CN106908834A - Electrochemistry microseism wave detector - Google Patents
Electrochemistry microseism wave detector Download PDFInfo
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- CN106908834A CN106908834A CN201710091426.6A CN201710091426A CN106908834A CN 106908834 A CN106908834 A CN 106908834A CN 201710091426 A CN201710091426 A CN 201710091426A CN 106908834 A CN106908834 A CN 106908834A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V2210/00—Details of seismic processing or analysis
- G01V2210/10—Aspects of acoustic signal generation or detection
- G01V2210/14—Signal detection
- G01V2210/144—Signal detection with functionally associated receivers, e.g. hydrophone and geophone pairs
Abstract
The invention provides a kind of electrochemistry microseism wave detector, including：Inertia pendulum mass, forms electrolysis liquid space, filled with electrolyte in the electrolysis liquid space in it；Sensitive electrode, is fixed in the electrolyte of electrolysis liquid space, for vibration signal to be converted into electric signal using electrochemical principle；Signal processing circuit, its input is electrically connected to sensitive electrode, and the electric signal for sensitive electrode to be exported is processed, and obtains negative-feedback signal；Feedback component, its input is electrically connected to signal processing circuit, for applying the power opposite with external shock input power to inertia pendulum mass using negative-feedback signal, to reduce the displacement that inertia pendulum mass is produced by external shock input power.The present invention expands the purpose of small-sized MEMS electrochemistry microseism wave detector working band to reach by a kind of dynamic balance negative feedback mechanism suitable for small-sized MEMS electrochemistry microseism wave detector.
Description
Technical field
The present invention relates to sensor technical field, more particularly to a kind of electrochemistry based on MEMS Yu dynamic balance feedback technique
Microseism wave detector.
Background technology
Microseism wave detector refers to detecting the sensor of earth shock signal, it can by very it is small not directly
The seismic signal (such as micro-displacement, dead slow speed degree, micro-acceleration physical quantity) of measurement is changed into measurable signal form (such as electricity
Pressure signal, current signal etc.), microseism wave detector plays irreplaceable work in seismic monitoring and field of geophysical exploration
With.
Because seismic signal is passed to after ground by focus, the energy of seismic wave has focused largely on low frequency end and amplitude is non-
Normal is small, so the performance indications such as low frequency sensitivity and low frequency bandwidth to microseism wave detector suffer from demand very high.
In addition to carrying out traditional seismic monitoring and geophysical exploration application, low frequency microseism wave detector is also led at other
Domain has and is more widely applied, such as：The foundation engineering application fields such as ground, roadbed investigation；Rock stratum divides and disease geologic body
Exploration field；The hydraulic and electric engineering Exploration Domains such as dam hidden danger detection, the investigation of hydraulic engineering early stage geological foundation；Science of bridge building is detected
Deng field, require that the low-frequency cut-off frequency of microseism wave detector working band used is generally in these wider fields
More than 0.1Hz.
Nowadays the most frequently used in such applications microseism wave detector is the moving-coil type microseism based on electromagnetic induction principle
Wave detector, this microseism wave detector has the advantages that simple structure, cheap, but the natural frequency of this microseism wave detector
(1Hz-100Hz) higher, causes its low-frequency cut-off frequency also very high, and low frequency sensitivity is low, in order to obtain relatively low nature
Frequency and bandwidth of operation wider, are typically realized by way of increasing the volume of inertial mass body and quality, it is known that
Low-frequency cut-off frequency is 1.45Kg (Chongqing Geological Instrument Factory for the core body quality of the simple component moving-coil type microseism wave detector of 0.1Hz
The EPS series microseisms wave detector of production), the microseism wave detector of this large volume is required for carrying out lock pendulum in transportation, with
Prevent inertial mass body stuck and cause microseism wave detector cisco unity malfunction；Meanwhile, volume can also be improved with the increase of quality
The mechanical noise of moving-coil type microseism wave detector, causes the signal to noise ratio of output signal to decline, dynamic range reduction, is unfavorable for actual answering
With.
In addition to moving-coil type microseism wave detector as described above, also there is electric capacity pendulum-type microseism wave detector in the prior art
With electrochemistry microseism wave detector.
Electric capacity pendulum-type microseism wave detector is used for the monitoring of earthquake, is the most frequently used microseism wave detector of seismograph station, and its is low
Low-frequency cut-off frequency very well, easily can be extended to 0.00167Hz even 0.01Hz, although working band will by frequency performance
Ask and meet application demand of the low-frequency cut-off frequency more than 0.1Hz, but due to its complex structure, cost is too high, can not
The networking measurement of large area can be used for, and be also required to carry out lock pendulum to it in transportation, be inconvenient.
