing and such as in the resistance being made with semi-conducting material Mixing partially or fully is carried out on layer), resistive layer can be that single layer structure can also be that sandwich construction (should ensure that surfaces externally and internally Between it is conductive), resistance layer surface can be it is smooth can also be out-of-flatness (shape that can such as process, etching, such as Spontaneous burr, dimpling in processing), resistive layer of the invention can be it is single can also be it is multiple (such as:One resistance Layer is total to boundary with multiple resistive layer coboundaries, a cavity volume and a resistive layer simultaneously with multiple cavity volume coboundaries, one simultaneously Face), ' resistive layer ' can have a small amount of insulating barrier in the present invention, but insulating barrier can not be allowed to cover resistive layer comprehensively, and want Resistive layer inner surface is set to touch conducting liquid, it should be noted that the layer that insulating materials is made covers resistive layer comprehensively But the thin feasible program for belonging to the present invention to the situation that may be constructed electron tunnel knot and can be passed through by electronics;
' grounding resistor ' refers to that the one end commonly used in electronics connects the resistor of place (GND) in circuit, can be resistance Being worth changeless resistor or the adjustable resistor of resistance value, (non-change random at any time is protected for a long time after adjusting Resistance value is held without the resistor changed greatly);Grounding resistor can be integrated in attitude transducer (in non-cavity volume), can also be only It is vertical to be placed in application circuit;
Definition of ' fine shape ' dictionary to ' fibre ' is that ' tiny ' its meaning is close to two dimensions and a dimension chi The very little statement with the noticeably greater than three-dimensional body of another two dimension, because not specific formula can be followed, is not also counted specifically Value can be followed, therefore can determine that this class vocabulary is defined according to the intuition of the mankind, and such dependence mankind intuition is come The non-accurate vocabulary judged also relies on analogy natural object just like ' bulk ', ' sheet ', ' tabular ', ' film-form ', ' pyriform ' etc. And the form defined, because this is the non-precision word that the whole mankind is used in conjunction with extensively, also without rigorous theory to such shape Body provides strict difinition, the use of such word is that, under the pressure of human sciences and linguistic reality, therefore this paper reader should not be with ' fine shape ' be fuzzy sets be by negative the application, judge one object whether have fibre shape feature when also should be according to most people The intuition pattern of class is judged;As the equivalent variation of form, it is equal in know-why, technique effect with the present invention's In the case of, if a surface had resistive layer electrode its by resistive layer covering part have ' fine shape ' form should just return Belong to of the invention signified ' fine shape electrode ', fine shape thing there may be bifurcated, interweave form dendroid, it is netted etc., in the present invention ' fine shape electrode ' preferable shape is that (radius is diminishing cylindric for hair shape《Such as the e in accompanying drawing 1》);
' electrode ' refers to electric conductivity that better than the attachment that the good conductor material of resistive layer is made electrode can be with non-thread Shape part still should show as wire in its part covered by resistive layer, and the preferred high conductive material of electrode is made, The feasibility of the present invention is not destroyed, the electric conductivity of electrode is more strong better in the case of stability, electrode can be one with wire Body;
' conducting liquid ' refers to the high fluidity material with preferable conductive capability, and conducting liquid can be that simple substance can also be mixed Compound, such as liquid metal, electrolyte, resistor fluid, water, the liquid with conductive capability of many kinds of substance composition etc..
Special instruction 1:The present invention is typically chosen material (mixture or simple substance) conduct that electric conductivity is inferior to conducting liquid Resistive layer, obtains larger resistance variations speed and gradient during so as to posture changing;Using electric conductivity better than conducting liquid Material is as the situation of resistive layer, and the resistance variations speed and gradient obtained during posture changing is smaller.
Special instruction 2:Entitled ' the attitude biography that can be used for artificial intelligence equipment attitude to sense of the present invention and the present inventor Sensor, cluster, using ', the scheme of Patent No. ' 2014206903661 ' have a similarity, sensing cilium of the invention can be with Regard as ' 2014206903661 ' numbers application in electrode and resistive layer combination, still ' 2014206903661 ' numbers application in Sensing cilium and cilium elasticity are not referred to, so the application that the application applies with ' 2014206903661 ' numbers and non-fully repeated.
