CN106918380A - A kind of micro- quality detecting method of high sensitivity and portable quality test device - Google Patents
A kind of micro- quality detecting method of high sensitivity and portable quality test device Download PDFInfo
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- G—PHYSICS
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- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/14—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of electrical resistance
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Abstract
The invention discloses a kind of micro- quality detecting method of high sensitivity and portable quality test device, micro- quality detecting method is：A certain CF is detection frequency in certain limit before and after with micro-mass sensor resonant frequency, and the forward and backward micro-mass sensor equivalent circuit impedance differences of load mass are measured in the case where frequency is detected, difference is converted to micro- quality of loading by calculating.The portable quality test device that declines of adopting said method includes micro-mass sensor, signal generating module and impedance read module, and the micro-mass sensor is piezoelectric cantilever sensor.Measuring method of the present invention improves more than 100 times relative to frequency measurement sensitivity; measuring principle is simple; required equipment price is cheap; portability is strong, thus can be widely used for air-borne dust pollution, environmental pollution, harmful influence reveal and the Tiny Mass such as microorganism such as bacterium or virus accurate measurement.
Description
Technical Field
The invention relates to the technical field of portable detection sensors, in particular to a high-sensitivity micro-quality testing method and a portable quality testing device.
Background
The piezoelectric cantilever type micro-mass sensor is a novel sensor integrating excitation and sensing, and is widely applied to the fields of detection and identification of air dust and microbial germs and the like. The piezoelectric cantilever sensor is composed of a piezoelectric film and an elastic element.
At present, the micro-mass measurement is mainly realized by a frequency offset detection method, and the working principle of the method is to convert the micro-mass change absorbed by a detection area into the change of resonance frequency, and deduce the micro-mass change according to the frequency difference before and after the absorption mass, namely Δ m ═ Δ f Me/fn, wherein fn is the structural resonance frequency corresponding to the nth-order mode, Me is the cantilever beam equivalent mass, Δ m is the detected mass, and Δ f is the resonance frequency change. A number of prior art techniques are based on frequency difference methods, for example, US 6389877B 1, WO 2005/043126 a2 domestic patents CN1250156A, CN2011101177772, CN201110216323.0, ZL2013100145951, ZL2013103177028, etc. all identify small masses by measuring the frequency difference of different cantilever structures. In addition, the documents "high modes of vibration in microscopic chemical sensors" and "alternative sound sensitivity improvement sensitivity of residual microscopic chemical sensors" are known from the principle of frequency difference measurement, and frequency difference caused by micro-mass change can be determined only by measuring frequency sweep within a certain range. The small mass is identified by measuring the frequency difference of the higher order vibrational modes. The frequency shift detects the micro-mass. It should be noted that the frequency difference method has obvious disadvantages in practical application, that is, the frequency difference-based micro-mass frequency sweep measurement process depends heavily on an impedance analyzer, the impedance analyzer is expensive, the measurement accuracy is affected by the quality factor and the resolution ratio due to instrument and environmental damping, and the frequency sweep measurement process is complex.
In order to simplify the measurement process and improve the detection sensitivity of micro-mass, a more effective and easier-to-implement micro-mass measurement method is urgently needed to meet the precision measurement requirements of micro-mass such as air dust pollution, environmental pollution, hazardous chemical leakage and microorganisms such as bacteria or viruses.
Disclosure of Invention
Aiming at the defects of the traditional frequency difference type micro-quality detection method, the invention aims to provide a high-sensitivity micro-quality test method which is accurate in detection and convenient to apply.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a high-sensitivity micro-quality test method is characterized in that: the method comprises the following steps of taking a specific frequency in a certain range before and after the resonance frequency of the micro mass sensor as a detection frequency, obtaining the loaded micro mass size through calculation according to the impedance change of the micro mass sensor before and after loading mass, and the steps comprise:
s1, measuring output voltages of the detection circuit before and after mass loading by taking a specific frequency in a certain range before and after the vibration frequency of the micro mass sensor as a detection frequency;
s2, calculating the change of the output voltage, and obtaining the impedance change of the micro mass sensor before and after loading mass through operation processing;
and S3, calculating to obtain the loading mass according to the linear relation between the impedance change of the micro mass sensor and the loading mass under the detection frequency.