There are the more extensive electrochemistry broadband microseism wave detector of several applications, including Russian R- in the world at present
The CME6211 broadband microseism wave detectors of sensor companies and the BB603 broadband microseism wave detectors of PMD companies of the U.S. are low
Frequency work cut-off frequency can reach 0.0167Hz.But, although its working band is very low, and other performance index are also very superior,
But still can not solve the puzzlement that large volume and weight are brought, every quality of broadband microseism wave detector all in 10kg,
Volume is 5338cm3(parameter after three-component encapsulation), very inconvenient carrying, and because its volume is big, also do not apply to
In the working environment that physical features is complicated.
MEMS (Micro-electro-mechanical Systems, MEMS) is 1980s companion
One gradually grown up with the raising of semiconductor integrated circuit Micrometer-Nanometer Processing Technology and ultraprecise mechanical manufacturing technology
Emerging science.Based on MEMS technology, electrochemistry microseism wave detector is developed.The electrochemistry microseism wave detector is due to the electricity of its uniqueness
Chemical work principle, there is that low frequency sensitivity is high and mechanical noise, and sensor core plate electrode uses MEMS
Technology is fabricated by, and can be mass, low cost and uniformity is good, because its inertial mass body is liquid, without carrying out lock pendulum,
It is easy to operate, show one's talent in numerous microseism wave detectors.
MEMS electrochemistry microseism wave detectors are many to apply in other principles due to using liquid quality block as inertia pendulum mass
Wave detector on frequency band expanding technology can not be employed directly, and small electrical chemistry microseism wave detector in structure with wideband
Band electrochemistry microseism wave detector also has difference, is now accomplished by proposing a kind of new technical scheme, both can guarantee that effective
The working band scope of small-sized MEMS electrochemistry microseism wave detector is expanded, stability and the reduction of wave detector output are can guarantee that again
Linear distortion degree, realizes that small electrical chemistry microseism wave detector can have good output signal in low-frequency range.
For low frequency microseism wave detector, (low-frequency cut-off frequency is more than to be widely applied bandwidth demand in satisfaction
While 0.1Hz), the objective factors such as working environment, cost are also considered, the low frequency microseism wave detector for being minimized
Design has highly important meaning.
Additionally, in terms of frequency band expanding, most of microseism wave detector is all to reach to open up using external signal process circuit
The purpose of spread spectrum band.Frequency band expanding can be carried out using the method for circuit compensation according to the original Frequency Response of sensor
(Zhengyu Zhang, The Study of Bandwidth Expansion Based on Electrochemical
Vibration Sensor), substantially it is the output sensitivity song that microseism wave detector device is compensated using a bandstop filter
Line, allows microseism wave detector to be worked in a frequency band wider by the parameter for adjusting wave filter.But utilize this side
Method can cause the unstable of system expanding frequency band, and output signal can produce dc shift, be needed to use after compensation circuit
The bandpass filter of high-order carrys out filtering process and just can guarantee that its output stability, but can not fundamentally solve the problems, such as drift.
The content of the invention
(1) technical problem to be solved
The invention provides a kind of electrochemistry microseism wave detector based on MEMS Yu dynamic balance feedback technique, with least part of
Solve technical problem set forth above.
(2) technical scheme
Electrochemistry microseism wave detector of the present invention includes：Inertia pendulum mass 20, forms electrolysis liquid space A, the electrolysis liquid air in it
It is interior filled with electrolyte；Sensitive electrode 30, is fixed in the electrolyte of electrolysis liquid space A, for that will be shaken using electrochemical principle
Dynamic signal is converted to electric signal；Signal processing circuit 40, its input is electrically connected to sensitive electrode 30, for by sensitive electrode
The electric signal of output is processed, and obtains negative-feedback signal；Feedback component 50, its input is electrically connected to signal processing circuit
40, for applying the power opposite with external shock input power to inertia pendulum mass 20 using negative-feedback signal, to reduce inertia pendulum mass
20 displacements produced by external shock input power.
Preferably, electrochemistry microseism wave detector of the present invention also includes：Pedestal 10, for supporting inertia pendulum mass 20；Inertia pendulum
Body 20 includes：Shell 21, it is internally formed working space；Upper rubber membrane 22 and lower rubber membrane 23, button is in shell 21 respectively
Above and below portion's working space, and lower rubber membrane 23 is vacantly set in the top of pedestal 10；Wherein, by shell 21, upper rubber
Glued membrane 22 and lower rubber membrane 23 surround electrolysis liquid space A jointly.
