CN106911064A - Phase compensation type rastering laser resonator - Google Patents

Phase compensation type rastering laser resonator Download PDF

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CN106911064A
CN106911064A CN201510968814.9A CN201510968814A CN106911064A CN 106911064 A CN106911064 A CN 106911064A CN 201510968814 A CN201510968814 A CN 201510968814A CN 106911064 A CN106911064 A CN 106911064A
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grating
laser
spherical reflector
reflective grating
angle
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CN106911064B (en
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李国富
多丽萍
金玉奇
王增强
王元虎
唐书凯
李留成
于海军
汪健
曹靖
康元福
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Dalian Institute of Chemical Physics of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08004Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • H01S3/08009Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating

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  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
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  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

本发明是一种相位补偿型光栅激光谐振腔,涉及激光光学谐振腔和激光选频技术。本发明的光栅激光谐振腔由凹球面反射镜或者凸球面反射镜,1号光栅和2号光栅和激光输出镜组成。凹球面反射镜、1号光栅、2号光栅和激光输出镜形成激光光轴,光轴与光栅法线的夹角不等于光栅的闪耀角。本发明的光栅激光谐振腔能够解决光栅在非自准直工作情况下引起的激光光斑在光栅衍射方向上改变。适用于二氧化碳激光器和氟化氢激光器等多种可调谐激光器。The invention is a phase compensation type grating laser resonant cavity, which relates to laser optical resonant cavity and laser frequency selection technology. The grating laser resonant cavity of the present invention is composed of a concave spherical reflector or a convex spherical reflector, a No. 1 grating, a No. 2 grating and a laser output mirror. The concave spherical reflector, the No. 1 grating, the No. 2 grating and the laser output mirror form the laser optical axis, and the angle between the optical axis and the grating normal is not equal to the blaze angle of the grating. The grating laser resonant cavity of the invention can solve the problem that the laser spot changes in the diffraction direction of the grating caused by the non-self-collimating operation of the grating. It is suitable for various tunable lasers such as carbon dioxide laser and hydrogen fluoride laser.

Description

相位补偿型光栅激光谐振腔Phase Compensation Grating Laser Resonator

技术领域technical field

本发明涉及激光器技术领域,特别是涉及光栅作为激光选频器件在非自准直情况下的光斑修正。The invention relates to the technical field of lasers, in particular to the light spot correction of a grating as a laser frequency selection device under the condition of non-self-collimation.

背景技术Background technique

光栅具有非常好的色散能力,被广泛应用于光谱仪和激光选频输出中。光栅作为腔镜的一个组成部分,一方面是利用其具有光谱色散的能力,另一方面则是利用其平面反射特点。在一般的实际应用中光栅多以自准直的方式(即:入射光以光栅衍射角的角度入射)与其他的光学元件形成稳定腔或者非稳腔。在某些特殊的激光谐振腔中光栅是以非自准直的方式应用的,相比于自准直方式,这种方式会引起光斑在光栅衍射方向上变大或者变小,如图1(a)、(b)所示,图1(a)为自准直方式,图1(b)为非自准直方式。Gratings have very good dispersion capabilities and are widely used in spectrometers and laser frequency-selective outputs. As an integral part of the cavity mirror, the grating utilizes its spectral dispersion ability on the one hand, and utilizes its planar reflection characteristics on the other hand. In general practical applications, the grating is mostly in a self-collimating manner (that is, the incident light is incident at the angle of the diffraction angle of the grating) and other optical elements to form a stable cavity or an unstable cavity. In some special laser resonators, the grating is applied in a non-self-collimation manner. Compared with the self-collimation method, this method will cause the spot to become larger or smaller in the diffraction direction of the grating, as shown in Figure 1 ( As shown in a) and (b), Figure 1(a) is the self-collimation method, and Figure 1(b) is the non-self-collimation method.

光栅方程为d(sin(β)+sin(θ))=nλ,其中β为入射光与光栅法线的夹角,θ为不同衍射级次和衍射波长的出射角。当n=1且β=θ0时为光栅自准直条件,即入射光以光栅的闪耀角θ0入射,此时光栅的一级主极大闪耀波长为λ。如果光轴与光栅法线的夹角为光栅的闪耀角θ0,则λ即为激光波长。The grating equation is d(sin(β)+sin(θ))=nλ, where β is the angle between the incident light and the grating normal, and θ is the exit angle of different diffraction orders and diffraction wavelengths. When n = 1 and β = θ 0 , it is the grating self-collimation condition, that is, the incident light is incident at the blaze angle θ 0 of the grating, and the first-order main maximum blaze wavelength of the grating is λ at this time. If the angle between the optical axis and the grating normal is the blaze angle θ 0 of the grating, then λ is the laser wavelength.

