CN106918948A - A kind of preparation method of colored color blocking - Google Patents
A kind of preparation method of colored color blocking Download PDFInfo
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- CN106918948A CN106918948A CN201710236135.1A CN201710236135A CN106918948A CN 106918948 A CN106918948 A CN 106918948A CN 201710236135 A CN201710236135 A CN 201710236135A CN 106918948 A CN106918948 A CN 106918948A
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- 230000000903 blocking effect Effects 0.000 title claims abstract description 225
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 239000011800 void material Substances 0.000 claims abstract description 96
- 239000011159 matrix material Substances 0.000 claims abstract description 56
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 15
- 238000012544 monitoring process Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 17
- 238000001514 detection method Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 241000872198 Serjania polyphylla Species 0.000 description 1
- 206010040844 Skin exfoliation Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
Abstract
The invention discloses a kind of preparation method of colored color blocking, including：The black-matrix layer with the first mark, the second mark, the 3rd mark, the first void region, the second void region and the 3rd void region is formed on substrate；Move successively light shield make alignment mark respectively with each label alignment；Use up to cover on respectively and formed in black-matrix layer the first color blocking and the first color lump, the second color blocking and the second color lump and the 3rd color blocking and the 3rd color lump, and each color blocking position is checked according to the position relationship of each color lump and corresponding void region；In the vertical direction is spaced the first distance between first the/the first void region of mark and second the/the second void region of mark, in the vertical direction interval second distance between first the/the first void region of mark and the 3rd the/the three void region of mark；First distance and second distance are configured to make the first color lump, the second color lump and the 3rd color lump non-overlapping.Using this programme each color lump can be made non-overlapping on the premise of color lump size is not changed.
Description
Technical field
The present invention relates to the manufacturing technology field of color membrane substrates, more particularly to a kind of preparation method of colored color blocking.
Background technology
At present, when colored color blocking is made, colored color blocking and corresponding detection color can be prepared by using same light shield
Block reduces light shield quantity and cost of manufacture.
Alignment mark is formed on underlay substrate, it is necessary to be covered on using black matrix" light when colored color blocking is started from.Fig. 1
It is the schematic diagram of alignment mark in the prior art.As shown in figure 1, alignment mark (Alignment Mark) includes alignment mark
101 and alignment mark 102.Wherein, on glass substrate black matrix" (BM on Glass) has alignment mark 101.And align
Mark 102 is then arranged on rgb light cover (RGB Mask).
Alignment mark 101 specifically includes three black matrix" alignment marks.Wherein, first black matrix" alignment mark with
Second black matrix" alignment mark is separated by a width H for sub-pixel.First black matrix" alignment mark is black with the 3rd
Colour moment battle array alignment mark is separated by two width 2*H of sub-pixel.Mobile rgb light cover.When the alignment mark 102 on rgb light cover according to
It is secondary when being aligned with each black matrix" alignment mark 101, form correspondence each black matrix" alignment mark 101 in corresponding position
Color lump and color blocking.Fig. 2 is the first schematic diagram of alignment monitoring mark of the prior art.As shown in Fig. 2 alignment detection mark
Note includes R color lumps 201, G color lumps 202 and B color lumps 203.R color lumps 201 are separated by H, R color lumps 201 and B color lumps 203 with G color lumps 202
It is separated by 2*H.
Fig. 3 is second schematic diagram of alignment monitoring mark of the prior art.As shown in figure 3, when in PPI patterns high
Under (i.e. high pixel density pattern, Pixel Dimensions are small in such a mode) H less than color lump width C when, R color lumps 201 and G color lumps
202 can produce it is overlapping, so as to lead to not the problem of the site error for measuring colored color blocking.
Fig. 4 is the third schematic diagram of alignment monitoring mark of the prior art.In order that color lump do not produce it is overlapping, such as scheme
Shown in 4, each color lump can be done small.But the risk being easily stripped can be present in the less color lump of size.
The defect of the preparation method of colored color blocking is in the prior art：When the width of the sub-pixel under PPI patterns high is small
Can be produced when the width of color lump, between color lump it is overlapping, so as to lead to not the problem of the site error for measuring colored color blocking, and
Color lump is done small and can there is the risk that the less color lump of size is easily stripped.
The content of the invention
In order to solve the above-mentioned technical problem, the invention provides a kind of preparation method of colored color blocking, including：
Being formed on underlay substrate has the first mark, the second mark, the 3rd mark, the first void region, the second hollow out
Region and the black-matrix layer of the 3rd void region；
Mobile light shield, makes the alignment mark and first label alignment on the light shield；Covered on using the light described
The first color blocking and the first color lump are formed in black-matrix layer, and according to first color lump and the position of first void region
Relation checks the position of first color blocking；
The movement light shield, makes the alignment mark with second label alignment；The black is covered on using the light
The second color blocking and the second color lump are formed in matrix layer, and according to second color lump and the position relationship of second void region
To check the position of second color blocking；
The movement light shield, makes the alignment mark with the 3rd label alignment；The black is covered on using the light
The 3rd color blocking and the 3rd color lump are formed in matrix layer, and according to the 3rd color lump and the position relationship of the 3rd void region
To check the position of the 3rd color blocking；
Wherein, in side vertically between first/the first void region of mark and/the second void region of the second mark
The first distance of interval, is erecting between first/the first void region of mark and/the three void region of the 3rd mark upwards
Nogata is spaced second distance upwards；First distance and second distance be configured to make first color lump, the second color lump and
3rd color lump is non-overlapping.