Preferably, in electrochemistry microseism wave detector of the present invention, feedback component 50 includes：Support component, is fixed on inertia pendulum
The outside of the top of body 20；Feedback coil 52, is fixed on the inner side of support component, the top of the upper rubber membrane of inertia pendulum mass 20；
The outer surface of rubber membrane 22 is fixed in feedback magnetic 53, its underpart, and its top is near feedback coil or stretches into feedback coil
It is interior；Wherein, the magnetic direction produced when negative-feedback signal is passed through of feedback coil 52 and feedback magnetic 53 magnetic field of itself
In the opposite direction, the power opposite with external shock input power is applied with to inertia pendulum mass 20.
Preferably, in electrochemistry microseism wave detector of the present invention, signal processing circuit 40 includes：Negative-feedback circuit, is parameter
Adjustable active PID regulator, for processing vibration signal, obtains negative-feedback signal；Wherein, it is active by adjusting
The parameter of PID regulator, can adjust negative-feedback signal.
Preferably, in electrochemistry microseism wave detector of the present invention, negative-feedback circuit includes：Operational amplifier, the operation amplifier
Device：Positive input end grounding；Negative-phase input receives vibration signal by first resistor R1, in the both sides of first resistor R1 simultaneously
Join the first electric capacity C1；Output end is connected to the first end of feedback coil 52 by 3rd resistor R3, in the both sides of 3rd resistor R3
The second electric capacity C2 of parallel connection；And the output end of operational amplifier is input into by the negative that second resistance R2 is connected to operational amplifier
End；Wherein, the second end of feedback coil 52 is connected to the ground.
Preferably, in electrochemistry microseism wave detector of the present invention, in negative-feedback circuit：First resistor R1 and second resistance R2 are
Adjustable resistance, the scaling multiple of active PID regulator is can adjust by both；And/or the first electric capacity C1, the second electric capacity C2
It is tunable capacitor, 3rd resistor R3 is adjustable resistance, and the compensation of line phase and amplitude can be entered by three.
Preferably, in electrochemistry microseism wave detector of the present invention, signal processing circuit 40 also includes：Vibration signal treatment electricity
Road, for the electric signal that sensitive electrode 30 is exported to be amplified, reforms and filtered, obtains vibration signal；Wherein, vibrations letter
Number a part after bandpass filtering as the output of electrochemistry microseism wave detector, another part is input into negative-feedback circuit.
Preferably, in electrochemistry microseism wave detector of the present invention, support component includes：At least two support bars 51, are bolted in
The top of shell 21；Wherein, feedback coil 52 is connected at least two support bars 51 in outside, signal transacting electricity by connector
The circuit board on road 40 is fixedly clamped by least two support bars 51.
Preferably, in electrochemistry microseism wave detector of the present invention, support bar 51 is formed by connecting by the metallic rod of some.
Preferably, in electrochemistry microseism wave detector of the present invention, the permanent magnet that feedback magnetic 53 is made for NdFeB material.
Preferably, in electrochemistry microseism wave detector of the present invention, the space inside shell 21 is in the relative double infundibulates of thin portion
Shape；Sensitive electrode is arranged at the thin portion intersection of double funnel shapeds.
Preferably, in electrochemistry microseism wave detector of the present invention, sensitive electrode 30 has the structure of through hole in multilayer, and electrolyte can
Flowed through from through hole；Wherein, after plus bias voltage, electrolyte can occur in the electrode surface of sensitive electrode can for sensitive electrode 30
Inverse redox reaction, to produce corresponding electric signal, when sensitive electrode receives vibration signal, inertia pendulum mass 20 with it is sensitive
Electrode 30 carries out relative motion, and the electric signal of sensitive electrode output can change, the amplitude of the electric signal and vibration signal with
And frequency is proportional.
(3) beneficial effect
From above-mentioned technical proposal as can be seen that electrochemistry microseism wave detector of the present invention at least has the advantages that wherein
One of：
(1) volume of inertia pendulum mass also keeps very little with quality, can make the more convenient carrying of wave detector, reduces actual survey
Complexity during amount work, while better than the most frequently used at present in the combination properties such as working band, sensitivity and noise
Moving-coil type microseism wave detector；
(2) by dynamic balance feedback mechanism, reduce making a concerted effort suffered by inertia pendulum mass, receive the range of movement of inertia pendulum mass
To limitation, so as to effectively increase the upper limit of the electrochemistry measurable signal of microseism wave detector, the work model of wave detector is expanded
Enclose；
(3) by dynamic balance feedback mechanism, the amplitude that inertia pendulum mass deviates equilbrium position diminishes, and improves electrochemistry microseism
The linearity of detector system and efficiently reduce amplitude distortion；
(4) by dynamic balance feedback mechanism, system is turned into closed loop, increase electrochemistry microseism geophone output signal phase
The linearity of position change is interval, reduces phase distortion；
(5) employ dynamic balance feedback to be combined to expand frequency band with compensation mechanism, ensure stable output signal
On the basis of, the effect for expanding frequency band well is obtained, by changing the parameter of compensation tache and feedback element, can be in 0.1Hz-
Come voluntarily to adjust frequency band as needed in the range of 50Hz；
(6) feedback circuit processes vibration signal using active PID regulator, is caused with phase compensation by amplitude compensation
Closed-loop system has enough magnitude margin and phase margins, so as to ensure that system is more stablized；
(7) optimization of feedback arrangement so that the mechanical noise of small-sized MEMS electrochemistry microseism wave detector reduces, exports noise
Than increasing.The interference of other dimensions being mixed with geophone output signal is eliminated, the distortion factor of output signal is improve.