Another object of the present invention is to provide a portable micro-mass testing device based on the above-mentioned quality testing method, wherein the micro-mass testing device comprises a micro-mass sensor, a signal generating module, a detecting circuit and an impedance reading module;
the micro mass sensor is a piezoelectric cantilever beam sensor and comprises a fixed block, a cantilever beam connected with the fixed block and a piezoelectric sheet which is stuck on the cantilever beam and has the same width with the cantilever beam, the length of the piezoelectric sheet is less than that of the cantilever beam, the cantilever beam and the piezoelectric sheet are combined to form a cantilever beam and piezoelectric sheet composite section, and the part of the cantilever beam which is not combined with the piezoelectric sheet is a cantilever beam extension section;
the signal generation module comprises a signal generation circuit and a power amplifier, the output end of the power amplifier is connected with a piezoelectric plate outgoing line of the micro mass sensor, and the piezoelectric plate is connected with a resistor R in series and then connected with an additional capacitor CpParallel connection;
the impedance reading module is connected in parallel with an additional capacitor CpTwo ends.
Further, the resonance frequency of each order of the micro mass sensor is
Wherein,obtaining an amplitude function of the composite section of the cantilever beam and the piezoelectric sheet;is an amplitude function of the cantilever beam extension; l1The length of the composite section of the cantilever beam and the piezoelectric sheet is shown; l2The length of the cantilever beam extension segment;m1＝(ρptp+ρnptnp)w；m2＝ρnptnpw；Epis the elastic modulus of the piezoelectric sheet; t is tpIs the thickness of the piezoelectric sheet; rhopIs the density of the piezoelectric sheet; enpIs the modulus of elasticity of the cantilever beam; t is tnpIs the thickness of the cantilever beam; rhonpIs the density of the cantilever beam; and w is the width of the piezoelectric sheet and the cantilever beam.
Further, by adjusting the additional capacitance CpThe adjustment of the device range and the device measurement sensitivity is realized.
Further, the additional capacitance C is adjustedpThe measurement sensitivity of the device for realizing the adjustment is as follows:
wherein R ismIs a piezoelectric cantilever sensor dynamic resistance, CmIs a piezoelectric cantilever sensor dynamic capacitance, LmIs a dynamic inductance, omega, of a piezoelectric cantilever sensornFor frequency of input voltage, CpFor additional capacitance, Δ m is the loading mass.
Compared with the prior art, the invention has the beneficial effects that:
1. from a theoretical point of view, the feasibility of the impedance measurement method is verified, and the sensitivity is improved by more than 100 times compared with that of a frequency measurement method with the same structure.
2. From the perspective of portability, the invention designs a new measuring circuit, changes the complex frequency measurement into simple resistance measurement, and has the advantages of small volume, strong portability and low price of measuring equipment.
3. The invention adjusts the measuring range and the measuring sensitivity of the sensor by a method of adding an external circuit to the piezoelectric cantilever beam sensor in series-parallel connection under the condition of not changing the structure and the size of the sensor.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a flow chart of the quality testing method of the present invention.
FIG. 2 is a structural diagram of a piezoelectric cantilever sensor of the present invention;
FIG. 3 is a schematic diagram of a detection circuit of the portable micro-mass measurement device according to the present invention;
FIG. 4 is a schematic view of a portable micro-mass measuring device according to the present invention;
FIG. 5 is a graph showing the change in impedance of example 1;
FIG. 6 is a graph of a portable micro-mass measuring device showing impedance changes according to example 2;
FIG. 7 is a graph showing the change in impedance of example 3;
the reference numbers illustrate:
1. fixed block, 2, piezoelectric patches, 3, cantilever beam.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
When the sensor inputs the voltage UiFrequency f ofiFor resonant frequency f of each ordernWhen a certain specific frequency in a certain range is nearby, the impedance changes approximately linearly along with the frequency, and the size of the loading mass can be obtained through the impedance change before and after the loading mass.