In one embodiment, described first apart from H1Meet：H1=n1*V；Wherein, n1To meet n1>=1 or n1≤ -1
Integer, V is the length of sub-pixel；
The second distance H2Meet：H2=n2*V；Wherein, n2It is different from n1And meet n2>=1 or n2≤ -1 it is whole
Number.
In one embodiment, first mark, the second mark, the 3rd mark, the first void region, the second vacancy section
Domain and the 3rd void region are synchronously formed using same light shield.
In one embodiment, first color blocking, the second color blocking and the 3rd color blocking are different, and are respectively red
One kind in color blocking, green color blocking and blue color blocking.
In one embodiment, first color lump, the second color lump and the 3rd color lump are located between sub-pixel and sub-pixel
Position.
In one embodiment, first mark, the second mark and the 3rd mark are located at non-display area.
In one embodiment, also include：When the black-matrix layer is formed, the black-matrix layer is also set to have the
Four marks and the 4th void region；
The movement light shield, makes the alignment mark and the 4th label alignment on the light shield；Covered on using the light
The 4th color blocking and the 4th color lump are formed in the black-matrix layer, and according to the 4th color lump and the 4th void region
Position relationship checks the position of the 4th color blocking；
Wherein, in side vertically between first/the first void region of mark and/the four void region of the 4th mark
The 3rd distance is spaced upwards；First distance, second distance and the 3rd distance are configured to make first color lump, the second color
Block, the 3rd color lump and the 4th color lump are non-overlapping.
In one embodiment, described first apart from H1Meet：H1=n1*V；Wherein, n1To meet n1>=1 or n1≤ -1
Integer, V is the length of sub-pixel；
The second distance H2Meet：H2=n2*V；Wherein, n2It is different from n1And meet n2>=1 or n2≤ -1 it is whole
Number；
Described 3rd apart from H3Meet：H3=n3*V；Wherein, n3It is different from n1And n2And meet n3>=1 or n3≤ -1
Integer.
In one embodiment, first color blocking, the second color blocking, the 3rd color blocking and the 4th color blocking are different, and
One kind respectively in red color resistance, green color blocking, blue color blocking and white color blocking.
In one embodiment, first color lump, the second color lump, the 3rd color lump and the 4th color lump are located at sub-pixel with son
Position between pixel.
Compared with prior art, one or more embodiments in such scheme can have the following advantages that or beneficial effect
Really：
Using the preparation method of colored color blocking provided in an embodiment of the present invention, move successively light shield make alignment mark respectively with
First mark, the second mark and the 3rd label alignment, and cover on the mark of formation correspondence first in black-matrix layer using the light
First color blocking and the first color lump, second color blocking and the second color lump and the correspondence color blocking of the 3rd mark the 3rd of the mark of correspondence second
With the 3rd color lump.In the vertical direction is spaced the first distance, the first mark and the 3rd mark between first mark and the second mark
Between in the vertical direction interval second distance.When the first distance and second distance are configured to make the first color lump, the second color lump
When non-overlapping with the 3rd color lump, can cause that each color lump is non-overlapping on the premise of color lump size is not changed.
Other features and advantages of the present invention will illustrate in the following description, and partly become from specification
It is clear that or being understood by implementing the present invention.The purpose of the present invention and other advantages can be wanted by specification, right
Specifically noted structure in book and accompanying drawing is asked to realize and obtain.
Brief description of the drawings
Accompanying drawing is used for providing a further understanding of the present invention, and constitutes a part for specification, with reality of the invention
Apply example to be provided commonly for explaining the present invention, be not construed as limiting the invention.In the accompanying drawings：
Fig. 1 shows the schematic diagram of alignment mark of the prior art；
Fig. 2 shows the first schematic diagram of alignment monitoring mark of the prior art；
Fig. 3 shows second schematic diagram of alignment monitoring mark of the prior art；
Fig. 4 shows the third schematic diagram of alignment monitoring mark of the prior art；
Fig. 5 shows the schematic flow sheet of the preparation method of colored color blocking according to a first embodiment of the present invention；
Fig. 6 shows the schematic diagram of alignment mark according to a first embodiment of the present invention；
Fig. 7 shows the schematic diagram of alignment monitoring mark according to a first embodiment of the present invention；
Fig. 8 shows the schematic diagram of the color blocking for being formed according to a first embodiment of the present invention；
Fig. 9 shows the schematic flow sheet of the preparation method of colored color blocking according to a second embodiment of the present invention；
Figure 10 shows the schematic diagram of alignment mark according to a second embodiment of the present invention；
Figure 11 shows the schematic diagram of alignment monitoring mark according to a second embodiment of the present invention；
Figure 12 shows the schematic diagram of the color blocking for being formed according to a second embodiment of the present invention；
Figure 13 shows the schematic diagram of alignment mark according to a third embodiment of the present invention；
Figure 14 shows the schematic diagram of alignment monitoring mark according to a third embodiment of the present invention；
Figure 15 shows the schematic diagram of the color blocking for being formed according to a third embodiment of the present invention.