Brief description of the drawings
Fig. 1 is the structural representation according to embodiment of the present invention electrochemistry microseism wave detector.
Fig. 2 is the circuit diagram of negative-feedback circuit in signal processing circuit in electrochemistry microseism wave detector shown in Fig. 1.
Open loops and Closed loop operation theory diagram of the Fig. 3 for electrochemistry microseism wave detector shown in Fig. 1.
【Accompanying drawing main element symbol description】
10- pedestals；
11- supporting parts；
20- inertia pendulum masses；
21- shells；The upper rubber membranes of 22-；Rubber membrane under 23-；
A- is electrolysed liquid space；
30- sensitive electrodes；
31st, 32- holding wires；
40- signal processing circuits；
50- feedback components；
51 support bars；52 feedback coils；53 feedback magnetics.
Specific embodiment
The present invention is on the basis of MEMS electrochemistry microseism wave detectors, mutually to be tied with mechanical structure by signal processing circuit
The mode of conjunction, with control system principle, a kind of dynamic balance suitable for small-sized MEMS electrochemistry microseism wave detector of proposition is born
Feedback mechanism, the purpose of small-sized MEMS electrochemistry microseism wave detector working band is expanded to reach.
In one exemplary embodiment of the present invention, there is provided a kind of electrochemistry microseism wave detector.Fig. 1 is according to this hair
The structural representation of bright embodiment electrochemistry microseism wave detector.As shown in figure 1, the present embodiment microseism wave detector includes：
Pedestal 10；
Inertia pendulum mass 20, is supported on pedestal 10, and electrolysis liquid space A is formed in it, and electricity is filled with the electrolysis liquid space
Solution liquid；
Sensitive electrode 30, it is fixed in the electrolyte of the electrolysis liquid space, for that will be shaken using electrochemical principle
Signal is converted to electric signal；
Signal processing circuit 40, its input is connected to sensitive electrode, and the electric signal for sensitive electrode to be exported is carried out
Treatment, obtains output signal and negative-feedback signal, wherein, output signal is exported by its microseismic signals output end, negative-feedback signal
Exported by negative-feedback signal output end；
Feedback component 50, its input is connected to the negative-feedback signal output end of the signal processing circuit, for utilizing
Negative-feedback signal applies the power opposite with external shock input power to inertia pendulum mass, to reduce inertia pendulum mass because external shock is input into
Power and the displacement that produces.
Each part to the present embodiment electrochemistry microseism wave detector is described in detail below.
Fig. 1 is refer to, pedestal 10 is used to support the grade part of inertia pendulum mass 20.Wherein, the supporting part 11 on the top of pedestal 10 is in
Annular shape with certain altitude, supports the outer rim of inertia pendulum mass 20, and makes the center section of the bottom of inertia pendulum mass 20 hanging.
Fig. 1 is continued referring to, in the present embodiment, inertia pendulum mass 20 is supported on pedestal 10, including：Shell 21, in cylinder
Shape structure, the relative double funnel spaces of thin portion are internally formed at it；Upper rubber membrane 22 and lower rubber membrane 23, button is located at shell respectively
Above and below 21 double funnel spaces, and lower rubber membrane 23 is vacantly set in the top of pedestal 10.Wherein, by shell 21,
Upper rubber membrane 22 and lower rubber membrane 23 surround electrolysis liquid space A jointly.Electrolyte is filled with electrolysis liquid space A.
In the present embodiment, electrolyte is the mixed solution of KI and elemental iodine.It will be apparent to those skilled in the art that removing
Outside above-mentioned mixed solution, other mixed electrolytic solution solution that Reversible redox reaction can occur be equally applicable to
In the present invention.
Equally, in above-mentioned inertia pendulum mass 20, electrolysis liquid space A can also be other shapes well-known to those skilled in the art
The space of shape, has no effect on realization of the invention.Also, upper rubber membrane and lower rubber membrane can also be resilient using other tools
Film material is made.Additionally, in the present embodiment, shell 21 is glass shell, and it can equally be prepared by other materials.In order to just
In observation, shell is preferably and is prepared using transparent material.