Based on the principle, the invention provides a high-sensitivity micro-mass testing method which is characterized in that a certain specific frequency in a certain range before and after the resonance frequency of a micro-mass sensor is taken as a detection frequency, the impedance change of an equivalent circuit of the micro-mass sensor before and after mass loading is calculated to obtain the loaded micro-mass, the testing process is shown in figure 1, and the method comprises the following steps:
and S1, measuring the output voltage of the detection circuit before and after the mass loading by taking a certain specific frequency in a certain range before and after the resonance frequency of the micro mass sensor as the detection frequency. The specific detection frequency is generally well debugged before the equipment leaves a factory, and additional frequency modulation work is not needed when the equipment is used. The resonant frequency of the sensor used in this example is:
wherein,obtaining an amplitude function of the composite section of the cantilever beam and the piezoelectric sheet;is an amplitude function of the cantilever beam extension; l1The length of the composite section of the cantilever beam and the piezoelectric sheet is shown; l2The length of the cantilever beam extension segment;m1＝(ρptp+ρnptnp)w；m2＝ρnptnpw；Epis the elastic modulus of the piezoelectric sheet; t is tpIs the thickness of the piezoelectric sheet; rhopIs the density of the piezoelectric sheet; enpIs the modulus of elasticity of the cantilever beam; t is tnpIs the thickness of the cantilever beam; rhonpIs the density of the cantilever beam; and w is the width of the piezoelectric sheet and the cantilever beam.
And S2, calculating the change of the output voltage, and obtaining the impedance difference of the micro-mass sensor before and after mass loading through operation processing.
And S3, calculating to obtain the loading mass according to the linear relation between the impedance and the loading mass under the detection frequency.
The embodiment provides a portable micro-mass testing device based on the quality testing method, and the micro-mass testing device comprises a micro-mass sensor, a signal generating module, a detection circuit and an impedance reading module;
the micro mass sensor is a piezoelectric cantilever sensor, the structure of the piezoelectric cantilever sensor is shown in figure 2, the piezoelectric cantilever sensor comprises a cantilever beam 3 connected to a fixed block 1 and a piezoelectric sheet 2 adhered to the cantilever beam 3, the cantilever beam is made of a high-elasticity material, and the piezoelectric sheet is made into a thin film shape and is tightly adhered to the cantilever beam. The piezoelectric pieces 2 and the cantilever beam 3 are equal in width, the length of each piezoelectric piece 2 is smaller than that of the corresponding cantilever beam 3, the cantilever beams and the piezoelectric pieces are combined to form cantilever beam and piezoelectric piece composite sections, and the parts, not combined with the piezoelectric pieces, of the cantilever beams are cantilever beam extension sections;
the signal generation module comprises a signal generation circuit and a power supply amplifier connected with the signal generation circuit, the output end of the power supply amplifier is connected with a piezoelectric plate outgoing line of the micro mass sensor, and the piezoelectric plate is connected with a resistor R in series and then is connected with an additional capacitor CpParallel connection;
the impedance reading module is connected in parallel with an additional capacitor CpTwo-terminal, b, d two-terminal loadingUi＝uiejωtSinusoidal input voltage of, output voltage U across a, co。
In this embodiment, the total impedance Z of the sensor is measured by using a Wheatstone bridge, and as shown in FIG. 3, the detection circuit is schematically illustrated, and U is loaded at two ends of bdi＝uiejωtAc, output voltage U across aco. When the bridge is balanced, the products of the resistances of the opposite arms of the bridge are equal, i.e. ZR3＝R2R4. When the sensor adsorbs mass delta m, the total impedance is changed, the total impedance of the sensor after the mass is adsorbed is Z', the sensor adsorbs mass delta m, the total impedance is changed delta Z, and the output voltage U is detectedoThe change of (d) results in an impedance change Δ Z ═ Δ UoZ/Ui. Inputting a voltage U according to the impedance change curve of the piezoelectric cantilever beam sensoriFrequency f ofiFor resonant frequency f of each ordernWhen a certain specific frequency in a certain range is nearby, the impedance changes approximately linearly along with the frequency, and the magnitude of the loading mass delta m can be obtained through the impedance change delta Z before and after the loading mass.
