CN106932175B - A kind of laser cure apparatus power/energy detection device and method - Google Patents
A kind of laser cure apparatus power/energy detection device and method Download PDFInfo
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- CN106932175B CN106932175B CN201710224327.0A CN201710224327A CN106932175B CN 106932175 B CN106932175 B CN 106932175B CN 201710224327 A CN201710224327 A CN 201710224327A CN 106932175 B CN106932175 B CN 106932175B
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Abstract
A kind of laser cure apparatus power/energy detection device and method belong to laser cure apparatus power/energy detection technique field, it is therefore intended that solve the problems, such as it is existing in the prior art it is at high cost, there are detection error and increase laser termination loss.When diffusing reflection optical gate of the present invention is closed, the laser that laser issues is incident on the second spectroscope through the second diaphragm component after the reflection of diffusing reflection optical gate, to third optical path, the laser transmitted through the second spectroscope is absorbed laser light incident through the reflection of the second spectroscope through diffusing reflection heap；The laser light incident that laser issues when diffusing reflection optical gate is opened is to the first spectroscope, laser through the transmission of the first spectroscope is used for tissue treatment, the laser reflected through the first spectroscope is incident on diffuse reflector through the first diaphragm component, laser light incident after diffuse reflector reflects is to the second spectroscope, the laser reflected through the second spectroscope is diffusely reflected heap and absorbs, and the laser transmitted through the second spectroscope enters third optical path.
Description
Technical field
The invention belongs to laser cure apparatus power/energy detection technique fields, and in particular to and a kind of laser cure apparatus power/
Energy testing apparatus and method.
Background technique
In medical Laser Treatment Machine, conventional startup self-detection is particularly significant and necessary, and in self-test project, it is right
For continuous type laser and pulsed laser, the judgement of laser output power and energy size is particularly important,
This is because: firstly, laser output power/energy size whether represent laser working properly, secondly, laser is defeated
The size of power/energy, which will directly affect, out acts on energy on human skin, if energy is excessive, it will to treatment
Skin causes possible injury, increases Operative risk, and if energy is too small may not to have therapeutic effect.
In the prior art, for laser power/energy real-time detection of laser cure apparatus to be realized output, conventional design
It is general to consider to be equipped with power meter or energy meter in the machine, and since power meter or energy meter price are higher, make overall cost height.
External existing similar product is primarily present two kinds of situations in power/energy detection at present, and one is only make in System self-test
With rated power/energy test of laser, to confirm the maximum output ability of laser, then before Laser emission, to setting
Laser emitting power/the energy set makes detection, and when Laser emission, no longer laser output is measured in real time, but is leaned on
The mode of non-optical power/energy come guarantee laser output stabilization, such as use closed loop Laser Power Devices control, this detection mode
Inaccuracy not can determine that laser real-time power/energy, and there are detection errors.Another situation is that when self-test booting detection and
Real-time detection when light has used two sets of detection systems respectively out, increases testing cost while increasing the terminal damage of laser
Consumption.
Summary of the invention
It is an object of the invention to propose a kind of laser cure apparatus power/energy detection device and method, existing skill is solved
It is at high cost existing for art, there are problems that detection error and increase laser termination loss.
To achieve the above object, a kind of laser cure apparatus power/energy detection device of the invention includes:
First optical path, first optical path include the first spectroscope, the first diaphragm component and diffuse reflector set gradually；
Second optical path parallel with the first light path light axis, second optical path include the diffusing reflection optical gate set gradually,
Two diaphragm components, the second spectroscope and diffusing reflection heap；
The third optical path vertical with first optical path, the second light path light axis converts the laser for being incident on third optical path
For light radiation value；
And microcontroller, the laser in the microcontroller and third optical path, diffusing reflection optical gate and laser cure apparatus
Device electrical connection；
When diffusing reflection optical gate is closed, the laser that the laser in laser cure apparatus issues is after the reflection of diffusing reflection optical gate through the
Two diaphragm components are incident on the second spectroscope, and the laser light incident through the reflection of the second spectroscope is to third optical path, through the second spectroscope
The laser of transmission is diffusely reflected heap absorption；When diffusing reflection optical gate is opened, the laser light incident of the laser sending in laser cure apparatus
To the first spectroscope, the laser through the transmission of the first spectroscope is used for tissue treatment, and the laser through the reflection of the first spectroscope is through first
Diaphragm component is incident on diffuse reflector, the laser light incident after diffuse reflector reflects to the second spectroscope, anti-through the second spectroscope
The laser penetrated is diffusely reflected heap absorption, and the laser transmitted through the second spectroscope enters third optical path.