Specific embodiment
Describe embodiments of the present invention in detail below with reference to drawings and Examples, how the present invention is applied whereby
Technological means solves technical problem, and reaches the implementation process of technique effect and can fully understand and implement according to this.Need explanation
As long as not constituting conflict, each embodiment in the present invention and each feature in each embodiment can be combined with each other,
The technical scheme for being formed is within protection scope of the present invention.
First embodiment
As an example, the present embodiment is mainly for three explanations of the preparation method of the colored color blocking of sub-pixel.
Fig. 5 shows the schematic flow sheet of the preparation method of colored color blocking according to a first embodiment of the present invention.Such as Fig. 5 institutes
Show, the preparation method may include steps of S510 to S570.
Following processing step S510 to S570, can carry out the making of colored color blocking merely with two light shields.The two light
Cover is properly termed as black matrix light shield and color blocking light shield.Black matrix light shield can include alignment mark (Alignment Mask) (i.e.,
First mark, second mark and the 3rd mark) mask pattern and void region (that is, the first void region, the second void region
With the 3rd void region) mask pattern.Color blocking light shield can include alignment mark, contraposition monitoring mark (Overlay Mask)
The mask of (that is, the first color lump, the second color lump and the 3rd color lump) and color blocking (that is, the first color blocking, the second color blocking and the 3rd color blocking)
Pattern.
In step S510, on underlay substrate formed have the first mark 601 as shown in Figure 6, the second mark 602,
3rd mark 603, the black of the first void region 701, the second void region 702 and the 3rd void region 703 as shown in Figure 7
Matrix layer.
Preferably, the first mark 601, the second mark 602, the 3rd mark 603, the first void region 701, the second vacancy section
Domain 702 and the 3rd void region 703 are synchronously formed using same light shield.Light shield mentioned here is black matrix light shield.Using black
The alignment mark mask pattern of matrix light shield forms the first mark 601, second on the underlay substrate of for example, glass substrate and marks
The 602, the 3rd mark 603 of note.Meanwhile, using black matrix light shield void region mask pattern formed the first void region 701,
Second void region 702 and the 3rd void region 703.
Preferably, the first mark 601, the second mark 602 and the 3rd mark 603 are located at non-display area, from without influenceing just
Often display, will not impact to the aperture opening ratio of liquid crystal display panel.First void region 701, the second void region 702 and
Three void regions 703 are located at viewing area.Specifically, the first void region 701, the second void region 702 and the 3rd void region
703 are located at the position between sub-pixel and sub-pixel.
In step S520, mobile light shield makes 604 and first mark of alignment mark 601 pairs on light shield as shown in Figure 6
Together.Light shield mentioned here is color blocking light shield.Alignment mark 604 on color blocking light shield aligns with the first mark 601, color blocking light shield
Positioning is completed, and goes to step S530.
In step S530, covered on using color blocking light and the first color blocking 801 as shown in Figure 8 and such as is formed in black-matrix layer
The first color lump 704 shown in Fig. 7, and the first color is checked according to the position relationship of the first color lump 704 and the first void region 701
The position of resistance 801.
Specifically, the first color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
704.Meanwhile, the first color blocking 801 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.
Carried out under the light shield along with the first color blocking 801 due to making the first color lump 704, then can be by inspection
The site error of the first color lump 704 is surveyed to detect the position of the first color blocking 801.Specifically, as shown in fig. 7, by detection first
Whether color lump 704 is located at the center of the first void region 701 to check the position of the first color blocking 801.If the first color blocking 801
Position is accurate, then the first color lump 704 for being formed is just positioned at the center of the first void region 701.
In step S540, mobile color blocking light shield makes alignment mark 604 be alignd with the second mark 602.On color blocking light shield
Alignment mark 604 is alignd with the second mark 602, and color blocking light shield positioning is completed, and goes to step S550.
In step S550, covered on using color blocking light and the second color blocking 802 as shown in Figure 8 and such as is formed in black-matrix layer
The second color lump 705 shown in Fig. 6, and the second color is checked according to the position relationship of the second color lump 705 and the second void region 702
The position of resistance 802.
Specifically, the second color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
705.Meanwhile, the second color blocking 802 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.By detection the
Whether two color lumps 705 are located at the center of the second void region 702 to check the position of the second color blocking 802.If the second color blocking 802
Position it is accurate, then the second color lump 705 for being formed is just positioned at the center of the second void region 702.
In step S560, mobile color blocking light shield makes alignment mark 604 be alignd with the 3rd mark 603.On color blocking light shield
Alignment mark 604 is alignd with the 3rd mark 603, and color blocking light shield positioning is completed, and goes to step S570.