In the present embodiment, electrolysis liquid space A is set to double funnel shapeds, its one side opening portion is larger, increased
The area contacted with upper (lower) rubber membrane, improves feedback efficiency；On the other hand, intermediate portion is smaller, so as to accommodate electrolysis
The space of liquid is smaller.The electrolyte for being accommodated seldom, causes the quality very little of inertia pendulum mass.So the present embodiment electrochemistry microseism
The natural frequency of wave detector is (16Hz) higher, and initialization frequency band is 7Hz-25Hz, and high band and low-frequency range are all especially suitable for root
Expanded according to needing.
Fig. 1 is continued referring to, in the thin portion intersection of double funnels in double funnel spaces of shell 11, sensitive electrode is provided with
30.The sensitive electrode 30 has the structure of through hole in multilayer, and electrolyte can flow through from through hole.Two letters are drawn by sensitive electrode 30
Number line (31,32), is connected to the input of signal processing circuit 40.
In the present embodiment, sensitive electrode 30 includes：Substrate and at least two electrodes, wherein, substrate is made up of silicon or SOI,
Electrode is made up of metallic conductor or grapheme material.
After plus bias voltage, electrolyte can occur reversible oxidation also to sensitive electrode 30 in the electrode surface of sensitive electrode
Original reaction, to produce corresponding electric signal.When sensitive electrode receives vibration signal, inertia pendulum mass 20 enters with sensitive electrode 30
Row relative motion, the electric signal of sensitive electrode output can change, the amplitude and frequency of the electric signal and vibration signal into
Ratio.
In the top of inertia pendulum mass 20, feedback component 50 is provided with.Fig. 1 is continued referring to, feedback component includes：At least two
Root support bar 51, is fixed on the outside of the top of inertia pendulum mass；Feedback coil 52, is fixed on the interior of above-mentioned at least two support bars
Side, the top of the upper rubber membrane of inertia pendulum mass；The outer surface of rubber membrane 22 is fixed in feedback magnetic 53, its underpart, thereon
Portion is near feedback coil or stretches into above-mentioned feedback coil.Wherein, the magnetic field side produced when electric current is passed through of feedback coil 52
To opposite with the magnetic direction of feedback magnetic 53 itself.That is, two N poles (or S poles) of magnet and feedback coil
Relatively, so can just make the direction of feedback force in opposite direction with vibration signal, form negative-feedback.If two N poles (or S
Pole) it is not relative, positive feedback will be formed, cause the resonance of closed-loop system.
In the present embodiment, feedback magnetic 53 is the permanent magnet that neodymium iron boron or other magnetic materials are made.Need especially note
Meaning, is feedback magnetic, is fixed on upper rubber membrane rather than feedback coil.Because the quality for feeding back magnetic is small, can
Further to reduce the quality of inertia pendulum mass, to increase the natural frequency of electrochemistry microseism wave detector.
In the present embodiment, feedback magnetic is directly connected with upper rubber membrane, and feedback coil is connected with support bar, it is not necessary to wide
Copper frame in frequency band electrochemistry microseism wave detector is used as point of contact.Such design makes inertial mass body more stablize, Bu Huifa
The harmonic wave that life causes because inertial mass body has the swing or torsion of other dimensions is disturbed.Therefore, compared to prior art
Broadband electrochemistry microseism wave detector for, the distortion factor of the present embodiment electrochemistry microseism geophone output signal is lower.
In the present embodiment, the quality of inertial mass body is reduced by many kinds of measures, therefore in electrochemistry microseism wave detector
Bottom no longer need rigidity spring to support gravity, without rigidity spring unstable vibrations interference so that electrochemistry is micro-
The noise for shaking wave detector is lower, and low frequency sensitivity is higher, and output signal-noise ratio is higher.Meanwhile, reducing rigidity spring makes electrification
The exponent number for learning microseism wave detector transmission function reduces, and the excellent of systematic parameter is more beneficial for while improving closed-loop system stability
Change.
Summary advantage, the volume of the present embodiment electrochemistry microseism wave detector is smaller with weight, is more suitable for big face
Product networking detection and the detection environment of complexity, reduce engineering difficulty.
In the present embodiment, feedback component has four support bars.The screw thread that each support bar passes through bottom, is screw-coupled to out
In the screw of the upper outer of shell 21.The bottom of feedback coil 52 extends laterally, is fixed on four support bars.Also
It is to say, feedback coil 52 is constant relative to the position of support bar and shell.