The detection device further includes the aiming light source that the first spectroscope side is arranged in, the aiming light source transmitting
The light beam that the light beam and laser that light beam out is reflected through the first spectroscope are transmitted through the first spectroscope closes beam and is used to treat, described
It aims at the light beam that the light beam that light source is launched is transmitted through the first spectroscope and enters the first optical path；The aiming light source be it is red or
Green visible source.
The third optical path includes third diaphragm component and the uniform beam body, the light that are successively set in third diaphragm component
Detector and wave filtering circuit, the optical detector and wave filtering circuit electrical connection, are incident on third optical path
Light is received after uniform beam body by optical detector, then sampled filter circuit is converted to light radiation value；The sampling filter
Circuit and microcontroller electrical connection.
The optical detector is light-sensitive element or thermoelectric element.
The diffusing reflection optical gate includes rotating electromagnet and optical gate piece, and the optical gate piece is fixed on rotating electromagnet, institute
Microcontroller and rotating electromagnet electrical connection are stated, control rotating electromagnet powers on or power off the open or close for realizing optical gate piece.
The third diaphragm component is the shell that inside has hollow path, perpendicular to the on third optical path direction
It is provided with the adjustable through-hole an of adjustable dimension on one side, the hollow path is from second side parallel relative to first side
Face extends to enclosure interior, and the third diaphragm component has a dismountable upper cover, and the upper cover is solid by fixing bolt
It is scheduled on the third diaphragm component and the adjustable through-hole corresponding position is provided with the adjustable through-hole aperture of adjusting and adjusts
Valve, the uniform beam body, optical detector and wave filtering circuit are fixed among shell entirely through puller bolt.
First spectroscope and the second spectroscope material is identical and reflectivity and transmissivity having the same；The optical gate
Piece, the diffuse reflector diffusing reflection rate identical and having the same with diffusing reflection heap material, when first spectroscope is parallel to closure
Optical gate piece, be placed in parallel between the diffuse reflector and the second spectroscope.
The laser is continuous wave laser or pulsed laser.
Based on a kind of laser cure apparatus power/energy detection device, detection method includes the following steps:
Step 1: microcontroller controls rotating electromagnet power-off, diffusing reflection optical gate closure, and laser launches specified function
Rate/energy laser is incident on the second spectroscope through the second diaphragm component after the reflection of optical gate piece, through the reflection of the second spectroscope
Laser beam enters third optical path, the optical radiation signal after the optical detector receiving attenuation of third optical path, and is transmitted to sampling
Filter circuit；
Step 2: wave filtering circuit samples the optical radiation signal obtained in step 1, and by optical radiation signal
Light radiation value is converted to as initial light radiation value L1, and is input in microcontroller；
Step 3: the rated power for the laser that microcontroller is issued according to laser in step 1/energy comparison is pre-stored in
Power-radiant light numerical value or energy-radiant light numerical comparatives table in microcontroller obtains standard optical value L2, and is input to
In microcontroller；
Step 4: microcontroller is according in the initial light radiation value L1 and step 3 obtained in formula (one) judgment step two
Whether the error rate E1 between the standard optical value L2 of acquisition is between -20%-20%, if so, step 5 is executed, if it is not,
Microcontroller carries out alert process,
E1=(L1-L2) ÷ L2 (one)；
Step 5: microcontroller control rotating electromagnet powers on, and diffusing reflection optical gate is opened, the laser light incident that laser issues
To the first spectroscope, the laser reflected through the first spectroscope is incident on diffuse reflector through the first diaphragm component, anti-through diffuse reflector
Laser light incident after penetrating is to the second spectroscope, and the laser transmitted through the second spectroscope enters third optical path, through third optical path
Optical radiation signal after the decaying of optical detector real-time reception, and it is transmitted to wave filtering circuit；
Step 6: wave filtering circuit samples the optical radiation signal obtained in step 5, and by optical radiation signal
It is converted to light radiation value and is used as practical light radiation value L3, and be input in microcontroller；
Step 7: microcontroller is according in the practical light radiation value L3 and step 3 obtained in formula (two) judgment step five
Whether the error rate E2 between the standard optical value L2 of acquisition is between -20%-20%, if so, laser works normally, if
No, microcontroller closes optical gate piece in 100ms, and closes laser；
E2=(L3-L2) ÷ L2 (two).