图1(b)为光栅非自准直稳定腔示意图。当入射光斑的直径为Di,则不同级次出射光斑在衍射方向上的光斑直径为:Figure 1(b) is a schematic diagram of a grating non-self-collimating stable cavity. When the diameter of the incident spot is D i , the spot diameters of the exit spots of different orders in the diffraction direction are:

Do=Di/cos(β)*cos(θ)D o =D i /cos(β)*cos(θ)

出射角θ由光栅方程可以算出,所以出射光斑与入射光斑的直径比为:The exit angle θ can be calculated by the grating equation, so the diameter ratio of the exit spot to the incident spot is:

图4为出射光斑与入射光斑的直径比随入射角度的变化曲线(光栅的衍射角为θ0=30°、n=1、λ/d=1)。由图中可以看出当入射角大于光栅衍射角时,光斑在衍射方向上被放大,当入射角小于光栅衍射角时,光斑在衍射方向山被缩小。Fig. 4 is the variation curve of the diameter ratio of the outgoing light spot to the incident light spot with the incident angle (the diffraction angle of the grating is θ 0 =30°, n=1, λ/d=1). It can be seen from the figure that when the incident angle is larger than the diffraction angle of the grating, the spot is enlarged in the diffraction direction, and when the incident angle is smaller than the diffraction angle of the grating, the spot is reduced in the diffraction direction.

发明内容Contents of the invention

本发明目的在于为此类光栅光学谐振腔提供一种相位补偿及复原光栅衍射方向光斑的一种方法。The purpose of the present invention is to provide a method for phase compensation and restoration of grating diffraction direction light spots for this type of grating optical resonant cavity.

为了实现本发明的目的,具体的技术方案是:In order to realize the purpose of the present invention, concrete technical scheme is:

针对图1(b)的光栅非自准直激光谐振腔,本发明提出的解决方案是,在光栅的出射方向上加入腔内相位补偿光栅,如图2所示。要求相位补偿光栅的闪耀角度、闪耀波长和光栅常数与另外的一块光栅相同。根据光栅方程可以计算出出射光与光栅法线的夹角为θ。要实现相位补偿,相位补偿光栅的入射光角度至关重要,相位补偿光栅的入射光与光栅法线的夹角应为θ。在相位补偿光栅的出射方向安装一块腔镜,用来形成反馈和输出。For the grating non-self-collimating laser resonator in FIG. 1(b), the solution proposed by the present invention is to add an intracavity phase compensation grating in the exit direction of the grating, as shown in FIG. 2 . It is required that the blaze angle, blaze wavelength and grating constant of the phase compensation grating are the same as those of another grating. According to the grating equation, the angle between the outgoing light and the grating normal can be calculated as θ. To achieve phase compensation, the incident light angle of the phase compensation grating is very important, and the angle between the incident light of the phase compensation grating and the normal line of the grating should be θ. A cavity mirror is installed in the output direction of the phase compensation grating to form feedback and output.

本发明的光栅激光谐振腔能够解决光栅在非自准直工作情况下引起的激光光斑在光栅衍射方向上改变。The grating laser resonant cavity of the invention can solve the problem that the laser spot changes in the diffraction direction of the grating caused by the non-self-collimating operation of the grating.

附图说明Description of drawings

图1为单光栅自准直((a))与非自准直稳定腔((b))结构示意图;Figure 1 is a schematic diagram of the structure of a single grating self-collimation ((a)) and a non-self-collimation stable cavity ((b));

图2为本发明结构示意图;Fig. 2 is a structural representation of the present invention;

图中:(1):谐振腔凹球面反射镜,(2):1号光栅,(3):谐振腔输出镜,(4):增益介质,(5):2号光栅;In the figure: (1): Resonator concave spherical mirror, (2): No. 1 grating, (3): Resonator output mirror, (4): Gain medium, (5): No. 2 grating;

图3为本发明的实施例;Fig. 3 is an embodiment of the present invention;

图中:(1):谐振腔凹球面反射镜,(2):1号光栅,(3):谐振腔输出镜(4):增益介质,(5):2号光栅:(6):凸球面反射镜;In the figure: (1): Resonant cavity concave spherical mirror, (2): No. 1 grating, (3): Resonant output mirror, (4): Gain medium, (5): No. 2 grating: (6): Convex spherical reflector;

图4为直径比随入射角度的变化曲线(光栅的衍射角为30°)。Figure 4 is a curve of the diameter ratio with the incident angle (the diffraction angle of the grating is 30°).