The piezoelectric cantilever sensor impedance Z-Re+jXe，
Wherein: reIs a resistance component, XeIs a reactive component.
Fig. 4 is a schematic diagram of the overall structure of the portable micro-mass measuring device.
Further, by adjusting the additional capacitance CpThe adjustment of the device range and the device measurement sensitivity is realized. And when the maximum impedance frequency after the mass is loaded is less than the minimum impedance frequency of the original sensor, the measured mass exceeds the mass measurement range of the sensor. Without changing the dimensions of the sensor structure, as shown in fig. 4, by adjusting the additional capacitance CpThe method associated with the resistor R increases its mass measurement range. Wherein an additional capacitance CpIs an adjustable capacitor.
By adjusting the additional capacitance CpMethod changeA device sensitivity of
Wherein R ismIs a piezoelectric cantilever sensor dynamic resistance, CmIs a piezoelectric cantilever sensor dynamic capacitance, LmIs a dynamic inductance, omega, of a piezoelectric cantilever sensornFor frequency of input voltage, CpFor additional capacitance, Δ m is the loading mass.
The specific embodiment is as follows:
example one
FIG. 5 is a graph showing the variation of the impedance and phase angle with frequency before and after loading the mass of the piezoelectric cantilever sensor in the vicinity of the second-order mode, wherein a specific frequency in the vicinity of the original resonant frequency is used as the detection frequency, and the impedance variation at the frequency before and after loading the mass is measured to obtain the magnitude of the loaded micro-mass6Omega/g, 6.43 × 10 sensitivity for frequency measurement416.2 times of HZ/g.
Example two
The embodiment adopts the adjustment of the size of the additional capacitor to make a new additional capacitor Cp1＝0.5CpThen, the obtained impedance frequency change curve is shown in FIG. 6. before loading mass, the resonance frequency is the detection frequency, near the resonance frequency, the impedance changes approximately linearly with the frequency and gradually decreases, and the loading micro mass size can be obtained through the impedance change before and after loading mass at specific frequency, the impedance difference before and after loading 500 mug mass is 457 omega, the sensitivity is 0.914 × 10 by using the device for measurement6Omega/g is 14.2 times of the measurement sensitivity of the frequency difference method.
EXAMPLE III
The embodiment adopts the adjustment of the size of the additional capacitor to make a new additional capacitor Cp2＝2CpThe impedance frequency curve is then obtained as shown in fig. 7. The measurement range of the piezoelectric cantilever beam sensor is increased after the piezoelectric cantilever beam sensor is connected with the capacitor in parallel, and the frequency f of the turn is increasedturnOn both sides, the impedance changes approximately linearly with frequency, and for example, with the measurement frequency f of 5900HZ, the impedance difference is 1.233 × 10 before and after loading a mass of 500 μ g5Omega, sensitivity 2.5 × 108Ω/g, 3888 times the sensitivity of frequency measurement.
The above three examples were analyzed and obtained by adjusting the additional capacitance CpThe impedance can be linearly changed along with the frequency on both sides of each order of resonant frequency, and the quality measurement range and the measurement sensitivity of the sensor are greatly improved.