Power-radiant light numerical value or energy-radiant light numerical comparatives in the microcontroller is prestored described in step 2
Table obtains in the following manner:
Diffusing reflection optical gate is opened, laser successively passes through the first spectroscope, the first diaphragm component, diffuse reflector, the second light splitting
After mirror, third adjustable diaphragm and uniform beam body, optical detector receives the optical radiation signal after said elements are decayed, sampling
Optical radiation signal is converted to light radiation value and is sent to microcontroller by filter circuit；Microcontroller receives identical transmitting function respectively
The corresponding light radiation value of multiple test under rate/energy, after every group of identical transmission power/energy test, microprocessor
Calculate the average photon radiation value of this group；In the manner described above, different transmission power/energy is successively written in memory and puts down
Equal light radiation value comparison table；Wherein, the determination of the transmission power/energy values passes through external reference power meter/energy meter pair
It is obtained according to measurement.
The invention has the benefit that
1, the present invention swashs the high power/energy launched in laser using multiple optical spectroscopics and decaying component
Light is decayed according to a certain percentage, it is ensured that laser detected is suitable and effective relative to detecting element.
2, the present invention will be switched on two kinds of functions of power/energy self-test and realtime power/energy measuring in one, with existing skill
It needs to compare using expensive power meter/energy meter and light splitting detection device in art, has low in cost and structure simple etc. excellent
Point.
3, the first spectroscope of the invention and the second spectroscope reflectivity having the same, the optical gate in diffusing reflection optical gate
Piece, diffuse reflector, diffusing reflection heap are metal material, this three's diffusing reflection rate is identical, in the identical premise of laser output power
Under, it is switched in power process of self-test and realtime power detection process, the attenuation rate that laser is passed through is consistent, therefore optical detection
The collected optical radiation signal of device is also consistent, and same set of power/energy-radiant light numerical value thus can be used and prestore
Table, therefore certain workload can be all reduced in design power/energy-radiant light numerical value calibration and final inspection are examined.
4, the first spectroscope that the present invention uses both plays the role of indicating the light combination mirror of light and laser, is also real-time function
The case where rate/energy measuring provides the effect of sampling, can replace completely in the prior art using power meter and light splitting detection.
5, present invention employs diffusing reflection optical gates, after the completion of startup self-detection, into normally go out light path sequence when, if due to
The other parameter settings of complete machine exceed normal range (NR), are finally presented as the variation of light radiation value, optical detector detects light radiation
Whether the variation of signal, the timely processing variation of microcontroller can have security risk, if it is considered to there are security risk, microcontroller
Control is stopped Laser emission by device immediately, and diffusing reflection optical gate is closed in 100ms, and laser is at this moment avoided to continue to treatment tissue
It damages, ensure that the security reliability of whole system.