In step S570, covered on using color blocking light and the 3rd color blocking 803 and as shown in Figure 8 is formed in black-matrix layer
Three color lumps 706, and the position of the 3rd color blocking 803 is checked according to the position relationship of the 3rd color lump 706 and the 3rd void region 703
Put.
Specifically, the 3rd color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
706.Meanwhile, the 3rd color blocking 803 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.By detection the
Whether three color lumps 706 are located at the center of the 3rd void region 703 to check the position of the 3rd color blocking 803.If the 3rd color blocking 803
Position it is accurate, then the 3rd color lump 706 for being formed is just positioned at the center of the 3rd void region 703.
In the present embodiment, in the vertical direction is spaced the first distance between the first mark 601 and the second mark 602.The
In the vertical direction interval second distance between one mark 601 and the 3rd mark 603.First void region 701 and the second hollow out
In the vertical direction is spaced the first distance between region 702.Perpendicular between first void region 701 and the 3rd void region 703
Nogata is spaced second distance upwards.Importantly, the first distance and second distance are configured to make the first color lump 704, the second color lump
705 and the 3rd color lump 706 it is non-overlapping.
Preferably, the first color lump 704, the second color lump 705 and the 3rd color lump 706 are located at the position between sub-pixel and sub-pixel
Put.
When the method for application the present embodiment makes colored color blocking, due in step S520, step S540 and step S560
In, color blocking light shield is moved successively so that alignment mark 604 respectively with the first mark 601, the second mark 602 and the 3rd mark 603
Alignment, thus the first color lump 704 for being formed in step S530 in theory and the second color lump 705 formed in step S550 it
Between answer in the vertical direction to be spaced the first distance, the first color lump 704 formed in the step S530 with and step S570 in formation
The 3rd color lump 706 between answer in the vertical direction be spaced second distance.By the distance of reasonable disposition first and second distance
Size, can keep being prevented effectively from the first color lump 704, the second color lump 705 and the 3rd color lump on the basis of color lump size is constant
706 it is mutually overlapping.
A preferred embodiment of the invention gives the allocation plan for the first distance and second distance.
Specifically, first apart from H1Meet：H1=n1*V.Wherein, n1To meet n1>=1 or n1≤ -1 integer, V is sub- picture
The length of element.Second distance H2Meet：H2=n2*V.Wherein, n2It is different from n1And meet n2>=1 or n2≤ -1 integer, V
It is the length of sub-pixel.
It should be noted that working as n1To meet n1>=1 integer, and n2It is different from n1And meet n2During >=1 integer,
Color blocking light shield is moved down.Work as n1To meet n1≤ -1 integer, and n2It is different from n1And meet n2During≤- 1 integer, color blocking light
Moved on cover.
Specifically, as shown in figure 8, taking n1=1, n2=2, H can be obtained1=V, H2=2*V.That is, color blocking light shield is carried out initially
After contraposition forms the first color blocking 801 and the first color lump 704, color blocking light shield is moved to the second mark from initial position to the right
(equivalent to 1 width of sub-pixel that moves right in the horizontal direction, and in the vertical direction moves down 1 sub- picture at 602
The length of element) the second color blocking 802 and the second color lump 705 are formed, it is moved to the right at the 3rd mark 603 from initial position
(equivalent to 2 width of sub-pixel that move right in the horizontal direction, and in the vertical direction moves down 2 sub-pixels
Length) form the 3rd color blocking 803 and the 3rd color lump 706.First color lump 704 and the second color lump 705 are spaced 1 in the horizontal direction
The width of sub-pixel, and in the vertical direction is spaced 1 length of sub-pixel, the first color lump 704 and the 3rd color lump 706 are in level
2 width of sub-pixel are spaced on direction, and in the vertical direction is spaced 2 length of sub-pixel.First color lump 704, second
The color lump 706 of color lump 705 and the 3rd is non-overlapping.
Optionally, n can also be taken1=1, n2=0, H can be obtained1=V, H2=0.So, the first color lump 704 and the second color lump
705 are spaced 1 width of sub-pixel in the horizontal direction, and in the vertical direction is spaced 1 length of sub-pixel, the first color lump
704 and the 3rd color lump 706 be spaced 2 width of sub-pixel, and in the vertical direction in the horizontal direction without interval.Can see
Go out, the first color lump 704, the second color lump 705 and the 3rd color lump 706 are non-overlapping.
Optionally, n can also be taken1=1, n2=3, H can be obtained1=V, H2=3*V.So, the first color lump 704 and the second color
Block 705 is spaced 1 width of sub-pixel in the horizontal direction, and in the vertical direction is spaced 1 length of sub-pixel, the first color
The color lump 706 of block 704 and the 3rd is spaced 2 width of sub-pixel in the horizontal direction, and in the vertical direction is spaced 3 sub-pixels
Length.As can be seen that the first color lump 704, the second color lump 705 and the 3rd color lump 706 are non-overlapping.
It should be noted that the embodiment of the present invention only carries out vertical direction to the first mark, the second mark and the 3rd mark
Improvement.Accordingly, the first color lump 704, the second color lump 705 and the 3rd color lump 706 are carrying out same as the prior art or class
As movement in horizontal direction, go back in the vertical direction and moved, so that the first color lump 704, the second color lump 705 and
Three color lumps 706 are non-overlapping.In other words, the embodiment of the present invention exists to the first color lump 704, the second color lump 705 and the 3rd color lump 706
The distance moved in horizontal direction is not construed as limiting.