具体实施方式detailed description

为进一步说明本发明的特征和结构,以下结合附图对本发明做详细描述。In order to further illustrate the features and structures of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings.

参阅图1(a)为光栅自准直激光谐振腔示意图。谐振腔由凹球面反射镜1和反射式光栅2组成,凹球面镜的法线方向与光栅法线的夹角为光栅的衍射角。当反射式光栅的0级衍射方向的反射率合适时,可以采用在光栅的0级方向作为激光的出光方向。如果光栅的0级衍射方向的反射率不合适,则可以将凹球面反射镜替换为凹球面透射镜,激光从凹球面镜方向输出。为了实现较高的功率输出,采用不同透过率的凹球面透射镜进行实验。Referring to Fig. 1(a) is a schematic diagram of a grating self-collimating laser resonator. The resonant cavity is composed of a concave spherical mirror 1 and a reflective grating 2, and the included angle between the normal direction of the concave spherical mirror and the normal line of the grating is the diffraction angle of the grating. When the reflectivity of the 0th order diffraction direction of the reflective grating is appropriate, the 0th order direction of the grating can be used as the light output direction of the laser. If the reflectivity of the 0th-order diffraction direction of the grating is not suitable, the concave spherical reflector can be replaced by a concave spherical transmission mirror, and the laser is output from the direction of the concave spherical mirror. In order to achieve higher power output, experiments were carried out using concave spherical mirrors with different transmittances.

图1(b)为光栅非自准直激光谐振腔示意图。谐振腔由凹面镜1、反射式光栅2和平面输出镜组成,凹球面镜的法线方向与光栅法线的夹角大于或者小于光栅的衍射角。这种非自准直光栅激光谐振腔的激光输出窗口为平面镜,可以通过变化平面镜的透过率实现最佳的功率输出。Figure 1(b) is a schematic diagram of a grating non-self-collimating laser resonator. The resonant cavity is composed of a concave mirror 1, a reflective grating 2 and a plane output mirror. The angle between the normal direction of the concave spherical mirror and the grating normal is larger or smaller than the diffraction angle of the grating. The laser output window of the non-self-collimating grating laser resonator is a plane mirror, and the best power output can be realized by changing the transmittance of the plane mirror.

图2为本发明的相位补偿光栅激光谐振腔示意图。本发明的激光谐振腔由凹球面反射镜1、1号光栅2、增益介质4、2号光栅5和谐振腔输出镜3(平面输出镜)组成。其中凹球面反射镜法线方向的激光经增益介质放大后,经过1号光栅和2号光栅反射后与谐振腔输出镜的法线重合,部分在谐振腔输出镜表面反射后原路返回形成激光振荡(另一部分透射输出)。在激光谐振腔光腔准直情况下,凹球面反射镜的法线即为谐振腔的光轴,经过1号光栅和2号光栅反射后激光与谐振腔输出镜的法线重合。按照本发明的设计,解决图1(b)中光斑在衍射方向变大的关键在于2号光栅5的设计参数和放置位置参数。2号光栅5与1号光栅2的光栅常数d,闪耀波长λ和闪耀角度θ0完全一致,最佳的情况是两块光栅为同一母版(原刻光栅)复制得到。2号光栅的放置位置位于1号光栅的出射方向且与1号光栅平行,1号光栅的衍射光与光栅法线的夹角即为2号光栅入射光与光栅法线的夹角。Fig. 2 is a schematic diagram of the phase compensation grating laser resonator of the present invention. The laser resonant cavity of the present invention is composed of a concave spherical reflector 1, a No. 1 grating 2, a gain medium 4, a No. 2 grating 5 and a resonant cavity output mirror 3 (plane output mirror). Among them, the laser beam in the normal direction of the concave spherical mirror is amplified by the gain medium, and after being reflected by the No. 1 grating and No. 2 grating, it coincides with the normal of the output mirror of the resonator, and part of it is reflected on the surface of the output mirror of the resonator and returns to the original path to form a laser. Oscillating (another part of the transmitted output). In the case of laser resonator optical cavity collimation, the normal of the concave spherical mirror is the optical axis of the resonator. After being reflected by No. 1 grating and No. 2 grating, the laser coincides with the normal of the output mirror of the resonator. According to the design of the present invention, the key to solving the enlargement of the spot in the diffraction direction in FIG. 1(b) lies in the design parameters and placement position parameters of the No. 2 grating 5 . The grating constant d, blaze wavelength λ, and blaze angle θ 0 of No. 2 grating 5 and No. 1 grating 2 are completely consistent. The best situation is that the two gratings are copied from the same master (original grating). The No. 2 grating is placed in the exit direction of the No. 1 grating and is parallel to the No. 1 grating. The angle between the diffracted light of the No. 1 grating and the normal line of the grating is the angle between the incident light of the No. 2 grating and the normal line of the grating.