6, the present invention passes through power-radiant light numerical comparatives table preparatory in memory space in the microprocessor or energy
Amount-radiant light numerical comparatives table, microcontroller determine the corresponding smooth spoke of real output/energy by reading the table
The error rate penetrated between value light radiation value corresponding with the output power/energy of standard is foundation, without other intermediate parameters
Conversion reduces the error generated since intermediate parameters are converted, and then improves the accuracy rate of the method for the present invention.
Detailed description of the invention
Fig. 1 is a kind of laser cure apparatus power/energy detection device overall structure diagram of the invention；
Fig. 2 is third diaphragm component structural schematic diagram in a kind of laser cure apparatus power/energy detection device of the invention；
Fig. 3 is superstructure schematic diagram in a kind of laser cure apparatus power/energy detection device of the invention；
Fig. 4 is a kind of laser cure apparatus power/energy detection method flow chart of the invention；
Wherein: 1, aiming light source, the 2, first spectroscope, the 3, first diaphragm component, 4, diffuse reflector, 5, diffusing reflection optical gate,
501, rotating electromagnet, 502, optical gate piece, the 6, second diaphragm component, the 7, second spectroscope, 8, diffusing reflection heap, 9, uniform beam
Body, 10, optical detector, 11, third diaphragm component, 1101, adjustable through-hole, 1102, hollow path, 1103, regulating valve,
1104, fixing bolt, 1105, puller bolt, 12, wave filtering circuit.
Specific embodiment
Embodiments of the present invention are described further with reference to the accompanying drawing.
Referring to attached drawing 1, a kind of laser cure apparatus power/energy detection device of the invention includes:
First optical path, first optical path include the first spectroscope 2, the first diaphragm component 3 and diffusing reflection set gradually
Body 4；
Second optical path parallel with the first light path light axis, second optical path include the diffusing reflection optical gate 5 set gradually,
Two diaphragm components 6, the second spectroscope 7 and diffusing reflection heap 8；
The third optical path vertical with first optical path, the second light path light axis, the third optical path include third diaphragm group
Part 11 and the uniform beam body 9 being successively set in third diaphragm component 11, optical detector 10 and wave filtering circuit 12, institute
It states optical detector and the wave filtering circuit 12 to be electrically connected, is incident on the light of third optical path after uniform beam body 9 by light
Detector 10 receives, then sampled filter circuit 12 is converted to light radiation value；The wave filtering circuit 12 and microcontroller electricity
Connection；Optical detector 10 can be the light-sensitive elements such as photocell, or the thermoelectricity such as thermocouple sensor, thermopile sensor
Element；Uniform beam body 9 embodies stepless action, and flared structure is finally beaten for making laser that multiple reflections occur inside it
Uniform beam out is received by optical detector 10；Uniform beam body 9, optical detector 10 and 12 entirety of wave filtering circuit can adopt
With the element of model ZYTEMP；
The aiming light source 1 of first spectroscope, 2 side is set, and the light beam that the aiming light source 1 is launched is through the first light splitting
The light beam that the light beam and laser that mirror 2 reflects are transmitted through the first spectroscope 2 closes beam for treating, and the aiming light source 1 is launched
The light beam that is transmitted through the first spectroscope 2 of light beam enter the first optical path；The aiming light source 1 is red or green visible
Source, the instruction light of sending are used to indicate Laser beam propagation, and the combined beam light that the two is formed is used for tissue treatment；
And microcontroller, the switch of the microcontroller control diffusing reflection optical gate 5, and the light obtained according to third optical path
The specified radiation value error in judgement rate of laser in radiation value and laser cure apparatus；
Component on component and third optical path in second optical path constitutes booting power/energy self-checking system, in booting function
In rate/energy self-checking system, microcontroller is realized the closure of optical gate piece 502, is overflow by powering off to rotating electromagnet 501