It should be noted that each support bar is all made up of the small metallic rod connection of three sections, at the two ends of small metallic rod
There are screw thread and screwed hole respectively, every two trifle can be combined.The lower end of support bar is mutually solid with the screwed hole of upper surface of outer cover
It is fixed；Feedback coil is fixedly clamped by the small metallic rod in outside；The circuit board of signal processing circuit is also by the two small metallic rods of section
It is fixedly clamped.So support bar, feedback coil, shell, circuit board just constitute an entirety.
Fig. 1 is continued referring to, in the top of feedback component 50, wiring board 41 is fixed with by four support bars.Signal transacting
Circuit 40 is arranged on the wiring board.The signal processing circuit 40 includes：Vibration signal process circuit and negative-feedback circuit.
Wherein, vibration signal process circuit is amplified, reforms and filters to the electric signal that sensitive electrode is exported, and is shaken
Dynamic signal.A part for the vibration signal is after bandpass filtering as the output of electrochemistry microseism wave detector, another part input
To negative-feedback circuit.Negative-feedback circuit is processed using the vibration signal that vibration signal process circuit is exported, and obtains negative-feedback
Signal simultaneously outputs this to feedback component.
On vibration signal process circuit, no longer describe in detail herein.On negative-feedback circuit, once carry out specifically
It is bright.
Fig. 2 is the circuit diagram of negative-feedback circuit in signal processing circuit in electrochemistry microseism wave detector shown in Fig. 1.Such as Fig. 2
Shown, the negative-feedback circuit is that PID adjusts circuit (PID).The PID adjusts circuit and is believed according to input
Number frequency-amplitude and frequency-phase characteristic, adjust circuit parameter, and then adjust closed-loop system phase margin and width
Value nargin, so as to reduce the resonance that negative-feedback circuit causes.Specifically, the negative-feedback circuit is by operational amplifier OP and many
The active PID regulator that individual resistance and electric capacity are constituted, by adjusting the parameter of active PID regulator, can adjust negative-feedback signal
Output, and then adjust the negative-feedback parameter of feedback component, further the vibration signal of regulation electrochemistry microseism wave detector output.
Wherein：
The negative-phase input of operational amplifier OP is connected to vibration signal process circuit by first resistor R1, receives vibrations
The electric signal of signal processing circuit output, in the first electric capacity C1 of both sides parallel connection of first resistor R1；
The positive input end grounding of operational amplifier OP；
The output end of operational amplifier OP is connected to first of the feedback coil 52 in feedback component by 3rd resistor R3
End, in the second electric capacity C2 of both sides parallel connection of 3rd resistor R3；And the output end of operational amplifier OP is connected by second resistance R2
To the negative-phase input of operational amplifier OP；
The positive supply voltage incoming end of operational amplifier OP is connected to positive voltage VSS=+12V, and by the 33rd electricity
Hold C33 ground connection；Negative supply voltage incoming end is connected to negative voltage VCC=-12V, and is grounded by the 36th electric capacity C36.
Match with foregoing circuit, the second end of feedback coil 52 is connected to the ground.Feedback coil P8 is the line of copper wire winding
Circle, its D.C. resistance is 240 ohm.First resistor R1 and second resistance R2 can adjust the scaling of active PID regulator
Multiple, differentiation element (the first electric capacity C1 with operational amplifier OP constitute) and integral element (the second electric capacity C2,3rd resistor R3,
Coil equivalent resistance is constituted) compensation of line phase and amplitude can be entered.33rd electric capacity C33 and the 36th electric capacity C36 are
The decoupling capacitor of operational amplifier OP.The closed loop output band that the resistance capacitance parameter marked in figure is formed is 0.1-50Hz,
Changing the value of parameter just can as needed carry out the regulation of frequency band.
In the present embodiment electrochemistry microseism wave detector, negative-feedback circuit increased PID regulator, improve closed-loop system
Magnitude margin and phase margin, make the resonant frequency point caused by negative-feedback to high-frequency mobile, so as to increased output signal
Stability.
Open loops and Closed loop operation theory diagram of the Fig. 3 for electrochemistry microseism wave detector shown in Fig. 1.Fig. 3 is refer to, closed loop is returned
In the block diagram of road, vibration signal increase when, the size of negative feedback force can also increase, but direction with vibration signal conversely, ultimately resulting in
The displacement of coasting body diminishes.
The operation principle of the electrochemistry microseism wave detector is introduced referring to Fig. 3：
(1) first, inertia pendulum mass 20 detects exterior vibration signal, is changed by electrochemical principle by sensitive electrode 30
It is output current signal, then original output voltage signal is obtained by vibration signal process circuit.Now voltage output signal
Working band be 1Hz-30Hz, output signal is flat for input speed in working band, but output signal has drift.