图3为本发明的实施例,其中的凸球面反射镜6嵌在平面输出镜(谐振腔输出镜3)上。凹球面反射镜1和凸球面反射镜6表面镀高反膜,这两块反射镜与两块光栅2和5形成虚共焦望远镜腔。谐振腔输出镜3表面镀高透过滤介质膜,激光从此窗口输出空心环状光斑;1号光栅的θ=50度(入射角),θ0=30度(闪耀角度),θ大于θ0Fig. 3 is an embodiment of the present invention, wherein the convex spherical reflector 6 is embedded on the plane output mirror (resonator output mirror 3). The surfaces of the concave spherical reflector 1 and the convex spherical reflector 6 are coated with a high reflection film, and the two reflectors and the two gratings 2 and 5 form a virtual confocal telescope cavity. The surface of resonant cavity output mirror 3 is coated with high-permeability filter medium film, and the laser outputs a hollow ring-shaped spot from this window; θ = 50 degrees (incident angle), θ 0 = 30 degrees (blaze angle) of the No. 1 grating, and θ is greater than θ 0 .

Claims (7)

1.一种相位补偿光栅激光谐振腔,由凹球面反射镜或者凸球面反射镜、1号反射光栅、2号反射光栅和激光输出耦合镜组成,其特征在于:凹球面反射镜或者凸球面反射镜与1号反射光栅分别位于激光器增益介质区左右两侧,2号反射光栅和激光输出耦合镜均置于激光器增益介质区外侧,1号反射光栅与2号反射光栅平行相对设置;凹球面反射镜或者凸球面反射镜与1号反射光栅相对设置;激光输出耦合镜与2号反射光栅相对设置。1. A phase compensation grating laser resonator is made up of concave spherical reflector or convex spherical reflector, No. 1 reflective grating, No. 2 reflective grating and laser output coupling mirror, characterized in that: concave spherical reflector or convex spherical reflector The mirror and No. 1 reflective grating are respectively located on the left and right sides of the laser gain medium area, the No. 2 reflective grating and the laser output coupling mirror are placed outside the laser gain medium area, and the No. 1 reflective grating and No. 2 reflective grating are arranged parallel to each other; The mirror or the convex spherical mirror is arranged opposite to the No. 1 reflection grating; the laser output coupling mirror is arranged opposite to the No. 2 reflection grating. 2.如权利要求1所述的光栅激光谐振腔,其特征在于:凹球面反射镜或者凸球面反射镜、1号反射光栅、2号反射光栅与激光输出耦合镜形成光轴,该光轴与光栅法线之间的夹角大于或小于光栅的衍射角,即两块光栅均为非自准直情况下工作。2. The grating laser resonator as claimed in claim 1, characterized in that: a concave spherical reflector or a convex spherical reflector, No. 1 reflective grating, No. 2 reflective grating and the laser output coupling mirror form an optical axis, and the optical axis and The angle between the normals of the gratings is larger or smaller than the diffraction angle of the gratings, that is, the two gratings work under the condition of non-self-collimation. 3.如权利要求1所述的光栅激光谐振腔,其特征在于:所述1号反射光栅与凹球面反射镜或者凸球面反射镜之间为激光器的激光增益区;1号反射光栅主要作用为激光选频,2号反射光栅主要作用为光斑修正,且1号反射光栅和2号反射光栅的光学参量(光栅常数d,闪耀波长λ和闪耀角度θ0)严格一致。3. The grating laser resonator as claimed in claim 1, characterized in that: between the No. 1 reflective grating and the concave spherical reflector or the convex spherical reflector is the laser gain region of the laser; the No. 1 reflective grating mainly functions as For laser frequency selection, the No. 2 reflective grating is mainly used for spot correction, and the optical parameters (grating constant d, blaze wavelength λ and blaze angle θ 0 ) of No. 1 reflective grating and No. 2 reflective grating are strictly consistent. 4.如权利要求1或3所述的光栅激光谐振腔,其特征在于:所述的2号反射光栅与光轴的夹角是由1号反射光栅与光轴的夹角决定的;如果1号反射光栅的闪耀角度为θ0,凹球面反射镜或者凸球面反射镜反射至1号反射光栅上的入射光与1号反射光栅法线的夹角为β,则1号反射光栅反射至2号反射光栅上的入射光与2号反射光栅法线的夹角应为asin(λ/d-sinβ),光栅常数d,闪耀波长λ。