Preferably, the first color blocking 801, the second color blocking 802 and the 3rd color blocking 803 are different, and are respectively red color
One kind in resistance, green color blocking and blue color blocking.For example, the first color blocking 801 is red color resistance.Second color blocking 802 is green color
Resistance.3rd color blocking 803 is blue color blocking.
Using the preparation method of colored color blocking provided in an embodiment of the present invention, light shield is moved successively makes 604 points of alignment mark
Do not alignd with the first mark 601, the second mark 602 and the 3rd mark 603, and covered on using the light formed in black-matrix layer it is right
Answer first color blocking 801 and the first color lump 704 of the first mark 601, second color blocking 802 and the second color of the second mark 602 of correspondence
Block 705, and correspond to the 3rd color blocking 803 and the 3rd color lump 706 of the 3rd mark 603.First mark 601 and the second mark 602
Between in the vertical direction be spaced the first distance, between the first mark 601 and the 3rd mark 603 in the vertical direction interval second
Distance.When the first distance and second distance are configured to make the first color lump 704, the second color lump 705 and the 3rd color lump 706 not hand over mutually
When folded, can cause that each color lump is non-overlapping on the premise of color lump size is not changed, so as to overcome color lump in the prior art
Defect that is overlapping and there is color lump peeling risk.
Second embodiment
As an example, the present embodiment is mainly for four explanations of the preparation method of the colored color blocking of sub-pixel.
Fig. 9 shows the schematic flow sheet of the preparation method of colored color blocking according to a second embodiment of the present invention.Such as Fig. 9 institutes
Show, the preparation method may include steps of S910 to S990.
Identical with first embodiment, following processing step S910 to S990 can also carry out colored color merely with two light shields
The making of resistance.The two light shields are properly termed as black matrix light shield and color blocking light shield.Black matrix light shield can include alignment mark
The mask pattern of (that is, the first mark, the second mark, the 3rd mark and the 4th mark) and void region (that is, the first vacancy section
Domain, the second void region, the 3rd void region and the 4th void region) mask pattern.Color blocking light shield can include register guide
Note, contraposition monitoring mark (the first color lump, the second color lump, the 3rd color lump and the 4th color lump) and color blocking (that is, the first color blocking, second
Color blocking, the 3rd color blocking and the 4th color blocking) mask pattern.
In step S910, on underlay substrate formed have the first mark 601 as shown in Figure 10, the second mark 602,
3rd mark 603, the 4th mark 1001, the first void region 701 as shown in figure 11, the second void region 702, the 3rd hollow out
The black-matrix layer of the void region 1101 of region 703 and the 4th.
In step S920, mobile light shield makes the mark 601 of alignment mark 604 and first on light shield as shown in Figure 10
Alignment.Light shield mentioned here is color blocking light shield.Alignment mark 604 on color blocking light shield aligns with the first mark 601, color blocking light
Cover positioning is completed, and goes to step S930.
In step S930, covered on using light and the first color blocking 801 as shown in figure 12 is formed in black-matrix layer and as schemed
The first color lump 704 shown in 11, and the first color is checked according to the position relationship of the first color lump 704 and the first void region 701
The position of resistance 801.
Specifically, the first color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
704.Meanwhile, the first color blocking 801 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.
Carried out under the light shield along with the first color blocking 801 due to making the first color lump 704, then can be by inspection
The site error of the first color lump 704 is surveyed to detect the position of the first color blocking 801.Specifically, as shown in figure 11, by detection first
Whether color lump 704 is located at the center of the first void region 701 to check the position of the first color blocking 801.If the first color blocking 801
Position is accurate, then the first color lump 704 for being formed is just positioned at the center of the first void region 701.
In step S940, mobile color blocking light shield makes alignment mark 604 be alignd with the second mark 602.On color blocking light shield
Alignment mark 604 is alignd with the second mark 602, and color blocking light shield positioning is completed, and goes to step S950.
In step S950, covered on using color blocking light and the He of the second color blocking 802 as shown in figure 12 is formed in black-matrix layer
The second color lump 705 as shown in Figure 10, and check the according to the position relationship of the second color lump 705 and the second void region 702
The position of two color blockings 802.
Specifically, the second color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
705.Meanwhile, the second color blocking 802 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.By detection the
Whether two color lumps 705 are located at the center of the second void region 702 to check the position of the second color blocking 802.If the second color blocking 802
Position it is accurate, then the second color lump 705 for being formed is just positioned at the center of the second void region 702.
In step S960, mobile color blocking light shield makes alignment mark 604 be alignd with the 3rd mark 603.On color blocking light shield
Alignment mark 604 is alignd with the 3rd mark 603, and color blocking light shield positioning is completed, and goes to step S970.