The invention introduces the feasibility of the impedance measurement method and provides a specific measurement circuit from the theoretical point of view, and adjusts the measurement range and the measurement sensitivity of the sensor by a method of adding circuits to the sensor in series and in parallel under the condition of not changing the structural size of the sensor.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (5)
1. A high-sensitivity micro-quality test method is characterized in that: the method comprises the following steps of taking a specific frequency in a certain range before and after the resonance frequency of the micro mass sensor as a detection frequency, obtaining the loaded micro mass size through calculation according to the impedance change of the micro mass sensor before and after loading mass, and the steps comprise:
s1, measuring output voltages of the detection circuit before and after mass loading by taking a specific frequency in a certain range before and after the vibration frequency of the micro mass sensor as a detection frequency;
s2, calculating the change of the output voltage, and obtaining the impedance change of the micro mass sensor before and after loading mass through operation processing;
and S3, calculating to obtain the loading mass according to the linear relation between the impedance change of the micro mass sensor and the loading mass under the detection frequency.
2. A portable micro-mass testing device based on the micro-mass testing method of claim 1, characterized in that: the micro-mass sensor comprises a micro-mass sensor, a signal generation module, a detection circuit and an impedance reading module;
the micro mass sensor is a piezoelectric cantilever beam sensor and comprises a fixed block, a cantilever beam connected with the fixed block and a piezoelectric sheet which is stuck on the cantilever beam and has the same width with the cantilever beam, the length of the piezoelectric sheet is less than that of the cantilever beam, the cantilever beam and the piezoelectric sheet are combined to form a cantilever beam and piezoelectric sheet composite section, and the part of the cantilever beam which is not combined with the piezoelectric sheet is a cantilever beam extension section;
the signal generation module comprises a signal generation circuit and a power amplifier, the output end of the power amplifier is connected with a piezoelectric plate outgoing line of the micro mass sensor, and the piezoelectric plate is connected with a resistor R in series and then connected with an additional capacitor CpParallel connection;
the impedance reading module is connected in parallel with an additional capacitor CpTwo ends.
3. The micro mass testing device of claim 2, wherein: the resonance frequency of each order of the micro mass sensor is
Wherein,obtaining an amplitude function of the composite section of the cantilever beam and the piezoelectric sheet;is that it isCantilever beam extension amplitude function; l1The length of the composite section of the cantilever beam and the piezoelectric sheet is shown; l2The length of the cantilever beam extension segment;m1＝(ρptp+ρnptnp)w；m2＝ρnptnpw；Epis the elastic modulus of the piezoelectric sheet; t is tpIs the thickness of the piezoelectric sheet; rhopIs the density of the piezoelectric sheet; enpIs the modulus of elasticity of the cantilever beam; t is tnpIs the thickness of the cantilever beam; rhonpIs the density of the cantilever beam; and w is the width of the piezoelectric sheet and the cantilever beam.
4. The quality test apparatus according to claim 2, wherein: by adjusting the additional capacitance CpThe adjustment of the device range and the device measurement sensitivity is realized.
5. The micro mass testing device of claim 4, wherein: by adjusting the additional capacitance CpThe measurement sensitivity of the device for realizing the adjustment is as follows:
wherein R ismIs a piezoelectric cantilever sensor dynamic resistance, CmIs a piezoelectric cantilever sensor dynamic capacitance, LmIs a dynamic inductance, omega, of a piezoelectric cantilever sensornFor frequency of input voltage, CpThe additional capacitance, Δ m, loads the mass.
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| CN111272193A (en) * | 2020-02-17 | 2020-06-12 | 东南大学 | MEMS gyroscope online frequency difference identification method based on noise power spectrum estimation |
| CN111486931A (en) * | 2020-04-15 | 2020-08-04 | 大连理工大学 | Measuring circuit and device of constant-frequency piezoelectric micro-mass sensor |
| CN112325998A (en) * | 2020-11-05 | 2021-02-05 | 吉林大学 | Trace substance sensor and method based on internal resonance |
| CN108362605B (en) * | 2018-04-28 | 2024-02-02 | 华中科技大学 | Automatic change integrated form air humidity measuring device |
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