The content of the invention
The present invention invented sensing cilium application it is this sensing cilium sensor construction it is simple, with low cost, output section
Point is more.
The present invention has following technology contents.
1st, a kind of sensing cilium, it is characterised in that:Mainly it is made up of fine shape electrode, resistive layer;The fine shape electricity of resistive layer parcel
The part of pole;Maximum span of the resistive layer in fine shape electrode axial direction is more than maximum span of the resistive layer in fine shape electrode radially
2 times;The parcel section of the fine shape electrode of resistive layer parcel has elasticity on the whole.
2nd, a kind of sensing cilium as described in technology contents 1:Described resistive layer is located at one end of fine shape electrode;Resistive layer
The bottom surface at end where the resistive layer of the fine shape electrode of covering.
3rd, a kind of sensing cilium as described in technology contents 1:Described resistive layer is located at the interlude of fine shape electrode.
4th, a kind of sensing cilium as described in technology contents 1:Described resistive layer uses semiconductor fabrication.
5th, a kind of sensing cilium as described in technology contents 1:Described resistive layer parcel section is helical form.
6th, a kind of sensing cilium as described in technology contents 1:Described fine shape electrode is hollow.
7th, a kind of sensing cilium as described in technology contents 1:Described resistive layer is immersed in conducting liquid.
8th, a kind of sensing cilium, it is characterised in that:Mainly it is made up of fine shape electrode, resistive layer;The fine shape electricity of resistive layer parcel
The whole of pole;There is elasticity on the whole after the fine shape electrode of resistive layer parcel.
9th, a kind of sensing cilium as described in technology contents 7:Described fine shape electrode is hollow.
10th, a kind of sensing cilium as described in technology contents 7:Described fine shape electrode part or all helical forms.
11st, a kind of sensing cilium as described in technology contents 7:Described fine shape electrode is hollow.
12nd, a kind of sensing cilium as described in technology contents 7:Described resistive layer uses semiconductor fabrication.
13rd, a kind of sensing cilium as described in technology contents 7:Described resistive layer has lead connecting region, the region
Resistance is less than other regions.
14th, a kind of sensing cilium as described in technology contents 7:Described resistive layer is immersed in conducting liquid.
15th, a kind of sensor, it is characterised in that:With sensing cilium and conducting liquid described in technology contents 1-14;Lead
The resistance layer surface of electro-hydraulic body contact induction cilium;There is current path between conducting liquid and sensing cilium.(conducting liquid with
There is electrical potential difference between the fine shape electrode of sensing cilium).
16th, a kind of sensing cilium, it is characterised in that:It is main to be made up of at least 2 sensing ciliums, cavity volume, conducting liquids;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape
2 times of maximum span more than maximum span of the resistive layer in fine shape electrode radially of electrode axial direction;The fine shape electricity of resistive layer parcel
The parcel section of pole has elasticity on the whole;
The resistive layer overlay segment of at least 2 sensing ciliums is penetrated in cavity volume interface intervention cavity volume;Inside at least 2 intervention cavity volumes
2 times of maximum span of the sensing cilium on the vertical line direction at cavity volume interface more than the average diameter of itself intervention plenum section;
Conducting liquid is loaded in cavity volume;Dischargeable capacity of the volume of conducting liquid less than cavity volume;At least 2 sensing ciliums can be simultaneously
Touch conducting liquid;The fine shape electrode of at least 2 sensing ciliums is not directly contacted with conducting liquid.
17th, a kind of state sensor as described in technology contents 16:The quantity of described sensing cilium is at least 4, extremely
Few 3 sensings ciliums have that ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they are at cavity volume interface simultaneously
Vertical line direction on maximum span more than 2 times of average diameter of itself intervention plenum section, their resistive layer can be simultaneously
Touch conducting liquid, their fine shape electrode and be not directly contacted with conducting liquid ' these three technical characteristics.
18th, a kind of sensor, it is characterised in that:It is main to be made up of at least 2 sensing ciliums, cavity volume, conducting liquids;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape
2 times of maximum span more than maximum span of the resistive layer in fine shape electrode radially of electrode axial direction;The fine shape electricity of resistive layer parcel
The parcel section of pole has elasticity on the whole;
The resistive layer overlay segment of at least 2 sensing ciliums is penetrated in cavity volume interface intervention cavity volume;Inside at least 2 intervention cavity volumes
2 times of maximum span of the sensing cilium on the vertical line direction at cavity volume interface more than the average diameter of itself intervention plenum section;
Conducting liquid fills cavity volume;The fine shape electrode of at least 2 sensing ciliums is not directly contacted with conducting liquid.
19th, a kind of sensor as described in technology contents 18:The quantity of described sensing cilium is at least 4;At least 3
Sense cilium has simultaneously, and ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they hang down cavity volume interface
Maximum span on line direction can be contacted simultaneously more than 2 times of the average diameter of itself intervention plenum section, their resistive layer
Conducting liquid is not directly contacted with to conducting liquid, their fine shape electrode ' these three technical characteristics.