In step S970, covered on using color blocking light and the He of the 3rd color blocking 803 as shown in figure 12 is formed in black-matrix layer
The 3rd color lump 706 as shown in Figure 10, and check the according to the position relationship of the 3rd color lump 706 and the 3rd void region 703
The position of three color blockings 803.
Specifically, the 3rd color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
706.Meanwhile, the 3rd color blocking 803 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.By detection the
Whether three color lumps 706 are located at the center of the 3rd void region 703 to check the position of the 3rd color blocking 803.If the 3rd color blocking 803
Position it is accurate, then the 3rd color lump 706 for being formed is just positioned at the center of the 3rd void region 703.
In step S980, mobile color blocking light shield makes alignment mark 604 be alignd with the 4th mark 1001.On color blocking light shield
Alignment mark 604 alignd with the 4th mark 1001, color blocking light shield positioning complete, go to step S990.
In step S990, covered on using color blocking light and the He of the 4th color blocking 1201 as shown in figure 12 is formed in black-matrix layer
4th color lump 1102, and the 4th color blocking 1201 is checked according to the position relationship of the 4th color lump 1102 and the 4th void region 1101
Position.
Specifically, the 4th color lump is formed in black-matrix layer using the contraposition monitoring mark mask pattern on color blocking light shield
1102.Meanwhile, the 4th color blocking 1201 is formed in black-matrix layer using the color blocking mask pattern on color blocking light shield.By detection
Whether the 4th color lump 1102 is located at the center of the 4th void region 1101 to check the position of the 4th color blocking 1201.If the 4th color
The position of resistance 1201 is accurate, then the 4th color lump 1102 for being formed is just positioned at the center of the 4th void region 1101.
In the present embodiment, in the vertical direction is spaced the first distance between the first mark 601 and the second mark 602.The
In the vertical direction interval second distance between one mark 601 and the 3rd mark 603.First mark 601 and the 4th mark 1001
Between in the vertical direction be spaced the 3rd distance.In the vertical direction between first void region 701 and the second void region 702
It is spaced the first distance.In the vertical direction interval second distance between first void region 701 and the 3rd void region 703.The
In the vertical direction is spaced the 3rd distance between one void region 701 and the 4th void region 1101.Importantly, first distance,
Second distance and the 3rd distance are configured to make the first color lump 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102
It is non-overlapping.
When the method for application the present embodiment makes colored color blocking, due to step S920, step S940, step S960 and
In step S980, color blocking light shield is moved successively so that alignment mark 604 respectively with the first mark 601, the second mark the 602, the 3rd
The mark 1001 of mark 603 and the 4th aligns, thus the first color lump 704 for being formed in step S930 in theory with step S950
In the vertical direction is answered to be spaced the first distance between second color lump 705 of middle formation, the first color lump formed in step S930
704 and and step S970 in formed the 3rd color lump 706 between answer in the vertical direction be spaced second distance, in step S930
Formed the first color lump 704 and and step S990 in formed the 4th color lump 1102 between answer in the vertical direction be spaced the 3rd away from
From.By reasonable disposition first apart from, second distance and the size of the 3rd distance, can be on the basis for keeping color lump size constant
On be prevented effectively from the mutually overlapping of the first color lump 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102.
A preferred embodiment of the invention gives the allocation plan for the first distance, second distance and the 3rd distance.
Specifically, first apart from H1Meet：H1=n1*V.Wherein, n1To meet n1>=1 or n1≤ -1 integer, V is sub- picture
The length of element.Second distance H2Meet：H2=n2*V.Wherein, n2It is different from n1And meet n2>=1 or n2≤ -1 integer, V
It is the length of sub-pixel.3rd apart from H3Meet H3=n3*V.Wherein, n3It is different from n1And n2And meet n3>=1 or n3≦-1
Integer, V for sub-pixel length.
It should be noted that working as n1To meet n1>=1 integer, n2It is different from n1And meet n2>=1 integer, and n3
It is different from n1And n2And meet n3During >=1 integer, color blocking light shield is moved down.Work as n1To meet n1≤ -1 integer, n2For not
It is same as n1And meet n2≤ -1 integer, and n3It is different from n1And n2And meet n3During≤- 1 integer, on color blocking light shield
Move.
Specifically, as shown in figure 12, n is taken1=1, n2=2, n3=3, H can be obtained1=V, H2=2*V, H3=3*V.That is, color
After light blocking cover carries out initial contraposition the first color blocking 801 of formation and the first color lump 704, color blocking light shield is moved to the right from initial position
Move to the second mark 602 (equivalent to 1 width of sub-pixel that moves right in the horizontal direction, and in the vertical direction to
1 width of sub-pixel of lower movement) the second color blocking 802 and the second color lump 705 are formed, it is moved to the to the right from initial position
(equivalent to 2 width of sub-pixel that move right in the horizontal direction, and in the vertical direction moves down 2 at three marks 603
The width of individual sub-pixel) the 3rd color blocking 803 and the 3rd color lump 706 are formed, it is moved to the 4th mark to the right from initial position
(move right 3 width of sub-pixel in the horizontal direction, and in the vertical direction moves down 3 sub-pixels at 1001
Width) form the 4th color blocking 1201 and the 4th color lump 1102.First color lump 704 and the second color lump 705 are spaced 1 in the horizontal direction
The width of individual sub-pixel, and in the vertical direction is spaced 1 length of sub-pixel, the first color lump 704 and the 3rd color lump 706 are in water
Square upward 2 width of sub-pixel in interval, and in the vertical direction is spaced 2 length of sub-pixel, the first color lump 704 and the
Four color lumps 1102 are spaced 3 width of sub-pixel in the horizontal direction, and in the vertical direction is spaced 3 length of sub-pixel.