(2) voltage output signal in step 1 is by negative-feedback circuit, obtains negative-feedback signal, negative-feedback signal via
Feedback coil 52 obtains feedback current, and according to electromagnetic induction principle, feedback current is to the feedback magnetic 53 in feedback coil 52
Apply the power in opposite direction with input vibration signal.
(3) negative-feedback circuit in step 2 is that PID adjusts circuit (PID), the frequency according to input signal-
Amplitude and frequency-phase characteristic, regulation circuit parameter, and then the phase margin and magnitude margin of closed-loop system are adjusted, from
And reduce the resonance that negative-feedback circuit causes, system is exported stabilization.
(4) negative feedback force is superimposed with the power that vibration signal is input into, as finally making a concerted effort suffered by wave detector, force action
Formed on inertia pendulum mass and close input acceleration and close input speed.
(5) size of feedback force is directly proportional and in the opposite direction, makes inertia pendulum mass moveable to the size of vibrations input power
Displacement diminishes, and effectively increases the dynamic range of wave detector work, the signal output stablized.
(6) expansion of output signal frequency band can make output frequently by the regulation of negative-feedback circuit by the regulation of parameter
Band meets requirement of engineering.
(core body quality is 95g to the present embodiment electrochemistry microseism wave detector, and transverse width is in addition to volume and weight diminish
5cm, longitudinal direction height is 8cm, and volume is 157cm3), also design micro- to optimize electrochemistry by changing dynamic balance negative feedback structure
Shake the other performance index of wave detector.The natural frequency of small-sized MEMS electrochemistry microseism wave detector is 16Hz, original work 3dB bands
A width of 7Hz-25Hz, is expanded to 0.1Hz-50Hz original working band by dynamic balance negative-feedback technology, is widening work
The performance parameters such as dynamic range, the linearity, the distortion factor, the stability of system are also greatly improved while frequency band, are solved
The problem that application demand can not get both with work degree of convenience.
So far, combined accompanying drawing has been described in detail to the embodiment of the present invention.According to above description, art technology
Personnel should have to electrochemistry microseism wave detector of the present invention and clearly recognize.
It should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.Additionally, the above-mentioned definition to each element and method is simultaneously
Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it
Singly change or replace, for example：
(1) in lucite shell working space shape can for cylinder, funnel or other can pass fluid through
The working space of shape；
(2) distribution in runner hole is not limited to a kind of mode in porous electrode, and the parameter such as size, number according to hole is all
The output characteristics of wave detector can be adjusted；
(3) joint number of support bar can be adjusted as needed, and in addition to support bar, can also use other
The support member of type, for example, cylindric support member；
(4) negative-feedback circuit can also have other.
In sum, it is of the invention on the basis of existing electrochemistry microseism wave detector, by signal processing circuit and machinery
The mode that structure is combined, with control system principle, a kind of novel electrochemistry microseism wave detector of proposition, to reach expansion
The purpose of small-sized MEMS electrochemistry microseism wave detector working band, with preferable application prospect.
Also, it should be noted that the demonstration of the parameter comprising particular value can be provided herein, but these parameters are without definite etc.
In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment
To term, for example " on ", D score, "front", "rear", "left", "right" etc., be only the direction of refer to the attached drawing, not for limiting this
The protection domain of invention.Additionally, unless specifically described or the step of must sequentially occur, the order of above-mentioned steps has no and is limited to
It is listed above, and can change or rearrange according to required design.And above-described embodiment can be based on design and reliability
Consider, be mixed with each other collocation using or used with other embodiment mix and match, i.e., the technical characteristic in different embodiments can be with
Freely form more embodiments.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, should be understood that and the foregoing is only specific embodiment of the invention, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in guarantor of the invention
Within the scope of shield.
Claims (12)
1. a kind of electrochemistry microseism wave detector, it is characterised in that including：
Inertia pendulum mass (20), forms in electrolysis liquid space (A), the electrolysis liquid space filled with electrolyte in it；
Sensitive electrode (30), is fixed in the electrolyte of electrolysis liquid space (A), believes for will be shaken using electrochemical principle
Number be converted to electric signal；
Signal processing circuit (40), its input is electrically connected to sensitive electrode (30), for export the sensitive electrode
Electric signal is processed, and obtains negative-feedback signal；
Feedback component (50), its input is electrically connected to the signal processing circuit (40), for using negative-feedback letter
Number apply the power opposite with external shock input power to the inertia pendulum mass (20), to reduce the inertia pendulum mass (20) because of the external world
The displacement for shaking input power and producing.
2. electrochemistry microseism wave detector according to claim 1, it is characterised in that also include：Pedestal (10), for supporting
The inertia pendulum mass (20)；The inertia pendulum mass (20) includes：
Shell (21), it is internally formed working space；
Upper rubber membrane (22) and lower rubber membrane (23), detain located at the top of the shell (21) internal working volume with respectively
Side, and the lower rubber membrane (23) vacantly sets in the top of the pedestal (10)；
Wherein, electrolysis liquid space (A) is surrounded by the shell (21), upper rubber membrane (22) and lower rubber membrane (23) jointly.