Special instruction 3:The present invention predominantly has machine learning ability artificial neuron hardware and created;But it is not excluded for using In other circuits.
Special instruction 4:No matter the designer of sensor, the producer, user are intentionally or accidentally set in cluster unit (a certain component is not provided with certain cavity volume of such as certain cluster loses the cavity volume for bad, dispersing electrode, invalid sensing cilium, bad element Function or effect is gone to weaken), as long as unit has technical scheme in its sensor, then it should be regarded as the present invention's Technical scheme.
Special instruction 5:Due to Chinese Complex Flexible the characteristics of, the intention of inventor and the understanding of reader occur unavoidably Deviation, is used as the good will prompting to those skilled in the art:Prior art, common knowledge are combined in the application design present invention Be designed, rather than the inflexible literal meaning according to the present invention implementing { and such as:It should be noted that during present invention application design Chemistry, electrochemical relationship between material;Again such as:Fine shape electrode and electricity in reduction cilium are should be noted that during present invention application design Resistance layer constitutes the contact resistance of connection;And such as increase cilium quantity of the invention, raising precision are higher, increase can perceive shape State;The volume of conducting liquid is such as correctly configured according to electrode, the structure of cavity volume, quantity, geometric layout, sensing demand again;Again Such as:Apply insulation crust, shielding casing outside resistive layer, shell, increase enhancement layer outside resistive layer;Etc. };Also Be say the present patent application file reading should stand with common knowledge, understand prior art, understand technology convention, with bright The angle of those skilled in the art of true design requirement, this hair is understood in the premise without prejudice to final technical purpose of the invention Bright application documents.
Beneficial effects of the present invention:Simple in construction, long lifespan of the invention, it is with low cost, make available for artificial intelligence equipment For sensing device.
Brief description of the drawings
Fig. 1 is the schematic diagram of several (not all) exemplary forms of cilium of the present invention.
Fig. 2 is the schematic diagram of an embodiment of the invention.
Fig. 3 is the schematic diagram of an embodiment of the invention.
Fig. 4 is the schematic diagram of an embodiment of the invention.
Fig. 5 is the schematic diagram of an embodiment of the invention.
Fig. 6 is the schematic diagram of an embodiment of the invention.
Fig. 7 is the schematic diagram of an embodiment of the invention.
Fig. 8 is the schematic diagram of an embodiment of the invention.
Fig. 9 is the schematic diagram of an embodiment of the invention.
Figure 10 is the schematic diagram of an embodiment of the invention.
Figure 11 is the schematic diagram of an embodiment of the invention.
Figure 12 is the schematic diagram of an embodiment of the invention.
Figure 13 is the schematic diagram of an embodiment of the invention.
Figure 14 is the schematic diagram of an embodiment of the invention.
Figure 15 is the schematic diagram of several equivalent variation (not all) exemplary forms of cilium of the present invention.
Embodiment
With reference to embodiment, the invention will be further described.
Embodiment 1, several forms for sensing ciliums as shown in a, b, c, d, e, f in Fig. 1;
Sensing cilium a is made up of fine shape electrode a1 and resistive layer a10, the fine shape electrode a1 of resistive layer a10 coverings one end;
Sensing cilium b is made up of fine shape electrode b1 and resistive layer b10, the fine shape electrode b1 of resistive layer b10 coverings stage casing;
Sensing cilium c is made up of fine shape electrode c1 and resistive layer c10, and fine shape electrode c10 one end is spherical, resistive layer c10 coverings Fine shape electrode c1 ball end;
Sensing cilium d is made up of fine shape electrode d1 and resistive layer d10, and fine shape electrode d10 one end is pointed, resistive layer d10 coverings Fine shape electrode d1 tip;
Sensing cilium e is made up of fine shape electrode e1 and resistive layer e10, the fine shape electrode e1 of resistive layer e10 coverings one end;
Sensing cilium f is made up of fine shape electrode f1 and resistive layer f10, the fine shape electrode e1 of resistive layer e10 coverings whole, resistive layer F10 has lead connecting region f11, and the position resistive layer f10 where lead connecting region f11 is very thin.
