CN106932737B - Increase the atomic magnetic force transducer production method of material processing based on film layer - Google Patents
Increase the atomic magnetic force transducer production method of material processing based on film layer Download PDFInfo
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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- G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/035—Measuring direction or magnitude of magnetic fields or magnetic flux using superconductive devices
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Abstract
The present invention relates to a kind of atomic magnetic force transducer production methods for increasing material processing based on film layer, subtract material processing based on micro-nano and 3D material increases material process principle, in conjunction with light-operated electrical conduction mechanism, processing each micro-nano microcavity body of micro-nano microcavity volume array on a transparent substrate includes Tibetan area and magnetic force sensing unit at working media, completes internal film layer processing；Alkali metal meets material saltation point at the processing of Tibetan area at working media in microcavity body；It carries out gas injection and sealing forms closing micro-nano microcavity volume array；Then external Electrophotosensitive film layer processing is carried out, light-operated conductive layer is constructed；In the small light source of external harmoniousness and photoelectric sensor；Behavior is sensed using full light atomic magnetic force, carries out timing control, realizes the high spatial high time resolution magnetic field sensing preparation of optical pumping light regulation.Have the characteristics that preparation process it is simple, it is simple for structure, without cryogenic refrigerating system, high sensitivity, detection information amount is big, spatial resolution is high, flexibility is good, can be achieved miniaturization.
Description
Technical field
The present invention relates to a kind of magnetometric sensor preparation method, especially a kind of atomic magnetic force for increasing material processing based on film layer
Transducer production method.
Background technique
Magnetic Sensor refers to the various sensors for being used to measure magnetic field, magnetometer, gaussmeter is referred to as, in the world
The physical quantity that magnetic field is described in the system of unit is magnetic induction intensity, and unit is tesla.In early stage, electromagnetic arts gaussian unit is contained
Row, therefore magnetometer is also referred to as gaussmeter.Magnetic induction intensity is vector, has size and Orientation feature, and it is strong only to measure magnetic induction
The magnetometer of degree size is known as scalar magnetometer, and the magnetometer that can measure specific direction magnetic field size is known as vector magnetic strength
Meter, common magnetometric sensor have flux-gate magnetometer, magnetoresistance magnetometer, proton precession magnetometer, alkali metal optically pumped magnetometer
Deng.Magnetometric sensor magnetic physical prospecting, magnetic navigation, non-destructive testing, anti-counterfeiting technology, encrypting and decrypting, criminal investigation, brain science, cardiopulmonary science,
Biomagnetism, life medical treatment, biotechnology, health detection, disease treatment, human-computer interaction, intelligent control, behavior tissue, psychology
The fields such as, wisdom perception are widely used, and with the development in reform field, should be able to require also to be increased sharply to magnetometric sensor,
The magnetometric sensor to behave oneself best in sensitivity at present is principle magnetometric sensor, very high to sensitivity requirement in application
There are the fields such as magnetic physical prospecting, magnetic navigation, brain science, so atomic magnetic force sensor construction method is most important.
In first technology, there are magnetic sensor device preparation method and equipment, the production of commercialized Sweden Elekta company
Elekta Neuromag TRIUX model magneticencephalogram instrument；Tristan company, the U.S. produces MagView model magneticencephalogram instrument, technology
May refer to United States Patent (USP), patent name is high-reslution magenetoencephalography system,
Components and methods, translates into Chinese are as follows: high-resolution magneticencephalogram system, component and method, Patent No.
US7197352B2, license time are on March 27th, 2007.Formerly technology has the advantages that suitable, still, however it remains
Some essence are insufficient: 1) magnetic field sensing device the principle on which is that superconducting quantum interference device detects magnetic field, with magnetic flux amount
Sonization and two kinds of physical phenomenons of Josephson's tunneling effect are testing principle, it is necessary to cryogenic refrigerating system, generally use liquid nitrogen or
Liquid helium refrigeration, system structure are complicated；2) detection device detection sensitivity is limited to testing principle and system building complexity, detection
Flexibility it is poor；3) device volume is big, cannot achieve miniaturization, and construction cost is high, detects magnetic field limited spatial resolution.
Summary of the invention
It is an object of the invention to deficiencies in view of the above technology, provide a kind of atomic magnetic force for increasing material processing based on film layer
Transducer production method, this method is simple with preparation flow, integration degree is high, is not necessarily to cryogenic refrigerating system, system structure
Simply, convenient for building, high sensitivity, detection information amount is big, spatial resolution is high, flexibility is good, it is small in size, can be achieved it is small-sized
The features such as change, function are easy to expand, have a wide range of application.
The technical scheme is that a kind of atomic magnetic force transducer production method for increasing material processing based on film layer, step
Suddenly are as follows: firstly, subtracting material processing and 3D material increasing material process principle based on micro-nano, in conjunction with light-operated electrical conduction mechanism, according to required magnetic field
Testing requirements carry out magnetometric sensor microstructure design, process micro-nano microcavity volume array on a transparent substrate, each micro-nano is micro-
Cavity includes Tibetan area and magnetic force sensing unit at working media, and Tibetan area and magnetic force sensing unit are interconnected at working media, and complete
It is processed at internal film layer；Alkali metal meets material saltation point at the processing of Tibetan area at the working media of micro-nano microcavity body, carries out gas
Body injection and sealing form closing micro-nano microcavity volume array；Then external Electrophotosensitive film layer processing is carried out, light-operated conduction is constructed
Layer；The small light source of external harmoniousness and photoelectric sensor again, light source pump light source, heated light sources and detection light source；Utilize full light
Atomic magnetic force senses behavior, carries out timing control, realizes the high spatial high time resolution magnetic field sensing system of optical pumping light regulation
It is standby.
Magnetometric sensor microstructure design is carried out using Magnetic Sensor micro-structure layout designs module, magnetometric sensor is micro-
Structure design includes micro-nano structure volume, atomic gas concentration, Magnetic testi sensitivity, dynamic range, detection magnetic vector characteristic；
And material processing module is subtracted using micro-structure and processes micro-nano microcavity volume array on a transparent substrate, and uses real-time architecture parameter
Monitoring module carries out dynamic monitoring to magnetometric sensor microstructure parameters, and feeds back to micro-structure and subtract material processing module, is added
Work adjustment in accuracy obtains the magnetometric sensor thematic structure for having Magnetic Sensor micro-structure based on transparent substrates.
Based on atomic magnetic force testing principle, using microstructure portion membrane system processing module to inside micro-nano microcavity volume array into
The processing of row film layer, including optics heat-sink shell and atom relaxation time regulate and control layer, and optics heat-sink shell absorbs specific wavelength light beam, real
Existing photothermal conversion, atom relaxation time regulate and control layer and improve atom Quantum Properties, improve magnetic sensing sensitivity；Increased using working media
Alkali metal meets material saltation point to material processing module at the processing of Tibetan area at working media in microcavity body, provides atom work and is situated between
Matter.
Gas injection and sealing technology are carried out to micro-nano microcavity volume array using the micro- cavity body structure gas-flow closure module of laser,
Real-time gas concentration measurement and control module carries out Pressure monitoring in seal process, and feeds back to the micro- cavity body structure gas-flow closure mould of laser
Block realizes that gas concentration and air pressure optimization are controllable, and gas is inert gas, forms closing micro-nano microcavity volume array.
It is quick in the micro-nano microcavity volume array external process photoelectricity being packaged using membrane system processing module outside Magnetic Sensor
Feel film layer, constructs light-operated conductive layer, and using photoelectric cell integration module outside Magnetic Sensor outside micro-nano microcavity volume array
Portion integrates small light source and photoelectric sensor, light source pump light source, heated light sources, detection light source, photo-electric control light source, photoelectric control
Light source irradiation light conduct electric layer processed carries out timing control, and heated light sources are irradiated to the optics heat-sink shell in Magnetic Sensor micro-structure,
Atom working media is acted on using heat effect, realizes atom vapor, light source pump light source is that circularly polarized light beam is steamed by atom
Vapour realizes optical pumping behavior, and detection light source is detected by photoelectric sensor after atom vapor, sensed using full light atomic magnetic force
The high spatial high time resolution magnetic field sensing preparation of optical pumping light regulation is realized in behavior.
It is laser processing module or five axis diamond lathes that the micro-structure, which subtracts material processing module,.
It is parallel flat array of cavities that micro-nano microcavity volume array is processed in the transparent substrates.
The rapidoprint that the working media increases material processing module is alkali metal composite material.
The light-operated conductive layer is arranged in two multiple operation faces of parallel flat array of cavities.
Compared with prior art, the beneficial effects of the present invention are:
1) formerly technology the principle on which is that superconducting quantum interference device detects magnetic field, with flux quantization and Yue Se
Husband's two kinds of physical phenomenons of gloomy tunneling effect are testing principle, it is necessary to which cryogenic refrigerating system generallys use liquid nitrogen or liquid helium refrigeration, is
Structure is complicated for system.The present invention is based on atom quantum effects, subtract material processing based on micro-nano and 3D material increases material process principle, in conjunction with light
Electrical conduction mechanism is controlled, is sensed using optical pumping light detection alkali metal atom magnetic force, micro-nano microcavity volume array is based on, carries out magnetic force sensing
Device preparation, have preparation flow is simple, integration degree is high, without cryogenic refrigerating system, system structure it is simple, convenient for building,
The features such as high sensitivity；
2) formerly technology detection device detection sensitivity is limited to testing principle and system building complexity, for magneticencephalogram
The flexibility of detection is poor, and device volume is big, cannot achieve miniaturization, and construction cost is high.The present invention processes on a transparent substrate
Each micro-nano microcavity body includes Tibetan area and magnetic force sensing unit at working media, the alkali at the processing of Tibetan area at working media in microcavity body
Metal meets material saltation point；It carries out gas injection and sealing forms closing micro-nano microcavity volume array；Then external photoelectricity is carried out
Sensitive film layer processing, constructs light-operated conductive layer；The small light source of external harmoniousness and photoelectric sensor, light source pump light source, heating light
Source and detection light source；Prepare magnetic force sensing have detection information amount is big, spatial resolution is high, flexibility is good, it is small in size,
The features such as achievable miniaturization, function are easy to expand, have a wide range of application.
3) formerly technology using superconducting quantum interference device detects magnetic field, and core component is coil, limited spatial resolution,
Influence use scope.The present invention constructs optical pumping light detection alkali metal atom magnetometric sensor using micro-nano microcavity body, using light
Conduct power technology can realize time encoding control, acquire in time and the enterprising row information of Spatial Dimension, big with detection information amount,
The features such as spatial resolution is high, function is easy to expand, have a wide range of application.
Detailed description of the invention
Fig. 1 is the atomic magnetic force transducer production method schematic diagram of the invention for increasing material processing based on film layer.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in Figure 1, the atomic magnetic force transducer production method of the invention for being increased material processing based on film layer, is subtracted based on micro-nano
Material processing and 3D material increase material process principle, in conjunction with light-operated electrical conduction mechanism, are required according to required magnetic field detection, carry out magnetic force sensing
Device microstructure design, processes micro-nano microcavity volume array on a transparent substrate, and each micro-nano microcavity body includes hiding at working media
Area and magnetic force sensing unit, Tibetan area and magnetic force sensing unit are interconnected at working media, and complete internal film layer processing；In microcavity
Alkali metal meets material saltation point at the processing of Tibetan area at internal working media；It carries out gas injection and sealing formation closing micro-nano is micro-
Array of cavities；Then external Electrophotosensitive film layer processing is carried out, light-operated conductive layer is constructed；The small light source of external harmoniousness and photoelectricity again
Sensor, light source pump light source, heated light sources and detection light source；Behavior is sensed using full light atomic magnetic force, carries out timing control,
Realize the high spatial high time resolution magnetic field sensing preparation of optical pumping light regulation.
The specific implementation step of the present embodiment are as follows:
(1) material processing is subtracted based on micro-nano and 3D material increases material process principle, in conjunction with light-operated electrical conduction mechanism, according to required magnetic field
Testing requirements carry out Magnetic Sensor microstructure design using Magnetic Sensor micro-structure layout designs module 1, relate generally to be associated
Parameter is micro-nano structure volume, atomic gas concentration, Magnetic testi sensitivity, dynamic range, detection magnetic vector characteristic；Then micro-
Structure subtracts material processing module 2 and processes micro-nano microcavity volume array on a transparent substrate, processes micro-nano microcavity on a transparent substrate
Volume array can be parallel flat array of cavities, and each micro-nano microcavity body includes Tibetan area and magnetic force sensing unit, work at working media
Make Tibetan area and magnetic force sensing unit at medium to be interconnected, real-time architecture parameter monitoring module 3 carries out dynamic prison to microstructure parameters
It surveys, and feeds back to micro-structure and subtract material processing module 2, it is laser processing module that micro-structure, which subtracts material processing module 2, carries out machining accuracy
Amendment obtains the magnetometric sensor thematic structure for having Magnetic Sensor micro-structure based on transparent substrates；
(2) be based on atomic magnetic force testing principle, microstructure portion membrane system processing module 4 to inside micro-nano microcavity volume array into
The processing of row film layer, including optics heat-sink shell and atom relaxation time regulate and control layer, and optics heat-sink shell absorbs specific wavelength light beam, real
Existing photothermal conversion, atom relaxation time regulate and control layer and improve atom Quantum Properties, improve magnetic sensing sensitivity；Working media increases material and adds
Alkali metal meets material saltation point to work module 5 at the processing of Tibetan area at working media in microcavity body, provides atom working media, work
Make medium and increase 5 rapidoprint of material processing module to be alkali metal composite material；
(3) the micro- cavity body structure gas-flow closure module 6 of laser carries out gas injection and sealing technology to micro-nano microcavity volume array,
Real-time gas concentration measurement and control module 7 carries out Pressure monitoring in seal process, and feeds back to the micro- cavity body structure gas-flow closure mould of laser
Block 6 realizes that gas concentration and air pressure optimization are controllable, and gas is inert gas, forms closing micro-nano microcavity volume array；
(4) membrane system processing module 8 is quick in the micro-nano microcavity volume array external process photoelectricity being packaged outside Magnetic Sensor
Feel film layer, construct light-operated conductive layer, photoelectric cell integration module 9 is micro- in micro-nano microcavity volume array external harmoniousness outside Magnetic Sensor
Small light source and photoelectric sensor, light source pump light source, heated light sources, detection light source, photo-electric control light source, photo-electric control light source shine
Light-operated conductive layer is penetrated, light-operated conductive layer setting carries out timing control, heating in two multiple operation faces of parallel flat array of cavities
Light source is irradiated to the optics heat-sink shell in Magnetic Sensor micro-structure, acts on atom working media using heat effect, realizes atom
Steam, light source pump light source are circularly polarized light beam by atom vapor realization optical pumping behavior, and detection light source passes through atom vapor
It is detected afterwards by photoelectric sensor, senses behavior using full light atomic magnetic force, realize the high spatial high time point of optical pumping light regulation
The preparation of resolution magnetic field sensing.
The present embodiment realizes the preparation of the full light atomic magnetic force sensing unit array magnetic field sensing of 5X5, using Rd alkali metal
Atom vapor realizes detection sensitivity and reaches 5nT Magnetic testi figure, have manufacture craft brief introduction, convenient for building, high sensitivity,
Without cryogenic refrigerating system, system structure is simple, detection information amount is big, spatial resolution is high, flexibility is good, it is small in size, can be real
Now miniaturization, function are easy to the features such as expanding.
Multiple module involved in step of the present invention uses, and module is not limited to hardware module, software analysis method or step
Encapsulation function packet be also referred to as module.
Technical solution of the present invention and beneficial effect is described in detail in above-described specific embodiment, Ying Li
Solution is not intended to restrict the invention the foregoing is merely presently most preferred embodiment of the invention, all in principle model of the invention
Interior done any modification, supplementary, and equivalent replacement etc. are enclosed, should all be included in the protection scope of the present invention.
Laser process equipment in the present invention, increase material machining control, Film Design, membrane system preparation, light source and sensor use,
Electronics integrated etc. is mature technology.Inventive point of the invention is to subtract material processing based on micro-nano and the increasing material processing of 3D material is former
Reason, in conjunction with light-operated electrical conduction mechanism, processing each micro-nano microcavity body of micro-nano microcavity volume array on a transparent substrate includes that work is situated between
Tibetan area and magnetic force sensing unit at matter, alkali metal meets material saltation point and carries out gas at the processing of Tibetan area at working media in microcavity body
Body injection and sealing form closing micro-nano microcavity volume array, and the processing of Electrophotosensitive film layer constructs light-operated conductive layer, integrates small light
Source and photoelectric sensor, light source pump light source, heated light sources, detection light source, photo-electric control light source, are passed using full light atomic magnetic force
Sense behavior realizes the high spatial high time resolution magnetic field sensing preparation of optical pumping light regulation, has preparation flow simple, integrated
Change degree is high, without cryogenic refrigerating system, convenient for building, high sensitivity, it is small in size, the features such as minimizing can be achieved.
Claims (9)
1. it is a kind of based on film layer increase material processing atomic magnetic force transducer production method, which is characterized in that the steps include: firstly,
Subtract material processing based on micro-nano and 3D material increases material process principle, in conjunction with light-operated electrical conduction mechanism, is required according to required magnetic field detection, into
Row magnetometric sensor microstructure design processes micro-nano microcavity volume array on a transparent substrate, and each micro-nano microcavity body includes work
Make Tibetan area and magnetic force sensing unit at medium, Tibetan area and magnetic force sensing unit are interconnected at working media, and complete internal film layer
Processing；Alkali metal meets material saltation point at the processing of Tibetan area at the working media of micro-nano microcavity body, carries out gas injection and close
Envelope forms closing micro-nano microcavity volume array；Then external Electrophotosensitive film layer processing is carried out, light-operated conductive layer is constructed；External collection again
At small light source and photoelectric sensor, light source pump light source, heated light sources and detection light source；It is sensed using full light atomic magnetic force
Behavior carries out timing control, realizes the high spatial high time resolution magnetic field sensing preparation of optical pumping light regulation.
2. the atomic magnetic force transducer production method according to claim 1 for increasing material processing based on film layer, it is characterised in that:
Magnetometric sensor microstructure design is carried out using Magnetic Sensor micro-structure layout designs module (1), magnetometric sensor micro-structure is set
Meter includes micro-nano structure volume, atomic gas concentration, Magnetic testi sensitivity, dynamic range, detection magnetic vector characteristic；And it uses
Micro-structure subtracts material processing module (2) and processes micro-nano microcavity volume array on a transparent substrate, and is supervised using real-time architecture parameter
It controls module (3) and dynamic monitoring is carried out to magnetometric sensor microstructure parameters, and feed back to micro-structure and subtract material processing module (2), into
The amendment of row machining accuracy, obtains the magnetometric sensor for having Magnetic Sensor micro-structure based on transparent substrates.
3. the atomic magnetic force transducer production method according to claim 1 for increasing material processing based on film layer, it is characterised in that:
Based on atomic magnetic force testing principle, using microstructure portion membrane system processing module (4) to progress film inside micro-nano microcavity volume array
Layer processing, including optics heat-sink shell and atom relaxation time regulate and control layer, and optics heat-sink shell absorbs specific wavelength light beam, realize light
Thermal transition, atom relaxation time regulate and control layer and improve atom Quantum Properties, improve magnetic sensing sensitivity；Increase material using working media to add
Alkali metal meets material saltation point to work module (5) at the processing of Tibetan area at working media in microcavity body, provides atom working media.
4. the atomic magnetic force transducer production method according to claim 1 for increasing material processing based on film layer, it is characterised in that:
Gas injection and sealing technology, sealing are carried out to micro-nano microcavity volume array using the micro- cavity body structure gas-flow closure module (6) of laser
Real-time gas concentration measurement and control module (7) carries out Pressure monitoring in the process, and feeds back to the micro- cavity body structure gas-flow closure module of laser
(6), realize that gas concentration and air pressure optimization are controllable, gas is inert gas, forms closing micro-nano microcavity volume array.
5. the atomic magnetic force transducer production method according to claim 1 for increasing material processing based on film layer, it is characterised in that:
Using membrane system processing module (8) outside Magnetic Sensor in the micro-nano microcavity volume array external process Electrophotosensitive film being packaged
Layer constructs light-operated conductive layer, and using photoelectric cell integration module (9) outside Magnetic Sensor outside micro-nano microcavity volume array
Integrate small light source and photoelectric sensor, light source pump light source, heated light sources, detection light source, photo-electric control light source, photo-electric control
Light source irradiation light conduct electric layer carries out timing control, and heated light sources are irradiated to the optics heat-sink shell in Magnetic Sensor micro-structure, benefit
Atom working media is acted on heat effect, realizes atom vapor, light source pump light source is that circularly polarized light beam passes through atom vapor
Realize optical pumping behavior, detection light source is detected by photoelectric sensor after atom vapor, sensed and gone using full light atomic magnetic force
To realize the high spatial high time resolution magnetic field sensing preparation of optical pumping light regulation.
6. the atomic magnetic force transducer production method according to claim 2 for increasing material processing based on film layer, it is characterised in that:
It is laser processing module or five axis diamond lathes that the micro-structure, which subtracts material processing module (2),.
7. the atomic magnetic force transducer production method according to claim 1 or 2 for being increased material processing based on film layer, feature are existed
In: it is parallel flat array of cavities that micro-nano microcavity volume array is processed in the transparent substrates.
8. the atomic magnetic force transducer production method according to claim 3 for increasing material processing based on film layer, it is characterised in that:
The rapidoprint that the working media increases material processing module (5) is alkali metal composite material.
9. the atomic magnetic force transducer production method according to claim 5 for increasing material processing based on film layer, it is characterised in that:
The light-operated conductive layer is arranged in two multiple operation faces of parallel flat array of cavities.
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