It reflects optical gate 5 to be closed, diffusing reflection occurs inside diffusing reflection optical gate 5 for the laser that the laser in laser cure apparatus issues, and reflects
Laser beam is transmitted along multiple directions afterwards, and only sub-fraction continues to transmit to enter through the second diaphragm component 6 in the horizontal direction
It is mapped to the second spectroscope 7, the only laser light incident that reflects through the second spectroscope 7 of the laser of sub-fraction is big absolutely to third optical path
The laser that fraction of laser light light beam is transmitted through the second spectroscope 7 is diffusely reflected the absorption of heap 8；With logical centered on second diaphragm component 6
The metallic barrier in hole, clear size of opening is adjustable, sends out inside uniform beam body 9 from the laser beam entered in third diaphragm component 11
Raw multiple reflections, are finally received by optical detector 10, and wave filtering circuit 12 believes the collected light radiation of 10 institutes of optical detector
Number it is converted into light radiation value, and the light radiation value is sent to microcontroller；
Component on component and third optical path in first optical path constitutes realtime power detection device, realtime power/energy
In detection system, microcontroller realizes the opening of optical gate piece 502, diffusing reflection optical gate by powering on to rotating electromagnet 501
When 5 opening, the laser light incident that the laser in laser cure apparatus issues is to the first spectroscope 2, through swashing for the first spectroscope 2 transmission
Tissue treatment, the laser that fraction laser is reflected through the first spectroscope 2 are used for after the aiming combiner that light and aiming light source 1 issue
It is incident on diffuse reflector 4 through the first diaphragm component 3, the laser light incident after the reflection of diffuse reflector 4 is to the second spectroscope 7, through the
The laser of two spectroscopes 7 reflection is diffusely reflected the absorption of heap 8, and the laser transmitted through the second spectroscope 7 enters third diaphragm component
11, the metallic barrier of through-hole is had centered on the first diaphragm component 3, clear size of opening is adjustable, laser in third diaphragm component 11
Among uniform beam body 9 and multiple reflections are occurred for beam, are finally received by optical detector 10, and wave filtering circuit 12 is by optical detection
The 10 collected optical radiation signal of institute of device is converted into light radiation value, and the light radiation value is sent to microcontroller.
The diffusing reflection optical gate 5 includes rotating electromagnet 501 and optical gate piece 502, and the optical gate piece 502 is fixed on electric rotating
It include a spring inside rotating electromagnet 501 on magnet 501, it is described micro- for controlling the opening and closing of optical gate piece 502
Controller and rotating electromagnet 501 are electrically connected, control rotating electromagnet 501 power on or power off realization optical gate piece 502 opening or
Closure.
Referring to attached drawing 2 and attached drawing 3, the third diaphragm component 11 is the shell that an inside has hollow path 1102,
Perpendicular to the adjustable through-hole 1101 for being provided with an adjustable dimension in the first side on third optical path direction, the hollow path
1102 extend to enclosure interior from the second side parallel relative to first side, and the third diaphragm component 11 can with one
The upper cover of disassembly, the upper cover is fixed on the third diaphragm component 11 by fixing bolt 1104 and described be adjusted is led to
1101 corresponding position of hole is provided with the adjustable 1101 aperture adjustment valve 1103 of through-hole of adjusting, and puller bolt 1105 passes through upper cover for institute
Uniform beam body 9, optical detector 10 and wave filtering circuit 12 is stated to hold out against among shell.
First spectroscope 2 reflectivity and transmissivity identical and having the same with 7 material of the second spectroscope；The light
Brake lining 502, diffuse reflector 4 diffusing reflection rate identical and having the same with 8 material of diffusing reflection heap, first spectroscope 2 are parallel
Optical gate piece 502 when closure, is placed in parallel between the diffuse reflector 4 and the second spectroscope 7.
The laser is continuous wave laser or pulsed laser.