A kind of sensor main of embodiment 2, such as Fig. 2 will be by container S20, sensing cilium S21, sensing cilium S23, conduction liquid Body S24, earth resistance RG, amplifier F, output node VS21, power input VCC, power supply place GND are constituted;
Sensing cilium S21 resistive layer S211 overlay segments are penetrated in cavity volume interface intervention cavity volume;
Sensing cilium S23 resistive layer S231 overlay segments are penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium S21, S23 on the vertical line direction at container S20 cavity volumes interface and be more than their own intervention appearance 2 times of the average diameter of cavity segment;
Conducting liquid S24 fills container S20 cavity volumes;
Sensing cilium S21, S23 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S23 fine shape electrode S230 is connected with power input VCC;
Sensing cilium S21 fine shape electrode S210 is connected with earth resistance RG;
Sensing cilium S21 fine shape electrode S210 is connected with amplifier F input point;
Output node VS21 is connected with amplifier F output node;
Because the inertia of conducting liquid, conducting liquid can be moved during the sensor motion of this embodiment, sensing cilium is promoted S21, S23 occur the resistance variations of resistive layer S211, S231 on elastic deformation, sensing cilium S21, S23 and then cause sensing Voltage value changes on cilium S21 fibre shape electrodes, are exported after amplifier F amplification from output node VS21.
A kind of sensor main of embodiment 3, such as Fig. 3 is fine by container S30, sensing cilium S31, sensing cilium S32, sensing Hair S33, conducting liquid S34, two earth resistance RG, two amplifier F, output node VS31, output node VS32, power supplys are defeated Enter VCC, power supply place GND composition;
Sensing cilium S31, S32, S33 resistive layer overlay segment are penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium S31, S32, S33 on the vertical line direction at container S30 cavity volumes interface more than their own to be situated between Enter 2 times of the average diameter of plenum section;
Conducting liquid S34 fills container S30 cavity volumes;
Sensing cilium S31, S32, S33 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S33 fine shape electrode is connected with power input VCC;
Sensing cilium S31, S32 fine shape electrode are connected with earth resistance RG;
Input point of sensing cilium S31, S32 fine shape electrode respectively with an amplifier F is connected;
The output node of output node VS21, VS32 respectively with an amplifier F is connected;
Because the inertia of conducting liquid, conducting liquid can be moved during the sensor motion of this embodiment, sensing cilium is promoted S31, S32, S33 occur the resistance variations of the resistive layer on elastic deformation, sensing cilium S31, S32, S33 and then cause sensing fine Voltage value changes on the fine shape electrode of hair S31, S32, are exported after amplifier F amplification from output node VS31, VS32.
A kind of sensor main of embodiment 4, such as Fig. 4 is fine by container S40, sensing cilium S41, sensing cilium S42, sensing Hair S43, conducting liquid S44, two earth resistance RG, two amplifier F, output node VS41, output node VS42, power supplys are defeated Enter VCC, power supply place GND composition;
Sensing cilium S41, S42, S43 resistive layer overlay segment are penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium S41, S42, S43 on the vertical line direction at container S40 cavity volumes interface more than their own to be situated between Enter 2 times of the average diameter of plenum section;
Conducting liquid S44 is in container S40 cavity volumes, and conducting liquid S44 volume is less than the dischargeable capacity of container S40 cavity volumes;
Sensing cilium S41, S42, S43 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S43 fine shape electrode is connected with power input VCC;
Sensing cilium S41, S42 fine shape electrode are connected with earth resistance RG;
Input point of sensing cilium S41, S42 fine shape electrode respectively with an amplifier F is connected;
The output node of output node VS21, VS32 respectively with an amplifier F is connected;
The sensor motion of this embodiment or attitudes vibration are due to the inertia of conducting liquid, and conducting liquid can be moved, and change sense Answer and be electrically connected area between cilium S41, S42, S43, cause the magnitude of voltage sensed on the fine shape electrode of cilium S41, S42 to become Change, exported after amplifier F amplification from output node VS41, VS42.