4. The grating laser resonator as claimed in claim 1 or 3, wherein the angle between the No. 2 reflective grating and the optical axis is determined by the angle between the No. 1 reflective grating and the optical axis; if 1 The blaze angle of the No. 1 reflective grating is θ 0 , and the angle between the incident light reflected by the concave spherical reflector or the convex spherical reflector onto the No. 1 reflective grating and the normal line of the No. 1 reflective grating is β, then the No. The included angle between the incident light on No. 2 reflective grating and the normal of No. 2 reflective grating should be asin(λ/d-sinβ), grating constant d, and blaze wavelength λ. 5.如权利要求1所述的光栅激光谐振腔,其特征在于,所述的凹球面反射镜或者凸球面反射镜为镀金或者介质膜的硅基底反射镜,所述的激光输出耦合镜为镀介质膜白宝石或者石英的具有一定透过率的激光输出镜。5. The grating laser resonator as claimed in claim 1, wherein the concave spherical reflector or the convex spherical reflector is a silicon substrate reflector with gold plating or a dielectric film, and the described laser output coupling mirror is plated Laser output mirror with a certain transmittance of dielectric film white sapphire or quartz. 6.如权利要求1所述的光栅激光谐振腔,其特征在于,所述的凹球面反射镜或者凸球面反射镜、1号反射光栅、2号反射光栅和激光输出耦合镜形成激光光轴。6. The grating laser resonator according to claim 1, wherein the concave spherical reflector or the convex spherical reflector, No. 1 reflective grating, No. 2 reflective grating and laser output coupling mirror form a laser optical axis. 7.如权利要求1所述的光栅激光谐振腔,其特征在于,一凸球面反射镜嵌在谐振腔输出镜上;凹球面反射镜(1)和凸球面反射镜表面镀高反膜,这两块反射镜与两块光栅形成虚共焦望远镜腔。7. grating laser resonant cavity as claimed in claim 1, is characterized in that, a convex spherical reflector is embedded on the resonator output mirror; Concave spherical reflector (1) and convex spherical reflector surface are coated with high reflection film, this Two mirrors and two gratings form a virtual confocal telescope cavity.
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CN114089540A (en) * 2022-01-11 2022-02-25 武汉喻湖光电技术有限公司 Thin laser beam regulating and controlling device

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US20080232410A1 (en) * 2007-03-23 2008-09-25 The General Hospital Corporation Methods, arrangements and apparatus for utilizing a wavelength-swept laser using angular scanning and dispersion procedures

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CN1158508A (en) * 1996-12-27 1997-09-03 中国科学院电子学研究所 High power narrow line width regulatable laser
CN2310403Y (en) * 1997-07-09 1999-03-10 浙江大学 High-resolution grating-cavity-selected lasers
US20080232410A1 (en) * 2007-03-23 2008-09-25 The General Hospital Corporation Methods, arrangements and apparatus for utilizing a wavelength-swept laser using angular scanning and dispersion procedures

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* Cited by examiner, † Cited by third party
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CN114089540A (en) * 2022-01-11 2022-02-25 武汉喻湖光电技术有限公司 Thin laser beam regulating and controlling device
CN114089540B (en) * 2022-01-11 2022-04-26 武汉喻湖光电技术有限公司 Thin laser beam regulating and controlling device

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