Referring to attached drawing 4, based on a kind of laser cure apparatus power/energy detection device, detection method includes the following steps:
Step 1: microcontroller controls rotating electromagnet 501 and powers off, and diffusing reflection optical gate 5 is closed, and laser is launched specified
The laser of power/energy is incident on the second spectroscope 7 through the second diaphragm component 6 after the reflection of optical gate piece 502, through the second spectroscope
The laser beam of 7 reflections enters third optical path, the optical radiation signal after 10 receiving attenuation of optical detector of third optical path, and
It is transmitted to wave filtering circuit 12；
Step 2: wave filtering circuit 12 samples the optical radiation signal obtained in step 1, and light radiation is believed
Number light radiation value is converted to as initial light radiation value L1, and be input in microcontroller；
Step 3: the rated power for the laser that microcontroller is issued according to laser in step 1/energy comparison is pre-stored in
Power-radiant light numerical value or energy-radiant light numerical comparatives table in microcontroller obtains standard optical value L2, and is input to
In microcontroller；
Step 4: microcontroller is according in the initial light radiation value L1 and step 3 obtained in formula (one) judgment step two
Whether the error rate E1 between the standard optical value L2 of acquisition is between -20%-20%, if so, step 5 is executed, if it is not,
Microcontroller carries out alert process,
E1=(L1-L2) ÷ L2 (one)；
Step 5: microcontroller control rotating electromagnet 501 powers on, and diffusing reflection optical gate 5 is opened, the laser that laser issues
It is incident on the first spectroscope 2, the laser reflected through the first spectroscope 2 is incident on diffuse reflector 4 through the first diaphragm component 3, through unrestrained
For laser light incident after the reflection of reflector 4 to the second spectroscope 7, the laser transmitted through the second spectroscope 7 enters third optical path, passes through
Optical radiation signal after 10 real-time reception of the optical detector decaying of third optical path, and it is transmitted to wave filtering circuit 12；
Step 6: wave filtering circuit 12 samples the optical radiation signal obtained in step 5, and light radiation is believed
It number is converted to light radiation value and is used as practical light radiation value L3, and be input in microcontroller；
Step 7: microcontroller is according in the practical light radiation value L3 and step 3 obtained in formula (two) judgment step five
Whether the error rate E2 between the standard optical value L2 of acquisition is between -20%-20%, if so, laser works normally, if
No, microcontroller closes optical gate piece 502 in 100ms, and closes laser；
E2=(L3-L2) ÷ L2 (two).
Power-radiant light numerical value or energy-radiant light numerical comparatives in the microcontroller is prestored described in step 2
Table obtains in the following manner:
Diffusing reflection optical gate 5 is opened, laser successively passes through the first spectroscope 2, the first diaphragm component 3, diffuse reflector 4, second
After spectroscope 7, third adjustable diaphragm and uniform beam body 9, optical detector 10 receives the light radiation after said elements are decayed
Optical radiation signal is converted to light radiation value and is sent to microcontroller by signal, wave filtering circuit 12；Microcontroller connects respectively
Light radiation value corresponding to the multiple test under identical transmission power/energy is received, every group of identical transmission power/energy test finishes
Afterwards, microprocessor calculates the average photon radiation value of this group；In the manner described above, different transmitting function are successively written in memory
Rate/energy and average photon radiation value comparison table；Wherein, the determination of the transmission power/energy values passes through external calibration power
Meter/energy meter control measurement obtains.
A kind of laser cure apparatus power/energy detection device of the invention has startup self-detection and course of work real-time detection
Two functions, the component in the second optical path and the component in third optical path constitute startup self-detection system, are located at first
Component in optical path and the component in third optical path constitute real-time detecting system, while realizing that startup self-detection and work are real-time
The function of detection.
Claims (10)
1. a kind of laser cure apparatus power/energy detection device characterized by comprising
First optical path, first optical path include the first spectroscope (2), the first diaphragm component (3) and diffusing reflection set gradually
Body (4)；
Second optical path parallel with the first light path light axis, second optical path include the diffusing reflection optical gate (5) set gradually, second
Diaphragm component (6), the second spectroscope (7) and diffusing reflection heap (8)；
The laser for being incident on third optical path is converted to light by the third optical path vertical with first optical path, the second light path light axis
Radiation value；
And microcontroller, the switch of microcontroller control diffusing reflection optical gate (5), and the light spoke obtained according to third optical path
Penetrate the specified radiation value error in judgement rate of the laser in value and laser cure apparatus；
When diffusing reflection optical gate (5) is closed, the laser that the laser in laser cure apparatus issues passes through after diffusing reflection optical gate (5) reflection
Second diaphragm component (6) is incident on the second spectroscope (7), the laser light incident through the second spectroscope (7) reflection to third optical path, warp
The laser of second spectroscope (7) transmission is diffusely reflected heap (8) absorption；
When diffusing reflection optical gate (5) is opened, the laser light incident that the laser in laser cure apparatus issues is passed through to the first spectroscope (2)
The laser of first spectroscope (2) transmission is used for tissue treatment, and the laser through the first spectroscope (2) reflection is through the first diaphragm component
(3) diffuse reflector (4) are incident on, the laser light incident after diffuse reflector (4) reflection to the second spectroscope (7), through the second light splitting
The laser of mirror (7) reflection is diffusely reflected heap (8) absorption, and the laser transmitted through the second spectroscope (7) enters third optical path.
2. a kind of laser cure apparatus power/energy detection device according to claim 1, which is characterized in that the detection
Device further includes aiming light source (1) of the setting in the first spectroscope (2) side, the light for aiming at light source (1) and launching
The light beam that the light beam and laser that beam is reflected through the first spectroscope (2) are transmitted through the first spectroscope (2) closes beam and is used for tissue treatment,
The light beam that the light beam that aiming light source (1) is launched is transmitted through the first spectroscope (2) enters the first optical path；The aiming light
Source (1) is red or green visible source.
3. a kind of laser cure apparatus power/energy detection device according to claim 1 or 2, which is characterized in that described
Three optical paths include that third diaphragm component (11) and the uniform beam body (9) being successively set in third diaphragm component (11), light are visited
Device (10) and wave filtering circuit (12), the optical detector (10) and the wave filtering circuit (12) electrical connection are surveyed, is entered
The light for being mapped to third optical path is received after uniform beam body (9) by optical detector (10), then sampled filter circuit (12) turns
It is changed to light radiation value；The wave filtering circuit (12) and microcontroller electrical connection.
4. a kind of laser cure apparatus power/energy detection device according to claim 3, which is characterized in that the light is visited
Surveying device (10) is light-sensitive element or thermoelectric element.
5. a kind of laser cure apparatus power/energy detection device according to claim 1 or 2, which is characterized in that described unrestrained
Reflecting optical gate (5) includes rotating electromagnet (501) and optical gate piece (502), and the optical gate piece (502) is fixed on rotating electromagnet
(501) on, the microcontroller and rotating electromagnet (501) electrical connection, control rotating electromagnet (501) power on or power off realization
The open or close of optical gate piece (502).
6. a kind of laser cure apparatus power/energy detection device according to claim 3, which is characterized in that the third
Diaphragm component (11) is the shell that an inside has hollow path (1102), perpendicular to the first side on third optical path direction
On be provided with the adjustable through-hole (1101) an of adjustable dimension, the hollow path (1102) is from parallel relative to first side
Second side extends to enclosure interior, and the third diaphragm component (11) has a dismountable upper cover, and the upper cover passes through
Fixing bolt (1104) is fixed on the third diaphragm component (11) and adjustable through-hole (1101) corresponding position setting
There are adjustable through-hole (1101) the aperture adjustment valve (1103) of adjusting, the uniform beam body (9), optical detector (10) and sampling filter
Wave circuit (12) is fixed among shell entirely through puller bolt (1105).
7. a kind of laser cure apparatus power/energy detection device according to claim 5, which is characterized in that described first
Spectroscope (2) reflectivity and transmissivity identical and having the same with the second spectroscope (7) material；The optical gate piece (502) is overflow
Reflector (4) diffusing reflection rate identical and having the same with diffusing reflection heap (8) material, first spectroscope (2), which is parallel to, closes
Optical gate piece (502) when conjunction is placed in parallel between the diffuse reflector (4) and the second spectroscope (7).