A kind of sensor main of embodiment 5, such as Fig. 5 is fine by container S50, sensing cilium S51, sensing cilium S52, sensing Hair S53, conducting liquid S54, two earth resistance RG, two amplifier F, output node VS51, output node VS52, power supplys are defeated Enter VCC, power supply place GND composition;
Sensing cilium S51, S52, S53 resistive layer overlay segment are penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium S51, S52, S53 on the vertical line direction at container S50 cavity volumes interface more than their own to be situated between Enter 2 times of the average diameter of plenum section;
Conducting liquid S54 is in container S50 cavity volumes, and conducting liquid S54 volume is less than the dischargeable capacity of container S50 cavity volumes;
Sensing cilium S51, S52, S53 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S53 fine shape electrode is connected with power input VCC;
Sensing cilium S51, S52 fine shape electrode are connected with earth resistance RG;
Sensing cilium S51, S52 fine shape electrode are connected with output node VS51, VS52 respectively;
The sensor motion of this embodiment or attitudes vibration are due to the inertia of conducting liquid, and conducting liquid can be moved, and change sense Answer and be electrically connected area between cilium S51, S52, S53, cause the magnitude of voltage sensed on the fine shape electrode of cilium S51, S52 to become Change, signal is exported from output node VS51, VS52.
A kind of sensor main of embodiment 6, such as Fig. 6 will be by container S60, sensing cilium S61, sensing cilium S62, electrode S63, conducting liquid S64, two earth resistance RG, two amplifier F, output node VS61, output node VS62, power inputs VCC, power supply place GND are constituted;
Sensing cilium S61, S62, resistive layer overlay segment penetrate in cavity volume interface intervention cavity volume;
In the saturating cavity volume interface intervention cavity volumes of electrode S63;
Sense the maximum span of cilium S61, S62 on the vertical line direction at container S60 cavity volumes interface and be more than their own intervention appearance 2 times of the average diameter of cavity segment;
Conducting liquid S64 is in container S60 cavity volumes, and conducting liquid S64 volume is less than the dischargeable capacity of container S60 cavity volumes;
Sensing cilium S61, S62 fine shape electrode are not directly contacted with conducting liquid;
Electrode S63 is connected with power input VCC;
Sensing cilium S61, S62 fine shape electrode are connected with earth resistance RG;
Sensing cilium S61, S62 fine shape electrode are connected with output node VS61, VS62 respectively;
The sensor motion of this embodiment or attitudes vibration are due to the inertia of conducting liquid, and conducting liquid can be moved, and change sense Answer and be electrically connected area between cilium S61, S62 and electrode S63, cause to sense the voltage on the fine shape electrode of cilium S61, S62 Value changes, signal is exported from output node VS61, VS62.
A kind of sensor main of embodiment 7, such as Fig. 7 will be by container S70, sensing cilium S71, electrode S72, sensing cilium S73, conducting liquid S74, two earth resistance RG, two amplifier F, output node VS71, output node VS72, power inputs VCC, power supply place GND are constituted;
Sensing cilium S71, S73, resistive layer overlay segment penetrate in cavity volume interface intervention cavity volume;
In the saturating cavity volume interface intervention cavity volumes of electrode S72;
Sense cilium S71, S73, the maximum span on the vertical line direction at container S70 cavity volumes interface to be more than their own intervention and hold 2 times of the average diameter of cavity segment;
Conducting liquid S74 is in container S70 cavity volumes, and conducting liquid S74 volume is less than the dischargeable capacity of container S70 cavity volumes;
Sensing cilium S71, S73 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S73 fine shape electrode is connected with power input VCC;
Sensing cilium S71, electrode S73 fine shape electrode are connected with earth resistance RG;
Sensing cilium S71 fine shape electrode is connected with output node VS71 respectively;
Electrode S72 is connected with output node VS72;
The sensor motion of this embodiment or attitudes vibration are due to the inertia of conducting liquid, and conducting liquid can be moved, and change sense Answer cilium S71, S73, electrode S63 to be electrically connected area between them, cause on the fine shape electrode of sensing cilium S71, electrode S72 Voltage value changes, signal from output node VS61, VS62 export.
A kind of sensor main of embodiment 8, such as Fig. 8 will be by container S80, sensing cilium S81, electrode S82, sensing cilium S83, conducting liquid S84, two earth resistance RG, two amplifier F, output node VS81, output node VS82, power inputs VCC, power supply place GND are constituted;
Sensing cilium S81, S83, resistive layer overlay segment penetrate in cavity volume interface intervention cavity volume;
In the saturating cavity volume interface intervention cavity volumes of electrode S82;
Sense cilium S81, S83, the maximum span on the vertical line direction at container S70 cavity volumes interface to be more than their own intervention and hold 2 times of the average diameter of cavity segment;
Conducting liquid S84 is in container S80 cavity volumes, and conducting liquid S84 volume is less than the dischargeable capacity of container S80 cavity volumes;
Sensing cilium S81, S83 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S83 fine shape electrode is connected with power input VCC;
Sensing cilium S81, electrode S83 fine shape electrode are connected with earth resistance RG;
Sensing cilium S81 fine shape electrode is connected with output node VS81 respectively;
Electrode S82 is connected with output node VS82;
The sensor motion of this embodiment or attitudes vibration are due to the inertia of conducting liquid, and conducting liquid can be moved, and promote sense Fibre swing is answered, changes resistivity between sensing cilium S81, S83 and conducting liquid S84, causes sensing cilium S81, electrode S82 Voltage value changes on fine shape electrode, signal is exported from output node VS81, VS82.
A kind of sensor main of embodiment 9, such as Fig. 9 will be by strombuliform container S90, sensing cilium S91, sensing cilium S92, sensing cilium S93, conducting liquid S94, two earth resistance RG, two amplifier F, output node VS91, output nodes VS92, power input VCC, power supply place GND, elastic membrane S95 are constituted;
Elastic membrane S95 is enclosed at container S90 spiral mouth;
Sensing cilium S91, S92, S93 resistive layer overlay segment are penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium S91, S92, S93 on the vertical line direction at container S50 cavity volumes interface more than their own to be situated between Enter 2 times of the average diameter of plenum section;
Conducting liquid S94 is in container S90 cavity volumes, and conducting liquid S94 volume is less than the dischargeable capacity of container S90 cavity volumes, Because container S90 cavity volume is spiral case shape, the micro-cavities of its afterbody are mainly because liquid level surface tension and pressure are kept;
Sensing cilium S91, S92, S93 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium S93 fine shape electrode is connected with power input VCC;
Sensing cilium S91, S92 fine shape electrode are connected with earth resistance RG;
Sensing cilium S91, S92 fine shape electrode are connected with output node VS91, VS92 respectively;
The sensor of this embodiment is when external sound passes to elastic membrane S95, and conducting liquid can be moved, and promotes sensing cilium S91, S92, S93 are swung, and cause the resistance variations for sensing cilium S91, S92 resistive layer, cause the fine shape of sensing cilium S91, S92 Voltage value changes on electrode, are exported after amplifier F amplification from output node VS91, VS92.
A kind of sensor main of embodiment 10, such as Figure 10 will be by strombuliform container Sa0, sensing cilium Sa1, sensing cilium Sa2, sensing cilium Sa3, conducting liquid Sa4, two earth resistance RG, two amplifier F, output node VSa1, output nodes VSa2, power input VCC, power supply place GND, elastic membrane Sa5 are constituted;
Elastic membrane Sa5 is enclosed at container Sa0 spiral mouth;
Sensing cilium Sa1, Sa2, Sa3 resistive layer overlay segment are penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium Sa1, Sa2, Sa3 on the vertical line direction at container S50 cavity volumes interface more than their own to be situated between Enter 2 times of the average diameter of plenum section;
Conducting liquid Sa4 is filled in container Sa0 cavity volumes;
Sensing cilium Sa1, Sa2, Sa3 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium Sa3 fine shape electrode is connected with power input VCC;
Sensing cilium Sa1, Sa2 fine shape electrode are connected with earth resistance RG;
The input pin for sensing cilium Sa1, Sa2 each amplifier F of fine shape electrode is connected;
The output pin of output node VSa1, VSa2 respectively with 1 amplifier F is with being connected;
The sensor of this embodiment is in motion, and due to the inertia of conducting liquid, conducting liquid can be moved, and promotes sensing cilium Sa1, Sa2, Sa3 are swung, and cause the resistance variations for sensing cilium Sa1, Sa2 resistive layer, cause the fine shape of sensing cilium Sa1, Sa2 Voltage value changes on electrode, are exported after amplifier F amplification from output node VSa1, VSa2.
A kind of sensor main of embodiment 11, such as Figure 11 will be by strombuliform container Sb0, sensing cilium Sb1, sensing cilium Sb2, electrode Sb3, conducting liquid Sb4, two earth resistance RG, two amplifier F, output node VSb1, output node VSb2, Power input VCC, power supply place GND, elastic membrane Sb5 are constituted;
Elastic membrane Sb5 is enclosed at container Sb0 spiral mouth;
Sensing cilium Sb1, Sb2 resistive layer overlay segment are penetrated in cavity volume interface intervention cavity volume;
Electrode Sb3 is penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium Sb1, Sb2 on the vertical line direction at container S50 cavity volumes interface and be more than their own intervention appearance 2 times of the average diameter of cavity segment;
Conducting liquid Sb4 is filled in container Sb0 cavity volumes;
Sensing cilium Sb1, Sb2 fine shape electrode are not directly contacted with conducting liquid;
Electrode Sb3 is connected with power input VCC;
Sensing cilium Sb1, Sb2 fine shape electrode are connected with earth resistance RG;
The input pin for sensing cilium Sb1, Sb2 each amplifier F of fine shape electrode is connected;
The output pin of output node VSb1, VSb2 respectively with 1 amplifier F is with being connected;
The sensor of this embodiment is in motion, and due to the inertia of conducting liquid, conducting liquid can be moved, and promotes sensing cilium Sb1, Sb2 are swung, and cause the resistance variations for sensing cilium Sb1, Sb2 resistive layer, cause the fine shape electrode of sensing cilium Sb1, Sb2 On voltage value changes, after amplifier F amplification from output node VSb1, VSb2 export;Thoughts are gone back in this embodiment Cilium Sb8, Sb9 is answered not to be repeated to sketch.
Liquid Sc4, elastic membrane Sc5 are filled with embodiment 12, such as Sc0 of Figure 12 spiral shells shell vessel and is enclosed in container Sc0 Spiral mouth at, also collectively form enlarged cavity Sc65 with eardrum Sc6 on the outside of elastic membrane Sc5;For the summary of problem, this implementation is real Example does not draw the other parts such as electrode, amplifier.
Liquid Sd4, elastic membrane Sd5 are filled with embodiment 13, such as Sd0 of Figure 13 spiral shells shell vessel and is enclosed in container Sd0 Spiral mouth at, also being collectively formed with eardrum Sd6 on the outside of elastic membrane Sd5 has heavy ball Sd7 on enlarged cavity Sd65, eardrum Sd6;For This embodiment of the summary of problem does not draw the other parts such as electrode, amplifier.
A kind of sensor main of embodiment 14, such as Figure 14 will be by container Se0, sensing cilium Se1, sensing cilium Se3, conduction Liquid Se4, resistance R1, R3, adjustable resistance R2, output node VSe1+, VSe1+, power input VCC, power supply place GND are constituted;
Sensing cilium Se1 resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume;
Sensing cilium Se3 resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume;
Sense the maximum span of cilium Se1, Se3 on the vertical line direction at container Se0 cavity volumes interface and be more than their own intervention appearance 2 times of the average diameter of cavity segment;
Conducting liquid Se4 fills container Se0 cavity volumes;
Sensing cilium Se1, Se3 fine shape electrode are not directly contacted with conducting liquid;
Sensing cilium Se3 fine shape electrode is connected with power input VCC;
Sensing cilium Se1 fine shape electrode is connected with earth resistance R1;
Sensing cilium Se3 fine shape electrode is connected with adjustable resistance R2;
R1, R2, R3 collectively form electric bridge with sensing cilium Se1, Se3, container Se0, conducting liquid Se4;
Because the inertia of conducting liquid, conducting liquid can be moved during the sensor motion of this embodiment, sensing cilium is promoted Elastic deformation occurs for S21, S23, causes the resistance variations for sensing resistive layer S211, S231 on cilium S21, S23, signal pass through from Output node VSe+, VSe- are exported.
Embodiment 15, as shown in a, b, c, d, e, f in Figure 15 it is several sensing ciliums forms variation;
Sensing cilium g is made up of fine shape electrode g1 and resistive layer g10, the fine shape electrode g1 of resistive layer g10 coverings one end;
Sensing cilium h is made up of fine shape electrode h1 and resistive layer h10, two sections of the fine shape electrode h1 of resistive layer h10 coverings;
Sensing cilium i is made up of fine shape electrode i1 and resistive layer i10, and fine shape electrode i10 one end is spherical, resistive layer i10 coverings Fine shape electrode i1 ball end;
Sensing cilium j is made up of fine shape electrode j1 and resistive layer j10, and fine shape electrode j1, which interweaves, to be shown as netted, and resistive layer j10 covers The fine shape electrode j1 of lid;
Sensing cilium k is made up of fine shape electrode k1 and resistive layer k10, the fine shape electrode k1 of resistive layer k10 coverings one end, resistive layer K10 tree-shaped;
Sensing cilium L is made up of fine shape electrode L1 and resistive layer L10, the fine shape electrode L1 of resistive layer L10 coverings whole, resistive layer L10 has lead connecting region L11, and the position resistive layer L10 where lead connecting region L11 is very thin.
Embodiment 16, an optional embodiment in embodiment 2-14, will have on the basis of selected embodiment The quantity of effect sensing cilium increases to more than 100.
Embodiment 17, an optional embodiment in embodiment 2-14, using the resistive layer on sensing cilium Making material makes container.

Claims (10)

1. one kind sensing cilium, it is characterised in that:Mainly it is made up of fine shape electrode, resistive layer;The fine shape electrode of resistive layer parcel All;It is flexible on the whole after the fine shape electrode of resistive layer parcel.
2. a kind of sensing cilium as claimed in claim 1:Described fine shape electrode is hollow.
3. a kind of sensing cilium as claimed in claim 1:Described fine shape electrode part or all helical forms.
4. a kind of sensing cilium as claimed in claim 1:Described resistive layer uses semiconductor fabrication.
5. a kind of sensing cilium as claimed in claim 1:Described resistive layer has lead connecting region, and the zone resistance is small In other regions.
6. a kind of sensing cilium as claimed in claim 1:Described resistive layer is immersed in conducting liquid.
7. sensor, it is characterised in that:With the sensing cilium as described in claim 1-6.
8. clusters of sensors, it is characterised in that:With sensing cilium as claimed in claim 7.
9. artificial neuron system, it is characterised in that:With the technical scheme as described in claim 1-8.
10. intelligent robot, it is characterised in that:With the technical scheme as described in claim 1-9.
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