20th, a kind of sensor, it is characterised in that:It is main to sense cilium, at least one electrode, cavity volume, conduction by least 1
Liquid is constituted;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape
2 times of maximum span more than maximum span of the resistive layer in fine shape electrode radially of electrode axial direction;The fine shape electricity of resistive layer parcel
The parcel section of pole has elasticity on the whole;
The resistive layer overlay segment of at least 1 sensing cilium is penetrated in cavity volume interface intervention cavity volume;Inside at least 1 intervention cavity volume
2 times of maximum span of the sensing cilium on the vertical line direction at cavity volume interface more than the average diameter of itself intervention plenum section;
At least 1 strip electrode penetrate cavity volume interface intervention cavity volume in or with cavity volume coboundary;Conducting liquid is loaded in cavity volume;Conducting liquid
Volume less than cavity volume dischargeable capacity;At least one electrode and at least 1 sensing cilium can simultaneously touch conducting liquid;
The fine shape electrode of at least 1 sensing cilium is not directly contacted with conducting liquid.
21st, a kind of sensor as described in technology contents 20:The quantity of described sensing cilium is more than 4;At least 3 senses
Cilium is answered while have ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they cavity volume interface vertical line
Maximum span on direction can be touched simultaneously more than 2 times of the average diameter of itself intervention plenum section, their resistive layer
Conducting liquid, their fine shape electrode are not directly contacted with conducting liquid ' these three technical characteristics.
22nd, a kind of sensor, it is characterised in that:It is main to sense cilium, at least one electrode, cavity volume, conduction by least 1
Liquid is constituted;
Sensing cilium is mainly made up of fine shape electrode, resistive layer;A part for the fine shape electrode of resistive layer parcel;Resistive layer is in fine shape
2 times of maximum span more than maximum span of the resistive layer in fine shape electrode radially of electrode axial direction;The fine shape electricity of resistive layer parcel
The parcel section of pole has elasticity on the whole;
The resistive layer overlay segment of at least 1 sensing cilium is penetrated in cavity volume interface intervention cavity volume;Inside at least 1 intervention cavity volume
2 times of maximum span of the sensing cilium on the vertical line direction at cavity volume interface more than the average diameter of itself intervention plenum section;
At least one electrode penetrate cavity volume interface intervention cavity volume in or with cavity volume coboundary;Conducting liquid fills cavity volume.
23rd, a kind of sensor as described in technology contents 22:The quantity of described sensing cilium is more than 4;At least 3 senses
Cilium is answered while have ' their resistive layer overlay segment is penetrated in cavity volume interface intervention cavity volume, they cavity volume interface vertical line
Maximum span on direction can be touched simultaneously more than 2 times of the average diameter of itself intervention plenum section, their resistive layer
Conducting liquid, their fine shape electrode are not directly contacted with conducting liquid ' these three technical characteristics.
24th, a kind of sensor, it is characterised in that:Increase an elasticity on the basis of scheme described in technology contents 15-23
Film;Elastic membrane and cavity volume coboundary.(can be transmitted on sensing cilium for the fluctuation of elastic membrane by conducting liquid, according to different designs
Different purposes are done, the technical program as motion sensor or sound transducer, but can be not excluded for other usages).
25th, a kind of sensor as described in technology contents 24:Described cavity volume is spiral tube chamber;Elastic membrane and spiral tube chamber
Exit face coboundary;Sensing cilium intervenes plenum section in the maximum span gone up in the radial direction of helix tube more than itself
2 times of average diameter.(can be transmitted on sensing cilium for the fluctuation of elastic membrane by conducting liquid, and different use are done according to different designs
On the way, the technical program as motion sensor or sound transducer, but can be not excluded for other usages).
26th, a kind of sensor as described in technology contents 25:Described cavity volume is the spiral tube chamber of caliber gradual change.It is (main
As sound transducer, but it is not excluded for other usages).
27th, a kind of sensor as described in technology contents 26:Described cavity volume is spiral case cavity-like.(according to different designs
Different purposes can be done, in the case that spiral case describes that chamber is less than cavity volume dischargeable capacity in conducting liquid volume, appropriate design is led
The volume of electro-hydraulic body so that when tail of cavity body has a small air cavity, be particularly suitable for sound transducer, its principle is mould
Apery ear;It is not excluded for other usages).
28th, a kind of sensor, it is characterised in that:Increasing on the basis of technology contents 25 has enlarged cavity;Enlarged cavity is main
Elastic membrane described in eardrum, tympanic canal, technology contents 7 is constituted;Tympanic canal caliber is gradual change;It is big that eardrum is located at tympanic canal cross-sectional area
One end;Elastic membrane is located at the small one end of tympanic canal cross-sectional area;Elastic membrane side and container coboundary, elastic membrane opposite side and amplification
Chamber coboundary.(can be used for the sensing of sound, however not excluded that other usages).
29th, a kind of sensor as described in technology contents 28:Eardrum center also has heavy ball.(can be used for moving, shake
Sensing, however not excluded that other usages).
30th, a kind of sensor, it is characterised in that:Chosen any one kind of them in technology contents 15-29 sensor, increase at least one
Earth resistance;The fine shape electrode of the sensing cilium of sensor is connected with the ungrounded end of earth resistance.