First color lump 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102 are non-overlapping.
It should be noted that the embodiment of the present invention is only carried out to the first mark, the second mark, the 3rd mark and the 4th mark
The improvement of vertical direction.Accordingly, the first color lump 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102 are being carried out
Movement in horizontal direction same as the prior art or similar, goes back in the vertical direction and is moved, so that the first color
Block 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102 are non-overlapping.In other words, the embodiment of the present invention is to first
The distance that color lump 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102 are moved in the horizontal direction is not construed as limiting.
Preferably, the first color blocking 801, the second color blocking 802, the 3rd color blocking 803 and the 4th color blocking 1201 are different, and
One kind respectively in red color resistance, green color blocking, blue color blocking and white color blocking.For example, the first color blocking 801 is red color
Resistance.Second color blocking 802 is green color blocking.3rd color blocking 803 is blue color blocking.4th color blocking 1201 is white color blocking.
Preferably, the first color lump 704, the second color lump 705, the 3rd color lump 706 and the 4th color lump 1102 be located at sub-pixel with
Position between sub-pixel.
Using the preparation method of colored color blocking provided in an embodiment of the present invention, light shield is moved successively makes 604 points of alignment mark
Do not alignd with the first mark 601, the second mark 602, the 3rd mark 603 and the 4th mark 1001, black square will be covered on using light
The first color blocking 801 and the first color lump 704, second color blocking of the second mark 602 of correspondence of the first mark 601 of correspondence are formed on battle array layer
802 and second color lump 705, the 3rd color blocking 803 of the 3rd mark 603 of correspondence and the 3rd color lump 706 and the mark of correspondence the 4th
4th color blocking 1201 and the 4th color lump 1102.Between first mark 601 and the second mark 602 in the vertical direction interval first away from
From in the vertical direction interval second distance between the first mark 601 and the 3rd mark 603, the first mark 601 and the 4th is marked
In the vertical direction is spaced the 3rd distance between 1001.When the first distance, second distance and the 3rd distance are configured to make first
When color lump 704, the second color lump 705, the 3rd color lump 706 and non-overlapping the 4th color lump 1102, color lump size can not changed
On the premise of cause that each color lump is non-overlapping, it is overlapping and there is color lump and peel off risk so as to overcome color lump in the prior art
Defect.
3rd embodiment
It is different from first embodiment, present embodiments provide another configuration side for being directed to the first distance and second distance
Case.
Specifically, first apart from H1Meet：H1=n1*V.Wherein, n1To meet n1>=1 or n1≤ -1 integer, V is sub- picture
The length of element.Second distance H2Meet：H2=n2*V.Wherein, n2Equal to n1, V is the length of sub-pixel.
It should be noted that working as n1To meet n1>=1 integer, and n2Equal to n1When, color blocking light shield is moved down.Work as n1To meet
n1≤ -1 integer, and n2Equal to n1When, moved on color blocking light shield.
Specifically, n is taken1=1, n2=1, H can be obtained1=V, H2=V.That is, color blocking light shield carries out initial contraposition being formed as schemed
After the first color blocking 801 and the first color lump 704 as shown in figure 14 shown in 15, color blocking light shield is moved to the right from initial position
(equivalent to 1 width of sub-pixel that moves right in the horizontal direction, and perpendicular to the second mark 602 as shown in fig. 13 that
Nogata moves down 1 length of sub-pixel upwards) form the second color blocking 802 and as shown in figure 14 second as shown in figure 15
Color lump 705, is moved at the 3rd mark 603 as shown in fig. 13 that (equivalent in the horizontal direction to the right from initial position
Move right 2 width of sub-pixel, and in the vertical direction moves down 1 length of sub-pixel) form as shown in figure 15
The 3rd color blocking 803 and the 3rd color lump 706 as shown in figure 14.First color lump 704 and the second color lump 705 in the horizontal direction between
Every 1 width of sub-pixel, and in the vertical direction is spaced 1 length of sub-pixel, the first color lump 704 and the 3rd color lump 706
2 width of sub-pixel are spaced in the horizontal direction, and in the vertical direction is spaced 1 length of sub-pixel.First color lump
704th, the second color lump 705 and the 3rd color lump 706 are non-overlapping.
Optionally, n can also be taken1=2, n2=2, H can be obtained1=2*V, H2=2*V.So, the first color lump 704 and second
Color lump 705 is spaced 1 width of sub-pixel in the horizontal direction, and in the vertical direction is spaced 2 length of sub-pixel, first
The color lump 706 of color lump 704 and the 3rd is spaced 2 width of sub-pixel in the horizontal direction, and in the vertical direction is spaced 2 sub- pictures
The length of element.As can be seen that the first color lump 704, the second color lump 705 and the 3rd color lump 706 are non-overlapping.