8. a kind of laser cure apparatus power/energy detection device according to claim 1, which is characterized in that the laser
Device is continuous wave laser or pulsed laser.
9. based on a kind of detection method of laser cure apparatus power/energy detection device described in claim 1, feature exists
In, comprising the following steps:
Step 1: microcontroller controls rotating electromagnet (501) power-off, and diffusing reflection optical gate (5) closure, laser is launched specified
The laser of power/energy is incident on the second spectroscope (7) through the second diaphragm component (6) after optical gate piece (502) are reflected, through second
The laser beam of spectroscope (7) reflection enters third optical path, the light after optical detector (10) receiving attenuation of third optical path
Radiation signal, and it is transmitted to wave filtering circuit (12)；
Step 2: wave filtering circuit (12) samples the optical radiation signal obtained in step 1, and by optical radiation signal
Light radiation value is converted to as initial light radiation value L1, and is input in microcontroller；
Step 3: the rated power for the laser that microcontroller is issued according to laser in step 1/energy comparison is pre-stored in micro-control
Power-radiant light numerical value or energy-radiant light numerical comparatives table in device processed obtains standard optical value L2, and is input to micro-control
In device processed；
Step 4: microcontroller is obtained according in the initial light radiation value L1 and step 3 obtained in formula (one) judgment step two
Standard optical value L2 between error rate E1 whether between -20%-20%, if so, execute step 5, if it is not, micro-control
Device processed carries out alert process,
E1=(L1-L2) ÷ L2 (one)；
Step 5: microcontroller control rotating electromagnet (501) powers on, and diffusing reflection optical gate (5) is opened, the laser that laser issues
The first spectroscope (2) are incident on, the laser reflected through the first spectroscope (2) is incident on diffuse reflector through the first diaphragm component (3)
(4), the laser light incident after diffuse reflector (4) reflection is to the second spectroscope (7), the laser through the second spectroscope (7) transmission into
Enter to third optical path, the optical radiation signal after the decaying of optical detector (10) real-time reception of third optical path, and is transmitted to sampling filter
Wave circuit (12)；
Step 6: wave filtering circuit (12) samples the optical radiation signal obtained in step 5, and by optical radiation signal
It is converted to light radiation value and is used as practical light radiation value L3, and be input in microcontroller；
Step 7: microcontroller is obtained according in the practical light radiation value L3 and step 3 obtained in formula (two) judgment step five
Standard optical value L2 between error rate E2 whether between -20%-20%, if so, laser work normally, if it is not,
Microcontroller closes optical gate piece (502) in 100ms, and closes laser；
E2=(L3-L2) ÷ L2 (two).
10. detection method according to claim 9, which is characterized in that prestored in the microcontroller described in step 2
Power-radiant light numerical value or energy-radiant light numerical comparatives table obtain in the following manner:
Open diffusing reflection optical gate (5), laser successively pass through the first spectroscope (2), the first diaphragm component (3), diffuse reflector (4),
After second spectroscope (7), third adjustable diaphragm and uniform beam body (9), optical detector (10) is received decays through said elements
Optical radiation signal is converted to light radiation value and is sent to microcontroller by optical radiation signal afterwards, wave filtering circuit (12)；It is micro-
Controller receives the corresponding light radiation value of the multiple test under identical transmission power/energy respectively, and every group of identical transmission power/
After energy test, microprocessor calculates the average photon radiation value of this group；In the manner described above, it successively writes in memory
Enter different transmission power/energy and average photon radiation value comparison table；Wherein, the determination of the transmission power/energy values passes through
External reference power meter/energy meter control measurement obtains.
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| CN109186755B (en) * | 2018-08-20 | 2021-02-12 | 北京国科世纪激光技术有限公司 | Laser energy monitoring device |
| CN114414208B (en) * | 2022-01-18 | 2024-05-03 | 中国工程物理研究院激光聚变研究中心 | Calibration method for thermopile type laser energy measurement and calibration system |
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