31st, a kind of sensor, it is characterised in that:Chosen any one kind of them in technology contents 15-30 sensor, increase at least one
Voltage signal amplifying device or original paper;By fine shape electrode and the voltage signal amplifying device of the sensing cilium of sensor or original paper
Voltage signal inputs are connected.
32nd, a kind of sensor, it is characterised in that:Chosen any one kind of them in technology contents 15-31 sensor, increase at least one
Resistance bridge;The fine shape electrode of the sensing cilium of sensor is connected as the connection end of variable resistor with resistance bridge.
33rd, a kind of sensor application circuit, it is characterised in that:A kind of sensing is reasonably selected in technology contents 15-32
Device, is reasonably connected to the sound induced signal input node of circuit.
34th, a kind of sensor application circuit, it is characterised in that:A kind of sensing is reasonably selected in technology contents 15-32
Device, is reasonably connected to the motional induction signal input node of circuit.
35th, a kind of sensor application circuit, it is characterised in that:A kind of sensing is reasonably selected in technology contents 15-32
Device, is reasonably connected to the attitude induced signal input node of circuit.
36th, a kind of sensor application equipment, it is characterised in that:Sensor with technology contents 15-32.
37th, a kind of sensor application equipment, it is characterised in that:Sensor application circuit with technology contents 33-35.
Technology contents are illustrated and its advantage.
Central principle.
Principle 1:In the case where conducting liquid volume is less than cavity volume dischargeable capacity, the present invention is equal in electrical principles
Resistance or resistance group by conducting liquid regulation and control resistance, the main distribution using resistivity is come expression status data;The original of change
Reason be the resistive layer sensed on cilium can be considered as after many parallel connections be connected on conducting liquid and sensing cilium fine shape electrode it
Between resistance, change when conducting liquid is moved between the resistive layer of conducting liquid and fine shape electrode be electrically connected volume, area,
Length and cause change in resistance (length in parallel of resistive layer is changed) between electrode, so as to influence all-in resistance;It is noticeable
It is:Less than in the case of cavity volume dischargeable capacity, the present invention needs those skilled in the art when design is implemented to conducting liquid volume
With reference to common knowledge, prior art, technology convention, purpose of design, according to cavity volume, sensing cilium, electrode, cavity volume interface layout
To determine the occurrence of conducting liquid volume, to avoid losing or weakening technique effect, if rough use hundred in the present invention
Point than limiting conducting liquid volume, then the purpose of the protection for being difficult to reach good, this be it will be appreciated by those skilled in the art that
's.
Principle 2:In the case where conducting liquid is full of cavity volume, because the resistive layer on sensing cilium can be considered as much simultaneously
The resistance between the fine shape electrode of conducting liquid and sensing cilium is associated in, sensing cilium deformation causes the piezoresistive effect to change parallel connection
Total resistance, the resistivity distribution of resistance variations or resistance group that the deformation that cilium relies primarily on the motive force cilium of fluid is produced becomes
Change (weaker than the change of principle 1 many a lot, difference is very big) and carry out expression status data.
By principle 1,2 this understand sensing cilium of the invention can be used for the testing the speed of trickle current (make sensing cilium and
Electric path is formed between tested water), the resistive layer that appropriate semi-conducting material manufacturing senses cilium is chosen, can be also used for surveying
Temperature, light (coordinating transparent vessel, electrically conducting transparent liquid), pressure, color (coordinating transparent vessel, electrically conducting transparent liquid) etc. (coordinate
Appropriate conducting liquid).
Words and phrases are explained:' cavity volume ' refers to the space with carrying capacity, it can be single container inner chamber, or
Receiving space with multiple element, except should be noted that cloth is not in the know when cavity volume is designed, it is further noted that selection, necessary
When can carry out appropriate design from appropriate conductive material under the premise of without prejudice to common knowledge and technical purpose;
' dischargeable capacity ' refers to the part for allowing conducting liquid to be full of in cavity volume;
' coboundary ' refer to signified body surface be also chamber interface (cavity volume interface or enlarged cavity interface) a part, i.e., signified thing
Chamber interface (cavity volume interface or enlarged cavity interface) around body surface face and signified object is perceived instinctively in the absence of significantly penetrating
Sense, people instinctively will be considered that signified body surface is the part on chamber surface from perception;
' resistive layer ' refers to the layer with electronics mobile obstacle ability, and resistive layer is preferably film (such as carbon resistance in the present invention
Film, metallic resistance film), thin slice (such as pellet resistance material), thin layer (such as vapour deposition produce layer) shape, but be also not excluded for
Other qualified shapes;Resistive layer can be that good conductor can also be semiconductor, and resistive layer does not include superconductor and insulation
Body (not including thin to the insulating materials thin layer that may be constructed electron tunnel knot and passed through by electronics), resistive layer can be single thing
Texture into can also be mixture constitute (such as many kinds of substance mixing make and such as in the resistance being made with semi-conducting material
Mixing partially or fully is carried out on layer), resistive layer can be that single layer structure can also be that sandwich construction (should ensure that surfaces externally and internally
Between it is conductive), resistance layer surface can be it is smooth can also be out-of-flatness (shape, the etching that can such as process, such as
Spontaneous burr, dimpling in processing), resistive layer of the invention can be it is single can also be it is multiple (such as:One resistance
Layer is total to boundary with multiple resistive layer coboundaries, a cavity volume and a resistive layer simultaneously with multiple cavity volume coboundaries, one simultaneously
Face), ' resistive layer ' can have a small amount of insulating barrier in the present invention, but insulating barrier can not be allowed to cover resistive layer comprehensively, and want
Resistive layer inner surface is set to touch conducting liquid, it should be noted that the layer that insulating materials is made covers resistive layer comprehensively
But it is thin to belong to feasible program of the invention to the situation that may be constructed electron tunnel knot and be passed through by electronics;
' grounding resistor ' refers to the resistor of one end connection commonly used in electronics place (GND) in circuit, can be resistance
(non-change random at any time is protected for a long time after adjusting to be worth changeless resistor, or the adjustable resistor of resistance value
Hold resistor of the resistance value without big change);Grounding resistor can be integrated in attitude transducer (in non-cavity volume), it is also possible to solely
It is vertical to be placed in application circuit;
' fine shape ' definition of dictionary to ' fibre ' is that ' tiny ' its meaning is close to two dimensions and a dimension chi
The very little statement with the noticeably greater than three-dimensional body of another two dimension, due to that can be followed without specific formula, does not also count specifically
Value can be followed, therefore can determine that this class vocabulary is the intuition according to the mankind and defines that such dependence mankind intuition comes
The non-accurate vocabulary for judging also relies on analogy natural object just like ' bulk ', ' sheet ', ' tabular ', ' film-form ', ' pyriform ' etc.
And the form for defining, because this is the non-precision word that the whole mankind is used in conjunction with extensively, also without rigorous theory to such shape
Body provides strict difinition, the use of such word is that, under the pressure of human sciences and linguistic reality, therefore the reader of this paper should not be with
' fine shape ' is that fuzzy sets is, by negative the application, to judge that whether an object also should be according to most people when having a fine shape feature
The intuition pattern of class is judged;As the equivalent variation of form, it is equal to of the invention in know-why, technique effect
In the case of, if surface had resistive layer electrode its by resistive layer covering part there is ' fine shape ' form should just return
Belong to signified ' fine shape electrode ' of the invention, fine shape thing there may be bifurcated, intertexture and form dendroid, netted etc., in the present invention
' fine shape electrode ' preferable shape is that (radius is diminishing cylindric for hair shape《Such as the e in accompanying drawing 1》);
' electrode ' refers to that electrode can be with non-thread better than the attachment that the good conductor material of resistive layer is made with electric conductivity
Shape part still should show as wire in its part covered by resistive layer, and the preferred high conductive material of electrode is made,
The electric conductivity for not destroying electrode in the case of feasibility of the invention, stability is more strong better, and electrode can be one with wire
Body;
' conducting liquid ' refers to the high fluidity material with preferable conductive capability, and conducting liquid can be that simple substance can also be mixed
Compound, such as liquid metal, electrolyte, resistor fluid, water, the liquid with conductive capability of many kinds of substance composition etc..
Special instruction 1:The present invention is typically chosen material (mixture or simple substance) conduct that electric conductivity is inferior to conducting liquid
Resistive layer, obtains larger resistance variations speed and gradient during so as to posture changing;Using electric conductivity better than conducting liquid
Material as resistive layer situation, the resistance variations speed and gradient obtained during posture changing is smaller.
Special instruction 2:The present invention ' can be used for the attitude biography of artificial intelligence equipment attitude sensing with the entitled of the present inventor
Sensor, cluster, using ', the scheme of Patent No. ' 2014206903661 ' have a similarity, sensing cilium of the invention can be with
Regard the combination of electrode and the resistive layer in ' 2014206903661 ' numbers applications as, but in ' 2014206903661 ' numbers applications in
Sensing cilium and cilium elasticity are not referred to, so the application and ' 2014206903661 ' numbers applications and non-fully application repeatedly.
Special instruction 3:The present invention predominantly has machine learning ability artificial neuron hardware and creates;But it is not excluded for using
In other circuits.
Special instruction 4:No matter designer, the producer, the user of sensor are intentionally or accidentally set in cluster unit
(a certain component is not provided with certain cavity volume of such as certain cluster loses the cavity volume for bad, dispersing electrode, invalid sensing cilium, bad element
Function or effect is gone to weaken), as long as unit has technical scheme in its sensor, then should be regarded as of the invention
Technical scheme.
Special instruction 5:Due to Chinese Complex Flexible the characteristics of, the understanding of the intention and reader of inventor occurs unavoidably
Deviation, reminds as the good will to those skilled in the art:Prior art, common knowledge are combined in the application design present invention
It is designed, implements according to literal meaning of the invention { and such as rather than inflexible:Be should be noted that during present invention application design
Chemistry, electrochemical relationship between material;Again such as:Fine shape electrode and electricity in reduction cilium are should be noted that during present invention application design
Resistance layer constitutes the contact resistance of connection;And increase cilium quantity such as of the invention, raising precision are higher, increase can perceive shape
State;The volume of conducting liquid is such as correctly configured according to electrode, the structure of cavity volume, quantity, geometric layout, sensing demand again;Again
Such as:Apply insulation crust, shielding casing outside resistive layer, shell, increase enhancement layer outside resistive layer;Etc. };Also
Be say the present patent application file reading should stand with common knowledge, understand prior art, understand technology convention, with bright
The angle of those skilled in the art of true design requirement, this hair is understood in the premise without prejudice to final technical purpose of the invention
Bright application documents.
Beneficial effects of the present invention:Simple structure of the present invention, long lifespan, it is with low cost, can be used for artificial intelligence equipment work
It is sensing device.
Specific embodiment
With reference to embodiment, the invention will be further described.
Embodiment 1, several forms for sensing ciliums as shown in a, b, c, d, e, f in Fig. 1;
Sensing cilium a is made up of fine shape electrode a1 and resistive layer a10, one end of the fine shape electrode a1 of resistive layer a10 coverings;
Sensing cilium b is made up of fine shape electrode b1 and resistive layer b10, the stage casing of the fine shape electrode b1 of resistive layer b10 coverings;
Sensing cilium c is made up of fine shape electrode c1 and resistive layer c10, and fine shape electrode c10 one end is spherical, resistive layer c10 coverings
The ball end of fine shape electrode c1;
Sensing cilium d is made up of fine shape electrode d1 and resistive layer d10, and fine shape electrode d10 one end is pointed, resistive layer d10 coverings
The tip of fine shape electrode d1;
Sensing cilium e is made up of fine shape electrode e1 and resistive layer e10, one end of the fine shape electrode e1 of resistive layer e10 coverings;
Sensing cilium f is made up of fine shape electrode f1 and resistive layer f10, the whole of the fine shape electrode e1 of resistive layer e10 coverings, resistive layer
F10 has lead connecting region f11, and the position resistive layer f10 where lead connecting region f11 is very thin.
A kind of sensor main of embodiment 2, such as Fig. 2 will be by container S20, sensing cilium S21, sensing cilium S23, conduction liquid
Body S24, earth resistance RG, amplifier F, output node VS21, power input VCC, power supply place GND are constituted;
The resistive layer S211 overlay segments of sensing cilium S21 are penetrated in cavity volume interface intervention cavity volume;
The resistive layer S231 overlay segments of sensing cilium S23 are penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium S21, S23 on the vertical line direction at container S20 cavity volumes interface is intervened more than their own and held
2 times of the average diameter of cavity segment;
Conducting liquid S24 fills container S20 cavity volumes;
The fine shape electrode of sensing cilium S21, S23 is not directly contacted with conducting liquid;
The fine shape electrode S230 of sensing cilium S23 is connected with power input VCC;
The fine shape electrode S210 of sensing cilium S21 is connected with earth resistance RG;
The fine shape electrode S210 of sensing cilium S21 is connected with the input point of amplifier F;
Output node VS21 is connected with the output node of amplifier F;
Because the inertia of conducting liquid, conducting liquid can be moved when the sensor of this embodiment is moved, sensing cilium is promoted
There is elastic deformation in S21, S23, sense the resistance variations of resistive layer S211, S231 on cilium S21, S23 and then cause sensing
Voltage value changes on cilium S21 fibre shape electrodes, by being exported from output node VS21 after the amplification of amplifier F.
A kind of sensor main of embodiment 3, such as Fig. 3 is fine by container S30, sensing cilium S31, sensing cilium S32, sensing
Hair S33, conducting liquid S34, two earth resistance RG, two amplifier F, output node VS31, output node VS32, power supplys are defeated
Enter VCC, power supply place GND composition;
The resistive layer overlay segment of sensing cilium S31, S32, S33 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium S31, S32, S33 on the vertical line direction at container S30 cavity volumes interface is situated between more than their own
Enter 2 times of the average diameter of plenum section;
Conducting liquid S34 fills container S30 cavity volumes;
The fine shape electrode of sensing cilium S31, S32, S33 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium S33 is connected with power input VCC;
The fine shape electrode of sensing cilium S31, S32 is connected with earth resistance RG;
Input point of the fine shape electrode of sensing cilium S31, S32 respectively with an amplifier F is connected;
The output node of output node VS21, VS32 respectively with an amplifier F is connected;
Because the inertia of conducting liquid, conducting liquid can be moved when the sensor of this embodiment is moved, sensing cilium is promoted
There is elastic deformation in S31, S32, S33, sense the resistance variations of the resistive layer on cilium S31, S32, S33 and then cause sensing fine
Voltage value changes on hair S31, S32 fibre shape electrode, by being exported from output node VS31, VS32 after the amplification of amplifier F.
A kind of sensor main of embodiment 4, such as Fig. 4 is fine by container S40, sensing cilium S41, sensing cilium S42, sensing
Hair S43, conducting liquid S44, two earth resistance RG, two amplifier F, output node VS41, output node VS42, power supplys are defeated
Enter VCC, power supply place GND composition;
The resistive layer overlay segment of sensing cilium S41, S42, S43 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium S41, S42, S43 on the vertical line direction at container S40 cavity volumes interface is situated between more than their own
Enter 2 times of the average diameter of plenum section;
In container S40 cavity volumes, the volume of conducting liquid S44 is less than the dischargeable capacity of container S40 cavity volumes to conducting liquid S44;
The fine shape electrode of sensing cilium S41, S42, S43 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium S43 is connected with power input VCC;
The fine shape electrode of sensing cilium S41, S42 is connected with earth resistance RG;
Input point of the fine shape electrode of sensing cilium S41, S42 respectively with an amplifier F is connected;
The output node of output node VS21, VS32 respectively with an amplifier F is connected;
, due to the inertia of conducting liquid, conducting liquid can be moved for the sensor motion of this embodiment or attitudes vibration, change sense
Answer and be electrically connected area between cilium S41, S42, S43, cause the magnitude of voltage sensed on cilium S41, S42 fibre shape electrode to become
Change, by being exported from output node VS41, VS42 after the amplification of amplifier F.
A kind of sensor main of embodiment 5, such as Fig. 5 is fine by container S50, sensing cilium S51, sensing cilium S52, sensing
Hair S53, conducting liquid S54, two earth resistance RG, two amplifier F, output node VS51, output node VS52, power supplys are defeated
Enter VCC, power supply place GND composition;
The resistive layer overlay segment of sensing cilium S51, S52, S53 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium S51, S52, S53 on the vertical line direction at container S50 cavity volumes interface is situated between more than their own
Enter 2 times of the average diameter of plenum section;
In container S50 cavity volumes, the volume of conducting liquid S54 is less than the dischargeable capacity of container S50 cavity volumes to conducting liquid S54;
The fine shape electrode of sensing cilium S51, S52, S53 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium S53 is connected with power input VCC;
The fine shape electrode of sensing cilium S51, S52 is connected with earth resistance RG;
The fine shape electrode of sensing cilium S51, S52 is connected with output node VS51, VS52 respectively;
, due to the inertia of conducting liquid, conducting liquid can be moved for the sensor motion of this embodiment or attitudes vibration, change sense
Answer and be electrically connected area between cilium S51, S52, S53, cause the magnitude of voltage sensed on cilium S51, S52 fibre shape electrode to become
Change, signal is exported from output node VS51, VS52.
A kind of sensor main of embodiment 6, such as Fig. 6 will be by container S60, sensing cilium S61, sensing cilium S62, electrode
S63, conducting liquid S64, two earth resistance RG, two amplifier F, output node VS61, output node VS62, power inputs
VCC, power supply place GND are constituted;
Sensing cilium S61, S62, resistive layer overlay segment penetrate in cavity volume interface intervention cavity volume;
In the saturating cavity volume interface intervention cavity volumes of electrode S63;
The maximum span of sensing cilium S61, S62 on the vertical line direction at container S60 cavity volumes interface is intervened more than their own and held
2 times of the average diameter of cavity segment;
In container S60 cavity volumes, the volume of conducting liquid S64 is less than the dischargeable capacity of container S60 cavity volumes to conducting liquid S64;
The fine shape electrode of sensing cilium S61, S62 is not directly contacted with conducting liquid;
Electrode S63 is connected with power input VCC;
The fine shape electrode of sensing cilium S61, S62 is connected with earth resistance RG;
The fine shape electrode of sensing cilium S61, S62 is connected with output node VS61, VS62 respectively;
, due to the inertia of conducting liquid, conducting liquid can be moved for the sensor motion of this embodiment or attitudes vibration, change sense
Answer and be electrically connected area between cilium S61, S62 and electrode S63, cause to sense the voltage on cilium S61, S62 fibre shape electrode
Value changes, signal is exported from output node VS61, VS62.
A kind of sensor main of embodiment 7, such as Fig. 7 will be by container S70, sensing cilium S71, electrode S72, sensing cilium
S73, conducting liquid S74, two earth resistance RG, two amplifier F, output node VS71, output node VS72, power inputs
VCC, power supply place GND are constituted;
Sensing cilium S71, S73, resistive layer overlay segment penetrate in cavity volume interface intervention cavity volume;
In the saturating cavity volume interface intervention cavity volumes of electrode S72;
Sensing cilium S71, S73, the maximum span on the vertical line direction at container S70 cavity volumes interface are intervened more than their own and held
2 times of the average diameter of cavity segment;
In container S70 cavity volumes, the volume of conducting liquid S74 is less than the dischargeable capacity of container S70 cavity volumes to conducting liquid S74;
The fine shape electrode of sensing cilium S71, S73 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium S73 is connected with power input VCC;
Sensing cilium S71, the fine shape electrode of electrode S73 are connected with earth resistance RG;
The fine shape electrode of sensing cilium S71 is connected with output node VS71 respectively;
Electrode S72 is connected with output node VS72;
, due to the inertia of conducting liquid, conducting liquid can be moved for the sensor motion of this embodiment or attitudes vibration, change sense
Answer cilium S71, S73, electrode S63 to be electrically connected area between them, cause on sensing cilium S71, electrode S72 fibre shape electrodes
Voltage value changes, signal from output node VS61, VS62 export.
A kind of sensor main of embodiment 8, such as Fig. 8 will be by container S80, sensing cilium S81, electrode S82, sensing cilium
S83, conducting liquid S84, two earth resistance RG, two amplifier F, output node VS81, output node VS82, power inputs
VCC, power supply place GND are constituted;
Sensing cilium S81, S83, resistive layer overlay segment penetrate in cavity volume interface intervention cavity volume;
In the saturating cavity volume interface intervention cavity volumes of electrode S82;
Sensing cilium S81, S83, the maximum span on the vertical line direction at container S70 cavity volumes interface are intervened more than their own and held
2 times of the average diameter of cavity segment;
In container S80 cavity volumes, the volume of conducting liquid S84 is less than the dischargeable capacity of container S80 cavity volumes to conducting liquid S84;
The fine shape electrode of sensing cilium S81, S83 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium S83 is connected with power input VCC;
Sensing cilium S81, the fine shape electrode of electrode S83 are connected with earth resistance RG;
The fine shape electrode of sensing cilium S81 is connected with output node VS81 respectively;
Electrode S82 is connected with output node VS82;
, due to the inertia of conducting liquid, conducting liquid can be moved for the sensor motion of this embodiment or attitudes vibration, promote sense
Fibre swing is answered, changes resistivity between sensing cilium S81, S83 and conducting liquid S84, cause sensing cilium S81, electrode S82
Voltage value changes on fine shape electrode, signal is exported from output node VS81, VS82.
A kind of sensor main of embodiment 9, such as Fig. 9 will be by strombuliform container S90, sensing cilium S91, sensing cilium
S92, sensing cilium S93, conducting liquid S94, two earth resistance RG, two amplifier F, output node VS91, output nodes
VS92, power input VCC, power supply place GND, elastic membrane S95 are constituted;
Elastic membrane S95 is enclosed at the spiral mouth of container S90;
The resistive layer overlay segment of sensing cilium S91, S92, S93 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium S91, S92, S93 on the vertical line direction at container S50 cavity volumes interface is situated between more than their own
Enter 2 times of the average diameter of plenum section;
In container S90 cavity volumes, the volume of conducting liquid S94 is less than the dischargeable capacity of container S90 cavity volumes to conducting liquid S94,
Because the cavity volume of container S90 is spiral case shape, the micro-cavities of its afterbody are main because liquid level surface tension and pressure are kept;
The fine shape electrode of sensing cilium S91, S92, S93 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium S93 is connected with power input VCC;
The fine shape electrode of sensing cilium S91, S92 is connected with earth resistance RG;
The fine shape electrode of sensing cilium S91, S92 is connected with output node VS91, VS92 respectively;
When external sound passes to elastic membrane S95, conducting liquid can be moved the sensor of this embodiment, promote sensing cilium
S91, S92, S93 swing, and cause the resistance variations of the resistive layer for sensing cilium S91, S92, cause sensing cilium S91, S92 fibre shape
Voltage value changes on electrode, by being exported from output node VS91, VS92 after the amplification of amplifier F.
A kind of sensor main of embodiment 10, such as Figure 10 will be by strombuliform container Sa0, sensing cilium Sa1, sensing cilium
Sa2, sensing cilium Sa3, conducting liquid Sa4, two earth resistance RG, two amplifier F, output node VSa1, output nodes
VSa2, power input VCC, power supply place GND, elastic membrane Sa5 are constituted;
Elastic membrane Sa5 is enclosed at the spiral mouth of container Sa0;
The resistive layer overlay segment of sensing cilium Sa1, Sa2, Sa3 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium Sa1, Sa2, Sa3 on the vertical line direction at container S50 cavity volumes interface is situated between more than their own
Enter 2 times of the average diameter of plenum section;
Conducting liquid Sa4 is filled in container Sa0 cavity volumes;
The fine shape electrode of sensing cilium Sa1, Sa2, Sa3 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium Sa3 is connected with power input VCC;
The fine shape electrode of sensing cilium Sa1, Sa2 is connected with earth resistance RG;
The input pin of each amplifier F of fine shape electrode of sensing cilium Sa1, Sa2 is connected;
Output node VSa1, VSa2 respectively with 1 output pin of amplifier F be connected;
In motion, due to the inertia of conducting liquid, conducting liquid can be moved the sensor of this embodiment, promote sensing cilium
Sa1, Sa2, Sa3 swing, and cause the resistance variations of the resistive layer for sensing cilium Sa1, Sa2, cause sensing cilium Sa1, Sa2 fibre shape
Voltage value changes on electrode, by being exported from output node VSa1, VSa2 after the amplification of amplifier F.
A kind of sensor main of embodiment 11, such as Figure 11 will be by strombuliform container Sb0, sensing cilium Sb1, sensing cilium
Sb2, electrode Sb3, conducting liquid Sb4, two earth resistance RG, two amplifier F, output node VSb1, output node VSb2,
Power input VCC, power supply place GND, elastic membrane Sb5 are constituted;
Elastic membrane Sb5 is enclosed at the spiral mouth of container Sb0;
The resistive layer overlay segment of sensing cilium Sb1, Sb2 is penetrated in cavity volume interface intervention cavity volume;
Electrode Sb3 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium Sb1, Sb2 on the vertical line direction at container S50 cavity volumes interface is intervened more than their own and held
2 times of the average diameter of cavity segment;
Conducting liquid Sb4 is filled in container Sb0 cavity volumes;
The fine shape electrode of sensing cilium Sb1, Sb2 is not directly contacted with conducting liquid;
Electrode Sb3 is connected with power input VCC;
The fine shape electrode of sensing cilium Sb1, Sb2 is connected with earth resistance RG;
The input pin of each amplifier F of fine shape electrode of sensing cilium Sb1, Sb2 is connected;
Output node VSb1, VSb2 respectively with 1 output pin of amplifier F be connected;
In motion, due to the inertia of conducting liquid, conducting liquid can be moved the sensor of this embodiment, promote sensing cilium
Sb1, Sb2 swing, and cause the resistance variations of the resistive layer for sensing cilium Sb1, Sb2, cause sensing cilium Sb1, Sb2 fibre shape electrode
On voltage value changes, by after the amplification of amplifier F from output node VSb1, VSb2 export;Thoughts are gone back in this embodiment
Cilium Sb8, Sb9 is answered not to be repeated to sketch.
Liquid Sc4, elastic membrane Sc5 are filled with embodiment 12, such as Sc0 of Figure 12 spiral shells shell vessel and are enclosed in container Sc0
Spiral mouth at, elastic membrane Sc5 outside also collectively form enlarged cavity Sc65 with eardrum Sc6;For the summary of problem, this implementation is real
Example does not draw the other parts such as electrode, amplifier.
Liquid Sd4, elastic membrane Sd5 are filled with embodiment 13, such as Sd0 of Figure 13 spiral shells shell vessel and are enclosed in container Sd0
Spiral mouth at, elastic membrane Sd5 outside enlarged cavity Sd65 is also collectively formed with eardrum Sd6, on eardrum Sd6 have heavy ball Sd7;For
The summary of problem this embodiment does not draw the other parts such as electrode, amplifier.
A kind of sensor main of embodiment 14, such as Figure 14 will be by container Se0, sensing cilium Se1, sensing cilium Se3, conduction
Liquid Se4, resistance R1, R3, adjustable resistance R2, output node VSe1+, VSe1+, power input VCC, power supply place GND are constituted;
The resistive layer overlay segment of sensing cilium Se1 is penetrated in cavity volume interface intervention cavity volume;
The resistive layer overlay segment of sensing cilium Se3 is penetrated in cavity volume interface intervention cavity volume;
The maximum span of sensing cilium Se1, Se3 on the vertical line direction at container Se0 cavity volumes interface is intervened more than their own and held
2 times of the average diameter of cavity segment;
Conducting liquid Se4 fills container Se0 cavity volumes;
The fine shape electrode of sensing cilium Se1, Se3 is not directly contacted with conducting liquid;
The fine shape electrode of sensing cilium Se3 is connected with power input VCC;
The fine shape electrode of sensing cilium Se1 is connected with earth resistance R1;
The fine shape electrode of sensing cilium Se3 is connected with adjustable resistance R2;
R1, R2, R3 collectively form electric bridge with sensing cilium Se1, Se3, container Se0, conducting liquid Se4;
Because the inertia of conducting liquid, conducting liquid can be moved when the sensor of this embodiment is moved, sensing cilium is promoted
There is elastic deformation in S21, S23, cause to sense the resistance variations of resistive layer S211, S231 on cilium S21, S23, signal pass through from
Output node VSe+, VSe- are exported.
Embodiment 15, as shown in a, b, c, d, e, f in Figure 15 it is several sensing ciliums forms variation;
Sensing cilium g is made up of fine shape electrode g1 and resistive layer g10, one end of the fine shape electrode g1 of resistive layer g10 coverings;
Sensing cilium h is made up of fine shape electrode h1 and resistive layer h10, two sections of the fine shape electrode h1 of resistive layer h10 coverings;
Sensing cilium i is made up of fine shape electrode i1 and resistive layer i10, and fine shape electrode i10 one end is spherical, resistive layer i10 coverings
The ball end of fine shape electrode i1;
Sensing cilium j is made up of fine shape electrode j1 and resistive layer j10, and fine shape electrode j1 interweaves and shows as netted, and resistive layer j10 covers
The fine shape electrode j1 of lid;
Sensing cilium k is made up of fine shape electrode k1 and resistive layer k10, one end of the fine shape electrode k1 of resistive layer k10 coverings, resistive layer
K10 tree-shaped;
Sensing cilium L is made up of fine shape electrode L1 and resistive layer L10, the whole of the fine shape electrode L1 of resistive layer L10 coverings, resistive layer
L10 has lead connecting region L11, and the position resistive layer L10 where lead connecting region L11 is very thin.
Embodiment 16, an optional embodiment in embodiment 2-14, will have on the basis of selected embodiment
The quantity of effect sensing cilium increases to more than 100.
Embodiment 17, an optional embodiment in embodiment 2-14, using the resistive layer on sensing cilium
Making material makes container.