3. electrochemistry microseism wave detector according to claim 2, it is characterised in that the feedback component (50) includes：
Support component, is fixed on the outside of the top of the inertia pendulum mass (20)；
Feedback coil (52), is fixed on the inner side of the support component, the top of the upper rubber membrane of the inertia pendulum mass (20)；
The outer surface of the upper rubber membrane (22) is fixed in feedback magnetic (53), its underpart, and its top is near the feedback line
Enclose or stretch into the feedback coil；
Wherein, the feedback coil (52) magnetic direction produced when the negative-feedback signal is passed through and the feedback magnetic
The magnetic direction of body (53) itself with to the inertia pendulum mass (20) conversely, apply the power opposite with external shock input power.
4. electrochemistry microseism wave detector according to claim 3, it is characterised in that signal processing circuit (40) bag
Include：
Negative-feedback circuit, is the active PID regulator of Parameter adjustable, for processing vibration signal, obtains negative-feedback letter
Number；
Wherein, by adjusting the parameter of the active PID regulator, can adjust the negative-feedback signal.
5. electrochemistry microseism wave detector according to claim 4, it is characterised in that the negative-feedback circuit includes：Computing
Amplifier, the operational amplifier：
Positive input end grounding；
Negative-phase input receives vibration signal by first resistor (R1), in first electric capacity of both sides parallel connection of first resistor (R1)
(C1)；
Output end is connected to the first end of feedback coil (52) by 3rd resistor (R3), in parallel in the both sides of 3rd resistor (R3)
Second electric capacity (C2)；And the output end of operational amplifier is input into by the negative that second resistance (R2) is connected to operational amplifier
End；
Wherein, the second end of the feedback coil (52) is connected to the ground.
6. electrochemistry microseism wave detector according to claim 5, it is characterised in that in the negative-feedback circuit：
The first resistor (R1) and second resistance (R2) are adjustable resistance, and the ratio of active PID regulator is can adjust by both
Example multiplication factor；And/or
First electric capacity (C1), the second electric capacity (C2) are tunable capacitor, and the 3rd resistor (R3) is adjustable resistance, by three
Person can enter the compensation of line phase and amplitude.
7. electrochemistry microseism wave detector according to claim 4, it is characterised in that signal processing circuit (40) bag
Include：
Vibration signal process circuit, for the electric signal that the sensitive electrode (30) is exported to be amplified, reforms and filtered, obtains
To vibration signal；
Wherein, a part for the vibration signal is as the output of electrochemistry microseism wave detector after bandpass filtering, and another part is defeated
Enter to negative-feedback circuit.
8. electrochemistry microseism wave detector according to claim 3, it is characterised in that the support component includes：
At least two support bars (51), are bolted in the top of the shell (21)；
Wherein, the feedback coil (52) is connected at least two support bars (51), the letter described in outside by connector
The circuit board of number process circuit (40) passes through at least two support bars (51) and is fixedly clamped.
9. electrochemistry microseism wave detector according to claim 8, it is characterised in that the support bar (51) is by some
Metallic rod is formed by connecting.
10. electrochemistry microseism wave detector according to claim 3, it is characterised in that the feedback magnetic (53) is neodymium
The permanent magnet that iron boron material is made.
11. electrochemistry microseism wave detectors according to claim 2, it is characterised in that the internal space of the shell (21)
In the relative double funnel shapeds of thin portion；The sensitive electrode is arranged at the thin portion intersection of double funnel shapeds.
The 12. electrochemistry microseism wave detector according to any one of claim 1 to 11, it is characterised in that the sensitive electrical
Pole (30) has the structure of through hole in multilayer, and electrolyte can flow through from through hole；
Wherein, the sensitive electrode (30) is after plus bias voltage, and electrolyte can occur in the electrode surface of sensitive electrode can
Inverse redox reaction, to produce corresponding electric signal, when sensitive electrode receives vibration signal, the inertia pendulum mass (20)
Relative motion is carried out with sensitive electrode (30), the electric signal of sensitive electrode output can change, the electric signal and vibration signal
Amplitude and frequency it is proportional.
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| CN107367771A (en) * | 2017-07-11 | 2017-11-21 | 中国科学院电子学研究所 | Electrochemistry geophone sensitive electrode and preparation method thereof |
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| CN113654644B (en) * | 2021-08-25 | 2023-01-24 | 中国科学院空天信息创新研究院 | Sensitive device and electrochemical vector hydrophone |
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