Using the allocation plan in the present embodiment, when the first distance, second distance and the 3rd distance are configured to make first
When color lump 704, the second color lump 705 and non-overlapping the 3rd color lump 706, can be caused on the premise of color lump size is not changed each
Color lump is non-overlapping, and the defect that color lump peels off risk is overlapped and exist so as to overcome color lump in the prior art.
While it is disclosed that implementation method as above, but described content is only to facilitate understanding the present invention and adopting
Implementation method, is not limited to the present invention.Any those skilled in the art to which this invention pertains, are not departing from this
On the premise of the disclosed spirit and scope of invention, any modification and change can be made in the formal and details implemented,
But protection scope of the present invention, must be still defined by the scope of which is defined in the appended claims.
Claims (10)
1. a kind of preparation method of colored color blocking, it is characterised in that including：
Being formed on underlay substrate has the first mark, the second mark, the 3rd mark, the first void region, the second void region
With the black-matrix layer of the 3rd void region；
Mobile light shield, makes the alignment mark and first label alignment on the light shield；The black is covered on using the light
The first color blocking and the first color lump are formed in matrix layer, and according to first color lump and the position relationship of first void region
To check the position of first color blocking；
The movement light shield, makes the alignment mark with second label alignment；The black matrix" is covered on using the light
The second color blocking and the second color lump are formed on layer, and according to the position relationship of second color lump and second void region come core
To the position of second color blocking；
The movement light shield, makes the alignment mark with the 3rd label alignment；The black matrix" is covered on using the light
The 3rd color blocking and the 3rd color lump are formed on layer, and according to the position relationship of the 3rd color lump and the 3rd void region come core
To the position of the 3rd color blocking；
Wherein, in the vertical direction between first/the first void region of mark and/the second void region of the second mark
The first distance is spaced, in side vertically between first/the first void region of mark and/the three void region of the 3rd mark
Second distance is spaced upwards；First distance and second distance are configured to make first color lump, the second color lump and the 3rd
Color lump is non-overlapping.
2. method according to claim 1, it is characterised in that
Described first apart from H1Meet：H1=n1*V；Wherein, n1To meet n1>=1 or n1≤ -1 integer, V is the length of sub-pixel
Degree；
The second distance H2Meet：H2=n2*V；Wherein, n2It is different from n1And meet n2>=1 or n2≤ -1 integer.
3. method according to claim 2, it is characterised in that first mark, the second mark, the 3rd mark, first
Void region, the second void region and the 3rd void region are synchronously formed using same light shield.
4. according to any described method of claims 1 to 3, it is characterised in that first color blocking, the second color blocking and the 3rd color
Resistance is different, and the one kind respectively in red color resistance, green color blocking and blue color blocking.
5. method according to claim 4, it is characterised in that first color lump, the second color lump and the 3rd color lump are located at
Position between sub-pixel and sub-pixel.
6. method according to claim 4, it is characterised in that first mark, the second mark and the 3rd mark are located at
Non-display area.
7. method according to claim 1, it is characterised in that also include：
When the black-matrix layer is formed, also make the black-matrix layer that there is the 4th mark and the 4th void region；
The movement light shield, makes the alignment mark and the 4th label alignment on the light shield；Covered on using the light described
The 4th color blocking and the 4th color lump are formed in black-matrix layer, and according to the 4th color lump and the position of the 4th void region
Relation checks the position of the 4th color blocking；
Wherein, in the vertical direction between first/the first void region of mark and/the four void region of the 4th mark
It is spaced the 3rd distance；First distance, second distance and the 3rd distance be configured to make first color lump, the second color lump,
3rd color lump and the 4th color lump are non-overlapping.
8. method according to claim 7, it is characterised in that
Described first apart from H1Meet：H1=n1*V；Wherein, n1To meet n1>=1 or n1≤ -1 integer, V is the length of sub-pixel
Degree；
The second distance H2Meet：H2=n2*V；Wherein, n2It is different from n1And meet n2>=1 or n2≤ -1 integer；
Described 3rd apart from H3Meet：H3=n3*V；Wherein, n3It is different from n1And n2And meet n3>=1 or n3≤ -1 it is whole
Number.
9. the method according to claim 7 or 8, it is characterised in that first color blocking, the second color blocking, the 3rd color blocking and
4th color blocking is different, and the one kind respectively in red color resistance, green color blocking, blue color blocking and white color blocking.
10. method according to claim 9, it is characterised in that first color lump, the second color lump, the 3rd color lump and
Four color lumps are located at the position between sub-pixel and sub-pixel.
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| WO2018188134A1 (en) * | 2017-04-12 | 2018-10-18 | 深圳市华星光电技术有限公司 | Method for fabricating multi-color color resistor |
| WO2021169047A1 (en) * | 2020-02-27 | 2021-09-02 | 深圳市华星光电半导体显示技术有限公司 | Display panel with high aperture ratio and manufacturing method therefor, and display apparatus |
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |